CN210603594U - Spectrum appearance - Google Patents
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- CN210603594U CN210603594U CN201921563457.8U CN201921563457U CN210603594U CN 210603594 U CN210603594 U CN 210603594U CN 201921563457 U CN201921563457 U CN 201921563457U CN 210603594 U CN210603594 U CN 210603594U
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Abstract
The utility model discloses a spectrometer, which comprises a first slit, a collimation unit, a first dispersion unit, a focusing unit, a second slit, a second dispersion unit and a two-dimensional array detector which are arranged in sequence; the first slit is arranged on or near an object plane focus of the collimation unit; the second slit is arranged on or near an image plane focus of the focusing unit; incident light is subjected to secondary dispersion by the first dispersion unit and the second dispersion unit and then imaged to a receiving surface of the two-dimensional array detector, and a main section of the first dispersion unit is vertical to a main section of the second dispersion unit; the first slit is perpendicular to the main section of the first dispersive unit, the second slit is perpendicular to the main section of the second dispersive unit, and the first slit and the second slit are perpendicular to each other. The utility model discloses can make the light of different wavelength be the slope separation on the plane of two-dimensional array detector receiving face, eliminate close wavelength light and reflect the error that the target wavelength region brought in the testing process, reject stray light to the influence of test result.
Description
Technical Field
The utility model relates to a photoelectric test field, concretely relates to spectrum appearance.
Background
The spectrometer is used for measuring and analyzing spectral radiation power distribution and spectral composition equipment, and is widely applied to the fields of light source radiation measurement, color measurement, element identification, chemical analysis and the like. The fast spectrometer using array detector, such as CCD, diode array, etc. as detecting element can measure the spectral power distribution of the detected light source fast in millisecond time, and has been developed and widely used in recent decades. The stray light control level is one of the most important indexes for evaluating the fast spectrometer, and for the fast spectrometer, the stray light refers to other spectral components irradiated on a pixel corresponding to a certain wavelength point, and the size of the stray light determines the measurement accuracy of the array spectrometer. Stray light is mainly generated due to light radiation of the surrounding environment, overlapping of spectra of different orders, and defects of optical elements or reflections of non-optical elements.
The existing fast spectrometer based on the array detector can obtain the spectral power distribution of the whole wave band to be measured by one-time measurement, and although the measurement method has the advantages of high test speed and low cost, the stray light is large, and the accuracy is relatively low. In addition, when the grating is used as a dispersion element, because the zero-order spectral energy of the grating is the largest but the grating cannot generate dispersion, the spectrometer actually measures the first-order spectrum of the grating which generates dispersion, but because the energy of the grating is lower and limited to the sensitivity of the detector, the first-order spectrum can be ensured to be detected by the detector only by the incident light with larger energy; however, the energy of incident light is increased, the energy of the zero-order spectrum and the energy of the spectrum of other orders are also larger, and stray light inside the spectrometer is also more, so that the measurement accuracy is influenced.
SUMMERY OF THE UTILITY MODEL
Not enough to prior art, the utility model provides a spectrum appearance aims at solving prior art in stray light great, the relatively lower problem of the degree of accuracy.
The utility model discloses a spectrometer, which comprises a first slit, a collimation unit, a first dispersion unit, a focusing unit, a second slit, a second dispersion unit and a two-dimensional array detector, wherein the first slit, the collimation unit, the first dispersion unit, the focusing unit, the second slit, the second dispersion unit and the two-dimensional array detector are arranged according to the incident sequence of light; the first slit is arranged on or near an object plane focus of the collimation unit, and the second slit is arranged on or near an image plane focus of the focusing unit; the incident beam is subjected to secondary dispersion of the first dispersion unit and the second dispersion unit and then imaged to a receiving surface of the two-dimensional array detector, wherein the main section of the first dispersion unit and the main section of the second dispersion unit are perpendicular to each other; the first slit is perpendicular to a main section of the first dispersive unit, the second slit is perpendicular to a main section of the second dispersive unit, and the first slit and the second slit are perpendicular to each other. The utility model provides a first slit restriction gets into the light beam of spectrum appearance, simultaneously to follow-up optical system, has become substitutional, actual light source; the light beam passing through the first slit is collimated into a parallel light beam by the collimation unit and enters the first dispersion unit; the first dispersion unit disperses light in terms of wavelength at its main section; the focusing unit is used for focusing the dispersed light to enable the light to form a series of images of the first slits on a focal plane; the second slit has a function similar to that of the first slit, and is disposed in front of the second dispersion unit, and the second dispersion unit secondarily disperses the incident beam so that the light is further dispersed in the wavelength direction at its main section. The arrangement of the first slit and the second slit can be matched with the dispersion characteristics of the first dispersion unit and the second dispersion unit on one hand, so that the optimal light splitting effect is achieved; on the other hand, light rays outside the test wavelength range can be filtered out, and the test result is optimized.
The main cross section is an important characteristic plane for the dispersive element. The main section of a prism generally refers to the section of a light ray perpendicular to two refraction planes; the main cross-section of the grating generally refers to the plane perpendicular to the grating's score. The measured light is dispersed in wavelength along the main section. With conventional two-stage spectroscopic spectrometers, such as double monochromator spectrometers, the main cross-sections of the two dispersive elements are typically coplanar or parallel to obtain a relatively high resolution and to suppress stray light by the two-stage spectroscopy. However, the signal of the method is small after two-stage light splitting, and the measured signal-to-noise ratio is low.
The utility model discloses a spectrometer, through the perpendicular setting of first dispersion unit principal section and second dispersion unit principal section, can be so that the light source is the mutually perpendicular according to the direction that chromatic dispersion arranged and the direction that chromatic dispersion arranged according to the chromatic dispersion behind the second dispersion unit in the direction that the light was arranged through first dispersion unit, it produces the separation to cause the spectrum on the plane of two-dimensional array detector receiving face, when throwing the receiving face to two-dimensional array detector, can obtain according to the wavelength at the vertical direction evenly divided, the spectral image of horizontal direction slope separation. Through the secondary dispersion step to the incident light, the spectral distribution image projected to the receiving surface of the optical detector is different from the prior art, the spectrometer provided by the utility model can lead the lights with different wavelengths to be obliquely separated on the plane of the receiving surface of the two-dimensional array detector, eliminates the error that the light with similar wavelengths is reflected to the target wavelength area in the test process, and further eliminates the influence of stray light on the test result; and because the dispersion directions are different, the energy of the dispersed light is relatively large, and a high signal-to-noise ratio can be ensured.
In some alternative embodiments, the first and second dispersive elements are any combination of prisms and gratings. The first dispersion unit and the second dispersion unit are respectively a prism, a grating, a prism and a grating. Note that, the dispersive element is exemplified by a prism and a grating, but the dispersive element is not limited thereto, and other types of dispersive elements may be used instead.
Optionally, the first dispersion unit is a prism, and the second dispersion unit is a grating. The main sections of the prism and the grating are mutually vertical through position placement adjustment.
It should be noted that the first dispersion unit and the second dispersion unit do not need to move or rotate during the test process, and the test is fixed. If the test conditions or environments are changed, the first dispersion unit, the second dispersion unit and other components can be adjusted according to requirements.
In some optional embodiments, the first dispersion unit and/or the second dispersion unit are equilateral triangular prisms, and the equilateral triangular prisms are formed by gluing right-angled prisms with a vertex angle of 30 ° in left-handed and right-handed directions, respectively, that is, the equilateral triangular prisms.
Optionally, the equilateral triangular prism is made of quartz. Since quartz is an anisotropic crystal, quartz prisms have the disadvantages of birefringence and optical rotation. And the birefringence can be eliminated by the combination of the left-handed prism and the right-handed prism, and the optical axis of the crystal is parallel to the bottom edge.
The above alternative embodiments are particularly applicable to the measurement of the near ultraviolet spectrum.
In some optional embodiments, an optical fiber bundle is further disposed in front of the optical path of the second slit, wherein an optical input of the optical fiber bundle is disposed on or near the image focus of the focusing unit, and an optical output of the optical fiber is in butt joint with the second slit. The fiber optic bundle can optimize the light receiving efficiency while also filtering out wavelengths of light outside the test range by size limitation.
Optionally, the optical fiber bundle includes a plurality of optical fibers, and the optical fibers can be combined into any shape according to testing requirements.
In some alternative embodiments, the second slit is comprised of a fiber bundle. A plurality of optical fibers in the optical fiber bundle are combined into a long and narrow optical fiber bundle, the shape of the optical fiber bundle is similar to that of a slit, and the function of the slit is replaced.
In some alternative embodiments, the collimating unit and/or the focusing unit is a quartz lens, but not limited thereto.
In some optional embodiments, a color filter is further arranged in the light path before the two-dimensional array detector. The color filter can filter light with wavelength outside the wavelength band to be measured, and the measurement result is optimized. It should be noted that, the embodiment of the present invention does not specifically describe the type and the setting position of the color filter, and those skilled in the art can adjust the color filter according to the test requirement.
In some optional embodiments, the collimating unit and/or the focusing unit are integrated in the first dispersing unit. Optionally, the first dispersion unit is a concave grating. The concave grating combines the dispersion effect of the plane grating and the focusing imaging of the concave reflector, is beneficial to the simplification of a spectral measurement system, and has extra benefits in the far ultraviolet spectral measurement of less than 195 nm. The main cross section of the concave grating is generally a plane passing through the center of the concave grating and perpendicular to the notch of the grating.
Drawings
FIG. 1 is a schematic structural diagram of a double monochromator in the prior art;
fig. 2 is a schematic view of an optical path of a spectrometer provided in an embodiment of the present invention;
fig. 3 is a schematic main cross-sectional view of the first dispersion unit and/or the second dispersion unit according to the embodiment of the present invention;
fig. 4 is a schematic view of an optical path of another spectrometer provided in the embodiment of the present invention;
fig. 5 is a schematic structural diagram of a first dispersion unit according to an embodiment of the present invention;
fig. 6 is a schematic diagram of a secondary dispersion process of a spectrometer provided by an embodiment of the present invention;
fig. 7 is a schematic diagram of a spectral image of a spectrometer provided by an embodiment of the present invention;
fig. 8 is a schematic main cross-sectional view of another embodiment of the first and/or second dispersive unit according to the present invention;
fig. 9 is a schematic cross-sectional view of another embodiment of the first and/or second dispersive unit;
1 — a first slit; 2-a collimating unit; 3-a first dispersive unit; 4-a focusing unit; 5-a second slit; 6-a second dispersive unit; 7-two-dimensional array detector; 71-a receiving surface; 8-optical fiber bundle.
Detailed Description
Fig. 1 is a schematic structural diagram of a double monochromator in the prior art. Including an entrance slit S1First collimating cell O1First dispersive unit P1First imaging unit O2Middle slit S2Second collimating unit O3Second dispersion unit P2Second imaging unit O4And an exit slit S3. Wherein the first dispersion unit P1And a second dispersing unit P2Are all edgesMirrors, and both have the same dispersion direction. The above-provided double monochromator must make the first dispersion unit P during scanning, i.e. when moving from one spectral region to another spectral region1And a second dispersing unit P2While rotating.
Example 1
As shown in fig. 2, fig. 3 and fig. 8, the present invention provides a spectrometer, which includes a first slit 1, a collimating unit 2, a first dispersing unit 3, a focusing unit 4, a second slit 5, a second dispersing unit 6 and a two-dimensional array detector 7, which are sequentially disposed; the incident light is imaged to a receiving surface 71 of a two-dimensional array detector 7 after being subjected to secondary dispersion by the first dispersion unit 3 and the second dispersion unit 6. The first dispersion unit 3 is a prism, the second dispersion unit 6 is a grating, and the main cross-section of the first dispersion unit 3 (fig. 3) and the main cross-section of the second dispersion unit 6 (fig. 8) are perpendicular to each other. The first slit 1 is disposed at the object plane focus of the collimating unit 2, and the second slit 5 is disposed at the image plane focus of the focusing unit 4. The first slit 1 is perpendicular to the main cross section of the first dispersion unit 3, the second slit 5 is perpendicular to the main cross section of the second dispersion unit 6, and the first slit 1 and the second slit 5 are perpendicular to each other.
As shown in fig. 6, due to different refraction characteristics of light beams with different wavelengths, incident light is longitudinally dispersed along a main section of the incident light through a first dispersion unit 3, namely a prism, and then each dispersed light is further dispersed along a main section of the light beam through a second dispersion unit 6, namely a grating, so that each monochromatic light is uniformly separated in a vertical direction on a plane of a receiving surface 71 of the two-dimensional array detector according to the wavelength and is obliquely separated in a horizontal direction, and the receiving surface 71 of the incident two-dimensional array detector receives a spectral image which is obliquely distributed according to the wavelength, so that the effects of removing the influence of stray light on a measurement result and optimizing the accuracy of the test are achieved.
Fig. 7 is a schematic diagram of a spectral image of a spectrometer according to an embodiment of the present invention. After the light rays pass through the first dispersion unit 3 and the second dispersion unit 6, the light rays with different wavelengths in the incident light are enabled to be separated in an inclined mode on the plane of the receiving surface of the two-dimensional array detector. For example, the spectrometer measures light at 200-400nm, and at the receiving face of the two-dimensional array detector, the spectra are uniformly separated by wavelength in the vertical direction and are obliquely separated in the horizontal direction. For example, 200nm and 400nm light are respectively focused at diagonal corners, and light of intermediate wavelength is obliquely separated on or near diagonal lines.
Example 2
As shown in fig. 4, the present invention provides a spectrometer, which comprises a first slit 1, a collimating unit 2, a first dispersive unit 3, a focusing unit 4, a second slit 5, a second dispersive unit 6 and a two-dimensional array detector 7, which are sequentially arranged; the first slit 1 is arranged near the object plane focus of the collimation unit 2; the second slit 5 is provided near the image plane focus of the focusing unit 4; incident light is subjected to secondary dispersion of the first dispersion unit 3 and the second dispersion unit 6 and then imaged on a receiving surface 71 of a two-dimensional array detector 7 of the two-dimensional array detector; the first slit 1 is perpendicular to the main cross section of the first dispersion unit 3, the second slit 5 is perpendicular to the main cross section of the second dispersion unit 6, and the first slit 1 and the second slit 5 are perpendicular to each other. The first dispersion unit 3 is a prism, the second dispersion unit 6 is a grating, and the main cross-section of the first dispersion unit 3 (fig. 3) and the main cross-section of the second dispersion unit 6 (fig. 8) are perpendicular to each other. The first slit 1 is provided near the object plane focus of the collimating unit 2, and the second slit 5 is provided near the image plane focus of the focusing unit 4. The first slit 1 is perpendicular to the main cross section of the first dispersion unit 3, the second slit 5 is perpendicular to the main cross section of the second dispersion unit 6, and the first slit 1 and the second slit 5 are perpendicular to each other. An optical fiber bundle 8 is also arranged in front of the second slit 5, the optical fiber bundle 8 is also positioned near the image focus of the focusing unit 4, wherein one end of the optical fiber bundle 8 receives the light emitted from the focusing unit 4, and the other end is in butt joint with the second slit 5. The collimating unit 2 and the focusing unit 4 are quartz lenses. Two-dimensional array detector a color filter (not shown) is also provided in the light path before the two-dimensional array detector 7.
Example 3
As shown in fig. 5, the embodiment of the present invention is different from the above embodiments in that the first dispersion unit and/or the second dispersion unit is an equilateral triangular prism 31, wherein the equilateral triangular prism is formed by gluing two right- angled prisms 311 and 312 with a vertex angle of 30 °, and the two right-angled prisms are left-handed and right-handed, respectively. And the birefringence can be eliminated by the combination of the left-handed prism and the right-handed prism, and the optical axis is parallel to the bottom surface. This embodiment is suitable for uv spectroscopy.
Example 4
As shown in fig. 9, the present embodiment differs from the above embodiments in that the collimating unit and/or the focusing unit are integrated in the first dispersion unit 30. Specifically, the first dispersion unit 30 is a concave grating. The main cross-section of the concave grating is a plane xOy passing through the center O of the concave grating and perpendicular to the grating indentations. The main section of the concave grating is perpendicular to the main section of the second dispersion unit.
While the present invention has been described with reference to the embodiments, it will be understood by those skilled in the art that the above embodiments are for illustrative purposes only and are not intended to limit the scope of the present invention. It will be appreciated by those skilled in the art that modifications may be made to the above embodiments without departing from the scope and spirit of the invention. The scope of protection of the invention is defined by the appended claims.
Claims (8)
1. A spectrometer is characterized by comprising
The device comprises a first slit, a collimation unit, a first dispersion unit, a focusing unit, a second slit, a second dispersion unit and a two-dimensional array detector which are arranged in the order of light incidence;
the first slit is arranged on or near an object plane focus of the collimation unit; the second slit is arranged on or near an image plane focus of the focusing unit;
incident light is subjected to secondary dispersion by the first dispersion unit and the second dispersion unit and then imaged to a receiving surface of the two-dimensional array detector, wherein the main section of the first dispersion unit and the main section of the second dispersion unit are perpendicular to each other;
the first slit is perpendicular to a main cross section of the first dispersive unit, the second slit is perpendicular to a main cross section of the second dispersive unit, and the first slit and the second slit are perpendicular to each other.
2. The spectrometer of claim 1, wherein the first dispersive element and the second dispersive element are any combination of a prism and a grating.
3. The spectrometer of claim 1, wherein the first dispersion unit and/or the second dispersion unit is an equilateral triangular prism, wherein the equilateral triangular prism is formed by gluing two right-angle prisms with 30 ° apex angles, wherein the two right-angle prisms are left-handed and right-handed, respectively.
4. The spectrometer of claim 1, wherein an optical fiber bundle is disposed in front of the optical path of the second slit, wherein an optical input of the optical fiber bundle is disposed at or near the image focus of the focusing unit, and an optical output of the optical fiber is in butt joint with the second slit.
5. The spectrometer of claim 1, wherein the second slit is comprised of a fiber optic bundle.
6. The spectrometer of claim 1, wherein the collimating unit and/or focusing unit is a quartz lens.
7. The spectrometer of claim 1, wherein a color filter is further disposed in the light path before the two-dimensional array detector.
8. The spectrometer of claim 1, wherein the collimating unit and/or the focusing unit is integrated in the first dispersive unit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921563457.8U CN210603594U (en) | 2019-09-19 | 2019-09-19 | Spectrum appearance |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921563457.8U CN210603594U (en) | 2019-09-19 | 2019-09-19 | Spectrum appearance |
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| CN210603594U true CN210603594U (en) | 2020-05-22 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110736541A (en) * | 2019-09-19 | 2020-01-31 | 杭州远方光电信息股份有限公司 | spectrometers |
| CN114199377A (en) * | 2021-08-23 | 2022-03-18 | 南开大学 | Near-infrared nanometer enhanced spectrometer |
-
2019
- 2019-09-19 CN CN201921563457.8U patent/CN210603594U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110736541A (en) * | 2019-09-19 | 2020-01-31 | 杭州远方光电信息股份有限公司 | spectrometers |
| CN114199377A (en) * | 2021-08-23 | 2022-03-18 | 南开大学 | Near-infrared nanometer enhanced spectrometer |
| CN114199377B (en) * | 2021-08-23 | 2023-12-05 | 南开大学 | Near infrared nano enhanced spectrometer |
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