CN206095168U - Three -dimensional laser scanning gauge head unit - Google Patents
Three -dimensional laser scanning gauge head unit Download PDFInfo
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- CN206095168U CN206095168U CN201621109928.4U CN201621109928U CN206095168U CN 206095168 U CN206095168 U CN 206095168U CN 201621109928 U CN201621109928 U CN 201621109928U CN 206095168 U CN206095168 U CN 206095168U
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- laser
- photodetector
- laser beam
- support base
- measuring staff
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Abstract
The utility model relates to a three -dimensional laser scanning gauge head unit, including the first laser source that is used for launching first laser beam for with first sharp light beam reflection to the laser reflection plane who surveys the ball, and will survey the laser beam transmission of the laser reflection plane reflection of ball to 1 the 1st photoelectric detector's spectroscope, and according to the position change value of the received of photoelectric detector institute laser beam, obtain the treater of the displacement value of measuring staff, be used for measuring survey ball three -dimensional displacement's measurement element, measurement element include the measuring staff with survey the ball. The embodiment of the utility model provides a three -dimensional laser scanning gauge head unit not only can measure the direct displacement of supporting seat, and consequently the deformation that can also measure the measuring staff is compared with traditional three -dimensional gauge head unit, the embodiment of the utility model provides a three -dimensional laser scanning gauge head unit's measurement accuracy is higher, and simple structure, and easily batch production is with low costs.
Description
Technical field
This utility model is related to Technology of Precision Measurement field, more particularly to a kind of 3 D laser scanning testing head device.
Background technology
Gauge head is one of critical component of precision measurement instrument, provides the geometric position information of measured workpiece as sensor, is surveyed
The level of development of head directly affects the certainty of measurement and measurement efficiency of precision measurement instrument.Precision feeler is generally divided into contact measuring head
First two is surveyed with contactless, wherein contact measuring head is divided into mechanical type gauge head, touch trigger probe and scanning probe again.
, because being manual measurement, and precision is not high, measurement efficiency is low, therefore is currently rarely used for Industrial Measurement for mechanical type gauge head
Amount field.The widely used precision feeler in current industrial field is touch trigger probe, and its principle is to survey end and tested work when gauge head
When part is contacted, precision measurement instrument sends sampling pulse signal, and the coordinate figure for now surveying the end centre of sphere is latched by the processor of instrument,
The coordinate for surveying end and measured workpiece contact point is determined with this.Such gauge head has simple structure, easy to use, and higher triggering
The advantages of precision, which has the disadvantage there is anisotropy (triangle effect), or contact measuring head contact measured workpiece when because
Resistance and produce micro-displacement so as to cause the offset deviation of gauge head, limit the further raising of its certainty of measurement, it is most high-precision
Degree can only reach several microns of zero point.The most wide gauge head type of current application is scanning probe, and its principle is that gauge head surveys end in contact
After measured workpiece, gauge head is subjected to displacement due to the effect of contact force, the minor shifts of the output of the conversion equipment of gauge head and measuring staff into
The respective coordinate value superposition of the signal of direct ratio, the signal and precision measurement instrument is just obtained the relatively accurate coordinates put on measured workpiece.
If not considering the deformation of measuring staff, scanning probe is isotropic, therefore its precision is significantly larger than touch trigger probe.But, survey
The deformation of bar is objective reality, and current gauge head only accounts for the direct displacement for surveying ball, and does not consider the deformation of measuring staff, because
This, even the precision of scanning probe is also not high enough.Additionally, scanning probe also has complex structure, manufacturing cost height etc.
Shortcoming.
Utility model content
The purpose of this utility model is that the certainty of measurement improved in the presence of prior art is not high, and cannot measure measuring staff
A kind of deficiency of deflection, there is provided 3 D laser scanning testing head device for improving certainty of measurement.
In order to realize above-mentioned utility model purpose, this utility model embodiment provides technical scheme below：
A kind of 3 D laser scanning testing head device, it is including for measuring the measurement assembly of measuring staff three-D displacement change, described
Measurement assembly includes the measuring staff and survey ball,
The measuring staff is hollow measuring staff, and the survey ball is arranged at one end of the hollow measuring staff, and the survey ball with it is described
The sphere of hollow measuring staff connection is provided with laser-bounce plane, and the laser-bounce plane of the survey ball is located at the hollow measuring staff
It is internal；The 3 D laser scanning testing head device also includes：
First laser source, for launching first laser beam；
Spectroscope, is obliquely installed in the other end of the hollow measuring staff, for the first laser source is launched first
Laser beam reflex to it is described survey ball laser-bounce plane, and by it is described survey ball laser-bounce plane reflection laser beam transmission
To one first photodetector；
First photodetector, is 2 D photoelectric detector, for receiving the survey of spectroscope transmission described in Jing
The laser beam of the laser-bounce plane reflection of ball；
Processor, the change in location value of the laser beam according to received by first photodetector, obtains the survey
The deflection of bar.
According to this utility model embodiment, the measurement assembly also includes：
Support base, the hollow measuring staff are arranged at the support base, and three sides of the support base are respectively arranged with
One laser-bounce plane, the second laser plane of reflection, the 3rd laser-bounce plane；
Second laser source, the 3rd lasing light emitter, the 4th lasing light emitter, be respectively used to launch second laser beam, the 3rd laser beam, the
Four laser beams, and the second laser beam, the 3rd laser beam are incident to the support base respectively with the 4th laser beam
The first laser plane of reflection, the second laser plane of reflection and the 3rd laser-bounce plane；
Second photodetector, the 3rd photodetector, the 4th photodetector, are respectively used to receive the support base
The first laser plane of reflection, the second laser plane of reflection, the laser beam of the 3rd laser-bounce plane reflection；
Member of translational, for making the support base move along a straight line；
Reset components, for the support base is reset to initial position；
The processor is additionally operable to according to second photodetector, the 3rd photodetector, the 4th light
The change in location value of laser beam received by electric explorer difference, is calculated the change in displacement value for surveying ball.
Used as another embodiment, the measurement assembly also includes：
Support base, the hollow measuring staff are arranged at the support base, and the support base is additionally provided with second laser source, the 3rd swashs
Light source and the 4th lasing light emitter；
The second laser source, the 3rd lasing light emitter, the 4th lasing light emitter, are respectively used to launch second laser beam, the 3rd laser
Beam, the 4th laser beam；
Second photodetector, the 3rd laser instrument, the 4th laser instrument, be respectively used to receive the second laser source, the 3rd
Lasing light emitter, the second laser beam of the 4th lasing light emitter transmitting, the 3rd laser beam, the 4th laser beam；
Member of translational, for making the support base move along a straight line；
Reset components, for the support base is reset to initial position；
The processor is additionally operable to according to second photodetector, the 3rd photodetector, the 4th light
The change in location value of laser beam received by electric explorer difference, is calculated the change in displacement value for surveying ball.
Used as another embodiment, the measurement assembly also includes：
Support base, the hollow measuring staff are arranged at the support base, the support base be additionally provided with the second photodetector,
Three photodetectors and the 4th photodetector；
Second laser source, the 3rd lasing light emitter, the 4th lasing light emitter, be respectively used to launch second laser beam, the 3rd laser beam, the
Four laser beams；
Second photodetector, the 3rd laser instrument, the 4th laser instrument, be respectively used to receive the second laser source,
3rd lasing light emitter, the second laser beam of the 4th lasing light emitter transmitting, the 3rd laser beam, the 4th laser beam；
Member of translational, for making the support base move along a straight line；
Reset components, for the support base is reset to initial position；
The processor is additionally operable to according to second photodetector, the 3rd photodetector, the 4th smooth electrical resistivity survey
The change in location value of laser beam received by device difference is surveyed, the change in displacement value for surveying ball is calculated.
According to this utility model embodiment, the support base is hollow support seat, and the hollow support seat is provided with for described
The through hole that hollow measuring staff is passed through, one end away from the survey ball of the hollow measuring staff are arranged in the hollow support seat.
According to this utility model embodiment, the plane of incidence of second photodetector, the 3rd photodetector
The plane of incidence, the plane of incidence of the 4th photodetector are arranged in a mutually vertical manner, and the member of translational is for by the hollow support
Seat is done along relatively described second photodetector, the 3rd photodetector, the vertical plane of the 4th photodetector
Motion.
According to this utility model embodiment, the member of translational includes at least one first gathering sills, described at least one
At least one second gathering sills are provided between first gathering sill vertically, along vertical on described at least one second gathering sills two
To at least one the 3rd gathering sills are provided with, be slidably connected on described at least one the 3rd gathering sills three Nogata the hollow support
Seat.
According to this utility model embodiment, the 3 D laser scanning testing head device also includes housing, the reset components
For spring, one end of the spring is connected to the hollow support seat, and the other end is connected to the housing.
According to this utility model embodiment, second photodetector and/or the 4th photodetector are rotatable
In the housing.
According to this utility model embodiment, the survey ball is segment, and the bottom surface of segment is used as the laser-bounce plane for surveying ball.
The present invention can measure measuring staff deflection in the horizontal direction using 2 D photoelectric detector, due to along measuring staff direction
Rigidity it is big, therefore ignore the deformation along measuring staff direction.
Compared with prior art, the beneficial effects of the utility model：The three-dimensional laser that this utility model embodiment is provided is swept
Gauge head unit is retouched, not only includes, for measuring the measurement assembly of the direct change in displacement of the three-dimensional of support base, also including for measuring
The first laser source of measuring staff deformation, spectroscope, the first photodetector etc., not only measure the direct change in displacement of support base,
The deformation of measuring staff is also measured, therefore compared with traditional three dimensional probe, 3-D probe device, the three-dimensional that this utility model embodiment is provided swashs
The certainty of measurement of photoscanning gauge head unit is higher, and simple structure, it is easy to produce in batches, low cost.
Description of the drawings
In order to be illustrated more clearly that the technical scheme of this utility model embodiment, below will be to using needed for embodiment
Accompanying drawing be briefly described, it will be appreciated that the following drawings illustrate only some embodiments of the present utility model, therefore should not be by
Regard the restriction to scope as, for those of ordinary skill in the art, on the premise of not paying creative work, may be used also
To obtain other related accompanying drawings according to these accompanying drawings.
Fig. 1 be this utility model embodiment in for measure measuring staff change in displacement measurement assembly two structural representation.
Fig. 2 is the light path schematic diagram of measurement measuring staff change in displacement in this utility model embodiment.
The structural representation of the 3 D laser scanning testing head device that Fig. 3 is provided for this utility model embodiment.
Fig. 4 (a) is member of translational, the top view that reset components and hollow support seat are used cooperatively；Fig. 4 (b) is Fig. 4 (a)
Front view.
Fig. 5 is the light path schematic diagram of measurement survey displacement of ball change in this utility model embodiment.
Fig. 6 be Fig. 5 in the second photodetector rotate to an angle after light path schematic diagram.
The structural representation of another kind of 3 D laser scanning testing head device that Fig. 7 is provided for this utility model embodiment.
The structural representation of another 3 D laser scanning testing head device that Fig. 8 is provided for this utility model embodiment.
Main element symbol description
Spring leaf 1；Spring leaf 2 52；Spring leaf 3 53；Gathering sill 1；Gathering sill 2 82；Gathering sill 3 83；It is sliding
Block 84；First laser beam 100；First laser source 101；Hollow measuring staff 102；Survey ball 103；Spectroscope 104；First photodetector
105；Second laser source 106；Second photodetector 107；Hollow support seat 108；Housing 111；Contiguous block 112；3rd photoelectricity
Detector 115；3rd lasing light emitter 116；4th lasing light emitter 117；4th photodetector 118；Survey the laser-bounce plane of ball
200；Second laser beam 300；The laser-bounce plane 400 of hollow support seat；3rd laser beam 500, the 4th laser beam 600.
Specific embodiment
Below in conjunction with accompanying drawing in this utility model embodiment, the technical scheme in this utility model embodiment is carried out clearly
Chu, it is fully described by, it is clear that described embodiment is only a part of embodiment of this utility model, rather than the reality of whole
Apply example.The component of this utility model embodiment generally described and illustrated in accompanying drawing herein can be come with a variety of configurations
Arrangement and design.Therefore, the detailed description of embodiment of the present utility model below to providing in the accompanying drawings is not intended to limit
Claimed scope of the present utility model, but it is merely representative of selected embodiment of the present utility model.Based on this utility model
Embodiment, the every other embodiment obtained on the premise of creative work is not made by those skilled in the art, all
Belong to the scope of this utility model protection.
This utility model embodiment provide 3 D laser scanning testing head device include for measure measuring staff (it also will be understood that
For support base, survey ball) measurement assembly one of three-dimensional directly change in displacement, also include for measuring the measurement assembly of measuring staff deformation
Two.
Used as a kind of embodiment, Fig. 1 is used for measuring the measurement assembly of measuring staff change in displacement in showing the present embodiment
Two structure, refers to Fig. 1, in the present embodiment, the measurement assembly two for measuring measuring staff deformation include measuring staff, survey ball 103, the
One lasing light emitter 101, spectroscope 104, the first photodetector 105 and processor；Wherein, measuring staff is hollow measuring staff 102, surveys ball
103 one end for being arranged at hollow measuring staff 102, and surveying the sphere that be connected with hollow measuring staff 102 of ball 103, to be provided with laser-bounce flat
Face, the laser-bounce plane 200 for surveying ball are located at the inside of hollow measuring staff 102；As a kind of easy embodiment, ball 103 is surveyed
For segment, the bottom surface of segment is used as the laser-bounce plane for surveying ball.
First laser source 101, for launching first laser beam 100；
Spectroscope 104, is obliquely installed in the other end of the hollow measuring staff 102, for by 101, the first laser source
The first laser beam 100 penetrated reflexes to the laser-bounce plane 200 for surveying ball, and the laser-bounce plane 200 for surveying ball is reflected
Laser beam transmission is to one first photodetector 105；
First photodetector 105, is 2 D photoelectric detector, for receiving the transmission of spectroscope 104 described in Jing
Survey the laser beam of the reflection of laser-bounce plane 200 of ball；
Processor, the change in location value of the laser beam according to received by first photodetector 105 obtain described
The deflection of measuring staff.
3 D laser scanning testing head device is arranged on precision measuring instrument, when ball 103 is surveyed with measured workpiece directly contact,
Surveying ball 103 and displacement being produced by resistance, hollow measuring staff 102 is connected with ball 103 is surveyed, and hollow measuring staff 102 can also deform.Figure
1 shows the light path before the deformation of hollow measuring staff 102, and Fig. 2 shows the light path after the deformation of hollow measuring staff 102.Refer to Fig. 1, figure
2, before hollow measuring staff 102 deforms, the first laser beam 100 (collimated light beam) that first laser source 101 sends incides spectroscope
104, the first laser beam 100 is reflexed to spectroscope 104 the laser-bounce plane 200 for surveying ball, the laser of the reflection of spectroscope 104
Beam Jing surveys the laser-bounce plane 200 of ball and reflexes to spectroscope 104 in reverse direction along former road, and spectroscope 104 will survey the laser of ball
The laser beam transmission of the reflection of the plane of reflection 200 is to the first photodetector 105.After hollow measuring staff 102 deforms, first laser source
The 101 first laser beams 100 for sending incide spectroscope 104, and the first laser beam 100 is reflexed to and surveys ball by spectroscope 104
Laser-bounce plane 200, now compared with the light path before the deformation of hollow measuring staff 102, input path does not change, but spectroscope
104 laser beams for reflexing to the laser-bounce plane 200 for surveying ball fall in the drop point generation position of the laser-bounce plane 200 for surveying ball
Move；The laser beam Jing of the reflection of spectroscope 104 surveys the laser-bounce plane 200 of ball and reflexes to spectroscope 104, and spectroscope 104 will be surveyed
The laser beam transmission of the reflection of laser-bounce plane 200 of ball is now deformed with hollow measuring staff 102 to the first photodetector 105
Front light path is compared, and reflected light path changes, and the laser beam for surveying the reflection of laser-bounce plane 200 of ball falls in spectroscope 104
Drop point be subjected to displacement, correspondingly, spectroscope 104 is transmitted to the drop point of the laser beam of the first photodetector 105 and is subjected to displacement,
As illustrated, displacement is L0；As the change in location of the laser beam received by the first photodetector 105 is by hollow measuring staff
What 102 deformation caused, thus after measure hollow measuring staff 102 and deform before and after received by the first photodetector 105
The change in location of laser beam, can obtain the change in displacement of hollow measuring staff 102, i.e. the deformation of hollow measuring staff 102.
The change in location value of the laser beam according to received by the first photodetector 105, obtains hollow measuring staff 102 two
(X-direction and Y-direction, the displacement of Z-direction are excessively small negligible, therefore the first photodetector 105 is visited using 2 D photoelectric for dimension
Survey device) the mode of change in displacement value can have various, for example calculate the geometrical relationship before and after the deformation of hollow measuring staff 102,
Obtain reflecting the mathematical expression of the deformation of hollow measuring staff 102, for example can be by formulaCalculate；As one kind
Simple and effective way, it is possible to use statistics (i.e. test of many times measurement) set up the change in displacement value of hollow measuring staff 102 and the
The relation table of the change in location value of the laser beam received by one photodetector 105, during actual measurement, table look at can be obtained
To the deformation values of hollow measuring staff 102.
It should be noted that the processor described in the present embodiment can be single-chip microcomputer, or arm processor, place
The change in location of reason laser beam of the device according to received by the first photodetector 105 is worth to the deflection of hollow measuring staff 102
Processing mode and the change in location value meter of laser beam according to received by the second photodetector 107 described hereinafter
Calculation is supported the change in displacement value of seat, is to carry out simple geometric operation or chart is called, is prior art.
It should be noted that because measuring staff is hollow measuring staff 102, therefore, the laser beam of the reflection of spectroscope 104 can be passed through
Hollow measuring staff 102 incides the laser-bounce plane 200 for surveying ball, and the laser beam for surveying the reflection of laser-bounce plane 200 of ball also can
Spectroscope 104 is incided through hollow measuring staff 102.As hollow measuring staff 102 is caused with measured workpiece directly contact because surveying ball 103
Deflection be also limited, therefore the aperture of hollow measuring staff 102 be enough to ensure that the laser beam of the reflection of spectroscope 104 can be passed through
Hollow measuring staff 102 incides the laser-bounce plane 200 for surveying ball, and the laser beam for surveying the reflection of laser-bounce plane 200 of ball also can
Spectroscope 104 is incided through hollow measuring staff 102.
The 3 D laser scanning testing head device provided in the present embodiment, not only can measure the three-dimensional straight of hollow measuring staff 102
Change in displacement is connect, the deformation of measuring staff can also be measured, it is possible to obtain survey 103 more accurate displacement of ball, amendment gauge head is due to surveying
The displacement variable that bar deformation causes, therefore compared with traditional 3 D laser scanning testing head device, certainty of measurement is higher, and tie
Structure is simple, it is easy to produce in batches, low cost.
The measurement assembly one of the direct change in displacement of three-dimensional for measuring hollow measuring staff 102 can have numerous embodiments,
For example with traditional trigger-type structure, scan-type structure etc., used as a kind of citing of simple embodiment, Fig. 3 is illustrated
A kind of structure of the 3 D laser scanning testing head device provided in the present embodiment.Fig. 3 is referred to, in the present embodiment, for surveying
The measurement assembly one for measuring the three-dimensional directly change in displacement of ball includes the survey ball 103, the hollow measuring staff 102, the processor,
Also include：
Support base, hollow measuring staff 102 are arranged at the support base, in the present embodiment, hollow of support base bit length cube shape
Support seat, three sides of hollow support seat be respectively arranged with the first laser plane of reflection 400, the second laser plane of reflection, the 3rd
Laser-bounce plane；Second laser source 106, for launching second laser beam 300, and the second laser beam 300 is incident to sky
The first laser reflection flat 400 of heart support base；3rd lasing light emitter 116, for launching the 3rd laser beam 500, and the described 3rd swashs
Light beam 500 is incident to the second laser reflecting surface of the support base；4th lasing light emitter 117, for launching the 4th laser beam 600,
And the 4th laser beam 600 is incident to the 3rd laser-bounce plane of the support base；
Second photodetector 107, is incident to the first laser reflection of the support base for receiving second laser beam 300
The laser beam of plane reflection；3rd photodetector 115, for receive that the 3rd laser beam 500 is incident to the support base the
The laser beam of dual-laser plane of reflection reflection；4th photodetector 118, is incident to for the 4th laser beam 600 of reception described
The laser beam of the 3rd laser-bounce plane reflection of support base；In the present embodiment, the second photodetector 107, the 3rd smooth electrical resistivity survey
Survey device 115, the 4th photodetector 118 to be arranged in a mutually vertical manner two-by-two；
Member of translational, for making the support base move along a straight line；
Reset components, for the support base is reset to initial position；
The processor is for according to second photodetector 107, the 3rd photodetector 115, the 4th light
The change in location value of laser beam received by the difference of electric explorer 118, is calculated the change in displacement value for surveying ball 103.The
Two photodetectors 107, the 3rd photodetector 115, the 4th photodetector 118 can be one-dimensional photodetector,
The change in location value in a direction is gathered respectively, is collected by the cooperation of three photodetectors and is surveyed ball in the direct of three-dimensional
Change in displacement value.
Hollow measuring staff 102 is arranged at support base, drives hollow measuring staff 102 to move, hollow survey when moving in order to support base
Bar 102 can be arranged at the side wall (i.e. the outside of support base) of support base, in order to reduce whole 3 D laser scanning testing head device
Volume, it is preferred that hollow measuring staff 102 to be arranged at the inside of support base.As shown in figure 3, as a kind of embodiment
Citing, support base are hollow support seat 108, and the hollow support seat 108 is provided with to pass through for the hollow measuring staff 102 (includes sky
Heart measuring staff 102 deform before and after can pass through) through hole, the hollow measuring staff 102 away from it is described survey ball 103 one end be arranged at
In the hollow support seat 108.In addition, hollow support seat 108 is designed as hollow rectangular structure, tactical rule, it is easy to
Production.
In the present embodiment, 3 D laser scanning testing head device also includes housing 111, the second photodetector 107 and/or the
Four photodetectors 118 are rotatably mounted in housing 111.Member of translational is used to translate hollow support seat 108 so as at two
Different directions move along a straight line.As a kind of embodiment, specifically, such as shown in Fig. 4 (a), Fig. 4 (b), positioned at horizontal direction
Two gathering sills 1, between two gathering sills 1 vertically level slide be provided with a gathering sill 2 82, gathering sill
2 82 are provided with a gathering sill 3 83, and on gathering sill 3 83, perpendicular is slided up and down and connects the hollow support seat 108.By
Include gathering sill 1, gathering sill 2 82 and gathering sill 3 83 respectively in the member of translational, wherein gathering sill 2 82 relative can be led
To one 81 level of groove slide, gathering sill 3 83 can 2 82 level of respective guide slot slide, the glide direction of gathering sill 1 with lead
Glide direction to groove 2 82 is mutually perpendicular to, and the glide direction of gathering sill 2 82 is mutually hung down with the glide direction of gathering sill 3 83
Directly, gathering sill 3 83 is vertically slidably connected hollow support seat 108 by slide block 84, and hollow support seat 108 can be in gathering sill 3 83
On slided up and down, therefore, it is possible to realize that hollow support seat 108 enters in three-dimensional i.e. three mutually orthogonal direction respectively
Line position is moved.As in Fig. 4, four-headed arrow is direction of displacement.
As shown in Fig. 4 (a), Fig. 4 (b), above-mentioned reset components include spring leaf 1, spring leaf 2 52, spring leaf 3 53,
Wherein spring leaf 1 returns back to initial position, spring leaf at least one gathering sill 1 and for being directed to groove 2 82
2 52 at least one gathering sill 2 82 and for the gathering sill 3 83 is returned back to initial position, and spring leaf 3 53 sets
On gathering sill 3 83 and for hollow support seat 108 is returned back to initial position.The spring leaf 1, spring leaf 2 52, bullet
Reed 3 53 can be directed to groove 2 82, gathering sill 3 83 and hollow support seat 108 respectively and return back to initial position, will three
The position being incident on three (second, third, the 4th) photodetectors of laser beam returns back to original position, is easy to three-dimensional swash
The measurement next time of photoscanning gauge head unit.
The position of second laser source 106 and the second photodetector 107 immobilizes, and member of translational can make hollow support
Seat 108 moves along a straight line, when 108 position of hollow support seat changes, second laser source 106, the 3rd lasing light emitter the 116, the 4th
Second laser beam 300 that lasing light emitter 117 is launched respectively, the 3rd laser beam 500, the 4th laser beam 600 incide hollow respectively
The first laser plane of reflection of support seat, the second laser plane of reflection, the position of the 3rd laser-bounce plane change, respectively Jing
Laser after the first laser plane of reflection 400 of hollow support seat, the second laser plane of reflection, the 3rd laser-bounce plane reflection
Beam incides position on the second photodetector 107, the 3rd photodetector 115, the 4th photodetector 118 also phase respectively
Should change, by processing system to the second photodetector 107, the 3rd photodetector 115, the 4th photodetector
The changing value of 118 pairs of different laser beam incoming positions, is calculated and is analyzed, and can obtain hollow support seat 108 positioned at which
The change in displacement value in straight-line displacement direction.
It is as shown in Fig. 5 (only illustrating the optical path change of second laser beam), during hollow support seat 108 is moved horizontally, false
If 107 vertical direction of the second photodetector is arranged, second laser source 106 is obliquely installed in the upper of the second photodetector 107
Side, and the second laser beam 300 of second laser transmitting and the angle of vertical curve are α, when 3 D laser scanning testing head device exists
When horizontal direction translation distance is x, 107 measurement distance of the second photodetector is y, then, the second photodetector 107 is surveyed
The 108 displacement equations multiple of hollow support seat for measuring is
The 3 D laser scanning testing head device is arranged on precision measurement instrument, when survey ball 103 and measured workpiece directly contact
When, produced displacement by resistance, survey ball 103 and drive hollow support seat 108 that straight-line displacement occurs on member of translational, by the
Two laser sources 106, the 3rd lasing light emitter 116, the second photodetector 107, the 3rd photodetector 115, processor coordinate, can
The direct displacement for surveying ball 103 is calculated, measured workpiece positioning caused by displacement during compensating the survey contact measured workpiece of ball 103
Deviation, due to the displacement of hollow support seat 108 obtained on the second photodetector 107, the 3rd photodetector 115,
Measured workpiece can be obtained and more accurately measure coordinate in 108 straight-line displacement direction of hollow support seat, improve measurement
Precision.Compared to traditional scanning probe, the 3 D laser scanning testing head device in the present embodiment simplifies structure, reduces
Production cost, it is easy to which batch machining is manufactured.
The amplification of this 3 D laser scanning testing head device displacement is measured to adjust the second photodetector 107, this
In embodiment, the second photodetector 107 is set rotatable on the side of housing 111.
Rotatable second photodetector 107 can change its rotation position according to practically necessary certainty of measurement, change
Become the relative position and angle of the second laser beam 300 of the second photodetector 107 and the transmitting of second laser source 106, so as to change
The amplification that the second photodetector 107 measures the 3 D laser scanning testing head device displacement is become, satisfaction is actually needed.
As shown in fig. 6, certain angle is rotated and incline by the second photodetector 107, after such as β, can adjust again and put
Big multiple, substantially can be seen that in figure when hollow support seat 108 translates identical apart from x, the second photodetector after inclination
On 107, the incoming position of two incoming laser beams there occurs change, and now, the spacing of the two is
Then the displacement equations multiple of the 107 measured hollow support seat 108 for obtaining of the second photodetector isThe angle can be adjusted according to different needs.
The first photodetector 105, the second photodetector 107 used in the present embodiment, the 3rd photodetector
115th, the 4th photodetector 118 can select conventional Position-Sensitive Detector (Position Sensitive Detector,
Abbreviation PSD), belong to semiconductor device, typically make PN, its operation principle is, based on lateral photo effect, to can be used in
The accurate measurement of position coordinateses, has the advantages that high sensitivity, high-resolution, fast response time and configuration circuit are simple.Position
Sensing detector is divided into One Dimensional Position Sensitive Detectors and two-dimensional position-sensitive detector, for cost-effective, the present embodiment choosing
With One Dimensional Position Sensitive Detectors.One Dimensional Position Sensitive Detectors, abbreviation one-dimensional PSD, it is detectable go out a bright spot at it
A unique direction surface movement.One-dimensional PSD is arranged on into X-axis, Y-axis or the Z axis of housing 111, or other directions,
To obtain its shift value in the direction, and compensated on the measured value of measured workpiece, it is more accurate to obtain the one-dimensional square
True measured value.
Fig. 7 is referred to, the 3 D laser scanning testing head device of another kind of structure that Fig. 7 is provided in showing the present embodiment
Structure, compared with the structure of the 3 D laser scanning testing head device shown in Fig. 3, in structure shown in Fig. 7, hollow support seat 108
Side be not laser-bounce plane, i.e., the side is not provided with laser reflective film, the second photodetector 107, the 4th photoelectricity
118 branch of detector is arranged at two sides of hollow support seat 108, and second laser source 106, the 4th lasing light emitter 117 are sent out respectively
The second laser beam 300 penetrated, the 4th laser beam 600 are directly transmitted to the second photodetector 107, the 4th photodetector respectively
118。
During hollow support seat 108 is moved horizontally, it is assumed that the second photodetector 107 is (only with the second photodetector
Illustrate as a example by 107) vertical direction setting, second laser beam 300 and the angle of vertical curve of second laser transmitting are α,
When translation distance is x to 3 D laser scanning testing head device in the horizontal direction, 107 measurement distance of the second photodetector is y, that
, the 108 displacement equations multiple of hollow support seat that the second photodetector 107 is measured to be obtained isIf the second light
Electric explorer 107 rotates and inclines certain angle, after such as β, when hollow support seat 108 translates identical apart from x, after inclination
On second photodetector 107, the incoming position of two incoming laser beams there occurs change, and now, the spacing of the two is xtan
α cos β+xtan α sin β cot (alpha-beta), then the hollow support seat 108 for obtaining measured by the second photodetector 107
Displacement equations multiple be tan α cos β+tan α sin β cot (alpha-beta).
Second, third, the 4th photodetector can be respectively relative to second, third, the 4th lasing light emitter rotary setting, in the same manner
, second, third, the 4th lasing light emitter can also be respectively relative to second, third, the 4th photodetector rotary setting, with meet
It is actually needed.
Fig. 8 is referred to, the 3 D laser scanning testing head device of another structure that Fig. 8 is provided in showing the present embodiment
Structure, compared with the structure of the 3 D laser scanning testing head device shown in Fig. 7, in structure shown in Fig. 8, second laser source 106,
3rd lasing light emitter 116, the 4th lasing light emitter 117 are respectively arranged at three sides of hollow support seat 108,106, second laser source
The second laser beam 300 penetrated is directly transmitted to the second photodetector 107, the 3rd laser beam 500 of the transmitting of the 3rd lasing light emitter 116
The 3rd photodetector 115 is directly transmitted to, the 4th laser beam 600 of the transmitting of the 4th lasing light emitter 117 is directly transmitted to the 4th light
Electric explorer 118.The principle of structure shown in Fig. 8 is identical with the principle of structure shown in Fig. 7, therefore repeats no more.
Skilled addressee readily understands that, in the present embodiment, with regard to second, third, the 4th photodetector and
2nd, the arrangement of the three, the 4th lasing light emitters has only enumerated 3 kinds, can also have other many embodiments, be not easy to one herein
One enumerates.
It should be noted that：Similar label and letter represent similar terms in following accompanying drawing, therefore, once a certain Xiang Yi
It is defined in individual accompanying drawing, then in subsequent accompanying drawing which further need not be defined and is explained.Meanwhile, it is new in this practicality
In the description of type, term " first ", " second ", " the 3rd " etc. are only used for distinguishing description, and it is not intended that indicating or implying phase
To importance.
Preferred embodiment of the present utility model is the foregoing is only, this utility model is not limited to, for this
For the technical staff in field, this utility model can have various modifications and variations.It is all it is of the present utility model spirit and principle
Within, any modification, equivalent substitution and improvements made etc. are should be included within protection domain of the present utility model.
In description of the present utility model, it should be noted that term " on ", D score, "left", "right", " interior ", " outward " etc.
The orientation or position relationship of instruction is that, based on orientation shown in the drawings or position relationship, or the utility model product is when using
The orientation usually put or position relationship, are for only for ease of description this utility model and simplify description, rather than indicate or dark
Show that the device or element of indication there must be specific orientation, with specific azimuth configuration and operation therefore it is not intended that right
Restriction of the present utility model.
In description of the present utility model, in addition it is also necessary to explanation, unless otherwise clearly defined and limited, term " sets
Put ", " installation ", should be interpreted broadly " being connected ", " connection ", for example, it may be fixedly connected, or be detachably connected,
Or be integrally connected；For the ordinary skill in the art, can understand that above-mentioned term is new in this practicality with concrete condition
Concrete meaning in type.
The above, specific embodiment only of the present utility model, but protection domain of the present utility model do not limit to
In this, any those familiar with the art can readily occur in change in the technical scope that this utility model is disclosed
Or replace, should all cover within protection domain of the present utility model.
Claims (10)
1. a kind of 3 D laser scanning testing head device, including for measuring the measurement assembly of measuring staff three-D displacement change, the survey
Amount component includes the measuring staff and surveys ball, it is characterised in that
The measuring staff is hollow measuring staff, and the survey ball is arranged at one end of the hollow measuring staff, and the survey ball is hollow with described
The sphere of measuring staff connection is provided with laser-bounce plane, and the laser-bounce plane of the survey ball is located at the interior of the hollow measuring staff
Portion；The 3 D laser scanning testing head device also includes：
First laser source, for launching first laser beam；
Spectroscope, is obliquely installed in the other end of the hollow measuring staff, for the first laser for launching the first laser source
Beam reflexes to the laser-bounce plane for surveying ball, and by the laser beam transmission of the laser-bounce plane reflection for surveying ball to one
First photodetector；
First photodetector, is 2 D photoelectric detector, for receiving the survey ball of spectroscope transmission described in Jing
The laser beam of laser-bounce plane reflection；
Processor, the change in location value of the laser beam according to received by first photodetector obtain the hollow survey
The deflection of bar.
2. 3 D laser scanning testing head device according to claim 1, it is characterised in that the measurement assembly also includes：
Support base, the hollow measuring staff are arranged at the support base, and three sides of the support base are respectively arranged with first and swash
The light plane of reflection, the second laser plane of reflection, the 3rd laser-bounce plane；
Second laser source, the 3rd lasing light emitter, the 4th lasing light emitter, be respectively used to launch second laser beam, the 3rd laser beam, the 4th swash
Light beam, and the second laser beam, the 3rd laser beam are incident to the of the support base respectively with the 4th laser beam
One laser-bounce plane, the second laser plane of reflection and the 3rd laser-bounce plane；
Second photodetector, the 3rd photodetector, the 4th photodetector, are respectively used to receive the first of the support base
Laser-bounce plane, the second laser plane of reflection, the laser beam of the 3rd laser-bounce plane reflection；
Member of translational, for making the support base move along a straight line；
Reset components, for the support base is reset to initial position；
The processor is additionally operable to according to second photodetector, the 3rd photodetector, the 4th smooth electrical resistivity survey
The change in location value of laser beam received by device difference is surveyed, the change in displacement value for surveying ball is calculated.
3. 3 D laser scanning testing head device according to claim 2, it is characterised in that the measurement assembly also includes：
Support base, the hollow measuring staff are arranged at the support base, and the support base is additionally provided with second laser source, the 3rd lasing light emitter
With the 4th lasing light emitter；
The second laser source, the 3rd lasing light emitter, the 4th lasing light emitter, be respectively used to launch second laser beam, the 3rd laser beam, the
Four laser beams；
Second photodetector, the 3rd laser instrument, the 4th laser instrument, are respectively used to receive the second laser source, the 3rd laser
Source, the second laser beam of the 4th lasing light emitter transmitting, the 3rd laser beam, the 4th laser beam；
Member of translational, for making the support base move along a straight line；
Reset components, for the support base is reset to initial position；
The processor is additionally operable to according to second photodetector, the 3rd photodetector, the 4th smooth electrical resistivity survey
The change in location value of laser beam received by device difference is surveyed, the change in displacement value for surveying ball is calculated.
4. 3 D laser scanning testing head device according to claim 1, it is characterised in that the measurement assembly also includes：
Support base, the hollow measuring staff are arranged at the support base, and the support base is additionally provided with the second photodetector, the 3rd light
Electric explorer and the 4th photodetector；
Second laser source, the 3rd lasing light emitter, the 4th lasing light emitter, be respectively used to launch second laser beam, the 3rd laser beam, the 4th swash
Light beam；
Second photodetector, the 3rd laser instrument, the 4th laser instrument, be respectively used to receive the second laser source, the 3rd
Lasing light emitter, the second laser beam of the 4th lasing light emitter transmitting, the 3rd laser beam, the 4th laser beam；
Member of translational, for making the support base move along a straight line；
Reset components, for the support base is reset to initial position；
The processor is additionally operable to according to second photodetector, the 3rd photodetector, the 4th photodetector
The change in location value of laser beam received by respectively, is calculated the change in displacement value for surveying ball.
5. according to the arbitrary described 3 D laser scanning testing head device of claim 2-4, it is characterised in that the support base is sky
Heart support base, the hollow support seat are provided with the through hole passed through for the hollow measuring staff, and the hollow measuring staff deviates from the survey ball
One end be arranged in the hollow support seat.
6. 3 D laser scanning testing head device according to claim 5, it is characterised in that second photodetector
The plane of incidence, the plane of incidence of the 3rd photodetector, the plane of incidence of the 4th photodetector are arranged in a mutually vertical manner, described
Member of translational for by the hollow support seat along relatively described second photodetector, the 3rd photodetector, described
The vertical plane of the 4th photodetector is taken exercises.
7. 3 D laser scanning testing head device according to claim 6, it is characterised in that the member of translational is included at least
One the first gathering sill, is vertically provided with least one second gathering sills, institute between described at least one first gathering sills
State and at least one second gathering sills, be vertically provided with least one the 3rd gathering sills, described at least one the 3rd gathering sills
Be slidably connected on three the hollow support seat.
8. 3 D laser scanning testing head device according to claim 7, it is characterised in that the 3 D laser scanning testing head
Device also includes housing, and the reset components are spring, and one end of the spring is connected to the hollow support seat, other end company
It is connected to the housing.
9. 3 D laser scanning testing head device according to claim 8, it is characterised in that second photodetector
And/or the 4th photodetector is rotatably mounted in the housing.
10. 3 D laser scanning testing head device according to claim 1, it is characterised in that the survey ball is segment, segment
Bottom surface as survey ball laser-bounce plane.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621109928.4U CN206095168U (en) | 2016-10-10 | 2016-10-10 | Three -dimensional laser scanning gauge head unit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621109928.4U CN206095168U (en) | 2016-10-10 | 2016-10-10 | Three -dimensional laser scanning gauge head unit |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206095168U true CN206095168U (en) | 2017-04-12 |
Family
ID=60414003
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621109928.4U Withdrawn - After Issue CN206095168U (en) | 2016-10-10 | 2016-10-10 | Three -dimensional laser scanning gauge head unit |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206095168U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106441137A (en) * | 2016-10-10 | 2017-02-22 | 北方民族大学 | Three-dimensional laser scanning probe |
| CN109568810A (en) * | 2018-11-23 | 2019-04-05 | 中国计量科学研究院 | Automatically scanning Water ball system positioning performance measuring device |
| CN111098497A (en) * | 2018-10-26 | 2020-05-05 | 康达智株式会社 | Three-dimensional modeling apparatus |
-
2016
- 2016-10-10 CN CN201621109928.4U patent/CN206095168U/en not_active Withdrawn - After Issue
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106441137A (en) * | 2016-10-10 | 2017-02-22 | 北方民族大学 | Three-dimensional laser scanning probe |
| CN106441137B (en) * | 2016-10-10 | 2018-11-30 | 北方民族大学 | 3 D laser scanning testing head |
| CN111098497A (en) * | 2018-10-26 | 2020-05-05 | 康达智株式会社 | Three-dimensional modeling apparatus |
| CN109568810A (en) * | 2018-11-23 | 2019-04-05 | 中国计量科学研究院 | Automatically scanning Water ball system positioning performance measuring device |
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