CN103913234A - Fourier transform infrared imaging spectrometer based on multistage micro-reflector - Google Patents
Fourier transform infrared imaging spectrometer based on multistage micro-reflector Download PDFInfo
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Abstract
The invention discloses a Fourier transform infrared imaging spectrometer based on a multistage micro-reflector and relates to the field of earth remote sensing detection. The Fourier transform infrared imaging spectrometer solves the problem that a slit related to the spatial resolution is contained in an existing imaging spectrometer, and the luminous flux entering a system is limited. The Fourier transform infrared imaging spectrometer comprises a front imaging system, an interference system, a rear imaging system and a focal plane detector. The inference system comprises a multistage step micro-reflector piece-shaped beam splitter, a compensating plate and a plane reflector. After light emitted by a target passes through the front imaging system and the piece-shaped beam splitter, one beam is reflected to the plane reflector through the piece-shaped beam splitter to be imaged to be a first image point, and the other beam is transmitted through the piece-shaped beam splitter and then passes through the compensating plate to be imaged on a certain step reflecting face of the multistage step micro-reflector to be a second image point. Light of the first image point is transmitted through the piece-shaped beam splitter to reach the rear imaging system to be imaged, and light of the second image point passes through the compensating plate, is reflected by the piece-shaped beam splitter and is then imaged on a rear imaging beam contracting system, and an image of the rear imagining beam contracting system is received by the focal plane detector.
Description
Technical field
The present invention relates to remote sensing of the earth field of detecting, relate to a kind of Fourier transform imaging spectral instrument system, be specifically related to a kind of novel space-time unite modulation Fourier transform infrared spectrometer system based on integrated ladder micro-reflector and sheet beam splitter.
Background technology
Imaging spectrometer is the organic combination of spectrometer and imager, and it can obtain target object spectral information and image information, and having solved traditional spectrometer has spectrum without there being the difficult problem of picture without spectrum in image and traditional multi-spectral imager.Therefore it is applied in space remote sensing widely, and military target is surveyed, geological resource exploration, environmental monitoring, the fields such as meteorologic analysis.According to the difference of principle of work, it is mainly divided into color dispersion-type and Fourier transform type two classes.Color dispersion-type imaging spectrometer is using prism or grating as beam splitter, accepts the radiation information of each spectrum unit on detector.Its development relatively early, more extensive in aerospace field application, but spectral resolution is subject to the control of slit, and therefore it is more difficult aspect the infrared weak radiation of detection.Fourier transform imaging spectrometer is then the interferogram that first obtains object does Fourier transform and obtain object spectral information to interferogram.According to the difference of the modulation system to interferogram, Fourier transform imaging spectrometer mainly can be divided into time-modulation type, spatial modulation type and space-time unite modulation type.Time-modulation type Fourier transform imaging spectrometer is based on Michelson interferometer structure, and it adopts and drives an index glass to produce optical path difference.Therefore need the drive unit of a set of precision, its real-time is poor.Movable member is not contained in its inside of spatial modulation Fourier transform imaging spectrometer, and it utilizes the difference of locus to produce optical path difference, can realize the spectral measurement to rapid change object, and its real-time is relatively good.But traditional spatial modulation Fourier becomes imaging spectrometer inside contains the slit relevant with spatial resolution, limit the luminous flux of the system that enters, and it is not compact that current spatial modulation Fourier transform imaging spectrometer ubiquity structure, the shortcoming that weight ratio is heavier.Space-time unite modulation type Fourier transform imaging spectrometer is based on image plane interference image-forming principle, and slit and movable member are not contained in its inside, therefore has advantages of that luminous flux macrostructure is stable.
Summary of the invention
The present invention solves existing imaging spectrometer inside to contain the slit relevant with spatial resolution, limit the luminous flux of the system that enters, it is not compact that ubiquity structure, the problem of the shortcomings such as weight ratio is heavier, provides a kind of Fourier transform infrared imaging spectrometer based on multistage ladder micro-reflector.
Fourier transform infrared imaging spectrometer based on multilevel micro-reflector, comprise preposition imaging system, interference system, rearmounted imaging contracting beam system and focus planardetector, described interference system comprises multistage ladder micro-reflector sheet beam splitter, compensating plate and plane mirror; Premenstrual the putting after imaging system and sheet beam splitter of light that target object sends, form two-beam, light beam is imaged as the first picture point through sheet beam splitter reflection to plane mirror, and another light beam is imaged as the second picture point through compensating plate on certain the ladder reflecting surface at multistage ladder micro-reflector after the transmission of sheet beam splitter; The light of described the first picture point is transmitted through the imaging of rearmounted imaging contracting beam system through sheet beam splitter, the light of the second picture point through compensating plate to sheet beam splitter reflection, in the imaging of rearmounted imaging contracting beam system, the picture of described rearmounted imaging contracting beam system is received by focus planardetector.
The ladder height of the multistage ladder micro-reflector of described setting is d, within the scope of n the corresponding field angle of ladder reflecting surface, optical path difference between the virtual image that target object becomes in the mirror position of n ladder reflecting surface at n the micro-reflecting surface imaging of ladder and target object, is expressed as with formula one:
Formula one, δ=2nd;
The reflecting surface width of setting multistage ladder micro-reflector is a, and the flying height of Infrared Imaging Spectrometer is H, and the focal length of preposition imaging system (1) is f', and the distance between adjacent picture point is a, and the distance obtaining between adjacent target object point is expressed as with formula two:
Formula two, Δ h=Ha/f';
The catercorner length of setting multistage ladder micro-reflector (7) is h, and the field angle of preposition imaging system (1) is:
Principle of work of the present invention: Infrared Imaging Spectrometer of the present invention is as a secondary imaging system, and the optical path difference of this imaging spectrometer is determined by the ladder height of multilevel micro-reflector.Light that a certain moment terrain object object sends is premenstrual to be imaged on respectively on multilevel micro-reflector and level crossing after putting imaging system and beam splitter, due to the existence of ladder height, two picture points that make to be imaged on multilevel micro-reflector and level crossing produce a fixing phasic difference.Two picture points can obtain image information and the interference light intensity information of terrain object object after the imaging of rearmounted imaging contracting beam system as two relevant thing sources.Along with system pushes away and sweeps ground, terrain object object will enter system with another one field angle in next moment, thereby is imaged on adjacent ladder reflecting surface.Within a window is swept pattern, terrain object object just can complete the imaging on all ladder reflectings surface.By multiple image being sheared and being spliced, can obtain image information and the interferogram information of terrain object object, interferogram is carried out to Fourier transform, just can obtain the spectral information of terrain object object.
Beneficial effect of the present invention: system of the present invention is based on Michelson interferometer structure, difference is to carry out the index glass in replacement system with a ladder micro-reflector, carrys out the movable member in elimination system with this, greatly improves the reliability of system.The beam splitter of this imaging spectrometer adopts sheet beam splitter, and plates infrared part reflective semitransparent film in its one side, another side plating infrared anti-reflection film.The optical path difference of introducing in order to eliminate beam splitter has added and the compensating plate of beam splitter same material in system, at the two sides of compensating plate plating infrared anti-reflection film.In the novel imaging spectral instrument system that the present invention discusses, do not contain slit, greatly improved the luminous flux of system compared with traditional spatial modulation Fourier transform imaging spectrometer, under high spectral resolution, can improve greatly the signal to noise ratio (S/N ratio) of system, solve the low difficult problem of system noise under high spectral resolution.The present invention makes the reliability of system in realizing optical path difference spatial modulation, repeatability, and real-time is all greatly improved, and can make system compacter simultaneously, has reduced the volume of system, and has reduced to a certain extent the difficulty of debuging.System has been removed the slit in Traditional Space modulation type Fourier transform imaging spectrometer, effectively raises the signal to noise ratio (S/N ratio) of system in realizing high spectral resolution.
Brief description of the drawings
Fig. 1 is the system construction drawing of the Fourier transform infrared imaging spectrometer based on multilevel micro-reflector of the present invention;
Fig. 2 is the schematic diagram of optical path difference in the Fourier transform infrared imaging spectrometer based on multilevel micro-reflector of the present invention;
In Fig. 3, Fig. 3 a is that the Fourier transform infrared imaging spectrometer based on multilevel micro-reflector of the present invention is swept the image on multilevel micro-reflector under pattern through a window; Fig. 3 b sweeps the imaging process figure on CCD under pattern through a window;
Fig. 4 is the structural representation of preposition imaging system in the Fourier transform infrared imaging spectrometer based on multilevel micro-reflector of the present invention;
Fig. 5 is the structural representation of rearmounted imaging contracting beam system in the Fourier transform infrared imaging spectrometer based on multilevel micro-reflector of the present invention.
Embodiment
Embodiment one, in conjunction with Fig. 1 to Fig. 5, present embodiment is described, Fourier transform infrared imaging spectrometer based on multilevel micro-reflector, the preposition imaging system 1 of described imaging spectrometer, interference system 2 and rearmounted imaging contracting beam system 3 and focus planardetector 4 form.Wherein interference system 2 is by multistage ladder micro-reflector 7, plane mirror 5, and sheet beam splitter 6 and compensating plate 8 form; The light that a certain moment terrain object object sends enters this imaging spectral instrument system with a certain field angle, is imaged on respectively on a certain cascaded surface of plane mirror 5 and multistage ladder micro-reflector 7 after preposition imaging system 1 and sheet beam splitter 6.Wherein imaging within the scope of the certain field angle of the corresponding landing ground object of the different reflecting surface of multistage ladder micro-reflector 7, two picture points that are imaged on a certain reflecting surface and the plane mirror 5 of multistage ladder micro-reflector 7 exist owing to having fixing ladder height, therefore can produce fixing phasic difference.Two picture points as two relevant thing sources through just obtaining the image of the object of a width after interferogram is modulated after 3 imagings of rearmounted imaging contracting beam system.In next moment, the light that target object sends can enter system with another one field angle, thereby is imaged on adjacent ladder reflecting surface.
Imaging spectrometer described in present embodiment replaces the index glass in traditional time-modulation type Fourier transform imaging spectrometer with a multistage ladder micro-reflector 7, makes whole system realize staticize.Described focus planardetector 4 is infrared CCD.
Spectrometer system described in present embodiment is as infrared system, described sheet beam splitter (6), the material of compensating plate (8) adopt ZnSe, ZnSe starting material are made by the method drawing or grow, then by optics roughing and grinding and polishing, reach required form and parameter index.A surperficial evaporation at sheet beam splitter (6) has infrared part reflective semitransparent film, to realize reflection and each approximately 50% the effect of transmission; Another two surperficial evaporations surperficial and compensation version at sheet beam splitter have infrared optics anti-reflection film, to improve energy efficiency.Size and the multistage ladder micro-reflector size of ZnSe beam splitter, compensation version match, and the width of described multilevel micro-reflector 7 will be considered the impact of diffraction effect on interferogram and imaging.The single ladder height scope of described multilevel micro-reflector 7, between 1nm-50 μ m, adopts MOEMS technology or optics job operation to make, and the ladder height error of described multilevel micro-reflector 7 is less than 5% of ladder height.While adopting the multistage ladder micro-reflector of MOEMS fabrication techniques, for ensureing the homogeneity of ladder height, need to adopt Rotation evaporation, with light-operated method control ladder height.Adopt radio-frequency sputtering or electron beam evaporation technique to prepare infrared high-reflecting film and diaphragm on multistage ladder micro-reflector surface, described multistage ladder micro-reflector ladder height, width and step number determine imaging spectrometer spectral resolution and image quality.
In conjunction with Fig. 2, present embodiment is described, the optical path difference of the imaging system described in present embodiment is to be determined by the ladder height of multilevel micro-reflector and field angle, the optical path difference producing on each cascaded surface of multilevel micro-reflector is identical, and Fig. 2 is n ladder reflecting surface and the corresponding imaging process of plane mirror 5; 9 is n ladder reflecting surface, B
1for the micro-reflecting surface imaging of n ladder of target object, B
2for the virtual image that target object becomes in the mirror position of n ladder reflecting surface, A
1and A
2, after 3 imagings of rearmounted imaging contracting beam system, on rearmounted infrared CCD, interfering as two relevant object points. the ladder height of establishing multilevel micro-reflector is d, ω
nbe n the corresponding field angle scope of ladder reflecting surface, at field angle ω
nscope within, picture point B
1and B
2between optical path difference be expressed as with formula one:
Formula one, δ=2nd
Wherein, now the corresponding field angle of the micro-reflecting surface of ladder is ω
n, at field angle ω
nscope within, the optical path difference that system produces is identical.
In conjunction with Fig. 3, this enforcement formula is described, Fig. 3 a is depicted as a window and sweeps the imaging process of native system on multistage ladder micro-reflector 7 under pattern, five ladder lens reflectings surface in figure, are only drawn, A2, A1, A0, A-1, A-2, represents respectively the object point A that ground is identical, enters the position of imaging spectral instrument system in the different moment.A ' 2, A ' 1, A ' 0, A '-1, A '-2 are respectively object point A is engraved in imaging point on the different reflecting surface of ladder lens when different.The reflecting surface width of getting multilevel micro-reflector is a, and the flying height of initialization system is H, and the focal length of preposition imaging system 1 is f', and the distance between picture point A ' 2 and A ' 1 is a, so just can obtain the distance between A2 and A1, is expressed as with formula two:
Formula two, Δ h=Hd/f'
If now the travelling speed of imaging spectrometer is v, to object A take sampling the time interval be expressed as with formula three:
Formula three, Δ T=Δ h/v
Fig. 3 b is that a window is swept the imaging process of native system on multistage ladder micro-reflector 7 under pattern, and what ☆ represented is object imaging on CCD.Be the same row of CCD what do not get in the same time, can find out in the time that object has just entered a scanning window, it is imaged on the right hand edge of row of CCD through imaging spectrometer, then sweeps the pattern left hand edge of the same row of its imaging CCD afterwards through a window.After this 32 width image is sheared and being spliced, just can obtain the interferogram of this object, then it be carried out Fourier transform and just can be obtained the spectral information of this object.
In conjunction with Fig. 4, present embodiment is described, Fig. 4 is the structural drawing of the preposition imaging system of this imaging spectrometer, and the Main Function of described preposition imaging system 1 is that target object is imaged on multistage ladder micro-reflector 7 and level crossing.A certain ladder reflecting surface and the level crossing of multistage ladder micro-reflector 7 are positioned on the focal plane of preposition imaging system 1, within remaining ladder reflecting surface is positioned at the depth of focus of preposition imaging system 1.In order to make can obtain clearly on each face of multistage ladder micro-reflector 7 picture of ground object, need to do a restriction to the focal length of preposition imaging system 1.The total step number of multistage ladder micro-reflector 7 is N, and the catercorner length of multistage ladder micro-reflector 7 is h.The field angle of preposition imaging imaging system, is expressed as with formula four:
Formula four,
Due to the existence of sheet beam splitter 6 in system, preposition image-forming objective lens is existed through sheet beam splitter 6 reflection and two imaging optical paths of sheet beam splitter 6 transmission, but two imaging optical paths are equivalent, therefore only the imaging optical path on this road through 6 transmissions of sheet beam splitter is analyzed.
In preposition imaging system 1 described in present embodiment, sheet beam splitter 6 and compensating plate, as the parallel glass flat board of two inclinations, can bring very large off-axis aberration to system, and wherein the most serious is astigmatism, is secondly coma.Therefore in carrying out preposition imaging optical system design, the astigmatism that emphasis is introduced sheet beam splitter 6 and compensating plate and coma is eliminated and will take into account the elimination of all the other aberrations.The off-axis aberration of introducing due to sheet beam splitter 6 and compensating plate is directly proportional to the numerical aperture of imaging beam, therefore in the numerical aperture that will focus on controlling imaging beam of carrying out preposition imaging system 1 and designing, to reach the object that reduces the off-axis aberration that sheet beam splitter 6 and compensating plate 8 introduced.For the convenience of processing and debuging, preposition imaging system 1 adopts five chip transmission-type structures, adopts silicon and the germanium achromatism that combines.Design result shows: front-end system image quality is good, and MTF approaches diffraction limit, and the off-axis aberration that sheet beam splitter 6 and compensating plate are introduced has obtained good elimination, and field angle meets the demands.
In conjunction with Fig. 5, present embodiment is described, Fig. 5 is the structural representation of the rearmounted imaging contracting of this imaging spectrometer beam system, the effect of rearmounted optical system is that a picture point on ladder micro-reflector and level crossing is imaged on rearmounted planar array detector on a pixel, it is interfered, the image information of the target object obtaining with this and interference information.The areas imaging of rearmounted imaging contracting beam system 3 is ladder micro-reflector and the corresponding circumscribed circle of level crossing, therefore gets the catercorner length of multistage ladder micro-reflector 7 as its visual field standard.Due to the existence of sheet beam splitter 6, rearmounted imaging contracting beam system 3 also exists two-way optical system, the rearmounted imaging contracting beam system 3 at the rearmounted imaging contracting beam system 3 in plane mirror 5 places and multistage ladder micro-reflector 7 places.Due to the equivalence of two-way optical system, therefore only level crossing one tunnel is analyzed.Because this imaging spectrometer is operated in medium-wave infrared wave band, therefore adopt refrigeration mode planar array detector, aperture diaphragm using the cold screen diaphragm of planar array detector as whole rearmounted imaging contracting beam system 3 when rearmounted imaging contracting beam system 3 designs, realizes 100% cold stop matching efficiency.The same with preposition imaging system 1, sheet beam splitter 6 and compensating plate 8 in imaging optical path, the off-axis aberration of therefore carrying out will focusing on when rearmounted imaging contracting beam system 3 designs eliminating beam splitter and compensating plate 8 and introduce.Rearmounted imaging contracting beam system 3 adopts class 4f structure, and the optical interval between front group and rear group is not 0.Use the benefit of this kind of structure to be:
One, the aberration that utilizes front group and rear arrangement of mirrors head to combine to eliminate sheet beam splitter 6 and compensating plate to bring.Two,, when adopting this kind of structure to carry out cold screen diaphragm coupling, can prevent the excessive problem of bore of front arrangement of mirrors head.
Described rearmounted imaging contracting beam system 3 adopts seven chip transmittance structures, adopts silicon and germanium junction to close achromatism.Design result shows: rearmounted imaging contracting beam system 3 image quality are good, and transport function approaches diffraction limit, and cold stop matching efficiency is 100%, single pixel encircled energy > 80%.
Preposition imaging system 1 described in present embodiment and rearmounted imaging contracting beam system 3 focus on having eliminated the off-axis aberration of bringing due to the inclination of sheet beam splitter 6 and compensating plate 8 in design.Preposition imaging system 1 and rearmounted imaging contracting beam system 3, by transmission sphere mirror composition, meet in the situation of picture element, are the design of system, process and debug to bring great convenience.Because system itself does not contain slit, and adopt planar array detector, therefore this system adopts the scan mode that window is swept.This imaging spectrometer can be used as spaceborne and airborne imaging load and uses.Whole system is a secondary imaging system,
Obviously, above-described embodiment is only for example is clearly described, and the not restriction to embodiment.For those of ordinary skill in the field, can also make other changes in different forms on the basis of the above description.Here without also giving exhaustive to all embodiments.And the apparent variation of being extended out thus or variation are still among the protection domain in the invention.
Claims (6)
1. the Fourier transform infrared imaging spectrometer based on multilevel micro-reflector, comprises preposition imaging system (1), interference system (2), rearmounted imaging contracting beam system (3) and focus planardetector (4); It is characterized in that, described interference system (2) comprises multistage ladder micro-reflector (7) sheet beam splitter (6), compensating plate (8) and plane mirror (5); Premenstrual the putting after imaging system (1) and sheet beam splitter (6) of light that target object sends, form two-beam, light beam reflexes on plane mirror (5) and is imaged as the first picture point through sheet beam splitter (6), and another light beam is imaged as the second picture point through compensating plate (8) on certain the ladder reflecting surface at multistage ladder micro-reflector after sheet beam splitter (6) transmission;
The light of described the first picture point is transmitted through rearmounted imaging contracting beam system (3) imaging through sheet beam splitter (6), the light of the second picture point is after compensating plate (8) to sheet beam splitter (6) reflects, in rearmounted imaging contracting beam system (3) imaging, the picture of described rearmounted imaging contracting beam system (3) is received by focus planardetector.
The ladder height of the multistage ladder micro-reflector of described setting is d, within the scope of n the corresponding field angle of ladder reflecting surface, optical path difference between the virtual image that target object becomes in the mirror position of n ladder reflecting surface at n the micro-reflecting surface imaging of ladder and target object, is expressed as with formula one:
Formula one, δ=2nd;
The reflecting surface width of setting multistage ladder micro-reflector is a, and the flying height of Infrared Imaging Spectrometer is H, and the focal length of preposition imaging system (1) is f', and the distance between adjacent picture point is a, and the distance obtaining between adjacent target object point is expressed as with formula two:
Formula two, Δ h=Ha/f';
The catercorner length of setting multistage ladder micro-reflector (7) is h, and the field angle of preposition imaging system (1) is:
2. the Fourier transform infrared imaging spectrometer based on multilevel micro-reflector according to claim 1, it is characterized in that, described focus planardetector is infrared CCD, described infrared CCD receives the image-forming information of rearmounted imaging contracting beam system, image-forming information is swept after pattern through a window, made target object complete the imaging process on all ladder reflectings surface of multistage ladder micro-reflector; The multiple image obtaining sheared and spliced, obtain the interferogram sequence of target object, and described interferogram sequence is carried out to Fourier transform, obtaining the spectrogram of target object.
3. the Fourier transform infrared imaging spectrometer based on multilevel micro-reflector according to claim 1, it is characterized in that, described preposition imaging system adopts five transmission-type spherical mirror structures, rearmounted imaging contracting beam system adopts seven transmission-type spherical mirror structures, and the material of described spherical mirror is silicon and germanium.
4. the Fourier transform infrared imaging spectrometer based on multilevel micro-reflector according to claim 1, it is characterized in that, the material of described sheet beam splitter (6) and compensating plate (8) all adopts ZnSe, and one side is plated infrared part reflective semitransparent film, another side plating infrared anti-reflection film; Infrared anti-reflection film is plated respectively on the two sides of described compensating plate (8).
5. the Fourier transform infrared imaging spectrometer based on multilevel micro-reflector according to claim 1, is characterized in that, setting the travelling speed of imaging spectrometer is v, target object is taken to the time interval sampling to be: Δ T=Δ h/v; Wherein, Δ h is the distance between adjacent object point.
6. the Fourier transform infrared imaging spectrometer based on multilevel micro-reflector according to claim 1, it is characterized in that, the single ladder height scope of described multistage ladder micro-reflector (7) is between 1nm-50 μ m, adopt MOEMS technology or optics job operation to make, the ladder height error of described multilevel micro-reflector (7) is less than 5% of ladder height.
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| CN111077076A (en) * | 2019-12-30 | 2020-04-28 | 中国科学院长春光学精密机械与物理研究所 | Medium wave infrared Fourier transform imaging spectrometer athermal secondary imaging system |
| CN110989142B (en) * | 2019-12-30 | 2021-07-06 | 中国科学院长春光学精密机械与物理研究所 | Preposed common-caliber dual-waveband achromatic lens of Fourier transform imaging spectrometer |
| CN111796302A (en) * | 2020-07-03 | 2020-10-20 | 中国科学院合肥物质科学研究院 | Trapezoidal lens-based multi-designated-height CCD imaging system and method |
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