CN110967823B - Digital micromirror array DMD beam expander - Google Patents

Digital micromirror array DMD beam expander Download PDF

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Publication number
CN110967823B
CN110967823B CN201911292699.2A CN201911292699A CN110967823B CN 110967823 B CN110967823 B CN 110967823B CN 201911292699 A CN201911292699 A CN 201911292699A CN 110967823 B CN110967823 B CN 110967823B
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dmd
mirror
analyzer
light
polarized light
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CN110967823A (en
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张兴
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Beijing Simulation Center
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Beijing Simulation Center
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10Scanning systems
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/28Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising
    • G02B27/286Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising for controlling or changing the state of polarisation, e.g. transforming one polarisation state into another

Abstract

The invention discloses a digital micromirror array DMD beam expanding device, comprising: DMD micro-mirror, polarizer, analyzer and lambda/4 wave plate; incident light is modulated into first linearly polarized light through the polarizer, and the first linearly polarized light is reflected to the DMD micro mirror through the analyzer; adjusting the position of the analyzer and/or the angle of incident light to make the reflected light optical axis of the analyzer form an included angle of 24 degrees with the normal of the DMD micromirror in a static state; the lambda/4 wave plate is positioned between the analyzer and the DMD micro-mirror, and the first linearly polarized light reflected by the analyzer is changed into circularly polarized light after passing through the lambda/4 wave plate; when the DMD micro-mirror is in an on state, the circularly polarized light is reflected by the DMD micro-mirror and then changed into second linearly polarized light vertical to the polarization state of the first linearly polarized light after passing through the lambda/4 wave plate again; when the DMD micro-mirror is in an off state, an included angle of 48 degrees is formed between the optical axis of emergent light and the normal of the DMD micro-mirror in a static state; the emergent light paths of the DMD micro-mirrors are not overlapped when the DMD micro-mirrors are in an on state and an off state. The technical scheme of the invention is that a polarizer, an analyzer and a lambda/4 wave plate are added on the basis of the DMD micro-mirror, thereby realizing the purpose of expanding the divergence angle of the light beam.

Description

Digital micromirror array DMD beam expander
Technical Field
The invention relates to the field of digital micromirror array (DMD), in particular to a DMD beam expanding device of a digital micromirror array.
Background
Digital Micro-mirror array (DMD) is a commonly used spatial light modulation Device, developed by texas instruments, usa. In the prior art, the DMD micromirror implements optical path control according to deflection of the micromirror, and implements gray scale modulation depending on time accumulation. The deflection angle of the present DMD micromirror is set to be +12 degrees and-12 degrees, the conventional use method of the DMD micromirror is shown in FIG. 1 and FIG. 2, an incident light source and the DMD micromirror are incident at an angle of 24 degrees, when the DMD micromirror is at +12 degrees, the state is defined as an on state, and at this time, emergent light is emitted along the normal direction of the DMD micromirror as shown in FIG. 1, and the included angle between the incident light and the emergent light is 24 degrees; when the DMD micromirror is at-12 deg., the state is defined as off state, and the angle between the outgoing light and the DMD micromirror normal is 48 deg. as shown in FIG. 2.
As shown in fig. 3, when the divergence angle of the incident light beam exceeds 24 °, a phenomenon that the light path of the reflected light beam partially overlaps with that of the incident light beam occurs, and according to the principle that the light path is reversible, the emergent light from the overlapping region returns to the illumination light source along the incident light path, resulting in light energy loss. Assuming that the incident beam divergence angle is α, the outgoing beam divergence angle is also α according to the reflection theorem, and the overlapping region angle is α/2+ α/2-24 ° - α -24 °, the effective divergence angle is α - (α -24 °) 24 °, and thus the outgoing beam is limited to 24 °. In order to improve the light energy utilization rate and reduce the influence of stray light, the divergence angle of an incident light beam of the DMD micromirror is smaller than 24 degrees.
In view of this, the present invention provides a DMD beam expander device for expanding the divergence angle of the incident light beam of the DMD micromirror.
Disclosure of Invention
In order to expand the divergence angle of incident light beams of the DMD micromirror, the invention provides a DMD beam expanding device of a digital micromirror array, which comprises: DMD micro-mirror, polarizer, analyzer and lambda/4 wave plate; incident light is modulated into first linearly polarized light through the polarizer, and the first linearly polarized light is reflected to the DMD micro mirror through the analyzer; adjusting the position of the analyzer and/or the angle of incident light to make the reflected light optical axis of the analyzer form an included angle of 24 degrees with the normal of the DMD micromirror in a static state; the lambda/4 wave plate is positioned between the analyzer and the DMD micro-mirror, and the first linearly polarized light reflected by the analyzer is changed into circularly polarized light after passing through the lambda/4 wave plate; when the DMD micro-mirror is in an on state, the circularly polarized light is reflected by the DMD micro-mirror and then changed into second linearly polarized light vertical to the polarization state of the first linearly polarized light after passing through the lambda/4 wave plate again; the polarization state of the second linearly polarized light is the same as the polarization direction of a transmission shaft of the analyzer, and the second linearly polarized light beam is completely transmitted and emitted through the analyzer; when the DMD micro-mirror is in an off state, an included angle of 48 degrees is formed between the optical axis of emergent light and the normal of the DMD micro-mirror in a static state; the emergent light paths of the DMD micro-mirrors are not overlapped when the DMD micro-mirrors are in an on state and an off state.
The invention has the following beneficial effects:
the technical scheme provided by the invention can have the following beneficial effects: the DMD micro-mirror is characterized in that a polarizer, a polarization analyzer and a lambda/4 wave plate are added on the basis of the original DMD micro-mirror, incident light is modulated into first linearly polarized light through the polarizer, the incident angle of an incident light source is changed, the polarizer is used for modulating light beams, the lambda/4 wave plate is used for changing the polarization direction twice when the DMD micro-mirror is in an open state, and the polarization analyzer is used for filtering out the emitted light beams, so that the purpose of expanding the divergence angle of the light beams of the DMD micro-mirror is achieved in a combined mode.
It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the disclosure.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the embodiments or the prior art descriptions will be briefly described below, and it is obvious that the drawings in the following description are one embodiment of the present invention, and other drawings can be obtained by those skilled in the art without creative efforts.
FIG. 1 is a schematic diagram of incident light and reflected light when a DMD micromirror is in an on state;
FIG. 2 is a schematic diagram of incident light and reflected light when the DMD micro-mirror is in a closed state;
FIG. 3 is a schematic diagram of the overlapping area of the incident light beam and the reflected light beam of the DMD micromirror;
fig. 4 is a schematic diagram of a DMD beam expander device according to an embodiment of the invention.
Detailed Description
To make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings, and the described embodiments are some, but not all embodiments of the present invention.
Fig. 4 is a schematic diagram of a DMD beam expander of a digital micromirror array according to an embodiment of the present invention, and as shown in fig. 4, the DMD beam expander of the digital micromirror array includes: DMD micro-mirror 10, polarizer 20, analyzer 30 and lambda/4 wave plate 40; the incident light is modulated into first linearly polarized light through the polarizer 20, and the first linearly polarized light is reflected to the DMD micro-mirror 10 by the analyzer 30; adjusting the position of the analyzer 30 and/or the angle of the incident light so that the optical axis of the reflected light of the analyzer 30 forms an angle of 24 degrees with the normal of the DMD micromirror 10 in the static state; the lambda/4 wave plate 40 is positioned between the analyzer 30 and the DMD micro-mirror 10, and the first linearly polarized light reflected by the analyzer 30 is changed into circularly polarized light after passing through the lambda/4 wave plate 40; when the DMD micro-mirror 10 is in an on state, the circularly polarized light is reflected by the DMD micro-mirror 10 and then changed into second linearly polarized light vertical to the polarization state of the first linearly polarized light after passing through the lambda/4 wave plate 40 again; the polarization state of the second linearly polarized light is the same as the polarization direction of the transmission axis of the analyzer 30, and the second linearly polarized light beam is completely transmitted through the analyzer 30 and emitted. When the DMD micro-mirror 10 is in an off state, an included angle of 48 degrees is formed between an optical axis of emergent light and a normal of the DMD micro-mirror 10 in a static state; the DMD micromirror 10 is turned on and off without overlapping the outgoing light paths.
It should be noted that, in the existing DMD device, the divergence angle of the incident beam is limited to be within 24 °, which is caused by the geometrical overlap of the incident beam and the outgoing beam in the on state on the spatial region, so that the outgoing beam in the overlapped region returns to the illumination light source, thereby reducing the effective aperture of the outgoing beam. Therefore, the key to the problem is to separate the incident and the outgoing beams of the overlap region from the physical space. According to the principle of reversible light, the incident light and the emergent light have different attributes to realize effective beam splitting, so the solution is divided into the following two steps: and changing certain property of emergent light, and then changing the propagation direction of the incident light beam or the emergent light beam in the overlapping area. At present, common optical beam splitting methods include polarization beam splitting, spectrum beam splitting and the like, wherein polarization property change is easy to realize. Because the on-state emergent beam is positioned between the incident beam and the off-state emergent beam, the variable range is limited, and the direction of the incident beam is changed to keep the original emergent beam direction more reasonable and effective. Therefore, the polarizer 20 is used for modulating the incident light beam into a first linearly polarized light, when the DMD micro-mirror 10 is in an on state, the λ/4 wave plate 40 changes the polarization direction twice, the analyzer 30 filters out the emitted light beam, and the position of the analyzer 30 and/or the angle of the incident light are/is adjusted, so that the optical axis of the reflected light of the analyzer 30 forms an included angle of 24 degrees with the normal of the DMD micro-mirror 10 in a static state, thereby achieving the purpose of expanding the divergence angle of the light beam of the DMD micro-mirror 10 in a combined manner.
Finally, it should be noted that: the above-mentioned embodiments are only specific embodiments of the present invention, which are used for illustrating the technical solutions of the present invention and not for limiting the same, and the protection scope of the present invention is not limited thereto, although the present invention is described in detail with reference to the foregoing embodiments, those skilled in the art should understand that: any person skilled in the art can modify or easily conceive the technical solutions described in the foregoing embodiments or equivalent substitutes for some technical features within the technical scope of the present disclosure; such modifications, changes or substitutions do not depart from the spirit and scope of the embodiments of the present invention, and they should be construed as being included therein. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.

Claims (1)

1. A digital micromirror array (DMD) beam expander device, comprising:
the device consists of a DMD micro-mirror, a polarizer, an analyzer and a lambda/4 wave plate;
incident light with a divergence angle is modulated into first linearly polarized light through the polarizer, and the first linearly polarized light is reflected to the DMD micro-mirror by the analyzer;
adjusting the position of the analyzer and/or the angle of incident light to enable the reflected light optical axis of the analyzer to form an included angle of 24 degrees with the normal of the DMD micromirror in a static state;
the lambda/4 wave plate is positioned between the analyzer and the DMD micro-mirror, and the first linearly polarized light reflected by the analyzer is changed into circularly polarized light after passing through the lambda/4 wave plate;
when the DMD micro-mirror is in an on state, the circularly polarized light is reflected by the DMD micro-mirror and then changed into second linearly polarized light vertical to the polarization state of the first linearly polarized light after passing through the lambda/4 wave plate again; the polarization state of the second linearly polarized light is the same as the polarization direction of a transmission shaft of the analyzer, and the second linearly polarized light beam is completely transmitted and emitted through the analyzer;
when the DMD micro-mirror is in an off state, an included angle of 48 degrees is formed between an optical axis of emergent light and a normal of the DMD micro-mirror in a static state; the emergent light paths of the DMD micro-mirrors are not overlapped when the DMD micro-mirrors are in an on state and an off state.
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CN105629454A (en) * 2016-03-30 2016-06-01 中国计量学院 Spatial light modulator-based dual-beam optical tweezers system
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CN110376739A (en) * 2019-07-03 2019-10-25 浙江大学 A kind of hologram plane mixing near-eye display system quickly calculated based on the big emergent pupil of light polarization direction
CN110441754A (en) * 2019-07-22 2019-11-12 中国科学院上海光学精密机械研究所 Segment the controllable optical receiver assembly of visual field optical efficiency
CN110471082A (en) * 2019-08-13 2019-11-19 西安电子科技大学 Single pixel laser calculates imaging device and method
CN110487762A (en) * 2019-08-28 2019-11-22 深圳大学 Super-resolution Bezier microscopic imaging device and method based on multifocal optical illumination
CN110501289A (en) * 2018-05-16 2019-11-26 中国科学院西安光学精密机械研究所 A kind of spectrum widening method and device based on digital micromirror array DMD

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KR101233557B1 (en) * 2008-01-22 2013-02-14 알카텔-루센트 유에스에이 인코포레이티드 A light modulator for optical image projection
CN107121422A (en) * 2017-06-21 2017-09-01 中国科学院苏州生物医学工程技术研究所 A kind of parallel confocal microscopic imaging device and method based on digital micromirror array

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7750286B2 (en) * 2007-06-19 2010-07-06 Alcatel-Lucent Usa Inc. Compact image projector having a mirror for reflecting a beam received from a polarization beam splitter back to the polarization beam splitter
CN105629454A (en) * 2016-03-30 2016-06-01 中国计量学院 Spatial light modulator-based dual-beam optical tweezers system
CN207096106U (en) * 2017-06-21 2018-03-13 中国科学院苏州生物医学工程技术研究所 A kind of parallel confocal microscopic imaging device based on digital micromirror array
CN110501289A (en) * 2018-05-16 2019-11-26 中国科学院西安光学精密机械研究所 A kind of spectrum widening method and device based on digital micromirror array DMD
CN110376739A (en) * 2019-07-03 2019-10-25 浙江大学 A kind of hologram plane mixing near-eye display system quickly calculated based on the big emergent pupil of light polarization direction
CN110441754A (en) * 2019-07-22 2019-11-12 中国科学院上海光学精密机械研究所 Segment the controllable optical receiver assembly of visual field optical efficiency
CN110471082A (en) * 2019-08-13 2019-11-19 西安电子科技大学 Single pixel laser calculates imaging device and method
CN110487762A (en) * 2019-08-28 2019-11-22 深圳大学 Super-resolution Bezier microscopic imaging device and method based on multifocal optical illumination

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