CN102778293A - Optical path structure of small echelle grating spectrometer - Google Patents
Optical path structure of small echelle grating spectrometer Download PDFInfo
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- CN102778293A CN102778293A CN201210259560XA CN201210259560A CN102778293A CN 102778293 A CN102778293 A CN 102778293A CN 201210259560X A CN201210259560X A CN 201210259560XA CN 201210259560 A CN201210259560 A CN 201210259560A CN 102778293 A CN102778293 A CN 102778293A
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Abstract
The invention relates to an optical path structure of a small echelle grating spectrometer. The structure includes a condenser lens, an incident pinhole, a collimating lens, an echelle grating, a cross dispersion prism, a focusing lens, a cylindrical lens and an area-array detector; the collimating lens and the focusing mirror are spherical mirrors; the condenser lens makes an incident light beam focused to the incident pinhole; a light beam emitted from the incident pinhole irradiates the collimating lens; a parallel light reflected by the collimating lens directly is directly incident to the surface of the echelle grating; a light beam diffracted by the echelle grating irradiates the focusing lens through the reflection of the cross dispersion prism; and a focused light reflected by the focusing lens is received by the area-array detector after the achromatic treatment of the cylindrical lens. The optical path structure can be used for effectively balancing the contradiction between the high resolution and the small size of a conventional grating spectrometer and realizing the high spectral resolution with the structure of the small size and has the advantages of compact structure, small size, light weight, no moving parts, simultaneous measurement of wide spectral bands and the like.
Description
Technical field
The invention belongs to the spectrometric instrument technical field, relate to a kind of light channel structure of small light grating spectrograph.
Background technology
Spectral instrument is the basic test equipment that carries out spectral analysis, and along with the continuous development of modern science and technology, miniaturization, lightweight, portability and high resolving power become the main flow trend of spectral instrument development gradually.(Kunming University of Science and Technology's Master's thesis " a kind of design concept of small light grating spectrograph and parameter analysis " in 2008; 2009; The 17th volume 1 phase " microminiature echelette spectrometer Design for optical system and optimization ", 2010, the 3rd 3 phases of volume; " the parasitic light design that disappears of miniature flattened field near infrared spectrometer ") reported that about " small light grating spectrograph ", the spectrometer of this form is made up of condenser, incident pin hole, collimating mirror, grating, focus lamp and linear array detector.Condenser focuses on the incident pin hole with incident beam, and from the light beam irradiates collimating mirror of incident pin hole outgoing, the directional light of collimating mirror reflection is directly incident on grating surface, is received by linear array detector after the light beam line focus mirror reflection of optical grating diffraction.This spectrometer is received by linear array detector owing to adopt grating that the polychromatic light of incident is decomposed into spectrum, and resolution is lower.
Summary of the invention
The technical matters that the present invention will solve provides the light channel structure of a kind of compact conformation, volume is little, in light weight, spectral resolution is high small-sized echelle spectrometer.
In order to solve the problems of the technologies described above, the light channel structure of small-sized echelle spectrometer of the present invention comprises condenser, incident pin hole, collimating mirror, echelle grating, crossed dispersion prism, focus lamp, cylindrical mirror and planar array detector; Said collimating mirror and focus lamp all adopt spherical mirror; Condenser focuses on the incident pin hole with incident beam; Light beam irradiates collimating mirror from the outgoing of incident pin hole; The directional light of collimating mirror reflection is directly incident on the echelle grating surface; The light beam of echelle grating diffraction shines on the focus lamp after the reflection of crossed dispersion prism surface, and converging of focus lamp reflection received by planar array detector after light looses through the cylindrical mirror colour killing.
When collimating mirror and focus lamp are spherical mirror, introduce cylindrical mirror, reduced behind dispersion system, to be imaged on the astigmatism of sagittal surface, can effectively improve the spectrally resolved power of spectrometer.
Good effect of the present invention: the crossed dispersion form that the echelle grating of employing principal dispersion matches with prism; Solved owing to echelle grating is used the inferior problem that overlaps each other of the order of diffraction that causes for senior time; Not only be beneficial to the diffraction efficiency that improves echelle grating, be beneficial to the rear end spectral line simultaneously and demarcate and the algorithm realization.The light intensity that obtains is two-dimentional spectrogram with the spectrogram of wavelength change; Can handle the spectrum picture of actual photographed; Two-dimension spectrum is reduced to the one dimension spectral information; Contradiction between balance traditional raster spectrometer high resolving power and small size has realized the high spectral resolution under the small size version effectively.
The light channel structure of small-sized echelle spectrometer of the present invention has unique advantages; Its compact conformation, volume is little, in light weight, speed of detection is fast, easy to use, energy-consuming consumptive material is few, stable performance, can produce in batches; Particularly it is easy to realize modularization, can carry out the Multi-channel Real-time analysis, has rig-site utilization and is worth; And it also has the secondary development performance, can be used for further making other analytical instrument.Small size, the light channel structure of high resolving power echelle spectrometer can also become the optimal selection of laser induced plasma Atomic Emission Spectrometer AES, inductively coupled plasma atomic emission spectrometer.
Description of drawings
Below in conjunction with accompanying drawing and embodiment the present invention is done further explain.
Fig. 1 is the light channel structure synoptic diagram of small-sized echelle spectrometer of the present invention.
Embodiment
As shown in Figure 1, the light channel structure of the small-sized echelle spectrometer of the present invention comprises condenser 1, incident pin hole 2, collimating mirror 3, echelle grating 4, crossed dispersion prism 5, focus lamp 6, cylindrical mirror 7 and planar array detector 8; Said collimating mirror 3 all adopts spherical mirror with focus lamp 6; The light beam that light source sends converges at incident pin hole 2 through condenser 1 foremost; Place the reflecting sphere mirror as collimating mirror 3 along incident pin hole 2 emergent ray directions apart from incident pin hole f place; Place echelle grating 4 in collimating mirror 3 reflected light directions; Crossed dispersion prism 5 is positioned on the echelle grating 4 diffraction light directions, and the reflecting sphere mirror that shines the place ahead through crossed dispersion prism 5 beam reflected is a focus lamp 6, and the focused light of focus lamp 6 outgoing focuses on the planar array detector 8 after through cylindrical mirror 7.The centre-height of all minute surfaces (comprising condenser 1, collimating mirror 3, echelle grating 4, crossed dispersion prism 5, focus lamp 6, cylindrical mirror 7) and the height such as center of incident pin hole 2.
Element of the present invention:
Light-source system:, used convex lens that focal length and clear aperature suit as condenser 1 in order to guarantee the beam intensity that light source penetrates and the relative aperture of apparatus subject.
Colimated light system: be made up of incident pin hole 2 and collimating mirror 3, incident pin hole 2 is positioned on the focal plane of collimating mirror 3, and what of rear end optical system luminous energy the restriction of the size of incident pin hole 2 get into.The light beam that incident pin hole 2 places send becomes parallel beam and invests dispersion system behind collimating mirror 3.
Dispersion system: the effect of dispersion system is that the polychromatic light with incident is decomposed into spectrum; Because there is overlap problem in the parallel beam spectrum after echelle grating 4 from colimated light system; Need to adopt crossed dispersion prism 5 that spectrum is separated, this structure has improved the spectral resolution of system widely.
Imaging system: will focus on through each wavelength light beam behind the crossed dispersion on the focal plane of focus lamp 6, when collimating mirror 3 and focus lamp 6 were spherical mirror, the back increased the influence that cylindrical mirror 7 is eliminated astigmatism.
Receiving system: adopt planar array detector to receive the spectral information on the imaging system focal plane.
, planar array detector obtains the two-dimentional spectrogram of light intensity through amplifying, detect, writing down again after converting light signal into electric signal with wavelength change.Spectrum picture to actual photographed is handled, and two-dimension spectrum is reduced to the one dimension spectral information, can realize the accurate demarcation of wavelength.
Embodiment 1
In the light channel structure of the present invention, collimating mirror 3 is spherical reflector with focus lamp 6, and radius-of-curvature is 200.76mm, and off-axis angle is respectively 5.2 °, 8.63 °, and focal length is 100mm; It is the reflective delineation echelle grating of 1/54.49mm that echelle grating 4 adopts grating constant d, and incident angle is 46 °; For make things convenient for the light path arrangement with echelle grating along 3 ° of optic normal direction rotations (be grating deflection angle: γ=3 °); Crossed dispersion prism 5 is made up of the fused quartz of 10 ° of semiapex angles, and incident angle is 21.01 °; Planar array detector 8 adopts e2v back lighting type CCD 47-10AIMA chip, and spectral response is very high in resolution 1024 * 1024 pixels, 180-300nm scope.
Through the optical design software trace, the theoretical resolution of the small-sized echelle spectrometer light channel structure that present embodiment constitutes can reach 0.015nm200nm.
Embodiment 2
Present embodiment changes collimating mirror in the light channel structure of invention 3 and focus lamp 6 radius-of-curvature into 200.66mm, carries out the optics trace under all constant situation of other structural parameters, and systemic resolution is 0.023nm200nm.
Embodiment 3
Present embodiment changes the off-axis angle of collimating mirror 3 in the light channel structure of invention into 5.1 °, under all constant situation of other structural parameters, carries out the optics trace equally, and systemic resolution is 0.025nm200nm.
Embodiment 4
Present embodiment changes the off-axis angle of collimating mirror 6 in the light channel structure of invention into 8.53 °, under all constant situation of other structural parameters, carries out the optics trace equally, and systemic resolution is 0.020nm200nm.
Embodiment 5
Present embodiment changes collimating mirror 3 focal lengths in the light channel structure of invention into 100.2mm, under all constant situation of other structural parameters, carries out the optics trace equally, and systemic resolution is 0.033nm200nm.
Embodiment 6
Present embodiment changes echelle grating 4 incident angles in the light channel structure of invention into 45.92 °, under all constant situation of other structural parameters, carries out the optics trace equally, and systemic resolution is 0.018nm200nm.
Embodiment 7
Present embodiment changes echelle grating 4 off-axis angles in the light channel structure of invention into 3.08 °, under all constant situation of other structural parameters, carries out the optics trace equally, and systemic resolution is 0.021nm200nm.
Embodiment 8
Present embodiment changes crossed dispersion prism 5 semiapex angles in the light channel structure of invention into 9.8 °, under all constant situation of other structural parameters, carries out the optics trace equally, and systemic resolution is 0.023nm200nm.
Embodiment 9
Present embodiment changes crossed dispersion prism 5 incident angles in the light channel structure of invention into 20.31 °, under all constant situation of other structural parameters, carries out the optics trace equally, and systemic resolution is 0.017nm200nm.
Embodiment 10
Present embodiment changes cylindrical mirror 7 in the light channel structure of invention into 149mm by radius-of-curvature, under all constant situation of other structural parameters, carries out the optics trace equally, and systemic resolution is 0.019nm200nm.
Through above embodiment any parameter in the transform optics structure among a small circle, Systems Theory resolution all can become greatly, explains that each optical parametric of light channel structure of the embodiment of the invention 1 all reaches optimum value.The one-piece construction of instrument can adopt aluminum alloy materials, and inner structure is small and exquisite simple, satisfies the requirement of lightweight, portability.
The present invention is the light channel structure that portable laser induced plasma atomic spectrograph, inductively coupled plasma atomic emission spectrometer provide a kind of small-sized echelle spectrometer.The cylindrical mirror and the area array CCD that it is characterized in that adopting crossed dispersion form, colour killing to loose receive two-dimension spectrum information; This version not only can guarantee the request for utilization of resolution; Optimized the system optics performance, and dwindled the volume of spectrometer greatly, be easy to carry.Balance spectral instrument small size and high resolving power, compose contradiction between the direct-reading entirely.
Claims (2)
1. the light channel structure of a small-sized echelle spectrometer comprises condenser (1), incident pin hole (2), collimating mirror (3), focus lamp (6); Said collimating mirror 3 all adopts spherical mirror with focus lamp 6; It is characterized in that also comprising echelle grating (4), crossed dispersion prism (5), cylindrical mirror (7) and planar array detector (8); Said condenser (1) focuses on incident pin hole (2) with incident beam; Light beam irradiates collimating mirror (3) from incident pin hole (2) outgoing; The directional light of collimating mirror (3) reflection is directly incident on echelle grating (4) surface; The light beam of echelle grating (4) diffraction shines on the focus lamp (6) after crossed dispersion prism (5) surface reflection, and converging of focus lamp (6) reflection received by planar array detector (8) after light looses through cylindrical mirror (7) colour killing.
2. the light channel structure of small-sized echelle spectrometer according to claim 1 is characterized in that the radius-of-curvature of said collimating mirror (3) and focus lamp (6) is 200.76mm, and off-axis angle is respectively 5.2 °, 8.63 °, and focal length is 100mm; It is the reflective delineation echelle grating of 1/54.49mm that echelle grating (4) adopts grating constant d, and incident angle is 46 °, and the grating deflection angle is γ=3 °; Crossed dispersion prism (5) is made up of the fused quartz of 10 ° of semiapex angles, and incident angle is 21.01 °; Planar array detector (8) adopts e2v back lighting type CCD 47-10AIMA chip.
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103487144A (en) * | 2013-08-29 | 2014-01-01 | 中国科学院长春光学精密机械与物理研究所 | Double-grating beam splitting system packaging structure stable in stray light eliminating ability |
| CN107101723A (en) * | 2017-06-13 | 2017-08-29 | 钢研纳克检测技术有限公司 | High-resolution echelle spectrometer two dimension deviation spectrum analysis and bearing calibration |
| CN107290051A (en) * | 2017-06-16 | 2017-10-24 | 天津大学 | Disappeared astigmatism method and device based on post lens-type echelle spectrometer |
| CN107976254A (en) * | 2017-11-15 | 2018-05-01 | 中国科学院长春光学精密机械与物理研究所 | A kind of fiber spectrometer and multichannel optical fiber spectrometer device |
| CN110632058A (en) * | 2019-11-04 | 2019-12-31 | 宁波源禄光电有限公司 | Small light splitting device for Raman spectrum analysis |
| CN110793954A (en) * | 2019-11-05 | 2020-02-14 | 中国科学院苏州生物医学工程技术研究所 | Portable Raman blood identification system based on echelle grating |
| CN112763451A (en) * | 2020-12-24 | 2021-05-07 | 中国科学院长春光学精密机械与物理研究所 | Terahertz Raman spectrometer |
| CN114034386A (en) * | 2021-11-07 | 2022-02-11 | 天津大学 | Full-spectrum direct-reading atomic emission spectrometer combining electric arc excitation and echelle grating light splitting |
| CN116593002A (en) * | 2023-07-18 | 2023-08-15 | 北京卓立汉光仪器有限公司 | Automatic focusing spectrometer |
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Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103487144A (en) * | 2013-08-29 | 2014-01-01 | 中国科学院长春光学精密机械与物理研究所 | Double-grating beam splitting system packaging structure stable in stray light eliminating ability |
| CN103487144B (en) * | 2013-08-29 | 2016-01-13 | 中国科学院长春光学精密机械与物理研究所 | The double grating beam splitting system encapsulating structure that eliminate stray light ability is stable |
| CN107101723A (en) * | 2017-06-13 | 2017-08-29 | 钢研纳克检测技术有限公司 | High-resolution echelle spectrometer two dimension deviation spectrum analysis and bearing calibration |
| CN107290051A (en) * | 2017-06-16 | 2017-10-24 | 天津大学 | Disappeared astigmatism method and device based on post lens-type echelle spectrometer |
| CN107976254A (en) * | 2017-11-15 | 2018-05-01 | 中国科学院长春光学精密机械与物理研究所 | A kind of fiber spectrometer and multichannel optical fiber spectrometer device |
| CN110632058A (en) * | 2019-11-04 | 2019-12-31 | 宁波源禄光电有限公司 | Small light splitting device for Raman spectrum analysis |
| CN110632058B (en) * | 2019-11-04 | 2022-05-03 | 宁波源禄光电有限公司 | Small light splitting device for Raman spectrum analysis |
| CN110793954A (en) * | 2019-11-05 | 2020-02-14 | 中国科学院苏州生物医学工程技术研究所 | Portable Raman blood identification system based on echelle grating |
| CN112763451A (en) * | 2020-12-24 | 2021-05-07 | 中国科学院长春光学精密机械与物理研究所 | Terahertz Raman spectrometer |
| CN114034386A (en) * | 2021-11-07 | 2022-02-11 | 天津大学 | Full-spectrum direct-reading atomic emission spectrometer combining electric arc excitation and echelle grating light splitting |
| CN116593002A (en) * | 2023-07-18 | 2023-08-15 | 北京卓立汉光仪器有限公司 | Automatic focusing spectrometer |
| CN116593002B (en) * | 2023-07-18 | 2023-09-12 | 北京卓立汉光仪器有限公司 | Automatic focusing spectrometer |
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Application publication date: 20121114 |