CN204556094U - A kind of high precision micro-cantilever thermal vibration signal measurement apparatus - Google Patents
A kind of high precision micro-cantilever thermal vibration signal measurement apparatus Download PDFInfo
- Publication number
- CN204556094U CN204556094U CN201520239723.7U CN201520239723U CN204556094U CN 204556094 U CN204556094 U CN 204556094U CN 201520239723 U CN201520239723 U CN 201520239723U CN 204556094 U CN204556094 U CN 204556094U
- Authority
- CN
- China
- Prior art keywords
- cantilever
- micro
- kalzit
- spectroscope
- beam deviation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Abstract
The utility model discloses a kind of high precision micro-cantilever thermal vibration signal measurement apparatus, comprising the incident assembly of light, first interferes arm light path detection components and second to interfere arm light path detection components, laser is after Glan-Taylor prism, become linearly polarized laser, through spherical spectroscope group, change polarization laser direction, through the first convergent lens and two kalzit beam deviation device, on the tip that linearly polarized laser light splitting becomes the orthogonal two bunch polarized lights in polarization direction to impinge perpendicularly on micro-cantilever and substrate.Two bunch polarized lights after flat mirror reflects, micro-cantilever reflection, then become two bundle polarized lights through spherical spectroscope component, and the four bunch polarized lights finally obtained interfere on four photodiodes.Above-mentioned measurement mechanism solves micro-cantilever that stress bends to the scattering problems of polarization laser, ensure that the overlapping light intensity of two bundle polarization lasers at interference region, improves interference contrast, reduce the measurement that device counter stress bends micro-cantilever ground unrest.
Description
Technical field
The utility model relates to a kind of high precision micro-cantilever thermal vibration signal measurement apparatus, belongs to field of optical measuring technologies.
Background technology
Atomic force microscope (Atomic Force Microscopy, AFM) be a kind of high-accuracy analytical instrument of research material surface structure, being widely used in the fields such as material, chemistry, biotechnology, nanometer technology, studying material surface structures and characteristics by detecting interatomic force extremely small between testing sample and micro-force sensing element.One of its primary structure is micro-cantilever, and the interaction of micro-cantilever needle point and sample makes micro-cantilever generation deformation, and atomic force microscope can be measured minimum acting force.
The micro-cantilever vibration of beam that thermonoise brings-thermomechanical vibration, it is the key factor affecting atomic force microscope resolution, the measurement vibrate thermomechanical and research will contribute to understanding its vibration regularity, to the resolution improving atomic force microscope, design novel high-resolution atomic force microscope of future generation and there is directive significance.But traditional atomic force microscope is due to its structural design, make its ground unrest (electronic noise, scattered noise etc.) signal far above thermomechanical vibration signal, in this case, namely the thermomechanical vibration signal of major part frequency is submerged in the ground unrest of equipment, causes current atom force microscope technology effectively to measure thermomechanical vibration and to study.On the other hand, for improving micro-cantilever surface to sharp light reflectance, improve the photoelectric transformation efficiency of photodiode, often need at micro-cantilever plated surface layer of metal reflective film, but the stress between metallic film and micro-cantilever cause micro-cantilever to have to a certain degree bending, the laser converged on micro-cantilever is caused not return along original optical path or to present certain skew, reduce light intensity conversion efficiency, add the electronic noise of device, improve device to micro-cantilever thermomechanical vibration ground unrest, thus reduce device resolution.
In view of this, the present inventor studies this, and develop a kind of high precision micro-cantilever thermal vibration signal measurement apparatus specially, this case produces thus.
Utility model content
The purpose of this utility model is to provide a kind of high precision micro-cantilever thermal vibration signal measurement apparatus, adopt two kalzit beam deviation device, in reflected light path, add level crossing reflect polarization laser, solve micro-cantilever that stress bends to the scattering problems of polarization laser, ensure that the overlapping light intensity of two bundle polarization lasers at interference region, improve interference contrast, reduce the measurement that device counter stress bends micro-cantilever ground unrest.
To achieve these goals, solution of the present utility model is:
A kind of high precision micro-cantilever thermal vibration signal measurement apparatus, comprise the incident assembly of light, first interferes arm light path detection components and second to interfere arm light path detection components, wherein, the incident assembly of described light comprises laser instrument, be successively set on the polarizer on the laser light path direction of propagation, prism, first slide, spherical spectroscope group, first convergent lens, two kalzit beam deviation device and level crossing, micro-cantilever is placed on the focal plane of the first convergent lens, the laser of laser instrument plays the prism that enters to the rear through the polarizer becomes linearly polarized light, then enter in spherical spectroscope group through the first slide, after spherical spectroscope group, linearly polarized light changes incident direction, first assemble through the first convergent lens, then after two kalzit beam deviation device, light splitting becomes the orthogonal two bundle polarized lights in polarization direction, on the tip inciding micro-cantilever respectively and substrate, the excitation that micro-cantilever is subject to thermonoise produces thermomechanical vibration, make to incide its two bundle polarized lights generation extra phase that are most advanced and sophisticated and substrate poor, two bundle polarized lights pass through two kalzit beam deviation device successively after micro-cantilever reflection, first convergent lens arrives level crossing, after flat mirror reflects, turn back along original optical path, again reflect through micro-cantilever, the light splitting of two kalzit beam deviation device, first convergent lens is assembled in beam of laser, then through spherical spectroscope component be two bundle polarized lights, two bundle polarized lights interfere arm light path detection components through first respectively, second interferes the spectroscope light splitting in arm light path detection components to become four bundle polarized lights, four bundle polarized lights project in four photodiodes respectively, carry out phase difference measurement.
As preferably, described first interferes arm light path detection components to comprise the second slide be successively set on paths direction, the second convergent lens, the first spectroscope and 2 photodiodes in parallel.
As preferably, described second interferes arm light path detection components to comprise the 3rd convergent lens be successively set on paths direction, the second spectroscope and 2 photodiodes in parallel.
As preferably, described first spectroscope and the second spectroscope are all adopted as kalzit beam deviation device.
As preferably, described laser instrument is He-Ne laser instrument.
As preferably, described prism is Glan-Taylor prism.
As preferably, described spherical spectroscope group is made up of 2 spherical spectroscopes.
As preferably, described level crossing is movably arranged on above the first convergent lens by rotating shaft, and level crossing can adjust its degree of tilt according to the incident angle of two bundle polarized lights by rotating shaft, ensures that incident ray goes back to tip and the substrate of micro-cantilever by original optical path.
As preferably, described pair of kalzit beam deviation device comprises the kalzit beam deviation device of 2 mounted on top, in 45 ° of angles between 2 kalzit beam deviation device optical axises, the thickness of single kalzit beam deviation device is 1mm, linearly polarized light is divided into two bundle polarized lights through two kalzit beam deviation device, two bundle polarized light rising angles are 2 °, and two bundle polarized light level intervals are 140um, and the optical axis of described pair of kalzit beam deviation device is 45 ° than the polarization direction of incident polarized light.
As preferably, described linearly polarized light produces on the tip and substrate that two bundle polarized lights impinge perpendicularly on micro-cantilever after two kalzit beam deviation device.
As preferably, two kalzit beam deviation device is between micro-cantilever and the first convergent lens and be irremovable.
As preferably, described linearly polarized light through the focal length of the first convergent lens be 30mm.
As preferably, described first slide is 1/2nd slides, and the second slide is 1/4th slides.
As preferably, the first spectroscope device second spectroscope adopts kalzit beam deviation device, and the optical axis of described kalzit beam deviation device rotates 45 ° than the optical axis of two kalzit beam deviation device.
As preferably, after the first spectroscope device second spectroscope light splitting, two bundle polarized lights project on 2 photodiodes respectively, and the horizontal ranges of two bundle polarization lasers are 0.5mm.
High precision micro-cantilever thermal vibration signal measurement apparatus described in the utility model is mainly used in the micro-cantilever with certain angle of bend because surface coating stress causes, laser is after Glan-Taylor prism, become linearly polarized laser, through spherical spectroscope group, change polarization laser direction, through the first convergent lens and two kalzit beam deviation device, on the tip that linearly polarized laser light splitting becomes the orthogonal two bunch polarized lights in polarization direction to impinge perpendicularly on micro-cantilever and substrate.Two bunch polarized lights after flat mirror reflects, micro-cantilever reflection, then become two bundle polarized lights through spherical spectroscope component, and the four bunch polarized lights finally obtained interfere on four photodiodes.The mode that the thermal vibration amplitude that the utility model adopts the method for laser quadrature phase differential interferometry to be produced because of thermonoise by micro-cantilever is converted to the phase differential of the reflected ray polarized light that two bundles are interfered mutually realizes measuring.And two bundles detect polarized lights inputs in the mode of Differential Input and interfere arm light path detection components to be converted to electric signal.The signal produced due to ground unrest in two bundle reflected ray polarized lights can be cancelled out each other by Differential Input, reduces the interference of ground unrest, realizes the thermal vibration signal that high precision directly measures micro-cantilever.
The high precision micro-cantilever thermal vibration signal measurement apparatus of said structure, after adding level crossing, the optical path difference of polarized light is 4 times of micro-cantilever vibration displacement, namely
for phase differential, d is the Oscillation Amplitude of micro-cantilever, and λ is optical maser wavelength.Solve micro-cantilever that stress bends to the scattering problems of polarization laser, ensure that the overlapping light intensity of two bundle polarization lasers at interference region, improve interference contrast, reduce the measurement that device counter stress bends micro-cantilever ground unrest.By the contrast of the micro-cantilever thermomechanical noise power spectral density curve with metal-coated films, the utility model can realize more high-acruracy survey, and ground unrest is low to moderate 1 × 10 in power spectrum density
-28m
2/ Hz, than not considering that the power spectrum density ground unrest that stress bends micro-cantilever improves 1 order of magnitude, improves 4 orders of magnitude (with m than the measurable ground unrest of conventional atom force microscope
2/ Hz is unit), directly can measure the thermomechanical vibration signal of micro-cantilever, not need the conversion factor from four-quadrant photosignal to vibration displacement signal, embody the feature of this utility model device high precision and practicality.
Below in conjunction with drawings and the specific embodiments, the utility model is described in further detail.
Accompanying drawing explanation
Fig. 1 is the high precision micro-cantilever thermal vibration signal measurement apparatus index path of the present embodiment;
Fig. 2 is the light incident assembly local index path of the present embodiment;
Fig. 3 is incident assembly local index path (side view) of light of the present embodiment;
Fig. 4 considers micro-cantilever stress the thermomechanical noise power spectral curve ground unrest bent and the ground unrest comparison diagram not considering this situation.
Embodiment
As Figure 1-3, a kind of high precision micro-cantilever thermal vibration signal measurement apparatus, comprise the incident assembly 1 of light, first interferes arm light path detection components 2 and second to interfere arm light path detection components 3, wherein, the incident assembly of described light comprises laser instrument 11, be successively set on the polarizer 12 on laser instrument 11 paths direction, Glan-Taylor prism 13, first slide 14, spherical spectroscope group 15, first convergent lens 16, two kalzit beam deviation device 17 and level crossing 18, micro-cantilever 4 is placed on the focal plane of the first convergent lens 16, in the present embodiment, described laser instrument 11 adopt wavelength be 630nm He-Ne laser instrument swash, light is before inciding Glan-Taylor prism 13, first be polarized through the polarizer 12 and become polarized light.First slide 14 is 1/2nd slides, and the first slide 14 is mainly used in regulating the relative light intensity of the two bundle polarized lights inciding micro-cantilever 4; Spherical spectroscope group 15 is made up of 2 spherical spectroscopes, described pair of kalzit beam deviation device 17 comprises the kalzit beam deviation device of 2 mounted on top, in 45 ° of angles between 2 kalzit beam deviation device optical axises, the thickness of single kalzit beam deviation device is 1mm, linearly polarized light is divided into two bundle polarized lights through two kalzit beam deviation device 17, two bundle polarized light rising angles are 2 °, two bundle polarized light level intervals are 140um, and the optical axis of described pair of kalzit beam deviation device 17 is 45 ° than the polarization direction of incident polarized light.Described linearly polarized light produces the tip 41 (E that two bunch polarized lights impinge perpendicularly on micro-cantilever 4 after two kalzit beam deviation device 17
tip) and substrate 42 (E
ref) on.Two kalzit beam deviation device 17 is between micro-cantilever 4 and the first comvengent prism 16 and be irremovable.For being added to the upper light intensity being incident upon micro-cantilever, the focal length that can arrange the first convergent lens 16 is 25 millimeters ~ 35 millimeters.In the present embodiment, described linearly polarized light through the focal length of the first convergent lens 16 be 30mm.Described level crossing 18 is movably arranged on above the first convergent lens 16 by rotating shaft 19, rotating shaft and X are to parallel, level crossing 18 can adjust its degree of tilt according to the incident angle of two bundle polarized lights, degree of tilt is generally 0 ~ 5 °, for ensureing that incident ray goes back to tip 41 and the substrate 42 of micro-cantilever by original optical path.
The principle of work of the incident assembly of above-mentioned light: the laser of laser instrument 11 becomes the higher linearly polarized light of degree of polarization through the polarizer 12 Glan-Taylor prism 13 that enters to the rear, then enter in spherical spectroscope group 15 through the first slide 14, after spherical spectroscope group 15, linearly polarized light changes incident direction, first assemble through the first convergent lens 16, then after two kalzit beam deviation device 17, light splitting becomes the orthogonal two bundle polarized lights in polarization direction, on the tip 41 impinging perpendicularly on micro-cantilever 4 respectively and substrate 42, the excitation that micro-cantilever 4 is subject to thermonoise produces thermomechanical vibration, make the two bundle polarized light E inciding its tip 41 and substrate 42
tipand E
refextra phase is produced poor after reflection, two bundle polarization lasers arrive level crossing 18 through two kalzit beam deviation device 17, first convergent lens 16 successively after micro-cantilever reflection, after level crossing 18 reflects, turn back along original optical path, again reflect through micro-cantilever 4, the light splitting of two kalzit beam deviation device 17, the first convergent lens 16 assemble in beam of laser, be then divided into two bundle polarized lights through spherical spectroscope group 15.
Described first interferes arm light path detection components 2 to comprise is successively set on the second slide 21, second convergent lens 22, first spectroscope 23 on paths direction and 2 photodiode D1, D2 in parallel.Wherein, the second slide 21 is 1/4th slides.Described second interferes arm light path detection components 3 to comprise is successively set on the 3rd convergent lens 31, second spectroscope 32 on paths direction and 2 photodiode D3, D4 in parallel.In the present embodiment, described first spectroscope 23 and the second spectroscope 32 are specially kalzit beam deviation device, and its optical axis rotates 45 ° than the optical axis of two kalzit beam deviation device 17; In interference arm, polarized light is after the light splitting of kalzit beam deviation device, and two bundle polarized lights project on 2 photodiodes respectively, and the horizontal range of two bundle polarization lasers is 0.5mm.
Above-mentioned first interferes arm light path detection components 2 and second to interfere arm light path detection components 3 principle of work: polarized light is a branch of incides the first interference arm light path detection components 2 for two bundles that spherical spectroscope group 15 penetrates, and is divided into 2 bundle polarized lights to incide photodiode D1, D2 successively through the second slide 21, second convergent lens 22, first spectroscope 23; Another bundle incides the second interference arm light path detection components 3, is divided into 2 bundle polarized lights to incide photodiode D3, D4 successively through the 3rd convergent lens 31, second spectroscope 32.After light signal is converted to electric signal by photoelectric detective circuit, obtain the phase differential of two bundle reflected ray polarized lights by calculating two path signal.The calculating of phase differential can adopt the method for Fast Fourier Transform (FFT) to calculate in the simulation softwares such as MATLAB.And according to formula
obtain the thermal vibration amplitude of micro-cantilever, thus obtain its thermal vibration power spectrum.Wherein
for the phase differential of the most advanced and sophisticated two bundle reflect polarized light of micro-cantilever, λ is the wavelength of laser, and d is the amplitude of micro-cantilever thermal vibration.
The effect of the second slide 21 is artificially added at the phase place of the polarized light converging to micro-cantilever tip 41
object makes final two to interfere the light intensity contrast ratio of arm photodiode to become the circle that mould is 2 π, and its polar angle is reflect polarized light E
tipand E
refphase differential.
As shown in Figure 1-2, including polarization direction is
direction and
the light intensity of the incident ray polarized light in direction is
become after spherical spectroscope group 15 changes incident direction
and direction of vibration edge is formed after two kalzit beam deviation device 17
the first incident ray polarized light E in direction
tip, and direction of vibration edge
the second incident ray polarized light E in direction
ref.Wherein, the first incident ray polarized light E
tip1incide on the tip of micro-cantilever, and the second incident ray polarized light E
refincide on the substrate of micro-cantilever.The tip of micro-cantilever makes the first incident ray polarized light E because of thermal vibration
tipreflected light comparatively the second incident ray polarized light E
refreflected light produce phase differential.Light intensity after two bundle reflected ray polarized lights are gathered together is
after spherical spectroscope group 15, the light intensity that two bundles detect polarized light is
in interference arm, the light intensity of two photodiodes can be expressed as:
N is interference arm (n=1,2),
ψ
1=0 (without 1/4th slides),
(having 1/4th slides).The light intensity contrast ratio of each interference arm is:
Namely
what final measurement obtained is a mould is the unit circle of 2 π, and its polar angle is the phase differential of two bunch polarized lights.The information of micro-cantilever thermomechanical vibration displacement is directly obtained by the polar angle of measuring unit's circle.Be different from a conventional atom force microscope beam of laser by certain angle focus on micro-cantilever tip its deformation is measured, the utility model proposes with two bunch polarization lasers difference vertical convergences on micro-cantilever, the thermomechanical vibration of micro-cantilever makes to be incident on most advanced and sophisticated polarized light and produces extra phase differential relative to another polarized light, afterwards by the interference of two bundle reflect polarized light, achieve and the high precision of atomic force microscope micro-cantilever thermomechanical vibration signal is directly measured, Fig. 4 is the power spectral density plot of the thermomechanical vibration signal that the utility model patent records, can find out and in power spectrum density, be low to moderate 1 × 10 based on the ground unrest of the utility model patent laser quadrature phase differential interference method to micro-cantilever thermomechanical vibration measurement
-28m
2/ Hz, than not considering that the power spectrum density ground unrest that stress bends micro-cantilever improves 1 order of magnitude, improves 4 orders of magnitude (with m than the measurable ground unrest of conventional atom force microscope
2/ Hz is unit), 1Hz-40kHz frequency separation achieves the measurement to thermomechanical vibration signal.Be in high-precision level in the resolution of thermonoise, occupy industry world lead level.
Above-described embodiment and graphic and non-limiting product form of the present utility model and style, any person of an ordinary skill in the technical field, to its suitable change done or modification, all should be considered as not departing from patent category of the present utility model.
Claims (10)
1. a high precision micro-cantilever thermal vibration signal measurement apparatus, it is characterized in that: comprise the incident assembly of light, first interferes arm light path detection components and second to interfere arm light path detection components, wherein, the incident assembly of described light comprises laser instrument, be successively set on the polarizer on the laser light path direction of propagation, prism, first slide, spherical spectroscope group, first convergent lens, two kalzit beam deviation device and level crossing, micro-cantilever is placed on the focal plane of the first convergent lens, the laser of laser instrument plays the prism that enters to the rear through the polarizer becomes linearly polarized light, then enter in spherical spectroscope group through the first slide, after spherical spectroscope group, linearly polarized light changes incident direction, first assemble through the first convergent lens, then after two kalzit beam deviation device, light splitting becomes the orthogonal two bundle polarized lights in polarization direction, on the tip inciding micro-cantilever respectively and substrate, the excitation that micro-cantilever is subject to thermonoise produces thermomechanical vibration, make to incide its two bundle polarized lights generation extra phase that are most advanced and sophisticated and substrate poor, two bundle polarized lights pass through two kalzit beam deviation device successively after micro-cantilever reflection, first convergent lens arrives level crossing, after flat mirror reflects, turn back along original optical path, again reflect through micro-cantilever, the light splitting of two kalzit beam deviation device, first convergent lens is assembled in beam of laser, then through spherical spectroscope component be two bundle polarized lights, two bundle polarized lights interfere arm light path detection components through first respectively, second interferes the spectroscope light splitting in arm light path detection components to become four bundle polarized lights, four bundle polarized lights project in four photodiodes respectively, carry out phase difference measurement.
2. a kind of high precision micro-cantilever thermal vibration signal measurement apparatus as claimed in claim 1, is characterized in that: described first interferes arm light path detection components to comprise the second slide be successively set on paths direction, the second convergent lens, the first spectroscope and 2 photodiodes in parallel; Described second interferes arm light path detection components to comprise the 3rd convergent lens be successively set on paths direction, the second spectroscope and 2 photodiodes in parallel.
3. a kind of high precision micro-cantilever thermal vibration signal measurement apparatus as claimed in claim 2, it is characterized in that: the first spectroscope device second spectroscope all adopts kalzit beam deviation device, the optical axis of described kalzit beam deviation device rotates 45 ° than the optical axis of two kalzit beam deviation device; After first spectroscope device second spectroscope light splitting, two bundle polarized lights project on 2 photodiodes respectively, and the horizontal range of two bundle polarization lasers is 0.5 mm.
4. a kind of high precision micro-cantilever thermal vibration signal measurement apparatus as claimed in claim 1, is characterized in that: described laser instrument is He-Ne laser instrument; Described prism is Glan-Taylor prism.
5. a kind of high precision micro-cantilever thermal vibration signal measurement apparatus as claimed in claim 1, is characterized in that: described spherical spectroscope group is made up of 2 spherical spectroscopes; Described first slide is 1/2nd slides.
6. a kind of high precision micro-cantilever thermal vibration signal measurement apparatus as claimed in claim 1, it is characterized in that: described level crossing is movably arranged on above the first convergent lens by rotating shaft, level crossing can adjust its degree of tilt according to the incident angle of two bundle polarized lights, ensures that incident ray goes back to tip and the substrate of micro-cantilever by original optical path.
7. a kind of high precision micro-cantilever thermal vibration signal measurement apparatus as claimed in claim 1, it is characterized in that: described pair of kalzit beam deviation device comprises the kalzit beam deviation device of 2 mounted on top, in 45 ° of angles between 2 kalzit beam deviation device optical axises, the thickness of single kalzit beam deviation device is 1 mm, linearly polarized light is divided into two bundle polarized lights through two kalzit beam deviation device, two bundle polarized light rising angles are 2 °, two bundle polarized light level intervals are 140 um, the optical axis of described pair of kalzit beam deviation device is 45 ° than the polarization direction of incident polarized light.
8. a kind of high precision micro-cantilever thermal vibration signal measurement apparatus as claimed in claim 1, is characterized in that: the described pair of kalzit beam deviation device is between micro-cantilever and the first convergent lens and for irremovable; Linearly polarized light produces on the tip and substrate that two bundle polarized lights impinge perpendicularly on micro-cantilever after two kalzit beam deviation device.
9. a kind of high precision micro-cantilever thermal vibration signal measurement apparatus as claimed in claim 1, is characterized in that: described linearly polarized light through the focal length of the first convergent lens be 30 mm.
10. a kind of high precision micro-cantilever thermal vibration signal measurement apparatus as claimed in claim 2, is characterized in that: described second slide is 1/4th slides.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520239723.7U CN204556094U (en) | 2014-09-24 | 2015-04-20 | A kind of high precision micro-cantilever thermal vibration signal measurement apparatus |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410493468.9A CN104330147A (en) | 2014-09-24 | 2014-09-24 | Micro-cantilever thermal shock signal measuring apparatus |
| CN2014104934689 | 2014-09-24 | ||
| CN201520239723.7U CN204556094U (en) | 2014-09-24 | 2015-04-20 | A kind of high precision micro-cantilever thermal vibration signal measurement apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204556094U true CN204556094U (en) | 2015-08-12 |
Family
ID=52404917
Family Applications (7)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410493468.9A Pending CN104330147A (en) | 2014-09-24 | 2014-09-24 | Micro-cantilever thermal shock signal measuring apparatus |
| CN201520239723.7U Expired - Fee Related CN204556094U (en) | 2014-09-24 | 2015-04-20 | A kind of high precision micro-cantilever thermal vibration signal measurement apparatus |
| CN201510187250.5A Pending CN104819935A (en) | 2014-09-24 | 2015-04-20 | Micro-cantilever heat vibration signal measuring device |
| CN201510188879.1A Pending CN104833411A (en) | 2014-09-24 | 2015-04-20 | High-precision micro-cantilever thermal vibration signal measuring device |
| CN201520237515.3U Expired - Fee Related CN204666496U (en) | 2014-09-24 | 2015-04-20 | Micro-cantilever thermal vibration signal measurement apparatus |
| CN201510187246.9A Pending CN104819767A (en) | 2014-09-24 | 2015-04-20 | Low noise micro-cantilever beam thermal vibration signal measuring device |
| CN201520238841.6U Expired - Fee Related CN204556093U (en) | 2014-09-24 | 2015-04-20 | A kind of low noise micro-cantilever thermal vibration signal measurement apparatus |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410493468.9A Pending CN104330147A (en) | 2014-09-24 | 2014-09-24 | Micro-cantilever thermal shock signal measuring apparatus |
Family Applications After (5)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510187250.5A Pending CN104819935A (en) | 2014-09-24 | 2015-04-20 | Micro-cantilever heat vibration signal measuring device |
| CN201510188879.1A Pending CN104833411A (en) | 2014-09-24 | 2015-04-20 | High-precision micro-cantilever thermal vibration signal measuring device |
| CN201520237515.3U Expired - Fee Related CN204666496U (en) | 2014-09-24 | 2015-04-20 | Micro-cantilever thermal vibration signal measurement apparatus |
| CN201510187246.9A Pending CN104819767A (en) | 2014-09-24 | 2015-04-20 | Low noise micro-cantilever beam thermal vibration signal measuring device |
| CN201520238841.6U Expired - Fee Related CN204556093U (en) | 2014-09-24 | 2015-04-20 | A kind of low noise micro-cantilever thermal vibration signal measurement apparatus |
Country Status (1)
| Country | Link |
|---|---|
| CN (7) | CN104330147A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104833411A (en) * | 2014-09-24 | 2015-08-12 | 绍兴文理学院 | High-precision micro-cantilever thermal vibration signal measuring device |
| CN108088474A (en) * | 2016-11-21 | 2018-05-29 | 横河电机株式会社 | Oscillatory type converter |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6697560B2 (en) * | 2015-12-23 | 2020-05-20 | エーエスエムエル ネザーランズ ビー．ブイ． | Metrology method and apparatus |
| CN106052840B (en) * | 2016-05-25 | 2018-10-23 | 清华大学深圳研究生院 | A kind of sound detection device and sound detection method based on the weak measurement of quantum |
| CN105928605B (en) * | 2016-05-30 | 2018-10-23 | 清华大学深圳研究生院 | The method, apparatus of sound field information and underwater sonic transducer in a kind of detection water |
| CN113776641B (en) * | 2021-07-01 | 2023-07-21 | 江汉大学 | Device and method for monitoring vibration of droplet target generator |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2419594Y (en) * | 2000-03-30 | 2001-02-14 | 中国科学院上海光学精密机械研究所 | Optical instrument for measuring amplitudes of object vibration |
| CN101261139B (en) * | 2008-03-26 | 2010-07-21 | 中国科学院光电技术研究所 | Array micro-joist unit deflection angle measuring systems |
| JP5336921B2 (en) * | 2009-05-11 | 2013-11-06 | 株式会社 光コム | Vibration measuring apparatus and vibration measuring method |
| CN103323094B (en) * | 2013-06-24 | 2014-12-03 | 中国航空工业集团公司北京长城计量测试技术研究所 | Heterodyne laser interference angle vibration measuring method |
| CN103383247B (en) * | 2013-07-30 | 2016-08-10 | 中国计量科学研究院 | A kind of Systems for optical inspection and device |
| CN104330147A (en) * | 2014-09-24 | 2015-02-04 | 绍兴文理学院 | Micro-cantilever thermal shock signal measuring apparatus |
-
2014
- 2014-09-24 CN CN201410493468.9A patent/CN104330147A/en active Pending
-
2015
- 2015-04-20 CN CN201520239723.7U patent/CN204556094U/en not_active Expired - Fee Related
- 2015-04-20 CN CN201510187250.5A patent/CN104819935A/en active Pending
- 2015-04-20 CN CN201510188879.1A patent/CN104833411A/en active Pending
- 2015-04-20 CN CN201520237515.3U patent/CN204666496U/en not_active Expired - Fee Related
- 2015-04-20 CN CN201510187246.9A patent/CN104819767A/en active Pending
- 2015-04-20 CN CN201520238841.6U patent/CN204556093U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104833411A (en) * | 2014-09-24 | 2015-08-12 | 绍兴文理学院 | High-precision micro-cantilever thermal vibration signal measuring device |
| CN108088474A (en) * | 2016-11-21 | 2018-05-29 | 横河电机株式会社 | Oscillatory type converter |
Also Published As
| Publication number | Publication date |
|---|---|
| CN204666496U (en) | 2015-09-23 |
| CN104819767A (en) | 2015-08-05 |
| CN204556093U (en) | 2015-08-12 |
| CN104330147A (en) | 2015-02-04 |
| CN104833411A (en) | 2015-08-12 |
| CN104819935A (en) | 2015-08-05 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN204556094U (en) | A kind of high precision micro-cantilever thermal vibration signal measurement apparatus | |
| CN109781633A (en) | A kind of the white light Microscopic Interferometric Measuring System and method of available spectral information | |
| CN102176022B (en) | Method for measuring young modulus by adopting multi-beam laser heterodyne distance measurement device | |
| CN103226007A (en) | SPR phase measurement method for measuring thickness of nano metal film | |
| CN102175376A (en) | Multi-laser-beam heterodyne micro-impulse-measuring device and method | |
| CN109490278A (en) | The rotary SPR of triangle microprism tests optical chip | |
| CN102353916B (en) | Method for measuring magnetoconstriction coefficient through multi-beam laser heterodyne secondary harmonic method | |
| CN102323555A (en) | Method for measuring magnetostriction constant by using multi-beam laser heterodynes | |
| CN102252794A (en) | Micro-impulse measuring method based on multi-beam laser heterodyne method and torsion pendulum method | |
| CN102338680B (en) | Method for measuring micro-impulse based on multi-beam laser heterodyne second harmonic method and torsion pendulum method | |
| CN102252622B (en) | Device and method for measuring glass thickness by adopting sinusoidal modulation multi-beam laser heterodyning of Doppler galvanometer | |
| CN102353490B (en) | Micro impulse measuring apparatus using torsion pendulum method of using Doppler vibrating mirror to carry out sine modulation on multiple-beam laser heterodyne and method thereof | |
| CN109883350A (en) | A kind of high precision measuring system and measurement method of abnormal curved surface inside configuration pattern | |
| CN109490279A (en) | The rotary SPR sensorgram chip of D-shaped microtrabeculae mirror | |
| CN102331235A (en) | Device and method for measuring thickness of glass through multi-beam laser heterodyne second harmonic method | |
| CN104655029B (en) | A kind of position phase reinforced membranes method for measuring thickness and system | |
| CN110285766A (en) | A method of nano-level thin-membrane thickness is measured using spin of photon Hall effect | |
| Yan-Chao et al. | Linear frequency modulation multi-beam laser heterodyne measurement for the glass thickness | |
| CN102253075B (en) | Device and method for measuring metal linear expansion coefficient based on multi-beam laser heterodyne second harmonic | |
| CN1782695B (en) | Reflective measurement equipment for band gap characteristic of periodic micron and nano structure | |
| CN204612666U (en) | A kind of position phase reinforced membranes thickness measurement system | |
| CN209513047U (en) | A kind of micro- ladder reflecting mirror and spectrometer for static Fourier transform spectrometer | |
| CN108120382A (en) | For measuring the SPR differential phae measuring methods of nano level metal film thickness | |
| CN102353593B (en) | Device for measuring young modulus by doppler vibrating mirror sinusoidal modulation multi-beam laser heterodyne and method thereof | |
| CN102252912B (en) | Method for measuring Young modulus through Doppler vibrating mirror sinusoidal modulation of multi-beam laser heterodyne second harmonic |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150812 Termination date: 20160420 |