CN110501289A - A kind of spectrum widening method and device based on digital micromirror array DMD - Google Patents
A kind of spectrum widening method and device based on digital micromirror array DMD Download PDFInfo
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- CN110501289A CN110501289A CN201810470175.7A CN201810470175A CN110501289A CN 110501289 A CN110501289 A CN 110501289A CN 201810470175 A CN201810470175 A CN 201810470175A CN 110501289 A CN110501289 A CN 110501289A
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- G—PHYSICS
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
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Abstract
The invention belongs to astronomicalc optics to observe field, in particular to a kind of spectrum widening method and device based on digital micromirror array DMD.Firstly, DMD row or column direction is consistent with detector row or column direction by target optical spectrum dispersion to digital micromirror array DMD row or column direction；Secondly, will cut and reflex to conplane different location according to different spectral coverage along the spectrum of detector row pixel or column pixel dispersion by digital micromirror array DMD, spectrum widening is realized；Again, the different spectral coverage after segmentation is compressed into collimation, obtains interference fringe into intervention module；Finally, interference fringe, which is carried out secondary dispersion along detector row or column direction, realizes that high-precision is divided, high-resolution spectra interference fringe is obtained.The spectrum widening of detection system is realized while the problems such as avoiding the bending of striped caused by crossed dispersion and contrast decline, and solves image slicer method for widening in multiple target detection, reflecting surface is not same as the problem of plane when spectrum narrowband cutting.
Description
Technical field
The invention belongs to astronomicalc optics to observe field, in particular to a kind of spectrum widening based on digital micromirror array DMD
Method and device.
Background technique
Polychromatic light is after dispersion system (such as prism, grating) light splitting, and the monochromatic light opened by dispersion is by wavelength (or frequency)
Size and the pattern being arranged successively, full name are optical spectrum, abbreviation spectrum.Spectral measurement is as the important hand for obtaining material information
Section, application range cover high-energy physics, astronomy, environment, atmospheric physics, Marine Sciences, life science, chemical industry and material,
The multiple fields such as agricultural sciences.
Interference spectrum measuring technique is a kind of optical interferometry technology and spectral technique to be combined to obtain measurement method, quilt
It is widely used in being outer fixed star feature detection, is outer planet detection, universe Detection of Weak Signals, the neck such as atmosphere wind field on the middle and senior level
Domain, the measurement for doppler shifted signal.
The measurement of Doppler signal mainly passes through radial velocity method, currently, there are two types of the modes of realization this method.First,
The crossed dispersion method combined by high-precision echelon and prism, directly measures the spectrum frequency displacement of target, obtains target
The radial velocity.Another kind is the dispersion fixed delay interferometric method that interference and dispersion combine, and interferes item by measuring signal
The phase change of line measures the radial velocity of target indirectly.But the method for current high-precision echelon crossed dispersion, there are energy
Amount utilization efficiency is low, and noise is relatively low；Requirement of the detected with high accuracy to environment is extremely harsh, and cost of observation is high；It can only be single
Target observation, inefficiency；Equipment development technology is complicated, somewhat expensive, it is difficult to the disadvantages of replicating.Dispersion fixed delay technology is more
Disadvantages mentioned above is mended, earliest dispersion fixed delay technical solution is by Michelson's interferometer in, low resolution echelon
The scheme of crossed dispersion is realized.Wherein crossed dispersion mainly solves the problems, such as spectrum widening and resolution ratio.But due to crossed dispersion
The problems such as direction is consistent with spectral interference fringe distribution direction, is bent to introduce striped, and intetference-fit strengthening declines.Make
The detection accuracy for the system of obtaining reduces.Later, it is based on dispersion fixed delay technology, by using Sagnac interferometer and Dyson color
The relevant dispersion detection mode that module combines is dissipated, it is poor to optimize system environment resistant interference performance present in above scheme, energy
The problems such as loss, and can be realized Multiple targets observation.But the program only use a dispersion, spectral region and resolution ratio by
The limitation of detector pixel number.To affect the detection accuracy of system and the population-wide of detectable target.Picture is used at present
Spectrum widening may be implemented in the scheme of sheer, and the reflection angle by the planes of reflection different in image slicer is different, to dispersion
Spectrum segment be split.Theoretically, think in optical design each reflecting surface approximation of image slicer same as plane,
But under actual conditions, each plane of reflection is not entirely in same plane, closer to image slicer reflecting surface both ends, each plane
It is bigger with the gap of theoretical center plane.Such case causes in Multiple targets observation mode, the mistake of partial target observed result
Difference is larger.
Summary of the invention
The purpose of the present invention is to propose to a kind of spectrum widening method and devices based on spatial light modulator DMD.It is avoiding
The spectrum widening of detection system is realized while the problems such as bending of striped caused by crossed dispersion and contrast decline, and is solved
Image slicer method for widening determined in multiple target detection, reflecting surface is not in same asking as plane when spectrum narrowband cutting
Topic.
Digital micromirror array DMD is a kind of spatial light modulator part, is multiple small reflecting optics and digital circuit
Integrated MEMOS device can carry out the deflection of different angle by each small eyeglass of Digital Circuit Control.It is commonly used for
In electronic projection apparatus, or for light field regulation instrument, it is used for light path switch.
Compared to image slicer, the rotary shaft of each eyeglass of digital micromirror array DMD is generally aligned in the same plane, so that it is to same
The modulation capability of one image planes light is more outstanding.And its reflection angle can be realized 8bit control, and degree of regulation is high, controllability
By force.
The technical solution adopted by the present invention is that a kind of spectrum widening method based on digital micromirror array DMD is provided, including
Following steps:
Step 1: after target light is collimated in dispersion to digital micromirror array DMD row unit or column unit, the row of DMD or
It arranges consistent with the direction of detector row or column；
Step 2: using digital micromirror array DMD by the light of the dispersion along digital micromirror array DMD row unit or column unit
Spectrum reflexes to conplane different location according to different spectral coverage；
Step 3: interference fringe is obtained by intervention module is entered after the reflected beams collimation in step 2；
Step 4: interference fringe is compressed along with interference fringe vertical direction；
Step 5: interference fringe compressed in step 4 is carried out two along detector row pixel direction or column pixel direction
Secondary dispersion obtains high-resolution spectra interference fringe.
Preferably, above-mentioned target is single or multiple point light sources.
The present invention also provides a kind of spectrum widening devices based on spatial light modulator DMD for realizing the above method, special
Different place is: including the first dispersion system, digital micromirror array DMD, the first concentration module, second set gradually along optical path
Collimating module, intervention module, light compression module, third collimating module, the second dispersion system and detector；
Above-mentioned first dispersion system includes the first collimating module and the first dispersion compensation module set gradually along optical path；
Point target is extended to face directional light and is divided into the first dispersion compensation module by the first collimating module, the first dispersion mould
For block by face directional light along detector row pixel or column pixel orientational dispersion, dispersed light beam propagates to digital micromirror array DMD, number
Micro mirror array DMD cuts dispersed light beam, reflects different spectral coverage along different angle, reflection direction is perpendicular to the first dispersion
Module dispersion direction and the reflected beams are respectively positioned on same plane；First concentration module is by the reflected light as digital micromirror array DMD
Enter the second collimating module after Shu Jinhang convergence to be collimated, obtains the collimated light beam of different spectral coverage；The directional light of different spectral coverage
Beam enters intervention module acquisition perpendicular to the interference fringe of the first dispersion compensation module dispersion direction；Light compression module goes out intervention module
The interference fringe penetrated enters the second color after collimating after detector row pixel or the compression of column pixel direction by third collimating module
Directional light is carried out secondary dispersion along detector row pixel or column pixel direction by the system of dissipating, the second dispersion system, detector not
With the interference fringe for obtaining each spectral coverage on region.
It preferably, can also include converging lenses, above-mentioned converging lenses between the first dispersion compensation module and digital micromirror array DMD
It is converged for the light beam to the first dispersion compensation module according to different spectral coverage.
Preferably, above-mentioned second dispersion system may include the second dispersion compensation module and the second optically focused set gradually along optical path
Module；
Directional light is carried out secondary dispersion along detector row pixel or column pixel direction and gathered into second by the second dispersion compensation module
After optical module convergence, the interference fringe of each spectral coverage is obtained in detector different zones.
Preferably, above-mentioned second dispersion system can also be curved surface grating.
Preferably, the first dispersion compensation module and the second dispersion compensation module are grating or prism, can also use other one-dimensional dispersions
Element replaces, and the resolution ratio of the second dispersion compensation module is greater than the resolution ratio of the first dispersion compensation module.
Preferably, above-mentioned first concentration module is convex lens or convex lens group, and the incident parallel light of different angle is converged
Gather in different spatial.
Preferably, above-mentioned second collimating module is micro lens group, and the light of different spectral coverage is collimated；Above-mentioned optical pressure contracting
Module is cylindrical mirror, and interference pattern is compressed along spectral dispersion direction.
Preferably, above-mentioned interference module is that Sagnac interferometer, Michelson's interferometer or Mach-Zehnder interferometer etc. are dry
Interferometer device.
The beneficial effects of the present invention are:
1, the spectrum widening under detector pixel limited situation is realized；
When grating is to target optical spectrum dispersion, detector row or column pixel number determine in the case where, spectral resolution and
Spectral dispersion range is inversely proportional, and cannot achieve high-resolution wide spectrum spectral measurement.The method applied in the present invention passes through first
Grating or prism, then will be along row or column dispersions by digital micromirror array DMD by target dispersion to digital micromirror array DMD
Spectral reflectance so that different spectral coverage is arranged in detector difference row or column, then passes through height to conplane different location
Resolution ratio dispersion element carries out secondary dispersion along the direction of row or column to the narrow-band spectrum for being generally aligned in the same plane different row or column, obtains
Obtain wide spectrum high-resolution spectroscopy spectral line.
2, the utilization rate of detector pixel is high；
Digital micromirror array DMD has very outstanding optical path modulation ability, and the angle control of each of which eyeglass is 8bit,
Angular deflection range is up to 12 ° so that in multi-target imaging, can by adjusting the reflection angle to narrow-band spectrum so that
The distribution of different narrow-band spectrum interference fringes on the detector is more compact, increases the utilization rate of detector pixel.
3, it is convenient for miniaturization and lightweight；
Compared to image slicer, digital micromirror array has smaller size and lighter quality, is conducive to the small of optical path
Type and lightweight.
It 4, being capable of optimal imaging quality
Compared to image slicer, digital micromirror array DMD have preferably it is handling, pass through adjust digital micromirror array DMD
Reflection angle can be realized the quality optimization to system imaging.
5, technology maturation, at low cost
Image slicer is a kind of dedicated devices, no batch production, therefore to carry out spectrum widening and need according to index request
It is designed development, price is high, and the period is long.And digital micromirror array DMD is mass product, in contrast, price is lower, and
And procurement cycle is short.In addition, the strong operability of the reflection angle of DMD, reduces the design difficulty of spectrum widening optical path.
6, multiple target detection performance is more preferable
Image slicer is converged after different target dispersion due to the difference of each mirror angle in multiple target observations
Optic spectrum line reflection position in same plane, not will cause system aberration or other image-quality problems.The device is using number
Micro mirror array DMD, the yawing axis of each reflecting mirror are generally aligned in the same plane, and avoid the above problem, have better multiple target
The performance of detection.
Detailed description of the invention
Fig. 1 is one embodiment of the invention schematic device；
Fig. 2 is the second dispersion system schematic diagram；
Appended drawing reference in figure are as follows: the first collimating module of 1-, the first dispersion compensation module of 2-, 3- digital micromirror array DMD, 4- first
Concentration module, the second collimating module of 5-, 6- intervention module, 7- light compression module, 8- third collimating module, the second dispersion of 9- system
System；
The second dispersion compensation module of 91-, the second concentration module of 92-.
Specific embodiment
Below in conjunction with drawings and the specific embodiments, the present invention will be further described.
The present invention is using the measurement method for interfering dispersion again after a kind of first dispersion, firstly, by target optical spectrum dispersion to number
On micro mirror array DMD row or column direction, DMD row or column direction is consistent with detector row or column direction；Secondly, passing through digital micro-mirror
Array DMD will be cut along the spectrum of detector row pixel or column pixel dispersion according to different spectral coverage and reflex to it is conplane not
Spectrum widening is realized in same position；Again, the different spectral coverage after segmentation is compressed into collimation, obtains interference fringe into intervention module；
Finally, interference fringe, which is carried out secondary dispersion along detector row or column direction, realizes that high-precision is divided, it is dry to obtain high-resolution spectra
Relate to striped.
It can be measured by device shown in FIG. 1 in the embodiment, be can be seen that from Fig. 1 and Fig. 2 along optical path successively
It is provided with the first collimating module 1, the first dispersion compensation module 2, digital micromirror array DMD3, the first concentration module 4, the second collimating module
5, intervention module 6, light compression module 7, third collimating module 8, the second dispersion system 9 and detector；The first dispersion compensation module with
It can also include converging lenses between digital micromirror array DMD, the light beam of the first dispersion compensation module is converged according to different spectral coverage.
In this embodiment, figure it is seen that the second dispersion system 9 includes the second dispersion set gradually along optical path
Module 91 and the second concentration module 92, can also directly be replaced with curved surface grating；First dispersion compensation module 2 and the second dispersion compensation module 91
Be grating, can also with prism or other replaced with one-dimensional dispersion element；Digital micromirror array DMD3, by controllable micro- of angle
Small reflector composition, its main feature is that the light that will propagate to mirror surface is reflected along certain angle, reflection angle passes through number electricity
Road control, angle control precision are high；And all micro-reflectors are respectively positioned on same plane.First concentration module 4 is by different angles
The incident parallel light of degree converges in different spatial, the equivalent optically focused optical path of convex lens；Second collimating module 5 be cylindrical mirror or
Path-splitting micro lens；Intervention module 6 can be Sagnac interferometer, Michelson's interferometer, and Mach-Zehnder interferometer etc. is done
Interferometer device；The resolution ratio of second dispersion compensation module 91 represents spectrometer true resolution, second of dispersion and first time dispersion direction
Unanimously.
Specific measurement process is as follows:
1), wherein target is single or multiple point light sources, is imaged on focal plane by object lens, will by optical fiber or object lens
Target introduces the first collimating module 1, and then point target is extended to face directional light and is divided into the first dispersion compensation module 2.Pass through
First dispersion compensation module 2 will input directional light along detector row pixel or column pixel orientational dispersion, and it is micro- that dispersed light beam propagates to number
Lens array DMD3.
2), by control digital micromirror array DMD3 each micro-reflector reflection angle, by target dispersion spectral line into
Row cutting, reflects different spectral coverage along different angle, dispersion direction and reflectance spectrum of the reflection direction perpendicular to the first dispersion compensation module 2
Section is respectively positioned on same plane.
3), the reflection light of digital micromirror array DMD3 is converged by the first concentration module 4, due to digital micromirror array
The angle that each reflecting mirror of DMD3 reflects spectral coverage light is different, and different micro-reflectors correspond to wave band and are compressed in different spaces position
It sets, light beam enters the second collimating module 5 after compression.
4), incident beam is collimated by the second collimating module 5, obtains the collimated light beam of different spectral coverage, into dry
Relate to module 6.
5) interference, is carried out by intervention module 6 and obtains interference fringe, interference fringe direction is along detector column pixel or row picture
First directional spreding, perpendicular to first time dispersion direction.
6) energy centralization, is incident to along first time dispersion direction by compression of images by third standard by light compression module 7
Straight module 8.
7), incident beam is collimated by third collimating module 8, is divided into the second dispersion compensation module 91.
8), input directional light is entered the by the second dispersion compensation module 91 after carrying out secondary dispersion perpendicular to interference fringe direction
Two concentration modules 92.
9), after the second concentration module will converge, the interference fringe of each spectral coverage is obtained in detector different zones.
Claims (10)
1. a kind of spectrum widening method based on digital micromirror array DMD, which comprises the following steps:
Step 1: after target light is collimated in dispersion to digital micromirror array DMD row unit or column unit, wherein the row of DMD or
It arranges consistent with detector row or column direction；
Step 2: the spectrum of the dispersion along digital micromirror array DMD row unit or column unit is pressed using digital micromirror array DMD
Conplane different location is reflexed to according to different spectral coverage；
Step 3: interference fringe is obtained by intervention module is entered after the reflected beams collimation in step 2；
Step 4: interference fringe is compressed along with interference fringe vertical direction；
Step 5: carrying out secondary dispersion along detector row pixel or column pixel direction for interference fringe compressed in step 4,
Obtain high-resolution spectra interference fringe.
2. the spectrum widening method according to claim 1 based on digital micromirror array DMD, it is characterised in that: the mesh
It is designated as single or multiple point light sources.
3. a kind of spectrum widening device based on digital micromirror array DMD, it is characterised in that: including set gradually along optical path
One dispersion system, digital micromirror array DMD, the first concentration module, the second collimating module, intervention module, light compression module, third
Collimating module, the second dispersion system and detector；
First dispersion system includes the first collimating module and the first dispersion compensation module set gradually along optical path；
Point target is extended to face directional light and is divided into the first dispersion compensation module by the first collimating module, and the first dispersion compensation module will
For face directional light along digital micromirror array DMD row or column orientational dispersion, dispersed light beam propagates to digital micromirror array DMD, and number is micro-
Lens array DMD cuts dispersed light beam, reflects different spectral coverage along different angle, reflection direction is perpendicular to the first dispersion mould
Block dispersion direction and the reflected beams are respectively positioned on same plane；First concentration module is by the reflected beams as digital micromirror array DMD
Enter the second collimating module after being converged to be collimated, obtains the collimated light beam of different spectral coverage；The collimated light beam of different spectral coverage
The interference fringe perpendicular to the first dispersion compensation module dispersion direction is obtained into intervention module；Intervention module is emitted by light compression module
Interference fringe along detector row pixel or column pixel direction compression after by third collimating module collimate after enter the second dispersion
Directional light is carried out secondary dispersion along detector row pixel or column pixel direction by system, the second dispersion system, in detector difference
The interference fringe of each spectral coverage is obtained on region.
4. the spectrum widening device according to claim 3 based on digital micromirror array DMD, it is characterised in that: first
Converging lenses are equipped between dispersion compensation module and digital micromirror array DMD, converging lenses are used for the light beam of the first dispersion compensation module according to not
It is converged with spectral coverage.
5. the spectrum widening device according to claim 3 or 4 based on digital micromirror array DMD, it is characterised in that: described
Second dispersion system includes the second dispersion compensation module and the second concentration module set gradually along optical path；
Directional light is carried out secondary dispersion along detector row pixel or column pixel direction and enters the second optically focused mould by the second dispersion compensation module
After block convergence, the interference fringe of each spectral coverage is obtained in detector different zones.
6. the spectrum widening device according to claim 3 or 4 based on digital micromirror array DMD, it is characterised in that: described
Second dispersion system is curved surface grating.
7. the spectrum widening device according to claim 5 based on digital micromirror array DMD, it is characterised in that: the first color
It dissipates module and the second dispersion compensation module is grating or prism.
8. the spectrum widening device according to claim 7 based on digital micromirror array DMD, it is characterised in that: described
One concentration module is convex lens or convex lens group, and the incident parallel light of different angle is converged in different spatial.
9. the spectrum widening device according to claim 8 based on digital micromirror array DMD, it is characterised in that: described
Two collimating modules are micro lens group, and the light of different spectral coverage is collimated；The smooth compression module is cylindrical mirror, by interference pattern
It is compressed along spectral dispersion direction.
10. the spectrum widening device according to claim 9 based on digital micromirror array DMD, it is characterised in that: described dry
Relating to module is that Sagnac interferometer, Michelson's interferometer or Mach-Zehnder interferometer interfere instrument.
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| CN110967823A (en) * | 2019-12-16 | 2020-04-07 | 北京仿真中心 | Digital micromirror array DMD beam expander |
| CN111650180A (en) * | 2020-06-08 | 2020-09-11 | 西安电子科技大学 | Raman spectrum imaging system based on signal coding and space compression |
| CN112067128A (en) * | 2020-09-15 | 2020-12-11 | 江苏师范大学 | High-speed static dispersion imaging spectrum device and using method thereof |
| CN112763451A (en) * | 2020-12-24 | 2021-05-07 | 中国科学院长春光学精密机械与物理研究所 | Terahertz Raman spectrometer |
| CN113624339A (en) * | 2021-07-16 | 2021-11-09 | 吉林大学 | Homodromous dispersive spectrum analyzer and method based on DMD and echelle grating |
| CN114295593A (en) * | 2021-12-02 | 2022-04-08 | 中国科学院深圳先进技术研究院 | Fluorescence spectrum detection method based on DMD |
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| CN111650180A (en) * | 2020-06-08 | 2020-09-11 | 西安电子科技大学 | Raman spectrum imaging system based on signal coding and space compression |
| CN112067128A (en) * | 2020-09-15 | 2020-12-11 | 江苏师范大学 | High-speed static dispersion imaging spectrum device and using method thereof |
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| CN113624339A (en) * | 2021-07-16 | 2021-11-09 | 吉林大学 | Homodromous dispersive spectrum analyzer and method based on DMD and echelle grating |
| CN113624339B (en) * | 2021-07-16 | 2023-02-03 | 吉林大学 | Homodromous dispersive spectrum analyzer and method based on DMD and echelle grating |
| CN114295593A (en) * | 2021-12-02 | 2022-04-08 | 中国科学院深圳先进技术研究院 | Fluorescence spectrum detection method based on DMD |
| CN114295593B (en) * | 2021-12-02 | 2023-06-02 | 中国科学院深圳先进技术研究院 | Fluorescence spectrum detection method based on DMD |
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