CN205388458U - Direct incident formula light arm enlargies linear gauge head of type two dimension - Google Patents

Direct incident formula light arm enlargies linear gauge head of type two dimension Download PDF

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Publication number
CN205388458U
CN205388458U CN201520768851.0U CN201520768851U CN205388458U CN 205388458 U CN205388458 U CN 205388458U CN 201520768851 U CN201520768851 U CN 201520768851U CN 205388458 U CN205388458 U CN 205388458U
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gauge head
photodetector
laser beam
head pedestal
lasing light
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CN201520768851.0U
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张白
潘俊涛
康学亮
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North Minzu University
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North Minzu University
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Abstract

The utility model discloses a direct incident formula light arm enlargies linear gauge head of type two dimension, including two laser sources that are used for launching two laser beams, the gauge head base that is used for fixed measuring staff and surveys the ball, the gauge head base is equipped with laser source or photoelectric detector, a two photoelectric detector for receiving two incident laser restraint, a translation part for making linear motion is to the gauge head base, a reply the part for inciting somebody to action the gauge head base is replied to initial position, the processing system of ball displacement value is surveyed in calculation. The linear gauge head of this novel two dimension can obtain the displacement volume two different rectilinear directions through two photoelectric detector to measured deviation during compensation measured workpiece location obtains more accurate measurement coordinate. The utility model provides the high measurement accuracy of two -dimentional linear gauge head has simplified the structure, has reduced manufacturing cost, easily manufacturing in batches.

Description

A kind of directly incident-type light arm scale-up version two-dimensional linear gauge head
Technical field
This utility model relates to a kind of Technology of Precision Measurement field, particularly to a kind of novel smooth arm amplifying type two-dimensional line gauge head.
Background technology
Gauge head is one of critical component of precision measurement instrument, provides the geometric position information of measured workpiece as sensor, and the level of development of gauge head directly affects certainty of measurement and the measurement efficiency of precision measurement instrument.Precision feeler be generally divided into contact measuring head and contactless survey first two, wherein contact measuring head is divided into again mechanical type gauge head, touch trigger probe and scanning probe;Contactless gauge head is divided into laser feeler and optical video gauge head.
Mechanical type gauge head is that precision measurement instrument uses a kind of gauge head earlier.This gauge head is directly contacted with measured workpiece by gauge head survey end and carries out position measurement, is mainly used in manual measurement.Such measuring head structure is simple, easy to operate, and its shortcoming is in that precision is not high, measures efficiency low, is currently rarely used for field of industrial measurement.The widely used precision feeler in current industrial field is touch trigger probe.The measuring principle of touch trigger probe is to survey precision measurement instrument when end contacts with measured workpiece when gauge head to send sampling pulse signal, and is latched the coordinate figure now surveying the end centre of sphere by the process system of instrument, determines the coordinate surveying end with measured workpiece contact point with this.Such gauge head has the advantages such as simple in construction, easy to use and higher triggering precision, is most widely used gauge head in three dimensional probe, 3-D probe.But there is anisotropy (triangle effect) in having drawbacks in that of such gauge head, or contact measuring head produces micro-displacement because of resistance thus causing the offset deviation of gauge head when contacting measured workpiece, limiting the further raising of its certainty of measurement, full accuracy can only reach zero point several microns.On the other hand, it is spot measurement owing to touch trigger probe measuring principle determines its measurement process, measures efficiency low, limit it and promote the use of.
The gauge head type that current application is the widest is scanning probe, and such gauge head output is directly proportional to gauge head side-play amount, high as a kind of precision, function strong, the gauge head of wide adaptability, is provided simultaneously with workpiece spot measurement and the function of continuous scanning survey.The measuring principle of such gauge head is that gauge head surveys end after contact measured workpiece, gauge head is subjected to displacement due to the effect of contact force, the conversion equipment of gauge head exports the signal being directly proportional to the minor shifts of measuring staff, and the respective coordinate value superposition of this signal and precision measurement instrument just can obtain the accurate coordinates of point on measured workpiece.If being left out the deformation of measuring staff, scanning probe is isotropic, therefore its precision is significantly larger than touch trigger probe.But it is complicated that the shortcoming of such gauge head is structure, and manufacturing cost is high, fewer companies is only had to produce at present in the world.
Utility model content
The purpose of this utility model is in that to overcome mechanical type gauge head existing in prior art and touch trigger probe precision not high, and the above-mentioned deficiency that scanning probe structure is complicated, relatively costly, the direct incident-type light arm scale-up version two-dimensional linear gauge head that a kind of simple in construction, certainty of measurement are high is provided, this two-dimensional linear gauge head can move in known plane, compensate the measured deviation during measured workpiece location that when surveying ball contact measured workpiece, displacement causes, it is thus achieved that measured workpiece measures coordinate more accurately.
In order to realize above-mentioned utility model purpose, this utility model provides techniques below scheme:
Technical scheme one:
A kind of directly incident-type light arm scale-up version two-dimensional linear gauge head, including:
Two lasing light emitters, are used for launching two laser beams, and namely lasing light emitter one launches laser beam one, and lasing light emitter two launches laser beam two;
Gauge head pedestal, is provided with described lasing light emitter one and lasing light emitter two, and for the measuring staff detected and survey ball;
Two photodetectors, namely photodetector one, photodetector two, be respectively used to receive laser beam one, laser beam two;
Member of translational, is used for making described gauge head pedestal do rectilinear motion;
Reply parts, for described gauge head pedestal is returned back to initial position;
Process system, according to the laser beam one being respectively received on described photodetector one, photodetector two, laser beam two incoming position changing value, calculates the change in displacement value obtaining described survey ball.
Technical scheme two:
A kind of directly incident-type light arm scale-up version two-dimensional linear gauge head, including:
Two lasing light emitters, are used for launching two laser beams, and namely lasing light emitter one launches laser beam one, and lasing light emitter two launches laser beam two;
Two photodetectors, namely photodetector one, photodetector two, be respectively used to receive described laser beam one, laser beam two;
Gauge head pedestal, described gauge head pedestal is provided with photodetector one and photodetector two and for the measuring staff detected and survey ball;
Member of translational, is used for making described gauge head pedestal do rectilinear motion;
Reply parts, for described gauge head pedestal is returned back to initial position;
Process system, according to the laser beam one being respectively received on described photodetector one, photodetector two, laser beam two incoming position changing value, calculates the change in displacement value obtaining described survey ball.
This direct incident-type light arm scale-up version two-dimensional linear gauge head, utilizes two lasing light emitters to launch two bundle laser beams respectively, and often bundle laser beam is collimated laser beam, incides on two photodetectors, and each photodetector can sense the incoming position of corresponding laser beam.When member of translational drives gauge head pedestal to do rectilinear motion, namely member of translational can rectilinear translation gauge head pedestal, then lasing light emitter changes with corresponding photodetector distance, namely the position that two bundle laser beams incide on corresponding photodetector respectively also changes accordingly, according to geometrical relationship, the incoming position changing value that each laser beam is incided on corresponding photodetector by process system respectively is calculated and analyzes, gauge head pedestal can be obtained and be positioned at the change in displacement value in its straight-line displacement direction, and then it is capable of the two-dimension displacement measurement that this gauge head pedestal synthesizes in both direction, gauge head pedestal can return back to initial position by reply parts after being subjected to displacement, it is easy to measurement next time.
nullDuring use,This two-dimensional linear gauge head is arranged on precision measurement instrument,Owing to gauge head pedestal connecting measuring staff and survey ball,Survey ball to be used for directly contacting with measured workpiece positioning and completing precision measurement instrument and measure,When surveying ball and directly contacting with measured workpiece,It is subject to resistance and produces displacement,Survey the dynamic gauge head pedestal of spherical zone on member of translational, produce displacement,By two lasing light emitters、Two photodetectors、Process system coordinates,The displacement obtaining surveying ball can be calculated,To compensate the measured deviation surveyed when the measured workpiece that when ball contacts measured workpiece, displacement causes positions,Owing to each photodetector can obtain the displacement of a rectilinear direction,The displacement two different rectilinear directions can be accessed by two photodetectors,Coordinate is measured more accurately obtaining measured workpiece on the two-dimensional directional of gauge head pedestal,Full accuracy can reach Nano grade,This gauge head improves the certainty of measurement of two-dimensional linear gauge head.This gauge head simplifies structure, reduces production cost, it is easy to batch machining manufacture.
Preferably, the plane of incidence of two described photodetectors in technical scheme one or technical scheme two is arranged in a mutually vertical manner, described member of translational is for taking exercises described gauge head pedestal along the vertical plane of relative two described photodetectors, realize the position that laser beam incides on corresponding photodetector to change, to realize measurement.
It is further preferred that described member of translational includes two gathering sills being parallel to each other, sliding and be provided with at least one gathering sill two between described gathering sill one, described gathering sill one is mutually perpendicular to gathering sill two, and described gathering sill two is slidably connected described gauge head pedestal.
Member of translational completes the straight-line displacement of different directions by orthogonal gathering sill one, gathering sill two, and gathering sill two can slide along the vertical direction of gathering sill one, and gauge head pedestal can slide along gathering sill two, it is achieved two-dimensional movement.When surveying ball and directly contacting with measured workpiece, being subject to resistance, gauge head pedestal respective guide slot two produces to slide, gathering sill two respective guide slot one again produces to slide, and then realize the displacement in both direction of the gauge head pedestal, and the plane that the two direction is constituted, it is the two-dimension displacement face of gauge head pedestal.
This gauge head includes the housing for being fixed on precision measurement instrument, includes two lasing light emitters, two photodetectors, gauge head pedestal, member of translational and replys parts, it is simple to installation and removal in this housing.
Preferably, the two-dimensional linear gauge head in technique scheme one also includes housing, and two described photodetectors are installed on the housing, and described reply parts are spring, and wherein one end connects on the housing, the other end is connected on described gauge head pedestal.
Further preferably, photodetector is rotatably mounted on described housing, lasing light emitter is arranged on described gauge head pedestal, rotatable photodetector could alter that relative position and the angle of photodetector and corresponding lasing light emitter, thus changing photodetector to measure the amplification of gauge head displacement, two photodetectors could alter that measurement pedestal is being positioned at the displacement measurement amplification of different directions, is actually needed to meet.
Preferably, the two-dimensional linear gauge head in this technique scheme two also includes housing, and two described lasing light emitters are rotatably mounted on described housing, and described reply parts are spring, and wherein one end connects on the housing, the other end is connected on described gauge head pedestal.
Detector is further preferably, lasing light emitter is rotatably mounted on described housing, photodetector is arranged on described gauge head pedestal, rotatable lasing light emitter could alter that relative position and the angle of lasing light emitter and corresponding photodetector, thus changing photodetector to measure the amplification of gauge head displacement, two photodetectors could alter that measurement pedestal is being positioned at the displacement measurement amplification of different directions, is actually needed to meet.
Preferably, the described photodetector in all technical schemes one and technical scheme two is Position-Sensitive Detector.
The Position-Sensitive Detector for commonly using selected by this photodetector, and (English is PositionSensitiveDetector, it is called for short PSD), belong to semiconductor device, generally make PN, its operation principle is based on lateral photo effect, can be used in the accurate measurement of position coordinates, there is the advantages such as high sensitivity, high-resolution, fast response time and configuration circuit are simple.
It is further preferred that described photodetector is One Dimensional Position Sensitive Detectors.
One Dimensional Position Sensitive Detectors (abbreviation one-dimensional PSD), it is possible to detect the movement at its unique direction upper surface of the bright spot.Respectively one-dimensional PSD is arranged on the X-axis of housing, Y-axis or Z axis or other directions, to obtain its shift value in the direction, and is compensated on the measured value of measured workpiece, to obtain this one-dimensional direction measured value more accurately.
Compared with prior art, the beneficial effects of the utility model:
1, one described in the utility model direct incident-type light arm scale-up version two-dimensional linear gauge head, these two kinds of technical schemes all utilize two lasing light emitters to launch two bundle laser beams respectively, inciding on two photodetectors, each photodetector can sense the incoming position of corresponding laser beam;When member of translational drives gauge head pedestal to do rectilinear motion, the position that two bundle laser beams incide on corresponding photodetector respectively also changes accordingly;According to geometrical relationship, each laser beam is incided incoming position changing value on corresponding photodetector and is calculated and analyzes by process system respectively, gauge head pedestal can be obtained and be positioned at the change in displacement value in its straight-line displacement direction, and then be obtained in that the two dimensional displacement quantity that this gauge head pedestal synthesizes in both direction;Gauge head pedestal be subjected to displacement after by replying part reverts to initial position, it is simple to measurement next time;This two dimension gauge head is arranged on precision measurement instrument, by two lasing light emitters, two photodetectors, process system coordinates, the displacement obtaining surveying ball can be calculated, the measured workpiece deviations that when ball contacts measured workpiece, displacement causes is surveyed to compensate, owing to each photodetector can obtain the displacement of a rectilinear direction, the displacement two different rectilinear directions can be accessed by two photodetectors, measured workpiece can be obtained and measure coordinate more accurately in gauge head pedestal two-dimension displacement direction, full accuracy can reach Nano grade, improve the certainty of measurement of two-dimensional linear gauge head, this gauge head simplifies structure, reduce production cost, it is prone to batch machining manufacture;
2, member of translational described in the utility model completes the straight-line displacement of different directions by orthogonal gathering sill one, gathering sill two, and gathering sill two can slide along gathering sill one, and gauge head pedestal can slide along gathering sill two, it is achieved two-dimensional movement;When surveying ball and directly contacting with measured workpiece, it is subject to resistance, gauge head pedestal respective guide slot two produces to slide, gathering sill two respective guide slot one again produces to slide, and then realize the displacement in both direction of the gauge head pedestal, the plane that the two direction is constituted, is the two-dimension displacement face of gauge head pedestal, and this member of translational simple in construction, easy for installation, certainty of measurement is high;
3, this gauge head includes the housing for being fixed on precision measurement instrument, integrated two lasing light emitters in this housing, two photodetectors, gauge head pedestal, member of translational and reply parts, it is simple to installation and removal;
4, each photodetector described in the utility model is rotatable relative to gauge head pedestal, it is thus possible to change relative position and the angle of this photodetector and lasing light emitter, thus changing photodetector to measure the amplification of gauge head displacement, two photodetectors could alter that measurement pedestal is being positioned at the displacement measurement amplification of two different directions, to obtain this two-dimensional directional measured value more accurately, it is actually needed to meet;
5, each lasing light emitter described in the utility model is rotatable relative to gauge head pedestal, it is thus possible to change relative position and the angle of this photodetector and lasing light emitter, thus changing photodetector to measure the amplification of gauge head displacement, two photodetectors could alter that measurement pedestal is being positioned at the displacement measurement amplification of two different directions, to obtain this two-dimensional directional measured value more accurately, it is actually needed to meet;
Accompanying drawing illustrates:
Fig. 1 is the structural representation of a kind of direct incident-type light arm scale-up version two-dimensional linear gauge head described in the utility model;
Fig. 2 be in Fig. 1 gauge head pedestal on member of translational with two photodetector cooperatings time top view;
Fig. 3 is the structural representation of member of translational in Fig. 2;
Fig. 4 is gauge head pedestal light path schematic diagram before and after member of translational top offset in Fig. 1;
Fig. 5 be in Fig. 4 photodetector one rotate to an angle after light path schematic diagram;
Fig. 6 is the another kind of structural representation of a kind of direct incident-type light arm scale-up version two-dimensional linear gauge head described in the utility model;
Fig. 7 be in Fig. 5 gauge head pedestal on member of translational with two lasing light emitter cooperatings time top view.
Fig. 8 is two-layer double reed sheet structure two-dimensional linear measuring head structure schematic diagram
Labelling in Fig. 1-7:
11, lasing light emitter one, 12, lasing light emitter two, 21, laser beam one, 22, laser beam two, 31, photodetector one, 32, photodetector two, 4, gauge head pedestal, 5, reply parts, 6, measuring staff, 7, survey ball, 81, gathering sill one, 82, gathering sill two, 83, slide block.
Labelling in Fig. 8:
11, lasing light emitter one, 12, lasing light emitter two, 21, laser beam one, 22, laser beam two, 31, photodetector one, 32, photodetector two, 4, gauge head pedestal, 6, measuring staff, 7, survey ball, 81, reed one, 82, reed two, 91, bracing frame is installed, 92, fixed flat planar, 93, gauge head pedestal mounting plate.
Detailed description of the invention
Below in conjunction with test example and detailed description of the invention, this utility model is described in further detail.But this should not being interpreted as, the scope of the above-mentioned theme of this utility model is only limitted to below example, and all technology realized based on this utility model content belong to scope of the present utility model.
Embodiment 1
As it is shown in figure 1, a kind of directly incident-type light arm scale-up version two-dimensional linear gauge head, including:
Two lasing light emitters, are used for launching two laser beams, and namely lasing light emitter 1 launches laser beam 1, and lasing light emitter 2 12 launches laser beam 2 22;
Gauge head pedestal 4, described gauge head pedestal 4 is provided with lasing light emitter 1 and lasing light emitter 2 12, and for the measuring staff 6 detected and survey ball 7;
Two photodetectors, namely photodetector 1, photodetector 2 32, be respectively used to receive laser beam 1, laser beam 2 22;
Member of translational, is used for making gauge head pedestal 4 do rectilinear motion;
Reply parts 5, for gauge head pedestal 4 is returned back to initial position;
Process system, according to laser beam 1 received on photodetector 1, photodetector 2 32, laser beam 2 22 incoming position changing value, calculates the change in displacement value obtaining surveying ball 7.
Wherein, the plane of incidence of two above-mentioned photodetectors is arranged in a mutually vertical manner, member of translational is used for translating gauge head pedestal 4, take exercises along a vertical plane (i.e. horizontal plane in Fig. 1) of relative two photodetectors by gauge head pedestal 4, the position incided on corresponding photodetector to realize laser beam changes, to realize the measurement of gauge head displacement.
As it is shown on figure 3, the concrete structure of this member of translational is: include two gathering sills being parallel to each other 1, slides between two gathering sills 1 and be provided with two gathering sills 2 82, two gathering sills 2 82 are connected to bottom gauge head pedestal 4 by slide block 83.This member of translational completes the straight-line displacement of different directions by the gathering sill 1 being arranged in a mutually vertical manner, gathering sill 2 82, gathering sill 2 82 can slide along gathering sill 1, gauge head pedestal 4 can slide along gathering sill 2 82, it is achieved two-dimensional movement.When surveying ball 7 and directly contacting with measured workpiece, it is subject to resistance, gauge head pedestal 4 respective guide slot 2 82 produces to slide, gathering sill 2 82 respective guide slot 1 again produces to slide, and then realize the gauge head pedestal 4 displacement in both direction, the plane that the two direction is constituted, is the two-dimension displacement face of gauge head pedestal 4.
This two-dimensional linear gauge head also includes housing, two lasing light emitters are arranged on gauge head pedestal 4, two photodetectors are connected in housing, and these reply parts 5 are spring or reed, and the one end wherein replying parts 5 is connected on housing, the other end is connected on gauge head pedestal 4.Include two lasing light emitters, two photodetectors, gauge head pedestal, member of translational in this housing and reply parts, it is simple to installation and removal.
This direct incident-type light arm scale-up version two-dimensional linear gauge head, utilizes two lasing light emitters to launch two bundle laser beams respectively, and often bundle laser beam is collimated laser beam, incides on two photodetectors, and each photodetector can sense the incoming position of corresponding laser beam.When member of translational drives gauge head pedestal 4 to do rectilinear motion, namely member of translational can rectilinear translation gauge head pedestal 4, then lasing light emitter changes with corresponding photodetector distance, namely the position that two bundle laser beams incide on corresponding photodetector respectively also changes accordingly, according to geometrical relationship, the incoming position changing value that each laser beam is incided on corresponding photodetector by process system respectively is calculated and analyzes, gauge head pedestal 4 can be obtained and be positioned at the change in displacement value in its straight-line displacement direction, and then it is capable of the two-dimension displacement measurement that this gauge head pedestal 4 synthesizes in both direction, gauge head pedestal 4 can return back to initial position by reply parts after being subjected to displacement, it is easy to measurement next time.
Conventional Position-Sensitive Detector selected by the photodetector that this utility model uses.Position-Sensitive Detector, English name is PositionSensitiveDetector, it is called for short PSD, belong to semiconductor device, generally make PN, its operation principle is based on lateral photo effect, it is possible to for the accurate measurement of position coordinates, have the advantages such as high sensitivity, high-resolution, fast response time and configuration circuit are simple.This Position-Sensitive Detector is divided into One Dimensional Position Sensitive Detectors and two-dimensional position-sensitive detector, and in order to save cost, this two-dimensional linear gauge head selects One Dimensional Position Sensitive Detectors.Wherein One Dimensional Position Sensitive Detectors (abbreviation one-dimensional PSD), detectable go out the movement on the surface in its a unique direction of bright spot.Respectively one-dimensional PSD is arranged on the X-axis of housing, Y-axis or Y-axis, Z axis or X-axis, Z axis, to obtain its shift value in different two vertical direction, and is compensated on the measured value of measured workpiece, to obtain this two-dimensional directional measured value more accurately.
As it is shown in figure 5, in order to adjust laser beam 1, laser beam 2 22 correspondence incoming position and angle on photodetector 1, photodetector 2 32, this photodetector 1, photodetector 2 32 are rotatable on the side be positioned at housing.Each photodetector 1, photodetector 2 32 are rotatably connected on housing.Rotatable photodetector could alter that relative position and the angle of photodetector and corresponding lasing light emitter, thus changing photodetector to measure the amplification of gauge head displacement, two photodetectors could alter that measurement pedestal 4 is being positioned at the displacement measurement amplification of different directions, is actually needed to meet.
The measuring principle of this gauge head is as shown in Figure 4, for realizing two-dimensional measurement, X-axis displacement measurement light path and Y-axis optical path is built respectively according to Fig. 1 at the correspondence position of gauge head pedestal 4, X-axis optical path is built in the left and right sides of gauge head pedestal 4, build Y-axis optical path in the both sides, front and back of gauge head pedestal 4, realize the measurement of X-direction displacement and Y-direction displacement respectively.Gauge head pedestal 4 moves horizontally in process, laser beam is incident on the incidence point of corresponding photodetector and changes, assume that incident laser is α degree with the angle of corresponding photodetector, when gauge head translation distance in the horizontal direction is x, distance measured by photodetector 1 is y, so, the displacement equations multiple of gauge head pedestal 4 plane of incidence 1 obtained measured by photodetector 1 is
As shown in Figure 5, photodetector 1 is rotated and tilts certain angle, after θ, can again adjust amplification, figure substantially can be seen that when gauge head pedestal 4 translates identical distance x, on One Dimensional Position Sensitive Detectors after inclination, the incoming position of two incoming laser beams there occurs change, the spacing of the two becomes big, the spacing of the two is x tan α cos θ+x tan α sin θ cot (α-θ), now, the gauge head pedestal 4 displacement equations multiple obtained measured by this photodetector 1 is tan α cos θ+tan α sin θ cot (α-θ).Can be adjusted according to different needs.
nullDuring measurement,This two dimension gauge head is arranged on precision measurement instrument,Owing to gauge head pedestal 4 connecting measuring staff 6 and survey ball 7,Survey ball 7 to position aiming for directly contacting with measured workpiece and complete precision measurement instrument measurement,When surveying ball 7 and directly contacting with measured workpiece,It is subject to resistance and produces displacement,Surveying ball 7 drives gauge head pedestal 4 to produce displacement on member of translational,By two lasing light emitters、Two photodetectors、Process system coordinates,The displacement obtaining surveying ball 7 can be calculated,To compensate the measured deviation surveyed when the measured workpiece that when ball 7 contacts measured workpiece, displacement causes positions,Owing to each photodetector can obtain the displacement of a rectilinear direction,The displacement two different rectilinear directions can be accessed by two photodetectors,Coordinate is measured more accurately at two-dimensional directional obtaining measured workpiece at gauge head pedestal 4,Full accuracy can reach Nano grade,Improve the certainty of measurement of two-dimensional linear gauge head.This gauge head simplifies structure, reduces production cost, it is easy to batch machining manufacture.
Embodiment 2
As shown in Figure 6, a kind of directly incident-type light arm scale-up version two-dimensional linear gauge head, including:
Two lasing light emitters, are used for launching two laser beams, and namely lasing light emitter 1 launches laser beam 1, and lasing light emitter 2 12 launches laser beam 2 22;
Two photodetectors, namely photodetector 1, photodetector 2 32, be respectively used to receive laser beam 1, laser beam 2 22;
Gauge head pedestal 4, described gauge head pedestal 4 is provided with photodetector 1, photodetector 2 32, and for the measuring staff 6 detected and survey ball 7;
Member of translational, is used for making gauge head pedestal 4 do rectilinear motion;
Reply parts 5, for gauge head pedestal 4 is returned back to initial position;
Process system, according to laser beam 1 received on photodetector 1, photodetector 2 32, laser beam 2 22 incoming position changing value, calculates the change in displacement value obtaining surveying ball 7.
Wherein, the plane of incidence of two above-mentioned photodetectors is arranged in a mutually vertical manner, member of translational is used for translating gauge head pedestal 4, take exercises along a vertical plane (i.e. horizontal plane in Fig. 6) of relative two photodetectors by gauge head pedestal 4, the position incided on corresponding photodetector to realize laser beam changes, to realize the measurement of gauge head displacement.
As it is shown on figure 3, the concrete structure of this member of translational is: include two gathering sills being parallel to each other 1, slides between two gathering sills 1 and be provided with two gathering sills 2 82, two gathering sills 2 82 are connected to bottom gauge head pedestal 4 by slide block 83.This member of translational completes the straight-line displacement of different directions by the gathering sill 1 being arranged in a mutually vertical manner, gathering sill 2 82, gathering sill 2 82 can slide along gathering sill 1, gauge head pedestal 4 can slide along gathering sill 2 82, it is achieved two-dimensional movement.When surveying ball 7 and directly contacting with measured workpiece, it is subject to resistance, gauge head pedestal 4 respective guide slot 2 82 produces to slide, gathering sill 2 82 respective guide slot 1 again produces to slide, and then realize the gauge head pedestal 4 displacement in both direction, the plane that the two direction is constituted, is the two-dimension displacement face of gauge head pedestal 4.
This two-dimensional linear gauge head also includes housing, two lasing light emitters are arranged on gauge head pedestal 4, two photodetectors are connected in housing, and these reply parts 5 are spring or reed, and the one end wherein replying parts 5 is connected on housing, the other end is connected on gauge head pedestal 4.Include two lasing light emitters, two photodetectors, gauge head pedestal, member of translational in this housing and reply parts, it is simple to installation and removal.
Above-mentioned gauge head pedestal 4 selects cuboid, gauge head pedestal 4 to be connected below measuring staff 5, and measuring staff 5 end connects surveys ball 6.
The present embodiment is consistent with embodiment 1 principle, is only arranged on gauge head pedestal 4 by photodetector, and lasing light emitter is arranged on housing.
Embodiment 3
Direct incident-type light arm scale-up version two-dimensional linear gauge head in the present embodiment, basically identical with embodiment 1, only member of translational adopts double reed sheet structure to realize with replying parts, and concrete structure includes:
Two lasing light emitters, are used for launching two laser beams, and namely lasing light emitter 1 launches laser beam 1, and lasing light emitter 2 12 launches laser beam 2 22;
Two photodetectors, namely photodetector 1, photodetector 2 32, be respectively used to receive laser beam 1, laser beam 2 22;
Gauge head pedestal 4, described gauge head pedestal 4 is provided with lasing light emitter 1, lasing light emitter 2 12, and for the measuring staff 6 detected and survey ball 7;
As shown in Figure 8, member of translational with reply parts, be used for making gauge head pedestal 4 do rectilinear motion, after being measured, again gauge head pedestal 4 returned back to initial position, in the present embodiment adopt double reed sheet structure realize member of translational with reply component function.
Process system, according to laser beam 1 received on photodetector 1, photodetector 2 32, laser beam 2 22 incoming position changing value, calculates the change in displacement value obtaining surveying ball 7.
As shown in Figure 8, this two-layer double reed sheet structure is mainly made up of two-layer parallel spring structure.Wherein gauge head pedestal 4 is installed on gauge head pedestal mounting plate 93.Gauge head pedestal mounting plate 93 arranges two hollow reeds 1 being parallel to each other, the end of this reed 1 connects installs on bracing frame 91, make gauge head pedestal mounting plate 93 under the effect of two hollow reeds 1, bracing frame 91 can be mounted opposite along the direction being perpendicular to hollow reed 1 plane and swing back and forth.Install and bracing frame 91 is additionally provided with 2 parallel reeds 2 82, its end is connected on fixed flat planar 92, reed 2 82 and hollow reed 1 are arranged in a mutually vertical manner, and make installation bracing frame 91 can be relatively fixed flat board 92 in the direction being perpendicular to reed 2 82 plane and swing back and forth.Can in the rectilinear motion of mutually perpendicular two hollow reeds 1 and reed 2 82 in-plane and return motion thus realizing gauge head pedestal 4;Thus forming gauge head pedestal 4 in two different rectilinear directions and the straight-line displacement of XY direction and return motion.
Above example only in order to this utility model is described and and technical scheme described by unrestricted this utility model, although this utility model is had been carried out describing in detail by this specification with reference to each above-mentioned embodiment, but this utility model is not limited to above-mentioned detailed description of the invention, therefore any this utility model modified or equivalent replaces;And all are without departing from the technical scheme of the spirit and scope of utility model and improvement thereof, it all should be encompassed in the middle of right of the present utility model.

Claims (10)

1. a direct incident-type light arm scale-up version two-dimensional linear gauge head, it is characterised in that including:
Two lasing light emitters, are used for launching two laser beams, and namely lasing light emitter one (11) launches laser beam one (21), and lasing light emitter two (12) launches laser beam two (22);
Two photodetectors, namely photodetector one (31), photodetector two (32), be respectively used to receive described laser beam one (21), laser beam two (22);
Gauge head pedestal (4), described gauge head pedestal is provided with described lasing light emitter one (11) and lasing light emitter two (12), and for the measuring staff (6) detected and survey ball (7);
Member of translational, is used for making described gauge head pedestal (4) do rectilinear motion;
Reply parts (5), for described gauge head pedestal (4) is returned back to initial position;
Process system, according to the laser beam one (21) being respectively received on described photodetector one (31), photodetector two (32), laser beam two (22) incoming position changing value, calculate the change in displacement value obtaining described survey ball (7).
2. one according to claim 1 direct incident-type light arm scale-up version two-dimensional linear gauge head, it is characterized in that, also include housing, described photodetector one (31), photodetector two (32) are connected in described housing, described reply parts (5) are spring, and wherein one end connects on the housing, the other end is connected on described gauge head pedestal (4).
3. one according to claim 2 direct incident-type light arm scale-up version two-dimensional linear gauge head, it is characterised in that at least one described photodetector is rotatably connected on the housing.
4. a direct incident-type light arm scale-up version two-dimensional linear gauge head, it is characterised in that including:
Two lasing light emitters, are used for launching two laser beams, and namely lasing light emitter one (11) launches laser beam one (21), and lasing light emitter two (12) launches laser beam two (22);
Two photodetectors, namely photodetector one (31), photodetector two (32), be respectively used to receive described laser beam one (21), laser beam two (22);
Gauge head pedestal (4), described gauge head pedestal is provided with described photodetector one (31) and photodetector two (32), and for the measuring staff (6) detected and survey ball (7);
Member of translational, is used for making described gauge head pedestal (4) do rectilinear motion;
Reply parts (5), for described gauge head pedestal (4) is returned back to initial position;
Process system, according to the laser beam one (21) being respectively received on described photodetector one (31), photodetector two (32), laser beam two (22) incoming position changing value, calculate the change in displacement value obtaining described survey ball (7).
5. a kind of directly incident-type light arm scale-up version two-dimensional linear gauge head according to claim 1 or 4, it is characterized in that, described photodetector one (31), photodetector two (32) the plane of incidence be arranged in a mutually vertical manner, described member of translational for by described gauge head pedestal (4) along relatively described photodetector one (31), photodetector two (32) vertical plane take exercises.
6. one according to claim 5 direct incident-type light arm scale-up version two-dimensional linear gauge head, it is characterized in that, described member of translational includes two gathering sills being parallel to each other (81), slide between described gathering sill one (81) and be provided with at least one gathering sill two (82), described gathering sill one (81) is mutually perpendicular to gathering sill two (82), and described gathering sill two (82) is slidably connected described gauge head pedestal (4).
7. one according to claim 4 direct incident-type light arm scale-up version two-dimensional linear gauge head, it is characterized in that, also include housing, described lasing light emitter one (11), lasing light emitter two (12) are fixed in described housing, described reply parts (5) are spring, and wherein one end connects on the housing, the other end is connected on described gauge head pedestal (4).
8. one according to claim 7 direct incident-type light arm scale-up version two-dimensional linear gauge head, it is characterised in that at least one described lasing light emitter is rotatably connected on the housing.
9. one according to claim 5 direct incident-type light arm scale-up version two-dimensional linear gauge head, it is characterised in that described photodetector one (31), photodetector two (32) are Position-Sensitive Detector.
10. one according to claim 9 direct incident-type light arm scale-up version two-dimensional linear gauge head, it is characterised in that described photodetector one (31), photodetector two (32) are One Dimensional Position Sensitive Detectors.
CN201520768851.0U 2015-09-30 2015-09-30 Direct incident formula light arm enlargies linear gauge head of type two dimension Withdrawn - After Issue CN205388458U (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105180813A (en) * 2015-09-30 2015-12-23 北方民族大学 Direct incident type light arm amplifying two-dimensional linear probe

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105180813A (en) * 2015-09-30 2015-12-23 北方民族大学 Direct incident type light arm amplifying two-dimensional linear probe
CN105180813B (en) * 2015-09-30 2019-06-07 北方民族大学 A kind of direct incident-type light arm scale-up version two-dimensional linear gauge head

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