CN103411556A - Quasi-confocal annular microstructure measurement device and method based on linear array angular spectrum illumination - Google Patents
Quasi-confocal annular microstructure measurement device and method based on linear array angular spectrum illumination Download PDFInfo
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Abstract
The invention provides a quasi-confocal annular microstructure measurement device and method based on linear array angular spectrum illumination, and belongs to the field of ultraprecise three-dimensional microstructure surface morphological measurement. The device comprises an angular spectrum scanning illumination circuit and a confocal measurement light path, wherein light beams emitted from linear array LEDs are irradiated to the surface of a detected microstructure sample in circular symmetry in parallel through an imaging lens, a beam splitter prism and a microscope objective in sequence; different LEDs in the linear array LEDs correspond to different kinds of angular spectrum illumination. The method comprises the steps that firstly, tomographic images of all pixels under different kinds of angular spectrum scanning illumination are obtained; secondly, the principle of confocal three-dimensional measurement is utilized to judge the axial coordinate of each pixel; at last, fitting of the three-dimensional shape of the detected microstructure sample is achieved. According to the parallel confocal annular microstructure measurement device and method, due to the design, optimal illumination angles corresponding to all parts of the detected microstructure sample in circular symmetry can be found out, the problem that certain areas cannot be irradiated or complex reflection occurs caused by the corrugated shape of the surface profile of the detected microstructure sample in circular symmetry is avoided, the strength of detection signals is improved, background noise is lowered, and measurement precision is improved.
Description
Technical field
The confocal annular microstructure measuring device of standard and method based on the illumination of linear array angular spectrum belong to ultraprecise three-dimensional microstructure measuring surface form field.
Background technology
The processed and applied of microstructure is mainly reflected in microelectric technique, microsystems technology and three aspects of micro-optic technology, as typical case's application such as computer chip, biochip and microlens arrays.Its common trait of above-mentioned technology is to have three-dimensional structure, functional structure size in micron, sub-micron or nanometer scale, micro-nanoization of this structure not only brought the energy and raw-material saving, more promote the progress of modern science and technology, directly driven the development of related industry.Along with the develop rapidly of micro-processing technology, can carry out the three-dimensional instrument detected of quick nondestructive to such sample and will have huge application prospect.
U.S. Pat 3013467, a kind of confocal imaging technology is disclosed for the first time, the confocal imaging technology of 3 optical conjugates is surveyed in this invention by introducing pointolite, some illumination and point, obtained the axial detection ability to the sample profile, what coordinate the horizontal direction objective table moves and then realizes three-dimensional measurement.Chinese patent CN1395127A, disclose a kind of confocal micro-measurement system.This invention utilizes confocal technology, by confocal light path, introducing optical interference circuit, obtains highly sensitive interferometry signal, realizes the high-acruracy survey axial to sample.U.S. Pat 6282020B1, disclose a kind of confocal microscope system based on scanning galvanometer.This invention utilizes confocal principle, converges the ability of illumination hot spot in the sample surfaces high-speed mobile by introducing the vibration mirror scanning technology, having obtained, and has realized quick confocal detection, has improved measuring speed.But above-mentioned three kinds of methods are all parallel beam to be converged to sample surfaces by microcobjective throw light on, when carrying out the three-dimensional sample measurement, height fluctuating due to sample self surface profile, to converging illuminating bundle, block, can cause some zone can't throw light on or complex reflex occurs, and then cause the decay of signal strength detection and the enhancing of ground unrest, and make measuring accuracy reduce, even can't measure.
Summary of the invention
In order to address the above problem, the invention discloses a kind of confocal annular microstructure measuring device of standard and method based on the illumination of linear array angular spectrum, make the circle symmetry can be found corresponding optimal illumination angle by every part of micro-measuring structure sample, avoid symmetrical some zone caused by the fluctuating of the height of micro-measuring structure sample self surface profile of circle can't throw light on or complex reflex occurs, improve signal strength detection, reduce ground unrest, and then improve measuring accuracy.
The object of the present invention is achieved like this:
Based on the confocal annular microstructure measuring device of standard of linear array angular spectrum illumination, comprise angular spectrum scanning illumination path and accurate confocal measurement light path;
Described angular spectrum scanning illumination path comprises: linear array LED array, imaging len, Amici prism, the first diaphragm and microcobjective; The light beam sent from the linear array LED array is successively after imaging len, Amici prism, microcobjective, and parallel radiation is to symmetrical by the micro-measuring structure sample surfaces with the axially movable circle of Three Degree Of Freedom objective table; Described Three Degree Of Freedom objective table moves along three coordinate axis of cartesian coordinate system, and wherein, the z axle is optical axis direction;
Described accurate confocal measurement light path comprises: Three Degree Of Freedom objective table, microcobjective, the first diaphragm, Amici prism, Guan Jing, the second diaphragm, scanning lens, one-dimensional scanning galvanometer, condenser lens, pin hole and detector; With the symmetrical light beam reflected by the micro-measuring structure sample surfaces of the axially movable circle of Three Degree Of Freedom objective table, pass through successively microcobjective, the first diaphragm, Amici prism, Guan Jing, the second diaphragm, scanning lens, one-dimensional scanning galvanometer, condenser lens, be imaged onto the pin hole position, and by detector image-forming; Described one-dimensional scanning galvanometer be take the direction vertical with plane, optical axis place and is that rotating shaft rotates;
Described angular spectrum scanning illumination path and accurate confocal measurement light path share Amici prism, the first diaphragm and microcobjective;
Described linear array LED array is positioned at the object plane of imaging len, and the back focal plane as plane and microcobjective of imaging len coincides with the first plane, diaphragm place; The front focal plane of Guan Jing and the back focal plane of scanning lens coincide with the second plane, diaphragm place; Pin hole is positioned at the front focal plane of condenser lens, is close to detector.
The above-mentioned confocal annular microstructure measuring device of standard based on the illumination of linear array angular spectrum, the distance between described linear array LED array two adjacent LEDs is identical or not identical.
The above-mentioned confocal annular microstructure measuring device of standard based on the illumination of linear array angular spectrum, deviate from direction of beam propagation at the one-dimensional scanning galvanometer, is provided with rotating shaft.
The confocal annular microstructure measuring method of standard based on the illumination of linear array angular spectrum said method comprising the steps of:
Step a, will justify and symmetrical by the thickness of micro-measuring structure sample, be divided into the N layer;
Step b, total P the locus of setting one-dimensional scanning galvanometer;
Step c, adjustment Three Degree Of Freedom objective table, make the circle symmetry be centered close on optical axis by the micro-measuring structure sample;
The order interchangeable of described step a, step b, step c;
Steps d, according to the LED quantity M in the linear array LED array, circle is symmetrical by the thickness layering N of micro-measuring structure sample, the locus P of one-dimensional scanning galvanometer forms M * N subtended angle spectrum illumination image, every subtended angle spectrum illumination image number of pixels is P;
Angular spectrum illumination image between different layers under step e, the identical angular spectrum illumination of definition is tomographic map, the axial envelope curve of contrast same spatial location between the tomographic map under M angular spectrum illumination, pick out near the quadruplicate enveloping curve of sinc function, according to confocal three-dimensional measurement principle, the axial coordinate of P locus point of judgement;
Step f, according to P locus point and axial coordinate thereof, adopt the compasses construction method to simulate circle symmetrical by the three-dimensional appearance of micro-measuring structure sample.
The above-mentioned confocal annular microstructure measuring method of standard based on the illumination of linear array angular spectrum, described steps d is specially:
Steps d 1: symmetrical by the micro-measuring structure sample by Three Degree Of Freedom objective table adjustment circle, make every one deck in the N layer be placed in successively the front focal plane of microcobjective;
Steps d 2: by lighting successively M LED in the linear array LED array, form and thrown light on by the M of a micro-measuring structure sample angular spectrum to circle is symmetrical;
Steps d 3: by adjusting P locus of one-dimensional scanning galvanometer, realize the collection of detector to illumination image;
Described steps d 1, steps d 2, steps d 3 form three and recirculate, and circular order from outside to inside is followed successively by following order:
Steps d 1, steps d 2, steps d 3;
Steps d 1, steps d 3, steps d 2;
Steps d 2, steps d 1, steps d 3;
Steps d 2, steps d 3, steps d 1;
Steps d 3, steps d 1, steps d 2;
Steps d 3, steps d 2, steps d 1;
Final M * N subtended angle spectrum the illumination image that forms, every subtended angle spectrum illumination image number of pixels is P.
Because the present invention is designed with illumination path, make the parallel circle symmetry that incides of illuminating bundle by the micro-measuring structure sample surfaces, and by the different LED of lighting the linear array LED array, change the irradiating angle of illuminating bundle, and utilize confocal three-dimensional measurement principle, simulate circle symmetrical by the three-dimensional appearance of micro-measuring structure sample; This design makes the circle symmetry can be found corresponding optimal illumination angle by every part of micro-measuring structure sample, avoid symmetrical some zone caused by the fluctuating of the height of micro-measuring structure sample self surface profile of circle can't throw light on or complex reflex occurs, improve signal strength detection, reduce ground unrest, and then improve measuring accuracy.
The accompanying drawing explanation
Fig. 1 is the confocal annular microstructure measuring device structural representation of standard that the present invention is based on the illumination of linear array angular spectrum.
Fig. 2 is the confocal annular microstructure measuring device angular spectrum scanning illumination path figure of standard that the present invention is based on the illumination of linear array angular spectrum.
Fig. 3 is the accurate confocal measurement index path of the confocal annular microstructure measuring device of standard that the present invention is based on the illumination of linear array angular spectrum.
Fig. 4 is the confocal annular microstructure measuring method process flow diagram of standard that the present invention is based on the illumination of linear array angular spectrum.
In figure: 1 linear array LED array, 2 imaging lens, 3 Amici prisms, 4 first diaphragms, 5 microcobjectives, 6 Three Degree Of Freedom objective tables, 7 pipe mirrors, 8 second diaphragms, 9 scanning lenses, 10 one-dimensional scanning galvanometers, 11 condenser lenses, 12 pin holes, 13 detectors.
Embodiment
Below in conjunction with accompanying drawing, the specific embodiment of the invention is described in further detail.
So-called angular spectrum scanning illumination, be to realize continuously changing or the incident angle of discrete change directional light by the micro-measuring structure sample surfaces and by scanning mechanism or other technological means with parallel beam illumination, the description of this kind lighting system in frequency domain is angular spectrum scanning illumination.
Confocal measurement method is: the method for utilizing some illumination, some thing and point to survey 3 optical conjugates realizes the measurement capability of optical axis direction, and then completes three-dimensional measurement.The accurate confocal measurement method of mentioning in this patent is: utilize angular spectrum scanning illumination to replace the some illumination, retention point thing and point are surveyed the method for 2 optical conjugates simultaneously.The method had both retained the three-dimensional measurement ability of confocal measurement, introduced simultaneously angular spectrum scanning illumination, improved signal strength detection, reduced ground unrest, and then improved measuring accuracy.
Specific embodiment one:
As shown in Figure 1, as shown in Figure 2, accurate confocal measurement index path as shown in Figure 3 for angular spectrum scanning illumination path figure for the confocal annular microstructure measuring device structural representation of standard based on the illumination of linear array angular spectrum of the present embodiment.
This measurement mechanism comprises angular spectrum scanning illumination path and accurate confocal measurement light path;
Described angular spectrum scanning illumination path comprises: linear array LED array 1, imaging len 2, Amici prism 3, the first diaphragm 4 and microcobjective 5; The light beam sent from linear array LED array 1 is successively after imaging len 2, Amici prism 3, microcobjective 5, and parallel radiation is to symmetrical by the micro-measuring structure sample surfaces with the axially movable circle of Three Degree Of Freedom objective table 6; Described Three Degree Of Freedom objective table 6 moves along three coordinate axis of cartesian coordinate system, and wherein, the z axle is optical axis direction;
Described accurate confocal measurement light path comprises: Three Degree Of Freedom objective table 6, microcobjective 5, the first diaphragm 4, Amici prism 3, pipe mirror 7, the second diaphragm 8, scanning lens 9, one-dimensional scanning galvanometer 10, condenser lens 11, pin hole 12 and detector 13; With the symmetrical light beam reflected by the micro-measuring structure sample surfaces of the axially movable circle of Three Degree Of Freedom objective table 6 process microcobjective 5, the first diaphragm 4, Amici prism 3, pipe mirror 7, the second diaphragm 8, scanning lens 9, one-dimensional scanning galvanometer 10, condenser lens 11 successively, be imaged onto pin hole 12 positions, and by detector 13 imagings; Described one-dimensional scanning galvanometer 10 be take the direction vertical with plane, optical axis place and is that rotating shaft rotates;
Described angular spectrum scanning illumination path and accurate confocal measurement light path share Amici prism 3, the first diaphragm 4 and microcobjective 5;
Described linear array LED array 1 is positioned at the object plane of imaging len 2, and the back focal plane as plane and microcobjective 5 of imaging len 2 coincides with the first diaphragm 4 planes, place; The front focal plane of pipe mirror 7 and the back focal plane of scanning lens 9 coincide with the second diaphragm 8 planes, place; Pin hole 12 is positioned at the front focal plane of condenser lens 11, is close to detector 13.
The above-mentioned confocal annular microstructure measuring device of standard based on the illumination of linear array angular spectrum, the distance between described linear array LED array 1 two adjacent LEDs is identical, and the left view of linear array LED array 1 has been drawn in the top of the linear array LED array 1 in Fig. 1.
The above-mentioned confocal annular microstructure measuring device of standard based on the illumination of linear array angular spectrum, deviate from direction of beam propagation at one-dimensional scanning galvanometer 10, is provided with electric rotation shaft, realizes the position to one-dimensional scanning galvanometer 10 locus.
As shown in Figure 4, the method comprises the following steps the confocal annular microstructure measuring method process flow diagram of standard based on the illumination of linear array angular spectrum of the present embodiment:
Step a, will justify and symmetrical by the thickness of micro-measuring structure sample, be divided into the N layer;
Step b, setting one-dimensional scanning galvanometer 10 total P locus;
Step c, adjustment Three Degree Of Freedom objective table 6, make the circle symmetry be centered close on optical axis by the micro-measuring structure sample;
The order interchangeable of described step a, step b, step c;
Steps d, according to the LED quantity M in linear array LED array 1, circle is symmetrical by the thickness layering N of micro-measuring structure sample, the locus P of one-dimensional scanning galvanometer 10 forms M * N subtended angle spectrum illumination image, every subtended angle spectrum illumination image number of pixels is P;
Angular spectrum illumination image between different layers under step e, the identical angular spectrum illumination of definition is tomographic map, the axial envelope curve of contrast same spatial location between the tomographic map under M angular spectrum illumination, pick out near the quadruplicate enveloping curve of sinc function, according to confocal three-dimensional measurement principle, the axial coordinate of P locus point of judgement;
Step f, according to P locus point and axial coordinate thereof, adopt the compasses construction method to simulate circle symmetrical by the three-dimensional appearance of micro-measuring structure sample.
5, the confocal annular microstructure measuring method of standard based on the illumination of linear array angular spectrum according to claim 4, described steps d is specially:
Steps d 1: adjust circle by Three Degree Of Freedom objective table 6 symmetrical by the micro-measuring structure sample, make every one deck in the N layer be placed in successively the front focal plane of microcobjective 5;
Steps d 2: by lighting successively M LED in linear array LED array 1, form and thrown light on by the M of a micro-measuring structure sample angular spectrum to circle is symmetrical;
Steps d 3: by adjusting P locus of one-dimensional scanning galvanometer 10, realize the collection of 13 pairs of illumination images of detector;
Described steps d 1, steps d 2, steps d 3 form three and recirculate, and circular order from outside to inside is followed successively by: steps d 1, steps d 2, steps d 3, finally form M * N subtended angle spectrum illumination image, and every subtended angle spectrum illumination image number of pixels is P.
Specific embodiment two
The present embodiment is from the different of specific embodiment one, and the distance between described linear array LED array 1 two adjacent LEDs is not identical, and its beneficial effect is can be to accurate adjustment more in certain illumination angle spectral limit.
Specific embodiment three
The present embodiment is from the different of specific embodiment one, and in the described confocal annular microstructure measuring method of standard based on the illumination of linear array angular spectrum, steps d preferably three orders that recirculate is steps d 3, steps d 1, steps d 2; Make the fastest steps d of execution speed 2 be placed on innermost layer, the slowest steps d 3 of execution speed is placed on outermost layer, and its beneficial effect is to reduce the used time of angular spectrum illumination image, improves circle symmetrical by the three-dimensional appearance reconstruct efficiency of micro-measuring structure sample.
Claims (5)
1. based on the confocal annular microstructure measuring device of standard of linear array angular spectrum illumination, it is characterized in that: comprise angular spectrum scanning illumination path and accurate confocal measurement light path;
Described angular spectrum scanning illumination path comprises: linear array LED array (1), imaging len (2), Amici prism (3), the first diaphragm (4) and microcobjective (5); The light beam sent from linear array LED array (1) is successively after imaging len (2), Amici prism (3), microcobjective (5), and parallel radiation is to symmetrical by the micro-measuring structure sample surfaces with the axially movable circle of Three Degree Of Freedom objective table (6); Described Three Degree Of Freedom objective table (6) moves along three coordinate axis of cartesian coordinate system, and wherein, the z axle is optical axis direction;
Described accurate confocal measurement light path comprises: Three Degree Of Freedom objective table (6), microcobjective (5), the first diaphragm (4), Amici prism (3), Guan Jing (7), the second diaphragm (8), scanning lens (9), one-dimensional scanning galvanometer (10), condenser lens (11), pin hole (12) and detector (13); With the symmetrical light beam reflected by the micro-measuring structure sample surfaces of the axially movable circle of Three Degree Of Freedom objective table (6), pass through successively microcobjective (5), the first diaphragm (4), Amici prism (3), Guan Jing (7), the second diaphragm (8), scanning lens (9), one-dimensional scanning galvanometer (10), condenser lens (11), be imaged onto pin hole (12) position, and by detector (13) imaging; Described one-dimensional scanning galvanometer (10) be take the direction vertical with plane, optical axis place and is that rotating shaft rotates;
Described angular spectrum scanning illumination path and accurate confocal measurement light path share Amici prism (3), the first diaphragm (4) and microcobjective (5);
Described linear array LED array (1) is positioned at the object plane of imaging len (2), and the picture plane of imaging len (2) and the back focal plane of microcobjective (5) coincide with the first diaphragm (4) plane, place; The back focal plane of the front focal plane of Guan Jing (7) and scanning lens (9) coincides with the second diaphragm (8) plane, place; Pin hole (12) is positioned at the front focal plane of condenser lens (11), is close to detector (13).
2. the confocal annular microstructure measuring device of standard based on linear array angular spectrum illumination according to claim 1, it is characterized in that: the distance between described linear array LED array (1) two adjacent LEDs is identical or not identical.
3. the confocal annular microstructure measuring device of standard based on the illumination of linear array angular spectrum according to claim 1, is characterized in that: at one-dimensional scanning galvanometer (10), deviate from direction of beam propagation, be provided with rotating shaft.
4. based on the confocal annular microstructure measuring method of standard of linear array angular spectrum illumination, it is characterized in that: said method comprising the steps of:
Step a, will justify and symmetrical by the thickness of micro-measuring structure sample, be divided into the N layer;
Step b, total P the locus of setting one-dimensional scanning galvanometer (10);
Step c, adjustment Three Degree Of Freedom objective table (6), make the circle symmetry be centered close on optical axis by the micro-measuring structure sample;
The order interchangeable of described step a, step b, step c;
Steps d, according to the LED quantity M in linear array LED array (1), circle is symmetrical by the thickness layering N of micro-measuring structure sample, the locus P of one-dimensional scanning galvanometer (10) forms M * N subtended angle spectrum illumination image, every subtended angle spectrum illumination image number of pixels is P;
Angular spectrum illumination image between different layers under step e, the identical angular spectrum illumination of definition is tomographic map, the axial envelope curve of contrast same spatial location between the tomographic map under M angular spectrum illumination, pick out near the quadruplicate enveloping curve of sinc function, according to confocal three-dimensional measurement principle, the axial coordinate of P locus point of judgement;
Step f, according to P locus point and axial coordinate thereof, adopt the compasses construction method to simulate circle symmetrical by the three-dimensional appearance of micro-measuring structure sample.
5. the confocal annular microstructure measuring method of standard based on linear array angular spectrum illumination according to claim 4, it is characterized in that: described steps d is specially:
Steps d 1: adjust circle by Three Degree Of Freedom objective table (6) symmetrical by the micro-measuring structure sample, make every one deck in the N layer be placed in successively the front focal plane of microcobjective (5);
Steps d 2: by lighting successively M LED in linear array LED array (1), form and thrown light on by the M of a micro-measuring structure sample angular spectrum to circle is symmetrical;
Steps d 3: by adjusting P locus of one-dimensional scanning galvanometer (10), realize the collection of detector (13) to illumination image;
Described steps d 1, steps d 2, steps d 3 form three and recirculate, and circular order from outside to inside is followed successively by following order:
Steps d 1, steps d 2, steps d 3;
Steps d 1, steps d 3, steps d 2;
Steps d 2, steps d 1, steps d 3;
Steps d 2, steps d 3, steps d 1;
Steps d 3, steps d 1, steps d 2;
Steps d 3, steps d 2, steps d 1;
Final M * N subtended angle spectrum the illumination image that forms, every subtended angle spectrum illumination image number of pixels is P.
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