CN103913231B - Based on the space-time unite modulation fourier transformation imaging spectrometer of light-duty beam splitter - Google Patents
Based on the space-time unite modulation fourier transformation imaging spectrometer of light-duty beam splitter Download PDFInfo
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- CN103913231B CN103913231B CN201410086315.2A CN201410086315A CN103913231B CN 103913231 B CN103913231 B CN 103913231B CN 201410086315 A CN201410086315 A CN 201410086315A CN 103913231 B CN103913231 B CN 103913231B
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Abstract
Based on the space-time unite modulation fourier transformation imaging spectrometer of light-duty beam splitter, relate to and imaging spectrometer field is observed on ground, bigger for solving the interference beam splitting system volume of existing imaging spectrometer inside, it is not easy to realize the lightweight of system, and it is inner containing the slit relevant with spatial resolution, limiting the problem of the optical throughput of the system of entering, grid type beam splitter system is introduced instead of to be existed beam splitter and compensates plate in system, have volume advantage little, lightweight. The system that achieves is light-weighted while, for the design of overall optical system brings conveniently, system of the present invention is not containing slit, the optical throughput of system is substantially increased compared with spatial modulation fourier transformation imaging spectrometer, system eliminates the slit in spatial modulation type fourier transformation imaging spectrometer, in the signal to noise ratio of the system that effectively raises realizing high spectral resolution simultaneously. The present invention, based on Michelson interferometer structure, improves the reliability of system greatly.
Description
Technical field
The present invention relates to and ground is observed imaging spectrometer field, the outer fourier transformation imaging spectral instrument system of concrete a kind of novel space-time unite modulated red, is specifically related to a kind of novel space-time unite modulation type Fourier transform infrared imaging spectrometer based on grid type beam splitter
Background technology
Imaging spectrometer carries out deep space remote sensing detection, ground object target analysis identification, the strong instrument of geological resource exploration. It is the optics remote sensing instrument of new generation grown up on the basis of multi-spectral imager, it combines the feature of multi-spectral imager and spectrograph. The fields such as can realizing the detection that target object carries out collection of illustrative plates unification, therefore it is applied in space remote sensing widely, and military target detects, and geological resource is explored, environmental monitoring, meteorological analysis. According to principle of work difference its be mainly divided into color dispersion-type and fourier transformation type two class. Color dispersion-type imaging spectrometer is using prism or grating as beam splitter, accepts the radiation information of each spectrum unit on the detector. Its development is compared early, extensive at aerospace field Application comparison, but spectral resolution is by the control of slit, and therefore it is more difficult in the infrared weak radiation of detection. Fourier transformation imaging spectrometer is that then the interferogram of the target object obtained is done the spectrum information that fourier transformation conversion obtains object by the interferogram first obtaining target object. According to the difference of the modulation system to interferogram, fourier transformation imaging spectrometer can be divided into time modulation type, spatial modulation type and space-time unite modulation type, time modulation type fourier transformation imaging spectrometer is based on Michelson interferometer structure, it adopts and drives a dynamic mirror to produce the path difference of time series, it is thus desirable to the drive unit of a set of precision. And the measurement completing a width interferogram needs the time of one-period, its real-time is poor. Its inside of spatial modulation fourier transformation imaging spectrometer is not containing moving parts, and it utilizes the different generation path differences of locus can realize the spectral measurement to rapid change object, and its real-time is relatively good. Typical case's representative of traditional spatial modulation fourier transformation imaging spectrometer is: but the interference beam splitting system volume of spatial modulation fourier transformation imaging spectrometer inside is bigger, it is not easy to realize the lightweight of system, and spatial modulation Fourier becomes picture spectrograph inside containing the slit relevant with spatial resolution, limit the optical throughput of the system of entering. Space-time unite modulation type fourier transformation imaging spectrometer is based on image plane interference image-forming principle, and it is big that therefore system does not have optical throughput containing slit and moving parts, the advantage of Stability Analysis of Structures.
Summary of the invention
The present invention is that to solve the interference beam splitting system volume of existing imaging spectrometer inside bigger, it is not easy to realize the lightweight of system, and it is inner containing the slit relevant with spatial resolution, limit the problem of the optical throughput of the system of entering, it is provided that a kind of space-time unite based on light-duty beam splitter modulation fourier transformation imaging spectrometer.
Based on the space-time unite modulation fourier transformation imaging spectrometer of light-duty beam splitter, comprising preposition imaging system, interference system, rearmounted imaging system and focus planardetector, described interference system comprises grid type beam splitter, multistage ladder micro-reflector and plane mirror; Target beam is incident to grid type beam splitter through preposition optical imagery system and is divided into two-beam, a branch of light reflexes to through grid type beam splitter and is imaged as the first picture point on plane mirror, and it is the 2nd picture point that another Shu Guangjing grid type beam splitter is transmitted through certain ladder surface imaging of multistage ladder micro-reflector; The light that described first picture point and the 2nd picture point send is incident to rearmounted imaging system imaging respectively after grid type beam splitter transmittance and reflectance, and described focus planardetector receives image-forming information;
The ladder height of the multistage ladder micro-reflector of described setting is d, within the scope of the field angle corresponding to the n-th ladder plane of reflection, target object at the n-th micro-plane of reflection imaging of ladder and target object in path difference between the virtual image formed by the mirror position of the n-th ladder plane of reflection is: ��=2nd;
The plane of reflection width setting multistage ladder micro-reflector is a, and the flight of Infrared Imaging Spectrometer is highly H, and the focal length of preposition imaging system (1) is f', then distance between adjacent image points is a, and the distance obtained between adjacent target object point is: �� h=Ha/f';
The catercorner length setting multistage ladder micro-reflector is h, and the field angle of preposition imaging system is:
The useful effect of the present invention: system of the present invention based on Michelson interferometer structure, its difference is that carrying out the dynamic mirror in replacement system with a multistage ladder reflecting mirror, carry out the moving parts in elimination system with this, greatly improve the reliability of system. Grid type beam splitter system is introduced instead of to be existed beam splitter and compensates plate in system, have volume advantage little, lightweight. The system that achieves is light-weighted while, because grid type beam splitter adopts membrane structure, avoid from axle aberration, for the design of overall optical system brings conveniently, it is possible to eliminate traditional beam splitter and compensate plate dispersion effect and luminous energy loss. System of the present invention is not containing slit, the optical throughput of system is substantially increased compared with spatial modulation fourier transformation imaging spectrometer, the signal to noise ratio of system can be improved greatly under high spectral resolution, realizing the reliability simultaneously making system of path difference spatial modulation, repeatable, real-time is obtained for very big raising, system eliminates the slit in spatial modulation type fourier transformation imaging spectrometer, in the signal to noise ratio of the system that effectively raises realizing high spectral resolution simultaneously.
Accompanying drawing explanation
Fig. 1 is the structure iron of the space-time unite based on light-duty beam splitter of the present invention modulation fourier transformation imaging spectrometer;
Fig. 2 is system intervention system architecture figure in the space-time unite based on light-duty beam splitter of the present invention modulation fourier transformation imaging spectrometer;
Fig. 3 is that the space-time unite based on light-duty beam splitter of the present invention modulation fourier transformation imaging spectrometer path difference produces schematic diagram;
In Fig. 4, Fig. 4 a is the image on multistage ladder micro-reflector of the space-time unite based on light-duty beam splitter of the present invention modulation fourier transformation imaging spectrometer under a window sweeps pattern, and Fig. 4 b is the imaging schematic diagram on CCD under a window sweeps pattern;
Fig. 5 is the structure iron of preposition imaging system in the space-time unite based on light-duty beam splitter of the present invention modulation fourier transformation imaging spectrometer;
Fig. 6 is the structure iron of rearmounted imaging system in the space-time unite based on light-duty beam splitter of the present invention modulation fourier transformation imaging spectrometer.
Embodiment
Embodiment one, composition graphs 1 to Fig. 6 illustrate present embodiment, based on the space-time unite modulation fourier transformation imaging spectrometer of light-duty beam splitter, by preposition imaging system 1, grid type beam splitter 6, multistage ladder reflecting mirror 7, plane mirror 5, rearmounted imaging contracting beam system 3, focus planardetector 4(CCD) etc. part composition. Preposition imaging system 1 and rearmounted contracting bundle imaging system 3 by transmission sphere mirror composition, under the prerequisite of satisfied picture matter, for system design, process and debug and bring great convenience. Grid type beam splitter 6 base film is fixed on one have on the grid support body of grid structure, is plated on base film by infrared spectroscopy film. This infrared beam splitter utilizes lattice work spectro-film system to be supported, and eliminates compensation plate, has volume advantage little, lightweight. Because grid type beam splitter 6 adopts membrane structure, the system that realizes is light-weighted while, it also avoid from axle difference, for the design of overall optical system brings conveniently, it is possible to eliminate traditional beam splitter and compensate plate dispersion effect and luminous energy loss. The imaging spectral instrument system that the present invention discusses itself, not containing slit, adopts the scan mode that window is swept, it is possible to use as imaging load that is spaceborne and machine load. System replaces the dynamic mirror in traditional time modulation type fourier transformation imaging spectrometer with a multistage ladder micro-reflector 7, makes whole system achieve staticize. Premenstrual being set to of the light that at a time terrain object object sends is divided into two identical bundle coherent lights of intensity as warp after system imaging by grid type beam splitter 6, a branch of light is imaged on plane mirror after reflecting via beam splitter, and another light beams is via being imaged on after beam splitter transmission on multistage ladder micro-reflector 7. Wherein the different plane of reflection of multistage ladder micro-reflector 7 correspond to imaging within the scope of the certain field angle of ground object, the picture being imaged on a certain plane of reflection of multistage ladder micro-reflector 7 and be imaged on the respective regions of corresponding plane mirror picture owing to having the phasic difference that fixing ladder height can produce to fix. Two picture points just can obtain the graphic information of target object after rearmounted imaging system imaging as the light that two relevant thing sources send and interfere strength information. After a window sweeps pattern, the multiframe image obtained is sheared and just can be obtained after splicing the interferogram of some objects in ground, then interferogram is done fourier transformation, so that it may to obtain the spectrogram of this thing point.
Imaging spectral instrument system described in present embodiment is as infrared system, and described grid type beam splitter 6 is made by MOEMS technique, and one side is steamed and is coated with infrared half-reflection and half-transmission film, to realize reflection and the effect of transmission each about 50%; Steam on another surface of grid beam splitter and it is coated with infrared optics anti-reflection film, to improve energy efficiency. The grid cell dimensions of grid type beam splitter 6 is mated mutually with multistage ladder micro-reflector 7 ladder width size, and the width of described multistage ladder micro-reflector 7 to be considered that diffraction effect is on the impact of interferogram and imaging. The single ladder height scope of described multistage ladder micro-reflector 7, between 1nm-50 ��m, adopts MOEMS technology or optical manufacturing method to make, and the ladder height error of described multistage ladder micro-reflector 7 is less than the 5% of ladder height. When adopting MOEMS fabrication techniques multistage ladder micro-reflector 7, for ensureing the homogeneity of ladder height, Rotation evaporation need to be adopted, control ladder height by light-operated method. Adopting radio-frequency sputtering or electron beam evaporation technique to prepare infrared high-reflecting film and protective membrane on multistage ladder micro-reflector 7 surface, described multistage ladder micro-reflector 7 ladder height, width and ladder number determine imaging spectrometer spectral resolution and image quality.
Composition graphs 2 and Fig. 3 illustrate present embodiment, and interference system is made up of grid type beam splitter 6, multistage ladder micro-reflector 7 and plane mirror 5. Wherein grid type beam splitter 6 adopts MOEMS fabrication techniques, and base film is fixed on the grid support body with grid structure, is plated on base film by infrared spectroscopy film. Multistage ladder micro-reflector 7 makes by carrying out the method for repeatedly photoetching plated film in substrate, and is coated with infrared high-reflecting film on its surface. The path difference of this imaging spectrometer interference system is that the ladder height by multistage ladder micro-reflector 7 and field angle are determined, the path difference that each ladder face of multistage ladder micro-reflector 7 produces is identical; Composition graphs 3 is the imaging process corresponding to the n-th ladder plane of reflection and plane mirror, and 8 is the n-th ladder plane of reflection, B1For the micro-plane of reflection imaging of target object n-th ladder, B2For target object is in the virtual image formed by the mirror position of the n-th ladder plane of reflection, B1And B2As two relevant thing points after rearmounted imaging system imaging, rearmounted focus planardetector interferes. set the ladder height of multistage ladder micro-reflector 7 as d, ��nIt is the field angle scope corresponding to the n-th ladder plane of reflection, at field angle ��nScope within, picture point B1And B2Between path difference be
��=2nd (1)
Wherein n is the ladder number of multistage ladder micro-reflector 7, and now field angle corresponding to the micro-plane of reflection of ladder is ��n. at field angle ��nScope within, the path difference that system produces is identical.
Composition graphs 4 illustrates present embodiment, Fig. 4 a is that a window sweeps the imaging process on multistage ladder micro-reflector 7 of native system under pattern, figure only depicts five ladder lens plane of reflection, A2, A1, A0, A-1, A-2, represents the target compound point A that ground is identical respectively, enters the position of imaging spectral instrument system in the different moment. A ' 2, A ' 1, A ' 0, A '-1, A '-2 is that A is engraved in imaging on the different plane of reflection of ladder lens when different respectively. The plane of reflection width getting multistage ladder micro-reflector 7 is a, if the flight of system is highly H, the focal length of preposition imaging system is f', then distance between picture point A ' 2 and A ' 1 is a, so just can obtain the distance between A2 and A1.
�� h=Hd/f'(2)
If now the travelling speed of imaging spectrometer is v, then the timed interval that object A carries out taking sampling is
�� T=�� h/v(3)
Fig. 4 b is the imaging process that a window is swept under pattern on native system CCD, and in figure, what �� represented is object imaging on CCD. It is the same row of CCD what do not get in the same time, it can be seen that when object has just entered a scanning window time, it is imaged on the right edge of row of CCD through imaging spectrometer, the then left side edge of the same row of its imaging CCD after a window sweeps pattern. When the plane of reflection number of multistage ladder micro-reflector 7 is 32, it is possible to obtain the 32 width images about target object on rearmounted infrared CCD focal plane. After being undertaken shearing and splicing by this 32 width image, so that it may to obtain the interferogram of this target object, then it is carried out the spectrum information that fourier transformation just can obtain this object.
Composition graphs 5 illustrates present embodiment, and Fig. 5 is the structure iron of the preposition imaging system of this imaging spectrometer, and the main effect of preposition imaging system 1 is through being imaged on the penetrating on mirror 5 of multistage ladder micro-reflector 7 and plane after grid type beam splitter respectively by object. The quality of preposition imaging system 1 image quality directly has influence on the quality that system is finally obtained terrain object subject image. Owing to the path difference of system is that the ladder height by multistage ladder micro-reflector 7 and field angle control, therefore preposition image-forming objective lens to be had certain field angle requirement, to ensure that all faces of multistage ladder micro-reflector 7 can receive the picture of object clearly. Preposition imaging system 1 adopts telecentric beam path in image space structure, identical to ensure the path difference produced on single ladder plane of reflection. The focal length of preposition imaging system 1 is f', and the catercorner length of ladder micro-reflector is h. The field angle of preposition imaging imaging system 1 requires
Due to the existence of in system point of beam system so that preposition image-forming objective lens also exists through beam splitter reflection and beam splitter transmission two light paths, but two light paths are equivalent, therefore only this road light path through beam splitter transmission is analyzed. In preposition imaging system, although grid type beam splitter 6 is in non-parallel light path, but grid type beam splitter 6 is a multi-layered infrared mark film and base membrane structure just, the impact of optical system imaging quality can be ignored by it, therefore grid type beam splitter 6 is not taken into account carrying out preposition optical system design. In order to the convenience processed and debug, preposition imaging system adopts four-piece type transmission-type structure, utilizes infra-red material silicon and germanium in conjunction with achromatism. Design result shows: system imaging quality is good, and MTF meets requirement close to diffraction limit, field angle.
Composition graphs 6 illustrates present embodiment, and the effect of rearmounted imaging system 3 is that the picture preposition imaging system 1 being imaged on multistage ladder micro-reflector 7 and plane mirror 5 is clearly on the rearmounted CCD of Cheng Qi. Therefore when system design, thing as rearmounted imaging system of multistage ladder micro-reflector 7 and plane mirror is designed. Due to the existence of point beam system, rearmounted imaging system also also exists two-way optical system, due to the equivalence of two-way optical system, is therefore only analyzed on plane mirror one tunnel. Owing to this imaging spectrometer is operated in medium wave infrared band, therefore adopt refrigeration type CCD, when rearmounted imaging system design using the aperture diaphragm of the cold screen diaphragm of CCD as whole rearmounted imaging system, to realize 100% cold light door screen matching efficiency. The same with preposition imaging system, grid type beam splitter 6 is when rearmounted optical system designs, it is not necessary to take into account. Rearmounted imaging system its adopt seven chip Homology of Sphere formula structures, system imaging quality is good, MTF close to diffraction limit,
Obviously, above-described embodiment is only for example is clearly described, and not to the restriction of the mode of enforcement. For those of ordinary skill in the field, can also make other changes in different forms on the basis of the above description. Here without the need to also cannot all enforcement modes be given exhaustive. And the apparent change thus extended out or variation are still among the protection domain of the invention.
Claims (5)
1. based on the space-time unite modulation fourier transformation imaging spectrometer of light-duty beam splitter, comprise preposition imaging system (1), interference system (2), rearmounted imaging system (3) and focus planardetector (4), it is characterized in that, described interference system (2) comprises grid type beam splitter (6), multistage ladder micro-reflector (7) and plane mirror (5); Target beam is incident to grid type beam splitter (6) through preposition optical imagery system (1) and is divided into two-beam, a branch of light reflexes to through grid type beam splitter (6) and is imaged as the first picture point on plane mirror (5), and it is the 2nd picture point that another Shu Guangjing grid type beam splitter (6) is transmitted through multistage certain ladder surface imaging of ladder micro-reflector (7);
The light that described first picture point and the 2nd picture point send is incident to rearmounted imaging system (3) imaging respectively after grid type beam splitter (6) transmittance and reflectance, and described focus planardetector (4) receives image-forming information;
The ladder height of the multistage ladder micro-reflector of described setting is d, within the scope of the field angle corresponding to the n-th ladder plane of reflection, target object at the n-th micro-plane of reflection imaging of ladder and target object in path difference between the virtual image formed by the mirror position of the n-th ladder plane of reflection is: ��=2nd;
The plane of reflection width setting multistage ladder micro-reflector is a, the flight of Infrared Imaging Spectrometer is highly H, the focal length of preposition imaging system (1) is f', then distance between adjacent image points is a, and the distance obtained between adjacent target object point is: �� h=Ha/f';
The catercorner length setting multistage ladder micro-reflector (7) is h, and the field angle of preposition imaging system (1) is:
Described grid type beam splitter (6) adopts MOEMS technology, base film is supported on the grid support body with grid structure, then being plated on base film by infrared spectroscopy film, described grid type beam splitter (6) utilizes lattice work spectro-film system to be supported.
2. the space-time unite based on light-duty beam splitter according to claim 1 modulation fourier transformation imaging spectrometer, it is characterized in that, the image-forming information received is swept after pattern collection through a window by described focus planardetector (4), the multiframe image gathered is sheared and spliced, obtain the interferogram of target object, interferogram is carried out fourier transformation, obtains the spectrogram of target.
3. the space-time unite based on light-duty beam splitter according to claim 1 modulation fourier transformation imaging spectrometer, it is characterized in that, preposition imaging system (1) adopts four Homology of Sphere formula structures, and rearmounted imaging system (3) adopts seven Homology of Sphere formula structures.
4. the space-time unite based on light-duty beam splitter according to claim 1 modulation fourier transformation imaging spectrometer, it is characterized in that, described multistage ladder micro-reflector (7) adopts the method carrying out repeatedly photoetching plated film in substrate to make, and the infrared high-reflecting film of plated surface described multistage ladder micro-reflector (7).
5. the space-time unite based on light-duty beam splitter according to claim 1 modulation fourier transformation imaging spectrometer, it is characterized in that, the single ladder height scope of described multistage ladder micro-reflector (7) is between 1nm-50 ��m, and the ladder height error of described multistage ladder micro-reflector (7) is less than the 5% of ladder height.
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| CN104697439B (en) * | 2015-03-30 | 2017-12-05 | 北方民族大学 | A kind of multiple beam ladder plane angle reflector laser interference instrument |
| CN113280916B (en) * | 2021-05-31 | 2022-08-05 | 中国科学院长春光学精密机械与物理研究所 | Fourier transform spectrometer |
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