CN105136038A - Direct-incidence light arm amplification type three-dimensional scanning measuring head - Google Patents
Direct-incidence light arm amplification type three-dimensional scanning measuring head Download PDFInfo
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- CN105136038A CN105136038A CN201510639541.3A CN201510639541A CN105136038A CN 105136038 A CN105136038 A CN 105136038A CN 201510639541 A CN201510639541 A CN 201510639541A CN 105136038 A CN105136038 A CN 105136038A
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- photodetector
- gauge head
- laser beam
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- lasing light
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
- G01B11/005—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines
- G01B11/007—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines feeler heads therefor
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
- G01B5/004—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points
- G01B5/008—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points using coordinate measuring machines
- G01B5/012—Contact-making feeler heads therefor
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- Length Measuring Devices By Optical Means (AREA)
Abstract
Disclosed in the invention is a direct-incidence light arm amplification type three-dimensional scanning measuring head comprising three laser sources for emitting three laser beams, a measuring head pedestal, three photoelectric detectors, a translation component, a return component, and a processing system. The measuring head pedestal is used for fixing a measuring rod and a measuring ball and is provided with the laser sources or photoelectric detectors. The three photoelectric detectors are used for receiving three incident laser beams. The translation component is used for enabling the measuring head pedestal to make linear motions. The return component is used for returning the measuring head pedestal to an initial position; and the processing system is used for carrying out calculation to obtain a three-dimensional displacement changing value of the measuring ball. According to the novel three-dimensional scanning measuring head, measuring head displacement at three different linear directions can be obtained by using the three photoelectric detectors, thereby obtaining an accurate measurement coordinate of a measured workpiece. Therefore, the measurement precision is improved; the structure is simplified; the production cost is reduced; and batch processing and production of measuring heads can be realized easily.
Description
Technical field
The present invention relates to a kind of Technology of Precision Measurement field, particularly one direct incident-type light arm scale-up version 3-D scanning gauge head.
Background technology
Gauge head is one of critical component of precision measurement instrument, provides the geometric position information of measured workpiece as sensor, and the development level of gauge head directly affects the measuring accuracy of precision measurement instrument and measurement efficiency.Precision feeler be usually divided into contact measuring head and contactless survey first two, wherein contact measuring head is divided into again mechanical type gauge head, touch trigger probe and scanning probe; Contactless gauge head is divided into laser feeler and optical video gauge head.
Mechanical type gauge head is a kind of gauge head that precision measurement instrument uses comparatively early.This gauge head is surveyed end by gauge head and directly to be contacted with measured workpiece and carry out position measurement, is mainly used in manual measurement.Such measuring head structure is simple, easy to operate, and its shortcoming is that precision is not high, measures efficiency low, and there be limited evidence currently of is used for field of industrial measurement.The widely used precision feeler in current industrial field is touch trigger probe.The measuring principle of touch trigger probe surveys precision measurement instrument when end contacts with measured workpiece when gauge head to send sampling pulse signal, and now survey the coordinate figure of the end centre of sphere by the disposal system latch of instrument, determines with this coordinate surveying end and measured workpiece contact point.Such gauge head has the advantages such as simple, the easy to use and higher triggering precision of structure, is most widely used gauge head in three dimensional probe, 3-D probe.But the shortcoming of such gauge head is: there is anisotropy (triangle effect), or contact measuring head produces micro-displacement when contacting measured workpiece because of resistance thus causes the offset deviation of gauge head, limit the further raising of its measuring accuracy, full accuracy can only reach zero point several microns.On the other hand, be spot measurement because touch trigger probe measuring principle determines its measuring process, measure efficiency low, limit it and promote the use of.
The gauge head type that current application is the widest is scanning probe, and such gauge head output quantity is directly proportional to gauge head side-play amount, and, function high as a kind of precision is strong, the gauge head of wide adaptability, possesses the function that workpiece spot measurement and continuous sweep are measured simultaneously.The measuring principle of such gauge head is that gauge head surveys end after contact measured workpiece, gauge head is subjected to displacement due to the effect of contact force, the conversion equipment of gauge head exports the signal be directly proportional to the minor shifts of measuring staff, and the respective coordinate value superposition of this signal and precision measurement instrument just can obtain the accurate coordinates that measured workpiece is put.If do not consider the distortion of measuring staff, scanning probe is isotropic, therefore its precision is far away higher than touch trigger probe.But the shortcoming of such gauge head is complex structure, and manufacturing cost is high, fewer companies is only had to produce at present in the world.
Summary of the invention
To the object of the invention is to overcome in prior art existing mechanical type gauge head and touch trigger probe precision not high, and scanning probe complex structure, above-mentioned deficiency that cost is higher, the novel three-dimensional scanning feeler that a kind of structure is simple, measuring accuracy is higher is provided, this 3-D scanning gauge head can record the displacement of gauge head in three directions, by displacement superposed, the measured workpiece position measurement deviation that when surveying ball contact measured workpiece, displacement causes can be compensated, obtain measured workpiece surving coordinate more accurately.
In order to realize foregoing invention object, the invention provides following technical scheme:
Technical scheme one:
A kind of directly incident-type light arm scale-up version 3-D scanning gauge head, comprising:
Three lasing light emitters, for launching three laser beam, i.e. lasing light emitter one Emission Lasers bundle one, lasing light emitter two Emission Lasers bundle two, lasing light emitter three Emission Lasers bundle three;
Gauge head pedestal, is provided with described lasing light emitter one, lasing light emitter two and lasing light emitter three, and for the measuring staff that detects with survey ball;
Three photodetectors, i.e. photodetector one, photodetector two and photodetector three, be respectively used to receive laser beam one, laser beam two and laser beam three;
Member of translational, does rectilinear motion for making described gauge head pedestal;
Reply parts, for described gauge head pedestal is returned back to initial position;
Disposal system, according to the laser beam one that described photodetector one, photodetector two and photodetector three obtain respectively, laser beam two and laser beam three incoming position changing value, calculate the three-D displacement changing value of described survey ball.
Technical scheme two:
A kind of directly incident-type light arm scale-up version 3-D scanning gauge head, comprising:
Three lasing light emitters, for launching three laser beam, i.e. lasing light emitter one Emission Lasers bundle one, lasing light emitter two Emission Lasers bundle two, lasing light emitter three Emission Lasers bundle three;
Three photodetectors, i.e. photodetector one, photodetector two and photodetector three, be respectively used to receive laser beam one, laser beam two and laser beam three;
Gauge head pedestal, described gauge head pedestal is provided with photodetector one, photodetector two and photodetector three, and for the measuring staff that detects with survey ball;
Member of translational, does rectilinear motion for making described gauge head pedestal;
Reply parts, for described gauge head pedestal is returned back to initial position;
Disposal system, according to the laser beam one that described photodetector one, photodetector two and photodetector three obtain respectively, laser beam two and laser beam three incoming position changing value, calculate the three-D displacement changing value of described survey ball.
This novel smooth arm amplifying type 3-D scanning gauge head, utilizes three lasing light emitters to launch three laser beam respectively, and often restraint laser beam and be collimated laser beam, incide on three photodetectors, each photodetector can respond to the incoming position of corresponding laser beam.When member of translational drives gauge head pedestal to do rectilinear motion, namely member of translational can along different directions translation gauge head pedestal, then lasing light emitter changes with corresponding photodetector distance, namely three beams of laser bundle incides that position on corresponding photodetector is also corresponding to change respectively, according to geometric relationship, disposal system calculates the incoming position changing value that each laser beam incides on corresponding photodetector and analyzes respectively, gauge head pedestal can be obtained and be positioned at the change in displacement value in its straight-line displacement direction, and then this gauge head pedestal can be realized measure at the three-D displacement of three direction composition, initial position can be returned back to by replying parts after gauge head pedestal is subjected to displacement, be convenient to measurement next time.
During use, this 3-D scanning gauge head is arranged on precision measurement instrument, owing to gauge head pedestal connecting measuring staff and surveying ball, survey ball to be used for directly contacting with measured workpiece carrying out position measurement, when surveying ball and directly contacting with measured workpiece, be subject to resistance and produce displacement, survey spherical zone moves gauge head pedestal and produce displacement on member of translational, by three lasing light emitters, three photodetectors, disposal system coordinates, the displacement surveying ball can be calculated, the measured workpiece position measurement deviation that displacement of ball causes is surveyed during to compensate and to survey ball contact measured workpiece, because each photodetector can obtain the displacement of a rectilinear direction, the shift offset three different rectilinear directions can be accessed by three photodetectors, to obtain measured workpiece position coordinates more accurately, full accuracy can reach Nano grade, improve the measuring accuracy of 3-D scanning gauge head.This gauge head simplifies the structure, and reduces production cost, is easy to batch machining manufacture.
Preferably, in described technical scheme one or technical scheme two, the plane of incidence of three described photodetectors is vertically arranged mutually, described member of translational is used for described gauge head pedestal respectively along moving relative to three orthogonal directions of described photodetector one, photodetector two, photodetector three, realize the position that laser beam incides on corresponding photodetector to change, to realize measuring.
Further preferably, described member of translational comprises at least one gathering sill one being positioned at horizontal direction, between all described gathering sills one, vertically horizontal slip is provided with at least one gathering sill two, all described gathering sills two are vertically provided with at least one gathering sill three, all described gathering sills three slide up and down along perpendicular and connects described gauge head pedestal.
This member of translational comprises gathering sill one, gathering sill two and gathering sill three respectively, wherein gathering sill two can slide by respective guide slot one, gathering sill three can slide by respective guide slot two, the glide direction of gathering sill one is mutually vertical with the glide direction of gathering sill two, the glide direction of gathering sill two is mutually vertical with the glide direction of gathering sill three, gathering sill three connects gauge head pedestal by slide block 84, gauge head pedestal can in the enterprising line slip of gathering sill three, therefore, it is possible to realize gauge head pedestal respectively to carry out displacement in three-dimensional i.e. three orthogonal directions.
Preferably, reply parts in described technical scheme one or technical scheme two comprise spring leaf one, spring leaf two, spring leaf three, wherein said reed one to be located on gathering sill one described at least one and for described gathering sill two is returned back to initial position, described reed two to be located on gathering sill two described at least one and for described gathering sill three is returned back to initial position, and described reed three to be located on described gathering sill three and for described gauge head pedestal is returned back to initial position.
These reply parts comprise spring leaf one, spring leaf two, the spring leaf three be located at respectively on gathering sill one, gathering sill two, gathering sill three, respectively gathering sill two, gathering sill three and gauge head pedestal can be returned back to initial position, be incident to position on three photodetectors by three laser beam and return back to original position, be convenient to the measurement next time of gauge head system.
Further preferably, described in described technical scheme one, gauge head pedestal is rectangular parallelepiped, three lasing light emitters is located at these three sides, and described photodetector one, photodetector two and photodetector three be vertical setting mutually between two.
Further preferably, in described technical scheme one, the rotatable installation of photodetector on the housing, lasing light emitter is arranged on described gauge head pedestal, rotatable photodetector can change relative position and the angle of photodetector and corresponding lasing light emitter, thus change the enlargement factor that gauge head displacement measured by photodetector, three photodetectors can change measures pedestal being positioned at the displacement measurement enlargement factor of different directions, to meet actual needs.
Preferably, described in described technical scheme two, gauge head pedestal is rectangular parallelepiped, three photodetectors is located at these three sides, and described photodetector one, photodetector two and photodetector three be vertical setting mutually between two.
Further preferably, in described technical scheme two, the rotatable installation of lasing light emitter on the housing, photodetector is arranged on described gauge head pedestal, rotatable lasing light emitter can change relative position and the angle of lasing light emitter and corresponding photodetector, thus change the enlargement factor that gauge head displacement measured by photodetector, three photodetectors can change measures pedestal being positioned at the displacement measurement enlargement factor of different directions, to meet actual needs.
Preferably, the 3-D scanning gauge head in this technical scheme one also comprises housing, and three described photodetectors connect on the housing, and described reply parts are spring, and wherein one end connects on the housing, the other end is connected on described gauge head pedestal.
Preferably, the 3-D scanning gauge head in this technical scheme two also comprises housing, and three described lasing light emitters connect on the housing, and described reply parts are spring, and wherein one end connects on the housing, the other end is connected on described gauge head pedestal.
Preferably, this gauge head comprises the housing for being fixed on precision measurement instrument, comprises three lasing light emitters, three photodetectors, gauge head pedestal, member of translational and replys parts, be convenient to installation and removal in this housing.
Preferably, photodetector one, photodetector two and the photodetector three in described technical scheme one and technical scheme two is Position-Sensitive Detector.
(English is PositionSensitiveDetector to this Position-Sensitive Detector, be called for short PSD), belong to semiconductor devices, generally make PN, its principle of work is based on lateral photo effect, can be used in the accurate measurement of position coordinates, there is the advantages such as high sensitivity, high resolving power, fast response time and configuration circuit are simple.
Further preferably, described photodetector one, photodetector two and photodetector three are One Dimensional Position Sensitive Detectors.
One Dimensional Position Sensitive Detectors (abbreviation one-dimensional PSD), can detect the movement of a bright spot at its unique direction upper surface.
Compared with prior art, beneficial effect of the present invention:
1, one of the present invention direct incident-type light arm scale-up version 3-D scanning gauge head, two kinds of technical schemes all utilize three lasing light emitters to launch three beams of laser bundle respectively, incide on three photodetectors, each photodetector can respond to the incoming position of corresponding laser beam, when member of translational drives gauge head pedestal to do rectilinear motion, three beams of laser bundle incides that position on corresponding photodetector is also corresponding to change respectively, according to geometric relationship, disposal system incides incoming position changing value on corresponding photodetector to each laser beam respectively and calculates and analyze, gauge head pedestal can be obtained and be positioned at the change in displacement value in its straight-line displacement direction, and then the three-D displacement amount of this gauge head pedestal at three direction composition can be obtained, by replying part reverts to initial position after gauge head pedestal is subjected to displacement, be convenient to measurement next time, this three dimensional probe, 3-D probe is arranged on precision measurement instrument, by three lasing light emitters, three photodetectors, disposal system coordinates, the displacement surveying ball can be calculated, the measured workpiece deviations that when surveying ball contact measured workpiece to compensate, displacement causes, because each photodetector can obtain the displacement of a rectilinear direction, the displacement three different rectilinear directions can be accessed by three photodetectors, the more accurately surving coordinate of measured workpiece in gauge head pedestal three-D displacement direction can be obtained, full accuracy can reach Nano grade, improve the measuring accuracy of 3-D scanning gauge head, this gauge head simplifies the structure, reduce production cost, be easy to batch machining manufacture,
2, member of translational of the present invention comprises gathering sill one, gathering sill two and gathering sill three, wherein gathering sill two can slide by respective guide slot one, gathering sill three can slide by respective guide slot two, the glide direction of gathering sill one is mutually vertical with the glide direction of gathering sill two, the glide direction of gathering sill two is mutually vertical with the glide direction of gathering sill three, gathering sill three to be vertically slidably connected gauge head pedestal by slide block, gauge head pedestal can in the enterprising line slip of gathering sill three, therefore, it is possible to realize gauge head pedestal respectively to carry out displacement in three-dimensional i.e. three orthogonal directions, this member of translational structure is simple, easy for installation, measuring accuracy is high,
3, reply parts of the present invention comprise spring leaf one, spring leaf two, the spring leaf three be located at respectively on gathering sill one, gathering sill two, gathering sill three, respectively gathering sill two, gathering sill three and gauge head pedestal can be returned back to initial position, the position be incident on three photodetectors by three laser beam returns back to original position, is convenient to the measurement of gauge head next time;
4, three lasing light emitters, three photodetectors and member of translational are integrated on housing by the present invention, and be convenient to mount and dismount on precision measuring instrument, in measuring process, stability is better;
5, gauge head reply parts of the present invention and member of translational adopt stacked parallel spring structure, are convenient to processing and install, and adopt Z-shaped reed structure to make measuring head structure compacter simultaneously.
Accompanying drawing illustrates:
Fig. 1 is the structural representation of a kind of direct incident-type light arm scale-up version 3-D scanning gauge head of the present invention;
Fig. 2 is the index path that in Fig. 1, three lasing light emitters, three laser beam, three photodetectors coordinate with gauge head pedestal;
Fig. 3 be in Fig. 1 member of translational and reply parts and gauge head pedestal with the use of vertical view;
Fig. 4 is the front elevation of Fig. 3;
Fig. 5 is the light path comparison diagram that in Fig. 1,3-D scanning gauge head is subjected to displacement the cooperation of rear lasing light emitter one, laser beam one and photodetector one;
Fig. 6 is the schematic diagram that in Fig. 5, photodetector one changes displacement equations multiple after rotating to an angle.
Fig. 7 is the structural representation of the second direct incident-type light arm scale-up version 3-D scanning gauge head;
Fig. 8 is the 3-D scanning gauge head agent structure schematic diagram adopting parallel spring structure in embodiment 3;
Fig. 9 is that in Fig. 8, gauge head pedestal mount pad faces structural representation;
Mark in Fig. 1-7:
11, lasing light emitter one, 12, lasing light emitter two, 13, lasing light emitter three, 21, laser beam one, 22, laser beam two, 23, laser beam three, 31, photodetector one, 32, photodetector two, 33, photodetector three, 4, gauge head pedestal, 51, spring leaf one, 52, spring leaf two, 53, spring leaf three, 6, measuring staff, 7, survey ball, 8, member of translational, 81, gathering sill one, 82, gathering sill two, 83, gathering sill three, 84, slide block, 9, housing;
Mark in Fig. 8-9:
11, lasing light emitter one, 12, lasing light emitter two, 13, lasing light emitter three, 21, laser beam one, 22, laser beam two, 23, laser beam three, 31, photodetector one, 32, photodetector two, 33, photodetector three, 4, gauge head pedestal, 51, spring leaf one, 52, spring leaf two, 53, spring leaf three, 6, measuring staff, 7, survey ball, 81, hollow reed, 82, reed, 83, Z-shaped reed, 9, housing, 91, gauge head pedestal mount pad, 92, reed mount pad, 93, fixed installation panel.
Embodiment
Below in conjunction with test example and embodiment, the present invention is described in further detail.But this should be interpreted as that the scope of the above-mentioned theme of the present invention is only limitted to following embodiment, all technology realized based on content of the present invention all belong to scope of the present invention.
Embodiment 1
As shown in Figure 1, 2, a kind of directly incident-type light arm scale-up version 3-D scanning gauge head, comprising:
Three lasing light emitters, i.e. lasing light emitter 1, lasing light emitter 2 12 and lasing light emitter 3 13, produce three laser beam, i.e. laser beam 1, laser beam 2 22 and laser beam 3 23 respectively;
Gauge head pedestal 4, described gauge head pedestal 4 is provided with lasing light emitter 1, lasing light emitter 2 12 and lasing light emitter 3 13, and for the measuring staff 6 that detects with survey ball 7;
Three photodetectors, i.e. photodetector 1, photodetector 2 32 and photodetector 3 33, be respectively used to receive laser beam 1, laser beam 2 22 and laser beam 3 23;
Member of translational, does rectilinear motion for making gauge head pedestal 4;
Reply parts, for gauge head pedestal 4 is returned back to initial position;
Disposal system, according to the laser beam 1 that photodetector 1, photodetector 2 32 and photodetector 3 33 receive respectively, laser beam 2 22 and laser beam 3 23 incoming position changing value, calculates the three-D displacement changing value surveying ball 7.
Wherein, three above-mentioned photodetectors are vertically arranged mutually, and member of translational is used for translation gauge head pedestal 4, and the position incided on corresponding photodetector to realize laser beam changes, to realize the measurement of gauge head displacement.
As shown in Figure 3,4, this member of translational comprises two gathering sills 1 being positioned at horizontal direction, between two gathering sills 1, vertically horizontal slip is provided with a gathering sill 2 82, gathering sill 2 82 is provided with a gathering sill 3 83, and on gathering sill 3 83, perpendicular slides up and down and connects described gauge head pedestal 4.Because this member of translational comprises gathering sill 1 respectively, gathering sill 2 82 and gathering sill 3 83, wherein gathering sill 2 82 can respective guide slot 1 horizontal slip, gathering sill 3 83 can respective guide slot 2 82 horizontal slip, the glide direction of gathering sill 1 is mutually vertical with the glide direction of gathering sill 2 82, the glide direction of gathering sill 2 82 is mutually vertical with the glide direction of gathering sill 3 83, gathering sill 3 83 to be vertically slidably connected gauge head pedestal 4 by slide block 84, gauge head pedestal 4 can slide up and down on gathering sill 3 83, therefore, it is possible to realize gauge head pedestal 4 respectively to carry out displacement in three-dimensional i.e. three orthogonal directions.If four-headed arrow in Fig. 3 is sense of displacement.
As shown in Figure 3,4, above-mentioned reply parts comprise spring leaf one, spring leaf two, spring leaf three, wherein reed one to be located at least one gathering sill 1 and for gathering sill 2 82 is returned back to initial position, reed two to be located at least one gathering sill 2 82 and for described gathering sill 3 83 is returned back to initial position, and reed three to be located on gathering sill 3 83 and for gauge head pedestal 4 is returned back to initial position.Gathering sill 2 82, gathering sill 3 83 and gauge head pedestal 4 can be returned back to initial position by this spring leaf one, spring leaf two, spring leaf three respectively, the position be incident on three photodetectors by three laser beam returns back to original position, is convenient to the measurement next time of gauge head system.
Above-mentioned gauge head pedestal 4 is rectangular parallelepiped, and photodetector 1, photodetector 2 32 and photodetector 3 33 be vertical setting mutually between two.
This 3-D scanning gauge head also comprises housing 9, and three lasing light emitters are arranged on gauge head pedestal 4, and three photodetectors are connected in housing 9, and these reply parts 5 are spring, and the one end of wherein replying parts 5 is connected on housing 9, the other end is connected on gauge head pedestal 4.Comprise three lasing light emitters, three photodetectors, gauge head pedestal, member of translational in this housing and reply parts, being convenient to installation and removal.
This novel three-dimensional scanning feeler, utilizes three lasing light emitters to launch three laser beam respectively, and often restraint laser beam and be collimated laser beam, incide on three photodetectors, each photodetector can respond to the incoming position of corresponding laser beam.When member of translational drives gauge head pedestal to do rectilinear motion, namely member of translational can along different directions translation gauge head pedestal, then lasing light emitter changes with corresponding photodetector distance, namely three beams of laser bundle incides that position on corresponding photodetector is also corresponding to change respectively, according to geometric relationship, disposal system calculates the incoming position changing value that each laser beam incides on corresponding photodetector and analyzes respectively, gauge head pedestal can be obtained and be positioned at the change in displacement value in its straight-line displacement direction, and then this gauge head pedestal can be realized measure at the three-D displacement of three direction composition, initial position can be returned back to by replying parts after gauge head pedestal is subjected to displacement, be convenient to measurement next time.
Above-mentioned photodetector 1, photodetector 2 32 and photodetector 3 33 all adopt One Dimensional Position Sensitive Detectors.(English is PositionSensitiveDetector to this Position-Sensitive Detector, be called for short PSD), belong to semiconductor devices, generally make PN, its principle of work is based on lateral photo effect, can be used in the accurate measurement of position coordinates, there is the advantages such as high sensitivity, high resolving power, fast response time and configuration circuit are simple.
One Dimensional Position Sensitive Detectors (abbreviation one-dimensional PSD), can detect the movement of a bright spot at its unique direction upper surface.
Respectively one-dimensional PSD is arranged on the X-axis of housing 9, Y-axis or Z axis, or other directions, to obtain its shift value in this direction, and is compensated on the measured value of measured workpiece, to obtain this one-dimensional square to measured value more accurately.
In photodetector 1, photodetector 2 32 and photodetector 3 33, at least one can be rotatably connected on housing 9.Because rotatable photodetector can change relative position and the angle of photodetector and corresponding lasing light emitter, thus the enlargement factor that the displacement of gauge head pedestal 4 measured by photodetector can be changed, three photodetectors can change measures pedestal 4 being positioned at the displacement equations multiple of different directions, to meet actual needs.
As shown in Figure 5, for realizing three-dimensional measurement, building X-axis, Y-axis, Z axis three-D displacement optical path at the correspondence position of gauge head pedestal 4 respectively according to Fig. 1, realizing the measurement of X-direction displacement, Y-direction displacement and Z-direction displacement respectively.Gauge head pedestal 4 moves horizontally in process, the incidence point that laser beam is incident on corresponding photodetector changes, suppose that laser beam 1 incides on photodetector 1 and the angle of its incident light and photodetector 1 is α degree, when translation distance is x to gauge head in the horizontal direction, photodetector 1 measuring distance is y, so, the displacement equations multiple of the gauge head pedestal 4 obtained measured by photodetector 1 is
As shown in Figure 6, photodetector 1 is rotated and the certain angle that tilts, after rotating θ, again can adjust enlargement factor, obviously can find out when the distance x that gauge head pedestal 4 translation is identical in figure, on One Dimensional Position Sensitive Detectors after inclination, the incoming position of laser beam there occurs change, the spacing of the two becomes large, the spacing of the two is xtan α cos θ+xtan α sin θ cot (α-θ), now, the gauge head pedestal 4 displacement equations multiple obtained measured by this One Dimensional Position Sensitive Detectors 31 is tan α cos θ+tan α sin θ cot (α-θ).Can adjust according to different needs.
During use, this 3-D scanning gauge head is arranged on precision measurement instrument, owing to gauge head pedestal 4 connecting measuring staff 6 and surveying ball 7, survey ball 7 and carry out position measurement for directly contacting with measured workpiece, when surveying ball 7 and directly contacting with measured workpiece, be subject to resistance and produce displacement, surveying ball 7 drives gauge head pedestal 4 to produce displacement on member of translational, by three lasing light emitters, three photodetectors, disposal system coordinates, the displacement surveying ball 7 can be calculated, the measured workpiece position measurement deviation that when ball 7 contacts measured workpiece, displacement causes is surveyed to compensate, because each photodetector can obtain the displacement of a rectilinear direction, the displacement three different rectilinear directions can be accessed by three photodetectors, to obtain the more accurately surving coordinate of measured workpiece on the three-dimensional of gauge head pedestal 4, full accuracy can reach Nano grade, improve the measuring accuracy of 3-D scanning gauge head.This gauge head simplifies the structure, and reduces production cost, is easy to batch machining manufacture.
Embodiment 2
As shown in Figure 7, a kind of directly incident-type light arm scale-up version 3-D scanning gauge head, comprising:
Three lasing light emitters, i.e. lasing light emitter 1, lasing light emitter 2 12 and lasing light emitter 3 13, produce three laser beam, i.e. laser beam 1, laser beam 2 22 and laser beam 3 23 respectively;
Three photodetectors, i.e. photodetector 1, photodetector 2 32 and photodetector 3 33, be respectively used to receive laser beam 1, laser beam 2 22 and laser beam 3 23;
Gauge head pedestal 4, described gauge head pedestal 4 is provided with photodetector 1, photodetector 2 32 and photodetector 3 33, and for the measuring staff 6 that detects with survey ball 7;
Member of translational, does rectilinear motion for making gauge head pedestal 4;
Reply parts, for gauge head pedestal 4 is returned back to initial position;
Disposal system, according to the laser beam 1 that photodetector 1, photodetector 2 32 and photodetector 3 33 receive respectively, laser beam 2 22 and laser beam 3 23 incoming position changing value, calculate the three-D displacement changing value surveying ball 7.
Wherein, three above-mentioned photodetectors are vertically arranged mutually, and member of translational is used for translation gauge head pedestal 4, and the position incided on corresponding photodetector to realize laser beam changes, to realize the measurement of gauge head displacement.
As shown in Figure 3,4, this member of translational comprises two gathering sills 1 being positioned at horizontal direction, between two gathering sills 1, vertically horizontal slip is provided with a gathering sill 2 82, gathering sill 2 82 is provided with a gathering sill 3 83, and on gathering sill 3 83, perpendicular slides up and down and connects described gauge head pedestal 4.Because this member of translational comprises gathering sill 1 respectively, gathering sill 2 82 and gathering sill 3 83, wherein gathering sill 2 82 can respective guide slot 1 horizontal slip, gathering sill 3 83 can respective guide slot 2 82 horizontal slip, the glide direction of gathering sill 1 is mutually vertical with the glide direction of gathering sill 2 82, the glide direction of gathering sill 2 82 is mutually vertical with the glide direction of gathering sill 3 83, gathering sill 3 83 to be vertically slidably connected gauge head pedestal 4 by slide block 84, gauge head pedestal 4 can slide up and down on gathering sill 3 83, therefore, it is possible to realize gauge head pedestal 4 respectively to carry out displacement in three-dimensional i.e. three orthogonal directions.If four-headed arrow in Fig. 3 is sense of displacement.
As shown in Figure 3,4, above-mentioned reply parts comprise spring leaf one, spring leaf two, spring leaf three, wherein spring leaf one to be located at least one gathering sill 1 and for gathering sill 2 82 is returned back to initial position, spring leaf two to be located at least one gathering sill 2 82 and for described gathering sill 3 83 is returned back to initial position, and spring leaf three to be located on gathering sill 3 83 and for gauge head pedestal 4 is returned back to initial position.This spring leaf one, spring leaf two, spring leaf three, respectively gathering sill 2 82, gathering sill 3 83 and gauge head pedestal 4 can be returned back to initial position, the position be incident on three photodetectors by three laser beam returns back to original position, is convenient to the measurement next time of gauge head system.
Above-mentioned gauge head pedestal 4 is rectangular parallelepiped, and photodetector 1, photodetector 2 32 and photodetector 3 33 be vertical setting mutually between two.
This 3-D scanning gauge head also comprises housing 9, and three photodetectors are arranged on gauge head pedestal 4, and three lasing light emitters are connected in housing 9, and these reply parts 5 are spring, and the one end of wherein replying parts 5 is connected on housing 9, the other end is connected on gauge head pedestal 4.Comprise three lasing light emitters, three photodetectors, gauge head pedestal, member of translational in this housing and reply parts, being convenient to installation and removal.
This novel three-dimensional scanning feeler, utilizes three lasing light emitters to launch three laser beam respectively, and often restraint laser beam and be collimated laser beam, incide on three photodetectors, each photodetector can respond to the incoming position of corresponding laser beam.When member of translational drives gauge head pedestal to do rectilinear motion, namely member of translational can along different directions translation gauge head pedestal, then lasing light emitter changes with corresponding photodetector distance, namely three beams of laser bundle incides that position on corresponding photodetector is also corresponding to change respectively, according to geometric relationship, disposal system calculates the incoming position changing value that each laser beam incides on corresponding photodetector and analyzes respectively, gauge head pedestal can be obtained and be positioned at the change in displacement value in its straight-line displacement direction, and then this gauge head pedestal can be realized measure at the three-D displacement of three direction composition, initial position can be returned back to by replying parts after gauge head pedestal is subjected to displacement, be convenient to measurement next time.
The present embodiment is consistent with embodiment 1 principle, and be only arranged on by photodetector on gauge head pedestal 4, lasing light emitter 1 is arranged on housing 9.
Embodiment 3
A kind of directly incident-type light arm scale-up version 3-D scanning gauge head, as the same manner as in Example 1, comprising:
As shown in figs. 1-7, three lasing light emitters, i.e. lasing light emitter 1, lasing light emitter 2 12 and lasing light emitter 3 13, produce three laser beam, i.e. laser beam 1, laser beam 2 22 and laser beam 3 23 respectively;
Gauge head pedestal 4, comprises the measuring staff 6 for detecting and surveys ball 7;
Gauge head pedestal 4 can by disposed thereon for three lasing light emitters, also can by disposed thereon for three photodetectors;
Three photodetectors, i.e. photodetector 1, photodetector 2 32 and photodetector 3 33, be respectively used to receive laser beam 1, laser beam 2 22 and laser beam 3 23;
Member of translational and reply parts, for making gauge head pedestal 4 do rectilinear motion, to change the incidence point position of laser beam corresponding to photodetector;
Reply parts, for gauge head pedestal 4 is returned back to initial position;
Parallel spring structure is adopted to realize member of translational and the function of replying parts in the present embodiment.
Disposal system, according to the laser beam 1 that photodetector 1, photodetector 2 32 and photodetector 3 33 receive respectively, laser beam 2 22 and laser beam 3 23 incoming position changing value, calculate the three-D displacement changing value surveying ball 7.
With in embodiment 1 unlike, member of translational and the reply parts of this scanning feeler are different, wherein the member of translational of two sense of displacement is all realized by the parallel spring structure of with reply parts, and the member of translational in another direction and reply parts pass through a Z-shaped reed structure realization.
As shown in Figure 8,9, its agent structure forms primarily of two-layer parallel spring structure and a Z-shaped reed.Wherein gauge head pedestal 4 is arranged on 4 Z-shaped reeds 83, specifically 4 Z-shaped reeds 83 while be connected on gauge head pedestal mount pad 91, the another side of 4 Z-shaped reeds 83 is connected on gauge head pedestal 4, and gauge head pedestal 4 can move back and forth perpendicular to the direction of paper by Fig. 9 relatively.Gauge head pedestal mount pad 91 is connected by the hollow reed 81 that 2 are parallel to each other with reed mount pad 92, and gauge head mount pad 91 under the effect of hollow reed 81, can be swung back and forth along the relative reed mount pad 92 in direction perpendicular to hollow reed 81.Reed mount pad 92 is connected on fixed installation panel 93 by 2 parallel reeds 82, and reed 82 is arranged with hollow reed 81 is mutual vertical, makes reed mount pad 92 can relatively fixedly mount panel 93 in the direction perpendicular to reed 82 plane and swings back and forth.Thus realize gauge head pedestal 4 in the rectilinear motion of mutually perpendicular two hollow reeds 81 and reed 82 in-plane and return motion; In addition, realize the rectilinear motion of gauge head pedestal 4 in another one direction and return motion by 4 Z-shaped reeds 83, thus form gauge head pedestal 4 in three different rectilinear directions and the straight-line displacement of XYZ direction.
Photodetector 31, photodetector 32, photodetector 33 can be arranged on gauge head housing, or are arranged on gauge head pedestal 4.Lasing light emitter 11, lasing light emitter 12, lasing light emitter 13 are arranged on fixed installation panel 93, or are arranged on gauge head housing.
By above-mentioned agent structure by coordinating with three laser beam, three photodetectors, conveniently obtain the offset deviation of gauge head pedestal 4 in three different rectilinear directions and XYZ direction, to obtain measured workpiece position coordinates more accurately, full accuracy can reach Nano grade, improves the measuring accuracy of 3-D scanning gauge head; This gauge head simplifies the structure, and reduces production cost, is easy to batch machining manufacture.
Above embodiment only in order to the present invention is described and and unrestricted technical scheme described in the invention, although this instructions with reference to each above-mentioned embodiment to present invention has been detailed description, but the present invention is not limited to above-mentioned embodiment, therefore anyly the present invention is modified or equivalent to replace; And all do not depart from technical scheme and the improvement thereof of the spirit and scope of invention, it all should be encompassed in the middle of right of the present invention.
Claims (10)
1. a direct incident-type light arm scale-up version 3-D scanning gauge head, is characterized in that, comprising:
Three lasing light emitters, for launching three laser beam, i.e. laser beam one (21), laser beam two (22) and laser beam three (23);
Three photodetectors, i.e. photodetector one (31), photodetector two (32) and photodetector three (33), is respectively used to receive described laser beam one (21), laser beam two (22) and laser beam three (23);
Gauge head pedestal (4), described gauge head pedestal is provided with described lasing light emitter one (11), lasing light emitter two (12) and lasing light emitter three (13), and for the measuring staff (6) that detects with survey ball (7);
Member of translational, does rectilinear motion for making described gauge head pedestal (4);
Reply parts, for described gauge head pedestal (4) is returned back to initial position;
Disposal system, according to the laser beam one (21) that described photodetector one (31), photodetector two (32) and photodetector three (33) obtain respectively, laser beam two (22) and laser beam three (23) incoming position changing value, calculate the three-D displacement changing value of described survey ball (7).
2. a direct incident-type light arm scale-up version 3-D scanning gauge head, is characterized in that, comprising:
Three lasing light emitters, for launching three laser beam, i.e. lasing light emitter one (11) Emission Lasers bundle one (21), lasing light emitter two (12) Emission Lasers bundle two (22), lasing light emitter three (13) Emission Lasers bundle three (23);
Three photodetectors, i.e. photodetector one (31), photodetector two (32) and photodetector three (33), is respectively used to receive described laser beam one (21), laser beam two (22) and laser beam three (23);
Gauge head pedestal (4), described gauge head pedestal is provided with described photodetector one (31), photodetector two (32) and photodetector three (33), and for the measuring staff (6) that detects and survey ball (7);
Member of translational, does rectilinear motion for making described gauge head pedestal (4);
Reply parts (5), for described gauge head pedestal (4) is returned back to initial position;
Disposal system, according to the laser beam one (21) that described photodetector one (31), photodetector two (32) and photodetector three (33) obtain respectively, laser beam two (22) and laser beam three (23) incoming position changing value, calculate the three-D displacement changing value of described survey ball (7).
3. one according to claim 1 and 2 direct incident-type light arm scale-up version 3-D scanning gauge head, it is characterized in that, the plane of incidence of described photodetector one (31), photodetector two (32), photodetector three (33) is vertically arranged mutually, and described member of translational is used for described gauge head pedestal (4) respectively along moving relative to three orthogonal directions of described photodetector one (31), photodetector two (32), photodetector three (33).
4. one according to claim 3 direct incident-type light arm scale-up version 3-D scanning gauge head, it is characterized in that, described member of translational comprises at least one gathering sill one (81), at least one gathering sill two (82) is vertically provided with between all described gathering sills one (81), all described gathering sills two (82) are vertically provided with at least one gathering sill three (83), all described gathering sills three (83) are slidably connected described gauge head pedestal (4).
5. one according to claim 1 direct incident-type light arm scale-up version 3-D scanning gauge head, it is characterized in that, also comprise housing (9), described photodetector one (31), photodetector two (32) are connected in described housing with photodetector three (33), described reply parts (5) are spring, and wherein one end is connected to that described housing (9) is upper, the other end is connected on described gauge head pedestal (4).
6. one according to claim 5 direct incident-type light arm scale-up version 3-D scanning gauge head, it is characterized in that, photodetector described at least one is rotatably connected on described housing (9).
7. one according to claim 2 direct incident-type light arm scale-up version 3-D scanning gauge head, it is characterized in that, also comprise housing (9), described lasing light emitter one (11), lasing light emitter two (12) are fixed in described housing (9) with lasing light emitter three (13), described reply parts (5) are spring, and wherein one end is connected to that described housing (9) is upper, the other end is connected on described gauge head pedestal (4).
8. one according to claim 7 direct incident-type light arm scale-up version 3-D scanning gauge head, it is characterized in that, lasing light emitter described at least one is rotatably connected on described housing (9).
9. according to the arbitrary described one direct incident-type light arm scale-up version 3-D scanning gauge head of claim 1-8, it is characterized in that, described photodetector one (31), photodetector two (32) are Position-Sensitive Detector with photodetector three (33).
10. one according to claim 9 direct incident-type light arm scale-up version 3-D scanning gauge head, it is characterized in that, described photodetector one (31), photodetector two (32) are One Dimensional Position Sensitive Detectors with photodetector three (33).
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