CN106872038A - A kind of relevant dispersion spectrum imaging device of high flux high stable - Google Patents

A kind of relevant dispersion spectrum imaging device of high flux high stable Download PDF

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Publication number
CN106872038A
CN106872038A CN201710140962.0A CN201710140962A CN106872038A CN 106872038 A CN106872038 A CN 106872038A CN 201710140962 A CN201710140962 A CN 201710140962A CN 106872038 A CN106872038 A CN 106872038A
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light
path
dispersion
splitting
optical path
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CN106872038B (en
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魏儒义
胡炳樑
李洪波
张智南
于建冬
王飞橙
于涛
高晓惠
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XiAn Institute of Optics and Precision Mechanics of CAS
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XiAn Institute of Optics and Precision Mechanics of CAS
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • G01J3/45Interferometric spectrometry
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • G01J3/0291Housings; Spectrometer accessories; Spatial arrangement of elements, e.g. folded path arrangements
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • G01J3/2823Imaging spectrometer
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • G01J3/45Interferometric spectrometry
    • G01J2003/451Dispersive interferometric spectrometry

Abstract

The present invention proposes a kind of relevant dispersion spectrum imaging device of high flux high stable, and the device includes the interference with common path light splitting optical path, dispersion light splitting optical path and the photodetector that set gradually;The interference with common path light splitting optical path uses the common light path Sagnac interferometers of unsymmetric structure so that the final light beam returned through beam-splitting surface in light path Sagnac interferometers altogether no longer overlaps with incident beam, but spatially parallel separation;Light beam in light path before secondary light splitting corresponding to spaced parallel separation is additionally provided with light path adjustment structure so that two-way one-level light beam finally produces optical path difference, with interfering beam outgoing;To on slit after wherein interfering beam is concentrated all the way, the slit turns into the incident image planes position of dispersion light splitting optical path;Another road interfering beam be the final light beam returned through beam-splitting surface in light path Sagnac interferometers altogether it is also concentrated after enter dispersion light splitting optical path.

Description

A kind of relevant dispersion spectrum imaging device of high flux high stable
Technical field
The invention belongs to spectral imaging technology field, it is related to a kind of method and device of relevant dispersion spectrum imaging.
Background technology
Spectral imaging technology, sometimes referred to as imaging spectral technology, have merged spectral technique and imaging technique, and intersection is covered Various subjects such as spectroscopy, optics, computer technology, electronic technology and precision optical machinery, the bidimensional that can simultaneously obtain target is empty Between information and one-dimensional spectral information.Spectral imaging technology is widely used in military affairs, medical science, industry, agricultural, resource environment, air The aspects such as detection, astronomy, develop just in the ascendant.
Color dispersion-type and interference-type are two kinds of main light splitting types in spectral imaging technology.Generally by both points Light method is used separately.In rare cases, such as the speed of target is followed the trail of using the Doppler frequency shift change of interference fringe When, when the speed of service that remote sensing fields survey wind speed, astronomical field survey fixed star and planet, can be by both light-splitting methods Combine, to obtain the preferable certainty of measurement to target.
The present invention relates to a kind of relevant dispersion spectrum for combining interference-type light-splitting method and color dispersion-type light-splitting method Imaging method.In the document [1] [2], it is proposed that a kind of using traditional Michelson interference light splitting technology combination transmission grating The relevant dispersion method (Fixed Delay interferometer) of light splitting technology, also had changed transmission grating therein later It is the method for reflecting grating light splitting technology to enter.However, interference light splitting technology therein is always based on Michelson interference light splitting Technology, belong to non-interference with common path light splitting technology, interferometer often causes to interfere bar because of thermodynamics deformation and environmental change Line is unstable.Due to when the speed of target is detected using the Doppler frequency shift of interference fringe, to optical path difference and interference fringe Stability requirement is very high, can otherwise have a strong impact on the precision of measurement, thus using dry based on Michelson interference light splitting technology Interferometer can additionally increase the rigors of the temperature and pressure to environment.Additionally, Michelson is done in traditional coherent dispersion method The energy that light splitting only make use of in target light 50% is related to, because the energy that interferometer returns to the light all the way of light source does not add utilization.It is dry The capacity usage ratio of interferometer also can only achieve 50% in theory, in astronomical observation energy loss be than it is more serious (equivalent to Extend 4 times of observation time), cause system transmitance and sensitivity low.
On traditional coherent dispersion method, using the Michelson interference light splitting technology of non-co- light path, mainly also allow for Two arms of its interferometer are separate, and light beam is advanced in two arms, and the light path in the different then two-arm of brachium can be with It is different, you can the optical path difference needed for producing.And tradition altogether light path (symmetrical structure) light splitting technology, no matter vacuum, air or In other media, the route that target light is advanced wherein is to overlap and identical, it is impossible to produce optical path difference.Traditional coherent dispersion side Method is there is not yet using common light road technique.
[1]Ge J,2002a,Fixed Delay Interferometry for Doppler Extrasolar Planet Detection.The Astrophysical Journal,571,165.
[2]Ge J,Erskine D and Rushford M,2002b,An Externally Dispersed Interferometer for Sensitive Doppler Extrasolar Planet Searches.Publications of the Astronomical Society of the Pacific,114:1016–1028.
The content of the invention
It is an object of the invention to propose a kind of stability is high, capacity usage ratio is high relevant dispersion spectrum imaging device.
Basic conception of the invention is as follows:
Improve interference with common path light-splitting method and substitute traditional non-co- light path light-splitting method, and capacity usage ratio is improved 1 times To close to 100%, so as to improve the stability of a system, transmitance and sensitivity.Specifically:Common-path method is improved to asymmetric Structure so that the light beam (returning to the light beam of light source incident direction) of return no longer overlaps with incident beam, but spatially Parallel separation.If now light beam is all by identical medium, optical path difference cannot be produced certainly, but we are led to using light beam is changed Cross the mode in medium or path, extension/shorten light path so as to change optical path difference, such as two-way by light beam after interfering light splitting The addition middle all the way of light changes the optics of light path, and Ze Gai roads light beam can produce change light path, so as to be generated with another road Optical path difference.In this way, just realizing the common light path beam-splitting structure of big optical path difference.So as to be formed with common light path light splitting technology+dispersion point The relevant dispersed light spectrum imaging method that light technology is combined, and by common light path Sagnac interferometers and grating dispersion combination of devices shape Into relevant dispersion spectrum imager.
Based on above inventive concept, the present invention provides solution below:
The relevant dispersion spectrum imaging device of the high flux high stable, the main interference with common path light splitting light for including setting gradually Road, dispersion light splitting optical path and photodetector;
The interference with common path light splitting optical path using unsymmetric structure common light path Sagnac interferometers, i.e. light path altogether The locus of the reflecting surface in Sagnac interferometers sets beam-splitting surface in causing the common light path Sagnac interferometers of final warp and returns Light beam no longer overlapped with incident beam, but spatially parallel separation;
Beam kept man of a noblewoman time light splitting of scoring obtains one-level light beam, and secondary light splitting obtains secondary light beam;The then light before secondary light splitting Light beam on road corresponding to spaced parallel separation is additionally provided with light path adjustment structure so that two-way one-level light beam (transmitted light beam And the reflected beams) optical path difference is finally produced, with interfering beam outgoing;
To on slit after wherein interfering beam is concentrated all the way, the slit turns into the incident image planes position of dispersion light splitting optical path Put;Another road interfering beam is that the final light beam through beam-splitting surface return in light path Sagnac interferometers altogether is also concentrated laggard Enter dispersion light splitting optical path.
Based on such scheme, the present invention has also further made following optimization:
Above-mentioned light path adjustment structure, specifically sets up different optical mediums, or increase path to change light path.
Above-mentioned light path adjustment structure is arranged on the transmitted light path after light splitting first, or is arranged at anti-after light splitting first Penetrate in light path.
Above-mentioned optical medium is prism, and above-mentioned increase path is realized using arrangement of mirrors.
Above-mentioned dispersion light splitting optical path uses prism dispersion light splitting form or grating dispersion light splitting form, wherein grating dispersion The specifically chosen transmission grating of light splitting form or reflecting grating.
Between incident light source and the interference with common path light splitting optical path, preposition optical shaping system is additionally provided with (with reality Collimation, the veiling glare that disappears now to incident light etc. are acted on), mainly it is made up of lens and/or reflection device.
Above-mentioned beam-splitting surface is semi-transparent semi-reflective.
The beam-splitting structure of above-mentioned light path Sagnac interferometers altogether, by speculum and semi-transparent semi-reflecting beam splitter constitute it is hollow Form, or the solid form that reflectance coating and semi-transparent semi-reflecting beam splitting coating are constituted correspondingly is plated in different faces by prism.
Above-mentioned another road interfering beam is after being turned to through plane mirror then concentrated rear into dispersion light splitting optical path.When So, it is also possible to another slit directly is set in light path where (being spatially separated from) light beam for returning to light source incident direction, This segment beam being spatially separated from is set to enter in another dispersion light splitting optical path.
It is used during two-way interfering beam plane mirror is reflexed into subsequent optical path, can is specifically by interferometer The two-way interference output light of generation is merged into same light path carries out subsequent treatment, it is also possible to is separated into different light paths and is subsequently located Reason.I.e.:Above-mentioned another road interfering beam is also concentrated to enter dispersion light splitting optical path afterwards, concretely:Another road interfering beam After through the plane mirror, with it is described wherein interfering beam is equidirectional all the way converges to same slit jointly, into of the same colour In scattered light splitting optical path;Or after another road interfering beam is through the plane mirror, assembled through another place in different directions To another slit, into another dispersion light splitting optical path.
The present invention is a major advantage that:
1st, stability is high
Interference light splitting technology is common light road technique, the interferometer developed with this and relevant dispersion spectrum imager stability It is high.After using common light path light splitting technology, extraneous thermodynamics change acts on two arms of interferometer, therefore the light path for producing simultaneously Difference can cancel out each other, and the interference fringe of formation is also more stablized, and corresponding interferometer and relevant dispersion spectrum imager are stable Degree is high.
2nd, capacity usage ratio is high, and system sensitivity is high
The two-way interference light for exporting interferometer in the present invention is all of, it is to avoid traditional coherent dispersion spectrum imager In only using interfering the situation of output all the way so that utilization rate increases to close to 100%, and the transmitance of whole system also increases Plus, thus improve the sensitivity of system.
3rd, big optical path difference
The element of light path, such as prism or reflection are changed by the addition middle all the way of the two-way light by light beam after interfering light splitting Microscope group is closed, then can produce big optical path difference.In this way, just realizing the common light path beam-splitting structure of big optical path difference.
4th, input light source can be spot light or area source, can be that directional light can also be converging light.It is of the invention Flexibly, input form of light source can have various to relevant dispersion spectrum imager Optical System Design.
Brief description of the drawings
Fig. 1 is the first embodiment of the invention;
Fig. 2 is second embodiment of the invention;
Fig. 3 is the schematic diagram for being added in interferometer the light path adjustment structure for producing optical path difference, and wherein first two is The pattern (prism or prism arrangement) of optical medium is set up, afterwards three kinds of patterns (combination plane mirrow) to increase path.
Drawing reference numeral explanation:
1-incident light source, 2-Sagnac interferometers, 3-prism (light path adjustment structure), 4-semi-transparent semi-reflecting beam splitter, 5-plane mirror, 6-convergent lens, 7-slit, 8-lens, 9-grating, 10-photodetector.
Specific embodiment
Referring to Fig. 1 and Fig. 2, the relevant dispersion spectrum imaging device of the high flux high stable uses the Sagnac of unsymmetric structure Spectral interference instrument, the Sagnac spectral interference instrument of the unsymmetric structure can also use split type structure using entity, By semi-transparent semi-reflecting beam splitter and two reflectings surface, or it is made up of semi-transparent semi-reflecting beam splitter and three reflectings surface.By regulation The locus of the reflecting surface in Sagnac interferometers, it is ensured that the final light beam (returning to light source incident direction) returned through beam splitter No longer overlapped with incident beam, but spatially parallel separation, consequently facilitating being changed by changing medium or path to light beam Become light path.
Target light enters into the common light path Sagnac interferometers of unsymmetric structure with parallel or converging light;Target light is done Semi-transparent semi-reflecting beam splitter in interferometer is divided into transmitted light beam all the way and all the way the reflected beams;On transmitted light beam or the reflected beams Light path adjustment structure is added, allows light beam to pass through, reach beam splitter again afterwards;Return to the transmitted light beam and reflected light of beam splitter Shu Zaici is transmitted and reflected by beam splitter, forms four road light, and wherein two-way light produces interference light and equidirectional return light source incidence Direction, another two-way produces interference light and travels to other direction (perpendicular light source incident direction in figure);Interference light forms interference bar Line, to being imaged on slit after interference fringe is assembled, slit turns into the incident image planes position of Dispersive Devices in subsequent optical path.Subsequently Light path can use grating dispersion light splitting form, and Dispersive Devices are transmission grating or reflecting grating, by interference fringe according to wavelength It is dispersed on photodetector and receives.After the interference fringe by Wavelength distribution after reception is processed by noise reduction filtering, amplification etc., Software processing on hardware chip or computer, extraction obtains the information of interference fringe.By the intensity, the phase that process interference fringe Position change, is finally inversed by the information such as the speed of service of target light.
Lower mask body describes the present invention in detail by taking structure shown in Fig. 1 (preferred embodiment) as an example:
Sagnac interferometers 2 are arranged in the light path of incident light source 1, be can access by lens or reflector after incident light source The preset lens device of part composition, to realize that collimation, the veiling glare that disappears to incident light etc. are acted on.Sagnac interferometers 2 are included by three Individual reflecting surface and a semi-transparent semi-reflecting beam-splitting surface, the hollow form that can be made up of speculum and semi-transparent semi-reflecting beam splitter 4, The solid form that reflectance coating and semi-transparent semi-reflecting beam splitting coating 4 are constituted can be plated by prism.In design, must be unsymmetric structure, That is three reflectings surface of interferometer are not in relation to beam-splitting surface axial symmetry, but one of face or two faces even three faces are each self-produced The certain translation of life, translational movement depends on the diameter and required physical space size of light beam.No matter translational movement how much, interferometer Two-way outgoing interfering beam return to light source direction all the way, and no longer overlapped with former incident beam;Another road is perpendicular to incident light Source direction.
It should be noted that except the Sagnac interferometers of three reflector types shown in Fig. 1 and Fig. 2 are (by three reflectings surface Constituted with a beam-splitting surface) beyond, the Sagnac interferometers (being made up of two reflectings surface and a beam-splitting surface) of pentagonal prism type Obviously also it is applicable such scheme.Wherein the prism 3 of light is used to change light path all the way to be added to interferometer, and it can be added to Incident light source passes through in the transmitted light beam after semi-transparent semi-reflecting beam splitter 4 for the first time, it is also possible to be added to for the first time by semi-transparent half In the reflected beams after anti-beam splitter 4, but must be before they are again by semi-transparent semi-reflecting beam splitter 4.
As shown in Figure 3, the forms such as arrangement of mirrors can also be changed to for changing the prism 3 of light path.
Interferometer shown in figure is hollow-core construction, and semi-transparent semi-reflecting beam splitter 4 can be the beam splitter of cubic form Can be the beam splitter of flat type, if interferometer is solid construction, semi-transparent half can be plated by the prism for constituting interferometer Anti- beam splitting coating is realized.
The effect of plane mirror 5 is that the interference light all the way that will return to light source reflexes to subsequent optical path so that interference The capacity usage ratio of instrument module reaches highest close to 100%, and the light transmittance of system is improved to greatest extent.In Fig. 1, this road interference light With another road interfere parallel light and in the same direction, enter into jointly in same convergent lens 6.For structure shown in Fig. 2, then plane reflection The Shi Ci roads interference light outgoing in different directions of mirror 5, then need to be separately provided in addition convergent lens, slit etc. all the way and enter corresponding color Dissipate light splitting optical path.
The effect of convergent lens 6 is that the interference fringe convergence for forming interference light is imaged onto at slit 7.The effect of slit 7 It is the entrance slit as follow-up Dispersive Devices, is also at an image planes of follow-up dispersion beam splitting system, to also function to eliminate spuious The effect of light.The effect of lens 8 is that the light at slit is organized into directional light, in inciding follow-up Dispersive Devices grating.Thoroughly Mirror 8 can also be substituted (corresponding, subsequent optical device is placed on the reflected light path of speculum group) with arrangement of mirrors.The reality Example is applied using grating dispersion light splitting form, the effect of grating 9 be the interference fringe for forming interfering beam according to wavelength dispersion, and It is imaged onto on photodetector 10.Grating 9 can be transmission grating, or reflecting grating.
The effect of photodetector 10 is will to carry out sample collection according to the interferometric fringe signal of Wavelength distribution, and is converted to Electric signal, the and signal treatment such as be amplified, filtered, to realize that the hardware of the relevant parameter such as speed, temperature of target light is anti- Drill or computer software inverting provides measurement data.Photodetector can be CCD, or other optical-electrical converters Part.

Claims (10)

1. the relevant dispersion spectrum imaging device of a kind of high flux high stable, it is characterised in that:Common light path including setting gradually is done Relate to light splitting optical path, dispersion light splitting optical path and photodetector;
The interference with common path light splitting optical path uses the common light path Sagnac interferometers of unsymmetric structure, i.e., light path Sagnac does altogether The locus of the reflecting surface in interferometer sets and causes the final light beam returned through beam-splitting surface in light path Sagnac interferometers altogether not Overlapped with incident beam again, but spatially parallel separation;
Beam kept man of a noblewoman time light splitting of scoring obtains one-level light beam, and secondary light splitting obtains secondary light beam;Then in the light path before secondary light splitting Light beam corresponding to spaced parallel separation is additionally provided with light path adjustment structure so that two-way one-level light beam finally produces light path Difference, with interfering beam outgoing;
To on slit after wherein interfering beam is concentrated all the way, the slit turns into the incident image planes position of dispersion light splitting optical path;Separately All the way interfering beam be the final light beam returned through beam-splitting surface in light path Sagnac interferometers altogether it is also concentrated after enter color Dissipate light splitting optical path.
2. the relevant dispersion spectrum imaging device of high flux high stable according to claim 1, it is characterised in that:The light path Adjustment structure, be to set up different optical mediums, or increase path and change light path.
3. the relevant dispersion spectrum imaging device of high flux high stable according to claim 2, it is characterised in that:The light path Adjustment structure, is arranged on the transmitted light path after light splitting first, or is arranged on the reflected light path after light splitting first.
4. the relevant dispersion spectrum imaging device of high flux high stable according to claim 2, it is characterised in that:The optics Medium is prism, and the increase path is realized using arrangement of mirrors.
5. the relevant dispersion spectrum imaging device of high flux high stable according to claim 1, it is characterised in that:The dispersion Light splitting optical path uses prism dispersion light splitting form or grating dispersion light splitting form, and wherein grating dispersion light splitting form is specifically chosen Transmission grating or reflecting grating.
6. the relevant dispersion spectrum imaging device of high flux high stable according to claim 1, it is characterised in that:In incident light Between source and the interference with common path light splitting optical path, preposition optical shaping system is additionally provided with, mainly by lens and/or reflector Part is constituted.
7. the relevant dispersion spectrum imaging device of high flux high stable according to claim 1, it is characterised in that:The beam splitting Face is semi-transparent semi-reflective.
8. the relevant dispersion spectrum imaging device of high flux high stable according to claim 7, it is characterised in that:The light altogether The beam-splitting structure of road Sagnac interferometers, the hollow form being made up of speculum and semi-transparent semi-reflecting beam splitter, or by rib Mirror correspondingly plates the solid form of reflectance coating and semi-transparent semi-reflecting beam splitting coating composition in different faces.
9. the relevant dispersion spectrum imaging device of high flux high stable according to claim 1, it is characterised in that:It is described another Road interfering beam is after being turned to through plane mirror (5) then concentrated rear into dispersion light splitting optical path.
10. the relevant dispersion spectrum imaging device of high flux high stable according to claim 9, it is characterised in that:It is described another After interfering beam is specifically through the plane mirror (5) all the way, with the wherein equidirectional common convergence of interfering beam all the way To same slit, into same dispersion light splitting optical path;Or through the plane mirror (5) after, in different directions through another Another slit is converged at one, into another dispersion light splitting optical path.
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CN112834037A (en) * 2020-12-30 2021-05-25 中国科学院西安光学精密机械研究所 Coherent dispersion spectrum imaging method and device for realizing large optical path difference and high stability

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