CN108507679A - A kind of wide spectrum high-resolution spectra interferometric method and device - Google Patents
A kind of wide spectrum high-resolution spectra interferometric method and device Download PDFInfo
- Publication number
- CN108507679A CN108507679A CN201810214246.7A CN201810214246A CN108507679A CN 108507679 A CN108507679 A CN 108507679A CN 201810214246 A CN201810214246 A CN 201810214246A CN 108507679 A CN108507679 A CN 108507679A
- Authority
- CN
- China
- Prior art keywords
- dispersion
- module
- row pixel
- interference fringe
- wide spectrum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001228 spectrum Methods 0.000 title claims abstract description 60
- 238000000034 method Methods 0.000 title claims abstract description 19
- 239000006185 dispersion Substances 0.000 claims abstract description 131
- 230000003595 spectral effect Effects 0.000 claims abstract description 45
- 230000006835 compression Effects 0.000 claims description 12
- 238000007906 compression Methods 0.000 claims description 12
- 239000003086 colorant Substances 0.000 claims 1
- 238000003384 imaging method Methods 0.000 claims 1
- 238000001514 detection method Methods 0.000 abstract description 11
- 230000003287 optical effect Effects 0.000 abstract description 7
- 238000004611 spectroscopical analysis Methods 0.000 abstract description 3
- 238000005259 measurement Methods 0.000 description 9
- 238000005516 engineering process Methods 0.000 description 8
- 238000000691 measurement method Methods 0.000 description 3
- 235000019892 Stellar Nutrition 0.000 description 2
- 238000005452 bending Methods 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 238000012271 agricultural production Methods 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 238000003556 assay Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000033228 biological regulation Effects 0.000 description 1
- 239000000306 component Substances 0.000 description 1
- 239000008358 core component Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 238000005305 interferometry Methods 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000010363 phase shift Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 230000011514 reflex Effects 0.000 description 1
- 230000011218 segmentation Effects 0.000 description 1
- 230000011664 signaling Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/45—Interferometric spectrometry
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0256—Compact construction
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/2803—Investigating the spectrum using photoelectric array detector
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/45—Interferometric spectrometry
- G01J2003/451—Dispersive interferometric spectrometry
Abstract
The invention belongs to field of optical detection, more particularly to a kind of wide spectrum high-resolution spectra interferometric method and device.After target light is collimated first in dispersion to detector row pixel or row pixel；Then conplane different location will be reflexed to according to different spectral coverage along the spectrum of detector row pixel or row pixel orientational dispersion；It will enter intervention module after the reflected beams collimation in step 2 again and obtain interference fringe；Interference fringe is compressed along with interference fringe vertical direction again；Compressed interference fringe is finally subjected to secondary dispersion along detector row pixel direction or row pixel direction, obtains high-resolution spectra interference fringe.The interference of wide spectrum high-resolution spectroscopy is solved the problems, such as by detector row or column pixel number is limited, crossed dispersion leads to line bend etc., realizes a kind of wide spectrum, high-precision, the radial velocity detecting strategy of high s/n ratio.
Description
Technical field
The invention belongs to field of optical detection, more particularly to a kind of wide spectrum high-resolution spectra interferometric method and dress
It sets.
Background technology
Spectrographic detection technology is to obtain the structure of matter and chemical composition, material element assay and research atomic energy
Grade, the important means of optical signalling frequency displacement detection, at present in industrial and agricultural production, scientific research, environmental monitoring, aerospace
The fields such as remote sensing, astronomical observation have a wide range of applications.Interferometry technology be in optical measurement most widely used technology it
One, it is the important hand for realizing the technologies such as precision distance measurement, signal detection, laser lithography, optics regulation and control, Atmospheric components measurement
Section, application field are extensive.The dispersion delayed interference technology that spectrum and interference are combined is applied as a kind of new measuring technique
In the measurement of the radial velocity, and it is outer fixed star feature detection that radial velocity method, which is, is outer planet detection, the inspection of universe small-signal
It surveys, one of main method used such as air Wind field measurement on the middle and senior level.
Currently, there are two types of the main technique methods of realization radial velocity method：It is a kind of to utilize high-resolution crossed dispersion ladder
Grating spectrograph, another kind utilize the dispersive spectrometer that is concerned with.The former core component is high-resolution echelon；The latter then by
One interferometer and rear Dispersive Devices composition.The main distinction of both measurement methods is that the former passes through high-resolution ladder light
Grid realize high level diffraction, realize that spectral coverage broadens using multiple diffraction times, reach wide spectrum height using prism crossed dispersion
Resolution spectrum calculates regarding for fixed star by directly measuring the position movement because of the stellar spectrum spectral line that Doppler effect generates
To velocity information；And the latter is to be obtained fixed star light by interferometer by the method for middle dispersion or low dispersion grid dispersion
Interference fringe carries out dispersion, and radial velocity information is calculated by the phase shift of interference fringe.Both instruments are being layman
Talent scout survey side, atmospheric wind test the speed aspect with respective advantage, the former spectral resolution is high, directly measures the light for obtaining target
Modal data, data are intuitive, calculate simple；But high dispersion causes the energy of the reception of single detector pixel weak, system signal noise ratio
Low, simultaneously as the dispersive power to different wave length light wave is different, crossed dispersion causes line bend more serious, leads
The increase of observation error is caused, and high-precision crossed dispersion detection system is very high to observing environment requirement, to greatly
Observation cost is increased, limits the development of the technology from every side.The latter's spectral resolution is low, single pixel receive energy compared with
Height, signal-to-noise ratio are high, and the displacement of stellar spectrum is transformed into the variation of interference fringe phase by interferometer, and larger interference light path
Difference realizes the amplification to spectral shift amount, and requirement of the latter to observing environment is relatively low, and technology realizability is good；But the latter
Data processing it is more complicated, also, the latter during dispersion spectral accuracy and spectral region by detector row or column picture
The limitation of first quantity, leads to that spectral dispersion resolution ratio is low, observation spectrum narrow range.
Currently, solving the method that detector limits instrument spectral resolution ratio and spectral measurement ranges as row or column pixel quantity
It is：The scheme of low resolution grating+prism crossed dispersion in.But in this scheme, prism dispersion direction and striped side
To being identical, since prism is different the dispersive power of different wave length, during dispersion, different wave length can be made
Striped generates different size of amount of movement, and this move of stripe can pass through detector and sample, and detector can be caused to sample striped
Contrast declines.And the key point in relevant dispersion Detection Techniques is that the extraction of striped, contrast decline can seriously affect
The detection accuracy of instrument.On the other hand, crossed dispersion causes the bending direction of optic spectrum line consistent with interference fringe distribution direction,
It is this to be bent the variation for resulting in fringe phase, to which the phase change to interference fringe introduces the additional margin of error, into one
Step causes the reduction of measurement accuracy.
Invention content
In order to overcome the above-mentioned deficiencies of the prior art, a kind of wide spectrum high-resolution spectra interference technique of present invention proposition and dress
It sets.The interference of wide spectrum high-resolution spectroscopy is solved by detector row or column pixel number is limited, crossed dispersion leads to spectrum
The problem of Spectral line bend etc. realizes a kind of wide spectrum, high-precision, the radial velocity detecting strategy of high s/n ratio.
In order to solve the problems, such as that existing scheme exists, the technical solution adopted by the present invention is to provide a kind of wide spectrum high-resolution
Spectral interference measurement method, includes the following steps：
Step 1：After target light is collimated in dispersion to detector row pixel or row pixel；
Step 2：It is same flat by being reflexed to according to different spectral coverage along the spectrum of detector row pixel or row pixel orientational dispersion
The different location in face；
Step 3：Interference fringe is obtained by intervention module is entered after the reflected beams collimation in step 2；
Step 4：Interference fringe is compressed along with interference fringe vertical direction；
Step 5：Compressed interference fringe in step 4 is carried out two along detector row pixel direction or row pixel direction
Secondary dispersion obtains high-resolution spectra interference fringe.
Preferably, above-mentioned target is single or multiple point light sources.
The present invention also provides a kind of wide spectrum high-resolution spectra interferometric measuring means for realizing the above method, special characters
It is：Include the first dispersion system set gradually along light path, image slicer, the first concentration module, the second collimating module, interference
Module, light compression module, third collimating module, the second dispersion system and detector；
Above-mentioned first dispersion system includes the first collimating module and the first dispersion compensation module set gradually along light path；
Point target is extended to face directional light and is divided into the first dispersion compensation module by the first collimating module, the first dispersion mould
For block by face directional light along detector row pixel or row pixel orientational dispersion, dispersed light beam propagates to image slicer, and image slicer will
Dispersed light beam is cut, and so that different spectral coverage is reflected along different angle, reflection direction is perpendicular to the first dispersion compensation module dispersion direction；
First concentration module collimates after being converged the reflected beams of image slicer into the second collimating module, obtains different spectrums
The collimated light beam of section；The collimated light beam of different spectral coverage enters intervention module and obtains perpendicular to the dry of the first dispersion compensation module dispersion direction
Relate to striped；Light compression module passes through the interference fringe that intervention module is emitted after detector row pixel or the compression of row pixel direction
Enter the second dispersion system after third collimating module collimation, the second dispersion system is by directional light along detector row pixel or row pixel
Direction carries out secondary dispersion, and the interference fringe of each spectral coverage is obtained in detector different zones.
Preferably, between the first dispersion compensation module and image slicer can also include converging lenses, above-mentioned converging lenses for pair
The light beam of first dispersion compensation module is converged according to different spectral coverage.
Preferably, above-mentioned second dispersion system may include the second dispersion compensation module and the second optically focused set gradually along light path
Module；
Directional light is carried out secondary dispersion along detector row pixel or row pixel direction and gathered into second by the second dispersion compensation module
After optical module convergence, the interference fringe of each spectral coverage is obtained in detector different zones.
Preferably, above-mentioned second dispersion system can also be curved surface grating.
Preferably, the first dispersion compensation module and the second dispersion compensation module are grating or prism, can also use other one-dimensional dispersions
Element replaces, and the resolution ratio of the second dispersion compensation module is more than the resolution ratio of the first dispersion compensation module.
Preferably, above-mentioned first concentration module is convex lens or convex lens group, and the incident parallel light of different angle is converged
Gather in different spatial.
Preferably, above-mentioned second collimating module is micro lens group, and the light of different spectral coverage is collimated；Above-mentioned optical pressure contracting
Module is cylindrical mirror, and interference pattern is compressed along spectral dispersion direction.
Preferably, above-mentioned interference module is that Sagnac interferometers, Michelson's interferometer or Mach-Zehnder interferometer etc. are dry
Interferometer device.
The beneficial effects of the invention are as follows：
1, the spectrum widening under detector pixel limited situation is realized；
When grating is to target optical spectrum dispersion, in the case where detector row or column pixel number determines, spectral resolution and
Spectral dispersion range is inversely proportional, and cannot achieve high-resolution wide spectrum spectral measurement.The method applied in the present invention passes through first
Grating or prism by target dispersion to detector row pixel, then by image slice device by along the spectral reflectance of row dispersion to not
Coplanar position so that different spectral coverage is arranged in detector difference row or column, then is aligned by high-resolution dispersion element
Secondary dispersion is carried out along the direction of row or column in the narrow-band spectrum of same plane difference row or column, obtains wide spectrum high-resolution light
Compose spectral line.
2, there is no bendings for each level dispersion line；
Dispersion direction is in the same direction twice by the present invention, during avoiding crossed dispersion, since prism is to different waves
The refractive index of long light wave is different, after leading to echelon prism dispersion, caused by different levels showing of being bent on the detector of spectral line
As.
3, it is convenient for miniaturization and lightweight；
Light path is reflected using image slice device so that whole light path is compacter in space layout, meanwhile, second
Dispersion uses grating dispersion, has smaller volume, lighter quality and the better linearity compared to prism.
4, the contrast of interference fringe is not influenced while spectrum widening；
The light of first time dispersion different spectral coverage is displaced to conplane different location by image slice device, makes its phase
It is mutually parallel, after being compressed along grating dispersion direction by cylindrical mirror, using second of dispersion of grating.The direction one of dispersion twice
Sample, and interference direction are vertical, therefore will not be affected to the contrast of interference fringe.
5, the program can be realized while Multiple targets observation；
Consider spectral resolution, many factors such as interference fringe number, dispersion phase responsibility outer planet detection system can
Once to realize the observation of multiple targets, by preset lens by the target of introducing in grating different location dispersion, by image
Food slicer reflects and secondary dispersion, makes the interference fringe arranged in parallel of different target, to realize Multiple targets observation.
Description of the drawings
Fig. 1 is one embodiment of the invention schematic device；
Fig. 2 is the second dispersion system schematic diagram；
Reference numeral is in figure：The first collimating modules of 1-, the first dispersion compensation modules of 2-, 3- image slicers, 4- the first optically focused moulds
Block, the second collimating modules of 5-, 6- intervention modules, 7- light compression modules, 8- third collimating modules, the second dispersion systems of 9-；
The second dispersion compensation modules of 91-, the second concentration modules of 92-.
Specific implementation mode
Below in conjunction with drawings and the specific embodiments, the present invention will be further described.
The present invention is using the measurement method for interfering dispersion again after a kind of first dispersion, first, by target dispersion to detector row
On pixel or row pixel direction；Secondly, it will cut and reflex to same according to different spectral coverage along the spectrum of detector row pixel dispersion
The different location of one plane realizes spectrum widening；Again, the different spectral coverage after segmentation is compressed into collimation, is obtained into intervention module
Obtain interference fringe；Finally, interference fringe is subjected to secondary dispersion along detector row or column direction and realizes that high-precision is divided, obtained high
Resolved spectroscopy interference fringe.
It can be measured by device shown in FIG. 1 in the embodiment, be can be seen that from Fig. 1 and Fig. 2 along light path successively
It is provided with the first collimating module 1, the first dispersion compensation module 2, image slicer 3, the first concentration module 4, the second collimating module 5, interference
Module 6, light compression module 7, third collimating module 8, the second dispersion system 9 and detector；In the first dispersion compensation module and as cutting
It can also include converging lenses between device, the light beam of the first dispersion compensation module is converged according to different spectral coverage.
The second dispersion system 9 includes the second dispersion compensation module 91 and the second optically focused set gradually along light path in this embodiment
Module 92 can also be replaced directly with curved surface grating；First dispersion compensation module 2 and the second dispersion compensation module 91 are grating, can also
With prism or other replaced with one-dimensional dispersion element；Image slicer 3 is made of the different plane mirror of angle, its main feature is that
Line or face are split, then reflected along different angle；First concentration module 4 converges the incident parallel light of different angle
Gather in different spatial, the equivalent optically focused light path of convex lens；Second collimating module 5 is cylindrical mirror or path-splitting micro lens；
Intervention module 6 can be Sagnac interferometers, Michelson's interferometer, the interference instrument such as Mach-Zehnder interferometer；Second dispersion
The resolution ratio of module 91 represents spectrometer true resolution, and second of dispersion is consistent with first time dispersion direction.
Specific measurement process is as follows：
1), wherein target is single or multiple point light sources, is imaged on focal plane by object lens, will by optical fiber or object lens
Target introduces the first collimating module 1, and then point target is extended to face directional light and is divided into the first dispersion compensation module 2.Pass through
First dispersion compensation module 2 will input directional light along detector row pixel or row pixel orientational dispersion, and dispersed light beam is propagated to as cutting
Device 3.
2), target dispersion spectral line is cut by image slicer 3, different spectral coverage is made to be reflected along different angle, reflection
Dispersion direction of the direction perpendicular to the first dispersion compensation module 2.
3), the reflection light of image slicer 3 is converged by the first concentration module 4, since 3 each ladder of image slicer is anti-
The angle for penetrating spectral coverage light is different, and different ladders correspond to wave band and are compressed in different spatial, and light beam enters second after compression
Collimating module 5.
4), incident beam is collimated by the second collimating module 5, obtains the collimated light beam of different spectral coverage, into dry
Relate to module 6.
5) interference, is carried out by intervention module 6 and obtains interference fringe, interference fringe direction is along detector column pixel or row picture
First directional spreding, perpendicular to first time dispersion direction.
6) energy centralization, is incident to by compression of images by third standard along first time dispersion direction by light compression module 7
Straight module 8.
7), incident beam is collimated by third collimating module 8, is divided into the second dispersion compensation module 91.
8), input directional light is entered the by the second dispersion compensation module 91 after carrying out secondary dispersion perpendicular to interference fringe direction
Two concentration modules 92.
9), after the second concentration module will converge, the interference fringe of each spectral coverage is obtained in detector different zones.
Claims (10)
1. a kind of wide spectrum high-resolution spectra interferometric method, which is characterized in that include the following steps：
Step 1：After target light is collimated in dispersion to detector row pixel or row pixel；
Step 2：It is conplane by being reflexed to according to different spectral coverage along the spectrum of detector row pixel or row pixel orientational dispersion
Different location；
Step 3：Interference fringe is obtained by intervention module is entered after the reflected beams collimation in step 2；
Step 4：Interference fringe is compressed along with interference fringe vertical direction；
Step 5：Compressed interference fringe in step 4 is subjected to secondary colours along detector row pixel direction or row pixel direction
It dissipates, obtains high-resolution spectra interference fringe.
2. wide spectrum high-resolution spectra interferometric method according to claim 1, it is characterised in that：The target is single
A or multiple point light sources.
3. a kind of wide spectrum high-resolution spectra interferometric measuring means for realizing claims 1 or 2 the method, it is characterised in that：
Include the first dispersion system set gradually along light path, image slicer, the first concentration module, the second collimating module, intervention module,
Light compression module, third collimating module, the second dispersion system and detector；
First dispersion system includes the first collimating module and the first dispersion compensation module set gradually along light path；
Point target is extended to face directional light and is divided into the first dispersion compensation module by the first collimating module, and the first dispersion compensation module will
For face directional light along detector row pixel or row pixel orientational dispersion, dispersed light beam propagates to image slicer, and image slicer is by dispersion
Light beam is cut, and so that different spectral coverage is reflected along different angle, reflection direction is perpendicular to the first dispersion compensation module dispersion direction；First
Concentration module collimates after being converged the reflected beams of image slicer into the second collimating module, obtains different spectral coverage
Collimated light beam；The collimated light beam of different spectral coverage enters interference item of the intervention module acquisition perpendicular to the first dispersion compensation module dispersion direction
Line；The interference fringe that intervention module is emitted is passed through third by light compression module after detector row pixel or the compression of row pixel direction
Enter the second dispersion system after collimating module collimation, the second dispersion system is by directional light along detector row pixel or row pixel direction
Secondary dispersion is carried out, the interference fringe of each spectral coverage is obtained in detector different zones.
4. wide spectrum high-resolution spectra interferometric measuring means according to claim 3, it is characterised in that：In the first dispersion mould
Further include converging lenses between block and image slicer, the converging lenses be used for the light beam of the first dispersion compensation module according to different spectral coverage into
Row convergence imaging.
5. wide spectrum high-resolution spectra interferometric measuring means according to claim 4, it is characterised in that：
Second dispersion system includes the second dispersion compensation module and the second concentration module set gradually along light path；
Directional light is carried out secondary dispersion along detector row pixel or row pixel direction and enters the second optically focused mould by the second dispersion compensation module
After block convergence, the interference fringe of each spectral coverage is obtained in detector different zones.
6. wide spectrum high-resolution spectra interferometric measuring means according to claim 4, it is characterised in that：
Second dispersion system is curved surface grating.
7. wide spectrum high-resolution spectra interferometric measuring means according to claim 5, it is characterised in that：First dispersion compensation module
It is grating or prism with the second dispersion compensation module, the resolution ratio of the second dispersion compensation module is more than the resolution ratio of the first dispersion compensation module.
8. according to any wide spectrum high-resolution spectra interferometric measuring means of claim 3-7, it is characterised in that：Described
One concentration module is convex lens or convex lens group.
9. wide spectrum high-resolution spectra interferometric measuring means according to claim 8, it is characterised in that：Second collimation
Module is micro lens group；The smooth compression module is cylindrical mirror.
10. wide spectrum high-resolution spectra interferometric measuring means according to claim 9, it is characterised in that：The interference mould
Block is Sagnac interferometers, Michelson's interferometer or Mach-Zehnder interferometer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810214246.7A CN108507679B (en) | 2018-03-15 | 2018-03-15 | Broad spectrum high-resolution spectrum interferometry method and device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810214246.7A CN108507679B (en) | 2018-03-15 | 2018-03-15 | Broad spectrum high-resolution spectrum interferometry method and device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108507679A true CN108507679A (en) | 2018-09-07 |
| CN108507679B CN108507679B (en) | 2023-05-26 |
Family
ID=63377467
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810214246.7A Active CN108507679B (en) | 2018-03-15 | 2018-03-15 | Broad spectrum high-resolution spectrum interferometry method and device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108507679B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109669270A (en) * | 2018-12-29 | 2019-04-23 | 贝耐特光学科技（昆山）有限公司 | A kind of optical electivity device and optical device |
| CN112129409A (en) * | 2020-08-19 | 2020-12-25 | 中国科学院西安光学精密机械研究所 | Interference spectrum system based on band-pass sampling technology and target spectrum information acquisition method |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101281061A (en) * | 2008-01-16 | 2008-10-08 | 蔡小舒 | High resolution spectral measuring apparatus |
| US20090303562A1 (en) * | 2008-06-09 | 2009-12-10 | Cardinalpoint Optics Inc. | High-resolution spectrally adjustable filter |
| CN102322954A (en) * | 2011-08-15 | 2012-01-18 | 苏州大学 | Hyper-spectral compression imaging method and system thereof |
| CN207051193U (en) * | 2017-07-31 | 2018-02-27 | 中国科学院西安光学精密机械研究所 | A kind of compact differential interferometry imaging spectrometer |
-
2018
- 2018-03-15 CN CN201810214246.7A patent/CN108507679B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101281061A (en) * | 2008-01-16 | 2008-10-08 | 蔡小舒 | High resolution spectral measuring apparatus |
| US20090303562A1 (en) * | 2008-06-09 | 2009-12-10 | Cardinalpoint Optics Inc. | High-resolution spectrally adjustable filter |
| CN102322954A (en) * | 2011-08-15 | 2012-01-18 | 苏州大学 | Hyper-spectral compression imaging method and system thereof |
| CN207051193U (en) * | 2017-07-31 | 2018-02-27 | 中国科学院西安光学精密机械研究所 | A kind of compact differential interferometry imaging spectrometer |
Non-Patent Citations (1)
| Title |
|---|
| 杨凡超: "基于LCTF与LCVR的偏振高光谱成像系统设计", 《光谱学与光谱分析》 * |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109669270A (en) * | 2018-12-29 | 2019-04-23 | 贝耐特光学科技（昆山）有限公司 | A kind of optical electivity device and optical device |
| CN112129409A (en) * | 2020-08-19 | 2020-12-25 | 中国科学院西安光学精密机械研究所 | Interference spectrum system based on band-pass sampling technology and target spectrum information acquisition method |
| CN112129409B (en) * | 2020-08-19 | 2021-11-16 | 中国科学院西安光学精密机械研究所 | Interference spectrum system based on band-pass sampling technology and target spectrum information acquisition method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN108507679B (en) | 2023-05-26 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101251484B (en) | Miniature fourier transform spectrometer based on modulation | |
| CN107727058B (en) | Optical frequency comb six-degree-of-freedom measuring method and measuring system | |
| CN109781633A (en) | A kind of the white light Microscopic Interferometric Measuring System and method of available spectral information | |
| CN103913227B (en) | Based on Infrared Imaging Spectrometer and the method for making of light-duty beam splitter | |
| CN103954589B (en) | The precision measurement apparatus of a kind of optical material specific refractory power and method | |
| CN105333815B (en) | A kind of super online interferometer measuration system of lateral resolution surface three dimension based on the scanning of spectrum colour loose wire | |
| CN110501289A (en) | A kind of spectrum widening method and device based on digital micromirror array DMD | |
| CN108507679A (en) | A kind of wide spectrum high-resolution spectra interferometric method and device | |
| CN101435880B (en) | Static wide field aberration and temperature difference eliminating multi-direction real time simultaneous probing method for upper atmosphere wind field | |
| CN106352985B (en) | A kind of asymmetric space heterodyne spectrograph structure | |
| CN208012761U (en) | A kind of wide spectrum high-resolution spectra interferometric measuring means | |
| CN104006883A (en) | Imaging spectrometer based on multi-level micro reflecting mirror and manufacturing method thereof | |
| CN201203578Y (en) | Minitype Fourier transformation spectrometer | |
| CN106017364B (en) | A kind of big working distance autocollimation of high-precision laser and method | |
| CN101629804B (en) | Common-path laser interferometer | |
| CN102927923A (en) | High-accuracy nanometer spacing detection device and direction method thereof | |
| CN106323197B (en) | The big working distance autocollimation of portable array zeroing high-precision laser and method | |
| CN106017362B (en) | A kind of big working distance autocollimation of portable high dynamic precision and method | |
| CN213516868U (en) | Asymmetric spatial heterodyne interferometer system | |
| CN208270415U (en) | A kind of spectrum widening device based on digital micromirror array DMD | |
| CN108362381A (en) | A kind of wide visual field large aperture space heterodyne inteference imaging spectrometer | |
| CN204612666U (en) | A kind of position phase reinforced membranes thickness measurement system | |
| CN209513047U (en) | A kind of micro- ladder reflecting mirror and spectrometer for static Fourier transform spectrometer | |
| CN108871572B (en) | Birefringent Fourier transformation imaging spectral band extension method and its imaging device | |
| CN106225726B (en) | The big working distance autocollimation of array zeroing high-precision laser and method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |