CN109579991B - Super-resolution polarization spectrum imaging device based on special-shaped immersion grating - Google Patents

Super-resolution polarization spectrum imaging device based on special-shaped immersion grating Download PDF

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CN109579991B
CN109579991B CN201811279266.9A CN201811279266A CN109579991B CN 109579991 B CN109579991 B CN 109579991B CN 201811279266 A CN201811279266 A CN 201811279266A CN 109579991 B CN109579991 B CN 109579991B
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grating
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immersion grating
shaped immersion
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CN109579991A (en
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唐茜
张淳民
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Xian Jiaotong University
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • G01J3/2823Imaging spectrometer
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • G01J3/0205Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0208Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • G01J3/04Slit arrangements slit adjustment
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12Generating the spectrum; Monochromators
    • G01J3/18Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • G01J3/447Polarisation spectrometry
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12Generating the spectrum; Monochromators
    • G01J2003/1208Prism and grating

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  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
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Abstract

The invention discloses a super-resolution polarization spectrum imaging device based on a special-shaped immersion grating, which comprises: the device comprises an incident slit, a collimating mirror-focusing lens, a special-shaped immersion grating, a focusing lens and a detector; the incident slit is arranged in front of the collimating mirror and the focusing lens; the special-shaped immersion grating is arranged behind the collimating mirror and the focusing lens; the focusing lens is arranged on a reflection light path of the special-shaped immersion grating; the number of the detectors is multiple; the detector is arranged behind the focusing lens and in front of the collimating mirror-focusing lens; wherein, the abnormal immersion grating is the abnormal immersion grating based on Brewster angle. The invention utilizes the polarizing characteristic of Brewster angle to obtain linearly polarized light so as to combine a polarizer and a grating into a whole; the spectral resolution can be improved by n2And n is the refractive index of the material of the special-shaped immersion grating, so that the application advantage of the immersion grating can be expanded from the infrared spectrum band to the visible spectrum band with relatively low material refractive index.

Description

Super-resolution polarization spectrum imaging device based on special-shaped immersion grating
Technical Field
The invention belongs to the technical field of polarization spectrum information, and particularly relates to a super-resolution polarization spectrum imaging device based on a special-shaped Immersion Grating (A-IG Grating).
Background
Many remote sensing tasks, especially those directed to monitoring the composition of the earth's atmosphere, typically require hyperfine spectral data to inversely analyze the scattering, transmission and absorption spectra of the earth's atmosphere, which requires instruments with very high spectral resolution, which typically use gratings as dispersive elements. From the principle of grating spectroscopy, it is known that high spectral resolution necessarily results in large optical system size while taking advantage of its high resolving power and wide spectral range. If the grating provides a large spectral angular dispersion, the size of the grating can be reduced, thereby reducing the size and weight of the entire device, which is characteristic of IG.
Compared with a classical reflection grating, the angular dispersion of a spectrum of IG can be greatly improved, namely, the dispersion angle can be increased, and under the condition that the relative aperture F/number is the same, the size of the grating serving as a pupil is linearly reduced along with the reduction of the focal length, and meanwhile, the spectrum resolving power required by indexes can still be achieved. On the premise of realizing the same or similar resolving power, the size of IG is reduced to 1/n compared with the size of a classical reflective grating, wherein n is the refractive index of an immersion medium. Currently, the immersion materials are silicon, germanium, etc. with refractive indices of about 3.4 and 4, respectively.
Dekker, 1987, proposed that profiled immersion gratings (A-IG) could be used to further improve spectral resolution. Later scholars also mentioned such concepts and applications, but currently there are various IG-based spectroscopy devices that are dominated by the plane of normal incidence for immersion mode applications and less for a-IG applications.
Because the spectral resolution improvement of IG and A-IG is proportional to the refractive index of the material, and the refractive index of the infrared spectrum material is higher, the spectral resolution of the material can be greatly improved in an IG mode, but for the visible spectrum section, the refractive index of the material is relatively lower, and the advantage of IG is not obvious, so that the IG is mainly used for the infrared spectrum section at present. However, a-IG can further improve the spectral resolution on the basis of IG, which will be beneficial to extend the advantages of the immersion mode to the visible spectrum. The spectral information and polarization information of IG-or a-IG-based polarization spectroscopy devices are typically obtained from two different sub-elements, respectively. At present, the application research of A-IG is not deep, and especially, a scheme of obtaining linearly polarized light by utilizing the polarizing characteristic of Brewster angle so as to combine a polarizer and a grating into a whole does not appear.
Disclosure of Invention
The invention aims to provide a super-resolution polarization spectrum imaging device based on a special-shaped immersion grating, and aims to solve the technical problems. The linearly polarized light is obtained by utilizing the polarizing characteristic of the Brewster angle, so that the polarizer and the grating are combined into a whole; the spectral resolution can be improved by n2And n is the refractive index of the material of the special-shaped immersion grating, so that the application advantage of the immersion grating can be expanded from the infrared spectrum band to the visible spectrum band with relatively low material refractive index.
In order to achieve the purpose, the invention adopts the following technical scheme:
a super-resolution polarization spectrum imaging device based on a special-shaped immersion grating comprises: the device comprises an incident slit, a collimating mirror-focusing lens, a special-shaped immersion grating, a focusing lens and a detector; the incident slit is arranged in front of the collimating mirror-focusing lens, and the incident light can enter the collimating mirror-focusing lens through the incident slit; the special-shaped immersion grating is arranged behind the collimating mirror-focusing lens, and emergent light of the collimating mirror-focusing lens can be shot into the special-shaped immersion grating; the focusing lens is arranged on a reflection light path of the special-shaped immersion grating, the reflection light of the special-shaped immersion grating can be shot into the focusing lens, and the emergent light dispersed by the special-shaped immersion grating can be shot into the collimating lens-the focusing lens; the number of the detectors is multiple; the detector is arranged behind the focusing lens and in front of the collimating mirror-focusing lens and used for collecting reflected light information of the special-shaped immersion grating passing through the focusing lens and emergent light information of the special-shaped immersion grating dispersed by the collimating mirror-focusing lens; wherein, the special-shaped immersion grating is a special-shaped immersion grating (BAIG) based on a Brewster angle.
Further, the method also comprises the following steps: a front optical system; the front optical system is arranged in front of the entrance slit; the incident light can be incident into the incident slit through the front optical system.
Further, the method also comprises the following steps: an entrance pupil; the entrance pupil is arranged in front of the front optical system, and the incident light can enter the front optical system after passing through the entrance pupil.
Further, the width size of the entrance slit is determined according to the selected pixel size of the detector; the incident slit enables pixels not to be overlapped, and the width of the incident slit is 0.8-0.9 of the size of the pixels.
Furthermore, the special-shaped immersion grating is obliquely arranged along the direction vertical to the incident surface.
Further, the inclination angle ranges from 2 to 9 °.
Furthermore, the refractive index of the special-shaped immersion grating is larger than 1.
Furthermore, the material of the special-shaped immersion grating is Si, Ge or Znse.
Further, the special-shaped immersion grating comprises: a substrate, a prism, and a grating.
Compared with the prior art, the invention has the following beneficial effects:
according to the polarization hyperspectral imaging device based on the special-shaped immersion grating, light beams with different wave bands are obtained through the special-shaped immersion grating, moving parts do not need to be arranged, and detection accuracy can be improved; the special-shaped immersion grating has stronger dispersion capability, can obtain larger resolution ratio only by smaller volume, and can solve the contradiction problem of high precision and light weight at present; in addition, the "polarizer" function is achieved by taking advantage of the property that Brewster's angle of incident light can produce fully linearly polarized reflected light. The invention can obtain the spectrum information through the grating, and can obtain the polarization information by generating the fully polarized light by using the Brewster angle, thereby simultaneously obtaining the polarization spectrum information and being suitable for the detection occasion with the rapid change of the spectrum and the polarization. The invention can effectively utilize the difference of the spectrum and the polarization characteristics of the target and the background, obviously improve the accuracy of target detection and scene identification and has higher detection and identification capability. The polarization hyperspectral imaging device based on the special-shaped immersion grating combines the important application value of polarization hyperspectral image information and many characteristics and unique advantages of the special-shaped immersion grating, integrates multiple detection capabilities of hyperspectrum, polarization and image, and is small, light and free of moving parts; the polarization state information acquisition system has the advantages of high spectral resolution, capability of acquiring polarization state information simultaneously, no channel crosstalk, small size, light weight and the like. Some existing spectrometers need moving parts to perform push-broom or tuning and the like to realize collection of spectrum signals in principle, and grating spectrometers do not need moving parts; for a common grating spectrometer, the spectral resolution is positively correlated with the size, and the size of the grating is very large in the application of realizing higher spectral resolution; the line size of the special-shaped immersion grating is 1/(n) of that of the common reflection grating under the condition of realizing the same resolution2) The size of the dispersion element is greatly reduced, and the sizes of the front optical element and the subsequent optical element which are matched with the dispersion element are also reduced, so that the high spectral resolution under small size and light weight is realized. The spectral resolution can be improved by n under the same conditions by using the A-IG of Brewster's angle, i.e. BAIG2And (4) doubling.
Further, the quality of the light incident on the BAIG can be optimized by providing a pre-optical system and an entrance pupil.
Furthermore, the BAIG is obliquely arranged along the direction vertical to the incident surface, the incident surface is a plane formed by incident light and a normal, the purpose of the oblique angle is to separate the incident light from the emergent light subjected to grating dispersion, and enough space is provided for placing subsequent optical elements, and the specific angle is different according to specific structural parameters.
Drawings
FIG. 1 is a schematic structural diagram of a self-polarizing super-resolution polarization spectrum imager based on a special-shaped immersion grating according to the present invention;
FIG. 2 is a schematic diagram of an operation structure of a special-shaped immersion grating;
FIG. 3 is a schematic diagram of the principle of Brewster's angle of incidence plane polarization in the present invention;
in fig. 1-2, 4 entrance pupils; 5 a front optical system; 6 an entrance slit; 7 collimator-focusing lens; 8 special-shaped immersion gratings (BAIG) based on Brewster angle; 9 a focusing lens; 10, a detector; 11 grating grooved surface.
Detailed Description
The invention is described in further detail below with reference to the figures and specific examples.
Referring to fig. 1 and fig. 2, a polarized hyperspectral imaging device based on a special-shaped immersion grating of the invention includes: an entrance pupil 4, a front optical system 5, an entrance slit 6, a collimator-focusing lens 7, a BAIG 8, a focusing lens 9 and a detector 10. The working principle of the special-shaped immersion grating selected by the invention is shown in figure 2 and comprises a substrate, a prism and a grating.
The incident light enters the front optical system 5 after passing through the entrance pupil 4, and the entrance pupil 4 is arranged at the front optical system 5; the front optical system 5 is provided in front of the entrance slit 6, and the incident light is incident on the entrance slit 6 via the front optical system 5. The entrance slit 6 is arranged in front of the collimating mirror-focusing lens 7, and the incident light can enter the collimating mirror-focusing lens 7 through the entrance slit 6; the BAIG 8 is arranged behind the collimating mirror 7, and emergent light of the collimating mirror 7 can be emitted into the BAIG 8; the reflected light reflected by the Brewster angle on the surface of the special-shaped immersion grating is completely P-shaped linearly polarized light and is emitted into a detector 10 through a focusing lens 9, and the detector 10 is used for collecting information of the polarized light. The transmitted light refracted on the surface of the special-shaped immersion grating passes through the prism medium to reach the grating groove surface 11 for dispersion and reflection, is emitted from the grating incidence surface, and is emitted into a detector 10 through the collimating mirror-focusing lens 7. The light is incident to the collimating mirror-focusing lens 7 from the incident slit 6, and reaches the optical path of the grating after being emitted, and the collimating mirror-focusing lens 7 acts as a collimating mirror. The light is dispersed by the grating and then enters the collimator lens-focusing lens 7 and then reaches the detector 10, and in the part of the light path, the collimator lens-focusing lens 7 acts as a focusing lens. The size of the entrance slit 6 is determined by the selected pixel size of the detector 10, and in order to ensure the imaging quality, the pixels are not overlapped, generally 0.8-0.9 of the pixel size. The BAIG 8 is obliquely arranged along the direction vertical to the incident plane, the oblique angle range is 2-9 degrees, and the incident plane is a plane formed by incident light and a normal; the purpose of the tilt angle is to separate incident light from the exit light dispersed by the grating, and to have enough space for placing subsequent optical elements, the specific angle is different according to specific structural parameters. The refractive index of the BAIG 8 material is greater than 1.
Referring to FIGS. 1 and 3, FIG. 3 is a schematic diagram of the principle of deflection of the Brewster angle incidence plane, where the incidence angle i is marked as i under the specific angle, i.e. Brewster anglebGenerally, according to the reflection theorem, the reflection angle is equal to the incident angle, so both the incident angle and the reflection angle are ib,r0For angle of refraction, in particular, for Brewster's angle of incidence, ib+r0=90°。n1And n2Respectively, the refractive indexes of the upper medium and the lower medium of the interface. The incident light beam includes two polarized lights (indicated by "\" and "·", respectively) whose vibration directions are perpendicular to each other, and when the incident light beam is incident at a Brewster angle, the transmitted light beam includes all "\" polarization components and a part of "·", and the reflected light beam includes only "·" polarization components, so that the reflected light beam is completely linearly polarized light. In the special-shaped immersion grating of FIG. 1, the angle theta between the incident light and the incident planeBNamely the Brewster angle, thereby realizing the self-polarizing function.
The light beam collimated by the preposed optical component or the preposed optical system in the imaging device of the invention is incident to the special-shaped immersion grating prepared by the high refractive index material, the included angle between the incident plane of the special-shaped immersion grating and the main optical axis is a Brewster angle, and the included angle is determined by the grating material. And the direction perpendicular to the incident plane (i.e. the plane formed by the incident light and the normal of the incident plane) has a certain angle of inclination (the value of the angle is that the incident light and the emergent light can be effectively separated, so that the subsequent optical assembly can be conveniently installed and placed, but the space is not excessively wasted). The emergent light dispersed by the grating enters a collimating mirror-focusing lens to reach a detector. The reflected light, which is reflected at the Brewster angle at the grating surface, is incident on the focusing lens to the detector. So far, the whole equipment can respectively obtain a spectral image and a polarization image. The whole device of the invention is provided with the grating which is used for acquiring the spectrum information and can acquire the polarization information by utilizing the polarizing characteristic of the Brewster angle, thereby simultaneously acquiring the polarization spectrum information; some spectrometers need to perform push-scanning or tuning on a moving part to realize the acquisition of spectrum signals in principle, and grating spectrometers are not needed; for a common grating spectrometer, the spectral resolution is positively correlated with the size, in an application of realizing higher spectral resolution, the size of the grating is very large, and the line size of the special-shaped immersion grating is 1/(n) of that of a common reflection grating under the condition of realizing the same resolution2) The size of the dispersion element is greatly reduced, and the sizes of the front optical element and the subsequent optical element which are matched with the dispersion element are also reduced, so that the high spectral resolution under small size and light weight is realized. And because this scheme further improves spectral resolution compared to ordinary immersion gratings, the "immersion" advantage of gratings can be extended from the infrared to the visible spectrum region where the material refractive index is relatively low.
The working principle of the invention is as follows:
the immersion grating principle was first proposed by Fraunhofer, Longhurst, who discussed immersion gratings in more detail. Compared with the common reflection grating, the angular dispersion of the spectrum can be greatly improved (the dispersion angle is increased), under the condition of the same relative aperture F/number,the size of the grating as a pupil also decreases linearly with decreasing focal length, while still achieving the desired spectral resolution. Dekker proposed in 1987 that a special-shaped Immersion grating (A-IG) can be used to further improve the spectral resolution, and the polarized hyperspectral imaging device based on the special-shaped Immersion grating of the embodiment of the invention consists of a front-mounted optical system, an entrance slit, a collimating mirror-focusing lens, a BAIG, a focusing lens and a detector. The entrance pupil is positioned at the front optical system, the light beam is incident from the front optical system and reaches the collimating mirror-focusing lens through the slit, the incident light beam is collimated, and the collimated light beam is incident to the BAIG. BAIG is different from common reflective grating in that dispersion occurs in high refractive index medium, and dispersion power, i.e. spectral resolution, can be improved by n2And n is the refractive index of the medium. The reflected light which is reflected by the Brewster angle on the surface of the special-shaped immersion grating is completely P-shaped linearly polarized light and is emitted into a detector through a focusing lens, and the detector is used for collecting information of the polarized light. The transmitted light refracted on the surface of the special-shaped immersion grating reaches the grooved surface of the grating through the prism medium to be dispersed and reflected, is emitted from the grating incidence surface, and is emitted into the detector through the collimating mirror-focusing lens to obtain spectral information.
The polarization spectrum imaging system based on the special-shaped immersion grating can simultaneously obtain linear polarization information and spectrum information, the resolving power is consistent with that of natural light, channel crosstalk does not exist, and the structure is stable; the method can effectively utilize the difference of the spectrum and the polarization characteristics of the target and the background, obviously improve the accuracy of target detection and scene identification, and has higher detection and identification capabilities and more obvious advantages. The polarized hyperspectral imaging device based on the special-shaped immersion grating combines the important application value of polarized hyperspectral image information and many characteristics and unique advantages of the immersion grating, integrates various detection capabilities of hyperspectrum, polarization and images, and is small, light and free of moving parts. In conclusion, the polarization imaging spectrometer has high spectral resolution, can simultaneously acquire polarization state information, and has the advantages of higher luminous flux, no channel crosstalk, small size, light weight and the like.
The parameters of the embodiment of the invention are as follows:
materials for profiled immersion gratings (BAIG) based on Brewster angle: the common materials are Si (the refractive index is about 3.4), Ge (the refractive index is about 4), Znse (the refractive index is about 2.4) and the like, the refractive index is expressed by n, and parameters are selected according to specific conditions and equipment design. Blaze angle: 63.5 degrees. Grating constant: d is 0.061982853 mm; the number of grooves: 16.1335 line pairs/mm. Front-end optical system: f38.2 mm, F/4, 2up0.075 degree × 0.375 degree 890.375 degree, slit with width of 0.05mm and length of 0.25mm, collimating mirror-focusing lens f1' -128 mm, F/4; a focusing lens: f. of2' -128 mm, F/4; the beam collimated by the collimating mirror-focusing lens is vertically incident to the BAIG, and in order to ensure that the beam incident to the BAIG is spatially separated from the beam emitted after dispersion, the BAIG is inclined outwards by 2.7 degrees in the direction vertical to the paper surface, namely in the direction vertical to the incident surface.
The embodiment of the invention relates to a self-polarizing super-resolution polarization spectrum imager, which integrates a polarizer and a grating into a whole, realizes the function of the polarizer by utilizing the characteristic that the Brewster angle of incident light can generate complete linear polarization reflected light, and can form a polarization spectrum imaging system with ultrahigh spectrum resolution. The reflected light entering the special-shaped immersion grating is completely polarized light, and the transmitted light entering the special-shaped immersion grating is dispersed on the grooved surface, so that the polarization and dispersion functions can be realized by using one optical element, and the target polarization and hyperspectral resolution image information can be obtained simultaneously. The invention has the characteristics of smaller structure, lighter weight, no moving part and stable structure. In addition, compared with the same-size classical reflection grating, the immersion grating can improve the spectral resolution by n times, n is the refractive index of the grating material, and is often applied to an infrared spectrum section with higher material refractive index2Therefore, the application advantage of the immersion grating can be expanded from the infrared spectrum band to the visible spectrum band with relatively low refractive index of the material. The invention can effectively utilize the difference of the spectrum and the polarization characteristics of the target and the background, obviously improve the accuracy of target detection and scene identification and has higher detection and identification capability.

Claims (7)

1. The utility model provides a super-resolution polarization spectrum imaging device based on abnormal shape immersion grating which characterized in that includes: the device comprises an incident slit (6), a collimating mirror-focusing lens (7), a special-shaped immersion grating, a focusing lens (9) and a detector (10);
the entrance slit (6) is arranged in front of the collimating mirror-focusing lens (7), and the incident light can enter the collimating mirror-focusing lens (7) through the entrance slit (6);
the special-shaped immersion grating is arranged behind the collimating lens-focusing lens (7), and emergent light of the collimating lens-focusing lens (7) can be emitted into the special-shaped immersion grating;
the focusing lens (9) is arranged on a reflection light path of the special-shaped immersion grating, the reflection light of the special-shaped immersion grating can be shot into the focusing lens (9), and emergent light dispersed by the special-shaped immersion grating can be shot into the collimating lens-focusing lens (7);
the number of the detectors (10) is multiple; the detector (10) is arranged behind the focusing lens (9) and in front of the collimating mirror-focusing lens (7), and the detector (10) is used for collecting reflected light information of the special-shaped immersion grating passing through the focusing lens (9) and emergent light information dispersed by the special-shaped immersion grating passing through the collimating mirror-focusing lens (7);
wherein, the special-shaped immersion grating is a special-shaped immersion grating (8) based on a Brewster angle;
the special-shaped immersion grating is obliquely arranged along the direction vertical to the incident surface;
the refractive index of the special-shaped immersion grating is larger than 1.
2. The super-resolution polarization spectrum imaging device based on the special-shaped immersion grating as claimed in claim 1, further comprising: a front optical system (5);
the front optical system (5) is arranged in front of the entrance slit (6); the incident light can enter the entrance slit (6) through the front optical system (5).
3. The super-resolution polarization spectrum imaging device based on the profiled immersion grating as claimed in claim 2, further comprising: an entrance pupil (4); the entrance pupil (4) is disposed in front of the front optical system (5), and incident light can enter the front optical system (5) after passing through the entrance pupil (4).
4. The super-resolution polarization spectrum imaging device based on the profiled immersion grating is characterized in that the width dimension of the entrance slit (6) is determined according to the selected pixel size of the detector (10); the incident slit (6) prevents the pixels from overlapping, and the width of the incident slit (6) is 0.8-0.9 of the size of the pixels.
5. The super-resolution polarization spectrum imaging device based on the profiled immersion grating as claimed in claim 1, wherein the inclination angle is in the range of 2 ° to 9 °.
6. The super-resolution polarization spectrum imaging device based on the special-shaped immersion grating as claimed in claim 1, wherein the material of the special-shaped immersion grating is Si, Ge or Znse.
7. The super-resolution polarization spectrum imaging device based on the special-shaped immersion grating as claimed in any one of claims 1 to 6, wherein the special-shaped immersion grating comprises: a substrate, a prism, and a grating.
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Publication number Priority date Publication date Assignee Title
CN103175612A (en) * 2013-03-04 2013-06-26 中国科学院长春光学精密机械与物理研究所 On-orbit polarization measuring system of satellite-borne imaging spectrometer
CN104215332A (en) * 2014-10-09 2014-12-17 苏州大学 Method and device for remotely sensing greenhouse gases
CN104568148A (en) * 2014-12-29 2015-04-29 苏州大学 Optical system for atmosphere CO2 hyper-spectrum imaging spectrometer

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IL201742A0 (en) * 2009-10-25 2010-06-16 Elbit Sys Electro Optics Elop Tunable spectral filter

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103175612A (en) * 2013-03-04 2013-06-26 中国科学院长春光学精密机械与物理研究所 On-orbit polarization measuring system of satellite-borne imaging spectrometer
CN104215332A (en) * 2014-10-09 2014-12-17 苏州大学 Method and device for remotely sensing greenhouse gases
CN104568148A (en) * 2014-12-29 2015-04-29 苏州大学 Optical system for atmosphere CO2 hyper-spectrum imaging spectrometer

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