CN103913234B - Fourier transform infrared imaging spectrometer based on multilevel micro-reflector - Google Patents
Fourier transform infrared imaging spectrometer based on multilevel micro-reflector Download PDFInfo
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Abstract
Fourier transform infrared imaging spectrometer based on multilevel micro-reflector, relate to remote sensing of the earth field of detecting, solve existing imaging spectrometer internal containing the slit relevant with spatial resolution, the problem limiting the luminous flux of entrance system, including preposition imaging system, interference system, rearmounted imaging system and focus planardetector, institute's interference system includes multistage ladder micro-reflector lamellar beam splitter, compensating plate and plane mirror；Light that target sends is premenstrual put imaging system and lamellar beam splitter after, light beam is imaged as the first picture point on lamellar beam splitter reflection to plane mirror, and another light beam is imaged as the second picture point through compensating plate after lamellar beam splitter transmission on certain ladder reflecting surface of multistage ladder micro-reflector；The light of the first picture point is transmitted through rearmounted imaging system images through lamellar beam splitter, and after the compensated plate of light of the second picture point to lamellar beam splitter reflection, in rearmounted imaging contracting beam system imaging, the picture of described rearmounted imaging contracting beam system is received by focus planardetector.
Description
Technical field
The present invention relates to remote sensing of the earth field of detecting, relate to a kind of Fourier transformation imaging spectral instrument system, be specifically related to
A kind of novel space-time of based on integrated ladder micro-reflector and lamellar beam splitter combined modulation Fourier transform infrared spectrometer system
System.
Background technology
Imaging spectrometer is the organic combination of spectrogrph and imager, and it can obtain target object spectral information and figure
As information, solving traditional spectrogrph has spectrum without having in image and traditional multi-spectral imager as the difficult problem without spectrum.Cause
This its be widely applied to space remote sensing, the fields such as military target detects, and geological resource is explored, environmental monitoring, meteorologic analysis.Press
According to operation principle difference its be broadly divided into color dispersion-type and Fourier transformation type two class.Color dispersion-type imaging spectrometer be with prism or
Grating, as beam splitter, accepts the radiation information of each smooth spectral element on the detector.Its development is compared early, leads in Aero-Space
Territory Application comparison is extensive, but spectral resolution is controlled by slit, and therefore it is relatively difficult in terms of detecting infrared weak radiation.
Fourier transformation imaging spectrometer is first to obtain the interferogram of object then interferogram does Fourier transformation to obtain the light of object
Spectrum information.According to the difference of the modulation system to interferogram, Fourier transformation imaging spectrometer can be divided mainly into time-modulation type,
Spatial modulation type and space-time combined modulation type.Time-modulation type Fourier transformation imaging spectrometer is based on Michelson's interferometer
Structure, it uses one index glass of driving to produce optical path difference.It is thus desirable to the driving means of a set of precision, its real-time compares
Difference.Spatial modulation Fourier transformation imaging spectrometer does not contains movable member inside it, and it utilizes the different generations of locus
Optical path difference, it is possible to achieve the spectral measurement to rapid change object, its real-time is relatively good.But traditional spatial modulation Fourier becomes
As spectrogrph is internal containing the slit relevant with spatial resolution, limit the luminous flux of entrance system, and current space
It is the compactest that modulation Fourier transformation imaging spectrometer generally also exists structure, the shortcoming that weight ratio is heavier.Space-time combined modulation type
Fourier transformation imaging spectrometer is based on image plane interference image-forming principle, does not contains slit and movable member, therefore have inside it
There is the big constitutionally stable advantage of luminous flux.
Summary of the invention
The present invention solves that existing imaging spectrometer is internal containing the slit relevant with spatial resolution, limit entrance system
The luminous flux of system, generally also exists structure the compactest, the problem of the shortcomings such as weight ratio is heavier, it is provided that a kind of micro-based on multistage ladder
The Fourier transform infrared imaging spectrometer of reflecting mirror.
Fourier transform infrared imaging spectrometer based on multilevel micro-reflector, including preposition imaging system, interference system,
Rearmounted imaging contracting beam system and focus planardetector, described interference system includes multistage ladder micro-reflector lamellar beam splitter, benefit
Repay plate and plane mirror；Light that target object sends is premenstrual put imaging system and lamellar beam splitter after, form two-beam, a branch of
Light is imaged as the first picture point on lamellar beam splitter reflection to plane mirror, another light beam after lamellar beam splitter transmission through mend
Repay plate and be imaged as the second picture point on certain ladder reflecting surface of multistage ladder micro-reflector；The light of described first picture point is through lamellar
Beam splitter is transmitted through rearmounted imaging contracting beam system imaging, after the compensated plate of light of the second picture point to lamellar beam splitter reflection, rear
Being set to as contracting beam system imaging, the picture of described rearmounted imaging contracting beam system is received by focus planardetector.
The described ladder height setting multistage ladder micro-reflector is as d, in the angle of visual field corresponding to the n-th ladder reflecting surface
In the range of, target object at the n-th ladder micro-reflecting surface imaging and target object in the mirror-bit of the n-th ladder reflecting surface
Put the optical path difference between the formed virtual image, be expressed as with formula one:
Formula one, δ=2nd；
Setting the reflecting surface width of multistage ladder micro-reflector as a, the flying height of Infrared Imaging Spectrometer is H, preposition
The focal length of imaging system (1) is f', then the distance between adjacent image points is a, it is thus achieved that the distance formula between adjacent target object point
Two are expressed as:
Formula two, Δ h=Ha/f'；
The catercorner length setting multistage ladder micro-reflector (7) as h, the angle of visual field of preposition imaging system (1) is:
The operation principle of the present invention: Infrared Imaging Spectrometer of the present invention is as a secondary imaging system, this one-tenth
As the optical path difference of spectrogrph is determined by the ladder height of multilevel micro-reflector.The light warp that a certain moment ground target object sends
It is imaged on respectively after preposition imaging system and beam splitter on multilevel micro-reflector and plane mirror, due to the existence of ladder height,
Two picture points being imaged on multilevel micro-reflector and plane mirror are made to produce a fixing phase difference.Two once as
O'clock as two relevant thing sources can obtain after rearmounted imaging contracting beam system imaging ground target object image information and
Interference light intensity information.Sweeping along with ground is pushed away by system, ground target object will be with another one visual field at subsequent time
Angle enters system, thus is imaged on adjacent ladder reflecting surface.Within a window sweeps pattern, ground target object just can be complete
Become the imaging on all of ladder reflecting surface.By multiple image being sheared and splicing, ground target thing can be obtained
The image information of body and interferogram information, carry out Fourier transformation to interferogram, it is possible to obtains the spectrum of ground target object
Information.
Beneficial effects of the present invention: system of the present invention is based on Michelson's interferometer structure, except that
Carry out the index glass in replacement system with a ladder micro-reflector, carry out the movable member in elimination system with this, be greatly improved system
Reliability.The beam splitter of this imaging spectrometer uses lamellar beam splitter, and plates infrared part reflective semitransparent film in its one side, another
Face plating infrared anti-reflection film.The optical path difference introduced in order to eliminate beam splitter, adds material identical with beam splitter in systems
Compensating plate, plates infrared anti-reflection film on the two sides of compensating plate.The novel imaging spectral instrument system that the present invention is discussed does not contain narrow
Seam, substantially increases the luminous flux of system, at high spectrum compared with traditional spatial modulation Fourier transformation imaging spectrometer
The signal to noise ratio of system can be greatly improved under resolution, solve the difficult problem that system noise is low under high spectral resolution.
The present invention makes the reliability of system while realizing optical path difference spatial modulation, and repeatable, real-time is obtained for the biggest
Improve, simultaneously system can be made compacter, reduce the volume of system, and reduce debug tired to a certain extent
Difficult.System eliminates the slit in Traditional Space modulation type Fourier transformation imaging spectrometer, is realizing high spectral resolution
Effectively raise the signal to noise ratio of system simultaneously.
Accompanying drawing explanation
Fig. 1 is the system structure of Fourier transform infrared imaging spectrometer based on multilevel micro-reflector of the present invention
Figure；
Fig. 2 is optical path difference in Fourier transform infrared imaging spectrometer based on multilevel micro-reflector of the present invention
Schematic diagram；
In Fig. 3, Fig. 3 a is that Fourier transform infrared imaging spectrometer based on multilevel micro-reflector of the present invention is through one
Individual window sweeps the image on multilevel micro-reflector under pattern；Fig. 3 b is the imaging swept under pattern on CCD through a window
Cheng Tu；
Fig. 4 is preposition imaging in Fourier transform infrared imaging spectrometer based on multilevel micro-reflector of the present invention
The structural representation of system；
Fig. 5 is rearmounted imaging in Fourier transform infrared imaging spectrometer based on multilevel micro-reflector of the present invention
The structural representation of contracting beam system.
Detailed description of the invention
Detailed description of the invention one, combining Fig. 1 to Fig. 5 present embodiment is described, Fourier based on multilevel micro-reflector becomes
Change Infrared Imaging Spectrometer, the preposition imaging system of described imaging spectrometer 1, interference system 2 and rearmounted imaging contracting beam system 3 and Jiao
Planar detector 4 forms.Wherein interference system 2 is by multistage ladder micro-reflector 7, plane mirror 5, lamellar beam splitter 6 and benefit
Repay plate 8 to form；The light that a certain moment ground target object sends enters this imaging spectral instrument system, Jing Guoqian with a certain angle of visual field
Plane mirror 5 and a certain ladder of multistage ladder micro-reflector 7 it is imaged on respectively after putting imaging system 1 and lamellar beam splitter 6
On face.The different reflecting surface of the most multistage ladder micro-reflector 7 is become in the range of correspond to the angle of visual field that ground object is certain
Picture, be imaged on two picture points on a certain reflecting surface of multistage ladder micro-reflector 7 and plane mirror 5 owing to having
Fixing ladder height exists, and therefore can produce fixing phase difference.Two picture points as two relevant thing sources through after
It is set to the image as being obtained with width object after interferogram is modulated after contracting beam system 3 imaging.Subsequent time, target
The light that object sends can enter system with the another one angle of visual field, thus is imaged on adjacent ladder reflecting surface.
Imaging spectrometer described in present embodiment replaces traditional time-modulation with a multistage ladder micro-reflector 7
Index glass in type Fourier transformation imaging spectrometer, makes whole system achieve static.Described focus planardetector 4 is red
Outer CCD.
Spectrometer system described in present embodiment as infrared system, described lamellar beam splitter (6), compensating plate (8)
Material use ZnSe, ZnSe raw material by drawing or the method for growth makes, then by optics roughing and grinding and polishing, reach
Required form and parameter index.On surface of lamellar beam splitter (6), evaporation has infrared part reflective semitransparent film, with realize reflection and
The effect of transmission each about 50%；Two surfaces evaporations in another surface of lamellar beam splitter and compensation version have infrared optics anti-reflection
Film, to improve energy efficiency.ZnSe beam splitter, the size of compensation version match with multistage ladder micro-reflector size, described many
The width diffraction effect to be considered of level micro-reflector 7 is on interferogram and the impact of imaging.Described multilevel micro-reflector 7 single
Ladder height scope, between 1nm-50 μm, uses MOEMS technology or optical manufacturing method to make, described multilevel micro-reflector 7
Ladder height error less than ladder height 5%.When using MOEMS fabrication techniques multistage ladder micro-reflector, for ensureing ladder
The uniformity of height, need to use Rotation evaporation, controls ladder height by light-operated method.Use at multistage ladder micromirror surfaces
Radio-frequency sputtering or electron beam evaporation technique prepare infrared high-reflecting film and protecting film, described multistage ladder micro-reflector ladder height,
Width and step number determine imaging spectrometer spectral resolution and image quality.
In conjunction with Fig. 2, present embodiment is described, the optical path difference of the imaging system described in present embodiment be by multistage micro-instead
Penetrate the ladder height of mirror and the angle of visual field determines, produced optical path difference phase on each cascaded surface of multilevel micro-reflector
With, Fig. 2 is the n-th ladder reflecting surface and the imaging process corresponding to plane mirror 5；9 is the n-th ladder reflecting surface, B1For
Target object the n-th ladder micro-reflecting surface imaging, B2Become in the mirror position of the n-th ladder reflecting surface by target object
The virtual image, A1And A2As two relevant object points after rearmounted imaging contracting beam system 3 imaging, rearmounted infrared CCD occurs
Interfere. set the ladder height of multilevel micro-reflector as d, ωnIt is the angle of visual field scope corresponding to the n-th ladder reflecting surface, is regarding
Rink corner ωnWithin the scope of, picture point B1And B2Between optical path difference formula one be expressed as:
Formula one, δ=2nd
Wherein, now the angle of visual field corresponding to the micro-reflecting surface of ladder is ωn, in angle of visual field ωnWithin the scope of, system institute
The optical path difference produced is identical.
Illustrate that this enforcement formula, Fig. 3 a show a window and sweep under pattern native system at multistage ladder micro-reflector 7 in conjunction with Fig. 3
On imaging process, figure only depicts five ladder lens reflectings surface, A2, A1, A0, A-1, A-2, represents ground respectively identical
Object point A, enters the position of imaging spectral instrument system in the different moment.A ' 2, A ' 1, A ' 0, A '-1, A '-2, is object point A respectively
Formed picture point it is engraved on the different reflecting surface of ladder lens when different.The reflecting surface width taking multilevel micro-reflector is a,
The flying height of initialization system is H, the focal length of preposition imaging system 1 be the distance between f', then picture point A ' 2 and A ' 1 be a, that
Just can obtain the distance between A2 and A1, be expressed as with formula two:
Formula two, Δ h=Hd/f'
If now the speed of service of imaging spectrometer is v, then object A is carried out the time interval formula of shooting sampling
Three are expressed as:
Formula three, Δ T=Δ h/v
Fig. 3 b is that a window sweeps native system imaging process on multistage ladder micro-reflector 7 under pattern, and what ☆ represented is
Object is imaging on CCD.It is the same string of CCD take the most in the same time, it can be seen that when object has just enter into a scanning
The when of window, it is imaged on the right hand edge of string of CCD through imaging spectrometer, is then passed through that after a window sweeps pattern, it becomes
As CCD is with the left hand edge of string.After this 32 width image is sheared and is spliced, it is possible to obtain the interference of this object
Figure, then carries out Fourier transformation to it and is obtained with the spectral information of this object.
In conjunction with Fig. 4, present embodiment being described, Fig. 4 is the structure chart of the preposition imaging system of this imaging spectrometer, described preposition
The Main Function of imaging system 1 is to be imaged on by target object on multistage ladder micro-reflector 7 and plane mirror.Multistage ladder is micro-instead
A certain ladder reflecting surface and the plane mirror of penetrating mirror 7 are positioned on the focal plane of preposition imaging system 1, and remaining ladder reflecting surface is positioned at
Within the depth of focus of preposition imaging system 1.In order to make can obtain clearly on each face of multistage ladder micro-reflector 7 ground thing
The picture of body, needs the focal length of preposition imaging system 1 does a restriction.The total step number of multistage ladder micro-reflector 7 is N, many
The catercorner length of level ladder micro-reflector 7 is h.The angle of visual field of preposition imaging imaging system, is expressed as with formula four:
Formula four,
Due to the existence of lamellar beam splitter 6 in system so that preposition image-forming objective lens also exist through lamellar beam splitter 6 reflection and
Two imaging optical paths of lamellar beam splitter 6 transmission, but two imaging optical paths are equivalent, therefore only to through lamellar beam splitter 6
The imaging optical path on this road of transmission is analyzed.
In preposition imaging system 1 described in present embodiment, lamellar beam splitter 6 and compensating plate as two tilt parallel
Glass plate, can bring the biggest off-axis aberration, the most seriously astigmatism to system, next to that coma.Therefore carrying out
The when of the design of preposition imaging optical system, astigmatism and coma that lamellar beam splitter 6 and compensating plate are introduced by emphasis eliminate
And take into account the elimination of remaining aberration.Due to lamellar beam splitter 6 and the introduced off-axis aberration of compensating plate and imaging beam
Numerical aperture is directly proportional, and is therefore carrying out the numerical aperture focusing on controlling imaging beam of preposition imaging system 1 design, to reach
To reducing lamellar beam splitter 6 and the purpose of the introduced off-axis aberration of compensating plate 8.For the convenience processed and debug, front it is set to
As system 1 uses five chip transmission-type structures, silicon and germanium is used to combine achromatism.Design result shows: front-end system imaging
Quality is good, and MTF has obtained good elimination close to the off-axis aberration that diffraction limit, lamellar beam splitter 6 and compensating plate are introduced,
The angle of visual field meets requirement.
In conjunction with Fig. 5, present embodiment being described, Fig. 5 is the structural representation of this imaging spectrometer rearmounted imaging contracting beam system,
The effect of rearmounted optical system is a picture point on ladder micro-reflector and plane mirror to be imaged on rearmounted planar array detector
On one pixel so that it is interfere, with image information and the interference information of this target object obtained.Rearmounted imaging contracting bundle is
The areas imaging of system 3 is the circumscribed circle corresponding to ladder micro-reflector and plane mirror, therefore takes the right of multistage ladder micro-reflector 7
Diagonal length is as its visual field standard.Due to the existence of lamellar beam splitter 6, rearmounted imaging contracting beam system 3 there is also two-way light
System, the rearmounted imaging contracting bundle at the rearmounted imaging in plane mirror 5 place contracting beam system 3 and multistage ladder micro-reflector 7 place
System 3.Due to the equivalence of two-way optical system, therefore only plane mirror one tunnel is analyzed.Due to this imaging spectrometer work
Make at medium-wave infrared wave band, therefore use refrigeration mode planar array detector, by face battle array rearmounted imaging contracting beam system 3 designs when
The cold screen diaphragm of detector is as the aperture diaphragm of whole rearmounted imaging contracting beam system 3, it is achieved 100% cold stop matching efficiency.With
As preposition imaging system 1, lamellar beam splitter 6 and compensating plate 8 are in imaging optical path, therefore carry out rearmounted imaging contracting bundle system
To focus on when system 3 design eliminating beam splitter and the introduced off-axis aberration of compensating plate 8.Rearmounted imaging contracting beam system 3 uses class
4f structure, the optical interval between front group and rear group is not 0.The benefit using this kind of structure is:
One, utilize front group and rear group camera lens to combine and eliminate the aberration that lamellar beam splitter 6 and compensating plate are brought.Two, adopt
The when of carrying out cold screen diaphragm coupling by this kind of structure, it is possible to prevent the problem that the bore of front group of camera lens is excessive.
Described rearmounted imaging contracting beam system 3 uses seven chip transmittance structures, uses silicon and germanium junction to close achromatism.Design result
Showing: rearmounted imaging contracting beam system 3 image quality is good, transmission function is close to diffraction limit, and cold stop matching efficiency is 100%,
Single pixel encircled energy ＞ 80%.
Preposition imaging system 1 and rearmounted imaging contracting beam system 3 described in present embodiment are focused on eliminating design when
The off-axis aberration brought due to the inclination of lamellar beam splitter 6 and compensating plate 8.Preposition imaging system 1 and rearmounted imaging contracting bundle
System 3 is formed by transmission sphere mirror, in the case of meeting picture element, for the design of system, process and debug bring the biggest
Convenient.Owing to system itself does not contains slit, and using planar array detector, therefore this system uses the scan mode that window is swept.
This imaging spectrometer can use as spaceborne and airborne imaging load.Whole system is a secondary imaging system,
Obviously, above-described embodiment is only for clearly demonstrating example, and not restriction to embodiment.Right
For those of ordinary skill in the field, can also make on the basis of the above description other multi-form change or
Variation.Here without also cannot all of embodiment be given exhaustive.And the obvious change thus extended out or
Change among still in the protection domain of the invention.
Claims (6)
1. Fourier transform infrared imaging spectrometer based on multilevel micro-reflector, including preposition imaging system (1), interference system
(2), rearmounted imaging contracting beam system (3) and focus planardetector (4)；It is characterized in that, described interference system (2) includes multistage ladder
Micro-reflector (7) lamellar beam splitter (6), compensating plate (8) and plane mirror (5)；Light that target object sends is premenstrual is set to picture
After system (1) and lamellar beam splitter (6), forming two-beam, light beam reflexes to plane mirror (5) through lamellar beam splitter (6)
On be imaged as the first picture point, another light beam after lamellar beam splitter (6) transmission through compensating plate (8) at multistage ladder micro-reflector
It is imaged as the second picture point on certain ladder reflecting surface；
The light of described first picture point is transmitted through rearmounted imaging contracting beam system (3) imaging, the light of the second picture point through lamellar beam splitter (6)
After compensated plate (8) reflects to lamellar beam splitter (6), in rearmounted imaging contracting beam system (3) imaging, described rearmounted imaging contracting bundle is
The picture of system (3) is received by focus planardetector；
Set the ladder height of multistage ladder micro-reflector as d, in the range of the angle of visual field corresponding to the n-th ladder reflecting surface,
Target object is become in the mirror position of the n-th ladder reflecting surface with target object in the n-th ladder micro-reflecting surface imaging
The virtual image between optical path difference, be expressed as with formula one:
Formula one, δ=2nd；
The reflecting surface width setting multistage ladder micro-reflector is H as a, the flying height of Infrared Imaging Spectrometer, preposition imaging
The focal length of system (1) is f', then the distance between adjacent image points is a, it is thus achieved that formula two table of the distance between adjacent target object point
It is shown as:
Formula two, Δ h=Ha/f'；
The catercorner length setting multistage ladder micro-reflector (7) as h, the angle of visual field of preposition imaging system (1) is:
Fourier transform infrared imaging spectrometer based on multilevel micro-reflector the most according to claim 1, its feature exists
In, described focus planardetector is infrared CCD, and described infrared CCD receives the image-forming information of rearmounted imaging contracting beam system, to imaging
Information, after a window sweeps pattern, makes target object complete the one-tenth on multistage ladder micro-reflector all of ladder reflecting surface
As process；The multiple image obtained is sheared and spliced, it is thus achieved that the interferogram sequence of target object, and to described interferogram
Sequence carries out Fourier transformation, it is thus achieved that the spectrogram of target object.
Fourier transform infrared imaging spectrometer based on multilevel micro-reflector the most according to claim 1, its feature exists
In, described preposition imaging system uses five transmission-type coquille structures, and rearmounted imaging contracting beam system uses seven transmission-type balls
Face mirror structure, the material of described coquille is silicon and germanium.
Fourier transform infrared imaging spectrometer based on multilevel micro-reflector the most according to claim 1, its feature exists
In, the material of described lamellar beam splitter (6) and compensating plate (8) all uses ZnSe, one side to plate infrared part reflective semitransparent film, and another side plates
Infrared anti-reflection film；Infrared anti-reflection film is plated on the two sides of described compensating plate (8) respectively.
Fourier transform infrared imaging spectrometer based on multilevel micro-reflector the most according to claim 1, its feature exists
In, the speed of service setting imaging spectrometer as v, the then time interval that target object carries out shooting sampling is: Δ T=Δ h/
v；Wherein, Δ h is the distance between adjacent object point.
Fourier transform infrared imaging spectrometer based on multilevel micro-reflector the most according to claim 1, its feature exists
In, the single ladder height scope of described multistage ladder micro-reflector (7) between 1nm-50 μm, use MOEMS technology or
Optical manufacturing method makes, and the ladder height error of described multistage ladder micro-reflector (7) is less than the 5% of ladder height.
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| CN104656252B (en) * | 2015-02-13 | 2017-03-15 | 西安建筑科技大学 | A kind of large aperture infreared imaging device with inclined element |
| CN110296666B (en) * | 2018-03-23 | 2021-04-20 | 泓邦科技有限公司 | Three-dimensional measuring device |
| CN110989142B (en) * | 2019-12-30 | 2021-07-06 | 中国科学院长春光学精密机械与物理研究所 | Preposed common-caliber dual-waveband achromatic lens of Fourier transform imaging spectrometer |
| CN111077076B (en) * | 2019-12-30 | 2021-11-12 | 中国科学院长春光学精密机械与物理研究所 | Medium wave infrared Fourier transform imaging spectrometer athermal secondary imaging system |
| CN111796302B (en) * | 2020-07-03 | 2023-03-31 | 中国科学院合肥物质科学研究院 | Trapezoidal lens-based multi-designated-height CCD imaging system and method |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5539518A (en) * | 1993-09-13 | 1996-07-23 | The United States Of America As Represented By The United States Department Of Energy | Method for determining and displaying the spacial distribution of a spectral pattern of received light |
| CN101091100A (en) * | 2004-11-18 | 2007-12-19 | 摩根研究股份有限公司 | Miniature fourier transform spectrophotometer |
-
2014
- 2014-03-10 CN CN201410086376.9A patent/CN103913234B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5539518A (en) * | 1993-09-13 | 1996-07-23 | The United States Of America As Represented By The United States Department Of Energy | Method for determining and displaying the spacial distribution of a spectral pattern of received light |
| CN101091100A (en) * | 2004-11-18 | 2007-12-19 | 摩根研究股份有限公司 | Miniature fourier transform spectrophotometer |
Non-Patent Citations (2)
| Title |
|---|
| 空间调制傅里叶变换红外光谱仪多级微反射镜倾斜误差分析;郑莹 等;《光谱学与光谱分析》;20120731;全文 * |
| 空间调制傅里叶变换红外光谱仪干涉系统透射效率研究;吕金光 等;《光谱学与光谱分析》;20130331;第851页及图1-2 * |
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