CN112763451A - Terahertz Raman spectrometer - Google Patents
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- CN112763451A CN112763451A CN202011547050.3A CN202011547050A CN112763451A CN 112763451 A CN112763451 A CN 112763451A CN 202011547050 A CN202011547050 A CN 202011547050A CN 112763451 A CN112763451 A CN 112763451A
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- 238000001069 Raman spectroscopy Methods 0.000 title claims abstract description 54
- 230000005284 excitation Effects 0.000 claims abstract description 10
- 239000000126 substance Substances 0.000 abstract description 5
- 229920002521 macromolecule Polymers 0.000 abstract description 4
- 239000000835 fiber Substances 0.000 abstract 1
- 238000010183 spectrum analysis Methods 0.000 abstract 1
- 230000003595 spectral effect Effects 0.000 description 11
- 238000001514 detection method Methods 0.000 description 10
- 239000006185 dispersion Substances 0.000 description 8
- 238000001228 spectrum Methods 0.000 description 5
- 238000005259 measurement Methods 0.000 description 4
- 230000004075 alteration Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 210000002381 plasma Anatomy 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 230000007547 defect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 238000005079 FT-Raman Methods 0.000 description 1
- 238000001237 Raman spectrum Methods 0.000 description 1
- 201000009310 astigmatism Diseases 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 230000001052 transient effect Effects 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
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- G—PHYSICS
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3581—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using far infrared light; using Terahertz radiation
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/65—Raman scattering
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N2021/0106—General arrangement of respective parts
- G01N2021/0112—Apparatus in one mechanical, optical or electronic block
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Abstract
The terahertz Raman spectrometer provided by the invention can be used for generating Raman excitation light carrying a terahertz waveband, sequentially passes through a band-pass filter and a trap filter combination, a second trap filter, a third trap filter, a first focusing lens, a Raman filter, an inlet hole, a front-end image quality lens group, a collimating reflector, a echelle grating, a reflective prism, a first focusing reflector, a rear-end image quality lens group, a micro reflector array, a second focusing reflector and a second focusing lens along the propagation direction of a Raman excitation light fiber and then is detected by a detector The field of the characteristic spectrum analysis of substances such as organisms and biological macromolecules.
Description
Technical Field
The invention relates to the technical field of spectral measurement, in particular to a terahertz Raman spectrometer.
Background
The raman spectrometer is an optical detection instrument based on a raman spectroscopy technology, and can be classified into a dispersion type raman spectrometer, a fourier transform raman spectrometer and a spatial heterodyne raman spectrometer according to the internal structure form thereof. In the structure, the bandpass filter is adopted to clean the line width of the laser, remove the spectral noise of the laser and ensure that a better laser beam can be obtained; the notch filter can simultaneously measure Stokes and anti-Stokes Raman spectral bands as low as 125px-1, and realizes the transmittance as high as about 95%; the combination of the band-pass filter and the notch filter plays an important role in low-wavenumber Raman spectrum measurement, and the purity and the quality of light are improved.
Terahertz is a new radiation source with many unique advantages; the wave band of the terahertz wave can cover the characteristic spectrum of substances such as semiconductors, plasmas, organisms, biological macromolecules and the like; the frequency band can deepen and expand the human knowledge of some basic scientific problems in physics, chemistry, astronomy, informatics and life science. Vibration and rotation of many biomacromolecules are in terahertz wave band, so that abundant biological and material information can be obtained by utilizing terahertz wave. And the terahertz energy is very small, can not damage substances, and has more advantages compared with X-rays.
Because terahertz wave band is wider, energy is weaker, and it is complicated to analyze the composition of matter simultaneously, therefore needs the spectrum system to have high spectral resolution, broadband and weak signal detection characteristics simultaneously concurrently. The existing dispersion type Raman spectrometer can be used in the field of terahertz detection, generally adopts a diffraction grating and CCD combined mode, and has the defects that the weak signal detection capability is limited by a CCD, the price is high and the like.
Disclosure of Invention
Therefore, it is necessary to provide a terahertz raman spectrometer for detecting a broadband weak signal with high spectral resolution in order to overcome the defects in the prior art.
In order to achieve the purpose, the invention adopts the following technical scheme:
a terahertz raman spectrometer comprising: the device comprises a laser (1), a reflector (2), a band-pass filter (3), an objective table (4), a band-pass filter and trap filter combination (5), a second trap filter (6), a third trap filter (7), a first focusing lens (8), a Raman filter (9), an inlet hole (10), a front-end image quality lens group (11), a collimating reflector (12), a middle-step grating (13), a reflective prism (14), a first focusing reflector (15), a rear-end image quality lens group (16), a micro-reflector array (17), a second focusing reflector (18), a second focusing lens (19) and a detector (20); wherein:
laser beams emitted by the laser (1) are reflected by the band-pass filter (3) and the reflector (2), then are incident to the band-pass filter and notch filter combination (5) and are reflected to the surface of a sample of the objective table (4) by the band-pass filter and notch filter combination (5), and Raman excitation light carrying a terahertz waveband is formed;
the Raman excitation light in the terahertz waveband is focused at an access hole (10) through the second notch filter (6), the third notch filter (7), the first focusing lens (8) and the Raman filter (9) after being transmitted by the band-pass filter and notch filter combination (5), the Raman light focused at the access hole (10) passes through the front-end image quality lens group (11) and the collimating mirror (12) and then becomes parallel light beams, the parallel light beams pass through the echelle grating (13) and the reflective prism (14) and then form cross dispersed light, the cross dispersed light is converged at the micro-mirror array (17) through the first focusing mirror (15) and the rear-end image quality lens group (16), the incident light beams are converged at the micro-mirror array (17) through the second focusing mirror (18) and the second focusing lens (19) after being subjected to wavelength gating by the micro-mirror array (17) And receiving.
In some of these embodiments, the major axes of the bandpass filter and notch filter combination (5), second notch filter (6), third notch filter (7), first focusing lens (8), and raman filter (9) are at the same height.
In some of these embodiments, the focal points of the first focusing lens (8), the raman filter (9), the front image quality mirror group (11), and the collimating mirror (12) coincide, and the entrance aperture (10) is located at the focal point.
In some of these embodiments, the micromirror array (17) is located at a common focal plane of the first focusing mirror (15) and the rear image quality mirror group (17).
In some of the embodiments, the front image quality lens group (11) is a combination of a cylindrical lens and a biconvex spherical lens, the collimating lens group (12), the first focusing mirror (15) and the second focusing mirror (18) are concave mirrors, and the rear image quality lens group (16) is a combination of a biconvex concave spherical lens.
In some of these embodiments, the detector (20) is a photomultiplier tube and is located at the common focal plane of the second focusing mirror (18) and the second focusing lens (19).
The invention adopts the technical scheme that the method has the advantages that:
the invention provides a terahertz Raman spectrometer, wherein a laser beam emitted by a laser (1) is reflected by a band-pass filter (3) and a reflector (2), then enters a band-pass filter and notch filter combination (5) and is reflected to the surface of a sample of an objective table (4) by the band-pass filter and notch filter combination (5) to form Raman excitation light carrying a terahertz waveband, and the Raman excitation light sequentially passes through the band-pass filter and notch filter combination (5), a second notch filter (6), a third notch filter (7), a first focusing lens (8), a Raman filter (9), an inlet hole (10), a front-end image quality lens group (11), a collimating reflector (12), a echelle grating (13), a reflective prism (14), a first focusing reflector (15) and a reflector (15) along the propagation direction of the terahertz Raman excitation light, The Raman spectrometer provided by the invention can be used in the detection field of semiconductors, plasmas, organisms, biological macromolecules and the like, cannot damage substances relative to X-rays, has the detection advantages of high spectral resolution, wide waveband, high sensitivity, low cost and the like in a terahertz waveband, and has a good application prospect in the fields.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.
Fig. 1 is a schematic structural diagram of a terahertz raman spectrometer provided in embodiment 1 of the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Example 1
Referring to fig. 1, a schematic structural diagram of a terahertz raman spectrometer provided in an embodiment of the present invention includes: the device comprises a laser (1), a reflector (2), a band-pass filter (3), an objective table (4), a band-pass filter and trap filter combination (5), a second trap filter (6), a third trap filter (7), a first focusing lens (8), a Raman filter (9), an inlet hole (10), a front-end image quality lens group (11), a collimating reflector (12), a middle-step grating (13), a reflective prism (14), a first focusing reflector (15), a rear-end image quality lens group (16), a micro-reflector array (17), a second focusing reflector (18), a second focusing lens (19) and a detector (20).
The optical path propagation path of the terahertz Raman spectrometer is as follows:
laser beams emitted by the laser (1) are reflected by the band-pass filter (3) and the reflector (2) and then are incident to the band-pass filter and notch filter combination (5) and are reflected to the surface of a sample of the objective table (4) by the band-pass filter and notch filter combination (5), so that Raman exciting light carrying a terahertz waveband is formed, and meanwhile interference of exciting wavelength on measurement is filtered to the maximum extent.
The terahertz Raman excitation light is transmitted by the band-pass filter and notch filter combination (5), and then is focused at an access hole (10) through the second notch filter (6), the third notch filter (7), the first focusing lens (8) and the Raman filter (9), the Raman light focused at the access hole (10) passes through the front-end image quality lens group (11) and the collimating mirror (12) and then becomes parallel light beams, the parallel light beams pass through the echelle grating (13) and the reflective prism (14) and then form cross dispersed light, the cross dispersed light is converged at the micro mirror array (17) through the first focusing mirror (15) and the rear-end image quality lens group (16), and the incident light beams are converged by the detector (20) after being subjected to wavelength gating by the micro mirror array (17). The light path utilizes the combination of the micro-reflector array and the photomultiplier to replace a CCD element, has a wavelength gating function and effectively improves weak signal detection capability.
It can be understood that the light emitted by the laser (1) can be irradiated on the sample by adjusting the angle of the reflector (2) by adjusting the band-pass filter (3) and the reflector (2) and the band-pass filter and notch filter combination (5).
In some preferred embodiments, the main axes of the band-pass filter and notch filter combination (5), the second notch filter (6), the third notch filter (7), the first focusing lens (8) and the raman filter (9) are at the same height, so as to ensure that the optical path propagates along a specified path.
It can be understood that the line width filtering is carried out on the incident laser under the action of the band-pass filter (3), so that the spectral noise of the laser is removed, and a better laser beam can be obtained; under the action of the Raman filter (9), Rayleigh scattered light in a light path can be filtered.
In some preferred embodiments, the focal points of the first focusing lens (8), the raman filter (9), the front image quality mirror group (11), and the collimating mirror (12) coincide, and the entrance aperture (10) is located at the focal point. Because the access hole is positioned at the focus, the signal light can maximally pass through the access hole, and the detection energy of the terahertz signal is improved.
Further, an echelle grating (13) is arranged along the direction of the collimated light of the collimating reflector (12); the reflective prism (14) is arranged along the longitudinal light dispersion direction of the echelle grating (13), and the purposes of wide spectrum range and high spectral resolution are achieved by utilizing the cross dispersion of the echelle grating (13) and the reflective prism (14); the echelle grating light is used as a main dispersion element, all the levels are overlapped together, after the transverse dispersion of the prism, all the levels are transversely separated, and a two-dimensional overlapped spectrum is formed on an image surface.
It can be understood that, in the above embodiment, the echelle grating light (13) is used as a main dispersion element, and after dispersion is performed by the reflective prism (14), a two-dimensional overlapped spectrum is formed on the image plane, so that the image plane has high resolution and weak signal transient measurement in a wide band.
In some preferred embodiments, the reflective prism (14) is formed by combining two material prisms, so that the influence of chromatic aberration can be effectively inhibited.
In some preferred embodiments, the micro-mirror array (17) is located at a common focal plane of the first focusing mirror (15) and the rear image quality mirror group (16), a wavelength gating function can be realized under the action of the micro-mirror array (17), and the identification of the instrument spectral dimension is realized by controlling the micro-mirror array (17), the detector (20) and the inversion of the corresponding pixels.
In some preferred embodiments, the front image quality lens group (11) is a combination of a cylindrical lens and a biconvex spherical lens, the collimating lens group (12), the first focusing mirror (15) and the second focusing mirror (18) are concave mirrors, and the rear image quality lens group (16) is a combination of a biconvex concave spherical lens.
It can be understood that, because the front end image quality lens group (11) is composed of a cylindrical lens and a biconvex spherical lens, the spherical aberration and astigmatism of the system can be effectively corrected, and the influence of the aberration on the spectral resolution of the instrument is suppressed.
The terahertz Raman spectrometer provided by the invention can be used in the detection fields of semiconductors, plasmas, organisms, biological macromolecules and the like, obtains rich biological and material information, does not damage substances relative to X-rays, has the detection advantages of high spectral resolution, wide band, high sensitivity, low cost and the like in a terahertz wave band, and has good application prospect in the fields.
Of course, the raman spectrometer of the present invention may have various changes and modifications, and is not limited to the specific structure of the above-described embodiment. In conclusion, the scope of the present invention should include those changes or substitutions and modifications which are obvious to those of ordinary skill in the art.
Claims (6)
1. A terahertz Raman spectrometer is characterized by comprising: the device comprises a laser (1), a reflector (2), a band-pass filter (3), an objective table (4), a band-pass filter and trap filter combination (5), a second trap filter (6), a third trap filter (7), a first focusing lens (8), a Raman filter (9), an inlet hole (10), a front-end image quality lens group (11), a collimating reflector (12), a middle-step grating (13), a reflective prism (14), a first focusing reflector (15), a rear-end image quality lens group (16), a micro-reflector array (17), a second focusing reflector (18), a second focusing lens (19) and a detector (20); wherein:
laser beams emitted by the laser (1) are reflected by the band-pass filter (3) and the reflector (2), then are incident to the band-pass filter and notch filter combination (5) and are reflected to the surface of a sample of the objective table (4) by the band-pass filter and notch filter combination (5), and Raman excitation light carrying a terahertz waveband is formed;
the Raman excitation light in the terahertz waveband is focused at an access hole (10) through the second notch filter (6), the third notch filter (7), the first focusing lens (8) and the Raman filter (9) after being transmitted by the band-pass filter and notch filter combination (5), the Raman light focused at the access hole (10) passes through the front-end image quality lens group (11) and the collimating mirror (12) and then becomes parallel light beams, the parallel light beams pass through the echelle grating (13) and the reflective prism (14) and then form cross dispersed light, the cross dispersed light is converged at the micro-mirror array (17) through the first focusing mirror (15) and the rear-end image quality lens group (16), the incident light beams are converged at the micro-mirror array (17) through the second focusing mirror (18) and the second focusing lens (19) after being subjected to wavelength gating by the micro-mirror array (17) And receiving.
2. The terahertz raman spectrometer according to claim 1, wherein the major axes of the band-pass filter and notch filter combination (5), the second notch filter (6), the third notch filter (7), the first focusing lens (8) and the raman filter (9) are at the same height.
3. The terahertz raman spectrometer according to claim 1, wherein the focal points of the first focusing lens (8), the raman filter (9), the front image quality mirror group (11), and the collimating mirror (12) coincide, and the entrance aperture (10) is located at the focal point.
4. The terahertz raman spectrometer according to claim 1, wherein the micromirror array (17) is located at a common focal plane of the first focusing mirror (15) and the back end image quality mirror group (17).
5. The terahertz raman spectrometer according to claim 1, wherein the front image quality lens group (11) is a combination of a cylindrical lens and a biconvex spherical lens, the collimating lens group (12), the first focusing mirror (15) and the second focusing mirror (18) are concave mirrors, and the rear image quality lens group (16) is a combination of a biconvex concave spherical lens.
6. The terahertz raman spectrometer according to claim 1, wherein the detector (20) is a photomultiplier tube and is located at a common focal plane of the second focusing mirror (18) and the second focusing lens (19).
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