CN104006883A - Imaging spectrometer based on multi-level micro reflecting mirror and manufacturing method thereof - Google Patents
Imaging spectrometer based on multi-level micro reflecting mirror and manufacturing method thereof Download PDFInfo
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- CN104006883A CN104006883A CN201410086253.5A CN201410086253A CN104006883A CN 104006883 A CN104006883 A CN 104006883A CN 201410086253 A CN201410086253 A CN 201410086253A CN 104006883 A CN104006883 A CN 104006883A
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Abstract
The invention discloses an imaging spectrometer based on a multi-level micro reflecting mirror and a manufacturing method of the imaging spectrometer, and relates to the field of to-earth remote sensing and detecting. The problem that because an existing imaging spectrometer internally includes a slit related to spatial resolution, luminous flux entering a system is limited is solved. The imaging spectrometer comprises a preposed imaging system, an interference system, a postposed imaging system and a focal plane detector. The interference system comprises a multi-level stepped micro reflecting mirror flaky beam splitter, a compensation plate and a planar reflecting mirror. After light emitted by an objective passes through the preposed imaging system and the flaky beam splitter, one beam of light is reflected by the flaky beam splitter to the planar reflecting mirror and is imaged into a first image point, the other beam of light is transmitted by the flaky beam splitter, passes through the compensation plate and is imaged into a second image point on a certain stepped reflecting face of the multi-level stepped micro reflecting mirror; the light of the first image point is transmitted through the flaky beam splitter to the postposed imaging system for imaging, the light of the second image point passes through the compensation plate to the flaky beam splitter for reflecting and then is imaged on a postposed imaging beam shrinking system, and images of the postposed imaging beam shrinking system are received by the focal plane detector.
Description
Technical field
The invention belongs to remote sensing of the earth observation field, relate to a kind of method for making of Fourier transform infrared imaging spectrometer, be specifically related to a kind of based on the outer Fourier transform imaging spectral instrument system method for making of the novel space-time unite modulated red of multistage ladder micro-reflector.
Background technology
Imaging spectrometer is the optics remote sensing instrument of new generation growing up on multi-spectral imager basis the eighties in 20th century, it can be extended to three dimensions spectral information by traditional two-dimensional space information, thereby can realize, ground object target is carried out to meticulous identification and classification.Therefore imaging spectrometer is the important tool of carrying out ground remote sensing detection, and it has merged the advantage of spectrometer and multi-spectral imager, has really realized the detection of object being carried out to " collection of illustrative plates unification ".Therefore it is applied in space remote sensing widely, and military target is surveyed, geological resource exploration, environmental monitoring, the fields such as meteorologic analysis.According to the difference of imaging spectrometer principle of work, it mainly can be divided into color dispersion-type and Fourier transform type two classes.Color dispersion-type imaging spectrometer is the light-dividing principle based on prism or grating, can on detector, directly obtain the spectral information of ground object target.This type of imaging spectrometer development is morning relatively, and technology comparative maturity is more extensive in aerospace field application, but spectral resolution is subject to the control of slit, so it is more difficult aspect the infrared weak radiation of detection.Fourier transform imaging spectrometer is that then the interferogram that first obtains object does to interferogram the spectrum that Fourier transform obtains object.According to the difference to the modulation system of interferogram, Fourier transform imaging spectrometer mainly can be divided into time-modulation type, spatial modulation type and space-time unite modulation type.Time-modulation type Fourier transform imaging spectrometer is based on Michelson interferometer structure, and it adopts and drives an index glass to produce optical path difference, therefore needs the drive unit of a set of precision.And the measurement that completes a width interferogram needs the time of one-period, its real-time is poor.Its inside of spatial modulation Fourier transform imaging spectrometer is not containing movable member, and it utilizes the difference of locus to produce optical path difference can realize the spectral measurement to rapid change object, and its real-time is relatively good.But traditional spatial modulation Fourier becomes imaging spectrometer inside contains the slit relevant with spatial resolution, has limited the luminous flux of the system that enters.Space-time unite modulation type Fourier transform imaging spectrometer is based on image plane interference imaging theory, and slit and movable member are not contained in its inside, and therefore to have luminous flux large, constitutionally stable advantage.
Summary of the invention
The object of the invention is to overcome the problem that above-mentioned prior art exists, and a kind of imaging spectrometer based on multilevel micro-reflector and method for making of simple in structure, reproducible, reliable operation is provided.
Imaging spectrometer based on multilevel micro-reflector, comprises preposition imaging system, interference system, rearmounted imaging system and infrared CCD, and described interference system comprises multistage ladder micro-reflector sheet beam splitter, compensating plate and plane mirror; Premenstrual the putting after imaging system and sheet beam splitter of light that target object sends, form two-beam, light beam is imaged as the first picture point through sheet beam splitter reflection to plane mirror, and another light beam is imaged as second picture point by compensating plate on certain the ladder reflecting surface at multistage ladder micro-reflector through the transmission of sheet beam splitter; The light of described the first picture point is transmitted through rearmounted imaging system imaging through sheet beam splitter, and the light of the second picture point is through compensating plate to sheet beam splitter reflection, and in rearmounted imaging system imaging, the picture of described rearmounted imaging system is received by infrared CCD.
The ladder height of the multistage ladder micro-reflector of described setting is d, within the scope of n the corresponding field angle of ladder reflecting surface, optical path difference between the virtual image that target object becomes in the mirror position of n ladder reflecting surface at n the micro-reflecting surface imaging of ladder and target object, is expressed as with formula one:
Formula one, δ=2nd;
The reflecting surface width of setting multistage ladder micro-reflector is a, and the flying height of Infrared Imaging Spectrometer is H, and the focal length of preposition imaging system is f', and the distance between adjacent picture point is a, and the distance obtaining between adjacent target object point is expressed as with formula two:
Formula two, Δ h=Ha/f';
The catercorner length of setting multistage ladder micro-reflector is h, and the field angle of preposition imaging system is:
The method for making of the imaging spectrometer based on multilevel micro-reflector, the method is realized by following steps:
Step 1, make the substrate of this imaging spectrometer, choose aluminium, copper, titanium, stainless steel or silicon as base material, and upper surface is carried out to polishing;
Step 2, using the center of the substrate after polishing in step 1 as the center of sheet beam splitter half-reflection and half-transmission face, utilize refractive index and the thickness data of sheet beam splitter and compensating plate to calculate the relative position of four optical axis datum lines and the miniature governor motion of optical element position, using sheet beam splitter center, rear surface both the surperficial center at part reflective semitransparent film place as the center of system.The thickness of sheet beam splitter and compensating plate is t, and refractive index is n.Primary optic axis is with respect to the offset distance l of beam splitter rear surface
1for
The offset distance l that the second optical axis is shown below with respect to beam splitter
2for:
The offset distance l that the 3rd optical axis is shown below with respect to beam splitter
3for:
The 4th optical axis is with respect to the offset distance l of beam splitter rear surface
4for:
According to result of calculation, in substrate, adopt the photoetching of MOEMS technology and etching process to make the reference data line of four optical axises and the miniature governor motion of optical element;
Be specially: the reference data line of making four optical axises, be respectively the primary optic axis reference data line at preposition imaging system place, the second optical axis reference data line at multistage ladder micro-reflector place, the 4th optical axis reference data line at the 3rd optical axis reference data line at plane mirror place and rearmounted imaging system place, then in the center of substrate, make the miniature governor motion of shape beam splitter, at the 3rd optical axis reference data line, make the miniature governor motion of compensating plate, on the second optical axis reference line, make the miniature governor motion of multistage ladder micro-reflector, on the 3rd optical axis reference data line, make the miniature governor motion of plane mirror, on primary optic axis, make the miniature governor motion of preposition imaging system, on the 4th optical axis reference data line, make the miniature governor motion of rearmounted imaging system and the miniature governor motion of infrared eye.
Step 3, in the surrounding of the substrate position vertical with the reference data line of four optical axises, place respectively four laser instruments, laser beam is overlapped with the reference data line of described four optical axises, regulate the height of laser instrument to the centre-height of device;
Step 4, sheet beam splitter is arranged on the miniature governor motion of sheet beam splitter, compensating plate is arranged on the miniature governor motion of compensating plate; Adopt laser beam corresponding on four optical axis datum lines to carry out minute adjustment to sheet beam splitter and compensating plate:
Detailed process is: by the fixing white screen above at the 4th laser instrument, the white screen of employing and the first laser instrument regulate position and the angle of sheet beam splitter, fixedly sheet beam splitter; To shield in vain move to before second laser fixing, by white screen and second laser fixed compensation plate;
Step 5, multistage ladder micro-reflector is arranged on the miniature governor motion of multistage ladder micro-reflector, adopt the 3rd laser instrument and diaphragm above thereof to regulate multistage ladder micro-reflector, when the light of multistage ladder micro-reflector reflection passes through the aperture of diaphragm, fixing multistage ladder micro-reflector; Fixing multistage ladder micro-reflector; By diaphragm move to the 4th laser instrument before, when aperture center by diaphragm of the light of plane mirror reflection, fixed pan catoptron;
Step 6, preposition imaging system is installed on the miniature governor motion of preposition imaging system, diaphragm is moved to before the first laser instrument, adopt LASER Light Source and diaphragm to regulate preposition imaging system, when the current light that is set to picture systematic reflection passes through diaphragm aperture center, fixing preposition imaging system; Rearmounted imaging system is installed on the miniature governor motion of rearmounted imaging system, diaphragm is moved to before the 4th laser instrument, when aperture by diaphragm of the light of rearmounted imaging system reflection, fixing rearmounted imaging system.
Step 7, four laser instruments and diaphragm are removed, infrared CCD is installed on the miniature governor motion of infrared eye, regulate the position of infrared CCD detector, when fixing infrared CCD of when picture that obtains clearly multistage ladder micro-reflector and plane mirror on infrared CCD detector, complete.
Beneficial effect of the present invention: system of the present invention, based on Michelson interferometer structure, adopts sheet beam splitter, and simultaneously plates infrared part reflective semitransparent film at it, another side plating infrared anti-reflection film.The optical path difference of introducing in order to eliminate beam splitter has added the compensating plate with beam splitter same material in system, at the two sides of compensating plate plating infrared anti-reflection film.Cause preposition imaging system, multistage ladder micro-reflector, the optical axis at plane mirror and rearmounted imaging system place is no longer mutually vertical or overlap.Therefore in system, exist four optical axises, be respectively the optical axis at preposition imaging system place, the optical axis at multistage ladder micro-reflector place, the optical axis at the optical axis at plane mirror place and rearmounted imaging system place.When carrying out system making, usining the rear surface of beam splitter both the surperficial center of half-reflection and half-transmission as the reference point of system, calculated the relative position of four optical axises respectively.Adopt a multistage ladder micro-reflector to replace the index glass in Michelson interference system, with this, realize the staticize of system, greatly improve the reliability of system.And in system, do not contain slit, compare with traditional spatial modulation Fourier transform imaging spectrometer the luminous flux that has greatly improved system, under high spectral resolution, can improve greatly the signal to noise ratio (S/N ratio) of system, solve the low difficult problem of system signal noise ratio under high spectral resolution.This imaging spectrometer is operated in medium-wave infrared wave band, and not saturating visible ray brings certain difficulty therefore to processing and the debugging of system.Therefore in the process of native system debugging, adopt and combine with infrared as seen, the regulative mode that coarse adjustment combines with meticulous adjusting.
First method of the present invention carries out polishing to the substrate of making.Utilize residing position on substrate, beam splitter Mian center of beam splitter to calculate the relative position of four optical axises in system, and according to result of calculation, complete the making of four optical axis reference data lines.Then on four optical axis reference data lines, be made into the miniature governor motion of needed each optical element of picture spectrometer system.Each optical element of system is installed on the corresponding miniature governor motion of substrate, and adjust its angle and position, make angle and the position of each optical element can more accurately meet design needs, thereby guaranteed the precision of space-time unite modulation Infrared Imaging Spectrometer.The present invention is used in the Fourier transform imaging spectrometer of medium-wave infrared work and the making of pertinent instruments.
Accompanying drawing explanation
Fig. 1 is the system construction drawing of the imaging spectrometer based on multilevel micro-reflector of the present invention;
Fig. 2 is that the imaging spectrometer based on multilevel micro-reflector of the present invention is swept the imaging process on planar array detector under pattern at a window;
Fig. 3 is the construction drawing of optical axis datum line in the method for making of the imaging spectrometer based on multilevel micro-reflector of the present invention;
In Fig. 4, Fig. 4 a is the Installation and Debugging schematic diagram of beam splitter in the method for making of the imaging spectrometer based on multilevel micro-reflector of the present invention, Fig. 4 b is the Installation and Debugging schematic diagram of multistage ladder micro-reflector and level crossing, and Fig. 4 c is the Installation and Debugging schematic diagram of preposition imaging system and rearmounted imaging system.
Fig. 5 is the Installation and Debugging figure of machine system of the method for making of the imaging spectrometer based on multilevel micro-reflector of the present invention.
Embodiment
Embodiment one, in conjunction with Fig. 1 and Fig. 2, present embodiment is described, the imaging spectrometer based on multilevel micro-reflector, the preposition imaging system 1 of described imaging spectrometer, interference system 2 and rearmounted imaging contracting beam system 3 and infrared CCD 4 form.Wherein interference system 2 is by multistage ladder micro-reflector 7, plane mirror 5, and sheet beam splitter 6 and compensating plate 8 form; The light that a certain moment terrain object object sends enters this imaging spectral instrument system with a certain field angle, is imaged on respectively on a certain cascaded surface of plane mirror 5 and multistage ladder micro-reflector 7 after preposition imaging system 1 and sheet beam splitter 6.Imaging within the scope of the certain field angle of the corresponding landing ground object of the different reflecting surface of multistage ladder micro-reflector 7 wherein, a certain reflecting surface and two picture points on plane mirror 5 of being imaged on multistage ladder micro-reflector 7 exist owing to having fixing ladder height, therefore can produce fixing phasic difference.Two picture points as two relevant thing sources through just obtaining the image of the object of a width after interferogram is modulated after 3 imagings of rearmounted imaging contracting beam system.In next moment, the light that target object sends can enter system with another one field angle, thereby is imaged on adjacent ladder reflecting surface.
Spectrometer system described in present embodiment is as infrared system, described sheet beam splitter 6, the material of compensating plate 8 adopt zinc selenide, zinc selenide, and starting material are made by the method drawing or grow, by optics roughing and grinding and polishing, reach required form and parameter index again.A surperficial evaporation at sheet beam splitter 6 has infrared part reflective semitransparent film, to realize reflection and each effect of approximately 50% of transmission; Another two surperficial evaporations surperficial and compensation version at sheet beam splitter have infrared optics anti-reflection film, to improve energy efficiency.Size and the multistage ladder micro-reflector size of zinc selenide beam splitter, compensation version match, and the width of described multilevel micro-reflector 7 will be considered the impact of diffraction effect on interferogram and imaging.The single ladder height scope of described multilevel micro-reflector 7, between 1nm-50 μ m, adopts MOEMS technology or optics job operation to make, and the ladder height error of described multilevel micro-reflector 7 is less than 5% of ladder height.While adopting the multistage ladder micro-reflector of MOEMS fabrication techniques, for guaranteeing the homogeneity of ladder height, need to adopt Rotation evaporation, by light-operated method, control ladder height.On multistage ladder micro-reflector surface, adopt radio-frequency sputtering or electron beam evaporation technique to prepare infrared high-reflecting film and diaphragm, described multistage ladder micro-reflector ladder height, width and step number determine imaging spectrometer spectral resolution and image quality.
The ladder height of the multistage ladder micro-reflector 7 of setting described in present embodiment is d, within the scope of n the corresponding field angle of ladder reflecting surface, optical path difference between the virtual image that target object becomes in the mirror position of n ladder reflecting surface at n the micro-reflecting surface imaging of ladder and target object, is expressed as with formula one:
Formula one, δ=2nd;
The reflecting surface width of setting multistage ladder micro-reflector 7 is a, and the flying height of Infrared Imaging Spectrometer is H, and the focal length of preposition imaging system 1 is f', and the distance between adjacent picture point is a, and the distance obtaining between adjacent target object point is expressed as with formula two:
Formula two, Δ h=Ha/f';
The catercorner length of setting multistage ladder micro-reflector 7 is h, and the field angle of preposition imaging system 1 is:
In conjunction with Fig. 2, present embodiment is described, Fig. 2 is that a window is swept the imaging process of native system on infrared CCD under pattern,
what represent is object imaging on infrared CCD.What do not get in the same time, be the same row of infrared CCD, can find out when object has just entered a scanning window, it is imaged on the right hand edge of row of infrared CCD through imaging spectrometer, then through a window, sweep the pattern left hand edge of the same row of its imaging infrared CCD afterwards.In the situation that the reflecting surface number of multistage ladder micro-reflector is 32, can on rearmounted infrared CCD, obtain the 32 width images about target object.After this 32 width image is sheared and being spliced, just can obtain the interferogram of target object, then it be carried out to Fourier transform and just can obtain the spectral information of this target.
Embodiment two, in conjunction with Fig. 3 to Fig. 5, present embodiment is described, present embodiment is the method for making of the imaging spectrometer based on multilevel micro-reflector described in embodiment one, and the method is realized by following steps:
A, make the substrate of this imaging spectrometer, choose aluminium, copper, titanium, stainless steel or silicon as base material, the substrate by base material according to the dimensional requirement manufacturing system of design, and upper surface is carried out to polishing; Polished surface roughness is less than or equal to 10 microns, and flatness is less than or equal to 50 microns.
B, using the center of substrate as the center of sheet beam splitter 6 half-reflection and half-transmission faces, utilize the refractive index of sheet beam splitter 6 and compensating plate 6 and thickness data to calculate the relative position of four optical axis datum lines and the miniature governor motion of optical element position.According to result of calculation, on substrate, utilize photoetching and the etching process of MOEMS technology to make the reference data line of four optical axises and the mark of the miniature governor motion of element position.
In conjunction with Fig. 3, be specially: the reference data line of making four optical axises, be respectively the primary optic axis reference data line 13 at preposition imaging system place, the second optical axis reference data line 14 at multistage ladder micro-reflector place, the 3rd optical axis reference data line 15 at plane mirror 5 places and the 4th optical axis reference data line 16 at rearmounted imaging system place, using sheet beam splitter center, rear surface both the surperficial center at part reflective semitransparent film place as the center of system.The thickness of sheet beam splitter and compensating plate is t, and refractive index is n, and primary optic axis is with respect to the offset distance l of beam splitter rear surface
1for
the offset distance l that the second optical axis is shown below with respect to beam splitter
2for:
the offset distance l3 that the 3rd optical axis is shown below with respect to beam splitter is:
the 4th optical axis is with respect to the offset distance l of beam splitter rear surface
4for:
According to result of calculation, in substrate, adopt the photoetching of MOEMS technology and etching process to make the reference data line of four optical axises and the miniature governor motion of optical element;
Then in the center of substrate, make the miniature governor motion 17 of shape beam splitter, at the 3rd optical axis reference data line 15, make the miniature governor motion 18 of compensating plate, on the second optical axis reference line, make the miniature governor motion 20 of multistage ladder micro-reflector, on the 3rd optical axis reference data line 15, make the miniature governor motion 22 of plane mirror, on primary optic axis, make the miniature governor motion 23 of preposition imaging system, on the 4th optical axis reference data line, make the miniature governor motion 24 of rearmounted imaging system and the miniature governor motion 25 of infrared eye.
C, in the surrounding of the substrate position vertical with the reference data line of four optical axises, place respectively four laser instruments, make laser beam lay respectively at described four optical axises reference data line directly over, and with the reference data line parallel of four optical axises;
D, sheet beam splitter 6 is arranged on the miniature governor motion 17 of sheet beam splitter, compensation version 8 is arranged on the miniature governor motion 18 of compensating plate; Utilize laser beam corresponding on four optical axis datum lines to carry out minute adjustment to sheet beam splitter 6 and compensating plate.In conjunction with Fig. 4 a, before the 4th laser instrument 12, fix a white screen 19, utilize white screen the 19 and first laser instrument 9 to regulate position and the angle of sheet beam splitters 6, fixedly sheet beam splitter 6, will shield in vain 19 and move on to the front profit of second laser 10 and use the same method and regulate also fixed compensation plate 8.
E, in conjunction with Fig. 4 b, multistage ladder micro-reflector 7 is arranged on the miniature governor motion 20 of multistage ladder micro-reflector, utilize 21 pairs of multistage ladder micro-reflectors 7 of the 3rd laser instrument 11 and diaphragm above thereof to regulate.Plane mirror 5 is arranged on the miniature governor motion 22 of plane mirror, diaphragm 21 is moved on to the front end of the first laser instrument 9.Utilize the first laser instrument 9 with and 21 pairs of level crossings of diaphragm above regulate and fix.
F, in conjunction with Fig. 4 c, preposition imaging system 1 is installed on the miniature governor motion 23 of preposition imaging system.By the diaphragm in Fig. 4 b 21 move on to the first laser instrument 9 before, utilize 21 pairs of preposition imaging systems 1 of LASER Light Source and diaphragm to regulate, fixing preposition imaging system 1.Rearmounted imaging system 3 is installed on the miniature governor motion 24 of rearmounted imaging system, by diaphragm 21 move to the 4th laser instrument 12 before, utilize 21 pairs of rearmounted imaging systems 3 of the 4th laser instrument 12 and diaphragm to regulate, fixing rearmounted imaging system 3.
G, in conjunction with Fig. 5, four laser instruments and diaphragm 21 are removed, infrared CCD 4 is installed on the miniature governor motion 25 of infrared eye, regulate the position of infrared CCD 4, when fixing infrared CCD 4 of 4 whens picture that obtain clearly multistage ladder micro-reflector 7 and plane mirror 5 on infrared surface battle array infrared CCD, then set a target surface target 26, finely tune preposition imaging system 1, target surface target 26 is imaged on infrared CCD 4 clearly.
H, imaging spectrometer is contained on rotatable platform, the target surface target setting is carried out to scanning sample, then the multiple image obtaining is processed, obtain image and the spectrogram of object.
Preposition imaging system 1 and rearmounted imaging system 3 described in present embodiment are Homology of Sphere structure, adopt silicon and germanium to make, to eliminate the aberration of system.In order to increase the transmitance of system, each optical element surface all plates infrared anti-reflection film.Sheet beam splitter 6, as the core devices of imaging spectrometer, adopts Infrared Material Zinc Selenide or potassium bromide to make, and on beam-splitting surface, plates infrared part reflective semitransparent film, at another plated surface infrared anti-reflection film.Compensating plate and sheet beam splitter 6 adopt homogenous configuration, same material, and two sides is coated with respectively infrared anti-reflection film.Plane mirror 5 adopts silicon wafer to manufacture, and at the infrared high-reflecting film of plated surface, multistage ladder micro-reflector 7 adopts repeatedly the method for photoetching plated film to make, the single ladder height scope of described multilevel micro-reflector 7 is between 1nm-50 μ m, adopt MOEMS technology or optics job operation to make, the ladder height error of described multilevel micro-reflector 7 is less than 5% of ladder height.And at the infrared high-reflecting film of its plated surface.According to the requirement of Machine Design, described miniature governor motion adopts duralumin or stainless steel to make, and carries out blacking processing on surface and inwall.
Obviously, above-described embodiment is only for example is clearly described, and the not restriction to embodiment.For those of ordinary skill in the field, can also make other changes in different forms on the basis of the above description.Here exhaustive without also giving all embodiments.And the apparent variation of being extended out thus or change are still among the protection domain in the invention.
Claims (10)
1. the imaging spectrometer based on multilevel micro-reflector, comprises preposition imaging system (1), interference system (2), rearmounted imaging system (3) and infrared CCD (4); It is characterized in that, described interference system (2) comprises multistage ladder micro-reflector (7) sheet beam splitter (6), compensating plate (8) and plane mirror (5); Premenstrual the putting after imaging system (1) and sheet beam splitter (6) of light that target object sends, form two-beam, light beam reflexes on plane mirror (5) and is imaged as the first picture point through sheet beam splitter (6), and another light beam is imaged as second picture point by compensating plate (8) on certain the ladder reflecting surface at multistage ladder micro-reflector through sheet beam splitter (6) transmission;
The light of described the first picture point is transmitted through rearmounted imaging system (3) imaging through sheet beam splitter (6), the light of the second picture point is after compensating plate (8) to sheet beam splitter (6) reflects, in rearmounted imaging system (3) imaging, the picture of described rearmounted imaging system (3) is received by infrared CCD (4).
The ladder height of the multistage ladder micro-reflector of described setting (7) is d, within the scope of n the corresponding field angle of ladder reflecting surface, optical path difference between the virtual image that target object becomes in the mirror position of n ladder reflecting surface at n the micro-reflecting surface imaging of ladder and target object, is expressed as with formula one:
Formula one, δ=2nd;
The reflecting surface width of setting multistage ladder micro-reflector (7) is a, the flying height of Infrared Imaging Spectrometer is H, the focal length of preposition imaging system (1) is f', and the distance between adjacent picture point is a, and the distance obtaining between adjacent target object point is expressed as with formula two:
Formula two, Δ h=Ha/f';
The catercorner length of setting multistage ladder micro-reflector (7) is h, and the field angle of preposition imaging system (1) is:
2. the imaging spectrometer based on multilevel micro-reflector according to claim 1, is characterized in that, the one side of described sheet beam splitter (6) is plated infrared part reflective semitransparent film, another side plating infrared anti-reflection film; Infrared anti-reflection film is plated respectively on the two sides of described compensating plate (8).
3. the method for making of the imaging spectrometer based on multilevel micro-reflector, is characterized in that, the method is realized by following steps:
Step 1, make the substrate of this imaging spectrometer, choose aluminium, copper, titanium, stainless steel or silicon as base material, and upper surface is carried out to polishing;
Step 2, using the center of the substrate after polishing in step 1 as the center of sheet beam splitter (6) half-reflection and half-transmission face, utilize refractive index and the thickness data of sheet beam splitter (6) and compensating plate (8) to calculate the relative position of four optical axis datum lines and the miniature governor motion of optical element position, the thickness of sheet beam splitter and compensating plate is t, refractive index is n, and primary optic axis is with respect to the offset distance l of beam splitter rear surface
1for
The offset distance l that the second optical axis is shown below with respect to beam splitter
2for:
The offset distance l that the 3rd optical axis is shown below with respect to beam splitter
3for:
The 4th optical axis is with respect to the offset distance l of beam splitter rear surface
4for:
According to result of calculation, in substrate, adopt the photoetching of MOEMS technology and etching process to make the reference data line of four optical axises and the miniature governor motion of optical element;
Be specially: the reference data line of making four optical axises, be respectively the primary optic axis reference data line (13) at preposition imaging system place, the second optical axis reference data line (14) at multistage ladder micro-reflector place, the 3rd optical axis reference data line (15) at plane mirror (5) place and the 4th optical axis reference data line (16) at rearmounted imaging system place, then in the center of substrate, make the miniature governor motion (17) of shape beam splitter, at the 3rd optical axis reference data line (15), make the miniature governor motion (18) of compensating plate, on the second optical axis reference line, make the miniature governor motion (20) of multistage ladder micro-reflector, at the upper miniature governor motion (22) of making plane mirror of the 3rd optical axis reference data line (15), on primary optic axis, make the miniature governor motion (23) of preposition imaging system, on the 4th optical axis reference data line, make the miniature governor motion (24) of rearmounted imaging system and the miniature governor motion (25) of infrared eye.
Step 3, in the surrounding of the substrate position vertical with the reference data line of four optical axises, place respectively four laser instruments, laser beam is overlapped with the reference data line of described four optical axises, regulate the height of laser instrument to the centre-height of device;
Step 4, that sheet beam splitter (6) is arranged on to the miniature governor motion (17) of sheet beam splitter is upper, compensating plate (8) is arranged on the miniature governor motion (18) of compensating plate; Adopt laser beam corresponding on four optical axis datum lines to carry out minute adjustment to sheet beam splitter (6) and compensating plate (8):
Detailed process is: by the fixing white screen (19) above at the 4th laser instrument (12), the white screen of employing (19) and the first laser instrument (9) regulate position and the angle of sheet beam splitter (6), fixedly sheet beam splitter (6); To shield in vain (19), to move to second laser (10) front fixing, by white screen (19) and second laser (10) fixed compensation plate (8);
Step 5, multistage ladder micro-reflector (7) is arranged on the miniature governor motion (20) of multistage ladder micro-reflector, adopt the 3rd laser instrument (11) and diaphragm above (21) thereof to regulate multistage ladder micro-reflector (7), when the light of multistage ladder micro-reflector (7) reflection passes through the aperture of diaphragm (21), fixing multistage ladder micro-reflector (7); Fixing multistage ladder micro-reflector (7); By diaphragm (21) move to the 4th laser instrument (21) before, when aperture center by diaphragm (21) of the light of plane mirror (5) reflection, fixed pan catoptron (5);
Step 6, preposition imaging system (1) is installed on the miniature governor motion (23) of preposition imaging system, diaphragm (21) is moved to the first laser instrument (9) above, adopt LASER Light Source and diaphragm (21) to regulate preposition imaging system (1), when the current light of putting imaging system (1) reflection passes through diaphragm (21) aperture center, fixing preposition imaging system (1); Rearmounted imaging system (3) is installed on the miniature governor motion (24) of rearmounted imaging system, diaphragm (21) is moved to the 4th laser instrument (12) above, when the light of rearmounted imaging system (3) reflection passes through the aperture of diaphragm (21), fixing rearmounted imaging system.
Step 7, four laser instruments and diaphragm (21) are removed, infrared CCD (4) is installed on the miniature governor motion (25) of infrared eye, regulate the position of infrared CCD detector (4), when fixing infrared CCD (4) of (4) obtain multistage ladder micro-reflector (7) and plane mirror (5) clearly on infrared CCD detector when picture, complete.
4. the method for making of the imaging spectrometer based on multilevel micro-reflector according to claim 3, it is characterized in that, after step 6, also comprise and set a target surface target (26), finely tune preposition imaging system (1), target surface target (26) is imaged on infrared CCD (4) clearly; Imaging spectrometer is contained on rotatable platform, the target surface target setting is carried out to scanning sample, then the multiple image obtaining is processed, obtain image and the spectrogram of object.
5. the method for making of the imaging spectrometer based on multilevel micro-reflector according to claim 3, is characterized in that, after the polishing described in step 1, the polished surface roughness of substrate is less than or equal to 10 microns, and flatness is less than or equal to 50 microns.
6. the method for making of the imaging spectrometer based on multilevel micro-reflector according to claim 3, is characterized in that, described preposition imaging system (1) and rearmounted imaging system (3) are Homology of Sphere structure, adopts silicon and germanium to make.
7. the method for making of the imaging spectrometer based on multilevel micro-reflector according to claim 3, it is characterized in that, in described preposition imaging system (1) and rearmounted imaging system (3), each optical element surface all plates infrared anti-reflection film, sheet beam splitter (6) adopts Infrared Material Zinc Selenide or potassium bromide to make, and on beam-splitting surface, plate infrared part reflective semitransparent film, at another plated surface infrared anti-reflection film; Compensating plate (8) two sides is coated with respectively infrared anti-reflection film.Plane mirror (5) adopts silicon wafer to manufacture, and at the infrared high-reflecting film of plated surface.
8. the method for making of the imaging spectrometer based on multilevel micro-reflector according to claim 3, is characterized in that, multistage ladder micro-reflector (7) adopts the repeatedly photoetching coating process of MOEMS technology to make,, and at the infrared high-reflecting film of plated surface.The single ladder height scope of multistage ladder micro-reflector (7) is between 1nm-50 μ m, and ladder height error is less than 5% of ladder height.
9. the method for making of the imaging spectrometer based on multilevel micro-reflector according to claim 3, it is characterized in that, the ladder height of the multistage ladder micro-reflector of described setting (7) is d, within the scope of n the corresponding field angle of ladder reflecting surface, optical path difference between the virtual image that target object becomes in the mirror position of n ladder reflecting surface at n the micro-reflecting surface imaging of ladder and target object, is expressed as with formula one:
Formula one, δ=2nd;
The reflecting surface width of setting multistage ladder micro-reflector (7) is a, the flying height of Infrared Imaging Spectrometer is H, the focal length of preposition imaging system (1) is f', and the distance between adjacent picture point is a, and the distance obtaining between adjacent target object point is expressed as with formula two:
Formula two, Δ h=Ha/f';
The catercorner length of setting multistage ladder micro-reflector (7) is h, and the field angle of preposition imaging system (1) is:
10. the method for making of the imaging spectrometer based on multilevel micro-reflector according to claim 3, it is characterized in that, described miniature governor motion is sextuple miniature adjustment structure, this structure realizes the fine adjustment of tri-direction translations of XYZ and three angle component of pitching rotation roll, and adopt duralumin or stainless steel to make, and carry out blacking processing on surface and inwall.
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