CN106872038B - A kind of relevant dispersion spectrum imaging device of high throughput high stable - Google Patents

A kind of relevant dispersion spectrum imaging device of high throughput high stable Download PDF

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CN106872038B
CN106872038B CN201710140962.0A CN201710140962A CN106872038B CN 106872038 B CN106872038 B CN 106872038B CN 201710140962 A CN201710140962 A CN 201710140962A CN 106872038 B CN106872038 B CN 106872038B
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light
optical path
dispersion
path
splitting
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CN106872038A (en
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魏儒义
胡炳樑
李洪波
张智南
于建冬
王飞橙
于涛
高晓惠
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XiAn Institute of Optics and Precision Mechanics of CAS
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XiAn Institute of Optics and Precision Mechanics of CAS
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • G01J3/45Interferometric spectrometry
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • G01J3/0291Housings; Spectrometer accessories; Spatial arrangement of elements, e.g. folded path arrangements
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • G01J3/2823Imaging spectrometer
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • G01J3/45Interferometric spectrometry
    • G01J2003/451Dispersive interferometric spectrometry

Abstract

The present invention proposes a kind of relevant dispersion spectrum imaging device of high-throughput high stable, which includes the interference with common path light splitting optical path, dispersion light splitting optical path and photodetector set gradually;The interference with common path light splitting optical path uses the total optical path Sagnac interferometer of unsymmetric structure, so that the final light beam returned through beam-splitting surface in optical path Sagnac interferometer altogether is no longer overlapped with incident beam, but spatially parallel separation;Correspond to spaced parallel isolated light beam in the optical path before secondary light splitting and be additionally provided with light path adjustment structure, so that two-way level-one light beam finally generates optical path difference, is emitted with interfering beam;To on slit after wherein interfering beam is concentrated all the way, which becomes the incident image planes position of dispersion light splitting optical path;Another way interfering beam, that is, described is final to enter dispersion light splitting optical path after beam-splitting surface returns in optical path Sagnac interferometer altogether light beam is also concentrated.

Description

A kind of relevant dispersion spectrum imaging device of high throughput high stable
Technical field
The invention belongs to spectral imaging technology fields, are related to a kind of method and device of relevant dispersion spectrum imaging.
Background technique
Spectral imaging technology, sometimes referred to as imaging spectral technology, have merged spectral technique and imaging technique, and intersection covers A variety of subjects such as spectroscopy, optics, computer technology, electronic technology and precision machinery, the bidimensional that can obtain target simultaneously are empty Between information and one-dimensional spectral information.Spectral imaging technology is widely used in military affairs, medicine, industry, agricultural, resource environment, atmosphere Detection, astronomy etc. develop just in the ascendant.
Color dispersion-type and interference-type are two kinds of main light splitting types in spectral imaging technology.Under normal circumstances by both points Light method is used separately.In rare cases, the speed of the Doppler frequency shift variation tracking target such as using interference fringe When, it, can be by both light-splitting methods when remote sensing fields survey wind speed, the speed of service of fixed star and planet is surveyed in astronomical field Combine, to obtain the ideal measurement accuracy to target.
The present invention relates to a kind of relevant dispersion spectruies for combining interference-type light-splitting method and color dispersion-type light-splitting method Imaging method.In document [1] [2], it is proposed that a kind of utilize traditional Michelson interference light splitting technology combination transmission grating The relevant dispersion method (Fixed Delay interferometer) of light splitting technology, also has change transmission grating therein later Into the method for reflecting grating light splitting technology.However, interference light splitting technology therein is always to be based on Michelson interference light splitting Technology, belong to non-interference with common path light splitting technology, interferometer often to interfere item because of thermodynamics deformation and environmental change Line is unstable.Due in the speed of the Doppler frequency shift detection target using interference fringe, to optical path difference and interference fringe Stability requirement is very high, otherwise can seriously affect the precision of measurement, thus using dry based on Michelson interference light splitting technology Interferometer can additionally increase the rigors of the temperature and pressure to environment.In addition, Michelson is dry in traditional coherent dispersion method The energy that light splitting is only utilized in target light 50% is related to, because the energy that interferometer returns to the light all the way of light source does not add utilization.It is dry The capacity usage ratio of interferometer theoretically also can only achieve 50%, and energy loss is more serious (is equivalent in astronomical observation Extend 4 times of observation time), cause system transmitance and sensitivity low.
On traditional coherent dispersion method, using the Michelson interference light splitting technology of non-optical path altogether, mainly also allow for Two arms of its interferometer be it is separated, light beam is advanced in two arms, can be with according to the light path in the different then two-arm of brachium Difference can produce required optical path difference.And tradition altogether optical path (symmetrical structure) light splitting technology, no matter vacuum, air or In other media, target light the route wherein advanced be overlapped and it is identical, optical path difference can not be generated.Traditional coherent dispersion side Method is there is not yet the total optical path technology of application.
[1]Ge J,2002a,Fixed Delay Interferometry for Doppler Extrasolar Planet Detection.The Astrophysical Journal,571,165.
[2]Ge J,Erskine D and Rushford M,2002b,An Externally Dispersed Interferometer for Sensitive Doppler Extrasolar Planet Searches.Publications of the Astronomical Society of the Pacific,114:1016–1028.
Summary of the invention
It is an object of the invention to propose a kind of stability is high, capacity usage ratio is high relevant dispersion spectrum imaging device.
Basic conception of the invention is as follows:
The non-optical path light-splitting method altogether of interference with common path light-splitting method substitution tradition is improved, and capacity usage ratio is improved 1 times To close to 100%, to improve system stability, transmitance and sensitivity.Specifically: Common-path method being improved to asymmetric Structure, so that the light beam (returning to the light beam of light source incident direction) returned is no longer overlapped with incident beam, but spatially Parallel separation.If light beam all passes through identical medium at this time, optical path difference can not be generated certainly, but we are logical using light beam is changed The mode in medium or path is crossed, extension/shortening light path is to change optical path difference, such as the two-way by light beam after interference light splitting The optical device for changing light path is added in the middle all the way of light, and the road Ze Gai light beam can generate variation light path, to produce with another way Optical path difference.In this way, just realizing the total optical path beam-splitting structure of big optical path difference.To be formed with total optical path light splitting technology+dispersion point The relevant dispersed light spectrum imaging method that light technology combines, and by total optical path Sagnac interferometer and grating dispersion combination of devices shape At relevant dispersion spectrum imager.
Based on the above inventive concept, the present invention provides following solution:
The high throughput high stable is concerned with dispersion spectrum imaging device, and main includes the interference with common path light splitting light set gradually Road, dispersion light splitting optical path and photodetector;
The interference with common path light splitting optical path uses the total optical path Sagnac interferometer of unsymmetric structure, i.e. optical path altogether The spatial position of reflecting surface in Sagnac interferometer is arranged so that final return through beam-splitting surface in optical path Sagnac interferometer altogether Light beam be no longer overlapped with incident beam, but spatially parallel separation;
Beam kept man of a noblewoman time light splitting of scoring obtains level-one light beam, and secondary light splitting obtains second level light beam;The then light before secondary light splitting Road corresponds to spaced parallel isolated light beam and is additionally provided with light path adjustment structure, so that two-way level-one light beam (transmitted light beam And the reflected beams) optical path difference is finally generated, it is emitted with interfering beam;
To on slit after wherein interfering beam is concentrated all the way, which becomes the incident image planes position of dispersion light splitting optical path It sets;Another way interfering beam, that is, final light beam returned through beam-splitting surface in optical path Sagnac interferometer altogether is also concentrated laggard Enter dispersion light splitting optical path.
Based on above scheme, the present invention has also further made following optimization:
Above-mentioned light path adjustment structure specifically adds different optical mediums, or increases path to change light path.
Above-mentioned light path adjustment structure is set on the transmitted light path after light splitting for the first time, or is set to anti-after light splitting for the first time It penetrates in optical path.
Above-mentioned optical medium is prism, and above-mentioned increase path is realized using arrangement of mirrors.
Above-mentioned dispersion light splitting optical path is divided form, wherein grating dispersion using prism dispersion light splitting form or grating dispersion Light splitting form is specifically chosen transmission grating or reflecting grating.
Between incident light source and the interference with common path light splitting optical path, preposition optical shaping system is additionally provided with (with reality Now to the collimation of incident light, disappear stray light the effects of), be mainly made of lens and/or reflection device.
Above-mentioned beam-splitting surface is semi-transparent semi-reflective.
The beam-splitting structure of above-mentioned optical path Sagnac interferometer altogether, is made of hollow reflecting mirror and semi-transparent semi-reflecting beam splitter Form, or the solid form that reflectance coating and semi-transparent semi-reflecting beam splitting coating form correspondingly is plated by prism in different sides.
Above-mentioned another way interfering beam be after plane mirror turns to, then it is concentrated after enter dispersion light splitting optical path.When So, another slit directly can also be set in optical path where (being spatially separated) light beam for returning to light source incident direction, Enter this segment beam being spatially separated in another dispersion light splitting optical path.
Two-way interfering beam is reflected into subsequent optical path with plane mirror and is used, specifically can be interferometer The two-way interference output light of generation is merged into same optical path and carries out subsequent processing, can also be separated into different light paths and carry out subsequent place Reason.That is: above-mentioned another way interfering beam is also concentrated rear into dispersion light splitting optical path, concretely: the another way interfering beam After the plane mirror, with it is described wherein interfering beam is equidirectional all the way converges to same slit jointly, into of the same colour It dissipates in light splitting optical path;Or the another way interfering beam is assembled through another place in different directions after the plane mirror To another slit, into another dispersion light splitting optical path.
The present invention principal advantage is that
1, stability is high
Interfering light splitting technology is total optical path technology, the interferometer developed with this and relevant dispersion spectrum imager stability It is high.After total optical path light splitting technology, extraneous thermodynamics variation while two arms for acting on interferometer, therefore the light path generated Difference can cancel out each other, and the interference fringe of formation is also more stable, and corresponding interferometer and relevant dispersion spectrum imager are stablized Degree is high.
2, capacity usage ratio is high, and system sensitivity is high
By the two-way interference light of interferometer output all of avoiding traditional coherent dispersion spectrum imager in the present invention In only using all the way interference output the case where so that utilization rate increases to close to 100%, the transmitance of whole system also increases Add, thus improves the sensitivity of system.
3, big optical path difference
By the element that change light path is added middle all the way of the two-way light by light beam after interference light splitting, such as prism or reflection Microscope group is closed, then can produce big optical path difference.In this way, just realizing the total optical path beam-splitting structure of big optical path difference.
4, input light source can be point light source or area source, can be directional light and is also possible to converging light.Of the invention Relevant dispersion spectrum imager Optical System Design is flexible, input form of light source can there are many.
Detailed description of the invention
Fig. 1 is the first embodiment of the invention;
Fig. 2 is second of embodiment of the invention;
Fig. 3 is to be added to for generating the schematic diagram of the light path adjustment structure of optical path difference in interferometer, and wherein first two is The mode (prism or prism arrangement) of optical medium is added, latter three kinds are the mode (combination plane mirrow) for increasing path.
Drawing reference numeral explanation:
1-incident light source, 2-Sagnac interferometers, 3-prisms (light path adjustment structure), 4-semi-transparent semi-reflecting beam splitters, 5-plane mirrors, 6-convergent lenses, 7-slits, 8-lens, 9-gratings, 10-photodetectors.
Specific embodiment
Referring to Fig. 1 and Fig. 2, the relevant dispersion spectrum imaging device of the high throughput high stable uses the Sagnac of unsymmetric structure Spectral interference instrument, the Sagnac spectral interference instrument of the unsymmetric structure using entity or can use split type structure, It is formed by semi-transparent semi-reflecting beam splitter and two reflectings surface, or by semi-transparent semi-reflecting beam splitter and three reflectings surface.Pass through adjusting The spatial position of reflecting surface in Sagnac interferometer guarantees the light beam (returning to light source incident direction) finally returned through beam splitter It is no longer overlapped with incident beam, but spatially parallel separation, consequently facilitating being changed to light beam by changing medium or path Darkening journey.
Target light enters the total optical path Sagnac interferometer of unsymmetric structure with parallel or converging light;Target light is done Semi-transparent semi-reflecting beam splitter in interferometer is divided into transmitted light beam all the way and all the way the reflected beams;On transmitted light beam or the reflected beams Light path adjustment structure is added, allows light beam to pass through, reaches beam splitter again later;Back to the transmitted light beam and reflected light of beam splitter Shu Zaici is transmitted and is reflected by beam splitter, forms four road light, and wherein two-way light generates interference light and equidirectional return light source incidence Direction, another two-way generate interference light and travel to other direction (perpendicular light source incident direction in figure);Interference light forms interference item Line, to being imaged on slit after interference fringe is assembled, slit becomes the incident image planes position of Dispersive Devices in subsequent optical path.It is subsequent Grating dispersion light splitting form can be used in optical path, and Dispersive Devices are transmission grating or reflecting grating, by interference fringe according to wavelength It is dispersed on photodetector and receives.After the interference fringe by Wavelength distribution after reception is handled by noise reduction filtering, amplification etc., Software is handled on hardware chip or computer, and extraction obtains the information of interference fringe.By the intensity, the phase that handle interference fringe Position variation, is finally inversed by the information such as the speed of service of target light.
The present invention is described in detail for the structure (preferred embodiment) shown in Fig. 1 in lower mask body:
Sagnac interferometer 2 is set in the optical path of incident light source 1, can access after incident light source by lens or reflector The preset lens device of part composition, with realize to the collimation of incident light, disappear stray light the effects of.Sagnac interferometer 2 includes by three A reflecting surface and a semi-transparent semi-reflecting beam-splitting surface, can be the hollow form being made of reflecting mirror and semi-transparent semi-reflecting beam splitter 4, It can be and the solid form that reflectance coating and semi-transparent semi-reflecting beam splitting coating 4 form is plated by prism.It in design, must be unsymmetric structure, That is three reflectings surface of interferometer are not in relation to beam-splitting surface axial symmetry, but one of face or two faces even three faces are each self-produced Raw certain translation, diameter and required physical space size of the translational movement depending on light beam.No matter translational movement how much, interferometer Two-way outgoing interfering beam return to light source direction all the way, and be no longer overlapped with former incident beam;Another way is perpendicular to incident light Source direction.
It should be noted that in addition to the Sagnac interferometer of Fig. 1 and three reflector type shown in Fig. 2 is (by three reflectings surface Formed with a beam-splitting surface) other than, the Sagnac interferometer (being made of two reflectings surface and a beam-splitting surface) of pentagonal prism type Obviously also it is applicable in above scheme.Being added to interferometer, wherein for changing light path, it can be added to the prism 3 of light all the way Incident light source passes through for the first time in the transmitted light beam after semi-transparent semi-reflecting beam splitter 4, can also be added in for the first time by semi-transparent half It in the reflected beams after anti-beam splitter 4, but must be before they are again by semi-transparent semi-reflecting beam splitter 4.
As shown in Fig. 3, the forms such as arrangement of mirrors are also readily modified as changing the prism of light path 3.
Interferometer shown in figure is hollow structure, and semi-transparent semi-reflecting beam splitter 4 can be the beam splitter of cubic form It can be the beam splitter of flat type, if interferometer is solid construction, can be the prism plating semi-transparent half by forming interferometer Anti- beam splitting coating is realized.
The effect of plane mirror 5 is will to be reflected into subsequent optical path back to the interference light all the way of light source, so that interference The capacity usage ratio of instrument module reaches highest close to 100%, improves the light transmittance of system to greatest extent.In Fig. 1, this road interference light It is parallel with another way interference light and in the same direction, it is entered in same convergent lens 6 jointly.For structure shown in Fig. 2, then plane reflection 5 road Shi Ci interference light of mirror is emitted in different directions, then needs in addition to be separately provided convergent lens, slit etc. all the way and enter corresponding color Dissipate light splitting optical path.
The effect of convergent lens 6 is that the interference fringe convergence that interference light is formed is imaged at slit 7.The effect of slit 7 It is spuious as elimination at the entrance slit of subsequent Dispersive Devices and an image planes of subsequent dispersion beam splitting system, is also functioned to The effect of light.The effect of lens 8 is that the light at slit is organized into directional light, is incident in subsequent Dispersive Devices grating.Thoroughly Mirror 8 can also substitute (correspondingly, subsequent optical device being placed on the reflected light path of reflection microscope group) with arrangement of mirrors.The reality It applies example and form is divided using grating dispersion, the effect of grating 9 is the interference fringe by interfering beam formation according to wavelength dispersion, and It is imaged on photodetector 10.Grating 9 can be transmission grating, be also possible to reflecting grating.
The effect of photodetector 10 is will to carry out sample collection according to the interferometric fringe signal of Wavelength distribution, and be converted to Electric signal, and the processing such as signal amplifies, filtered, the hardware for relevant parameters such as speed, the temperature of realizing target light are anti- It drills or computer software inverting provides measurement data.Photodetector can be CCD, be also possible to other photoelectric converters Part.

Claims (10)

  1. The dispersion spectrum imaging device 1. a kind of high throughput high stable is concerned with, it is characterised in that: the total optical path including setting gradually is dry Relate to light splitting optical path, dispersion light splitting optical path and photodetector;
    The interference with common path light splitting optical path uses the total optical path Sagnac interferometer of unsymmetric structure, i.e., optical path Sagnac altogether is dry The spatial position of reflecting surface in interferometer be arranged so that the final light beam returned through beam-splitting surface in optical path Sagnac interferometer altogether not It is overlapped again with incident beam, but spatially parallel separation;
    Beam kept man of a noblewoman time light splitting of scoring obtains level-one light beam, and secondary light splitting obtains second level light beam;Then in the optical path before secondary light splitting It is additionally provided with light path adjustment structure corresponding to spaced parallel isolated light beam, so that two-way level-one light beam finally generates light path Difference is emitted with interfering beam;
    To on slit after wherein interfering beam is concentrated all the way, which becomes the incident image planes position of dispersion light splitting optical path;Separately Interfering beam, that is, described is final all the way enters color after beam-splitting surface returns in optical path Sagnac interferometer altogether light beam is also concentrated Dissipate light splitting optical path.
  2. The dispersion spectrum imaging device 2. high throughput high stable according to claim 1 is concerned with, it is characterised in that: the light path Adjustment structure is to add different optical mediums, or increase path to change light path.
  3. The dispersion spectrum imaging device 3. high throughput high stable according to claim 2 is concerned with, it is characterised in that: the light path Adjustment structure is set on the transmitted light path after being divided for the first time, or is set on the reflected light path after light splitting for the first time.
  4. The dispersion spectrum imaging device 4. high throughput high stable according to claim 2 is concerned with, it is characterised in that: the optics Medium is prism, and the increase path is realized using arrangement of mirrors.
  5. The dispersion spectrum imaging device 5. high throughput high stable according to claim 1 is concerned with, it is characterised in that: the dispersion Light splitting optical path is divided form using prism dispersion light splitting form or grating dispersion, wherein grating dispersion light splitting form specific choice Transmission grating or reflecting grating.
  6. The dispersion spectrum imaging device 6. high throughput high stable according to claim 1 is concerned with, it is characterised in that: in incident light Between source and the interference with common path light splitting optical path, it is additionally provided with preposition optical shaping system, mainly by lens and/or reflector Part composition.
  7. The dispersion spectrum imaging device 7. high throughput high stable according to claim 1 is concerned with, it is characterised in that: the beam splitting Face is semi-transparent semi-reflective.
  8. The dispersion spectrum imaging device 8. high throughput high stable according to claim 7 is concerned with, it is characterised in that: the light altogether The beam-splitting structure of road Sagnac interferometer, the hollow form being made of reflecting mirror and semi-transparent semi-reflecting beam splitter, or by rib Mirror correspondingly plates the solid form of reflectance coating and semi-transparent semi-reflecting beam splitting coating composition in different sides.
  9. The dispersion spectrum imaging device 9. high throughput high stable according to claim 1 is concerned with, it is characterised in that: described another Road interfering beam be through plane mirror (5) turn to after, then it is concentrated after enter dispersion light splitting optical path.
  10. The dispersion spectrum imaging device 10. high throughput high stable according to claim 9 is concerned with, it is characterised in that: described another Interfering beam is specifically after the plane mirror (5), with the wherein equidirectional common convergence of interfering beam all the way all the way To same slit, into same dispersion light splitting optical path;Or after the plane mirror (5), in different directions through another Another slit is converged at one, into another dispersion light splitting optical path.
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CN108051088A (en) * 2017-12-27 2018-05-18 中国科学院西安光学精密机械研究所 Visual field spectrum imaging system is integrated for the EO-1 hyperion high-space resolution of undersea detection
EP3853666B1 (en) * 2018-09-19 2022-08-10 ASML Netherlands B.V. Metrology sensor for position metrology
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CN111562000B (en) * 2020-04-21 2021-06-22 中国科学院西安光学精密机械研究所 Zero-eliminating interference spectrometer based on coherent dispersion technology
CN111562001B (en) * 2020-04-22 2021-04-20 中国科学院西安光学精密机械研究所 Double-path four-channel polarization interference imaging system and method
CN112834037A (en) * 2020-12-30 2021-05-25 中国科学院西安光学精密机械研究所 Coherent dispersion spectrum imaging method and device for realizing large optical path difference and high stability

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN206905904U (en) * 2017-03-10 2018-01-19 中国科学院西安光学精密机械研究所 A kind of relevant dispersion spectrum imaging device of high flux high stable

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* Cited by examiner, † Cited by third party
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JP2005249764A (en) * 2004-03-02 2005-09-15 Katsumi Mori Object color measuring system
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CN103076092B (en) * 2012-12-28 2014-11-12 南京理工大学 Interference imaging spectroscopy device and method for improving spectral resolution
CN204831550U (en) * 2015-05-21 2015-12-02 中国科学院西安光学精密机械研究所 Spectral imaging device that polarization state acquireed in step

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN206905904U (en) * 2017-03-10 2018-01-19 中国科学院西安光学精密机械研究所 A kind of relevant dispersion spectrum imaging device of high flux high stable

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