CN102183304A - Optical path structure of cylindrical anastigmatic grating dispersion type imaging spectrometer - Google Patents
Optical path structure of cylindrical anastigmatic grating dispersion type imaging spectrometer Download PDFInfo
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- CN102183304A CN102183304A CN2011100231479A CN201110023147A CN102183304A CN 102183304 A CN102183304 A CN 102183304A CN 2011100231479 A CN2011100231479 A CN 2011100231479A CN 201110023147 A CN201110023147 A CN 201110023147A CN 102183304 A CN102183304 A CN 102183304A
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Abstract
The invention discloses an optical path structure of a cylindrical anastigmatic grating dispersion type imaging spectrometer. The optical structure comprises a slit (1), a collimating objective lens (2) for reflecting light passing through the slit to a grating (3), and the grating (3) for splitting the light; an imaging objective lens group consists of a spherical reflector (4) and a cylindrical reflector (5); and the split light is imaged to a photosensitive surface of a detector (6) to perform sub-spectral imaging. The spectrometer uses fully reflective optical elements, and all the reflecting elements are plated with high-reflectivity membranes. The structure is characterized by introducing a cylindrical mirror to reduce sagittal surface astigmatism of the grating dispersion type imaging spectrometer, so the spectral resolution and the imaging resolution of the spectrometer are greatly improved.
Description
Technical field
The present invention relates to spectrometer, relate in particular to the light channel structure of grating dispersion type imaging spectrometer.
Background technology
Imaging spectral technology originates from the multispectral romote sensing technology of phase at the beginning of the seventies in last century, and develops along with the needs of earth observation application, is the emerging field that combines imaging technique and spectral technique.Imager obtains the image information of target, pursues high definition and studies its spatial character; Spectrometer then is separated into the radiation of target the spectral radiance of different wave length, pursues high spectral resolution power, thereby target is measured and analyzed.The crystallization of these two kinds of technological incorporation---imaging spectrometer can obtain the high spectrum image of target specific band to be measured, has the advantage of collection of illustrative plates unification.
The color dispersion-type imaging spectrometer generally uses grating as beam splitter, and the color dispersion-type imaging optical spectrometer light path structure of total-reflection type has advantages such as spectrally resolved power height, wavelength band are wide, good reliability.But the requirement of light path unshielding has determined the color dispersion-type spectrometer of total-reflection type to belong to off-axis optical system, is traditional Qie Erni-Tener type spectrometer light channel structure as depicted in figs. 1 and 2: comprise slit.The aberration of this class formation is bigger, can't realize higher spectrally resolved power and imaging resolving power.
Summary of the invention
The present invention relates to the anastigmatic grating dispersion type of cylinder imaging spectrometer, comprise slit, restriction enters the beam size of spectrometer beam splitting system, the spectrally resolved power of its width decision spectrometer, it highly determines imaging dimension field angle, i.e. the imaging scope of single width spectrum picture of spectrometer;
Collimator objective will reflex to by the light of slit on the grating;
The parallel polychromatic light that grating, collimation object lens reflect back is divided into the parallel beam group of corresponding angle of diffraction by wavelength;
The image-forming objective lens group, the photosurface place that the parallel beam group after the beam split is focused to detector carries out the imaging of branch spectrum;
Detector, two-dimensional detector can receive the spectrum picture that comprises one dimension spectral information and one-dimensional space information simultaneously.
Wherein, each optical element in the optical system all adopts the total-reflection type optical element except that slit, and all reflecting elements all plate high reflection film.
Wherein, the preferred 10～150mm of spectrometer clear aperature; Preferred 0.01 °～2.0 ° of spectrum Wei Shunshishichangjiao; The scanning field of view angle is in 10 °～160 ° scopes.
Wherein, the image-forming objective lens group is made of jointly spherical reflector and cylindrical mirror.
Wherein, introduce cylindrical mirror and eliminate the astigmatism of imaging spectrometer in sagittal surface.
In order to solve the not high problem of color dispersion-type spectrometer imaging resolving power of traditional total-reflection type, the light channel structure of spectrometer is carried out the innovation of three places:
The first is on the basis that does not increase optical element, plane mirror between image-forming objective lens and the detector is replaced with cylindrical mirror, utilize the imaging characteristics of the cylinder face type astigmatism of imaging spectrometer image quality maximum of eliminating the effects of the act, rather than utilize the very big toroidal mirror of difficulty of processing.
It two is to make between collimator objective and the slit distance be not equal to the focal length of collimator objective, with this distance parameter as optimizing parameter, not directional light promptly through the light beam behind the collimator objective collimation, but having the non-parallel light of certain angle of divergence or convergent angle, this design makes whole optical system have more optimization variable.
It three is according to the imaging spectrometer aberration shown in the formula 1 and the relation of optical texture, calculates one group of structure of aberration minimum, and the meaning of symbol representative as shown in Figure 1 in the formula 1.By formula 1 can derive when collimator objective 2 be 2 times of (l of collimation objective focal length to the distance of grating 3
1=2f '
1), and grating 3 is 2 times of (l of image-forming objective lens group focal length to the distance of image-forming objective lens 4
2=2f '
2) time imaging spectrometer aberration coefficients minimum, so the aberration of imaging spectrometer is also just minimum.
This light channel structure can improve the spectrally resolved power and the imaging resolving power of spectrometer greatly, and difficulty of processing is little, and cost is lower.
Description of drawings
Figure 1 shows that Qie Erni-Tener type spectrometer principle schematic;
Figure 2 shows that the light channel structure synoptic diagram of traditional imaging spectrometer;
Figure 3 shows that the light channel structure synoptic diagram of the traditional imaging spectrometer that has plane mirror;
Figure 4 shows that light channel structure synoptic diagram according to imaging spectrometer of the present invention.
(size of each parts and distance etc. are not drawn in strict accordance with ratio in the accompanying drawing).
Embodiment
Below, describe in detail according to a preferred embodiment of the invention in conjunction with the accompanying drawings.Figure 4 shows that scanning imagery spectrometer light channel structure synoptic diagram according to the embodiment of the present invention.The optical system of this spectrometer comprises a) slit 1, and b) collimator objective 2, and c) plane grating 3, and d) the image-forming objective lens group 4,5, and e) detector 6.
Be observed real image that object places slit 1 place or be observed object at slit 1 place, light that object or object real image are sent carries out beam split by collimator objective 2 collimated reflected through slit 1 to plane grating 3, focus on imaging on the photosurface of detector 6 by focusing objective len group 4,5 then.
As seen from Figure 2, traditional Qie Erni-type optical routing two spherical reflectors in Tener are as collimator objective 2 and image-forming objective lens 4, and beam splitter is a plane grating 3, and image-forming objective lens 4 is imaged on spectrum picture on the detector 5.Fig. 3 also is traditional Qie Erni-Tener type light path.The installation of detector for convenience reflexes to imaging on the detector 6 at plane mirror 5 of installation on the structure shown in Figure 2 for about 45 ° with light deflection usually.This light channel structure is used widely in non-imaging spectrometer, yet because the big characteristics of this light path astigmatism have hindered its application in imaging spectrometer.The present invention introduces cylindrical mirror, and improves imaging resolving power and spectrally resolved power that light channel structure improves imaging spectrometer, and design philosophy is as follows:
At first can calculate by the Aberration Theory analysis, when collimator objective 2 to the distance of grating 32 times for the collimation objective focal length, and when grating 3 is 2 times of image-forming objective lens group focal length to the distance of image-forming objective lens group 4, the aberration minimum of imaging spectrometer, this moment, astigmatism was main residual aberration, and astigmatism has hindered the raising of imaging spectrometer imaging resolving power greatly.According to the generation reason branch of astigmatism, the present invention has adopted two kinds of methods to eliminate astigmatism:
1, the basic reason of generation astigmatism is the off-axis angle of optical element in Qie Erni-Tener type light path, finds that according to the astigmatism formula of deriving the big more astigmatism of off-axis angle is just big more, and therefore reducing off-axis angle is the important means that reduces the imaging spectrometer astigmatism.And the present invention has increased the distance of grating to collimator objective and image-forming objective lens, and this adjustable extent for collimator objective and image-forming objective lens off-axis angle provides bigger space, can be that off-axis angle is littler, has fundamentally reduced the generation of astigmatism.
2, the immediate cause that produces astigmatism is that the meridian focal length and the sagitta of arc focal length of optical system do not wait, cause meridianal image surface not overlap with sagittal image surface, these characteristics according to astigmatism replace with Fig. 3 midplane catoptron 5 as the cylindrical mirror among Fig. 45, and cylindrical mirror has in sagittal surface and is not 0 curvature.Like this, can find the best image planes position of meridian ellipse earlier when initial designs, some light spot shape on image planes should be the elongated strip of length along sagitta of arc direction on the slit at this moment.Change the curvature of cylindrical mirror in sagittal surface then, just can dwindle the length of image planes glazing spot greatly, finally obtain the circular light spot of minor radius.
In addition, when placing under the non-parallel rayed, grating can produce astigmatism, therefore the present invention finely tunes the position of slit, make slit be slightly less than the focal length of collimator objective apart from the distance of collimator objective, thereby make grating under the less light beam irradiates of the angle of divergence, produce the astigmatism that certain astigmatism is offset image planes, finally obtain the spectrum picture of little aberration.
Catoptron and grating in the present embodiment are reflection type optical element, and reflecting surface plating high reflection film, and the mirror surface type is sphere or cylinder does not use bigger secondary of difficulty of processing or high order curved mirror more.
Below each optical element in the spectrometer of present embodiment is elaborated.
A) slit 1
The effect of slit 1 is the beam size that restriction enters the spectrometer beam splitting system, according to the imaging spectrometer principle, and the spectrally resolved power of its width decision spectrometer, it highly determines imaging dimension field angle, i.e. the imaging scope of single width spectrum picture of spectrometer.
B) collimator objective 2
The main effect of collimator objective 2 is that the beam collimation that will enter the spectrometer beam splitting system by entrance slit reflexes on the plane grating 3.In the present embodiment, collimator objective adopts sphere face type, and the light beam of process collimator objective can be directional light or diverging light.
C) plane grating 3
Plane grating is the core parts of overall optical spectrometer as the beam splitter of color dispersion-type spectrometer.According to the diffraction grating light-dividing principle, the parallel polychromatic light of grating pair is divided into the parallel beam group with different diffraction angle by the wavelength difference, and every bundle directional light is monochromatic light, thereby realizes the chromatic dispersion of spectrum.
D) focusing objective len group 4 and 5
Focusing objective len 4 and 5 effect are to focus on the photosurface of detector through the parallel beam group of having carried object plane information that grating 6 is told, thereby realize the branch spectrum imaging to object.In the present embodiment, its face type adopts spherical reflector and cylindrical mirror.
E) detector 6
Use the two-dimensional array detector can receive the spectrum picture that comprises one dimension spectral information and one-dimensional space information simultaneously, can obtain the spectroscopic data cube of two-dimensional space by scanning, finally obtain the high spectrum image of target to be measured through rebuilding spectrum spectrum dimension.
Embodiment of imaging spectrometer according to present embodiment is as follows, the overall system parameter:
1) wavelength band: 200nm～1000nm;
2) grating line number: 1200lp/mm;
3) spectrally resolved power: be better than 1.0nm;
4) focal length: 192.85;
5) imaging resolving power: 141p/mm;
The concrete optical parametric of each optical element is as shown in table 1 in the optical system." face type " represents the title of each face in the form; " radius-of-curvature " is the radius size of each optical surface; " to following distance " is the distance of this optical surface to next optical surface; " clear aperature " represents half caliber size of this optical element; Off-axis angle is represented the rotation angle between this face and the preceding one side.Length positive and negative with from left to right for just, otherwise for negative; Angle positive and negative in just clockwise turning to along imaging direction (being sagitta of arc direction), otherwise for negative.
Table 1 scanning imagery spectrometer light channel structure parameter
Described in this instructions is a kind of preferred embodiment of the present invention, and above embodiment is only in order to illustrate technical scheme of the present invention but not limitation of the present invention.All those skilled in the art all should be within the scope of the present invention under this invention's idea by the available technical scheme of logical analysis, reasoning, or a limited experiment.
Claims (7)
1. the anastigmatic grating dispersion type of cylinder imaging spectrometer comprises:
Slit, restriction enters the beam size of spectrometer beam splitting system, the spectrally resolved power of its width decision spectrometer, it highly determines imaging dimension field angle, i.e. the imaging scope of single width spectrum picture of spectrometer;
Collimator objective, optical alignment that will be by slit also reflexes on the grating;
The parallel polychromatic light that grating, collimation object lens reflect back is divided into the parallel beam group with different diffraction angle by the wavelength difference, and every bundle directional light is monochromatic light
The image-forming objective lens group, the photosurface place that the parallel beam group after the beam split is focused to detector carries out the imaging of branch spectrum;
Detector, the two-dimensional array detector is gathered spectral image data.
2. collimator objective according to claim 1 is characterized in that through the light beam behind the collimator objective collimation can be directional light, diverging light or converging light.
3. image-forming objective lens group according to claim 1 is characterized in that being made up of spherical reflector and cylindrical mirror.
4. spectrometer light channel structure according to claim 1 is characterized in that collimator objective 2 to for the collimation objective focal length 2 times of the distance of grating 3, and grating 3 is 2 times of image-forming objective lens group focal length to the distance of image-forming objective lens group 4.
5. spectrometer light channel structure according to claim 1 is characterized in that each optical element in the optical system all adopts the total-reflection type optical element except that slit, and all reflecting elements all plate high reflection film.
6. spectrometer light channel structure according to claim 2 is characterized in that, the preferred 10～150mm of spectrometer clear aperature; Preferred 0.01 °～2.0 ° of spectrum Wei Shunshishichangjiao.
7. image-forming objective lens group according to claim 3 is characterized in that introducing the astigmatism that cylindrical mirror is eliminated imaging spectrometer.
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| CN201110023147.9A CN102183304B (en) | 2011-01-21 | A kind of optical path structure of cylindrical anastigmatic grating dispersion type imaging spectrometer |
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Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102565577A (en) * | 2011-12-15 | 2012-07-11 | 国网电力科学研究院 | Method for detecting high optical spectrum of composite insulator |
| CN102620827A (en) * | 2012-03-28 | 2012-08-01 | 北京理工大学 | Raster imaging spectrometer |
| CN102778293A (en) * | 2012-07-25 | 2012-11-14 | 中国科学院长春光学精密机械与物理研究所 | Optical path structure of small echelle grating spectrometer |
| CN103575230A (en) * | 2012-08-09 | 2014-02-12 | 中国科学院微电子研究所 | Optical non-chromatic-aberration focusing system |
| CN103984038A (en) * | 2014-05-15 | 2014-08-13 | 中国科学院长春光学精密机械与物理研究所 | Satellite-borne scanning-type atmosphere limb chromatography detection system |
| CN104062007A (en) * | 2014-06-05 | 2014-09-24 | 深圳先进技术研究院 | Mobile phone spectrograph module and mobile phone spectrograph with mobile phone spectrograph module |
| CN104330161A (en) * | 2014-11-05 | 2015-02-04 | 中国科学院长春光学精密机械与物理研究所 | Cylindrical lens based Wadsworth grating imaging spectrometer |
| CN104501953A (en) * | 2014-12-25 | 2015-04-08 | 中国科学院长春光学精密机械与物理研究所 | Staggered folding optical path structure of small-sized grating monochromator with high spectral resolution |
| CN105004421A (en) * | 2015-04-22 | 2015-10-28 | 北京丰通丰创光电科技有限责任公司 | Imaging spectrometer taking grating as boundary |
| CN106525240A (en) * | 2016-12-29 | 2017-03-22 | 同方威视技术股份有限公司 | Spectrum detection device |
| CN107290051A (en) * | 2017-06-16 | 2017-10-24 | 天津大学 | Disappeared astigmatism method and device based on post lens-type echelle spectrometer |
| TWI685646B (en) * | 2015-04-17 | 2020-02-21 | 美商雷神公司 | Optical forms for multi-channel double-pass dispersive spectrometers |
| CN113758564A (en) * | 2020-06-02 | 2021-12-07 | 山东大学 | Framed single-grating two-way dispersion hyperspectral imaging system and method |
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Cited By (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102565577A (en) * | 2011-12-15 | 2012-07-11 | 国网电力科学研究院 | Method for detecting high optical spectrum of composite insulator |
| CN102620827A (en) * | 2012-03-28 | 2012-08-01 | 北京理工大学 | Raster imaging spectrometer |
| CN102620827B (en) * | 2012-03-28 | 2014-06-25 | 北京理工大学 | Raster imaging spectrometer |
| CN102778293A (en) * | 2012-07-25 | 2012-11-14 | 中国科学院长春光学精密机械与物理研究所 | Optical path structure of small echelle grating spectrometer |
| CN103575230A (en) * | 2012-08-09 | 2014-02-12 | 中国科学院微电子研究所 | Optical non-chromatic-aberration focusing system |
| CN103984038B (en) * | 2014-05-15 | 2017-01-11 | 中国科学院长春光学精密机械与物理研究所 | Satellite-borne scanning-type atmosphere limb chromatography detection system |
| CN103984038A (en) * | 2014-05-15 | 2014-08-13 | 中国科学院长春光学精密机械与物理研究所 | Satellite-borne scanning-type atmosphere limb chromatography detection system |
| CN104062007A (en) * | 2014-06-05 | 2014-09-24 | 深圳先进技术研究院 | Mobile phone spectrograph module and mobile phone spectrograph with mobile phone spectrograph module |
| CN104330161A (en) * | 2014-11-05 | 2015-02-04 | 中国科学院长春光学精密机械与物理研究所 | Cylindrical lens based Wadsworth grating imaging spectrometer |
| CN104501953A (en) * | 2014-12-25 | 2015-04-08 | 中国科学院长春光学精密机械与物理研究所 | Staggered folding optical path structure of small-sized grating monochromator with high spectral resolution |
| TWI685646B (en) * | 2015-04-17 | 2020-02-21 | 美商雷神公司 | Optical forms for multi-channel double-pass dispersive spectrometers |
| CN105004421A (en) * | 2015-04-22 | 2015-10-28 | 北京丰通丰创光电科技有限责任公司 | Imaging spectrometer taking grating as boundary |
| CN106525240A (en) * | 2016-12-29 | 2017-03-22 | 同方威视技术股份有限公司 | Spectrum detection device |
| CN106525240B (en) * | 2016-12-29 | 2019-03-19 | 同方威视技术股份有限公司 | Spectral detection device |
| US10663393B2 (en) | 2016-12-29 | 2020-05-26 | Nuctech Company Limited | Spectrum inspecting apparatus |
| CN107290051A (en) * | 2017-06-16 | 2017-10-24 | 天津大学 | Disappeared astigmatism method and device based on post lens-type echelle spectrometer |
| CN113758564A (en) * | 2020-06-02 | 2021-12-07 | 山东大学 | Framed single-grating two-way dispersion hyperspectral imaging system and method |
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