CN209513047U - A kind of micro- ladder reflecting mirror and spectrometer for static Fourier transform spectrometer - Google Patents
A kind of micro- ladder reflecting mirror and spectrometer for static Fourier transform spectrometer Download PDFInfo
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- CN209513047U CN209513047U CN201920206331.9U CN201920206331U CN209513047U CN 209513047 U CN209513047 U CN 209513047U CN 201920206331 U CN201920206331 U CN 201920206331U CN 209513047 U CN209513047 U CN 209513047U
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Abstract
The utility model discloses a kind of micro- ladder reflecting mirrors and spectrometer for static Fourier transform spectrometer, including the first right-angle prism and the second right-angle prism；First right-angle prism has the first inclined-plane, and second right-angle prism has the second inclined-plane, and first inclined-plane is bonded setting with the second inclined-plane and the binding face on first inclined-plane and the second inclined-plane is semi-transparent face；First right-angle prism includes mutually perpendicular first plane and the second plane, and second right-angle prism includes mutually perpendicular third plane and fourth plane；Second plane is disposed adjacent with third plane, and first plane is disposed adjacent with fourth plane；It is provided with stepped surfaces in second plane, is all coated with reflectance coating in the stepped surfaces and third plane.Its is simple and compact for structure, and has better stability, and precision is high.
Description
Technical field
The utility model relates to field of optical device technology, and in particular to a kind of for static Fourier transform spectrometer
Micro- ladder reflecting mirror and spectrometer.
Background technique
Traditional color dispersion-type spectrometer separates wavelength by dispersion elements such as grating, prisms, then carries out spectral measurement.For
The preferable spectral resolution of guarantee, this spectrometer need slit, generally only 20~50 microns wide.Due to depositing for slit
The luminous flux of this spectrometer is smaller, thus signal-to-noise ratio is also affected to some extent.Fourier trasform spectroscopy is different from dispersion
Type spectrometer, its principle of interference based on light realize that wavelength is parsed by light path scanning and Fourier transformation.But it is traditional
Fourier transform spectrometer, volume is big, and needs the movement of accurate control interfere arm, and measurement is time-consuming relatively long, and price is high
It is expensive.
Static Fourier transform spectrometer replaces the plane in classical Michelson's interferometer anti-with stair-stepping reflecting mirror
Mirror is penetrated, which can generate different optical path differences in space different location, therefore only need once secondary interferometry figure
Corresponding light source light spectrum can be obtained by spectra inversion.It has small in size, light-weight, inexpensive, measuring speed it is fast, without fortune
Many advantages, such as dynamic component.Fig. 1 is the structural schematic diagram of traditional static Fourier transform spectrometer.M1 is reflecting mirror and M2
It is ladder reflecting mirror, BS represents spectroscope, and CCD is detector.Incident light injects spectroscope from left, is divided into two, respectively
It is being synthesized by spectroscope BS a branch of after the reflection of M1 and M2, and is generating interference, interference pattern is after the processing such as filtering by CCD
Image detector receives.Spectra inversion, which is carried out, by the image detected to detector obtains the spectrum of input light source.In static Fu
In in leaf transformation spectrometer, ladder reflecting mirror is core element, and how to produce high-precision ladder reflecting mirror is in static Fu
The key of leaf transformation spectrometer.
Chinese Patent Application No. is that the patent of 201310362780.X discloses " micro- ladder reflection based on wedge of glass item
The production method of mirror ", the patent proposes a kind of to be pasted on big wedge of glass plate one by one to obtain micro- with wedge of glass item
The preparation method of ladder reflecting mirror.However, making the preparation method technical process of micro- ladder reflecting mirror very with wedge of glass item
It is cumbersome, it is time-consuming and laborious.There are the step of a large amount of manual operationss, precision is more difficult to control.In addition, also using the fixed method of ultraviolet glue
The problems such as there are ultraviolet glue contraction distortions, stress.The ladder reflecting mirror fabrication error made in this way is larger, long-time stability compared with
Difference.
Utility model content
The technical problem to be solved by the present invention is to provide a kind of micro- ladders for static Fourier transform spectrometer
Reflecting mirror and spectrometer, it is simple and compact for structure, and there is better stability, precision is high.
In order to solve the above-mentioned technical problem, the utility model provides micro- ladder for static Fourier transform spectrometer
Reflecting mirror, including the first right-angle prism and the second right-angle prism；First right-angle prism has the first inclined-plane, and described second is straight
Angle prism has the second inclined-plane, and first inclined-plane is bonded the patch on setting and first inclined-plane and the second inclined-plane with the second inclined-plane
Conjunction face is semi-transparent face；First right-angle prism includes mutually perpendicular first plane and the second plane, second right-angled edge
Mirror includes mutually perpendicular third plane and fourth plane；Second plane is disposed adjacent with third plane, and described first is flat
Face is disposed adjacent with fourth plane；It is provided with stepped surfaces in second plane, in the stepped surfaces and third plane all
It is coated with reflectance coating；
Light is incident perpendicular to first plane, after through the semi-transparent face be divided into reference beam and test beams；
The reference beam turns back after third plane reflection, and by being projected after the semi-transparent face reflection by fourth plane；The test
Light beam is reflected through stepped surfaces, and is projected through the semi-transparent face from fourth plane.
Preferably, the stepped surfaces include multiple 5th planes, the height of multiple 5th planes is along x-axis side
To or y-axis direction successively successively decrease；Wherein, the x-axis is arranged perpendicular to third plane, and the y-axis is parallel to the third plane
Setting, the x-axis are vertically arranged with y-axis.
Preferably, the stepped surfaces include multiple 5th planes, the height of multiple 5th planes is along x-axis side
Successively successively decrease to y-axis direction；The x-axis direction is arranged perpendicular to third plane, and the y axis direction is parallel to third plane
Setting, the x-axis are vertically arranged with y-axis.
Preferably, the reflectance coating is dielectric film or metal film.
The utility model discloses a kind of static Fourier transform spectrometers, including above-mentioned micro- ladder reflecting mirror.
The utility model has the beneficial effects that
1, the utility model can substitute spectroscope, reflecting mirror and ladder in traditional static Fourier transform spectrometer
Reflecting mirror, it is simple and compact for structure, and there is better stability.
2, micro- ladder reflecting mirror is that single optical element is not related to when it is applied in spectrometer in the utility model
And the problem of multiple optical elements calibration, optical path is stablized, and spectrometer image quality is high.
3, the utility model integrated level is high, and practical performance is strong.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of static Fourier transform spectrometer traditional in background technique；
Fig. 2 is the structural schematic diagram of micro- ladder reflecting mirror in the utility model；
Fig. 3 is the spectroscopical structural schematic diagram in inclined-plane in the utility model；
Fig. 4 is the schematic illustration for etching stepped surfaces on inclined surface by ibl；
Fig. 5 is the structural schematic diagram of baffle in embodiment two；
Fig. 6 is the structural schematic diagram of micro- ladder reflecting mirror with one-dimensional stepped surfaces；
Fig. 7 is the structural schematic diagram of baffle in embodiment three；
Fig. 8 is the structural schematic diagram of micro- ladder reflecting mirror with two-dimentional stepped surfaces.
Figure label explanation: 10, the first right-angle prism；11, the first plane；12, the second plane；13, inclined surface；121,
Five planes；20, the second right-angle prism；21, third plane；22, fourth plane；30, semi-transparent face；40, inclined-plane spectroscope；41, it keeps off
Plate；42, pierced pattern；421, first group of pattern；422, second group of pattern；43, x-y two-dimension moving platform.
Specific embodiment
The utility model is described in further detail in the following with reference to the drawings and specific embodiments, so that those skilled in the art
The utility model may be better understood and can be practiced, but illustrated embodiment is not as the restriction to the utility model.
Embodiment one
Referring to shown in Fig. 2, the utility model discloses a kind of micro- ladder reflections for static Fourier transform spectrometer
Mirror, including the first right-angle prism 10 and the second right-angle prism 20.First right-angle prism 10 has the first inclined-plane, the second right-angle prism
20 have the second inclined-plane, and the first inclined-plane is bonded setting with the second inclined-plane and the binding face on the first inclined-plane and the second inclined-plane is semi-transparent face
30.The binding face can obtain semi-transparent face 30 by plated film, and light passes through semi-transparent face 30, and a part of light is reflected, another part
Light transmits and mistake.
First right-angle prism 10 includes mutually perpendicular first plane 11 and the second plane 12, and the second right-angle prism 20 includes
Mutually perpendicular third plane 21 and fourth plane 22；Second plane 12 is disposed adjacent with third plane 21, the first plane 11 with
Fourth plane 22 is disposed adjacent.Splitter cube also can be used directly in the combination of first right-angle prism and the second right-angle prism.
It is provided with stepped surfaces in the second plane 12, is all coated with reflectance coating in stepped surfaces and third plane.It is described anti-
Penetrating film is dielectric film or metal film.
Micro- ladder reflecting mirror in the utility model, light is incident perpendicular to the first plane 11, after divide through semi-transparent face 30
Light is at reference beam and test beams；Reference beam turns back after the reflection of third plane 21, and by after the reflection of semi-transparent face 30 by the
Four planes project；And test beams are reflected through stepped surfaces, and are projected through semi-transparent face 30 from fourth plane.In this way, optical detection
Device can be detected reference beam and test beams, consequently facilitating visiting if CCD is the side that can be placed in fourth plane 22
Interference imaging is surveyed on device to detect the optical property of spectrum.
Stepped surfaces in the present embodiment can be one-dimensional stepped surfaces, and this stepped surfaces include multiple 5th planes
121, the height of multiple 5th planes 121 is along the x-axis direction or y-axis direction is successively successively decreased；Wherein, x axis is set perpendicular to third plane
It sets, y-axis is parallel to the setting of third plane 21, and x-axis is vertically arranged with y-axis.The structure chart of micro- ladder reflecting mirror is as shown in Figure 6.
Stepped surfaces in the present embodiment may be two-dimentional stepped surfaces, and this stepped surfaces include multiple 5th planes
121, the height of multiple 5th planes 121 is successively successively decreased along the x-axis direction, and is successively successively decreased along the y-axis direction.Set the 5th plane
Upper is some coordinate origin, has not only been successively decreased from the coordinate origin to x-axis direction, but also successively decrease to y-axis direction.Wherein, x-axis direction is vertical
It is arranged in third plane, y-axis is oriented parallel to the setting of third plane 21, and x-axis is vertically arranged with y-axis.Micro- ladder reflecting mirror
Structure chart is as shown in Figure 8.
Stepped surfaces in utility model can be prepared by ion beam lithography method.
The invention also discloses a kind of static Fourier transform spectrometers, including above-mentioned micro- ladder reflecting mirror.
Embodiment two
The utility model discloses a kind of preparation method of micro- ladder reflecting mirror for static Fourier transform spectrometer,
The following steps are included:
Step 1: take splitter cube, splitter cube include the first plane being successively disposed adjacent, the second plane,
Third plane and fourth plane, the first plane be entering light face, the second plane, third plane and fourth plane be light-emitting surface, first
Plane is arranged perpendicular to the second plane, and third plane is arranged perpendicular to fourth plane；It is flat to first using optics cold machining process
Face processes and obtains inclined surface 13, obtains inclined-plane spectroscope 40.As shown in figure 3, being the spectroscopical structural schematic diagram in inclined-plane.
Step 2: etching stepped surfaces on inclined surface 13 by ibl.Referring to shown in Fig. 4, to pass through
Ibl etches the schematic illustration of stepped surfaces on inclined surface.
Wherein, step 2 specifically includes:
S21, inclined-plane spectroscope 40 is fixed on x-y two-dimension moving platform 43, inclined surface 13 is arranged upward；
S22, it has been fixedly arranged at the upper side baffle 41 in inclined-plane spectroscope 40, pierced pattern 42 is provided on baffle 41, is engraved
Null pattern 42 be along the x-axis direction or y-axis direction arrangement periodic serrations pattern.It is periodical along the x-axis direction as shown in Fig. 5
The baffle arrangement schematic diagram of the saw tooth pattern of arrangement；
S23, the particle beam generator for generating ion beam is provided on the upside of baffle 41；
S24, ion beam do etching processing, and 43 band of x-y two-dimension moving platform to inclined surface 13 by pierced pattern 42
Dynamic inclined-plane spectroscope is moved along x-axis or y-axis, etches stepped surfaces on inclined surface 13.
Step 3: plating reflectance coating in stepped surfaces and third plane.
In this way, micro- ladder reflecting mirror may finally be obtained, stepped surfaces are the ladder in one-dimensional square increasing or decreasing
Surface, product figure are as shown in Figure 6.
Embodiment three
The utility model discloses a kind of preparation method of micro- ladder reflecting mirror for static Fourier transform spectrometer,
The following steps are included:
Step 1: take splitter cube, splitter cube includes that the first plane 11, second for being successively disposed adjacent is flat
Face, third plane 21 and fourth plane 22, the first plane 11 are entering light face, the second plane, third plane 21 and fourth plane 22
For light-emitting surface, the first plane 11 is arranged perpendicular to the second plane, and third plane 21 is arranged perpendicular to fourth plane 22.Use optics
Cold machining process is to the second plane machining and obtains inclined surface 13, obtains inclined-plane spectroscope 40.As shown in figure 3, oblique for what is obtained
Face spectroscope 40.
Step 2: etching stepped surfaces on inclined surface by ibl.Referring to shown in Fig. 4, for by from
Beamlet etching method etches the schematic diagram of stepped surfaces on inclined surface 13.
Wherein, step 2 specifically includes:
S21, inclined-plane spectroscope 40 is fixed on x-y two-dimension moving platform 43, inclined surface 13 is arranged upward；
S22, it has been fixedly arranged at the upper side baffle 41 in inclined-plane spectroscope 40, pierced pattern 42 is provided on baffle 41, is engraved
Null pattern 42 includes first group of pattern 421 and second group of pattern 422, and first group of pattern 421 is periodic arrangement along the x-axis direction
Sawtooth pattern, second group of pattern 422 is the sawtooth pattern of periodic arrangement along the y-axis direction.As shown in fig. 7, for first
41 structural schematic diagram of baffle of group pattern 421 and second group of pattern 422；
S23, the particle beam generator for generating ion beam is provided on the upside of baffle 41；
S24, the lower section that inclined-plane spectroscope 40 is moved to first group of pattern 421, x-y two-dimension moving platform 43 drive tiltedly
Face spectroscope moves along the x-axis direction and ion beam performs etching inclined surface 13 by first group of pattern 421, is had
The stepped surfaces of one-dimensional square distribution；
S25, the lower section that inclined-plane spectroscope 40 is moved to second group of pattern 422, x-y two-dimension moving platform 43 drive tiltedly
Face spectroscope moves along the y-axis direction and ion beam carries out the stepped surfaces that one-dimensional square is distributed by second group of pattern 422
Etching obtains the stepped surfaces of two-dimensional directional distribution.
Step 3: plating reflectance coating in stepped surfaces and third plane.
In this way, micro- ladder reflecting mirror may finally be obtained, stepped surfaces are the ladder table in two-dimensional directional highly gradient
Face, product figure are also incremented by the y-direction as shown in fig. 6, the stepped surfaces of micro- ladder reflecting mirror are incremented by the x-direction, have
There is two-dimensional complex stepped surface.
Existing static Fourier transform spectrometer generally uses two ladder reflecting mirrors, the ladder of two ladder reflecting mirrors
Distribution arrangement is orthogonal.And the utility model is carried out using the movement for engraving 41 coupled ion beam of pattern baffle etching and sample
Ladder reflecting mirror processing can produce the ladder reflecting mirror distribution of two dimensions on the same surface, thus avoid two
The alignment issues of ladder reflecting mirror.
In embodiment two and embodiment three, optics cold machining process includes polishing, being polished so that inclining to inclined surface 13
Inclined-plane 13 reaches the surface roughness of optical grade.Surface roughness of optical grade refers to that reach IV grades of optical surfaces bright and clean at this
Degree, surface smoothness are better than the@of λ/5 632.8nm.Pierced pattern 42 is prepared by wet etching method or photoetching process, and accuracy is high, can
Control micro-or nano size.
In the utility model, ion beam passes through the baffle 41 for being provided with pierced pattern, etches step on inclined surface 13
Stepped surfaces, principle are, are periodical along the y-axis direction due to 42 indention of pierced pattern, such as second group of pattern 422
The saw tooth pattern of arrangement, in etching, inclined-plane spectroscope moves in the y-direction, then due to second group of pattern 422, in the direction x
Different location punish light microscopic will be different by the time of ion beam bombardment, the depth being etched is also different, the design of sawtooth pattern with
The angle of spectroscope inclined surface 13 and ion beam are related to the etching speed of spectroscope material.
X-axis and y-axis mentioned in the utility model is in same level, and z-axis is arranged perpendicular to the horizontal plane.
Embodiment described above is only preferred embodiments for fully illustrating the utility model, the utility model
Protection scope it is without being limited thereto.Those skilled in the art made equivalent substitute or change on the basis of the utility model
It changes, both is within the protection scope of the present invention.The protection scope of the utility model is subject to claims.
Claims (5)
1. a kind of micro- ladder reflecting mirror for static Fourier transform spectrometer, which is characterized in that including the first right-angle prism
With the second right-angle prism；First right-angle prism has the first inclined-plane, and second right-angle prism has the second inclined-plane, described
First inclined-plane is bonded setting with the second inclined-plane and the binding face on first inclined-plane and the second inclined-plane is semi-transparent face；Described first is straight
Angle prism includes mutually perpendicular first plane and the second plane, and second right-angle prism includes mutually perpendicular third plane
And fourth plane；Second plane is disposed adjacent with third plane, and first plane is disposed adjacent with fourth plane；It is described
It is provided with stepped surfaces in second plane, is all coated with reflectance coating in the stepped surfaces and third plane；
Light is incident perpendicular to first plane, after through the semi-transparent face be divided into reference beam and test beams；It is described
Reference beam turns back after third plane reflection, and by being projected after the semi-transparent face reflection by fourth plane；The test beams
It reflects through stepped surfaces, and is projected through the semi-transparent face from fourth plane.
2. being used for micro- ladder reflecting mirror of static Fourier transform spectrometer as described in claim 1, which is characterized in that described
Stepped surfaces include multiple 5th planes, and the height of multiple 5th planes is along the x-axis direction or y-axis direction is successively successively decreased；Its
In, the x-axis is arranged perpendicular to third plane, and the y-axis is parallel to the third plane setting, and the x-axis is vertical with y-axis to be set
It sets.
3. being used for micro- ladder reflecting mirror of static Fourier transform spectrometer as described in claim 1, which is characterized in that described
Stepped surfaces include multiple 5th planes, and the height of multiple 5th planes is successively successively decreased with y-axis direction along the x-axis direction；Institute
It states x-axis direction to be arranged perpendicular to third plane, the y-axis is oriented parallel to the setting of third plane, and the x-axis is vertical with y-axis to be set
It sets.
4. being used for micro- ladder reflecting mirror of static Fourier transform spectrometer as described in claim 1, which is characterized in that described
Reflectance coating is dielectric film or metal film.
5. a kind of static Fourier transform spectrometer, which is characterized in that including micro- ladder of any of claims 1-4
Reflecting mirror.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109738066A (en) * | 2019-02-18 | 2019-05-10 | 苏州大学 | A kind of micro- ladder reflecting mirror and preparation method thereof for static Fourier transform spectrometer |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109738066A (en) * | 2019-02-18 | 2019-05-10 | 苏州大学 | A kind of micro- ladder reflecting mirror and preparation method thereof for static Fourier transform spectrometer |
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