CN106289063B - The one-dimensional laser scanning testing head of single light source - Google Patents
The one-dimensional laser scanning testing head of single light source Download PDFInfo
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- CN106289063B CN106289063B CN201610883624.1A CN201610883624A CN106289063B CN 106289063 B CN106289063 B CN 106289063B CN 201610883624 A CN201610883624 A CN 201610883624A CN 106289063 B CN106289063 B CN 106289063B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
- G01B11/005—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines
- G01B11/007—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines feeler heads therefor
Abstract
The present invention relates to a kind of one-dimensional laser scanning testing heads of single light source, it include the lasing light emitter for emitting laser beam, for laser beam to be reflexed to the laser reflection plane for surveying ball, and will survey ball laser reflection plane reflection laser beam transmission to the first photodetector spectroscope, the change in location value of laser beam of the processing system received by the first photodetector, obtain the deflection of measuring staff, the laser beam of lasing light emitter transmitting simultaneously is transmitted through reflective mirror through spectroscope, support base back reflection is incident to after mirror reflection to the second photodetector, the change in location value of laser beam of the processing system received by the second photodetector, be supported a displacement.The one-dimensional laser scanning testing head of single light source provided in an embodiment of the present invention, the direct change in displacement of support base can not only be measured, the deformation of measuring staff can also be measured, therefore compared with traditional one-dimensional probe, the measurement accuracy higher of one-dimensional probe provided in an embodiment of the present invention, and it is simple in structure, it is easy to produce in batches.
Description
Technical field
The present invention relates to Technology of Precision Measurement field more particularly to a kind of one-dimensional laser scanning testing heads of single light source.
Background technology
Gauge head is one of critical component of precision measurement instrument, and the geometric position information of measured workpiece is provided as sensor, is surveyed
The development level of head directly affects the measurement accuracy and measurement efficiency of precision measurement instrument.Precision feeler is generally divided into contact measuring head
First two is surveyed with contactless, wherein contact measuring head is divided into as mechanical gauge head, touch trigger probe and scanning probe.
For mechanical gauge head because being manual measurement, and precision is not high, measurement efficiency is low, therefore is currently rarely used for Industrial Measurement
Amount field.The widely used precision feeler in current industrial field is touch trigger probe, and principle is when gauge head surveys end and tested work
Precision measurement instrument sends out sampling pulse signal when part contacts, and the coordinate for surveying the end centre of sphere at this time is latched by the processing system of instrument
Value determines the coordinate at survey end and measured workpiece contact point with this.Such gauge head has simple in structure, easy to use and higher
The advantages that triggering precision, the disadvantage is that there are anisotropy (triangle effect) or contact measuring head when contacting measured workpiece
Micro-displacement is generated because of resistance so as to cause the offset deviation of gauge head, limits further increasing for its measurement accuracy, most
High-precision can only reach several microns of zero.The most wide gauge head type of current application is scanning probe, and principle is that gauge head survey end exists
After contacting measured workpiece, gauge head since the effect of contact force is subjected to displacement, the output of the conversion equipment of gauge head and measuring staff it is small partially
The signal of direct ratio is moved into, the respective coordinate value superposition of the signal and precision measurement instrument can obtain the relatively accurate seat put on measured workpiece
Mark.If not considering the deformation of measuring staff, scanning probe is isotropic, therefore its precision is significantly larger than touch trigger probe.But
The deformation of measuring staff is objective reality, and current gauge head only accounts for the direct displacement of measuring staff support base, and does not consider measuring staff
Deformation, therefore, even the precision of scanning probe is also not high enough.In addition, scanning probe also has complicated, manufacture
The shortcomings of of high cost.
Invention content
It is not high it is an object of the invention to improve measurement accuracy in the presence of the prior art, and it is unable to measure measuring staff deformation
Deficiency, a kind of one-dimensional laser scanning testing head of the single light source that measurement accuracy can be improved is provided.
In order to achieve the above-mentioned object of the invention, an embodiment of the present invention provides following technical schemes：
A kind of one-dimensional laser scanning testing head of single light source includes the measurement assembly for measuring the variation of support base one dimension displacement,
The measurement assembly include measuring staff and survey ball,
The measuring staff is hollow measuring staff, and the ball of surveying is set to one end of the hollow measuring staff, and the survey ball with it is described
The spherical surface of hollow measuring staff connection is provided with laser reflection plane, and the laser reflection plane for surveying ball is located at the hollow measuring staff
It is internal；The one-dimensional probe further includes：
Lasing light emitter, for emitting laser beam；
Spectroscope is obliquely installed in the other end of the hollow measuring staff, and the laser beam for emitting the lasing light emitter is anti-
It is incident upon the laser reflection plane for surveying ball, and by the laser beam transmission of the laser reflection plane reflection for surveying ball to the first light
Electric explorer is additionally operable to the laser that the lasing light emitter emits being transmitted through reflective mirror；
First photodetector, the laser reflection plane for receiving the survey ball transmitted through the spectroscope are anti-
The laser beam penetrated；
Processing system is obtained for the change in location value of the laser beam received by first photodetector
The deflection of the hollow measuring staff；
The support base, the hollow measuring staff are set to the support base, and the one side of the support base is laser reflection
Plane；
The reflective mirror, the laser reflection that the laser beam for transmiting the spectroscope reflexes to the support base are put down
Face；
Second photodetector, the laser beam of the laser reflection plane reflection for receiving the support base；
Member of translational, for making the support base move in a straight line；
Reset components, for the support base to be reset to initial position；
The processing system is additionally operable to the change in location value according to laser beam received by second photodetector, meter
Calculation obtains the change in displacement value of the support base.
Preferably, the survey ball is segment, and the bottom surface of segment is as the laser reflection plane for surveying ball.
According to embodiments of the present invention, the support base is hollow support seat, and the hollow support seat is equipped with for described hollow
The through-hole that measuring staff passes through, the hollow measuring staff are set to away from described one end for surveying ball in the hollow support seat.
According to embodiments of the present invention, the one-dimensional probe further includes shell, the rotatable installation of the second photodetector
In the shell.
According to embodiments of the present invention, the member of translational includes the guide groove being located in the shell, the hollow support
Seat is equipped with sliding block compatible with the guide groove.
Preferably, the sliding block is magnetic slider, and the guide groove is provided with magnetic part, the sliding block and the guiding
Slot magnetic contact connects.
According to embodiments of the present invention, the reset components are spring, and one end of the spring is connected to the hollow support
Seat, the other end are connected to the shell.
According to embodiments of the present invention, the member of translational and the reset components are parallel spring structure, the parallel spring
Chip architecture includes the link block for being connected to the hollow support seat and the seat board for being fixed on the shell, the link block and described
Connection is there are two the reed that is mutually parallel between seat board, the link block can the relatively described seat board move in parallel and reset.
According to embodiments of the present invention, first photodetector and second photodetector are that position sensing is visited
Survey device.
Compared with prior art, beneficial effects of the present invention：The one-dimensional laser scanning of single light source provided in an embodiment of the present invention
Gauge head includes not only the measurement assembly of the change in displacement for measuring support base, further includes the laser for measuring measuring staff deformation
Source, spectroscope, first photodetector etc. not only measure the direct change in displacement of support base, also measure the deformation of measuring staff,
Therefore compared with traditional one-dimensional probe, the measurement accuracy higher of one-dimensional probe provided in an embodiment of the present invention, and it is simple in structure,
It is easy to produce in batches.
Description of the drawings
In order to illustrate the technical solution of the embodiments of the present invention more clearly, below will be to needed in the embodiment attached
Figure is briefly described, it should be understood that the following drawings illustrates only certain embodiments of the present invention, therefore is not construed as pair
The restriction of range for those of ordinary skill in the art without creative efforts, can also be according to this
A little attached drawings obtain other relevant attached drawings.
Fig. 1 is the structural schematic diagram of the measurement assembly two for measuring measuring staff change in displacement in the embodiment of the present invention.
Fig. 2 is the light path schematic diagram that measuring staff change in displacement is measured in the embodiment of the present invention.
Fig. 3 is the structural schematic diagram of the one-dimensional laser scanning testing head of single light source provided in an embodiment of the present invention.
Fig. 4 is the light path schematic diagram that support base change in displacement is measured in the embodiment of the present invention.
Fig. 5 be Fig. 4 in the second photodetector rotate by a certain angle after light path schematic diagram.
Fig. 6 is member of translational and the structural schematic diagram that reply component is parallel spring structure in embodiment.
Fig. 7 is the structural schematic diagram of the one-dimensional laser scanning testing head of another single light source provided in an embodiment of the present invention.
Main element symbol description
Laser beam 100；Lasing light emitter 101；Hollow measuring staff 102；Survey ball 103；Spectroscope 104；First photodetector 105；
Reflective mirror 106；Second photodetector 107；Hollow support seat 108；Guide groove 109；Spring 110；Shell 111；Link block
112；Reed 113；Seat board 114；Survey the laser reflection plane 200 of ball；Transmission laser beam 300；The laser reflection of hollow support seat
Plane 400.
Specific implementation mode
Below in conjunction with attached drawing in the embodiment of the present invention, technical solution in the embodiment of the present invention carries out clear, complete
Ground describes, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.Usually exist
The component of the embodiment of the present invention described and illustrated in attached drawing can be arranged and be designed with a variety of different configurations herein.Cause
This, the detailed description of the embodiment of the present invention to providing in the accompanying drawings is not intended to limit claimed invention below
Range, but it is merely representative of the selected embodiment of the present invention.Based on the embodiment of the present invention, those skilled in the art are not doing
The every other embodiment obtained under the premise of going out creative work, shall fall within the protection scope of the present invention.
The one-dimensional laser scanning testing head of single light source provided in an embodiment of the present invention includes for measuring the one-dimensional direct position of support base
The measurement assembly one for moving variation further includes the measurement assembly two for measuring measuring staff deformation.
As a kind of embodiment, Fig. 1 shows the measurement assembly for measuring measuring staff change in displacement in the present embodiment
Two structure, referring to Fig. 1, in the present embodiment, the measurement assembly two for measuring measuring staff deformation includes measuring staff, surveys ball 103, swashs
Light source 101, spectroscope 104, the first photodetector 105 and processing system；Wherein, measuring staff is hollow measuring staff 102, surveys ball 103
It is set to one end of hollow measuring staff 102, and surveys the spherical surface that ball 103 is connect with hollow measuring staff 102 and is provided with laser reflection plane, is cut
Take a plane as laser reflection plane, the laser reflection plane 200 for surveying ball is located at the inside of hollow measuring staff 102.As one kind
Easy embodiment, survey ball 103 are segment, and the bottom surface of segment is as the laser reflection plane for surveying ball.
Lasing light emitter 101, for emitting laser beam 100；
Spectroscope 104 is obliquely installed in the other end of the hollow measuring staff 102, for emit the lasing light emitter 101
Laser beam 100 reflexes to the laser reflection plane 200 for surveying ball, and the laser beam that the laser reflection plane 200 for surveying ball is reflected is saturating
It is incident upon the first photodetector 105；
First photodetector 105, the laser reflection plane for receiving the survey ball transmitted through the spectroscope 104
The laser beam of 200 reflections；
Processing system, the change in location value of the laser beam received by first photodetector 105, obtains institute
State the change in displacement value of support base.
Support base, hollow measuring staff 102 are set to the support base, and the one side of support base is laser reflection plane；
Reflective mirror 106, for spectroscope transmitted light to be reflexed to the laser reflection plane on support base；
Second photodetector 107, the laser beam of the laser reflection plane reflection for receiving the support base；
Member of translational, for making the support base move in a straight line；
Reset components, for the support base to be reset to initial position；
The processing system is used for the change in location value according to laser beam received by second photodetector 107,
The change in displacement value for surveying ball 103 is calculated.
The one-dimensional laser scanning testing head of single light source is mounted on precision measuring instrument, is in direct contact with measured workpiece when surveying ball 103
When, it surveys ball 103 and will produce displacement by resistance, hollow measuring staff 102 is connect with ball 103 is surveyed, while hollow measuring staff 102 can also occur
Deformation.Fig. 1 shows the light path before the deformation of hollow measuring staff 102, and Fig. 2 shows 102 deformed light paths of hollow measuring staff.It please refers to
Fig. 1, Fig. 2, before hollow measuring staff 102 deforms, the laser beam 100 (collimated light beam) that lasing light emitter 101 is sent out is incident on spectroscope 104,
The laser beam 100 is reflexed to the laser reflection plane 200 for surveying ball by spectroscope 104, and the laser beam that spectroscope 104 reflects is through surveying ball
Laser reflection plane 200 be reflected into spectroscope 104 in reverse direction along former road；On the one hand, spectroscope 104 is anti-by the laser for surveying ball
The laser beam transmission of the reflection of plane 200 is penetrated to the first photodetector 105, on the other hand, spectroscope 104 is saturating by laser beam 100
It is incident upon reflective mirror 106, the transmission laser beam 300 reflected through reflective mirror 106 is incident to the laser reflection plane of hollow support seat
400, finally it is incident to the second photodetector 107.
After hollow measuring staff 102 deforms, the laser beam 100 that lasing light emitter 101 is sent out is incident on spectroscope 104, and spectroscope 104 will
The laser beam 100 reflexes to the laser reflection plane 200 for surveying ball, at this time compared with the input path before the deformation of hollow measuring staff 102,
Input path does not change, but the laser beam that spectroscope 104 is reflected into the laser reflection plane 200 for surveying ball is fallen in the laser for surveying ball
The drop point of the plane of reflection 200 is subjected to displacement, and angle change occurs for the laser reflection plane for surveying ball；Correspondingly, spectroscope 104 is saturating
The drop point for being mapped to the laser beam of the first photodetector 105 is subjected to displacement, as shown in Fig. 2, displacement is L0；Since the first photoelectricity is visited
Caused by the change in location for surveying the laser beam received by device 105 is the deformation by hollow measuring staff 102, thus it is hollow by measuring
Measuring staff 102 deforms the change in location of the laser beam received by front and back first photodetector 105, can obtain hollow measuring staff
102 deflection.
The change in location value of laser beam received by the first photodetector 105, obtains the change of hollow measuring staff 102
The mode of shape amount can there are many, such as calculate hollow measuring staff 102 and deform front and back geometrical relationship, obtain to reflect hollow survey
The mathematical expression that bar 102 deforms, such as can be by formulaCalculate the deflection of hollow measuring staff 102；As one kind
Simple and effective way can utilize statistics (i.e. test of many times measure) establish the change in displacement value and the of hollow measuring staff 102
The relation table of the change in location value of laser beam received by one photodetector 105, table look-at can obtain when reality measures
To the deformation values of hollow measuring staff 102.
It should be noted that because measuring staff is hollow measuring staff 102, therefore, the laser beam that spectroscope 104 reflects can pass through
Hollow measuring staff 102 is incident on the laser reflection plane 200 for surveying ball, and the laser beam for surveying the reflection of laser reflection plane 200 of ball also can
It is incident on spectroscope 104 across hollow measuring staff 102.Since hollow measuring staff 102 causes because surveying ball 103 and being in direct contact with measured workpiece
Deflection be also limited, therefore the aperture of hollow measuring staff 102 is enough to ensure that the laser beam that spectroscope 104 reflects can pass through
Hollow measuring staff 102 is incident on the laser reflection plane 200 for surveying ball, and the laser beam for surveying the reflection of laser reflection plane 200 of ball also can
It is incident on spectroscope 104 across hollow measuring staff 102.
The one-dimensional probe provided in the present embodiment can not only measure the direct change in displacement of support base, can also measure
The deformation of measuring staff can obtain and survey 103 more accurate sphere centre coordinate of ball, correct the centre of sphere caused by gauge head is deformed due to measuring staff and change
Amount, therefore compared with traditional one-dimensional probe, measurement accuracy higher, and it is simple in structure, it is easy to produce in batches.
For measure the one-dimensional direct change in displacement of support base measurement assembly one can there are many embodiment, for example, by using
Traditional trigger-type structure, scan-type structure etc., as a kind of citing of simple embodiment, Fig. 3 shows this implementation
A kind of structure of the one-dimensional laser scanning testing head of single light source provided in example.Referring to Fig. 3, in the present embodiment, for measuring support
The measurement assembly of the one-dimensional direct change in displacement of seat includes the survey ball 103, the hollow measuring staff 102, the processing system.
Hollow measuring staff 102 is set to support base, drives hollow measuring staff 102 to move when being moved in order to support base, hollow survey
Bar 102 can be set to the side wall (i.e. the outside of support base) of support base, in order to reduce the volume of entire one-dimensional probe, preferably
Hollow measuring staff 102 is set to the inside of support base by ground.As shown in figure 3, as a kind of citing of embodiment, support base
For hollow support seat 108, the hollow support seat 108 is equipped with and passes through for the hollow measuring staff 102 that (including hollow measuring staff 102 becomes
Can be passed through before and after shape) through-hole, the hollow measuring staff 102 away from it is described survey ball 103 one end be set to the hollow branch
It supports in seat 108.In addition, hollow support seat 108 to be designed as to hollow rectangular parallelepiped structure, tactical rule is readily produced.
In the present embodiment, one-dimensional probe further includes shell 111, and the second photodetector 107 is rotatably mounted to shell 111
It is interior.Member of translational is for translating hollow support seat 108, in particular for visiting hollow support seat 108 along perpendicular to the second photoelectricity
The direction for surveying device 107 moves in a straight line.As a kind of embodiment, specifically, member of translational includes being located in shell 111
Guide groove 109, hollow support seat 108 are equipped with the sliding block (not shown) being adapted to guide groove 109, and sliding block is set to hollow support
108 bottoms of seat, hollow support seat 108 can be moved in a straight line by sliding block in guide groove 109.It is to ensure sliding block and lead simultaneously
It is kept in contact to slot, magnetic patch is inlayed in sliding block, magnetic patch is set on guide groove, sliding block is kept in contact with guide groove by magnetic force.Hold
Intelligible, in order to not influence the normal deformation of hollow measuring staff 102, the structure of guide groove 109 can make hollow measuring staff 102 wear
It crosses.Include lasing light emitter 101, the first photodetector 105, spectroscope 104, reflective mirror 106, hollow support seat in the shell 111
108, the second photodetector 107 and member of translational, are easily installed and dismantle.
As a kind of citing of embodiment, reset components are set in shell 111, and reset components are spring 110, survey ball
103, which are subjected to displacement caused hollow support seat 108 by measured workpiece resistance, is subjected to displacement, multiple after gauge head is completed to measure
Hollow support seat 108 can be reset to initial position by position component, be convenient for the accurate measurement of next measured workpiece measurement point.
The position of reflective mirror 106 and the second photodetector 107 immobilizes, and member of translational can make hollow support seat
108 move in a straight line, and when 108 position of hollow support seat changes, the transmission laser beam 300 that reflective mirror 106 reflects is incident on
The position of the laser reflection plane of hollow support seat 108 changes, after the laser reflection plane 400 of hollow support seat reflects
The position be incident on the second photodetector 107 of laser beam also accordingly change, pass through the second photoelectricity of processing system pair
Detector 107 is calculated and is analyzed to the changing value of different laser beam incoming positions, can be obtained hollow support seat 108 and be existed
Change in displacement value positioned at its straight-line displacement direction.
As shown in figure 4, during hollow support seat 108 moves horizontally, it is assumed that 107 vertical direction of the second photodetector is set
Set, reflective mirror 106 is obliquely installed in the top of the second photodetector 107, and the transmission laser beam 300 of mirror reflection with it is perpendicular
The angle of straight line is α, and when translation distance is x to one-dimensional probe in the horizontal direction, 107 measurement distance of the second photodetector is y,
So, the 108 displacement equations multiple of hollow support seat obtained measured by the second photodetector 107 is
The one-dimensional probe is mounted on precision measurement instrument, when surveying ball 103 and measured workpiece is in direct contact, by resistance
Displacement is generated, ball 103 is surveyed and drives hollow support seat 108 that straight-line displacement occurs on member of translational, pass through reflective mirror 106, second
Photodetector 107, processing system cooperation, can be calculated the direct displacement of hollow bearing 108, simultaneously because the first light
The hollow measuring staff deflection obtained on electric explorer 105, you can obtain measured workpiece in 108 straight-line displacement side of hollow support seat
To more accurate measuring coordinate, improve the precision of measurement.Compared to traditional scanning probe, one in the present embodiment
Dimension gauge head simplifies structure, reduces production cost, is easy to batch machining manufacture.
In order to adjust the amplification factor that the second photodetector 107 measures the displacement of this one-dimensional probe, the second photodetector
107 rotatable on the side of shell 111.
Rotatable second photodetector 107 can change its rotation position according to practically necessary measurement accuracy, change
The relative position and angle for becoming the transmission laser beam 300 that the second photodetector 107 and reflective mirror 106 reflect, to change
Second photodetector 107 measures the amplification factor of the one-dimensional probe displacement, meets actual needs.
As shown in figure 5, rotating and being tilted a certain angle the second photodetector 107, after β, it can adjust and put again
Big multiple, obviously it can be seen that when hollow support seat 108 translates identical distance x in figure, the second photodetection after inclination
The incoming position of two incoming laser beams is changed on device 107, at this point, the spacing of the two isThe displacement equations of the hollow support seat 108 then obtained measured by the second photodetector 107
Multiple isThe angle can be adjusted according to different needs.
Common position can be selected in the first photodetector 105 and the second photodetector 107 used in the present embodiment
Sensing detector (Position Sensitive Detector, abbreviation PSD) is set, belongs to semiconductor devices, generally makes PN junction
Structure, operation principle are to be based on lateral photo effect, can be used in the accurate measurement of position coordinates, have highly sensitive, high score
The advantages that resolution, simple fast response time and configuration circuit.Position-Sensitive Detector is divided into One Dimensional Position Sensitive Detectors and two
Position-Sensitive Detector is tieed up, in order to cost-effective, the present embodiment selects One Dimensional Position Sensitive Detectors.One-dimensional position sensitive
Detector, abbreviation one-dimensional PSD, it is detectable go out surface of the bright spot in the unique direction of its one movement.One-dimensional PSD is pacified
Mounted in the X-axis of shell 111, Y-axis or Z axis or other directions, to obtain its shift value in the direction, and compensated
On the measured value of measured workpiece, to obtain the more accurate measured value of the one-dimensional square.
In structure shown in Fig. 3, member of translational includes the guide groove 109 being located in shell 111, and reset components are spring
110, as another embodiment, as shown in fig. 6, the member of translational and reset components can also be parallel spring structure,
The structure of wherein parallel spring includes the link block 112 being connected on hollow support seat 108 and the seat board being fixed on shell 111
114, there are two the reed 113 being mutually parallel, link block 112 can the relatively described seat board for connection between link block 112 and seat board 114
114 move in parallel and reset.
Specifically, link block 112 and seat board 114 are connect with two isometric reeds 113 being mutually parallel respectively, make connection
Block 112 is relatively moved to form a parallelogram parallel spring structure with seat board 114, due to 108 stress of hollow support seat
It moves, link block 112 can only be translatable with respect to seat board 114, and in one-dimensional square position can only occur for limitation hollow support seat 108
It moves, as shown by the arrows in Figure 6 moves left and right.Two reeds 113 are capable of providing restoring force.The parallel spring is simple in structure, returns
It is multiple efficient, it can effectively realize hollow support seat 108 in one-dimensional square such as X or Y or translation and the reset response of Z-direction.
Referring to Fig. 7, Fig. 7 shows the structure of the one-dimensional probe of another structure provided in the present embodiment, with Fig. 3 institutes
The structure of the one-dimensional probe shown is compared, and in structure shown in Fig. 7, the side of hollow support seat 108 is not laser reflection plane, i.e.,
The side is not provided with laser reflective film, and the second photodetector 107 is set to the side of hollow support seat 108, reflective mirror
The transmission laser beam 300 of 106 reflections is directly transmitted to the second photodetector 107.
During hollow support seat 108 moves horizontally, it is assumed that 107 vertical direction of the second photodetector is arranged, reflective mirror
The transmission laser beam 300 of reflection and the angle of vertical line are α, when translation distance is x to one-dimensional probe in the horizontal direction, the second light
107 measurement distance of electric explorer is y, then, 108 displacement of hollow support seat obtained measured by the second photodetector 107 is put
Big multiple isIf the second photodetector 107 is rotated and is tilted a certain angle, after β, in hollow support seat 108
When translating identical distance x, the incoming position of two incoming laser beams is become on the second photodetector 107 after inclination
Change, at this point, the spacing of the two is xtan α cos β+xtan α sin β cot (alpha-beta), then the second photodetector 107
The displacement equations multiple of measured obtained hollow support seat 108 is tan α cos β+tan α sin β cot (alpha-beta).
Second photodetector can be respectively relative to hollow support seat rotary setting, and similarly, reflective mirror can also carry out angle
Degree adjustment, to meet actual needs.
It should be noted that：Similar label and letter indicate similar terms in following attached drawing, therefore, once a certain Xiang Yi
It is defined, then it further need not be defined and explained in subsequent attached drawing in a attached drawing.Meanwhile the present invention's
In description, term " first ", " second " etc. are only used for distinguishing description, are not understood to indicate or imply relative importance.
The foregoing is only a preferred embodiment of the present invention, is not intended to restrict the invention, for the skill of this field
For art personnel, the invention may be variously modified and varied.All within the spirits and principles of the present invention, any made by repair
Change, equivalent replacement, improvement etc., should all be included in the protection scope of the present invention.
In the description of the present invention, it should be noted that the instructions such as term "upper", "lower", "left", "right", "inner", "outside"
Orientation or positional relationship be based on the orientation or positional relationship shown in the drawings or the invention product using when usually put
Orientation or positional relationship, be merely for convenience of description of the present invention and simplification of the description, do not indicate or imply the indicated device
Or element must have a particular orientation, with specific azimuth configuration and operation, therefore be not considered as limiting the invention.
In the description of the present invention, it is also necessary to which explanation is unless specifically defined or limited otherwise, term " setting ",
" installation ", " connected ", " connection " shall be understood in a broad sense, for example, it may be fixedly connected, may be a detachable connection or one
Connect to body；For the ordinary skill in the art, the tool of above-mentioned term in the present invention can be understood with concrete condition
Body meaning.
The above description is merely a specific embodiment, but scope of protection of the present invention is not limited thereto, any
Those familiar with the art in the technical scope disclosed by the present invention, can easily think of the change or the replacement, and should all contain
Lid is within protection scope of the present invention.
Claims (9)
1. a kind of one-dimensional laser scanning testing head of single light source includes the measurement assembly for measuring the variation of support base one dimension displacement, institute
It includes measuring staff and survey ball to state measurement assembly, which is characterized in that
The measuring staff is hollow measuring staff, and the ball of surveying is set to one end of the hollow measuring staff, and the survey ball with it is described hollow
The spherical surface of measuring staff connection is provided with laser reflection plane, and the laser reflection plane for surveying ball is located at the interior of the hollow measuring staff
Portion；The one-dimensional laser scanning testing head of single light source further includes：
Lasing light emitter, for emitting laser beam；
Spectroscope is obliquely installed in the other end of the hollow measuring staff, and the laser beam for emitting the lasing light emitter reflexes to
The laser reflection plane for surveying ball, and laser beam transmission to the first photoelectricity of the laser reflection plane reflection for surveying ball is visited
Device is surveyed, is additionally operable to the laser that the lasing light emitter emits being transmitted through reflective mirror；
First photodetector is used to receive the laser reflection plane reflection of the survey ball transmitted through the spectroscope
Laser beam；
Processing system obtains described for the change in location value of the laser beam received by first photodetector
The deflection of hollow measuring staff；
The support base, the hollow measuring staff are set to the support base, and the one side of the support base is laser reflection plane；
The reflective mirror, the laser beam for transmiting the spectroscope reflex to the laser reflection plane of the support base；
Second photodetector, the laser beam of the laser reflection plane reflection for receiving the support base；
Member of translational, for making the support base move in a straight line；
Reset components, for the support base to be reset to initial position；
The processing system is additionally operable to, according to the change in location value of laser beam received by second photodetector, calculate
To the change in displacement value of the support base.
2. the one-dimensional laser scanning testing head of single light source according to claim 1, which is characterized in that the survey ball is segment, ball
Scarce bottom surface is as the laser reflection plane for surveying ball.
3. the one-dimensional laser scanning testing head of single light source according to claim 2, which is characterized in that the support base is hollow branch
Support seat, the hollow support seat is equipped with the through-hole passed through for the hollow measuring staff, the hollow measuring staff away from the ball of surveying
One end is set in the hollow support seat.
4. the one-dimensional laser scanning testing head of single light source according to claim 3, which is characterized in that the one-dimensional laser of single light source
Scanning feeler further includes shell, and second photodetector is rotatably mounted in the shell.
5. the one-dimensional laser scanning testing head of single light source according to claim 4, which is characterized in that the member of translational includes position
Guide groove in the shell, the hollow support seat are equipped with sliding block compatible with the guide groove.
6. the one-dimensional laser scanning testing head of single light source according to claim 5, which is characterized in that the sliding block is magnetic sliding
Block, the guide groove are provided with magnetic part, and the sliding block is connect with the guide groove magnetic contact.
7. the one-dimensional laser scanning testing head of single light source according to claim 4, which is characterized in that the reset components are bullet
One end of spring, the spring is connected to the hollow support seat, and the other end is connected to the shell.
8. the one-dimensional laser scanning testing head of single light source according to claim 4, which is characterized in that the member of translational and described
Reset components are parallel spring structure, and the parallel spring structure includes being connected to link block and the fixation of the hollow support seat
There are two the reed being mutually parallel, the link blocks for connection between the seat board of the shell, the link block and the seat board
Can the relatively described seat board move in parallel and reset.
9. according to any one-dimensional laser scanning testing heads of single light source of claim 1-8, which is characterized in that first photoelectricity
Detector and second photodetector are Position-Sensitive Detector.
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| CN110500958B (en) * | 2019-09-30 | 2021-03-12 | 北方民族大学 | Laser scanning precision measuring head device |
| CN110553588A (en) * | 2019-10-15 | 2019-12-10 | 北方民族大学 | precise laser measuring head device of measuring instrument and using method thereof |
| DE202020002026U1 (en) * | 2020-05-08 | 2021-08-10 | Scherdel Marienberg Gmbh | Seat occupancy sensor for detecting the occupancy of a seat |
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