CN106403835B - One-dimensional laser scanning testing head - Google Patents
One-dimensional laser scanning testing head Download PDFInfo
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- CN106403835B CN106403835B CN201610883423.1A CN201610883423A CN106403835B CN 106403835 B CN106403835 B CN 106403835B CN 201610883423 A CN201610883423 A CN 201610883423A CN 106403835 B CN106403835 B CN 106403835B
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- measuring staff
- photodetector
- support base
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/16—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
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- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The present invention relates to a kind of one-dimensional laser scanning testing heads, including the first laser source for emitting first laser beam, for first laser beam to be reflexed to the laser reflection plane for surveying ball, and will survey ball laser reflection plane reflection laser beam transmission to the first photodetector spectroscope, the change in location value of processing system laser beam according to received by the first photodetector, obtain the deflection of measuring staff, it simultaneously include the measurement component for measuring measurement pedestal one dimension displacement variation, the measurement component includes second laser source and the second photodetector.One-dimensional laser scanning testing head provided in an embodiment of the present invention, the direct change in displacement of support base can not only be measured, the deformation of measuring staff can also be measured, therefore compared with traditional one-dimensional probe, the measurement accuracy of one-dimensional laser scanning testing head provided in an embodiment of the present invention is higher, and structure is simple, is easy to produce in batches.
Description
Technical field
The present invention relates to Technology of Precision Measurement field more particularly to a kind of one-dimensional laser scanning testing heads.
Background technique
Gauge head is one of critical component of precision measurement instrument, provides the geometric position information of measured workpiece as sensor, surveys
The development level of head directly affects the measurement accuracy and measurement efficiency of precision measurement instrument.Precision feeler is generally divided into contact measuring head
First two is surveyed with contactless, wherein contact measuring head is divided into mechanical gauge head, touch trigger probe and scanning probe again.
For mechanical gauge head because being manual measurement, and precision is not high, measurement efficiency is low, therefore is currently rarely used for Industrial Measurement
Amount field.The widely used precision feeler in current industrial field is touch trigger probe, and principle is when gauge head surveys end and tested work
Precision measurement instrument issues sampling pulse signal when part contacts, and the coordinate for surveying the end centre of sphere at this time is latched by the processing system of instrument
Value determines the coordinate at survey end and measured workpiece contact point with this.Such gauge head has structure simple, easy to use and higher
The advantages that triggering precision, the disadvantage is that there are anisotropy (triangle effect) or contact measuring head when contacting measured workpiece
Micro-displacement is generated because of resistance so as to cause the offset deviation of gauge head, limits further increasing for its measurement accuracy, most
High-precision can only reach several microns of zero point.The most wide gauge head type of current application is scanning probe, and principle is that gauge head survey end exists
After contacting measured workpiece, since the effect of contact force is subjected to displacement, the conversion equipment of gauge head exports small inclined with measuring staff gauge head
The signal of direct ratio is moved into, the respective coordinate value superposition of the signal and precision measurement instrument can obtain the relatively accurate seat put on measured workpiece
Mark.If not considering the deformation of measuring staff, scanning probe is isotropic, therefore its precision is significantly larger than touch trigger probe.But
The deformation of measuring staff is objective reality, and current gauge head only accounts for the direct displacement of support base, and does not consider the change of measuring staff
Shape, therefore, even the precision of scanning probe is also not high enough.In addition, scanning probe also has, structure is complicated, manufacturing cost
The disadvantages of high.
Summary of the invention
It is not high it is an object of the invention to improve measurement accuracy in the presence of the prior art, and it is unable to measure measuring staff deformation
Deficiency, a kind of one-dimensional laser scanning testing head that measurement accuracy can be improved is provided.
In order to achieve the above-mentioned object of the invention, the embodiment of the invention provides following technical schemes：
A kind of one-dimensional laser scanning testing head, including the measurement component for measuring the variation of measuring staff one dimension displacement, the measurement
Component include the measuring staff and survey ball,
The measuring staff is hollow measuring staff, and the ball of surveying is set to one end of the hollow measuring staff, and the survey ball with it is described
The spherical surface of hollow measuring staff connection is provided with laser reflection plane, and the laser reflection plane for surveying ball is located at the hollow measuring staff
It is internal；The one-dimensional laser scanning testing head further includes：
First laser source, for emitting first laser beam；
Spectroscope is obliquely installed first in the other end of the hollow measuring staff, for emitting the first laser source
Laser beam reflex to it is described survey ball laser reflection plane, and by it is described survey ball laser reflection plane reflection laser beam transmission
To the first photodetector；
First photodetector, the laser reflection plane for receiving the survey ball transmitted through the spectroscope are anti-
The laser beam penetrated；
Processing system obtains described according to the change in location value of laser beam received by first photodetector
The deflection of measuring staff.
According to embodiments of the present invention, the measurement component further includes：
Support base, the hollow measuring staff are set to the support base, and the one side of the support base is laser reflection plane；
Second laser source, for emitting second laser beam, and the second laser beam is incident to the laser of the support base
The plane of reflection；
Second photodetector, the laser beam of the laser reflection plane reflection for receiving the support base；
Member of translational, for moving in a straight line the support base；
Reset components, for the support base to be reset to initial position；
The processing system is also used to the change in location value of the laser beam according to received by second photodetector, meter
Calculation obtains the change in displacement value of the support base.
As another embodiment, the measurement component further includes：
Support base, the hollow measuring staff are set to the support base, and the support base is additionally provided with second laser source；
The second laser source, for emitting second laser beam；
Second photodetector, for receiving the second laser beam of the second laser source incidence；
Member of translational, for moving in a straight line the support base；
Reset components, for the support base to be reset to initial position；
The processing system is also used to the change in location value of the laser beam according to received by second photodetector, meter
It calculates and obtains the change in displacement value for surveying ball.
Preferably, the survey ball is segment, and the bottom surface of segment is as the laser reflection plane for surveying ball.
According to embodiments of the present invention, the support base is hollow support seat, and the hollow support seat is equipped with for described hollow
The through-hole that measuring staff passes through, the hollow measuring staff are set in the hollow support seat away from described one end for surveying ball.
According to embodiments of the present invention, the one-dimensional laser scanning testing head further includes shell, and second photodetector can
It is rotatably mounted in the shell.
According to embodiments of the present invention, the member of translational includes being located at the intracorporal guide groove of the shell, the hollow support
Seat is equipped with sliding block compatible with the guide groove.
According to embodiments of the present invention, the reset components are spring, and one end of the spring is connected to the hollow support
Seat, the other end are connected to the shell.
According to embodiments of the present invention, the member of translational and the reset components are parallel spring structure, the parallel spring
Chip architecture includes the link block for being connected to the hollow support seat and the seat board for being fixed on the shell, the link block and described
Connected between seat board there are two the reed that is parallel to each other, the link block can the relatively described seat board move in parallel and reset.
According to embodiments of the present invention, first photodetector and second photodetector are that position sensing is visited
Survey device.
Compared with prior art, beneficial effects of the present invention：One-dimensional laser scanning testing head provided in an embodiment of the present invention, no
Only include the measurement component for measuring the change in displacement of support base, further include for measure measuring staff deformation first laser source,
Spectroscope, first photodetector etc. not only measure the direct change in displacement of support base, also measure the deformation of measuring staff, because
Compared with traditional one-dimensional probe, the measurement accuracy of one-dimensional laser scanning testing head provided in an embodiment of the present invention is higher for this, and ties
Structure is simple, is easy to produce in batches.
Detailed description of the invention
In order to illustrate the technical solution of the embodiments of the present invention more clearly, below will be to needed in the embodiment attached
Figure is briefly described, it should be understood that the following drawings illustrates only certain embodiments of the present invention, therefore is not construed as pair
The restriction of range for those of ordinary skill in the art without creative efforts, can also be according to this
A little attached drawings obtain other relevant attached drawings.
Fig. 1 is in the embodiment of the present invention for measuring the structural schematic diagram of the measurement component two of measuring staff change in displacement.
Fig. 2 is the light path schematic diagram that measuring staff change in displacement is measured in the embodiment of the present invention.
Fig. 3 is the structural schematic diagram of one-dimensional laser scanning testing head provided in an embodiment of the present invention.
Fig. 4 is the light path schematic diagram that displacement of ball variation is surveyed in measurement in the embodiment of the present invention.
Fig. 5 be Fig. 4 in the second photodetector rotate by a certain angle after light path schematic diagram.
Fig. 6 is the structural schematic diagram that member of translational and reply component are parallel spring structure in embodiment.
Fig. 7 is the structural schematic diagram of the one-dimensional laser scanning testing head of another kind provided in an embodiment of the present invention.
Fig. 8 is the structural schematic diagram of another one-dimensional laser scanning testing head provided in an embodiment of the present invention.
Main element symbol description
First laser beam 100；First laser source 101；Hollow measuring staff 102；Survey ball 103；Spectroscope 104；First photoelectricity is visited
Survey device 105；Second laser source 106；Second photodetector 107；Hollow support seat 108；Guide groove 109；Spring 110；Shell
111；Link block 112；Reed 113；Seat board 114；Survey the laser reflection plane 200 of ball；Second laser beam 300；Hollow support seat
Laser reflection plane 400.
Specific embodiment
Below in conjunction with attached drawing in the embodiment of the present invention, technical solution in the embodiment of the present invention carries out clear, complete
Ground description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.Usually exist
The component of the embodiment of the present invention described and illustrated in attached drawing can be arranged and be designed with a variety of different configurations herein.Cause
This, is not intended to limit claimed invention to the detailed description of the embodiment of the present invention provided in the accompanying drawings below
Range, but it is merely representative of selected embodiment of the invention.Based on the embodiment of the present invention, those skilled in the art are not doing
Every other embodiment obtained under the premise of creative work out, shall fall within the protection scope of the present invention.
One-dimensional laser scanning testing head provided in an embodiment of the present invention includes for measuring the one-dimensional direct change in displacement of measuring staff
Measure (the practical direct change in displacement for measurement support base of measurement component one, since the displacement of support base is by survey ball of component one
Drive, accordingly it is also possible to be not understood as the one-dimensional direct change in displacement that ball or measuring staff are surveyed in measurement), it further include being surveyed for measuring
The measurement component two of bar deformation.
As an embodiment, Fig. 1 is shown in the present embodiment for measuring the measurement component of measuring staff change in displacement
Two structure, referring to Fig. 1, in the present embodiment, the measurement component two for measuring measuring staff deformation includes measuring staff, surveys ball 103, the
One laser source 101, spectroscope 104, the first photodetector 105 and processing system；Wherein, measuring staff is hollow measuring staff 102, surveys ball
103 are set to one end of hollow measuring staff 102, and survey the spherical surface that ball 103 is connect with hollow measuring staff 102 and be provided with laser reflection and put down
Face, the laser reflection plane 200 for surveying ball are located at the inside of hollow measuring staff 102.As a kind of embodiment of simplicity, ball 103 is surveyed
For segment, the bottom surface of segment is as the laser reflection plane for surveying ball.First laser source 101, for emitting first laser beam 100；
Spectroscope 104 is obliquely installed in the other end of the hollow measuring staff 102, for sending out the first laser source 101
The first laser beam 100 penetrated reflexes to the laser reflection plane 200 for surveying ball, and the laser reflection plane 200 for surveying ball is reflected
Laser beam transmission is to the first photodetector 105；
First photodetector 105, for receiving the laser reflection plane of the survey ball through the spectroscope 104 transmission
The laser beam of 200 reflections；
Processing system obtains institute according to the change in location value of laser beam received by first photodetector 105
State the change in displacement value of support base.
One-dimensional laser scanning testing head is mounted on precision measuring instrument, when surveying ball 103 and measured workpiece directly contacts, surveys ball
103 can be generated displacement by resistance, and hollow measuring staff 102 is connect with ball 103 is surveyed, and hollow measuring staff 102 can also deform.Fig. 1 shows
The optical path before hollow measuring staff 102 deforms is gone out, Fig. 2 shows the deformed optical paths of hollow measuring staff 102.Fig. 1, Fig. 2 are please referred to, it is empty
Before heart measuring staff 102 deforms, the first laser beam 100 (collimated light beam) that first laser source 101 issues is incident on spectroscope 104, point
The first laser beam 100 is reflexed to the laser reflection plane 200 for surveying ball by light microscopic 104, and the laser beam that spectroscope 104 reflects is through surveying
The laser reflection plane 200 of ball is reflected into spectroscope 104 along former road in reverse direction, and spectroscope 104 puts down the laser reflection for surveying ball
The laser beam transmission that face 200 is reflected is to the first photodetector 105.After hollow measuring staff 102 deforms, first laser source 101 is issued
First laser beam 100 be incident on spectroscope 104, which is reflexed to the laser reflection for surveying ball by spectroscope 104
Plane 200, at this time compared with the optical path before the deformation of hollow measuring staff 102, input path does not change, but spectroscope 104 is reflected into
The drop point for the laser reflection plane 200 that the laser beam for surveying the laser reflection plane 200 of ball falls in survey ball is subjected to displacement, and surveys ball
Angle change occurs for laser reflection plane；The laser beam that spectroscope 104 reflects is reflected into point through surveying the laser reflection plane 200 of ball
Light microscopic 104, the laser beam transmission that spectroscope 104 reflects the laser reflection plane 200 for surveying ball to the first photodetector 105,
At this time compared with the optical path before the deformation of hollow measuring staff 102, optical path changes, and surveys swashing for the reflection of laser reflection plane 200 of ball
The drop point that light beam falls in spectroscope 104 is subjected to displacement, and correspondingly, spectroscope 104 is transmitted to the laser of the first photodetector 105
The drop point of beam is subjected to displacement, as shown in Fig. 2, definition displacement is L0；The laser beam as received by the first photodetector 105
Change in location be caused by deformation as hollow measuring staff 102, therefore by measuring the first photoelectricity of the hollow deformation of measuring staff 102 front and back
The change in location of laser beam received by detector 105, the deflection of available hollow measuring staff 102.
According to the change in location value of laser beam received by the first photodetector 105, the change of hollow measuring staff 102 is obtained
The mode of shape amount can there are many, such as calculate the geometrical relationship of hollow measuring staff 102 deformation front and back, obtain can reflect hollow survey
The mathematical expression that bar 102 deforms, such as can be by formulaCalculate the deflection of hollow measuring staff 102；As one kind
Simple and effective way can use statistics (i.e. test of many times measurement) and establish the change in displacement value of hollow measuring staff 102 and the
The relation table of the change in location value of laser beam received by one photodetector 105, table look-at can obtain when actual measurement
To the deformation values of hollow measuring staff 102.
It should be noted that because measuring staff is hollow measuring staff 102, the laser beam that spectroscope 104 reflects can pass through
Hollow measuring staff 102 is incident on the laser reflection plane 200 for surveying ball, and the laser beam for surveying the reflection of laser reflection plane 200 of ball also can
Spectroscope 104 is incident on across hollow measuring staff 102.Since hollow measuring staff 102 causes because surveying ball 103 and directly contacting with measured workpiece
Deflection be also limited, therefore the laser beam that the aperture of hollow measuring staff 102 is enough to ensure that spectroscope 104 reflects can pass through
Hollow measuring staff 102 is incident on the laser reflection plane 200 for surveying ball, and the laser beam for surveying the reflection of laser reflection plane 200 of ball also can
Spectroscope 104 is incident on across hollow measuring staff 102.
The one-dimensional laser scanning testing head provided in the present embodiment can not only measure the direct change in displacement of support base, also
The deformation of measuring staff can be measured, can obtain and survey the more accurate sphere centre coordinate of ball 103, amendment gauge head is due to caused by measuring staff deformation
Centre of sphere variable quantity, therefore compared with traditional one-dimensional laser scanning testing head, measurement accuracy is higher, and structure is simple, is easy to batch
Production.
For measure the one-dimensional direct change in displacement of support base measurement component one can there are many embodiment, for example, by using
Traditional trigger-type structure, scan-type structure etc., as a kind of citing of simple embodiment, Fig. 3 shows this implementation
A kind of structure of the one-dimensional laser scanning testing head provided in example.Referring to Fig. 3, in the present embodiment, it is one-dimensional for measuring support base
The measurement component of direct change in displacement includes the survey ball 103, the hollow measuring staff 102, the processing system, further includes：
Support base, hollow measuring staff 102 are set to the support base, and the one side of support base is laser reflection plane；
Second laser source 106, for emitting second laser beam 300, and the second laser beam 300 is incident to the support
The laser reflection plane of seat；
Second photodetector 107, the laser beam of the laser reflection plane reflection for receiving the support base；
Member of translational, for moving in a straight line the support base；
Reset components, for the support base to be reset to initial position；
The processing system is used for the change in location value of the laser beam according to received by second photodetector 107,
The change in displacement value for surveying ball 103 is calculated.
Hollow measuring staff 102 is set to support base, in order to drive hollow measuring staff 102 mobile when support base is mobile, hollow survey
The side wall (i.e. the outside of support base) in support base can be set in bar 102, in order to reduce the body of entire one-dimensional laser scanning testing head
Product, preferably, hollow measuring staff 102 to be set to the inside of support base.As shown in figure 3, citing as an embodiment,
Support base is hollow support seat 108, and the hollow support seat 108, which is equipped with, passes through (including hollow measuring staff for the hollow measuring staff 102
102 deformation front and back can pass through) through-hole, the hollow measuring staff 102 away from it is described survey ball 103 one end be set to the sky
In heart support base 108.In addition, hollow support seat 108 to be designed as to hollow rectangular parallelepiped structure, tactical rule is readily produced.
In the present embodiment, one-dimensional laser scanning testing head further includes shell 111, the rotatable installation of the second photodetector 107
In shell 111.Member of translational for translating hollow support seat 108, in particular for by hollow support seat 108 along perpendicular to the
The direction of two photodetectors 107 moves in a straight line.As an embodiment, specifically, member of translational includes being located at shell
Guide groove 109 in body 111, hollow support seat 108 are equipped with the sliding block (not shown) being adapted to guide groove 109, and sliding block is set
In 108 bottom of hollow support seat, hollow support seat 108 can be moved in a straight line by sliding block in guide groove 109.It is readily appreciated that
, in order to not influence the normal deformation of hollow measuring staff 102, the structure of guide groove 109 can make hollow measuring staff 102 pass through.It should
It include first laser source 101, the first photodetector 105, spectroscope 104, second laser source 106, hollow support in shell 111
The 108, second photodetector 107 of seat and member of translational, are easily installed and dismantle.
Citing as an embodiment, reset components are set in shell 111, and reset components are spring 110, survey ball
103, which are subjected to displacement caused hollow support seat 108 by measured workpiece resistance, is subjected to displacement, multiple after gauge head is completed to measure
Hollow support seat 108 can be reset to initial position by position component, convenient for the accurate measurement of next measured workpiece measurement point.
Second laser source 106 and the position of the second photodetector 107 immobilize, and member of translational can make hollow support
Seat 108 moves in a straight line, when the second laser beam 300 that 108 position of hollow support seat changes, and second laser source 106 emits
The position for being incident on the laser reflection plane of hollow support seat 108 changes, the laser reflection plane 400 through hollow support seat
The position that laser beam after reflection is incident on the second photodetector 107 also accordingly changes, by processing system to
The changing value of two 107 pairs of photodetectors difference laser beam incoming position, is calculated and is analyzed, can obtain hollow support seat
108 in the change in displacement value for being located at its straight-line displacement direction.
As shown in figure 4, during hollow support seat 108 moves horizontally, it is assumed that 107 vertical direction of the second photodetector is set
It sets, second laser source 106 is obliquely installed in the top of the second photodetector 107, and the second laser of second laser transmitting
The angle of beam 300 and vertical line is α, when translation distance is x to one-dimensional laser scanning testing head in the horizontal direction, the second photodetection
The measurement distance of device 107 is y, then, the 108 displacement equations multiple of hollow support seat obtained measured by the second photodetector 107
For
The one-dimensional laser scanning testing head is mounted on precision measurement instrument, when surveying ball 103 and measured workpiece directly contacts, by
Displacement is generated to resistance, ball 103 is surveyed and drives hollow support seat 108 that straight-line displacement occurs on member of translational, swash by second
Light source 106, the second photodetector 107, processing system cooperation, can be calculated the direct displacement of hollow support seat 108,
Simultaneously because hollow measuring staff deflection obtained on the first photodetector 105, can be obtained measured workpiece in hollow support
The more accurate measurement coordinate in 108 straight-line displacement directions of seat, improves the precision of measurement.It is surveyed compared to traditional scan-type
Head, the one-dimensional laser scanning testing head in the present embodiment simplify structure, reduce production cost, are easy to batch machining manufacture.
In order to adjust the amplification factor of this one-dimensional laser scanning testing head displacement of the second photodetector 107 measurement, the second light
Electric explorer 107 is rotatable on the side for being located at shell 111.
Rotatable second photodetector 107 can change its rotation position according to practically necessary measurement accuracy, change
Relative position and the angle for becoming the second laser beam 300 of the second photodetector 107 and the transmitting of second laser source 106, to change
The amplification factor for having become the second photodetector 107 measurement one-dimensional laser scanning testing head displacement, meets actual needs.
As shown in figure 5, rotating and being tilted a certain angle the second photodetector 107, after β, it can adjust and put again
Big multiple, obviously it can be seen that the second photodetection when hollow support seat 108 translates identical distance x, after inclination in figure
The incoming position of two incoming laser beams is changed on device 107, at this point, the spacing of the two is
The displacement equations multiple of the hollow support seat 108 then obtained measured by the second photodetector 107 isThe angle
Degree can be adjusted according to different needs.
Common position can be selected in first photodetector 105 and the second photodetector 107 used in the present embodiment
Sensing detector (Position Sensitive Detector, abbreviation PSD) is set, belongs to semiconductor devices, is generally made into PN junction
Structure can be used in the precise measurement of position coordinates its working principle is that being based on lateral photo effect, have highly sensitive, high score
The advantages that resolution, simple fast response time and configuration circuit.Position-Sensitive Detector is divided into One Dimensional Position Sensitive Detectors and two
Position-Sensitive Detector is tieed up, for save the cost, the present embodiment selects One Dimensional Position Sensitive Detectors.One-dimensional position sensitive
Detector, abbreviation one-dimensional PSD, the movement on the detectable surface in a unique direction of the bright spot at it out.One-dimensional PSD is pacified
Mounted in the X-axis of shell 111, Y-axis or Z axis or other directions, to obtain it in the shift value of the direction, and compensated
On the measured value of measured workpiece, to obtain the more accurate measured value of the one-dimensional square.
In structure shown in Fig. 3, member of translational includes the guide groove 109 in shell 111, and reset components are spring
110, as another embodiment, as shown in fig. 6, the member of translational and reset components can also be parallel spring structure,
Wherein the structure of parallel spring includes the link block 112 being connected on hollow support seat 108 and the seat board being fixed on shell 111
114, it connects between link block 112 and seat board 114 there are two the reed 113 being parallel to each other, link block 112 can the relatively described seat board
114 move in parallel and reset.
Specifically, link block 112 and seat board 114 are connect with two isometric reeds 113 being parallel to each other respectively, make to connect
Block 112 is relatively moved to form a parallelogram parallel spring structure with seat board 114, due to 108 stress of hollow support seat
It moves, link block 112 can only be translatable with respect to seat board 114, and in one-dimensional square position can only occur for limitation hollow support seat 108
It moves, as shown by the arrows in Figure 6 moves left and right.Two reeds 113 are capable of providing restoring force.The parallel spring structure is simple, returns
It is multiple high-efficient, it can effectively realize hollow support seat 108 in one-dimensional square such as X or Y or translation and the reset response of Z-direction.
Referring to Fig. 7, Fig. 7 shows the knot of the one-dimensional laser scanning testing head of another structure provided in the present embodiment
Structure, compared with the structure of one-dimensional laser scanning testing head shown in Fig. 3, in structure shown in Fig. 7, the side of hollow support seat 108
It is not laser reflection plane, i.e., the side is not provided with laser reflective film, and the second photodetector 107 is set to hollow support seat
108 side, the second laser beam 300 that second laser source 106 emits are directly transmitted to the second photodetector 107.
During hollow support seat 108 moves horizontally, it is assumed that the setting of 107 vertical direction of the second photodetector, second swashs
The second laser beam 300 and the angle of vertical line of light device transmitting are α, when one-dimensional laser scanning testing head translation distance in the horizontal direction
When for x, the second photodetector 107 measurement distance is y, then, the hollow support obtained measured by the second photodetector 107
Seat 108 displacement equations multiples beIf the second photodetector 107 is rotated and is tilted a certain angle, after β, in sky
When heart support base 108 translates identical distance x, the incidence of two incoming laser beams on the second photodetector 107 after inclination
Position is changed, at this point, the spacing of the two is xtan α cos β+xtan α sin β cot (alpha-beta), then second
The displacement equations multiple of the hollow support seat 108 obtained measured by photodetector 107 is tan α cos β+tan α sin β
cot(α-β)。
Second photodetector can be respectively relative to second laser source rotary setting, and similarly, second laser source can also be divided
Not relative to the second photodetector rotary setting, to meet actual needs.
Referring to Fig. 8, Fig. 8 shows the knot of the one-dimensional laser scanning testing head of another structure provided in the present embodiment
Structure, compared with the structure of one-dimensional laser scanning testing head shown in Fig. 7, in structure shown in Fig. 8, second laser source 106 is set to
The side of hollow support seat 108, the second laser beam 300 that second laser source 106 emits are directly transmitted to the second photodetector
107.The principle of structure shown in Fig. 8 is identical as the principle of structure shown in Fig. 7, and so it will not be repeated.
It should be noted that：Similar label and letter indicate similar terms in following attached drawing, therefore, once a certain Xiang Yi
It is defined in a attached drawing, does not then need that it is further defined and explained in subsequent attached drawing.Meanwhile of the invention
In description, term " first ", " second " etc. are only used for distinguishing description, are not understood to indicate or imply relative importance.
The foregoing is only a preferred embodiment of the present invention, is not intended to restrict the invention, for the skill of this field
For art personnel, the invention may be variously modified and varied.All within the spirits and principles of the present invention, made any to repair
Change, equivalent replacement, improvement etc., should all be included in the protection scope of the present invention.
In the description of the present invention, it should be noted that the instruction such as term " on ", "lower", "left", "right", "inner", "outside"
Orientation or positional relationship be based on the orientation or positional relationship shown in the drawings or the invention product using when usually put
Orientation or positional relationship, be merely for convenience of description of the present invention and simplification of the description, rather than the device of indication or suggestion meaning
Or element must have a particular orientation, be constructed and operated in a specific orientation, therefore be not considered as limiting the invention.
In the description of the present invention, it is also necessary to which explanation is unless specifically defined or limited otherwise, term " setting ",
" installation ", " connected ", " connection " shall be understood in a broad sense, for example, it may be fixedly connected, may be a detachable connection or one
Connect to body；For the ordinary skill in the art, the tool of above-mentioned term in the present invention can be understood with concrete condition
Body meaning.
The above description is merely a specific embodiment, but scope of protection of the present invention is not limited thereto, any
Those familiar with the art in the technical scope disclosed by the present invention, can easily think of the change or the replacement, and should all contain
Lid is within protection scope of the present invention.
Claims (10)
1. a kind of one-dimensional laser scanning testing head, including the measurement component for measuring the variation of measuring staff one dimension displacement, the measurement group
Part includes the measuring staff and survey ball, which is characterized in that
The measuring staff is hollow measuring staff, and the ball of surveying is set to one end of the hollow measuring staff, and the survey ball with it is described hollow
The spherical surface of measuring staff connection is provided with laser reflection plane, and the laser reflection plane for surveying ball is located at the interior of the hollow measuring staff
Portion；The one-dimensional laser scanning testing head further includes：
First laser source, for emitting first laser beam；
Spectroscope is obliquely installed the first laser in the other end of the hollow measuring staff, for emitting the first laser source
Beam reflexes to the laser reflection plane for surveying ball, and by the laser beam transmission of the laser reflection plane reflection for surveying ball to the
One photodetector；
First photodetector, for receiving the laser reflection plane reflection of the survey ball that transmits through the spectroscope
Laser beam；
Processing system obtains described for the change in location value of the laser beam according to received by first photodetector
The deflection of hollow measuring staff.
2. one-dimensional laser scanning testing head according to claim 1, which is characterized in that the measurement component further includes：
Support base, the hollow measuring staff are set to the support base, and the one side of the support base is laser reflection plane；
Second laser source, for emitting second laser beam, and the second laser beam is incident to the laser reflection of the support base
Plane；
Second photodetector, the laser beam of the laser reflection plane reflection for receiving the support base；
Member of translational, for moving in a straight line the support base；
Reset components, for the support base to be reset to initial position；
The processing system is also used to the change in location value of the laser beam according to received by second photodetector, calculates
To the change in displacement value of the support base.
3. one-dimensional laser scanning testing head according to claim 1, which is characterized in that the measurement component further includes：
Support base, the hollow measuring staff are set to the support base, and the support base is additionally provided with second laser source；
The second laser source, for emitting second laser beam；
Second photodetector, for receiving the second laser beam of the second laser source incidence；
Member of translational, for moving in a straight line the support base；
Reset components, for the support base to be reset to initial position；
The processing system is also used to the change in location value of the laser beam according to received by second photodetector, calculates
To the change in displacement value of the support base.
4. one-dimensional laser scanning testing head according to claim 1, which is characterized in that the survey ball is segment, the bottom of segment
Face is as the laser reflection plane for surveying ball.
5. one-dimensional laser scanning testing head according to claim 2 or 3, which is characterized in that the support base is hollow support
Seat, the hollow support seat are equipped with the through-hole passed through for the hollow measuring staff, and the hollow measuring staff surveys the one of ball away from described
End is set in the hollow support seat.
6. one-dimensional laser scanning testing head according to claim 5, which is characterized in that the one-dimensional laser scanning testing head is also
Including shell, second photodetector is rotatably mounted in the shell.
7. one-dimensional laser scanning testing head according to claim 6, which is characterized in that the member of translational includes being located at institute
The intracorporal guide groove of shell is stated, the hollow support seat is equipped with sliding block compatible with the guide groove.
8. the one-dimensional laser scanning testing head according to claim 6, which is characterized in that the reset components are spring, institute
The one end for stating spring is connected to the hollow support seat, and the other end is connected to the shell.
9. one-dimensional laser scanning testing head according to claim 6, which is characterized in that the member of translational and the reset
Component is parallel spring structure, and the parallel spring structure includes being connected to the link block of the hollow support seat and being fixed on institute
The seat board of shell is stated, is connected between the link block and the seat board there are two the reed being parallel to each other, the link block can phase
The seat board is moved in parallel and resetted.
10. one-dimensional laser scanning testing head according to claim 2 or 3, which is characterized in that first photodetector
It is Position-Sensitive Detector with second photodetector.
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| CN201610883423.1A CN106403835B (en) | 2016-10-10 | 2016-10-10 | One-dimensional laser scanning testing head |
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| CN201610883423.1A CN106403835B (en) | 2016-10-10 | 2016-10-10 | One-dimensional laser scanning testing head |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110500958B (en) * | 2019-09-30 | 2021-03-12 | 北方民族大学 | Laser scanning precision measuring head device |
| CN113670222A (en) * | 2021-07-19 | 2021-11-19 | 广州施力普家居用品有限公司 | Pillow matching measuring device, pillow matching system and pillow matching method |
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Address after: 225800 No.11 Fengxiang Road, genggeng industrial concentration zone, Baoying County, Yangzhou City, Jiangsu Province Patentee after: Jiangsu Chuangyuan Laser Technology Co.,Ltd. Address before: 225800 No.11 Fengxiang Road, genggeng industrial concentration zone, Baoying County, Yangzhou City, Jiangsu Province Patentee before: Yangzhou Chuangyuan Laser Technology Co.,Ltd. |
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