CN206132219U - Imaging spectrometer based on space -time jointly make with MZI fiber waveguide array - Google Patents
Imaging spectrometer based on space -time jointly make with MZI fiber waveguide array Download PDFInfo
- Publication number
- CN206132219U CN206132219U CN201621092459.XU CN201621092459U CN206132219U CN 206132219 U CN206132219 U CN 206132219U CN 201621092459 U CN201621092459 U CN 201621092459U CN 206132219 U CN206132219 U CN 206132219U
- Authority
- CN
- China
- Prior art keywords
- mzi
- imaging
- chip
- pixel
- image planes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn - After Issue
Links
Abstract
The utility model discloses an imaging spectrometer based on space -time jointly make with MZI fiber waveguide array. Adopt no slit imaging system, including leading mirror and one deck interference spectroscope chip or the mutually range upon range of three -dimensional chip that forms of multilayer interference spectroscope chip, every layer of interference spectroscope chip includes mainly by the spot -size converter array, MZI array and detector array connect gradually the smooth waveguide structure who forms, the MZI array forms by having the different MZI parallel arrangement that interfere the arm difference, every MZI's input port receive in the formation of image image planes be on a parallel with push away sweep image area on the pixel signal of same row or row. The utility model discloses both simplify the complexity of light path, greatly alleviateed imaging spectrometer's weight and volume again, had high integration and high stability to promoted the incoming optical flux of system greatly, makeed that imaging spectrometer is miniaturized, light -dutyization.
Description
Technical field
This utility model relate to a kind of imaging spectrometer, more particularly to a kind of be based on space-time combined modulation and MZI light
The imaging spectrometer of waveguide array, the specifically Fourier transform spectrometer, based on space-time combined modulation and integrated light guide device
MZI devices in part.
Background technology
Optical instrument is always space exploration with a part important in remote sensing of the earth, the imaging on remote sensing satellite and aircraft
Spectrogrph is the important instrument being observed to air, ocean, land.
Imaging spectrometer is divided into telescope imaging system and spectrometer system, comparative maturity, spectrum of good performance
Technology has dispersive spectrometer and Fourier transform spectrometer, and they are all with discrete camera lens, beam splitter and combinations of detectors
Form, volume and weight is relatively large, it is relatively costly, and for element fixation has high requirement, and cannot adopt with signal
Collecting system is integrated.This is all a burden for spaceborne and airborne.The weight and volume of spaceborne and onboard instrument is controlled all
It is very strict.In recent years, unmanned plane becomes the new carrying platform of imaging spectrometer, with low cost, measurement range and space
The flexible advantage such as simple of resolution adjustment.Because unmanned plane is lightweight, load is little, it requires the smaller of imaging spectrometer
It is lighter with weight.For the ground external space is explored, the weight of satellite even more limits the key factor that people can explore scope.
" star is penetrated in breakthrough " calculated miniature space ship of the such as proposition such as English physicist Stefan Huo Jin is exactly that chip level is big
It is little, wherein being equipped with microcam.If imaging spectrometer can accomplish the weight of the size of same rank and gram rank,
Then video camera just can be replaced with miniature imaging spectrogrph, and remote sensing ability is greatly promoted.
With the expansion of optical field, integrated optical device because its small volume, dependable performance, vibrationproof kinetic force it is strong and
The characteristics of Highgrade integration, there are huge potentiality in many fields.Also there is miscellaneous chip spectrometer report, but it is main
Will be using in terms of concentrating on bio-sensing, coherence chromatographic imaging and laser spectrum monitoring, the application integration in terms of remotely sensed image is put down
The design of face fiber waveguide device scheme is also less.
Conventional Fourier transform spectrogrph is divided into spatial modulation type and time-modulation type, and Xiangli it is refined (Dong Ying, Xiangli are refined,
Zhao Baochang. " the interference system analysis of LARGE APERTURE STATIC IMAGING inteference imaging spectrometer. " Acta Optica vol.21, no.3, pp.330-
334, the LARGE APERTURE STATIC IMAGING inteference imaging spectrometer for 2001.) proposing belongs to space-time combined modulation type, and working method is particularly well-suited to
Airborne or spaceborne imaging spectrometer.Its principle is simple, and system structure simplifies, no moving component, it is allowed to have very big visual field
With arbitrary shape, the clear aperture of size, the volume of instrument, weight, work(can be greatly reduced in the case where luminous flux requirement is met
Consumption etc..But the spatial light interference system volume which uses is natural much larger than chip spectrometer, subsequently also needs to Fourier transformation
By on the parallel light focusing interfered to detector array, complicated integral structure degree and volume weight are more than chip light to lens arrangement
Spectrometer.
Fiber waveguide MZI is a kind of common device architecture.It is commonly used in photoswitch, photomodulator, optical sensing field.Which is former
Reason is light will to be divided into two parts all the way in the waveguide, remerges interfered after have passed through different light paths all the way.Two-way leads to
Cross that optical path difference is different from wavelength to cause result of interference bright dark different.Currently without the case applied it in imaging spectrometer
Example.
Utility model content
For the deficiency of background technology, the purpose of this utility model there are provided it is a kind of based on space-time combined modulation and
The imaging spectrometer of MZI optical waveguide arrays.
This utility model solves the technical scheme of its technical problem employing：
This utility model includes preset lenses and one layer of interference spectrum instrument chip or multi-coated interference spectrum instrument chip phase layer
Folded three-dimensional chip, every layer of interference spectrum instrument chip are included mainly by spot-size converter array, MZI arrays and detector array
The optical waveguide structure arranged in parallel that row are connected in sequence, MZI arrays are by N number of MZI parallels with different interfere arms difference
Row are formed, and each MZI has input port, and all MZI have N number of input port for arranging at equal intervals, and N number of input port is in preset lenses
Receive in the imaging image planes of (imaging system) parallel to pushing away N number of pixel signal for sweeping same row or row on image-region.
Described preset lenses refer to the imaging system in imaging spectrometer, using airborne or spaceborne imaging system, wrap
Include preset lenses and chip direction mobile collection image can be swept along pushing away in interior imaging system.It is described as the preposition of imaging system
Mirror includes a series of object lens arranged along light path successively, limits Kong Lan of the visual field for N × M Pixel size of correspondence.
The interval of spot-size converter array is identical with the imaging interval of N number of pixel, and input light is changed by spot-size converter
Input waveguide is entered into the mould speckle with single mode waveguide pattern match, the equicohesive light of two beams is divided into through certain light path by MZI
After the recovery is remerged is interfered, and the result of interference is received by corresponding upper detector and is converted to the signal of telecommunication.
In a described interference spectrum instrument chip, spot-size converter array includes N number of spot-size converter, and MZI arrays include N
Individual MZI, detector array include N number of detector, and each self-corresponding MZI of spot-size converter Jing are connected with each self-corresponding detector
Form the fiber waveguide that N groups are gathered for pixel；The input port of each spot-size converter in described spot-size converter array
Alignment preset lenses center, to ensure to receive the maximum light energy of place pixel.
The first embodiment is to include preset lenses, one layer of interference spectrum instrument chip and piezo-electric motor, one layer of interference spectrum
Instrument chip is placed in the imaging image planes of preset lenses, piezo-electric motor connection interference spectrum instrument chip, and piezoelectric motor control is along imaging picture
The column direction in face is moved in parallel；In spot-size converter array, the input port alignment of each spot-size converter is received in imaging image planes
Along the optical signal of each pixel in row direction, the input port spacing in MZI arrays between MZI and the picture for being imaged image planes edge row direction
Spacing between unit is identical；Interference spectrum instrument chip passes through piezoelectric motor control along the column direction of imaging image planes, and which moves so that
Interference spectrum instrument chip is respectively aligned to be imaged the pixel of the different rows of image planes and is scanned, so that receiving in an imaging cycle
The whole pixel signal of imaging image planes；The row of imaging image planes is oriented parallel to push away and sweeps direction, and column direction sweeps direction perpendicular to pushing away, under
One imaging cycle edge pushes away sweeps direction one pixel of movement apart from being scanned again, so that targeted image acquisition object
Each pixel position through multiple imaging cycles in full filed by imaging receiver, every time through the MZI of different interfere arms differences,
Obtain complete interferogram.
Preset lenses outgoing along push away diverse location in the row visual field for sweep direction light enter chip difference interference length
Poor MZI, result of interference are received by correspondence detector.It is then fast to chip perpendicular to the light for pushing away diverse location in the visual field for sweep direction
Speed positioning scanning, is received by chip successively.
Second embodiment is three for including preset lenses, being formed by multi-disc identical interference spectroscope chip laminate bonding
Dimension chip, three-dimensional chip are placed in the imaging image planes of preset lenses, have N number of interfere arm difference different in every interference spectrum instrument chip
MZI arrays；In the spot-size converter array of a piece of interference spectrum instrument chip, the input port alignment of each spot-size converter is received
The optical signal of each pixel in edge row direction in imaging image planes, the input port spacing in MZI arrays between MZI and imaging image planes edge
Spacing between the pixel in row direction is identical；The multi-disc interference spectroscope chip laminate direction alignment of three-dimensional chip receives imaging image planes
On along column direction each pixel optical signal, between interference spectrum instrument chip the spacing of corresponding input port by substrate and
Top covering THICKNESS CONTROL causes which identical with imaging spacing of the image planes along between the pixel of column direction；On three-dimensional chip, each mould speckle turns
Parallel operation is constituted and is aligned to as a plane of each pixel signal in image planes, so that receiving in one imaging cycle of three-dimensional chip
The whole pixel signal of imaging image planes；The row of imaging image planes is oriented parallel to push away and sweeps direction, and column direction sweeps direction perpendicular to pushing away, under
One imaging cycle edge pushes away sweeps direction one pixel of movement apart from being scanned again, so that targeted image acquisition object
Each pixel position through multiple imaging cycles in full filed by imaging receiver, every time through the MZI of different interfere arms differences,
Obtain complete interferogram.
The third embodiment is the three-dimensional core for including preset lenses, being formed by multi-disc interference spectroscope chip laminate bonding
Piece, three-dimensional chip are placed in the imaging image planes of preset lenses, the MZI battle arrays for having interfere arm difference all same in every interference spectrum instrument chip
Row, the interfere arm difference of the MZI arrays of each interference spectrum instrument chip are differed；The mould speckle conversion of a piece of interference spectrum instrument chip
In device array, the input port alignment of each spot-size converter receives the optical signal for being imaged in image planes each pixel along column direction,
Spacing of the input port spacing in MZI arrays between MZI with imaging image planes along between the pixel in row direction is identical；Three-dimensional chip it is many
Piece interference spectroscope chip laminate direction alignment receives the optical signal in imaging image planes along each pixel for arranging direction, interference spectrum
Between instrument chip, the spacing of corresponding input port causes which with imaging image planes along row side by substrate and top covering THICKNESS CONTROL
To pixel between spacing it is identical；On three-dimensional chip, each spot-size converter is constituted and is aligned to as each pixel signal in image planes
One plane, so that the whole pixel signal of imaging image planes is received in one imaging cycle of three-dimensional chip；The row of imaging image planes
It is oriented parallel to push away and sweeps direction, column direction sweeps direction perpendicular to pushing away, next imaging cycle is swept direction and moves a pixel along pushing away
Distance is scanned again, so that each pixel position of targeted image acquisition object exists through multiple imaging cycles
Full filed is obtained complete interferogram by imaging receiver every time through the MZI of different interfere arm differences.
Second is different in the row visual field for sweep direction along pushing away by preset lenses outgoing with the third embodiment
The light of position enters the different MZI for interfering length difference of chip, and result of interference is received by correspondence detector.Direction is swept perpendicular to pushing away
In visual field, the light of diverse location then enters difference the MZI, the imaging pixel Jing of the same position in ground of identical interference length difference
The result for crossing different optical path difference n times interference is converted to the signal of telecommunication by corresponding upper detector reception, is finally become using Fourier
Change etc. method migration is processed into spectral signal.
Described fiber waveguide MZI array chip is placed perpendicular to image planes, and the input array of its chips receiving light is lined up
Straight line is directed at image planes along that column direction of aircraft scanning direction, and N number of input is directed at N number of pixel of image planes.
In described MZI arrays, the interfere arm difference of all MZI is started from scratch so that each
The optical signal interference passed through in individual MZI, is then received by each self-corresponding detector of the detector array on chip.Interfere arm
Length difference is started from scratch to (n-1) × delta L with arithmetic progression, and n is natural number, and delta L represent interfere arm length difference.
The interfere arm difference of all MZI arrays of each interference spectrum instrument chip is started from scratch successively with arithmetic progression side
Formula is incremented by so that through optical signal interference after received by each self-corresponding detector of the detector array on chip.Interfere
Arm lengths difference is started from scratch to (n-1) × delta L with arithmetic progression, and n is natural number, and delta L represent interfere arm length difference.
Every input waveguide of described MZI arrays is Jing after 1 × 2 bonder, then 2 × 1 bonders of Jing or 2 × 2 couplings
The branched structure of device is connected with each self-corresponding output waveguide so that bandwidth of operation is big.
Every input waveguide of described MZI arrays is Jing after 1 ' 2 bonder, then 2 × 1 bonders of Jing or 2 × 2 bonders
Multimode interference (MMI) structure be connected with each self-corresponding output waveguide so that coupling loss is little.
The interfere arm of the MZI arrays adopts the S type structures positioned at the same side, as shown in Figure 7.When MZI quantity it is more, two
Relative to waveguide bend-radius less, waveguide bend-radius adopt this knot when occupying relatively significant area to the maximum optical path difference of arm
Structure can reduce the shared area of multiple MZI stackings.
The MZI arrays adopt heavy in section ridge single mode waveguide structure.The light mould field of this structure is concentrated mainly on waveguide
In, single mode can be kept in the visible and big operating wavelength range of near-infrared, while the TE and TM mode refractive index of waveguide is differed
Very little, can allow MZI polarization insensitives, so as to receive extraneous full polarisation work without filtering half polarization.This waveguide
The larger shortcoming of bending radius can be solved by being turned using 45 ° of direct reflections of waveguide where 90 ° of bendings.
Optical path difference change in the MZI arrays interfere arm meets nyquist sampling theorem, specifically by operation wavelength area
Between determine.According to imaging spectrometer design requirement and optical waveguide design processing technology, can be sampled or full from low pass is met
Sufficient bandpass sampling.
The detector array is classified as the detector being integrated on chip or the detector being packaged in after chip output waveguide
Array.
This utility model is had an advantageous effect in that compared with background technology：
1st, using interference system part in the refined LARGE APERTURE STATIC IMAGING inteference imaging spectrometer in chip spectrometer replacement Xiangli,
Remain the various advantages of LARGE APERTURE STATIC IMAGING inteference imaging spectrometer while, instead of with chip piece complex in system
Interfered device part, further reduces the volume weight of whole imaging spectrometer, enhances the stability of system.
2nd, relative to existing interference spectroscope or grating type spectrum instrument chip, using space-time combined modulation method into
The signal of one entrance port need not be divided equally into many roads by the chip as needed for spectrogrph, in the energy for being increased each road
So as to improve detectivity.The signal of same pixel is received, the device sensitivity of same performance is original N times.
3rd, imaging spectrometer does not have entrance slit structure, thus is " heavy caliber ", while the light energy for receiving is bigger.
Meet and the volume of instrument, weight, power consumption under luminous flux requirement, can be greatly reduced.
4th, for the application demand of imaging spectrometer, the fiber waveguide MZI array chip for constituting interference spectroscope employs two
Plant S types structure correspondence difference optical path differences so that the multichannel MZI arrays for meeting the application demand of imaging spectrometer can be most tight
Be arranged on chip, greatly improve space availability ratio, reduce chip volume.
5th, compared to LARGE APERTURE STATIC IMAGING inteference imaging spectrometer picture battle array parallel to flight scanning direction N number of pixel institute Jing
The interference length difference crossed, because its reasons in structure, is the central point relative to numbering N/2, the actual interference for there was only half
Length difference is useful.The interference length difference that N number of MZI can be independently selected using chip spectrometer is all useful signal, so as to
The spectral resolution being doubled in the case of identical spatial resolution.
Description of the drawings
Fig. 1 is the heavy caliber static interference imaging spectrometer mentioned in background technology.
Fig. 2 is a kind of embodiment of this utility model imaging spectrometer.
Fig. 3 is the another embodiment of this utility model imaging spectrometer.
Fig. 4 the corresponding ground location of each pixel and is pushed away and is swept direction in the image plane of preset lenses.
Fig. 5 is to change over time, image plane same row N of the preset lenses of the MZI of N number of different length difference on correspondence chip
The pinining ground location coordinates that individual pixel is arrived in different receptions.
Time interval is the time that aircraft visual field moves the corresponding ground distance of pixel.
Fig. 6 is spot-size converter structural representation.Image plane picture of the spot-size converter according to follow-up waveguide and preset lenses
Different and different, the light in replacement Fig. 1 in detector array reception image plane of first size design.Spot-size converter is in core simultaneously
Place identical with image space-between to receive maximum light energy its mutual spacing towards preset lenses center on piece.
Fig. 7 is the schematic diagram of two kinds of s types MZI.It is respectively used to a part of MZI structures (top two) that optical path difference is close to 0
MZI structures (the lower section three) figure of the situation somewhat larger with optical path difference.
Fig. 8 is embodiment silicon oxynitride ridge waveguide TE and TM pattern effective refractive index under 0.9 μm to 1.7 mum wavelengths
Figure.
Fig. 9 is the normalization light spectrum signal for emulating certain pixel input, respectively with wave number and wavelength as abscissa.
Figure 10 is to interfere the N (512) for obtaining individual defeated after the pixel of this emulation is scanned have passed through the individual MZI of all N (512)
Go out light intensity.It is normalized with the MZI output intensities that the 1st optical path difference is 0 as 1.
Figure 11 be the data to Figure 10 carry out Fourier transformation and the dispersion in view of fiber waveguide compensate it is later
Reduction with wave number as abscissa spectrogram.Contrast verification device principle feasibility is carried out with Fig. 9.
Figure 12 be the data to Figure 10 carry out Fourier transformation and the dispersion in view of fiber waveguide compensate it is later
Reduction with wavelength as abscissa spectrogram.Contrast verification device principle feasibility is carried out with Fig. 9.
In figure：Preset lenses 1, piezo-electric motor 2, interference spectrum instrument chip 3, spot-size converter array 4, MZI arrays 5, detection
Device array 6, preset lenses center 7, three-dimensional chip 8, collimating mirror 9, sagnac lateral shear interferometers 10, fourier mirror 11, detector
12。
Specific embodiment
The utility model is described in further detail with reference to the accompanying drawings and examples.
Existing spectrogrph be as shown in figure 1, including the preset lenses 1 as the preposition imaging system of spectrogrph, collimating mirror 9,
Sagnac lateral shear interferometers 10, fourier mirror 11 and detector 12, the collimated mirror of 1 emergent light of preset lenses 9 incide sagnac
In lateral shear interferometer 10,10 exit end of sagnac lateral shear interferometers is received by detector 12 Jing after fourier mirror 11.
Imaging system of the present utility model does not need slit, the MZI for having N number of different interfere arm differences on chip, MZI arrays point
There is not N number of input port for arranging at equal intervals, input port is received in the image planes of imaging system, and each input port is parallel
Push away in aircraft and sweep a corresponding pixel signal in the N number of pixel signal in direction.
Specifically include that preset lenses 1 and one layer of interference spectrum instrument chip 3 or multi-coated interference spectrum instrument chip 3 are mutually laminated
Three-dimensional chip 8, every layer of interference spectrum instrument chip 3 includes main by spot-size converter array 4, MZI arrays 5 and detector
The optical waveguide structure arranged in parallel that array 6 is connected in sequence, MZI arrays 5 are put down by N number of MZI with different interfere arms difference
Row arrangement is formed, and each MZI has input port, and all MZI have N number of input port for arranging at equal intervals, and N number of input port is front
Receive in the imaging image planes for putting mirror 1 (imaging system) parallel to pushing away N number of pixel signal for sweeping same row or row on image-region.
Imaging spectrometer of the present utility model is operated in push-broom pattern, but its imaging system does not have slit, the picture of reception
The face battle array signal of N × M pixel is obtained in image planes, is applied in the imaging system of aircraft, involved aircraft bag
Include the equipment such as aircraft, unmanned plane, satellite.It is the direction along N number of pixel that aircraft pushes away the direction swept, N number of pixel in this direction
Different fiber waveguides MZI for interfering length differences are entered by fiber waveguide, and parallel to pushing away M pixel for sweeping direction into identical interference
Fiber waveguide MZI of length difference.For each point in visual field, existed by the visual field swept relative to imaging system that pushes away of aircraft
Image planes diverse location is imaged, and when the area of the inswept full filed of aircraft, has passed through whole through this point of n times imaging
The MZI of interference length difference, so as to obtain the interferogram of this point.Fourier transformation is implemented to interferogram and can be obtained by the point
Spectral distribution.For the every bit in visual field, spectral information can be obtained in above process, and is combined with spatial information
Get up just to have obtained the data cube of imaging spectrometer.
Embodiment of the present utility model and its implementation process are as follows：
Fig. 2 and Fig. 3 are the realities of the Fourier transformation imaging spectrometer of two kinds of space-time combined modulations described in the utility model
The mode of applying is illustrated.On ground, certain region is imaged onto some position in image planes by preset lenses becomes a pixel, by interference light
Correspondence position spot-size converter on spectrometer chip receives and imports the MZI of correspondence sequence number, is connect by detector after interfering
Receive detected intensity.On ground, this region is with the movement of carrier, and its correspondence imaging pixel position is moved along spot-size converter row
Constantly received by the spot-size converter of different sequence numbers and enter correspondence MZI, eventually pass through 512 identical processes, this ground region
Signal is inswept by the MZI of all sequence numbers.
Fig. 4 is the position and its correspond on the ground when aircraft is moved that preset lenses imaging pixel is corresponded on ground
Moving direction, moving direction is parallel to N pixel string.The corresponding position of this N pixel arranges the MZI of N number of different optical path differences, its
In aircraft scanning process, each corresponding ground location of MZI reception signals is as shown in Figure 5.t1To t5Adjacent time inter is ground
Face imaging pixel moves the time corresponding to the distance of adjacent picture elements in image planes.When a ground region, correspondingly pixel is traversed
After all N number of MZI, its spectral information can be calculated.
From the point of view of specifically, through preset lenses imaging Pixel domain light by lens focuss to picture point, be able to be coupled into
In waveguide, a condition is to need the spot-size converter for example shown in Fig. 6.Its effect is so that the light field mode distributions of pixel are big
Little and waveguide receiving port matching, to receive light as much as possible.Another condition is that the numerical aperture satisfaction of waveguide can be as far as possible more
Each position of receiving lens focus on the light of pixel.By taking the imaging spectrometer of lunar probe Chang'E-1 as an example, its preposition optical system
The F numbers of system are 7.34, and the required numerical aperture for receiving waveguide is 0.135, if calculated according to its system-wide performance, F numbers are
2.4, the required numerical aperture for receiving waveguide is 0.385, and these numerical value are substantially less than the numerical value of silicon oxynitride or silicon waveguide
Aperture.So satisfied coupling efficiency can be reached by the design waveguide and spot-size converter with preset lenses match parameters.
Optical signal is interfered through MZI after entering waveguide, and Fig. 7 is the schematic diagram of two kinds of s types MZI.With general classical MZI
Structure is different, and this structure produces optical path difference by the waveguide distance difference of inside and outside two-arm during 90 degree of bendings, this optical path difference
For two-arm waveguide spacing sum before and after bending.As shown in 2 MZI in top in Fig. 7, the feelings of (within 20 μm) less for optical path difference
Condition, as between two waveguides of two-arm, spacing has minima (such as 10 μm), the minimum optical path difference of a bending manufacture is more than required
The numerical value wanted, so rightabout 90 degree of bendings twice are carried out by two waveguides, when being advanced with former and later two horizontal directions
The difference of waveguide spacing is producing suitable less optical path difference.And for the optical path difference of slightly larger (being more than 20 μm), can be as in Fig. 7
Shown in 3 MZI in lower section, by controlling waveguide spacing before and after bending, reached by 90 degree of bendings.This MZI structures are special
It is suitable for use in MZI quantity a lot, waveguide bend-radius are larger and situation that MZI optical path differences are relatively small.
Fig. 8 is that a kind of specific silicon oxynitride ridge waveguide TE and TM patterns under 0.9 μm to 1.7 mum wavelengths are effectively reflected
Rate figure, the silicon oxynitride ridge waveguide core refractive rate 1.6 which adopts slightly change with wavelength, and covering adopts silicon dioxide.Ridge
1.2 μm of type waveguide flat board area thickness, ridge is high 1 μm, and ridge is wide 2.2 μm.Ridge waveguide can keep single mode work in wider wave-length coverage
Make and relative to rectangle single mode waveguide, the equivalent refractive index that its TE and TM is polarized is poor less, and these advantages are for this imaging
Spectrometer design is extremely important.
For the pixel for imaging in above chip plane or issuing position, ultrasound wave of Fig. 2 schemes by piezoelectric ceramics
Motor quickly moves up and down the signal of chip scanning diverse location, and Fig. 3 schemes cover all pictures in aperture by stacking M pieces chip
Unit is receiving all pixels.It is specific as follows：
Embodiment 1
Specifically for example, as shown in Fig. 2 the imaging system such as preset lenses 1 is placed in aircraft bottom, adopted towards underface
Collection, the imaging image planes of 1 imaging system of preset lenses are N × M image planes, and the pushing away of aircraft is swept direction and swept to push up in figure, is imaged picture
Corresponding to parallel, face pushes away that to sweep direction be the N number of pixel of a row, the input port pair of N number of spot-size converter in spot-size converter array 4
Quasi- correspondence receives the optical signal of N number of pixel in edge row direction in imaging image planes, and the input port of N number of MZI of MZI arrays 5 is received
With the optical signal of N number of pixel in transmission row direction, the input port spacing in MZI arrays 5 between MZI is with imaging image planes along row direction
Pixel between spacing it is identical；
Have in each column for direction sweep M pixel pushing away perpendicular to aircraft, interference spectrum instrument chip 3 is along imaging image planes
Column direction controls its motion by piezo-electric motor 2 so that interference spectrum instrument chip 3 is respectively aligned to the row's pixel for being imaged image planes M row
It is scanned, so that the whole N × M pixel signals of imaging image planes are received in an imaging cycle；
Next imaging cycle edge pushes away sweeps direction one pixel of movement apart from being scanned again, so that targeted figure
As each pixel position of acquisition target passes through different interference through N number of imaging cycle in full filed by imaging receiver, every time
The MZI of arm difference, obtains complete interferogram.
Embodiment 2
Specifically for example, as shown in figure 3, the imaging system such as preset lenses 1 is placed in aircraft bottom, adopted towards underface
Collection, the imaging image planes of 1 imaging system of preset lenses are N × M image planes, and the pushing away of aircraft is swept direction and swept to push up in figure, is imaged picture
Corresponding to parallel, face pushes away that to sweep direction be the N number of pixel of a row.
In the spot-size converter array 4 of a piece of interference spectrum instrument chip 3, the input port alignment of N number of spot-size converter is received
The optical signal of N number of pixel in edge row direction in imaging image planes, the input port spacing in MZI arrays 5 between MZI and imaging image planes edge
Spacing between the pixel in row direction is identical；3 stacked direction of the M piece interference spectrums instrument chip alignment of three-dimensional chip 8 receives imaging picture
On face along column direction M pixel optical signal, between interference spectrum instrument chip 3 spacing of corresponding input port pass through substrate
Cause which identical with imaging spacing of the image planes along between the pixel of column direction with top covering THICKNESS CONTROL.
On three-dimensional chip 8, all spot-size converters are constituted and are aligned to as a plane of whole N × M pixel signals in image planes,
Three-dimensional chip forms the input waveguide matrix of a N × M, so that an imaging cycle of the three-dimensional chip 8 in aircraft
It is interior to receive the whole pixel signal of imaging image planes.
The row of imaging image planes is oriented parallel to push away and sweeps direction, and column direction sweeps direction perpendicular to pushing away, next imaging cycle edge
Push away and direction one pixel of movement is swept apart from being scanned again, so that each pixel position of targeted image acquisition object
Complete interference, every time through the MZI of different interfere arm differences, is obtained by imaging receiver in full filed through N number of imaging cycle
Figure.
Embodiment 3
Specifically for example, as shown in figure 3, the imaging system such as preset lenses 1 is placed in aircraft bottom, adopted towards underface
Collection, the imaging image planes of 1 imaging system of preset lenses are N × M image planes, and the pushing away of aircraft is swept direction and swept to push up in figure, is imaged picture
Corresponding to parallel, face pushes away that to sweep direction be the N number of pixel of a row.
In the spot-size converter array 4 of a piece of interference spectrum instrument chip 3, the input port alignment of M spot-size converter is received
The optical signal of the M pixel along column direction, the input port spacing in MZI arrays 5 between MZI and imaging image planes edge are imaged in image planes
Spacing between the pixel in row direction is identical；3 stacked direction of the N piece interference spectrums instrument chip alignment of three-dimensional chip 8 receives imaging picture
On face along column direction N number of pixel optical signal, between interference spectrum instrument chip 3 spacing of corresponding input port pass through substrate
Cause which identical with imaging spacing of the image planes along between the pixel of column direction with top covering THICKNESS CONTROL.
On three-dimensional chip 8, all spot-size converters are constituted and are aligned to as a plane of whole N × M pixel signals in image planes,
Three-dimensional chip forms the input waveguide matrix of a N × M, so that an imaging cycle of the three-dimensional chip 8 in aircraft
It is interior to receive the whole pixel signal of imaging image planes.
The row of imaging image planes is oriented parallel to push away and sweeps direction, and column direction sweeps direction perpendicular to pushing away, next imaging cycle edge
Push away and direction one pixel of movement is swept apart from being scanned again, so that each pixel position of targeted image acquisition object
Complete interference, every time through the MZI of different interfere arm differences, is obtained by imaging receiver in full filed through N number of imaging cycle
Figure.
Principle of the present utility model is as follows：
As shown in Figures 2 and 3, on ground, certain region is imaged onto some position in image planes by preset lenses and becomes a picture
Unit, is received by the correspondence position spot-size converter on interference spectrum instrument chip and imports the MZI of correspondence sequence number, after interference
It is received by a detector detected intensity.On ground, this region is with the movement of carrier, and its correspondence imaging pixel position turns along mould speckle
Parallel operation row are mobile constantly to be received as shown in Figure 5 into correspondence MZI by the spot-size converter of different sequence numbers.Eventually pass through N number of identical
Process, this ground regional signal is inswept by the MZI of all sequence numbers.Then according to known each MZI optical path difference, by each
Individual detector receives optical signal and carries out the ground location spectrogram that Fourier transformation obtains receiving.With the heavy caliber of the refined proposition in Xiangli
Unlike static interference imaging spectrometer, this utility model each pixel optical signal is carried out the part of Fourier transformation by
MZI arrays come undertake from unlike general Fourier transform spectrometer, herein with optical waveguide structure in larger wave-length coverage
The interference for inside carrying out, its waveguide dispersion can not be ignored.
In the case where waveguide dispersion is not considered, the effective refractive index of waveguide can consider unrelated with wavelength, be set to neff。
For a waveguide length differences are L=x/neffMZI, x represents the interfere arm optical path difference under effective refractive index.Device is not considered
The loss of the imperfect introducing of part, the transmitance of its light to certain wave number σ is：
T (σ, x)=0.5+0.5cos (2 π σ x) (1)
Wherein, T (σ, x) be wave number σ light input waveguide interfere arm optical path difference for x MZI absorbance.One frequency spectrum point
Cloth (being coordinate according to wave number) for G (σ) light be input into this MZI after the total light intensity that obtains be：
Wherein, I (x) is the total light intensity of the MZI outputs that Waveguide interference arm optical path difference is x.MZI in x=0 receives light intensity
I (0) is designated as I0, while (2) formula can be write as exponential form：
According to the property of Fourier transformation and by relational expression L=x/neffBring (3) formula into, can obtain
Wherein, I (σ) is to 2I (neffL)-I0Carry out the function that Fourier transform operation is obtained.
It is respectively from 0 to (N-1) n in N number of interfere arm optical path differenceeffΔ L, with neffDifferent MZIs of the Δ L for arithmetic progression
In the case of receiving same light source output successively, I (x) discretizations become ordered series of numbers：
IMZI(k)=I (kneffΔ L), k=0,1,2 ..., N-1 (5)
Wherein, IMZIK () represents+1 MZI of kth.Such that it is able to obtain the computing formula of input spectrum curve G (σ)：
Wherein, first optical path difference be need when the output light intensity values of 0 MZI are calculated it is many divided by 2 therefore independent when calculating
List.Because which is on the border of sample range.
Because operating wavelength range is very big in design, need to consider waveguide dispersion effect, the equivalent refractive index of waveguide with
The change of wavelength is as shown in figure 8, can regard as in certain limit and wavelength linear relation.It is taken as that refractive index-wave number is closed
System can be fitted to relational expression n (σ)=A-B/ σ.Wherein A and B represent refractive index wave-number relationship coefficient, are constants, by waveguide material
Material dispersion and waveguiding structure are determined.
Then formula (1)～(6) formula is changed into formula (7)～(10)：
Wherein, I (σ) is to 2I (neffL)-I0The function that Fourier transform operation is obtained is carried out, G (σ) is the light of input
Spectrum.
In the case of discretization, computing formula is：
Wherein, I (σ) function representation is to 2IMZI(k)-I0(conversion process is by public affairs for the function that the Fourier transformation of sequence is obtained
Formula (6) is represented), G () is input spectrum.Thus it is possible to pass through the output intensity I of N number of MZIMZIK () instead releases the light letter of input
Number curve of spectrum G (σ).
This utility model is described further with the example with specific experiment data below.
Chip base selects silicon, and waveguide core layer is the silicon oxynitride of refractive index 1.6,2.2 μm of thickness, etches when making waveguide
1 μm deep, obtains ridge waveguide, and equivalent refractive index is as shown in Figure 8.Respectively there are 4 μm of under-clad layer on silicon dioxide sandwich layer top and bottom.Design
One imaging spectrometer, preset lenses are imaged 25 μm of image space-between, then 25 μm of mould speckle bonder spacing shown in Fig. 2.Imaging spectral
Instrument operating wavelength range 900nm～1700nm, according to bandpass sample theory, in order that frequency spectrum is not overlapped after sampling, allows work
Frequency is placed on 1/2 sample frequency between a sampling frequency.Then unit optical path difference Δ x can be between 0.85 μm to 0.9 μm.Take
0.875μm.Imaging spectrometer is 512 along the pixel number N of the aircraft direction of motion, then MZI most long light paths difference xN-1=0.875
× 511=447.125 μm.Correspondence waveguide length differences LN-1=xN-1/neff=284.612 μm.Its spectral resolution is according to general
The resolution formula of Fourier transform spectrometer,
Obtain after the change for carrying out meeting this utility model situation：
In 900nm wavelength, resolution is 1.74nm.In 1700nm, wavelength resolution is 6.2nm.In very high water
It is flat.
By each MZI, the MZI output lights of each numbering for obtaining in the input chip of the light with spectrum as shown in Figure 9
It is strong as shown in Figure 10.After processing described in above-mentioned principle, the reduction spectrum for obtaining (horizontal seat as is illustrated by figs. 11 and 12
Mark is respectively wave number and wavelength, convenient to contrast).It can be seen that use fiber waveguide MZI (MZI) array based on space-time combined modulation
Imaging spectrometer its for the reducing power of spectrum be accurate.
For the push-broom type imaging spectrometer for typically having slit, the light of one pixel in ground enters meeting after spectrogrph
Being divided into N parts carries out spectral measurement, is 1/N per a average light energy.And the Fourier transformation based on space-time combined modulation
Imaging spectrometer is only divided into 2 parts to the light of one pixel in ground and carries out coherent superposition, the light energy that detector is detected later
Intensity is the magnitude of the former N times, and sensitivity is greatly increased.In addition for chip spectrometer, again will after into chip
Light is divided into N parts and can also introduce excess loss, chip spectrometer of the present utility model eliminates this structure, it is to avoid this kind of extra
Loss.From for the angle of whole imaging spectrometer, only receive on direction a ground pixel light letter parallel to pushing away sweeping originally
Number, sweeping on direction while receiving N number of pixel optical signal, the simultaneously incident luminous flux of system increased N times parallel to pushing away now.
So in the case where keeping detector sensitivity constant, the receiving aperture for being imaged preset lenses can just reduce.
Thus, above-described embodiment can illustrate that this utility model simplifies the complexity of light path, and using the spy of optical chip
Point greatly alleviates the weight and volume of imaging spectrometer, with high integration, enhances the stability of system, improves system
Incident flux, reduce receiving aperture in the case of same probe sensitivity so that the imaging section of imaging spectrometer
Divide and spectra part all miniaturization, lightness.
Note, above-described embodiment is, for illustrating this utility model, rather than this utility model to be limited,
It is of the present utility model spirit and scope of the claims in, any modifications and changes that this utility model is made, all incite somebody to action
Fall into protection domain of the present utility model.
Claims (10)
1. a kind of based on space-time combined modulation and the imaging spectrometer of MZI optical waveguide arrays, it is characterised in that：Including preset lenses
(1) and the three-dimensional chip (8) that is mutually laminated of one layer of interference spectrum instrument chip (3) or multi-coated interference spectrum instrument chip (3),
Every layer of interference spectrum instrument chip (3) including mainly by spot-size converter array (4), MZI arrays (5) and detector array (6) according to
The secondary optical waveguide structure being formed by connecting, MZI arrays (5) are formed by N number of MZI with different interfere arms difference is arranged in parallel, each
MZI has input port, and all MZI have N number of input port for arranging at equal intervals, imaging picture of N number of input port in preset lenses (1)
Receive on face parallel to pushing away N number of pixel signal for sweeping same row or row on image-region.
2. according to claim 1 a kind of based on space-time combined modulation and the imaging spectrometer of MZI optical waveguide arrays, which is special
Levy and be：In a described interference spectrum instrument chip (3), spot-size converter array (4) includes N number of spot-size converter, MZI arrays
(5) including N number of MZI, detector array (6) includes N number of detector, and each self-corresponding MZI of spot-size converter Jing are corresponding with respective
Detector connect the fiber waveguide to form N groups for pixel is gathered；Each mould speckle in described spot-size converter array (4) turns
Input port alignment preset lenses center (7) of parallel operation.
3. arbitrary described a kind of based on space-time combined modulation and the imaging spectral of MZI optical waveguide arrays according to claim 1-2
Instrument, it is characterised in that：Including preset lenses (1), one layer of interference spectrum instrument chip (3) and piezo-electric motor (2), one layer of interference spectroscope
Chip (3) is placed in the imaging image planes of preset lenses (1), piezo-electric motor (2) connection interference spectrum instrument chip (3), piezo-electric motor (2)
Control is moved in parallel along the column direction of imaging image planes；
In spot-size converter array (4), the input port alignment of each spot-size converter is received in imaging image planes along each of row direction
The optical signal of individual pixel, between the input port spacing and imaging image planes in MZI arrays (5) between MZI is along between the pixel in row direction
Away from identical；
Interference spectrum instrument chip (3) controls its motion by piezo-electric motor (2) along the column direction of imaging image planes so that interference light
Spectrometer chip (3) is respectively aligned to be imaged the pixel of the different rows of image planes and is scanned, so that receiving in an imaging cycle
As the whole pixel signal of image planes；
The row of imaging image planes is oriented parallel to push away and sweeps direction, and column direction sweeps direction perpendicular to pushing away, and next imaging cycle is swept along pushing away
Direction is moved a pixel distance and is scanned again, so that the equal Jing of each pixel position of targeted image acquisition object
Multiple imaging cycles are crossed in full filed by imaging receiver, every time through the MZI of different interfere arm differences, complete interferogram is obtained.
4. arbitrary described a kind of based on space-time combined modulation and the imaging spectral of MZI optical waveguide arrays according to claim 1-2
Instrument, it is characterised in that：Including preset lenses (1), the three-dimensional core formed by multi-disc identical interference spectrum instrument chip (3) lamination adhesive
Piece (8), three-dimensional chip (8) are placed in the imaging image planes of preset lenses (1), have N number of interfere arm in every interference spectrum instrument chip (3)
The different MZI arrays (5) of difference；
In the spot-size converter array (4) of a piece of interference spectrum instrument chip (3), the input port alignment of each spot-size converter connects
Harvest is as the optical signal in image planes along each pixel for arranging direction, the input port spacing in MZI arrays (5) between MZI and imaging
Spacing of the image planes along between the pixel in row direction is identical；
Multi-disc interference spectrum instrument chip (3) the stacked direction alignment of three-dimensional chip (8) is received in imaging image planes along each of column direction
The optical signal of individual pixel, between interference spectrum instrument chip (3), the spacing of corresponding input port and imaging image planes are along column direction
Spacing between pixel is identical；
On three-dimensional chip (8), each spot-size converter is constituted and is aligned to as a plane of each pixel signal in image planes, so that
Obtain and in (8) imaging cycles of three-dimensional chip, receive the whole pixel signal of imaging image planes；
The row of imaging image planes is oriented parallel to push away and sweeps direction, and column direction sweeps direction perpendicular to pushing away, and next imaging cycle is swept along pushing away
Direction is moved a pixel distance and is scanned again, so that the equal Jing of each pixel position of targeted image acquisition object
Multiple imaging cycles are crossed in full filed by imaging receiver, every time through the MZI of different interfere arm differences, complete interferogram is obtained.
5. arbitrary described a kind of based on space-time combined modulation and the imaging spectral of MZI optical waveguide arrays according to claim 1-2
Instrument, it is characterised in that：Including preset lenses (1), the three-dimensional chip (8) formed by multi-disc interference spectrum instrument chip (3) lamination adhesive,
Three-dimensional chip (8) is placed in the imaging image planes of preset lenses (1), has interfere arm difference all same in every interference spectrum instrument chip (3)
MZI arrays (5), the MZI arrays (5) of each interference spectrum instrument chip (3) interfere arm difference differs；
In the spot-size converter array (4) of a piece of interference spectrum instrument chip (3), the input port alignment of each spot-size converter connects
Harvest as in image planes along column direction each pixel optical signal, the input port spacing in MZI arrays (5) between MZI with imaging
Spacing of the image planes along between the pixel in row direction is identical；
Multi-disc interference spectrum instrument chip (3) the stacked direction alignment of three-dimensional chip (8) is received in imaging image planes along each of row direction
The optical signal of individual pixel, between interference spectrum instrument chip (3), the spacing of corresponding input port and imaging image planes are along column direction
Spacing between pixel is identical；
On three-dimensional chip (8), each spot-size converter is constituted and is aligned to as a plane of each pixel signal in image planes, so that
Obtain and in (8) imaging cycles of three-dimensional chip, receive the whole pixel signal of imaging image planes；
The row of imaging image planes is oriented parallel to push away and sweeps direction, and column direction sweeps direction perpendicular to pushing away, and next imaging cycle is swept along pushing away
Direction is moved a pixel distance and is scanned again, so that the equal Jing of each pixel position of targeted image acquisition object
Multiple imaging cycles are crossed in full filed by imaging receiver, every time through the MZI of different interfere arm differences, complete interferogram is obtained.
6. according to claim 3 a kind of based on space-time combined modulation and the imaging spectrometer of MZI optical waveguide arrays, which is special
Levy and be：In described MZI arrays (5), the interfere arm difference of all MZI is started from scratch so that
The optical signal interference passed through in each MZI, is then received by each self-corresponding detector of the detector array on chip.
7. according to claim 4 a kind of based on space-time combined modulation and the imaging spectrometer of MZI optical waveguide arrays, which is special
Levy and be：In described MZI arrays (5), the interfere arm difference of all MZI is started from scratch so that
The optical signal interference passed through in each MZI, is then received by each self-corresponding detector of the detector array on chip.
8. according to claim 5 a kind of based on space-time combined modulation and the imaging spectrometer of MZI optical waveguide arrays, which is special
Levy and be：The interfere arm difference of all MZI arrays (5) of each interference spectrum instrument chip (3) is started from scratch successively with equal difference
Ordered series of numbers mode be incremented by so that through optical signal interference after connect by each self-corresponding detector of the detector array on chip
Receive.
9. according to claim 1 a kind of based on space-time combined modulation and the imaging spectrometer of MZI optical waveguide arrays, which is special
Levy and be：After 1 × 2 bonder of every input waveguide of described MZI arrays (5), then Jing Y-branches structure or multimode interference
It is connected with each self-corresponding output waveguide after 2 × 1 bonder combinings of structure.
10. according to claim 1 a kind of based on space-time combined modulation and the imaging spectrometer of MZI optical waveguide arrays, its
It is characterised by：The MZI arrays (5) are using heavy in section ridge single mode waveguide structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621092459.XU CN206132219U (en) | 2016-09-29 | 2016-09-29 | Imaging spectrometer based on space -time jointly make with MZI fiber waveguide array |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621092459.XU CN206132219U (en) | 2016-09-29 | 2016-09-29 | Imaging spectrometer based on space -time jointly make with MZI fiber waveguide array |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206132219U true CN206132219U (en) | 2017-04-26 |
Family
ID=58571627
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621092459.XU Withdrawn - After Issue CN206132219U (en) | 2016-09-29 | 2016-09-29 | Imaging spectrometer based on space -time jointly make with MZI fiber waveguide array |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206132219U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106370302A (en) * | 2016-09-29 | 2017-02-01 | 浙江大学 | Space-time joint modulation and MZI optical waveguide array-based imaging spectrometer |
| CN107782449A (en) * | 2017-09-22 | 2018-03-09 | 北京空间机电研究所 | It is a kind of from interference spectrum imaging method on common phase piece |
| CN108593111A (en) * | 2018-05-31 | 2018-09-28 | 北京航空航天大学 | The moving imaging simulation method and device of Space-Time Modulation inteference imaging spectrometer |
-
2016
- 2016-09-29 CN CN201621092459.XU patent/CN206132219U/en not_active Withdrawn - After Issue
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106370302A (en) * | 2016-09-29 | 2017-02-01 | 浙江大学 | Space-time joint modulation and MZI optical waveguide array-based imaging spectrometer |
| CN106370302B (en) * | 2016-09-29 | 2018-11-13 | 浙江大学 | Imaging spectrometer based on space-time combined modulation and MZI optical waveguide arrays |
| CN107782449A (en) * | 2017-09-22 | 2018-03-09 | 北京空间机电研究所 | It is a kind of from interference spectrum imaging method on common phase piece |
| CN108593111A (en) * | 2018-05-31 | 2018-09-28 | 北京航空航天大学 | The moving imaging simulation method and device of Space-Time Modulation inteference imaging spectrometer |
| CN108593111B (en) * | 2018-05-31 | 2019-09-24 | 北京航空航天大学 | The moving imaging simulation method and device of Space-Time Modulation inteference imaging spectrometer |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN106370302B (en) | Imaging spectrometer based on space-time combined modulation and MZI optical waveguide arrays | |
| CN103913227B (en) | Based on Infrared Imaging Spectrometer and the method for making of light-duty beam splitter | |
| US9891305B2 (en) | Chip-scale star tracker | |
| CN206132219U (en) | Imaging spectrometer based on space -time jointly make with MZI fiber waveguide array | |
| CN107192355A (en) | A kind of pair of light comb precision angle method and angle measuring system | |
| CN103822714B (en) | Polarizing optical splitter-based high-spatial resolution snapshot-type imaging spectrograph and imaging method | |
| EP3218681B1 (en) | Spatially resolved gas detection | |
| CN106125090A (en) | Spectral apparatus is selected in a kind of light splitting for EO-1 hyperion laser radar | |
| CN111077338B (en) | High-time-resolution medium-high atmosphere wind field measurement interferometer system for foundation | |
| CN103822715B (en) | A kind of fast illuminated imaging spectrometer based on polarizing beam splitter and formation method | |
| CN205808912U (en) | Compact high-resolution wide visual field spectrum imaging system | |
| CN105547478B (en) | Imaging spectrometer based on etched diffraction grating | |
| Tonry et al. | Redshifts of the Gravitational Lenses MG 1131+ 0456 and B1938+ 666 | |
| CN110319932A (en) | A kind of high light spectrum image-forming optics system | |
| CN104006885B (en) | Space-time combined modulation Fourier transformation imaging spectrometer and manufacture method | |
| CN103913234A (en) | Fourier transform infrared imaging spectrometer based on multistage micro-reflector | |
| CN109324023B (en) | Compact differential interference imaging spectrometer and imaging method thereof | |
| CN104568151B (en) | A kind of high spectrum full polarization imaging device and method based on symmetric wedge interference cavity | |
| CN104006883A (en) | Imaging spectrometer based on multi-level micro reflecting mirror and manufacturing method thereof | |
| CN107084788A (en) | A kind of multi-optical spectrum imaging system | |
| CN103913231B (en) | Based on the space-time unite modulation fourier transformation imaging spectrometer of light-duty beam splitter | |
| CN103913233B (en) | Space-time combined modulation Fourier transform infrared imaging spectrometer | |
| CN101782433A (en) | Static all-optical interference imaging spectrum full-polarization detection method | |
| CN111458028B (en) | Built-in chip spectrum appearance module is carried to cell-phone | |
| Kern et al. | Planar Integrated Optics and astronomical interferometry |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20170426 Effective date of abandoning: 20181113 |
|
| AV01 | Patent right actively abandoned |