CN103411557B - The angular spectrum accurate confocal annular microstructure measurement device of scanning of matrix lamp and method - Google Patents
The angular spectrum accurate confocal annular microstructure measurement device of scanning of matrix lamp and method Download PDFInfo
- Publication number
- CN103411557B CN103411557B CN201310355081.2A CN201310355081A CN103411557B CN 103411557 B CN103411557 B CN 103411557B CN 201310355081 A CN201310355081 A CN 201310355081A CN 103411557 B CN103411557 B CN 103411557B
- Authority
- CN
- China
- Prior art keywords
- steps
- angular spectrum
- scanning
- circle
- illumination
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Abstract
The angular spectrum accurate confocal annular microstructure measurement device of scanning of matrix lamp and method belong to ultraprecise three-dimensional microstructure measuring surface form field; This apparatus design has angular spectrum to scan illumination path, and the light beam sent from donut light source is successively after imaging len, Amici prism, microcobjective, and parallel radiation is surperficial to the symmetrical tested microstructure sample of circle; The angular spectrum illumination that the different annular of donut light source is corresponding different; First the method obtains the tomographic map of all pixels under different angular spectrum scanning illumination, then utilizes confocal three-dimensional measurement principle, judges the axial coordinate of each pixel, finally simulate the three-dimensional appearance of tested microstructure sample; This design makes every part of the symmetrical tested microstructure sample of circle can find corresponding optimal illumination angle, avoid height some region caused that rises and falls of the symmetrical tested microstructure sample its own face profile of circle cannot throw light on or complex reflex occurs, improve signal strength detection, reduce ground unrest, improve measuring accuracy.
Description
Technical field
The angular spectrum accurate confocal annular microstructure measurement device of scanning of matrix lamp and method belong to ultraprecise three-dimensional microstructure measuring surface form field.
Background technology
The processed and applied of microstructure is mainly reflected in microelectric technique, microsystems technology and micro-optic technology three aspects, as typical apply such as computer chip, biochip and microlens arrays.Its common trait of above-mentioned technology has three-dimensional structure, functional structure size in micron, sub-micron or nanometer scale, micro-nanoization of this structure not only brings the energy and raw-material saving, more promote the progress of modern science and technology, directly drive the development of related industry.Along with the develop rapidly of micro-processing technology, huge application prospect can will be had to the instrument that such sample carries out quick nondestructive three-dimensional values.
US Patent No. 3013467, first time discloses a kind of confocal imaging technology, this invention is by introducing pointolite, putting the confocal imaging technology of illumination and some detection 3 optical conjugates, obtain the axial detection ability to sample profile, coordinate moving and then realizing three-dimensional measurement of horizontal direction objective table.Chinese patent CN1395127A, discloses a kind of confocal micro-measurement system.This invention utilizes confocal technology, by introducing optical interference circuit in confocal optical path, obtaining highly sensitive interferometry signal, realizing the high-acruracy survey to sample axis.US Patent No. 6282020B1, discloses a kind of confocal microscope system based on scanning galvanometer.This invention utilizes confocal principle, by introducing vibration mirror scanning technology, obtaining and converging illumination spot in the ability of sample surfaces high-speed mobile, achieving quick confocal detection, improve measuring speed.But above-mentioned three kinds of methods are all parallel beam is converged to sample surfaces by microcobjective throw light on, when carrying out three-dimensional sample and measuring, because the height of sample its own face profile rises and falls, convergence illuminating bundle is blocked, some region can be caused cannot to throw light on or complex reflex occurs, and then cause the decay of signal strength detection and the enhancing of ground unrest, measuring accuracy is reduced, even cannot measure.
Summary of the invention
In order to solve the problem, the invention discloses a kind of the angular spectrum accurate confocal annular microstructure measurement device of scanning and method of matrix lamp, make every part of the symmetrical tested microstructure sample of circle can find corresponding optimal illumination angle, avoid height some region caused that rises and falls of the symmetrical tested microstructure sample its own face profile of circle cannot throw light on or complex reflex occurs, improve signal strength detection, reduce ground unrest, and then improve measuring accuracy.
The object of the present invention is achieved like this:
The accurate confocal annular microstructure measurement device of angular spectrum scanning of matrix lamp, comprises angular spectrum scanning illumination path and accurate confocal measurement light path;
Described angular spectrum scanning illumination path comprises: donut light source, imaging len, Amici prism, the first diaphragm and microcobjective; The light beam sent from donut light source is successively after imaging len, Amici prism, microcobjective, and parallel radiation is to the symmetrical tested microstructure sample surface of the circle moved axially with Three Degree Of Freedom objective table; Described Three Degree Of Freedom objective table moves along three coordinate axis of cartesian coordinate system, and wherein, z-axis is optical axis direction;
Described accurate confocal measurement light path comprises: Three Degree Of Freedom objective table, microcobjective, the first diaphragm, Amici prism, Guan Jing, the second diaphragm, scanning lens, one-dimensional scanning galvanometer, condenser lens, pin hole and detector; The light beam of the symmetrical tested microstructure sample surface reflection of the circle moved axially with Three Degree Of Freedom objective table is successively through microcobjective, the first diaphragm, Amici prism, Guan Jing, the second diaphragm, scanning lens, one-dimensional scanning galvanometer, condenser lens, be imaged onto pin hole position, and by detector image-forming; Described one-dimensional scanning galvanometer with the direction with optical axis place plane orthogonal for axis of rotation;
Described angular spectrum scanning illumination path and accurate confocal measurement light path share Amici prism, the first diaphragm and microcobjective;
Described donut light source is positioned at the object plane of imaging len, and the back focal plane as plane and microcobjective of imaging len coincides with the first diaphragm place plane; The front focal plane of Guan Jing and the back focal plane of scanning lens coincide with the second diaphragm place plane; Pin hole is positioned at the front focal plane of condenser lens, is close to detector.
The accurate confocal annular microstructure measurement device of angular spectrum scanning of above-mentioned matrix lamp, described donut light source is LED array.
The semidiameter of adjacent two annulus of described donut light source is constant or is not constant.
The accurate confocal annular microstructure measurement device of angular spectrum scanning of above-mentioned matrix lamp, deviates from direction of beam propagation at one-dimensional scanning galvanometer, is provided with rotating shaft.
The accurate confocal annular microstructure measuring method of angular spectrum scanning of matrix lamp, comprises the following steps:
Step a, by circle symmetrical tested microstructure sample thickness be divided into N layer;
Step b, setting one-dimensional scanning galvanometer have P locus;
Step c, adjustment Three Degree Of Freedom objective table, make the symmetrical tested microstructure sample of circle be centrally located on optical axis;
The order interchangeable of described step a, step b, step c;
Steps d, according to the donut quantity M in donut light source, the thickness layering N of the symmetrical tested microstructure sample of circle, the locus P of one-dimensional scanning galvanometer, form M × N subtended angle spectrum illumination image, and every subtended angle spectrum illumination image number of pixels is P;
Step e, the angular spectrum illumination image defining under identical angular spectrum illumination between different layers are tomographic map, axial envelope curve between the tomographic map of contrast same spatial location under M angular spectrum illumination, pick out closest to the quadruplicate enveloping curve of sinc function, according to confocal three-dimensional measurement principle, judge the axial coordinate of P locus point;
Step f, according to P locus point and axial coordinate thereof, simulate circle symmetrical tested microstructure sample three-dimensional appearance.
The accurate confocal annular microstructure measuring method of angular spectrum scanning of above-mentioned matrix lamp, described steps d is specially:
Steps d 1: by the symmetrical tested microstructure sample of Three Degree Of Freedom objective table adjustment circle, make the every one deck in N layer be placed in the front focal plane of microcobjective successively;
Steps d 2: by lighting M annulus in donut light source successively, forms M the angular spectrum illumination to the symmetrical tested microstructure sample of circle;
Steps d 3: by P locus of adjustment one-dimensional scanning galvanometer, realize the collection of detector to illumination image;
Described steps d 1, steps d 2, steps d 3 form three and recirculate, and circular order is from outside to inside followed successively by one in following order:
Steps d 1, steps d 2, steps d 3;
Steps d 1, steps d 3, steps d 2;
Steps d 2, steps d 1, steps d 3;
Steps d 2, steps d 3, steps d 1;
Steps d 3, steps d 1, steps d 2;
Steps d 3, steps d 2, steps d 1;
Final formation M × N subtended angle spectrum illumination image, every subtended angle spectrum illumination image number of pixels is P.
Because the present invention is designed with illumination path, parallel the inciding of illuminating bundle is made to justify symmetrical tested microstructure sample surface, and the irradiating angle of illuminating bundle is changed by the different annular lighting donut light source, and utilize confocal three-dimensional measurement principle, simulate the three-dimensional appearance of the symmetrical tested microstructure sample of circle; This design makes every part of the symmetrical tested microstructure sample of circle can find corresponding optimal illumination angle, avoid height some region caused that rises and falls of the symmetrical tested microstructure sample its own face profile of circle cannot throw light on or complex reflex occurs, improve signal strength detection, reduce ground unrest, and then improve measuring accuracy.
Accompanying drawing explanation
Fig. 1 is the accurate confocal annular microstructure measurement device structural representation of angular spectrum scanning of matrix lamp of the present invention.
Fig. 2 is the accurate confocal annular microstructure measurement device angular spectrum scanning illumination path figure of the angular spectrum scanning of matrix lamp of the present invention.
Fig. 3 is the accurate confocal measurement index path of the angular spectrum accurate confocal annular microstructure measurement device of scanning of matrix lamp of the present invention.
Fig. 4 is the accurate confocal annular microstructure measuring method process flow diagram of angular spectrum scanning of matrix lamp of the present invention.
In figure: 1 donut light source, 2 imaging lens, 3 Amici prisms, 4 first diaphragms, 5 microcobjectives, 6 Three Degree Of Freedom objective tables, 7 pipe mirrors, 8 second diaphragms, 9 scanning lenses, 10 one-dimensional scanning galvanometers, 11 condenser lenses, 12 pin holes, 13 detectors.
Embodiment
Below in conjunction with accompanying drawing, the specific embodiment of the invention is described in further detail.
So-called angular spectrum scanning illumination, be to throw light on tested microstructure sample surface and realize continuously changing by scanning mechanism or other technological means or the incident angle of discrete change directional light with parallel beam, this kind of lighting system description is in a frequency domain angular spectrum scanning illumination.
Confocal measurement method is: utilize a method throwing light on, put thing and put detection 3 optical conjugates to realize the measurement capability of optical axis direction, and then complete three-dimensional measurement.The accurate confocal measurement method mentioned in this patent is: utilize angular spectrum to scan illumination and replace some illumination, the method for retention point thing and some detection 2 optical conjugates simultaneously.The method had both remained the three-dimensional measurement ability of confocal measurement, introduced angular spectrum scanning illumination simultaneously, improved signal strength detection, reduce ground unrest, and then improve measuring accuracy.
Specific embodiment one:
As shown in Figure 1, as shown in Figure 2, accurate confocal measurement index path as shown in Figure 3 for angular spectrum scanning illumination path figure for the accurate confocal annular microstructure measurement device structural representation of angular spectrum scanning of the matrix lamp of the present embodiment.
This measurement mechanism comprises angular spectrum scanning illumination path and accurate confocal measurement light path;
Described angular spectrum scanning illumination path comprises: donut light source 1, imaging len 2, Amici prism 3, first diaphragm 4 and microcobjective 5; The light beam sent from donut light source 1 is successively after imaging len 2, Amici prism 3, microcobjective 5, and parallel radiation is to the symmetrical tested microstructure sample surface of the circle moved axially with Three Degree Of Freedom objective table 6; Described Three Degree Of Freedom objective table 6 moves along three coordinate axis of cartesian coordinate system, and wherein, z-axis is optical axis direction;
Described accurate confocal measurement light path comprises: Three Degree Of Freedom objective table 6, microcobjective 5, first diaphragm 4, Amici prism 3, pipe mirror 7, second diaphragm 8, scanning lens 9, one-dimensional scanning galvanometer 10, condenser lens 11, pin hole 12 and detector 13; The light beam of the symmetrical tested microstructure sample surface reflection of the circle moved axially with Three Degree Of Freedom objective table 6 is successively through microcobjective 5, first diaphragm 4, Amici prism 3, pipe mirror 7, second diaphragm 8, scanning lens 9, one-dimensional scanning galvanometer 10, condenser lens 11, be imaged onto pin hole 12 position, and by detector 13 imaging; Described one-dimensional scanning galvanometer 10 with the direction with optical axis place plane orthogonal for axis of rotation;
Described angular spectrum scanning illumination path and accurate confocal measurement light path share Amici prism 3, first diaphragm 4 and microcobjective 5;
Described donut light source 1 is positioned at the object plane of imaging len 2, and the back focal plane as plane and microcobjective 5 of imaging len 2 coincides with the first diaphragm 4 place plane; The front focal plane of pipe mirror 7 and the back focal plane of scanning lens 9 coincide with the second diaphragm 8 place plane; Pin hole 12 is positioned at the front focal plane of condenser lens 11, is close to detector 13.
The accurate confocal annular microstructure measurement device of angular spectrum scanning of above-mentioned matrix lamp, described donut light source 1 is LED array, and the top of the donut light source 1 in Fig. 1 depicts the left view of donut light source 1; The semidiameter of adjacent two annulus of donut light source 1 is constant.
The accurate confocal annular microstructure measurement device of angular spectrum scanning of above-mentioned matrix lamp, deviates from direction of beam propagation at one-dimensional scanning galvanometer 10, is provided with electric rotation shaft, realize the position to one-dimensional scanning galvanometer 10 locus.
As shown in Figure 4, the method comprises the following steps the accurate confocal annular microstructure measuring method process flow diagram of angular spectrum scanning of the matrix lamp of the present embodiment:
Step a, by circle symmetrical tested microstructure sample thickness be divided into N layer;
Step b, setting one-dimensional scanning galvanometer 10 have P locus;
Step c, adjustment Three Degree Of Freedom objective table 6, make the symmetrical tested microstructure sample of circle be centrally located on optical axis;
The order interchangeable of described step a, step b, step c;
Steps d, according to the donut quantity M in donut light source 1, the thickness layering N of the symmetrical tested microstructure sample of circle, the locus P of one-dimensional scanning galvanometer 10, form M × N subtended angle spectrum illumination image, and every subtended angle spectrum illumination image number of pixels is P;
Step e, the angular spectrum illumination image defining under identical angular spectrum illumination between different layers are tomographic map, axial envelope curve between the tomographic map of contrast same spatial location under M angular spectrum illumination, pick out closest to the quadruplicate enveloping curve of sinc function, according to confocal three-dimensional measurement principle, judge the axial coordinate of P locus point;
Step f, according to P locus point and axial coordinate thereof, simulate circle symmetrical tested microstructure sample three-dimensional appearance.
Wherein steps d is specially:
Steps d 1: adjust the symmetrical tested microstructure sample of circle by Three Degree Of Freedom objective table 6, make the every one deck in N layer be placed in the front focal plane of microcobjective 5 successively;
Steps d 2: by lighting M annulus in donut light source 1 successively, forms M the angular spectrum illumination to the symmetrical tested microstructure sample of circle;
Steps d 3: by P locus of adjustment one-dimensional scanning galvanometer 10, realize the collection of detector 13 pairs of illumination images;
Described steps d 1, steps d 2, steps d 3 form three and recirculate, and circular order is from outside to inside followed successively by: steps d 1, steps d 2, steps d 3, finally form M × N subtended angle spectrum illumination image, and every subtended angle spectrum illumination image number of pixels is P.
Specific embodiment two
The present embodiment is from the different of specific embodiment one, and the semidiameter of adjacent two annulus of described donut light source 1 is not constant, and its beneficial effect is can to more accurate adjustment in certain illumination angle spectral limit.
Specific embodiment three
The present embodiment is from the different of specific embodiment one, and in the accurate confocal annular microstructure measuring method of angular spectrum scanning of described matrix lamp, steps d preferably three orders recirculated is steps d 3, steps d 1, steps d 2; The steps d 2 making execution speed the fastest is placed on innermost layer, and the slowest steps d 3 of execution speed is placed on outermost layer, and its beneficial effect is the used time that can reduce angular spectrum illumination image, improves the three-dimensional appearance reconstruct efficiency of the symmetrical tested microstructure sample of circle.
Claims (2)
1. the accurate confocal annular microstructure measuring method of angular spectrum scanning of matrix lamp, the device used comprises angular spectrum scanning illumination path and accurate confocal measurement light path;
Described angular spectrum scanning illumination path comprises: donut light source (1), imaging len (2), Amici prism (3), the first diaphragm (4) and microcobjective (5); The light beam sent from donut light source (1) is successively after imaging len (2), Amici prism (3), microcobjective (5), and parallel radiation is to the symmetrical tested microstructure sample surface of the circle moved axially with Three Degree Of Freedom objective table (6); Described Three Degree Of Freedom objective table (6) moves along three coordinate axis of cartesian coordinate system, and wherein, z-axis is optical axis direction;
Described accurate confocal measurement light path comprises: Three Degree Of Freedom objective table (6), microcobjective (5), the first diaphragm (4), Amici prism (3), Guan Jing (7), the second diaphragm (8), scanning lens (9), one-dimensional scanning galvanometer (10), condenser lens (11), pin hole (12) and detector (13); The light beam of the symmetrical tested microstructure sample surface reflection of the circle moved axially with Three Degree Of Freedom objective table (6) is successively through microcobjective (5), the first diaphragm (4), Amici prism (3), Guan Jing (7), the second diaphragm (8), scanning lens (9), one-dimensional scanning galvanometer (10), condenser lens (11), be imaged onto pin hole (12) position, and by detector (13) imaging; Described one-dimensional scanning galvanometer (10) with the direction with optical axis place plane orthogonal for axis of rotation;
Described angular spectrum scanning illumination path and accurate confocal measurement light path share Amici prism (3), the first diaphragm (4) and microcobjective (5);
Described donut light source (1) is positioned at the object plane of imaging len (2), and the picture plane of imaging len (2) and the back focal plane of microcobjective (5) coincide with the first diaphragm (4) place plane; The front focal plane of Guan Jing (7) and the back focal plane of scanning lens (9) coincide with the second diaphragm (8) place plane; Pin hole (12) is positioned at the front focal plane of condenser lens (11), is close to detector (13);
Described donut light source (1) is LED array;
The semidiameter of described adjacent two annulus of donut light source (1) is constant or is not constant;
Deviate from direction of beam propagation at one-dimensional scanning galvanometer (10), be provided with rotating shaft;
It is characterized in that: said method comprising the steps of:
Step a, by circle symmetrical tested microstructure sample thickness be divided into N layer;
Step b, total P the locus of setting one-dimensional scanning galvanometer (10);
Step c, adjustment Three Degree Of Freedom objective table (6), make the symmetrical tested microstructure sample of circle be centrally located on optical axis;
The order interchangeable of described step a, step b, step c;
Steps d, according to the donut quantity M in donut light source (1), the thickness layering N of the symmetrical tested microstructure sample of circle, the locus P of one-dimensional scanning galvanometer (10), forms M × N subtended angle spectrum illumination image, and every subtended angle spectrum illumination image number of pixels is P;
Step e, the angular spectrum illumination image defining under identical angular spectrum illumination between different layers are tomographic map, axial envelope curve between the tomographic map of contrast same spatial location under M angular spectrum illumination, pick out closest to the quadruplicate enveloping curve of sinc function, according to confocal three-dimensional measurement principle, judge the axial coordinate of P locus point;
Step f, according to P locus point and axial coordinate thereof, simulate circle symmetrical tested microstructure sample three-dimensional appearance.
2. the accurate confocal annular microstructure measuring method of angular spectrum scanning of matrix lamp according to claim 1, is characterized in that: described steps d is specially:
Steps d 1: by the symmetrical tested microstructure sample of Three Degree Of Freedom objective table (6) adjustment circle, make the every one deck in N layer be placed in the front focal plane of microcobjective (5) successively;
Steps d 2: by lighting M annulus in donut light source (1) successively, forms M the angular spectrum illumination to the symmetrical tested microstructure sample of circle;
Steps d 3: by P locus of adjustment one-dimensional scanning galvanometer (10), realize detector (13) to the collection of illumination image;
Described steps d 1, steps d 2, steps d 3 form three and recirculate, and circular order is from outside to inside followed successively by one in following order:
Steps d 1, steps d 2, steps d 3;
Steps d 1, steps d 3, steps d 2;
Steps d 2, steps d 1, steps d 3;
Steps d 2, steps d 3, steps d 1;
Steps d 3, steps d 1, steps d 2;
Steps d 3, steps d 2, steps d 1;
Final formation M × N subtended angle spectrum illumination image, every subtended angle spectrum illumination image number of pixels is P.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310355081.2A CN103411557B (en) | 2013-08-15 | 2013-08-15 | The angular spectrum accurate confocal annular microstructure measurement device of scanning of matrix lamp and method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310355081.2A CN103411557B (en) | 2013-08-15 | 2013-08-15 | The angular spectrum accurate confocal annular microstructure measurement device of scanning of matrix lamp and method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103411557A CN103411557A (en) | 2013-11-27 |
| CN103411557B true CN103411557B (en) | 2016-02-03 |
Family
ID=49604586
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310355081.2A Expired - Fee Related CN103411557B (en) | 2013-08-15 | 2013-08-15 | The angular spectrum accurate confocal annular microstructure measurement device of scanning of matrix lamp and method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103411557B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107479189A (en) * | 2017-08-14 | 2017-12-15 | 中国科学院西安光学精密机械研究所 | Non-paraxial autoacceleration light beam generating method and generation device based on angular spectrum regulation and control |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104359424B (en) * | 2014-10-09 | 2017-04-19 | 无锡中科光电技术有限公司 | Ellipsoid mirror surface shape detection device and method |
| CN105043988B (en) * | 2015-09-21 | 2017-10-13 | 哈尔滨工业大学 | Single-point based on scanning galvanometer deconvolutes microscopic system and imaging method |
| CN107037016A (en) * | 2016-02-04 | 2017-08-11 | 北京世纪桑尼科技有限公司 | A kind of confocal optical scanner |
| CN106949969B (en) * | 2017-03-29 | 2018-05-15 | 长春理工大学 | Multispectral interferometer based on homocentric sphere concentrating element |
| CN106980175B (en) | 2017-05-10 | 2019-05-14 | 暨南大学 | Non-fluorescence imaging dicing method and device based on annular off-axis illumination focal plane conjugation |
| CN109363767B (en) * | 2018-09-22 | 2024-03-29 | 上海市激光技术研究所有限公司 | Laser output device and adjustment method |
| CN111239081B (en) * | 2020-01-18 | 2023-06-23 | 江苏锐精光电研究院有限公司 | Super-resolution total internal reflection microscopic imaging device and method based on annular array light source illumination |
| CN111123495B (en) * | 2020-01-18 | 2022-04-01 | 哈尔滨工业大学 | Three-dimensional total internal reflection microscopic imaging device and method based on annular array light source illumination |
| CN113834439B (en) * | 2021-09-15 | 2023-10-17 | 清华大学深圳国际研究生院 | Fresnel grating micro-lens array, spectrometer and spectrum confocal plane type measuring system |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1815137A (en) * | 2006-03-14 | 2006-08-09 | 清华大学 | Array vertical cavity-surface transmission laser confocal microscopic system |
| CN101050949A (en) * | 2007-05-22 | 2007-10-10 | 天津大学 | Measuring system and its measuring method for large field object micro surface three dimension topography |
| CN103190889A (en) * | 2013-04-17 | 2013-07-10 | 北京大学 | Real-time tunable confocal microscopic imaging system |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05248830A (en) * | 1992-03-03 | 1993-09-28 | Koyo Seiko Co Ltd | Three-dimensional shape measuring apparatus |
| JP4409850B2 (en) * | 2003-04-25 | 2010-02-03 | 株式会社トプコン | Three-dimensional coordinate measuring apparatus and method |
-
2013
- 2013-08-15 CN CN201310355081.2A patent/CN103411557B/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1815137A (en) * | 2006-03-14 | 2006-08-09 | 清华大学 | Array vertical cavity-surface transmission laser confocal microscopic system |
| CN101050949A (en) * | 2007-05-22 | 2007-10-10 | 天津大学 | Measuring system and its measuring method for large field object micro surface three dimension topography |
| CN103190889A (en) * | 2013-04-17 | 2013-07-10 | 北京大学 | Real-time tunable confocal microscopic imaging system |
Non-Patent Citations (1)
| Title |
|---|
| 《超分辨移相共焦和复色差动共焦扫描显微技术及理论》;刘俭;《中国博士学位论文全文数据库 工程科技Ⅱ辑 》;20111115;C028-8 * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107479189A (en) * | 2017-08-14 | 2017-12-15 | 中国科学院西安光学精密机械研究所 | Non-paraxial autoacceleration light beam generating method and generation device based on angular spectrum regulation and control |
| CN107479189B (en) * | 2017-08-14 | 2019-08-06 | 中国科学院西安光学精密机械研究所 | Non-paraxial autoacceleration light beam generating method and generation device based on angular spectrum regulation |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103411557A (en) | 2013-11-27 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103411557B (en) | The angular spectrum accurate confocal annular microstructure measurement device of scanning of matrix lamp and method | |
| JPS62168125A (en) | Apparatus and method for lighting object for vision system | |
| CN103411555B (en) | Based on the parallel confocal annular microstructure measuring method of linear array angular spectrum illumination | |
| CN103411559B (en) | Based on the accurate confocal microstructure measuring method of angular spectrum scanning of matrix lamp | |
| CN107121065A (en) | A kind of portable phase quantitative testing device | |
| CN110044293A (en) | A kind of three-dimensional reconfiguration system and three-dimensional reconstruction method | |
| CN103411561B (en) | Based on the image microstructures method of angular spectrum scanning illumination | |
| CN103411558B (en) | A kind of angular spectrum scanning confocal microstructure measuring device of illumination array formula and method | |
| CN103292739A (en) | Actuator-free surface shape accurate measurement device and method | |
| CN209085558U (en) | Detection device | |
| CN103344416A (en) | Volume holographic transmission grating diffraction efficiency tester | |
| CN208833665U (en) | A kind of CCD target surface calibrating apparatus for fixing based on compromising emanation imaging | |
| US11774233B2 (en) | Method and system for measuring geometric parameters of through holes | |
| CN103411560B (en) | The servo-actuated pin hole detection microstructure measuring device of angular spectrum scanning lighting fluorescent and method | |
| CN103411556B (en) | The confocal annular microstructure measurement device of standard based on linear array angular spectrum illumination and method | |
| CN103438825B (en) | A kind of angular spectrum scanning confocal annular microstructure measurement device of illumination array formula and method | |
| CN109884082A (en) | A kind of detection method of smooth surface defect | |
| JPH08145620A (en) | Position measuring apparatus for foreign matter on rotating body | |
| CN105115476B (en) | The flat board inclination measuring device detected based on multiple spot defocus | |
| CN103411938B (en) | Angular spectrum scanning and measuring apparatus for microstructure based on anti-Stokes fluorescent servo-actuated pin holes | |
| CN103411554B (en) | Quantum based on quantum dot effect servo-actuated pin hole microstructure angular spectrum scanning and measuring apparatus | |
| CN109470145A (en) | Polarization Modulation high resolution Stereo Vision Measurement System and method | |
| JP2012093116A (en) | Lens checking apparatus and chart plate | |
| CN1510392A (en) | Parallel astigmatic three-dimensional focusing detecting method and apparatus thereof | |
| CN116045841B (en) | Fitting method, fitting device and measuring system of focusing curve |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160203 Termination date: 20210815 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |