CN1815137A - Array vertical cavity-surface transmission laser confocal microscopic system - Google Patents
Array vertical cavity-surface transmission laser confocal microscopic system Download PDFInfo
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- 230000003287 optical effect Effects 0.000 claims abstract description 25
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- 238000003491 array Methods 0.000 claims description 32
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- 230000011664 signaling Effects 0.000 claims description 6
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- 239000000523 sample Substances 0.000 description 16
- 230000008878 coupling Effects 0.000 description 2
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- 238000005859 coupling reaction Methods 0.000 description 2
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- 238000005516 engineering process Methods 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
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- 238000000691 measurement method Methods 0.000 description 2
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- 230000009897 systematic effect Effects 0.000 description 2
- 239000004606 Fillers/Extenders Substances 0.000 description 1
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- 238000004624 confocal microscopy Methods 0.000 description 1
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- 238000000227 grinding Methods 0.000 description 1
- 230000010365 information processing Effects 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000002493 microarray Methods 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
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Abstract
Present invention discloses array vertical cavity surface emission laser confocal microscopic system belonging to surface topography measuring technique. It contains light source, measurement and processing, wherein light source being vertical cavity surface emission laser array to realize character extraction to workpiece surface corresponded each measuring point, signal processing part consisting of optical signal receiver and work control computer, measurement part including beam extend collimating lens, spectroscope and one long tube micro objective. System uses optical scanning method partially substituting workbench mechanical type scanning in tradition instrument, thereby reducing vibration interference and raising detection speed. Absoluteness distance measurement can b realized for increasing measuring range Through increasing vertical cavity surface emission laser linear frequency modulation and phase-detecting means. Said system can be widely used in different kinds of free curved face, micro - mechanical MEMS device, micro-electronics mask, biochips etc precision surficial measurement.
Description
Technical field
The invention belongs to the measuring surface form technical field.Be particularly related to array vertical cavity-surface transmission laser confocal microscopic system.
Background technology
In current flourish manufacturing industry, micro-nano precise measurement technique has been widely applied to every field such as comprising Aero-Space, semi-conductor industry, micro-electromechanical system (MEMS), microelectronics mask plate, biochip, and the measurement of surface topography is exactly the focus in delicate metering field for a long time.Free form surface is a kind of special surface, be meant asymmetry, irregular, be not suitable for the curved surface described with unified equation.The free form surface optical element has become the key components and parts that is used for the optoelectronic information industry.In addition, the joint prosthesis surface also is a kind of typical free form surface, and its research occupies important position in the human body recovery engineering.
Free-Form Surface Machining is used numerical control grinding method always, has basic side type error in its process.In order to improve the machining precision of free form surface, need carry out online detection to it.Current the most frequently used free curved face measurement method is a measurement of coordinates.Coordinate survey is a kind of general digital indirect measuring technology, and it is reference frame with the rectangular space coordinate, detects the coordinate figure of each measured point on the parts profile, and its data group is handled, and tries to achieve each geometric element morpheme dimension detection method of part.Facilities and equipments are generally three coordinate measuring machine.At present, the integrated measurement accuracy of precision coordinate measuring machine has reached 0.6-0.7 μ m.Traditional three coordinate measuring machine adopts contact type measurement more, its shortcoming be measuring speed low, easily scratch measured surface, have shortcomings such as contact pressure and gauge head radius compensation.
For high-precision measuring surface form, methods such as atomic force microscope, scanning tunnel microscope, Near-field Optical Microscope, interference microscope in addition commonly used.Based on above measuring principle, companies such as Veeco, Taylor-Hobson have developed serial measuring surface form instrument, Talysurf CCI for example, Wyko NT-8000, ZygoNewView 5000 etc.Though these methods and instrument all have very high measuring accuracy, its measuring speed and measurement range all are subjected to certain limitation, and are not suitable for the measurement of free form surface.
So research is applicable to that new principle, the new method of degree of precision, fast detecting and large-range measuring have become free form surface development of manufacturing problem demanding prompt solution.The application aims at this demand just, propose a kind of employing two-dimensional array formula vertical cavity surface emitting laser (VCSEL) as the multiple spot of light source simultaneously the scanning confocal microscopy be used for free form surface and measure.VCSEL comes out in the eighties of last century late nineteen eighties, for over ten years short, it is widely applied to fields such as extensive integrated light interconnection, the communication of ultra broadband optical fiber and the optical information processing of space optics two dimension, and all obtains fast development at aspects such as material, making, processing.The application intends by difference light source on the control VCSEL array simultaneously luminous, realizes the extraction to corresponding each measuring point in surface to be measured, to obtain microcosmic surface pattern information.This system has partly replaced two-dimentional work bench mechanical scanning in the traditional instrument with the optical scanning method, thereby improves measuring speed greatly.By VCSEL being carried out means such as linear frequency modulation, phase-detection, can realize that absolute distance measurement is with the expansion measurement range.
Novel confocal microscope system based on this array VCSEL, realized " zero contact measurement ", effectively avoided the systematic error that ergometry brings in high-acruracy survey, can conveniently realize measurement to soft and ultra-thin shaped object surface configuration, have characteristics such as Measurement Resolution height, speed is fast, measurement range is big, can be widely used in the measurement of free form surfaces such as various microcosmic precision surfaces, especially automobile lamps such as micromechanics MEMS device, microelectronics mask plate, biochip, joint prosthesis, liquid crystal display microarray lens.
Summary of the invention
The object of the invention is to provide a kind of array vertical cavity-surface transmission laser confocal microscopic system based on the area array light source multi-point scanning of two dimension.Described vertical cavity-surface transmission laser confocal microscopic system comprises light source, measurement and three parts of signal Processing, it is characterized in that:
Described the Lights section is a vertical cavity surface emitting laser arrays, and its driving power is that direct supply drives, switch control drives one by one, or the linear frequency modulation power supply, and the former two is used to realize the measurement of traditional confocal system; Described driving power is used for by vertical cavity surface emitting laser is carried out linear frequency modulation, realizes that absolute distance measurement is to increase the measurement range of instrument; Its vertical cavity surface emitting laser arrays light source can be luminous one by one or simultaneously luminous;
Described signal processing comprises:
The receiving device of an optical signalling, by CCD (Charge Coupled Device (CCD) imageing sensor) device, or the PIN device serves as, and wherein the CCD device is used to carry out multiple spot and surveys simultaneously, and the PIN device is used to carry out single-point and surveys;
Industrial computer, function with signals collecting, analysis and demonstration is used for the signal that above-mentioned CCD device receives is handled, and also has D/A output simultaneously, be used to drive the micro objective drive unit of micro objective, the light intensity maximum point that obtains confocal measurement is to realize confocal measurement; When multiple spot is surveyed, vertical cavity surface emitting laser arrays is controlled, reached the purpose that makes it luminous one by one.
Described measure portion comprises:
Beam-expanding collimation lens are used for the light beam of vertical cavity surface emitting laser arrays output is expanded bundle and collimation, make light beam to transmit in the system optics scope;
A spectroscope is used for the beam reflection that goes up reflection and scattering with testing sample to measuring system;
A long tube microcobjective comprises micro objective and micro objective drive unit, is used for the output beam of vertical cavity surface emitting laser arrays is focused at testing sample, is used for computed tomography scanning simultaneously;
Described testing sample is measured object;
Described array pin hole, one is positioned at vertical cavity surface emitting laser arrays output light end, is used for light source filtering; The front end that another is positioned at sensitive detection parts CCD device 9 is used to form confocal measurement;
Assemble receiver lens for one, be used for the beam convergence of going up reflection and scattering with testing sample to the array pin hole;
The micro objective drive unit is served as by the PI-FOC piezoelectric ceramic actuator, is used to drive object lens and does vertical scan direction.
The concrete structure of described array vertical cavity-surface transmission laser confocal microscopic system is, fixing array pin hole 2 below vertical cavity surface emitting laser arrays 1, by light path arrangement, on the optical axis between array pin hole 2 and the microcobjective 5, place beam-expanding collimation lens 3 and spectroscope 4 from top to bottom, testing sample 6 is placed on the objective table of microcobjective 5, and the drive unit 10 and the microcobjective 5 of micro objective are fixed together; On refract light optical axis, place convergent lens 7, array pin hole 8 and CCD device 9 successively on spectroscope 4 left sides perpendicular to the spectroscope 4 of optical axis; Industrial computer 11 is connected with testing sample 6 with the drive unit 10 of vertical cavity surface emitting laser arrays 1, CCD device 9, micro objective respectively by signal wire.
The invention has the beneficial effects as follows by solving workpiece for measurement and light source coupling and with the coupling of exploration hole array, realize multiple spot scanning probe simultaneously, partly replace traditional worktable mechanical scanning with optical scanning, obtain the geometric parameter information of curved surface to be measured, the performance index of realization are: axially measuring accuracy 10-100nm (relevant with microcobjective magnification and other systematic parameter), lateral optical sweep limit are 100 μ m-1mm (expanding but the cooperating platform moves).It has partly replaced the mechanical scan of worktable in the traditional instrument with the optical scanning method, thereby reducing vibration waits the interference that brings and significantly improves measuring speed, and, can realize that absolute distance measurement is to increase the measurement range of instrument by increasing linear frequency modulation, the phase-detection means of vertical cavity surface emitting laser arrays.
Description of drawings
Fig. 1 is the vertical cavity-surface transmission laser confocal microscopic system structural representation.
Embodiment
The invention provides a kind of array vertical cavity-surface transmission laser confocal microscopic system based on the area array light source multi-point scanning of two dimension.Described vertical cavity-surface transmission laser confocal microscopic system comprises light source, measurement and three parts of signal Processing, it is characterized in that:
Described the Lights section is a vertical cavity surface emitting laser arrays, and its driving power is that direct supply drives, switch control drives one by one, or the linear frequency modulation power supply, and the former two is used to realize the measurement of traditional confocal system; Described driving power is used for by vertical cavity surface emitting laser is carried out linear frequency modulation, realizes that absolute distance measurement is to increase the measurement range of instrument; Its vertical cavity surface emitting laser arrays light source can be luminous one by one or simultaneously luminous;
Described signal processing comprises:
The receiving device of an optical signalling is the CCD device, or the PIN device, and wherein the CCD device is used to carry out multiple spot and surveys simultaneously, and the PIN device is used to carry out single-point and surveys;
Industrial computer, function with signals collecting, analysis and demonstration is used for the signal that above-mentioned CCD device receives is handled, and also has D/A output simultaneously, be used to drive the micro objective drive unit of micro objective, the light intensity maximum point that obtains confocal measurement is to realize confocal measurement; When multiple spot is surveyed, vertical cavity surface emitting laser arrays is controlled, reached the purpose that makes it luminous one by one.
Described measure portion comprises:
Beam-expanding collimation lens are used for the light beam of vertical cavity surface emitting laser arrays output is expanded bundle and collimation, make light beam to transmit in the system optics scope;
A spectroscope is used for the beam reflection that goes up reflection and scattering with testing sample to measuring system;
A long tube microcobjective, comprise micro objective and micro objective drive unit, the micro objective drive unit is by PI-FOC, and piezoelectric device is served as, be used for the output beam of vertical cavity surface emitting laser arrays is focused at testing sample, be used for computed tomography scanning simultaneously;
Described testing sample is measured object;
Described array pin hole, one is positioned at vertical cavity surface emitting laser arrays output light end, is used for light source filtering; The front end that another is positioned at sensitive detection parts CCD device 9 is used to form confocal measurement;
Assemble receiver lens for one, be used for the beam convergence of going up reflection and scattering with testing sample to the array pin hole;
The concrete structure of described array vertical cavity-surface transmission laser confocal microscopic system as shown in Figure 1, fixing array pin hole 2 below vertical cavity surface emitting laser arrays 1, by light path arrangement, on the optical axis between array pin hole 2 and the microcobjective 5, place beam-expanding collimation lens 3 and spectroscope 4 from top to bottom, testing sample 6 is placed on the objective table of microcobjective 5, and the drive unit 10 and the microcobjective 5 of micro objective are fixed together; On refract light optical axis, place convergent lens 7, array pin hole 8 and CCD device 9 successively on spectroscope 4 left sides perpendicular to the spectroscope 4 of optical axis; Industrial computer 11 is connected with testing sample 6 with the drive unit 10 of vertical cavity surface emitting laser arrays 1, CCD device 9, micro objective respectively by signal wire.
Below in conjunction with description of drawings system works principle: 1 output beam of vertical cavity surface emitting laser arrays incides on the array pin hole 2, and array pin hole 2 can reduce the interference between the output light of vertical cavity surface emitting laser arrays 1.Beam-expanding collimation lens 3, the light beam that vertical cavity surface emitting laser arrays 1 is exported expands bundle and collimation, makes light beam to transmit in the system optics scope.Spectroscope 4 is used for the beam reflection that goes up reflection and scattering with testing sample to measuring system, for measuring system provides optical signalling.Microcobjective 5 is driven by drive unit 10, move along beam direction so that with the beam convergence of vertical cavity surface emitting laser arrays 1 output on testing sample 6, realize confocal measurement.Testing sample 6 promptly is measured object.Spectroscope 4 beam reflected incide on the array pin hole 8 through overconvergence receiver lens 7.Carrying out multiple spot when surveying simultaneously, CCD device or PIN device 9 are positioned at array pin hole 8 backs optical signalling are received; The PIN device is to use when carrying out the single-point detection.Industrial computer 11, function with signals collecting, analysis and demonstration, be used for the signal that above-mentioned CCD device 9 receives is handled, it also has the drive unit 10 that D/A output is used to drive micro objective simultaneously, realizes confocal measurement so that system obtains the light intensity maximum point of confocal measurement; Carry out it being controlled when luminous one by one at vertical cavity surface emitting laser arrays 1.
The said system design realizes control and the linear frequency modulation to vertical cavity surface emitting laser arrays difference light source intensity.With the light source of array vertical cavity-surface transmission laser as confocal system, realize optical scanning to surface of the work to be measured, obtain the geometric parameter feature of difference.Write down respectively by industrial computer that absolute distance changes on the surface that confocal light intensity result of detection and linear frequency modulation obtained (especially when changing relatively acutely), can get free form surface metrical information comprehensively.The laser that the last difference light source of array VCSEL sends at first passes through an array pin hole (can take Exposure mode processing, assurance and vertical cavity surface emitting laser arrays to be complementary), collimate by extender lens again, converged to free curve surface work pieces to be measured through behind the spectroscope by microcobjective, the light that returns from workpiece for measurement reflects through spectroscope, by another lens can coalescence project respectively with vertical cavity surface emitting laser before another array pin hole of array pin hole phase conjugate, receive the intensity signal of its each point by the CCD device.Carry out axial computed tomography scanning by microcobjective (connecting with the PI-FOC piezoelectric ceramic actuator), can capture the position of the confocal light intensity maximum of each measuring point, the data processing of being correlated with can get the geometric parameter information of final curved surface to be measured.On the basis of surveying the confocal system light intensity, increase at light source and receiving unit array vertical cavity-surface transmission laser is made chirped link, can get on the curved surface variable quantity of absolute distance between the difference and light source by phase-detection.Carrying out problems such as the required driving of carrying out of linear frequency modulation and signal reception, processing simultaneously for the multiple spot light source all has to be solved.
Claims (3)
1. array vertical cavity-surface transmission laser confocal microscopic system, described vertical cavity-surface transmission laser confocal microscopic system comprises light source, measurement and three parts of signal Processing, it is characterized in that:
Described the Lights section is a vertical cavity surface emitting laser arrays, and its driving power is that direct supply drives, switch control drives one by one, or the linear frequency modulation power supply, and the former two is used to realize the measurement of traditional confocal system; Described driving power is used for by vertical cavity surface emitting laser is carried out linear frequency modulation, realizes that absolute distance measurement is to increase the measurement range of instrument; Its vertical cavity surface emitting laser arrays light source can be luminous one by one or simultaneously luminous;
Described signal processing comprises:
The receiving device of an optical signalling is used to carry out multiple spot and surveys simultaneously or carry out single-point and survey;
Industrial computer, function with signals collecting, analysis and demonstration is used for the signal that above-mentioned CCD device receives is handled, and also has D/A output simultaneously, be used to drive the micro objective drive unit of micro objective, the light intensity maximum point that obtains confocal measurement is to realize confocal measurement; When multiple spot is surveyed, vertical cavity surface emitting laser arrays is controlled, reached the purpose that makes it luminous one by one.
Described measure portion comprises:
Beam-expanding collimation lens are used for the light beam of vertical cavity surface emitting laser arrays output is expanded bundle and collimation, make light beam to transmit in the system optics scope;
A spectroscope is used for the beam reflection that goes up reflection and scattering with testing sample to measuring system;
A long tube microcobjective comprises micro objective and micro objective drive unit, is used for the output beam of vertical cavity surface emitting laser arrays is focused at testing sample, is used for computed tomography scanning simultaneously;
Described array pin hole, one is positioned at vertical cavity surface emitting laser arrays output light end, is used for light source filtering; The front end that another is positioned at sensitive detection parts CCD device is used to form confocal measurement;
Assemble receiver lens for one, be used for the beam convergence of going up reflection and scattering with testing sample to the array pin hole;
The concrete structure of described array vertical cavity-surface transmission laser confocal microscopic system is, fixing array pin hole (2) below vertical cavity surface emitting laser arrays (1), by light path arrangement, on the optical axis between array pin hole (2) and the microcobjective (5), place beam-expanding collimation lens (3) and spectroscope (4) from top to bottom, testing sample (6) is placed on the objective table of microcobjective (5), and drive unit of micro objective (10) and microcobjective (5) are fixed together; On refract light optical axis, place convergent lens (7), array pin hole (8) and CCD device (9) successively on spectroscope (4) left side perpendicular to the spectroscope (4) of optical axis; Industrial computer (11) is connected with testing sample (6) with the drive unit (10) of vertical cavity surface emitting laser arrays (1), CCD device (9), micro objective respectively by signal wire.
2. according to the described array vertical cavity-surface transmission laser confocal microscopic system of claim 1, it is characterized in that described micro objective drive unit is the PI-FOC piezoelectric ceramic actuator, be used to drive object lens and do vertical scan direction.
3. according to the described array vertical cavity-surface transmission laser confocal microscopic system of claim 1, it is characterized in that, the receiving device of described optical signalling is CCD device or PIN device, and wherein the CCD device is used to carry out multiple spot and surveys simultaneously, and the PIN device is used to carry out single-point and surveys.
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| CN101634747B (en) * | 2008-07-23 | 2012-01-11 | 中国科学院半导体研究所 | High-resolution confocal microscope |
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| CN111189395A (en) * | 2018-11-14 | 2020-05-22 | 苏州能讯高能半导体有限公司 | Undercut structure measurement system and undercut structure measurement method |
| CN111272094B (en) * | 2018-12-04 | 2022-10-21 | 普雷茨特光电有限公司 | Optical measuring device |
| CN111272094A (en) * | 2018-12-04 | 2020-06-12 | 普雷茨特光电有限公司 | Optical measuring device |
| CN112097681A (en) * | 2020-09-16 | 2020-12-18 | 中国工程物理研究院激光聚变研究中心 | Complex optical curved surface shape error detection method based on speckle field phase recovery |
| CN112197714A (en) * | 2020-09-28 | 2021-01-08 | 东北电力大学 | Free-form surface measuring device and detection method based on differential color confocal technology |
| US20230011069A1 (en) * | 2021-07-07 | 2023-01-12 | Oren Aharon | Structured light measuring device |
| US11650125B2 (en) * | 2021-07-07 | 2023-05-16 | Oren Aharon | Structured light measuring device |
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