CN206905904U - A kind of relevant dispersion spectrum imaging device of high flux high stable - Google Patents

A kind of relevant dispersion spectrum imaging device of high flux high stable Download PDF

Info

Publication number
CN206905904U
CN206905904U CN201720230359.7U CN201720230359U CN206905904U CN 206905904 U CN206905904 U CN 206905904U CN 201720230359 U CN201720230359 U CN 201720230359U CN 206905904 U CN206905904 U CN 206905904U
Authority
CN
China
Prior art keywords
light
path
dispersion
splitting
optical path
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn - After Issue
Application number
CN201720230359.7U
Other languages
Chinese (zh)
Inventor
魏儒义
张智南
王飞橙
于建冬
于涛
高晓惠
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
XiAn Institute of Optics and Precision Mechanics of CAS
Original Assignee
XiAn Institute of Optics and Precision Mechanics of CAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by XiAn Institute of Optics and Precision Mechanics of CAS filed Critical XiAn Institute of Optics and Precision Mechanics of CAS
Priority to CN201720230359.7U priority Critical patent/CN206905904U/en
Application granted granted Critical
Publication of CN206905904U publication Critical patent/CN206905904U/en
Withdrawn - After Issue legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Abstract

The utility model proposes a kind of relevant dispersion spectrum imaging device of high flux high stable, the device includes interference with common path light splitting optical path, dispersion light splitting optical path and the photodetector set gradually;The interference with common path light splitting optical path uses the common light path Sagnac interferometers of unsymmetric structure so that the final light beam returned through beam-splitting surface in light path Sagnac interferometers altogether no longer overlaps with incident beam, but spatially parallel separation;Light beam in light path before secondary light splitting corresponding to spaced parallel separation is additionally provided with light path adjustment structure so that two-way one-level light beam finally produces optical path difference, is emitted with interfering beam;To on slit after wherein interfering beam is concentrated all the way, the slit turns into the incident image planes position of dispersion light splitting optical path;Another way interfering beam be the final light beam through beam-splitting surface return in light path Sagnac interferometers altogether it is also concentrated after enter dispersion light splitting optical path.

Description

A kind of relevant dispersion spectrum imaging device of high flux high stable
Technical field
The utility model belongs to spectral imaging technology field, is related to a kind of device of relevant dispersion spectrum imaging.
Background technology
Spectral imaging technology, sometimes referred to as imaging spectral technology, have merged spectral technique and imaging technique, and intersection covers A variety of subjects such as spectroscopy, optics, computer technology, electronic technology and precision optical machinery, the bidimensional that can obtain target simultaneously are empty Between information and one-dimensional spectral information.Spectral imaging technology is widely used in military affairs, medical science, industry, agricultural, resource environment, air Detection, astronomy etc., development are just in the ascendant.
Color dispersion-type and interference-type are two kinds of main light splitting types in spectral imaging technology.Generally by both points Light method is used separately.In rare cases, the speed of the Doppler frequency shift change tracking target such as using interference fringe When, can be by both light-splitting methods when remote sensing fields survey wind speed, the speed of service of fixed star and planet is surveyed in astronomical field Combine, to obtain the preferable measurement accuracy to target.
It the utility model is related to a kind of relevant dispersion for combining interference-type light-splitting method and color dispersion-type light-splitting method Spectrum imaging method.In the document [1] [2], it is proposed that a kind of combine transmission using traditional Michelson interference light splitting technology The relevant dispersion method (Fixed Delay interferometer) of grating beam splitting technology, also had transmitted light therein later The method that grid are improved to reflecting grating light splitting technology.However, interference light splitting technology therein is always to be based on Michelson interference Light splitting technology, belong to non-interference with common path light splitting technology, interferometer often causes dry because of thermodynamics deformation and environmental change It is unstable to relate to striped.Due in the speed of the Doppler frequency shift detection target using interference fringe, to optical path difference and interfering bar The stability requirement of line is very high, otherwise can have a strong impact on the precision of measurement, thus uses and be based on Michelson interference light splitting technology Interferometer can additionally increase the rigors of temperature and pressure to environment.In addition, Michael in traditional coherent dispersion method Inferior interference light splitting only make use of in target light 50% energy, because the energy that interferometer returns to the light all the way of light source does not add profit With.The capacity usage ratio of interferometer also can only achieve 50% in theory, and energy loss is than more serious (phase in astronomical observation When in the observation time for extending 4 times), cause system transmitance and sensitivity low.
It is dry mainly also to allow for it using the Michelson interference light splitting technology of non-light path altogether for traditional coherent dispersion scheme Two arms of interferometer are separated, and light beam is advanced in two arms, and the light path in the different then two-arm of brachium can be different, Required optical path difference can be produced.And the light splitting technology of the common light path (symmetrical structure) of tradition, no matter in vacuum, air or other Jie In matter, the route that target light is advanced wherein is coincidence and identical, can not produce optical path difference.Traditional coherent dispersion method is not yet See using light path technology altogether.
[1]Ge J,2002a,Fixed Delay Interferometry for Doppler Extrasolar Planet Detection.The Astrophysical Journal,571,165.
[2]Ge J,Erskine D and Rushford M,2002b,An Externally Dispersed Interferometer for Sensitive Doppler Extrasolar Planet Searches.Publications of the Astronomical Society of the Pacific,114:1016–1028.
Utility model content
The purpose of this utility model is the relevant dispersion spectrum imaging dress for proposing that a kind of stability is high, capacity usage ratio is high Put.
Basic conception of the present utility model is as follows:
Improve interference with common path light splitting scheme and substitute the non-light splitting scheme of light path altogether of tradition, and capacity usage ratio is improved 1 times To close to 100%, so as to improve the stability of a system, transmitance and sensitivity.Specifically:Common-path method is improved to asymmetric Structure so that the light beam (light beam for returning to light source incident direction) of return no longer overlaps with incident beam, but spatially Parallel separation.If now light beam all passes through identical medium, optical path difference can not be produced certainly, but we lead to using light beam is changed Cross the mode in medium or path, extension/shortening light path is so as to changing optical path difference, such as the two-way by light beam after interference is divided The addition middle all the way of light changes the optics of light path, and Ze Gai roads light beam can produce change light path, so as to be generated with another way Optical path difference.In this way, just realize the common light path beam-splitting structure of big optical path difference.So as to be formed with common light path light splitting technology+dispersion point The relevant dispersed light spectrum imaging method that light technology combines, and by common light path Sagnac interferometers and grating dispersion combination of devices shape Into relevant dispersion spectrum imager.
Conceived based on above utility model, the utility model provides solution below:
The relevant dispersion spectrum imaging device of the high flux high stable, the main interference with common path light splitting light for including setting gradually Road, dispersion light splitting optical path and photodetector;
The interference with common path light splitting optical path uses the common light path Sagnac interferometers of unsymmetric structure, i.e. light path altogether The locus of reflecting surface in Sagnac interferometers, which is set, make it that beam-splitting surface returns in the common light path Sagnac interferometers of final warp Light beam no longer overlapped with incident beam, but spatially parallel separation;
Beam kept man of a noblewoman time light splitting of scoring obtains one-level light beam, and secondary light splitting obtains two level light beam;The then light before secondary light splitting Light beam on road corresponding to spaced parallel separation is additionally provided with light path adjustment structure so that two-way one-level light beam (transmitted light beam And the reflected beams) optical path difference is finally produced, it is emitted with interfering beam;
To on slit after wherein interfering beam is concentrated all the way, the slit turns into the incident image planes position of dispersion light splitting optical path Put;Another way interfering beam is that the final light beam through beam-splitting surface return in light path Sagnac interferometers altogether is also concentrated laggard Enter dispersion light splitting optical path.
Based on such scheme, the utility model has also further made following optimization:
Above-mentioned light path adjustment structure, different optical mediums, or increase path are specifically set up to change light path.
Above-mentioned light path adjustment structure is arranged on the transmitted light path after light splitting first, or is arranged at anti-after light splitting first Penetrate in light path.
Above-mentioned optical medium is prism, and above-mentioned increase path is realized using arrangement of mirrors.
Above-mentioned dispersion light splitting optical path is using prism dispersion light splitting form or grating dispersion light splitting form, wherein grating dispersion The specifically chosen transmission grating of light splitting form or reflecting grating.
Between incident light source and the interference with common path light splitting optical path, preposition optical shaping system is additionally provided with (with reality Now the collimation to incident light, the veiling glare that disappears etc. act on), mainly it is made up of lens and/or reflection device.
Above-mentioned beam-splitting surface is semi-transparent semi-reflective.
The beam-splitting structure of above-mentioned light path Sagnac interferometers altogether, is made up of hollow speculum and semi-transparent semi-reflecting beam splitter Form, or the solid form that reflectance coating and semi-transparent semi-reflecting beam splitting coating form correspondingly is plated in different faces by prism.
Above-mentioned another way interfering beam be after plane mirror turns to, then it is concentrated after enter dispersion light splitting optical path.When So, another slit directly can also be set in light path where (being spatially separated from) light beam of light source incident direction is returned, This segment beam for making to be spatially separated from enters in another dispersion light splitting optical path.
Two-way interfering beam is reflexed in subsequent optical path with plane mirror and is used, can be specifically by interferometer Caused two-way interference output light is merged into same light path and carries out subsequent treatment, can also be separated into different light paths and subsequently be located Reason.I.e.:Above-mentioned another way interfering beam is also concentrated to enter dispersion light splitting optical path afterwards, concretely:The another way interfering beam After the plane mirror, with it is described wherein interfering beam is equidirectional all the way converges to same slit jointly, into of the same colour Dissipate in light splitting optical path;Or the another way interfering beam is assembled through another place in different directions after the plane mirror To another slit, into another dispersion light splitting optical path.
The utility model is a major advantage that:
1st, stability is high
It is common light path technology, the interferometer developed with this and relevant dispersion spectrum imager stability to interfere light splitting technology It is high.After common light path light splitting technology, extraneous thermodynamics change acts on two arms of interferometer, therefore caused light path simultaneously Difference can cancel out each other, and the interference fringe of formation is also more stable, and corresponding interferometer and relevant dispersion spectrum imager are stable Degree is high.
2nd, capacity usage ratio is high, and system sensitivity is high
In the utility model by interferometer output two-way interference light all of, avoid traditional coherent dispersion spectrum into As only utilizing the situation for interfering output all the way in instrument so that utilization rate increases to close to 100%, and the transmitance of whole system is also big Big increase, thus improve the sensitivity of system.
3rd, big optical path difference
The element of light path is changed by the addition middle all the way of the two-way light by light beam after interference is divided, such as prism or reflection Microscope group is closed, then can produce big optical path difference.In this way, just realize the common light path beam-splitting structure of big optical path difference.
4th, it can be spot light or area source to input light source, can be that directional light can also be converging light.This practicality is new The relevant dispersion spectrum imager Optical System Design of type is flexible, and input form of light source can have a variety of.
Brief description of the drawings
Fig. 1 is the first embodiment of the present utility model;
Fig. 2 is second of embodiment of the present utility model;
Fig. 3 is to be added to be used for the schematic diagram for producing the light path adjustment structure of optical path difference in interferometer, and wherein first two is Set up the pattern (prism or prism arrangement) of optical medium, the latter three kinds patterns (combination plane mirrow) for increase path.
Drawing reference numeral explanation:
1-incident light source, 2-Sagnac interferometers, 3-prism (light path adjustment structure), 4-semi-transparent semi-reflecting beam splitter, 5-plane mirror, 6-convergent lens, 7-slit, 8-lens, 9-grating, 10-photodetector.
Embodiment
Referring to Fig. 1 and Fig. 2, the relevant dispersion spectrum imaging device of the high flux high stable uses the Sagnac of unsymmetric structure Spectral interference instrument, the Sagnac spectral interference instrument of the unsymmetric structure, entity can be used to use split type structure, Formed by semi-transparent semi-reflecting beam splitter and two reflectings surface, or by semi-transparent semi-reflecting beam splitter and three reflectings surface.Pass through regulation The locus of reflecting surface in Sagnac interferometers, ensure the light beam (returning to light source incident direction) finally returned through beam splitter No longer overlapped with incident beam, but spatially parallel separation, consequently facilitating being changed to light beam by changing medium or path Become light path.
Target light enters the common light path Sagnac interferometers of unsymmetric structure with parallel or converging light;Target light is done Semi-transparent semi-reflecting beam splitter in interferometer is divided into transmitted light beam all the way and all the way the reflected beams;On transmitted light beam or the reflected beams Light path adjustment structure is added, allows light beam by reaching beam splitter again afterwards;Return to the transmitted light beam and reflected light of beam splitter Shu Zaici is transmitted and reflected by beam splitter, forms four road light, and wherein two-way light produces interference light and equidirectional return light source incidence Direction, another two-way produce interference light and travel to other direction (perpendicular light source incident direction in figure);Interference light forms interference bar Line, to being imaged on slit after interference fringe is assembled, slit turns into the incident image planes position of Dispersive Devices in subsequent optical path.Subsequently Light path can use grating dispersion light splitting form, and Dispersive Devices are transmission grating or reflecting grating, by interference fringe according to wavelength It is dispersed on photodetector and receives.After the interference fringe by Wavelength distribution after reception is handled by noise reduction filtering, amplification etc., Software processing on hardware chip or computer, extraction obtain the information of interference fringe.By the intensity, the phase that handle interference fringe Position change, is finally inversed by the information such as the speed of service of target light.
The utility model is described in detail by taking structure shown in Fig. 1 (preferred embodiment) as an example in lower mask body:
Sagnac interferometers 2 are arranged in the light path of incident light source 1, be can access after incident light source by lens or reflector The preset lens device of part composition, to realize the effects such as the collimation to incident light, the veiling glare that disappears.Sagnac interferometers 2 are included by three Individual reflecting surface and a semi-transparent semi-reflecting beam-splitting surface, the hollow form that can be made up of speculum and semi-transparent semi-reflecting beam splitter 4, The solid form that reflectance coating and semi-transparent semi-reflecting beam splitting coating 4 form can be plated by prism.In design, must be unsymmetric structure, That is three reflectings surface of interferometer are not in relation to beam-splitting surface axial symmetry, but one of face or two faces even three faces are each self-produced Raw certain translation, translational movement depend on the diameter of light beam and required physical space size.No matter translational movement how much, interferometer Two-way outgoing interfering beam return to light source direction all the way, and no longer overlapped with former incident beam;Another way is perpendicular to incident light Source direction.
It should be noted that except the Sagnac interferometers of three reflector types shown in Fig. 1 and Fig. 2 are (by three reflectings surface Formed with a beam-splitting surface) beyond, the Sagnac interferometers (being made up of two reflectings surface and a beam-splitting surface) of pentagonal prism type Obviously also it is applicable such scheme.Being added to interferometer, wherein the prism 3 of light is used to change light path all the way, and it can be added to Incident light source is for the first time by that in the transmitted light beam after semi-transparent semi-reflecting beam splitter 4, can also be added to for the first time by semi-transparent half In the reflected beams after anti-beam splitter 4, but must be before they are again by semi-transparent semi-reflecting beam splitter 4.
As shown in Figure 3, the forms such as arrangement of mirrors can also be changed to for changing the prism 3 of light path.
Interferometer shown in figure is hollow-core construction, and semi-transparent semi-reflecting beam splitter 4 can be the beam splitter of cubic form It can be the beam splitter of flat type, if interferometer is solid construction, semi-transparent half can be plated by the prism for forming interferometer Anti- beam splitting coating is realized.
The effect of plane mirror 5 is to reflex to the interference light all the way for returning to light source in subsequent optical path so that interference The capacity usage ratio of instrument module reaches highest close to 100%, improves the light transmittance of system to greatest extent.In Fig. 1, this road interference light With another way interference parallel light and in the same direction, enter jointly in same convergent lens 6.For structure shown in Fig. 2, then plane reflection The Shi Ci roads interference light of mirror 5 is emitted in different directions, then needs to be separately provided convergent lens, slit etc. all the way in addition and enter corresponding color Dissipate light splitting optical path.
The effect of convergent lens 6 is that the interference fringe convergence for forming interference light is imaged onto at slit 7.The effect of slit 7 It is the entrance slit as follow-up Dispersive Devices, and at an image planes of follow-up dispersion beam splitting system, it is spuious also functions to elimination The effect of light.The effect of lens 8 is that the light at slit is organized into directional light, is incided in follow-up Dispersive Devices grating.Thoroughly Mirror 8 can also be substituted (corresponding, subsequent optical device is placed on the reflected light path of speculum group) with arrangement of mirrors.The reality Example is applied using grating dispersion light splitting form, the effect of grating 9 be the interference fringe for forming interfering beam according to wavelength dispersion, and It is imaged onto on photodetector 10.Grating 9 can be transmission grating or reflecting grating.
The effect of photodetector 10 is will to carry out sample collection according to the interferometric fringe signal of Wavelength distribution, and is converted to Electric signal, and signal the processing such as be amplified to, filtered, to realize that the hardware of the relevant parameters such as the speed of target light, temperature is anti- Drill or computer software inverting provides measurement data.Photodetector can be CCD or other optical-electrical converters Part.

Claims (10)

  1. The dispersion spectrum imaging device 1. a kind of high flux high stable is concerned with, it is characterised in that:Common light path including setting gradually is done Relate to light splitting optical path, dispersion light splitting optical path and photodetector;
    The interference with common path light splitting optical path uses the common light path Sagnac interferometers of unsymmetric structure, i.e., light path Sagnac is done altogether The locus of reflecting surface in interferometer, which is set, causes the final light beam returned through beam-splitting surface in light path Sagnac interferometers altogether not Overlapped again with incident beam, but spatially parallel separation;
    Beam kept man of a noblewoman time light splitting of scoring obtains one-level light beam, and secondary light splitting obtains two level light beam;Then in the light path before secondary light splitting Light path adjustment structure is additionally provided with corresponding to the light beam of spaced parallel separation so that two-way one-level light beam finally produces light path Difference, it is emitted with interfering beam;
    To on slit after wherein interfering beam is concentrated all the way, the slit turns into the incident image planes position of dispersion light splitting optical path;Separately All the way interfering beam be the final light beam through beam-splitting surface return in light path Sagnac interferometers altogether it is also concentrated after enter color Dissipate light splitting optical path.
  2. The dispersion spectrum imaging device 2. high flux high stable according to claim 1 is concerned with, it is characterised in that:The light path Adjustment structure, it is to set up different optical mediums, or increases path to change light path.
  3. The dispersion spectrum imaging device 3. high flux high stable according to claim 2 is concerned with, it is characterised in that:The light path Adjustment structure, it is arranged on the transmitted light path after light splitting first, or is arranged on the reflected light path after light splitting first.
  4. The dispersion spectrum imaging device 4. high flux high stable according to claim 2 is concerned with, it is characterised in that:The optics Medium is prism, and the increase path is realized using arrangement of mirrors.
  5. The dispersion spectrum imaging device 5. high flux high stable according to claim 1 is concerned with, it is characterised in that:The dispersion Light splitting optical path is specifically chosen using prism dispersion light splitting form or grating dispersion light splitting form, wherein grating dispersion light splitting form Transmission grating or reflecting grating.
  6. The dispersion spectrum imaging device 6. high flux high stable according to claim 1 is concerned with, it is characterised in that:In incident light Between source and the interference with common path light splitting optical path, preposition optical shaping system is additionally provided with, mainly by lens and/or reflector Part forms.
  7. The dispersion spectrum imaging device 7. high flux high stable according to claim 1 is concerned with, it is characterised in that:The beam splitting Face is semi-transparent semi-reflective.
  8. The dispersion spectrum imaging device 8. high flux high stable according to claim 7 is concerned with, it is characterised in that:The light altogether The beam-splitting structure of road Sagnac interferometers, the hollow form being made up of speculum and semi-transparent semi-reflecting beam splitter, or by rib Mirror correspondingly plates the solid form of reflectance coating and semi-transparent semi-reflecting beam splitting coating composition in different faces.
  9. The dispersion spectrum imaging device 9. high flux high stable according to claim 1 is concerned with, it is characterised in that:It is described another Road interfering beam be through plane mirror (5) steering after, then it is concentrated after enter dispersion light splitting optical path.
  10. The dispersion spectrum imaging device 10. high flux high stable according to claim 9 is concerned with, it is characterised in that:It is described another Interfering beam is specifically after the plane mirror (5), with the wherein equidirectional common convergence of interfering beam all the way all the way To same slit, into same dispersion light splitting optical path;Or after the plane mirror (5), in different directions through another Another slit is converged at one, into another dispersion light splitting optical path.
CN201720230359.7U 2017-03-10 2017-03-10 A kind of relevant dispersion spectrum imaging device of high flux high stable Withdrawn - After Issue CN206905904U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201720230359.7U CN206905904U (en) 2017-03-10 2017-03-10 A kind of relevant dispersion spectrum imaging device of high flux high stable

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201720230359.7U CN206905904U (en) 2017-03-10 2017-03-10 A kind of relevant dispersion spectrum imaging device of high flux high stable

Publications (1)

Publication Number Publication Date
CN206905904U true CN206905904U (en) 2018-01-19

Family

ID=61294603

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201720230359.7U Withdrawn - After Issue CN206905904U (en) 2017-03-10 2017-03-10 A kind of relevant dispersion spectrum imaging device of high flux high stable

Country Status (1)

Country Link
CN (1) CN206905904U (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106872038A (en) * 2017-03-10 2017-06-20 中国科学院西安光学精密机械研究所 A kind of relevant dispersion spectrum imaging device of high flux high stable
CN111562003A (en) * 2020-04-22 2020-08-21 中国科学院西安光学精密机械研究所 High-stability high-flux polarization interferometer and interference method
CN111562002A (en) * 2020-04-22 2020-08-21 中国科学院西安光学精密机械研究所 High-flux high-resolution high-contrast polarization interference spectrum imaging device and method
CN112834037A (en) * 2020-12-30 2021-05-25 中国科学院西安光学精密机械研究所 Coherent dispersion spectrum imaging method and device for realizing large optical path difference and high stability

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106872038A (en) * 2017-03-10 2017-06-20 中国科学院西安光学精密机械研究所 A kind of relevant dispersion spectrum imaging device of high flux high stable
CN106872038B (en) * 2017-03-10 2019-01-22 中国科学院西安光学精密机械研究所 A kind of relevant dispersion spectrum imaging device of high throughput high stable
CN111562003A (en) * 2020-04-22 2020-08-21 中国科学院西安光学精密机械研究所 High-stability high-flux polarization interferometer and interference method
CN111562002A (en) * 2020-04-22 2020-08-21 中国科学院西安光学精密机械研究所 High-flux high-resolution high-contrast polarization interference spectrum imaging device and method
CN112834037A (en) * 2020-12-30 2021-05-25 中国科学院西安光学精密机械研究所 Coherent dispersion spectrum imaging method and device for realizing large optical path difference and high stability

Similar Documents

Publication Publication Date Title
CN106872038B (en) A kind of relevant dispersion spectrum imaging device of high throughput high stable
CN106918392B (en) A kind of big optical path difference interference with common path light-dividing device of high stable and its application system
CN206905904U (en) A kind of relevant dispersion spectrum imaging device of high flux high stable
CN103913227B (en) Based on Infrared Imaging Spectrometer and the method for making of light-duty beam splitter
Kendrick et al. Flat-panel space-based space surveillance sensor
CN108981606B (en) Snapshot type full-field white light interference microscopic measurement method and device thereof
CN104296676B (en) Heterodyne point diffraction interferometer based on phase shift of low-frequency-difference acousto-optic frequency shifter
CN103424190B (en) Double wedge plate dispersion shear interference Hyper spectral Imaging device and method
CN103076090B (en) Laser interferometer optical path difference location method and system
CN207280728U (en) A kind of device for demarcating focal surface of collimator tube position
CN110501289A (en) A kind of spectrum widening method and device based on digital micromirror array DMD
CN102322956A (en) Rotating-mirror Fourier interference imaging spectrometer
CN107727368A (en) A kind of device and method for demarcating focal surface of collimator tube position
CA2963297A1 (en) Methode et dispositif de microscope diffractive
CN203069274U (en) Laser interferometer optical path difference positioning system
CN206905905U (en) A kind of big optical path difference interference with common path light-dividing device of high stable and its application system
CN113805189B (en) Multi-axis all-fiber double-optical-comb large-size absolute distance measuring system
CN100451580C (en) Wavefront-measuring interferometer apparatus, and light beam measurement apparatus and method thereof
CN104006883B (en) Imaging spectrometer based on multilevel micro-reflector and manufacture method
CN106526690A (en) Extrasolar planetary space-based high-precision detection system and method for radial velocity measurement
CN104006885A (en) Spatio-temporal union modulation Fourier-transformation imaging spectrometer and manufacturing method
CN106352985B (en) A kind of asymmetric space heterodyne spectrograph structure
CN110501074A (en) The high-resolution relevant dispersed light spectrum imaging method of high-throughput wide spectrum and device
CN103913231B (en) Based on the space-time unite modulation fourier transformation imaging spectrometer of light-duty beam splitter
CN106907987A (en) A kind of interference imaging optics system

Legal Events

Date Code Title Description
GR01 Patent grant
GR01 Patent grant
AV01 Patent right actively abandoned
AV01 Patent right actively abandoned
AV01 Patent right actively abandoned

Granted publication date: 20180119

Effective date of abandoning: 20190122

AV01 Patent right actively abandoned

Granted publication date: 20180119

Effective date of abandoning: 20190122