CN113624339B - Homodromous dispersive spectrum analyzer and method based on DMD and echelle grating - Google Patents
Homodromous dispersive spectrum analyzer and method based on DMD and echelle grating Download PDFInfo
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Abstract
The invention belongs to the technical field of spectral analysis, and particularly relates to a homodromous dispersive spectrum analyzer and a homodromous dispersive spectrum analysis method based on a DMD (digital micromirror device) and a echelle grating; the spectrum line to be measured enters a collimating mirror through a slender slit, is changed into a polychromatic parallel spectrum line after being collimated by the collimating mirror and enters a prism, the spectrum line split by the prism enters a digital micromirror through a focusing lens, the digital micromirror reflects the spectrum line to be measured in a required specific waveband range to the collimating lens and then enters a echelle grating, the spectrum line split by the echelle grating enters the focusing mirror, is focused and reflected by the focusing mirror and then enters a CCD detector, and the spectrum line is received and detected by the CCD detector; the method can continuously and repeatedly detect the spectral lines to be detected of different specific wave bands in real time, effectively avoids the overlapping of the levels and improves the detection accuracy; in addition, because the echelle grating and the prism are dispersed in the same direction, the slender slit is used as an incident slit, and the luminous flux of the system and the detection capability of weak optical signals are improved.
Description
Technical Field
The invention belongs to the technical field of spectral analysis, and particularly relates to a homodromous dispersive spectrum analyzer and a homodromous dispersive spectrum analyzing method based on a DMD (digital micromirror device) and a echelle grating.
Background
Spectroscopic instruments are of great importance for spectroscopic analysis. Is widely applied to various fields of astronomy, agriculture, medical treatment, environmental protection and the like. As early as 1940, the first direct-reading spectrometer, ARLQUANTOMETER, was known. Then, with the rapid development of science and technology, the spectrometer is continuously developed towards the direction of miniaturization, wide band, high resolution, high detection rate, high stability and low stray light.
Echelle gratings were first introduced by Harrision in 1949. The grating light source has the characteristics of high grating constant, large incident angle, high diffraction order and the like, so that the system resolution and the luminous flux can be well improved. However, in practical applications, since the incident angle range is narrow and the phenomenon of overlapping orders occurs, it is necessary to separate the orders in the vertical direction by cross-dispersion using an auxiliary dispersion element, and finally obtain a two-dimensional dispersion spectrum. Meanwhile, because the working order is high and the dispersion angle is small, the wavelength in the free spectral range of each level is concentrated near the blazed wavelength, so that full-band blaze can be realized. The domestic research of the echelle spectrometer starts late, and in 1995, the echelle spectrometer with a 2.16M telescope is successfully developed in China; the Zhang Yinxin of Tianjin university and Zhang Huaidong of Qinghua university in 2013 and the like design a echelle grating-prism cross dispersion optical path, and the theoretical spectral resolution capability of 51000 is achieved; based on the structure of the original echelle grating spectrometer, people Zhang Rui of Changchun optical-mechanical institute of China academy of sciences in 2017, and the like use DMD (digital micromirror device) as a spatial light modulator, thereby realizing the high-precision programmable echelle grating spectrometer. At present, the echelle spectrometer is widely applied to ultraviolet and visible wave bands, and the infrared wave band is still in the scientific research stage.
The DMD chip is a monolithic integrated micro-electro-mechanical system, integrates electrical, mechanical and optical functions on a semiconductor chip, has the performance of quickly reflecting light under the control of digital signals, and can accurately control a light source. Each small pixel of the DMD is plated with a reflecting film on a semiconductor silicon chip by adopting an aluminum sputtering process, and a micro-mechanical processing method is applied during processing, so that the pixel size can reach the micron level. A group of two-dimensional micromirror array is composed of thousands or even tens of thousands of micromirrors, each micromirror can be regarded as a pixel point in a projection picture, and each micromirror can deflect left and right to adjust the brightness of the pixel point. The deflection state of the micromirror can be independently controlled by a driver to form a vast variety of images. The current DMD micromirror array has achieved a resolution of 3840 × 2160.
The echelle grating and prism cross dispersion is mostly adopted in the echelle grating-based spectral analysis method; the prism is used as an auxiliary dispersion element for pre-dispersion, and then the echelle grating is subjected to secondary dispersion in the direction perpendicular to the dispersion direction of the prism to form a two-dimensional spectrogram to be measured. Because the echelle grating and the prism need cross dispersion, the method can only use a square slit or a pinhole slit with the length-width ratio close to 1:1 as an incident slit, so that the luminous flux of the system is insufficient; meanwhile, the method also needs to consider the problem of order overlapping of the echelle grating.
Disclosure of Invention
In order to overcome the problems, the invention provides a homodromous dispersive spectrum analyzer and a homodromous dispersive spectrum analyzing method based on a DMD and a echelle grating, which can be applied to the fields of agricultural analysis, medicine and health, food safety and the like, can continuously and repeatedly detect spectral lines to be detected in different specific wave bands in real time, effectively avoids the overlapping of the levels and improves the detection accuracy; in addition, because the echelle grating and the prism are dispersed in the same direction, the slender slit is used as an incident slit, and the luminous flux of the system and the detection capability of weak optical signals are improved.
A homodromous dispersive spectrum analyzer based on DMD and echelle grating is characterized by comprising a slender slit, a collimating mirror, a prism, a focusing lens, a digital micromirror, a collimating lens, an echelle grating, a focusing mirror and a CCD detector, wherein a spectral line to be detected enters the collimating mirror through the slender slit, is collimated by the collimating mirror and then becomes a compound color parallel spectral line, the compound color parallel spectral line enters the prism, the spectral line split by the prism is transmitted by the focusing lens and then enters the digital micromirror, the digital micromirror reflects the spectral line to be detected in a required specific waveband range to the collimating lens, and simultaneously reflects other spectral lines to an optical trap, the spectral line to be detected after being transmitted by the collimating lens enters the echelle grating, the spectral line split by the echelle grating enters the focusing mirror, the spectral line reflected after being focused by the focusing mirror enters the CCD detector and is received and detected by the CCD detector; and the position of the prism is positioned at the front end of the echelle grating, and the transverse width of the digital micromirror is greater than the boundary width of the prism in the transverse dispersion direction.
And the dispersion direction of the echelle grating is consistent with the dispersion direction of the prism.
The collimating mirror is a spherical reflecting mirror.
The prism material is ultraviolet fused quartz.
A use method of a homodromous dispersive optical spectrum analyzer based on a DMD and a echelle grating comprises the following steps:
step one, light collimation: the spectral line to be measured is changed into a divergent spectral line after passing through the slender slit, and the divergent spectral line is collimated and reflected by using a collimating mirror;
step two, primary light splitting: splitting the collimated complex color parallel spectral lines of the collimating mirror in the first step for the first time by using a prism to obtain spectral lines arranged in a wavelength sequence, and transmitting the spectral lines through a focusing lens and then entering a digital micromirror;
step three, gating modulation: controlling the reflection state of each micromirror unit on the digital micromirror to control the reflection state of the incident spectral line, reflecting the spectral line to be measured in the required specific waveband range to the collimating lens, reflecting other spectral lines to the light trap, and allowing the spectral line to be measured after being transmitted by the collimating lens to enter the echelle grating, thereby completing gating modulation of the spectral line split by the prism in the step two;
step four, secondary light splitting: using the echelle grating to perform secondary light splitting on the spectral line subjected to gating modulation by the digital micromirror in the third step, and further performing chromatic dispersion on the spectral line to be detected after chromatic dispersion by the prism to obtain a secondary non-overlapped one-dimensional spectral line;
step five, receiving and detecting: and the focusing mirror performs focusing reflection on the spectral line to be detected after the echelle grating is subjected to light splitting in the fourth step, and the reflected spectral line to be detected is received and detected by a CCD detector, so that a one-dimensional spectral diagram is obtained, and the detection purpose is completed.
The invention has the beneficial effects that:
the invention adopts a mode that a dispersion prism and an echelle grating are dispersed in the same direction to form a one-dimensional spectral line, and a DMD is arranged between the dispersion prism and the echelle grating to be used as a spatial light modulator. The DMD selects spectral lines within a certain wave band range according to the wavelength sequence, and then the echelle grating only carries out homodromous dispersion on the selected spectral lines without considering the spectral resolution capability between adjacent levels, thereby effectively avoiding the level overlapping and improving the detection accuracy. In addition, because the echelle grating and the prism are dispersed in the same direction, and the DMD is used as a spatial light modulator, the order overlapping is avoided, so that the elongated slit can be used for replacing a square slit or a pinhole slit with the length-width ratio close to 1:1, the luminous flux of the system is improved, and the detection capability of the system on weak optical signals is improved.
Drawings
FIG. 1 is a flow chart of a method for analyzing a homodromous dispersion spectrum based on a DMD and an echelle grating according to the present invention.
FIG. 2 is an optical path diagram of a homodromous dispersion spectrum analysis method based on DMD and echelle grating according to the present invention.
FIG. 3 is a schematic diagram of DMD gating modulation by a method of homodromous dispersion spectroscopy based on DMD and echelle grating according to the present invention.
Detailed Description
As shown in fig. 2, a homodromous dispersive optical spectrum analyzer based on a DMD and an echelle grating is characterized by comprising a slender slit, a collimating mirror, a prism, a focusing lens, a digital micromirror, a collimating lens, an echelle grating, a focusing mirror and a CCD detector, wherein a spectral line to be measured enters the collimating mirror through the slender slit, is collimated by the collimating mirror and then becomes a compound color parallel spectral line, the compound color parallel spectral line enters the prism, the spectral line split by the prism enters the digital micromirror after being transmitted by the focusing lens, the digital micromirror reflects the spectral line to be measured in a required specific waveband range to the collimating lens, and simultaneously reflects other spectral lines to an optical trap, the spectral line to be measured after being transmitted by the collimating lens enters the echelle grating, the spectral line split by the echelle grating enters the focusing mirror, the spectral line after being focused and reflected by the focusing mirror enters the CCD detector, and is received and detected by the CCD detector; and the position of the prism is positioned at the front end of the echelle grating, and the transverse width of the digital micromirror is greater than the boundary width of the prism in the transverse dispersion direction.
And the dispersion direction of the echelle grating is consistent with the dispersion direction of the prism.
The collimating mirror is a spherical reflecting mirror.
The prism material is ultraviolet fused quartz produced by THORLABS.
As shown in fig. 1, a method for using a homodromous dispersive spectrum analyzer based on a DMD and a echelle grating includes the following steps:
step one, light collimation: the spectral line to be measured is changed into a divergent spectral line after passing through the slender slit, and the divergent spectral line is collimated and reflected by using a collimating mirror;
specifically, the spectral line to be measured is diverged after being incident from the slender slit, the divergent spectral line is collimated and reflected by the collimating mirror, and the divergence angle is suppressed, so that the polychromatic parallel light is obtained. Meanwhile, the collimating mirror should be a spherical reflecting mirror to reduce the manufacturing difficulty and cost of the whole spectrometer.
Step two, primary light splitting: splitting the collimated complex color parallel spectral lines of the collimating mirror in the first step for the first time by using a prism to obtain spectral lines arranged in a wavelength sequence, and transmitting the spectral lines through a focusing lens and then entering a digital micromirror;
specifically, as shown in fig. 2, the prism must be placed in front of the echelle grating for pre-dispersion so that both can be dispersed in the same direction. If the prism is placed at the rear end of the echelle grating for dispersion, and the echelle grating generates a secondary overlapping phenomenon after primary light splitting, the prism can only carry out cross dispersion in the vertical direction. Meanwhile, in order to avoid the loss of energy in the ultraviolet band, the prism material should be made of a material with high ultraviolet band transmittance. The invention selects the ultraviolet fused quartz produced by THORLABS, and the transmission wave band range is 185nm-2.1um.
The dispersion of a prism has non-uniformity and its dispersion behavior for different wavelengths can be expressed as:
wherein: n is λ The refractive indexes of different wavelengths relative to the prism are shown, alpha is the vertex angle of the prism, and beta is the incident angle of the prism; meanwhile, the prism parameters need to be matched with DMD gating modulation, and according to the geometrical optics principle, the dispersion distance L of the prism under different incident light wavelengths λ Can be expressed as:
wherein f is the focal length of the focusing lens;
after the prism dispersion is obtained by the two formulas (1) and (2), the interval of adjacent wavelengths received by the DMD micromirror is:
ΔL λ ＝L λ+1 -L λ (3)
the boundary width of the prism in the lateral dispersion direction can be expressed as:
L prism ＝f(δ λmax -δ λmin ) (4)
wherein delta λmax And delta λmin Respectively representing the dispersion performance of the maximum wavelength and the minimum wavelength, the dispersion of the prism has nonuniformity, and the dispersion capability is weaker as the wavelength is longer, and the dispersion interval is smaller. According to the original data of the ultraviolet fused silica provided by the THORLABS, the refractive index of each wavelength relative to the prism can be obtained, the refractive indexes corresponding to the minimum wavelength and the maximum wavelength (the minimum wavelength and the maximum wavelength are determined by the working parameters of the prism, the echelle grating and the DMD) which can be detected by the spectrometer are substituted into the above formulas (1), (2) and (4), and then the boundary width L of the prism in the transverse dispersion direction can be obtained prism 。
Step three, gating modulation: and accurately controlling the reflection state of each micromirror unit on the digital micromirror through a digital signal to control the reflection state of the incident spectral line, reflecting the spectral line to be measured in a required specific waveband range to the collimating lens, then entering the echelle grating, and simultaneously reflecting other spectral lines to the optical trap, namely, the micromirror unit in the 'on' state reflects the spectral line to be measured to the working surface of the echelle grating, and the micromirror units in the 'off' state and the 'flat' state reflect the incident light to the optical trap, so that the gated modulation of the spectral line subjected to the dispersion of the intermediate prism in the step two is completed.
Specifically, as known from step two, the prism parameters are matched to the gate modulation of the DMD, and the lateral width L of the DMD micromirror is adjusted DMD It needs to match the width of the boundary of the prism in the lateral dispersion direction, i.e.:
L DMD ＞L prism (5)
in the second step, the vertex angle alpha of the prism is 12 degreesThe reflection angle beta is 17 degrees, the focal length f is 300mm, and according to the original data of the ultraviolet fused silica provided by the THORLABS, the refractive indexes of the relative prisms at 185nm, 186nm, 187nm, 797nm, 798nm, 799nm, 800nm and 801nm are 1.574873, 1.572952, 1.571082, 1.45334, 1.453323, 1.453306, 1.453288 and 1.453271 respectively. According to the working parameters of each element, the analysis method adopted by the invention can detect the wavelength range of 185-800 nm, and the boundary width L of the prism in the transverse dispersion direction can be obtained by substituting the refractive indexes corresponding to 185nm and 800nm into the formulas (1), (2) and (4) prism Is 7731.809um.
The DMD of the invention selects TI DLP471NE 0.47Full HD DMD, which has 1920 rows and 1080 lines, the turning angle is +/-17 degrees, the space between the micromirrors is 5.4um, the transverse width of the micromirror surface is 10368um, and the invention meets the above conditions: l is DMD ＞L prism . From L prism And the micromirror pitch can calculate that the dispersed spectral line of the prism occupies 1432 micromirror units. As shown in fig. 3, the DMD 200 is used as the initial column, and 1632 is used as the final column (1920 columns and 1080 rows of DMDs are used, 200 columns to 1632 columns are used), and the corresponding relationship between the DMD micromirror unit and different wavelengths is established: according to the above formula, 185nm and 186nm correspond to 200 rows and 223 rows respectively, the average band interval corresponding to each micromirror row is 0.044nm (from fig. 3, 185nm corresponds to the center of the 200 th row, 186nm corresponds to 223 rows, and the distance between the two rows is 122.17nm, then the average band interval corresponding to each row of the DMD is (186-185)/(122.17/5.4) =0.044 nm), when the wavelength continues to increase, the dispersion interval of adjacent wavelengths continues to decrease, as can be seen from fig. 3, 1632 rows correspond to 797nm-801nm, and then the band interval corresponding to one row of micromirror elements is 4.95nm. The spectral line to be measured after DMD gating modulation needs further light splitting by the echelle grating.
Step four, secondary light splitting: the spectrum line after the digital micromirror gating modulation in the third step is subjected to secondary light splitting by using the echelle grating (the dispersion direction is determined by the positions of the prism and the echelle grating, the prism is placed in a proper position in front of the echelle grating so that the prism and the echelle grating can carry out dispersion in the same direction), and the spectrum line to be detected after the prism is subjected to dispersion is further subjected to dispersion to obtain a specific-order non-overlapping one-dimensional spectrum line, so that order overlapping is avoided, and the detection accuracy is improved;
specifically, an echelle grating with a grating constant of 79g/mm is adopted, and the echelle grating is placed at a certain offset angle omega to enable the dispersion direction of the echelle grating to be the same as that of the prism. At this time, the dispersion of the echelle grating in the non-main section is assumed that the projection of the grating incident angle on the main section is γ, the projection of the diffraction angle on the main section is δ, the grating offset angle is ω, the grating blaze angle is θ, and the grating equation is:
d(sinγ+sinδ)cosω＝mλ (6)，
wherein m is the spectral order and λ is the wavelength;
the grating dispersion characteristic is then the same as the grating characteristic with a grating constant dcos ω.
Although the spectral lines after prism splitting are no longer parallel and the echelle grating and the prism are dispersed in the same direction, the angular interval after prism dispersion is only 1 ° 28'35 "as can be obtained from equation (1), so that the echelle grating can still be operated under the quasi Littrow condition, and by taking γ = δ =63.4 ° and ω =7 ° as can be obtained from equation (6), the 121 spectral order of the echelle grating corresponding to 185nm-185.7nm and the 28 spectral order of the echelle grating corresponding to 797nm-801nm can be obtained. For 185nm-185.7nm, according to the corresponding relation between the DMD micromirror unit and the wavelength in FIG. 3, after the DMD in step three overturns the micromirror array corresponding to the wavelength band, the DMD performs light splitting through the echelle grating to obtain a one-dimensional spectral line to be measured with non-overlapped orders; for 797nm-801nm, since the waveband only corresponds to the spectrum order of 28, the order overlapping can be effectively avoided by splitting by the echelle grating after the DMD flips the termination column.
In summary, the echelle grating and the prism homodromous dispersion can effectively avoid the order overlapping.
Step five, receiving and detecting: and the focusing mirror focuses and reflects the spectral line to be detected after the echelle grating is subjected to light splitting in the fourth step, and the reflected spectral line to be detected is received and detected by the linear array CCD detector, so that a one-dimensional spectral line graph is obtained, and the detection purpose is fulfilled.
Specifically, the focusing mirror reflects and focuses the spectrum of the band to be detected, so that the capability of marginal rays of light entering the CCD detector can be improved, the spectrum to be detected after reflection and focusing is received by the CCD detector, and complete image data is obtained after the spectrum to be detected is processed by the electronic reading circuit and the data processing system, so that the detection purpose is completed.
Claims (2)
1. A homodromous dispersive spectrum analyzer based on DMD and echelle grating is characterized by comprising a slender slit, a collimating mirror, a prism, a focusing lens, a digital micromirror, a collimating lens, an echelle grating, a focusing mirror and a CCD detector, wherein a spectral line to be detected enters the collimating mirror through the slender slit, is collimated by the collimating mirror and then becomes a compound color parallel spectral line, the compound color parallel spectral line enters the prism, the spectral line split by the prism is transmitted by the focusing lens and then enters the digital micromirror, the digital micromirror reflects the spectral line to be detected in a required specific waveband range to the collimating lens, and simultaneously reflects other spectral lines to an optical trap, the spectral line to be detected after being transmitted by the collimating lens enters the echelle grating, the spectral line split by the echelle grating enters the focusing mirror, the spectral line reflected after being focused by the focusing mirror enters the CCD detector and is received and detected by the CCD detector; the position of the prism is positioned at the front end of the echelle grating, and the transverse width of the digital micromirror is greater than the boundary width of the prism in the transverse dispersion direction;
the dispersion direction of the echelle grating is consistent with that of the prism;
the collimating mirror is a spherical reflecting mirror;
the prism material is ultraviolet fused quartz.
2. A use method of a homodromous dispersive optical spectrum analyzer based on a DMD and a echelle grating is characterized by comprising the following steps of:
step one, light collimation: the spectral line to be measured is changed into a divergent spectral line after passing through the slender slit, and the divergent spectral line is collimated and reflected by using a collimating mirror;
step two, primary light splitting: splitting the collimated complex color parallel spectral lines of the collimating mirror in the first step for the first time by using a prism to obtain spectral lines arranged in a wavelength sequence, and transmitting the spectral lines through a focusing lens and then entering a digital micromirror;
step three, gating modulation: controlling the reflection state of each micromirror unit on the digital micromirror to control the reflection state of the incident spectral line, reflecting the spectral line to be measured in the required specific waveband range to the collimating lens, reflecting other spectral lines to the light trap, and allowing the spectral line to be measured after being transmitted by the collimating lens to enter the echelle grating, thereby completing gating modulation of the spectral line split by the prism in the step two;
step four, secondary light splitting: the spectral line after the digital micromirror gating modulation in the third step is subjected to secondary light splitting by using the echelle grating, wherein the dispersion direction of the echelle grating is consistent with that of the prism, and the spectral line to be measured after the dispersion of the prism is further subjected to dispersion to obtain a one-dimensional spectral line with non-overlapped orders;
step five, receiving and detecting: and the focusing mirror performs focusing reflection on the spectral line to be detected after the echelle grating is subjected to light splitting in the fourth step, and the reflected spectral line to be detected is received and detected by a CCD detector, so that a one-dimensional spectral diagram is obtained, and the detection purpose is completed.
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