CN108507679B - Broad spectrum high-resolution spectrum interferometry method and device - Google Patents

Broad spectrum high-resolution spectrum interferometry method and device Download PDF

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CN108507679B
CN108507679B CN201810214246.7A CN201810214246A CN108507679B CN 108507679 B CN108507679 B CN 108507679B CN 201810214246 A CN201810214246 A CN 201810214246A CN 108507679 B CN108507679 B CN 108507679B
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module
dispersion
detector
interference fringes
light
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CN108507679A (en
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严强强
魏儒义
陈莎莎
于建东
王帅
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XiAn Institute of Optics and Precision Mechanics of CAS
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • G01J3/45Interferometric spectrometry
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • G01J3/0205Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • G01J3/0256Compact construction
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • G01J3/2803Investigating the spectrum using photoelectric array detector
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • G01J3/45Interferometric spectrometry
    • G01J2003/451Dispersive interferometric spectrometry

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Abstract

The invention belongs to the field of optical detection, and particularly relates to a wide-spectrum high-resolution spectrum interferometry method and a device. Firstly, dispersing target light to detector row pixels or column pixels after collimation; then reflecting the spectrum dispersed along the direction of the detector row pixels or the detector column pixels to different positions of the same plane according to different spectral ranges; then the reflected light beam in the second step enters an interference module after being collimated to obtain interference fringes; compressing the interference fringes along the direction perpendicular to the interference fringes; and finally, performing secondary dispersion on the compressed interference fringes along the row pixel direction or the column pixel direction of the detector to obtain high-resolution spectrum interference fringes. The problems that the wide-spectrum high-resolution spectrum interference is limited by the number of pixels in a detector row or column, spectrum spectral lines are bent due to cross dispersion and the like are solved, and a view direction speed detection scheme with wide spectrum, high precision and high signal to noise ratio is realized.

Description

Broad spectrum high-resolution spectrum interferometry method and device
Technical Field
The invention belongs to the field of optical detection, and particularly relates to a wide-spectrum high-resolution spectrum interferometry method and a device.
Background
The spectrum detection technology is an important means for acquiring the structure and chemical composition of a substance, measuring the content of the element of the substance and researching the atomic energy level and detecting the frequency shift of an optical signal, and has wide application in the fields of industrial and agricultural production, scientific research, environmental monitoring, aerospace remote sensing, astronomical observation and the like. Interferometry is one of the most widely applied technologies in optical measurement, is an important means for realizing high-precision ranging, weak signal detection, laser lithography, optical regulation, atmospheric component measurement and other technologies, and has wide application fields. The dispersive delay interference technology combining spectrum and interference is used as a new measuring technology for measuring the visual direction speed, and the visual direction speed method is one of the main methods used for detecting the characteristics of extra-fixed stars, detecting the weak signals of universe, measuring the high-rise wind field in the atmosphere and the like.
At present, two main technical methods for realizing the view velocity method are as follows: one uses a high resolution cross dispersion echelle grating spectrometer and the other uses a coherent dispersion spectrometer. The core component of the former is a high-resolution echelle grating; the latter is composed of an interferometer and a post-dispersion device. The main difference between the two measurement methods is that the former realizes high-order diffraction through a high-resolution echelle grating, uses a plurality of diffraction orders to realize spectrum expansion, then achieves wide-spectrum high-resolution spectrum through prism cross dispersion, and calculates the visual direction speed information of a star by directly measuring the position movement of a star spectrum line generated by Doppler effect; the latter is to disperse the fixed light by interference fringes obtained by an interferometer by a medium dispersion or low dispersion grating dispersion method, and calculate the view velocity information by the phase shift of the interference fringes. The two instruments have respective advantages in the aspect of an extra-line planetary detection party and the speed measurement of an atmospheric wind field, the former has high spectral resolution, the spectral data of a target is obtained by direct measurement, the data are visual, and the calculation is simple; however, high dispersion results in weak energy of the single detector pixel, the signal to noise ratio of the system is low, meanwhile, due to different dispersion capability on light waves with different wavelengths, the cross dispersion results in serious spectrum line bending, and the increase of observation errors is caused, and the high-precision cross dispersion detection system has very high requirements on the observation environment, so that the observation cost is greatly increased, and the development of the technology is limited in various aspects. The latter has low spectrum resolution, high single pixel receiving energy and high signal-to-noise ratio, the displacement of the star spectrum is converted into the phase change of interference fringes through an interferometer, the larger interference optical path difference realizes the amplification of the optical offset, and the latter has lower requirement on the observation environment and good technical realizability; however, the latter has a relatively complex data processing, and the latter has problems of low spectral dispersion resolution, narrow observation spectral range, and the like due to the fact that the spectral accuracy and the spectral range are limited by the number of pixels of a detector row or column in the dispersion process.
At present, the method for solving the problem that the number of image elements in a detector row or column limits the spectral resolution and the spectral measurement range of an instrument is as follows: the scheme of medium-low resolution grating and prism cross dispersion is adopted. However, in this solution, the dispersion direction of the prism and the fringe direction are the same, and since the dispersion capability of the prism for different wavelengths is different, fringes with different wavelengths can generate different amounts of movement during dispersion, and such fringe movement can be sampled by the detector, which can result in a decrease in contrast of the sampled fringes of the detector. The key point in the coherent dispersion detection technology is the extraction of fringes, and the detection precision of an instrument is seriously affected by the reduction of contrast. On the other hand, the cross dispersion causes the bending direction of the spectral line to be consistent with the distribution direction of the interference fringes, and the bending causes the variation of the fringe phase, so that an extra error amount is introduced to the phase variation of the interference fringes, and further the measurement accuracy is reduced.
Disclosure of Invention
In order to overcome the defects in the prior art, the invention provides a broad-spectrum high-resolution spectrum interference technology and a device. The problems that the wide-spectrum high-resolution spectrum interference is limited by the number of pixels in a detector row or column, spectrum spectral lines are bent due to cross dispersion and the like are solved, and a view direction speed detection scheme with wide spectrum, high precision and high signal to noise ratio is realized.
In order to solve the problems of the prior art, the invention adopts the technical scheme that the invention provides a broad spectrum high-resolution spectrum interferometry method, which comprises the following steps:
step one: dispersing the collimated target light to a detector row pixel or a detector column pixel;
step two: reflecting the spectrum dispersed along the direction of the detector row pixels or the detector column pixels to different positions of the same plane according to different spectral ranges;
step three: the reflected light beam in the second step enters an interference module after being collimated to obtain interference fringes;
step four: compressing the interference fringes along the direction perpendicular to the interference fringes;
step five: and (3) performing secondary dispersion on the interference fringes compressed in the step four along the row pixel direction or the column pixel direction of the detector to obtain high-resolution spectrum interference fringes.
Preferably, the above object is a single or multiple point light sources.
The invention also provides a broad spectrum high resolution spectrum interferometry device for realizing the method, which is characterized in that: the system comprises a first dispersion system, an image splitter, a first light gathering module, a second collimation module, an interference module, an optical compression module, a third collimation module, a second dispersion system and a detector which are sequentially arranged along an optical path;
the first dispersion system comprises a first alignment module and a first dispersion module which are sequentially arranged along the light path;
the first collimation module expands the point target into plane parallel light, the plane parallel light enters the first dispersion module to be dispersed, the first dispersion module spreads the plane parallel light along the direction of the detector row pixels or the detector column pixels, the dispersed light beam is transmitted to the image splitter, the image splitter cuts the dispersed light beam, different spectral sections are reflected along different angles, and the reflection direction is perpendicular to the dispersion direction of the first dispersion module; the first light condensing module converges the reflected light beams of the image splitter and then enters the second collimating module to be collimated, so that parallel light beams with different spectral bands are obtained; parallel light beams in different spectral ranges enter an interference module to obtain interference fringes perpendicular to the dispersion direction of a first dispersion module; the light compression module compresses interference fringes emitted by the interference module along the direction of the row pixels or the column pixels of the detector, and then the interference fringes enter the second dispersion system after being collimated by the third collimation module, the second dispersion system carries out secondary dispersion on parallel light along the direction of the row pixels or the column pixels of the detector, and interference fringes of all spectral bands are obtained in different areas of the detector.
Preferably, a converging mirror is further included between the first dispersing module and the image splitter, and the converging mirror is used for converging the light beams of the first dispersing module according to different spectral bands.
Preferably, the second dispersion system may include a second dispersion module and a second light-focusing module sequentially arranged along the optical path;
and the second dispersion module carries out secondary dispersion on the parallel light along the direction of the row pixels or the column pixels of the detector and then enters the second dispersion module for convergence, and interference fringes of each spectrum are obtained in different areas of the detector.
Preferably, the second dispersion system may also be a curved grating.
Preferably, the first dispersion module and the second dispersion module are gratings or prisms, and can be replaced by other one-dimensional dispersion elements, and the resolution of the second dispersion module is greater than that of the first dispersion module.
Preferably, the first light condensing module is a convex lens or a convex lens group, and condenses the incident parallel light with different angles at different spatial positions.
Preferably, the second collimating module is a micro lens group, and collimates light in different spectrum ranges; the optical compression module is a cylindrical mirror and compresses the interference pattern along the direction of spectral dispersion.
Preferably, the interference module is an interferometer such as a Sagnac interferometer, a michelson interferometer, or a mach-zehnder interferometer.
The beneficial effects of the invention are as follows:
1. the spectrum broadening under the condition of limited detector pixels is realized;
when the grating is dispersive to the target spectrum, the spectrum resolution is inversely proportional to the spectrum dispersion range under the condition that the number of pixels in the detector row or column is determined, and the high-resolution wide-spectrum spectral measurement cannot be realized. The method comprises the steps of dispersing a target to a detector row pixel through a grating or a prism, reflecting a spectrum along the row dispersion to different plane positions through an image slicer, enabling different spectrum sections to be arranged on different rows or columns of the detector, and carrying out secondary dispersion on narrow-band spectrums located on different rows or columns of the same plane along the row or column direction through a high-resolution dispersion element to obtain a wide-spectrum high-resolution spectrum line.
2. No bending exists in each level of subsurful spectrum line;
the two dispersion directions are in the same direction, so that the phenomenon that spectral lines of different orders are bent on the detector after the step prism is dispersed due to the fact that the refractive indexes of the prism to light waves of different wavelengths are different in the cross dispersion process is avoided.
3. Is convenient for miniaturization and light weight;
the image slicer is adopted to reflect the light path, so that the whole light path is more compact in space layout, and meanwhile, the second dispersion adopts grating dispersion, so that the light-beam prism has smaller volume, lighter weight and better linearity compared with a prism.
4. The contrast of interference fringes is not affected while the spectrum is widened;
the light of different spectrum sections of the first dispersion is shifted to different positions of the same plane by the image slicer to enable the light to be parallel to each other, and the light is compressed along the grating dispersion direction by the cylindrical mirror and then subjected to the second dispersion of the grating. The direction of the twice dispersion is the same as the direction of the interference, and therefore, the contrast of the interference fringes is not affected.
5. The scheme can realize simultaneous multi-target observation;
the chromatic dispersion coherent system outer planetary detection system can realize observation of a plurality of targets at one time by comprehensively considering various factors such as spectral resolution, interference fringe number and the like, and the introduced targets are dispersed at different positions of the grating through the front mirror, and interference fringes of different targets are arranged in parallel through reflection and secondary dispersion of the image slicer, so that multi-target observation is realized.
Drawings
FIG. 1 is a schematic view of an apparatus according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of a second dispersion system;
the reference numerals in the drawings are: 1-a first collimation module, 2-a first dispersion module, 3-an image splitter, 4-a first light focusing module, 5-a second collimation module, 6-an interference module, 7-a light compression module, 8-a third collimation module and 9-a second dispersion system;
91-a second dispersion module, 92-a second light gathering module.
Detailed Description
The invention is further described below with reference to the accompanying drawings and specific examples.
The invention adopts a measuring method of firstly dispersing and then interfering and then dispersing, firstly dispersing a target to the direction of a detector row pixel or a detector column pixel; secondly, cutting and reflecting the spectrum dispersed along the detector row pixels to different positions of the same plane according to different spectral ranges to realize spectrum broadening; thirdly, compressing and collimating the different spectrum sections after segmentation, and entering an interference module to obtain interference fringes; and finally, carrying out secondary dispersion on the interference fringes along the row or column direction of the detector to realize high-precision light splitting, and obtaining high-resolution spectrum interference fringes.
In this embodiment, measurement can be performed by the device shown in fig. 1, and as can be seen from fig. 1 and 2, a first collimating module 1, a first dispersing module 2, an image slicer 3, a first light condensing module 4, a second collimating module 5, an interference module 6, an optical compressing module 7, a third collimating module 8, a second dispersing system 9 and a detector are sequentially arranged along the optical path; and a converging mirror can be further arranged between the first dispersion module and the image splitter and used for converging the light beams of the first dispersion module according to different spectral bands.
In this embodiment, the second dispersion system 9 includes a second dispersion module 91 and a second optical convergence module 92 that are sequentially disposed along the optical path, and may also be directly replaced by a curved grating; the first dispersion module 2 and the second dispersion module 91 are gratings, and can be replaced by prisms or other one-dimensional dispersion elements; the image slicer 3 is composed of plane reflecting mirrors with different angles, and is characterized in that lines or planes are split and then reflected along different angles; the first condensing module 4 condenses incident parallel light with different angles at different space positions, and the convex lens is equivalent to a condensing light path; the second collimation module 5 is a cylindrical mirror or a beam splitting path micro lens; the interference module 6 may be a Sagnac interferometer, a michelson interferometer, a mach-zehnder interferometer, or the like; the resolution of the second dispersion module 91 represents the actual resolution of the spectrometer, and the second dispersion is in agreement with the first dispersion direction.
The specific measurement process is as follows:
1) Wherein the target is a single or a plurality of point light sources, the target is imaged on a focal plane through an objective lens, the target is introduced into the first collimation module 1 through an optical fiber or the objective lens, and then the point target is expanded into plane parallel light which enters the first dispersion module 2 for light splitting. The input parallel light is dispersed along the direction of the detector row pixels or column pixels by a first dispersion module 2, and the dispersed light beam propagates to an image splitter 3.
2) The target dispersion spectral line is cut by the image splitter 3, so that different spectral ranges reflect along different angles, and the reflection direction is perpendicular to the dispersion direction of the first dispersion module 2.
3) The reflected light rays of the image splitter 3 are converged by the first light condensing module 4, and as the angles of the light rays of each step of the image splitter 3 are different, different steps of corresponding wave bands are compressed at different space positions, and the compressed light beams enter the second collimating module 5.
4) The incident light beam is collimated by the second collimating module 5 to obtain parallel light beams with different spectral ranges, and the parallel light beams enter the interference module 6.
5) Interference fringes are obtained through interference of the interference module 6, and the directions of the interference fringes are distributed along the directions of the detector column pixels or the detector row pixels and are perpendicular to the first dispersion direction.
6) The image is compressed in the first dispersion direction by the optical compression module 7, and the energy is converged and incident on the third collimation module 8.
7) The incident beam is collimated by the third collimating module 8 and split into the second dispersing module 91.
8) The second dispersion module 91 performs secondary dispersion on the input parallel light in a direction perpendicular to the interference fringe, and then enters the second optical focusing module 92.
9) And after converging through the second light condensing module, interference fringes of each spectrum are obtained on different areas of the detector.

Claims (10)

1. The broad spectrum high resolution spectrum interferometry method is characterized by comprising the following steps:
step one: performing primary dispersion along the direction of the detector row pixels or the detector column pixels after collimation of target light;
step two: reflecting the spectrum dispersed along the direction of the detector row pixels or column pixels to different positions of the same plane according to different spectral ranges, wherein the reflecting direction is perpendicular to the first dispersion direction;
step three: the reflected light beam in the second step enters an interference module after being collimated to obtain interference fringes, and the directions of the interference fringes are perpendicular to the directions of the first dispersion;
step four: compressing the interference fringes along the direction perpendicular to the interference fringes;
step five: and (3) carrying out second dispersion on the interference fringes compressed in the step four along the direction of the row pixels or the column pixels of the detector to obtain high-resolution spectrum interference fringes, wherein the second dispersion direction is consistent with the first dispersion direction.
2. The broad spectrum high resolution spectral interferometry method of claim 1, wherein: the target is a single or multiple point light sources.
3. A broad spectrum high resolution spectral interferometry apparatus for carrying out the method of claim 1 or 2, characterized by: the system comprises a first dispersion system, an image splitter, a first light gathering module, a second collimation module, an interference module, an optical compression module, a third collimation module, a second dispersion system and a detector which are sequentially arranged along an optical path;
the first dispersion system comprises a first alignment module and a first dispersion module which are sequentially arranged along the light path;
the first collimation module expands the point target into plane parallel light, the plane parallel light enters the first dispersion module to be dispersed, the first dispersion module spreads the plane parallel light along the direction of the detector row pixels or the detector column pixels, the dispersed light beam is transmitted to the image splitter, the image splitter cuts the dispersed light beam, different spectral sections are reflected along different angles, and the reflection direction is perpendicular to the dispersion direction of the first dispersion module; the first light condensing module converges the reflected light beams of the image splitter and then enters the second collimating module to be collimated, so that parallel light beams with different spectral bands are obtained; parallel light beams in different spectral ranges enter an interference module to obtain interference fringes perpendicular to the dispersion direction of a first dispersion module; the light compression module compresses interference fringes emitted by the interference module along the direction of the row pixels or the column pixels of the detector, and then the interference fringes enter the second dispersion system after being collimated by the third collimation module, the second dispersion system carries out secondary dispersion on parallel light along the direction of the row pixels or the column pixels of the detector, and interference fringes of all spectral bands are obtained in different areas of the detector.
4. A broad spectrum high resolution spectral interferometry device according to claim 3, wherein: and a converging mirror is further arranged between the first dispersion module and the image slicer and is used for converging and imaging the light beams of the first dispersion module according to different spectral ranges.
5. The broad spectrum high resolution spectral interferometry device of claim 4, wherein:
the second dispersion system comprises a second dispersion module and a second condensation module which are sequentially arranged along the light path;
and the second dispersion module carries out secondary dispersion on the parallel light along the direction of the row pixels or the column pixels of the detector and then enters the second dispersion module for convergence, and interference fringes of each spectrum are obtained in different areas of the detector.
6. The broad spectrum high resolution spectral interferometry device of claim 4, wherein:
the second dispersion system is a curved grating.
7. The broad spectrum high resolution spectral interferometry device of claim 5, wherein: the first dispersion module and the second dispersion module are gratings or prisms, and the resolution of the second dispersion module is larger than that of the first dispersion module.
8. The broad spectrum high resolution spectral interferometry device according to any of claims 3-7, wherein: the first light condensation module is a convex lens or a convex lens group.
9. The broad spectrum high resolution spectral interferometry device of claim 8, wherein: the second collimation module is a tiny lens group; the light compression module is a cylindrical mirror.
10. The broad spectrum high resolution spectral interferometry device of claim 9, wherein: the interference module is a Sagnac interferometer, a Michelson interferometer or a Mach-Zehnder interferometer.
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CN109669270B (en) * 2018-12-29 2021-10-29 贝耐特光学科技(昆山)有限公司 Spectrum selection device and optical equipment
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