CN106949969B - Multispectral interferometer based on homocentric sphere concentrating element - Google Patents
Multispectral interferometer based on homocentric sphere concentrating element Download PDFInfo
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- CN106949969B CN106949969B CN201710196199.3A CN201710196199A CN106949969B CN 106949969 B CN106949969 B CN 106949969B CN 201710196199 A CN201710196199 A CN 201710196199A CN 106949969 B CN106949969 B CN 106949969B
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- interferometer
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- 238000003384 imaging method Methods 0.000 claims abstract description 31
- 239000013078 crystal Substances 0.000 claims abstract description 12
- 238000001514 detection method Methods 0.000 claims abstract description 12
- 239000011521 glass Substances 0.000 claims abstract description 12
- 230000003595 spectral effect Effects 0.000 claims abstract description 10
- 238000005070 sampling Methods 0.000 claims description 8
- 239000000203 mixture Substances 0.000 claims description 3
- 210000001747 pupil Anatomy 0.000 claims description 3
- 230000003287 optical effect Effects 0.000 abstract description 13
- 238000005259 measurement Methods 0.000 abstract description 7
- 238000001228 spectrum Methods 0.000 description 7
- 239000000463 material Substances 0.000 description 4
- 230000000007 visual effect Effects 0.000 description 3
- PFNQVRZLDWYSCW-UHFFFAOYSA-N (fluoren-9-ylideneamino) n-naphthalen-1-ylcarbamate Chemical compound C12=CC=CC=C2C2=CC=CC=C2C1=NOC(=O)NC1=CC=CC2=CC=CC=C12 PFNQVRZLDWYSCW-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000001427 coherent effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- ORUIBWPALBXDOA-UHFFFAOYSA-L magnesium fluoride Chemical compound [F-].[F-].[Mg+2] ORUIBWPALBXDOA-UHFFFAOYSA-L 0.000 description 1
- 229910001635 magnesium fluoride Inorganic materials 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000012876 topography Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/45—Interferometric spectrometry
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0208—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0294—Multi-channel spectroscopy
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/2823—Imaging spectrometer
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/2823—Imaging spectrometer
- G01J2003/2826—Multispectral imaging, e.g. filter imaging
Abstract
Multispectral interferometer based on homocentric sphere concentrating element, belong to field of optical measurements, to solve the problems, such as that existing interferometer can only provide a kind of Measurement channel, preposition interference imaging system, the system is made of secondary color light source and interferometer optics system, the interferometer incides beam expanding lens for the light that secondary color light source is sent, the light sent after expanding incides the first beam-splitter, light is collimated collimated after the reflection of the first beam-splitter and is vertically incided successively on standard optic plane glass crystal and part to be measured into collimated light beam, collimated light beam；Light is reflected through standard optic plane glass crystal and part to be measured, reflected light is transmitted on the second beam-splitter by the first beam-splitter, through the second beam-splitter through entering collimation lens outgoing into directional light, polychromatic light is divided into the light of different spectral coverage by directional light through spectro-grating again, the light of different spectral coverage is focused on relay imaging system by homocentric sphere concentrating element, then carries out interference imaging detection and analysis by cmos detector；The present invention has the more optical axis characteristics of light path altogether, realizes multispectral interference detection.
Description
Technical field
The present invention provides a kind of multispectral interferometer based on homocentric sphere concentrating element, belongs to field of optical measurements.
Background technology
Constantly deepen as people study interference technique, at present in military and civilian field, multispectral interferometer obtains
To extensive use.Therefore, the interference image of multiple and different spectral coverages how is fast, accurately obtained, for interference imaging technology
Research is very important.At present, interference of light detection technique is a kind of metrology and measurement method based on principle of optical interference,
It is that generally acknowledged detection optical element, optical system be most effective, one of most accurate means.Interferometer uses interference detection technique,
Realize the non-contact measurement of wavelength magnitude, have sensitivity than other types of detecting instrument higher with it is more preferable easy-to-use
Property.Striking rope laser interferometer is mainly used for the surface topography measurement of element, and there is non-contact, not damaged, accuracy height etc. to dash forward for it
Go out advantage, at present, it has also become the preferred manner of optical element detection.Feisuo interferometer usually by light source, beam expanding lens, collimating mirror,
The part such as standard reference lens, imaging lens, system stop, planar array detector forms.But traditional main table of fizeau interferometer shortcoming
It is now：1st, light source is monochromatic source, it is impossible to while obtain the interference image of multiple spectral coverages；2nd, need by numerical analysis and resolving
Multispectral information is obtained, real-time is low；3rd, it is multiple uniaxial combined imagings in structure, visual field is limited, and resolution ratio is low；4th, system
Diaphragm is fixed, and the incident ray direction free degree is low, and system imaging range is limited.
Chinese Patent Application No. is " CN201410605364.2 ", and patent name is " dual wavelength Feisuo laser interferometer ",
The device uses two kinds of laser light sources, and for operating wavelength range only between 400nm to 800nm, detector is to be operated in visible ray
The CCD or CMOS of wave band, and the device can only also provide a kind of Measurement channel, structure type is complicated.
The content of the invention
The present invention is in order to solve the problems, such as that existing interferometer can only provide a kind of Measurement channel, there is provided one kind is based on homocentric sphere
The multispectral interferometer of concentrating element, solves modern multispectral interference detection to real-time, fast, accurately use demand, and can
To be detected in real time to the coherent light progress multichannel of multi-wavelength under same visual field.
Technical scheme is as follows：
Multispectral interferometer based on homocentric sphere concentrating element, it includes：
Preposition interference imaging system, the system are made of secondary color light source and interferometer optics system, the interferometer optics system
System includes beam expanding lens, the first beam-splitter, collimation lens, standard optic plane glass crystal and the second beam-splitter；
Beam splitting system is collimated, which is made of collimation lens and spectro-grating；
It is characterized in that it, which further includes multichannel frequency-idle running, changes sampling system, the system is by homocentric sphere concentrating element, relaying
Imaging system and cmos detector composition, the entrance pupil of relay imaging system are overlapped with the center of homocentric sphere concentrating element；
The light that secondary color light source is sent incides beam expanding lens, and the light sent after expanding incides the first beam-splitter, and light is through first
Collimated, which is collimated, after beam-splitter reflection vertically incides standard optic plane glass crystal and part to be measured successively into collimated light beam, collimated light beam
On；Light is reflected through standard optic plane glass crystal and part to be measured, and reflected light is transmitted on the second beam-splitter by the first beam-splitter, through the second light splitting
Plate is emitted into directional light through entering collimation lens, and polychromatic light is divided into the light of different spectral coverage by directional light through spectro-grating again, different
The light of spectral coverage is focused on relay imaging system by homocentric sphere concentrating element, then carries out interference imaging detection by cmos detector
And analysis.
Homocentric sphere concentrating element has the homocentric sphere symmetrical structure of multilayer different refractivity.
Relay imaging system provides virtual diaphragm, virtual diaphragm center and homocentric sphere concentrating element for homocentric sphere concentrating element
The centre of sphere overlap, improve the diaphragm free degree of homocentric sphere concentrating element.
The relay imaging system and the position of cmos detector and the space angle of homocentric sphere concentrating element emergent light
It is corresponding.
Beneficial effects of the present invention：
1st, multispectral interferometer of the present invention is more optical axis systems, improves spectral resolution.
2nd, the present invention realizes the tactic pattern of multi-channel parallel processing.
3rd, the present invention obtains multispectral interference image information without resolving, and real-time is higher.
4th, the present invention can obtain the higher Interferogram of continuity of multiple wave bands under same visual field, timeliness at the same time
It is higher.
5th, the relay system of multispectral interferometer of the present invention provides virtual diaphragm for homocentric sphere concentrating element, improves
The diaphragm free degree of homocentric sphere concentrating element, makes the incident light of different angle have identical paraxial characteristic, has light path altogether
More optical axis characteristics, realize multispectral interference detection.
Brief description of the drawings
Fig. 1：The structure diagram of multispectral interferometer of the invention based on homocentric sphere concentrating element.
In figure：1st, secondary color light source；2nd, beam expanding lens；3rd, the first beam-splitter；4th, collimation lens；5th, standard optic plane glass crystal；6 parts to be measured；
7th, the second beam-splitter；8th, collimation lens；9th, spectro-grating；10th, homocentric sphere concentrating element；11st, relay imaging system；12、CMOS
Detector；13rd, virtual diaphragm.
Embodiment
As shown in Figure 1, a kind of multispectral interferometer based on homocentric sphere concentrating element, its structure include：Preposition interference system
Sampling system is changed in system, collimation beam splitting system and multichannel frequency-idle running, and the interference light that preposition interference system is sent is divided by collimation
System exit is directional light, and directional light changes sampling system by multichannel frequency-idle running and realizes that multispectral interference imaging detects.
Preposition interference imaging system is made of secondary color light source 1 and interferometer optics system, which includes
Beam expanding lens 2, the first beam-splitter 3, collimation lens 4,5 and second beam-splitter 7 of standard optic plane glass crystal.
Collimation beam splitting system is made of collimation lens 8 and spectro-grating 9.
Multichannel frequency-idle running changes sampling system by homocentric sphere concentrating element 10, relay imaging system 11 and cmos detector
12 compositions.The entrance pupil of relay imaging system 11 is overlapped with the center of homocentric sphere concentrating element 10.
The light that secondary color light source 1 is sent incides beam expanding lens 2, and the light sent after expanding is through the first beam-splitter 3, and light is through first point
Tabula rasa 3 is collimated lens 4 after reflecting and is collimated into collimated light beam, which vertically incides standard optic plane glass crystal 5 and to be measured successively
On part 6.Light is reflected through standard optic plane glass crystal 5 and part to be measured 6, and reflected light is transmitted on the second beam-splitter 7 by the first beam-splitter 3, warp
For second beam-splitter 7 through being emitted into directional light into collimation lens 8, polychromatic light is divided into different spectrums by directional light through spectro-grating 9 again
The light of section, the light of different spectral coverage are focused on relay imaging system 11 by homocentric sphere concentrating element 10, then by cmos detector
12 carry out interference imaging detection and analysis.
The homocentric sphere concentrating element 10 has the homocentric sphere symmetrical structure of multilayer different refractivity.The homocentric sphere gathers
Burnt element 10 is made of transparent optical material, and for infrared band light spectrum image-forming, homocentric sphere concentrating element 10 can be by infrared optics
Material germanium or zinc selenide are made；For visible light wave range light spectrum image-forming, homocentric sphere concentrating element 10 can be by common transparent optical
Material is made；For ultraviolet band light spectrum image-forming, homocentric sphere concentrating element 10 can be by ultraviolet optical material magnesium fluoride or calcirm-fluoride
It is made.
Relay imaging system 11 provides virtual diaphragm 13 for homocentric sphere concentrating element 10, and virtual diaphragm 13 gathers positioned at homocentric sphere
The center of burnt element 10, improves the diaphragm free degree of homocentric sphere concentrating element 10, makes the incident light of different angle have
Identical paraxial characteristic and the more optical axis characteristics of common light path, realizes multispectral detection in real time.Homocentric sphere concentrating element adopts spectrum
Sample is converted into the spatial sampling of different incidence angles, is imaged on by relay imaging system on cmos detector, using multichannel frequency-
Sampling system is changed in idle running can be converted to spectrum sample outgoing space angle sampling, and system spectrum resolution ratio is detected by CMOS at this time
The relative angle of device 12 determines.
The relay imaging system 11 and the position of cmos detector 12 and the sky of 10 emergent light of homocentric sphere concentrating element
Between angle it is corresponding, achieve the purpose that parallel processing.
Claims (4)
1. the multispectral interferometer based on homocentric sphere concentrating element, it includes：
Preposition interference imaging system, the system are made of secondary color light source (1) and interferometer optics system, the interferometer optics system
Including beam expanding lens (2), the first beam-splitter (3), collimation lens (4), standard optic plane glass crystal (5) and the second beam-splitter (7)；
Beam splitting system is collimated, which is made of collimation lens (8) and spectro-grating (9)；
It is characterized in that it, which further includes multichannel frequency-idle running, changes sampling system, the system is by homocentric sphere concentrating element (10), relaying
Imaging system (11) and cmos detector (12) composition, entrance pupil and the homocentric sphere concentrating element (10) of relay imaging system (11)
Center overlaps；
The light that secondary color light source (1) is sent incides beam expanding lens (2), and the light sent after expanding incides the first beam-splitter (3), light warp
Lens (4) are collimated after first beam-splitter (3) reflection and are collimated into collimated light beam, and collimated light beam vertically incides standard optic plane glass crystal successively
(5) and on part to be measured (6)；Light is reflected through standard optic plane glass crystal (5) and part to be measured (6), and reflected light is transmitted to by the first beam-splitter (3)
On second beam-splitter (7), collimation lens (8) outgoing is entered after the second beam-splitter (7) reflection into directional light, directional light is again through dividing
Polychromatic light is divided into the light of different spectral coverage by light grating (9), during the light of different spectral coverage is focused on by homocentric sphere concentrating element (10)
Interference imaging detection and analysis are carried out after in imaging system (11), then by cmos detector (12).
2. the multispectral interferometer according to claim 1 based on homocentric sphere concentrating element, it is characterised in that homocentric sphere gathers
Burnt element (10) has the homocentric sphere symmetrical structure of multilayer different refractivity.
3. the multispectral interferometer according to claim 1 based on homocentric sphere concentrating element, it is characterised in that relay imaging
System (11) provides virtual diaphragm (13), virtual diaphragm (13) center and homocentric sphere concentrating element for homocentric sphere concentrating element (10)
(10) the centre of sphere overlaps, and improves the diaphragm free degree of homocentric sphere concentrating element (10).
4. the multispectral interferometer according to claim 1 based on homocentric sphere concentrating element, it is characterised in that in described
It is opposite with the space angle of homocentric sphere concentrating element (10) emergent light after the position of imaging system (11) and cmos detector (12)
Should.
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101681028A (en) * | 2006-10-25 | 2010-03-24 | 唐纳德·A·沃尔克 | Multi-layered gradient index progressive lens |
| CN103411557A (en) * | 2013-08-15 | 2013-11-27 | 哈尔滨工业大学 | Angular spectrum scanning quasi-confocal annular microstructure measuring device and method of array illumination |
| CN104317156A (en) * | 2014-09-28 | 2015-01-28 | 中国科学院长春光学精密机械与物理研究所 | Concentric spherical objective lens detector spherical surface array video acquisition device |
| CN105807405A (en) * | 2016-04-26 | 2016-07-27 | 中国科学院西安光学精密机械研究所 | Constant resolution multi-spectral optical system applicable to large dynamic range and nearly-hemispherical view field |
| CN106338342A (en) * | 2016-09-23 | 2017-01-18 | 昆明物理研究所 | Quasi real-time space time mixed modulation infrared interference spectrum imaging system, method and application |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2017011752A1 (en) * | 2015-07-15 | 2017-01-19 | Massachusetts Institute Of Technology | Systems, apparatus, and methods for spectral imaging |
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- 2017-03-29 CN CN201710196199.3A patent/CN106949969B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101681028A (en) * | 2006-10-25 | 2010-03-24 | 唐纳德·A·沃尔克 | Multi-layered gradient index progressive lens |
| CN103411557A (en) * | 2013-08-15 | 2013-11-27 | 哈尔滨工业大学 | Angular spectrum scanning quasi-confocal annular microstructure measuring device and method of array illumination |
| CN104317156A (en) * | 2014-09-28 | 2015-01-28 | 中国科学院长春光学精密机械与物理研究所 | Concentric spherical objective lens detector spherical surface array video acquisition device |
| CN105807405A (en) * | 2016-04-26 | 2016-07-27 | 中国科学院西安光学精密机械研究所 | Constant resolution multi-spectral optical system applicable to large dynamic range and nearly-hemispherical view field |
| CN106338342A (en) * | 2016-09-23 | 2017-01-18 | 昆明物理研究所 | Quasi real-time space time mixed modulation infrared interference spectrum imaging system, method and application |
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