CN205808912U - Compact high-resolution wide visual field spectrum imaging system - Google Patents
Compact high-resolution wide visual field spectrum imaging system Download PDFInfo
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- CN205808912U CN205808912U CN201620558449.4U CN201620558449U CN205808912U CN 205808912 U CN205808912 U CN 205808912U CN 201620558449 U CN201620558449 U CN 201620558449U CN 205808912 U CN205808912 U CN 205808912U
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- visual field
- grating
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
Abstract
This patent discloses a kind of compact high-resolution wide visual field spectrum imaging system, it is mainly made up of front-end system and a Littrow-type beam splitting system, wherein beam splitting system comprises slit, collimation/focus lamp group, immersion plane diffraction grating and planar array detector, field stop slit is placed on the focal plane of front-end system, and system has the feature of big visual field, compact conformation, high spectral resolution.The all eyeglasses of this patent and immersion grating substrate material are silicon materials, it is easy to obtain；The concentration distribution situation to atmospheric carbon dioxide can be equipped on satellite or aviation aircraft detect；The method using same group of lens by collimating mirror and focus lamp, can make system compact, it is achieved lightweight, flexibly and be easy to load.Can effectively solve current raster light splitting type imaging spectrometer volume by this patent big, it is difficult to the problem simultaneously meeting big visual field and high spectral resolution, design the high-resolution spectrum imaging system of wide cut, can be equipped on micro-thermoelectric generator.
Description
Technical field
This patent relates to a kind of compact high-resolution wide visual field spectrum imaging system design, particularly to one for star
Carry, the high-resolution of optical spectrum imagers of airborne atmospheric carbon dioxide detection, optical system with wide field of view design.
Background technology
Optical spectrum imagers combines optical imagery and the time-honored technology of spectrum both, makes it to obtain simultaneously
The spatial image of object and abundant spectral information, the advantage with collection of illustrative plates unification.Since eighties of last century eighties, it it was 20th century
Start the space optical remote sensing instrument of new generation grown up on the basis of multispectral remote sensing imaging technique the eighties, be subject to always
Pay attention to greatly to scientific research institution of various countries, Aeronautics and Astronautics device is carried out the observation such as land, air, ocean has had widely
Application.
Grating beam splitting type optical spectrum imagers is while obtaining object space information, it is provided that spectrum dimension information.Pass through material
Distinctive spectral signature discloses existence and the composition of material, reaches the remote sensing target from space identity earth surface material.
Its operation principle is: the radiation of ground return is assembled through preposition optical lens, is imaged on slit jaw, and entrance slit makes one to wear
The picture of rail direction ground strips passes through, and blocks remainder.By the emittance of slit (field stop) through light splitting
System, and is imaged on the photosurface of planar array detector by spectral dispersion at vertical slits length direction.The level side of photosurface
To being parallel to slit, it is space dimension, every quick bin of a line horizon light is the picture of one spectrum channel of ground strips；Photosurface
Vertical direction be dispersion direction, be spectrum dimension, every string photosurface unit is one spatial sampling visual field of atural object band (as
Unit) picture of spectral dispersion.
Hyperspectral imager optical system is primarily related to the design of beam splitting system, spectrum method currently mainly
There are prismatic decomposition, grating beam splitting, Fourier transformation, acousto-optic tunable filter, liquid crystal tunable optical filter, gradual filter
Deng.Prism and grating beam splitting technology occur relatively early, Technical comparing is ripe, and most aerospace imaging spectrometers all use
This type of light splitting technology. use the shortcoming of prismatic decomposition to be that linear dispersion is relevant with wavelength, will cause the planar array detector often to go
The interval of spectrum sample is different, is unfavorable for that bandwidth chahnel programming selects；Use grating beam splitting mode, the biggest at incident angle
In the case of, the linear dispersion of its spectrum is unrelated with wavelength, can meet the requirement that beam splitting system linear dispersion is definite value, and have
More higher spectral resolution than prism.But, common balzed grating, in actual applications, in order to avoid level time is overlapping, Zhi Nengyong
In rudimentary time (the 1st grade or the 2nd grade), high-resolution spectroscopy to be obtained can only use the thin ruling grating of large area, instrument
Size is the hugest.
The grating spectrograph imaging device of the most representative detection carbon dioxide has European Space Agency in 2002 to launch
Atmospheric trace gas scanning imagery spectrogrph SCIAMACHY, 1.8 °, visual field, swath width 30km, spectral resolution 0.2nm～
1.48nm；The OCO-2 of U.S. NASA transmitting in 2015,0.84 °, visual field, swath width 10.3km, spectral resolution reaches
0.1nm.These optical spectrum imagers load have played important function in carbon dioxide detection in data acquisition, but, they
Shortcoming is to be difficult to accomplish wide visual field (wide swath width) and high spectral resolution simultaneously, and instrument volume is relatively big, wherein OCO-2
Volume is 1.6m × 0.4m × 0.6m.Along with CO2The development of remote sensing, the requirement to imaging spectrometer the most more comes
The highest, it is desirable under conditions of wide visual field, to obtain high spectral resolution, it is also proposed higher wanting simultaneously for volume and weight
Ask.Visual field the biggest then swath width is the biggest, and the return visit cycle of satellite is the least, can be effectively improved temporal resolution；Spectrum divides
Resolution is the highest, then can provide more more rich data information, and improve data inversion precision；Volume reduces, weight
Then can reduce launch cost, it is achieved the miniaturization of satellite load and lightweight.
Therefore, wide visual field, high-resolution, the optical spectrum imagers of compact become the urgent of global atmosphere carbon dioxide detection
Demand, and existing technology is difficult to meet application requirement.
Summary of the invention
In sum, prior art is due to visual field restriction, the impact of image quality and the dispersion element system of optical system
The difficulty made, causes current each imaging spectrometer to be difficult to meet big visual field and high spectral resolution simultaneously.Additionally, traditional grating
Spectral instrument is owing to using rudimentary time (the 1st grade or the 2nd grade) diffraction, and system generally uses huge V-structure, exist debug tired
The defects such as difficulty, poor stability.The purpose of this patent is to provide a kind of high-resolution, big visual field, the optical system of compact conformation
Design, in order to solve above-mentioned relevant issues.
This patent is achieved through the following technical solutions:
System includes pre-objective 1, entrance slit 2, collimation and focus lamp group 3, immersion plane grating 4, the detection of face battle array
Device 5, wherein entrance slit 2, collimation and focus lamp group 3, immersion plane grating 4, planar array detector 5 form beam splitting system 8.
Described pre-objective 1 is four-piece type lens structure；
Described immersion plane grating 4 tangent plane is isosceles right triangle；
Described collimation and focus lamp group 3 are one group of four-piece type lens structure；
The vertical of the image plane of system and system primary optical axis 6 is the inclination of 2.5 degree, and the diaphragm of system is placed on grating,
Radiation from strip-type earth's surface target enters system through pre-objective 1, and images at the entrance slit 2 of focal plane of lens,
By the spectral radiant energy of slit 2, collimated mirror group 3 collimates, and parallel is incident to immersion plane grating 4, immersion put down
Concave grating 4 light splitting, the light of different wave length separately, more collimated and focus lamp group 3 focuses on the planar array detector 5 in image plane
On, it is achieved fine light spectrum image-forming.
The angle of visual field of described pre-objective 1 is 20 °, and F number is 2, and optical length is less than 60mm；Operation wavelength is at 1550-
In the range of 1650nm.
The a length of 5mm of described entrance slit 2.
The volume size of described immersion plane grating 4 is less than 240 × 240 × 240mm3, grating constant is 1200-
1300。
The volume size of described beam splitting system 8 is less than 240 × 240 × 540mm3, amplification is 1:1.
The pixel dimension of described planar array detector 5 is 20 μm, and pixel number is 1200 ××s 256.
System specific design is as follows:
1, the design of pre-objective
The light little compact principle matched with beam splitting system pupil of instrument is followed in the design of pre-objective, is designed as four
Formula battery of lens, four lens are silicon materials.In design process, majorized function is only provided with systematic parameter and retrains with picture element.System
System has selected bigger incident visual field, it is contemplated that the distortion of optical system image planes increases along with the increase of visual field, can be by letter
Single image processing techniques eliminates.
In design, can be by slightly larger for the F number of ratio beam splitting system fixed for F number, it is to avoid lose because of vignetting after the system integration
Energy.
2, beam splitting system design
System beam splitter selects immersion plane grating, and immersion grating is with the difference of traditional raster, in refraction
Rate is in the medium of n, and the wavelength of incident illumination has been contracted by n times, and according to Ruili criterion, the spectral resolution of grating is λ/mN, because of
The spectrally resolved capability improving of this grating n times.For the high spectral resolution demand of native system, select immersion grating permissible
Reduce system bulk, it is achieved lightweight.
Beam splitting system uses Littrow (Littrow) structure, and it is auto-collimation system that Littrow system is otherwise known as, by entering
Penetrate slit, collimation lens set, plane diffraction grating and image plane (detector focal plane) composition.Entrance slit is perpendicular to directly
Face, is parallel to grating groove.Aperture diaphragm is placed on grating, and this system is divided into before and after's two parts, and two with aperture for boundary
Split-phase is symmetrical in aperture diaphragm mutually, it is possible to achieve 1:1 imaging.The light beam collected via telescope is divided by entrance slit entrance
Photosystem, incides plane diffraction grating surface after collimated battery of lens, after grating surface is by wavelength dispersion, at Littrow
Returning along incident path under structure, collimation lens set now is equivalent to focus lens group, can focus the beam onto detector
On focal plane.Thus, detector can obtain the spectral information of different wave length, and present is the fine bar similar to shape of slit
Stricture of vagina.The relative aperture of whole beam splitting system is mainly determined by the optical texture of collimating part (focusing block).Additionally, in design
During optimization, introduce one piece of aspheric surface meniscus lens, system relative aperture can be increased.
Light-splitting device geometric parameter also needs to consider the design of diffraction characteristic, depends on spectrum imaging system index.This is specially
In profit, the order of diffraction of immersion plane diffraction grating time is+1 grade, and raster size and incisure density are according to wave band, spectrum sample rate
And the focal length of focusing system determines.
3, the system integration
The pre-objective of spectrum imaging system and beam splitting system according to different majorized function independent design, are then entered respectively
The row system integration.Pre-objective has only to ensure image quality, and beam splitting system also needs to consider chromatic variation of distortion and Spectral line bend.Integrated
After system, diaphragm is positioned on the plane of incidence of immersion grating.
As it has been described above, according to a kind of high-resolution wide visual field spectrum imaging system of this patent, it include pre-objective 1,
Entrance slit 2, collimation and focus lamp group 3, immersion plane grating 4, planar array detector 5.Spoke from strip-type earth's surface target
Penetrate and enter system through pre-objective, and image at the entrance slit of focal plane of lens, by the spectral radiant energy after slit,
Collimate via collimating mirror group, parallel be incident to immersion grating, by immersion grating beam splitting, the light of different wave length separately, then
Collimated and focus lamp group 3 focuses on planar array detector 5, it is achieved fine light spectrum image-forming.
The system F number of described compactedness high-resolution wide visual field spectrum imaging system is 2, and the angle of visual field is 20 °, and spectrum divides
Resolution is 0.08nm；Its operation wavelength is 1550～1650nm, and volume is less than 240 × 240 × 600mm3。
Compared with prior art, the advantage of this patent is: the F number of spectrum imaging system is big, is effectively improved system light harvesting
Ability, can accomplish high s/n ratio；Transmission-type front-end system has multiple variable, can meet the high imaging under large viewing field condition
Quality, meets the requirement of big visual field, high spectral resolution；Diaphragm is placed on grating device, meets thing, telecentric beam path in image space,
Planar array detector surface can reach uniform Energy distribution；System employing immersion grating is as beam splitter, therefore in phase
Under same spectrally resolved ability, can effectively reduce volume；Collimation lens set is integrated with both imaging lens group so that system
Compacter, lightweight.
Accompanying drawing explanation
Fig. 1 is the structural representation of the spectrum imaging system that this patent embodiment is provided；
Fig. 2 is the light path schematic diagram of the spectrum imaging system that this patent embodiment is provided；
Fig. 3 is the structural representation of immersion optical grating element in the spectrum imaging system that this patent embodiment is provided；
Wherein:
1, front-end system；
2, entrance slit；
3, collimation and focus lamp group；
4, immersion plane grating；
5, planar array detector；
6, system primary optical axis；
7, the light of three kinds of different wave lengths of outgoing after dispersion light splitting；
8, beam splitting system；
9, immersion grating substrate material；
10, grating ruling face；
11, immersion grating surface
Detailed description of the invention
Provide one preferable embodiment of this patent below in conjunction with figure, be mainly used as further describing the spy of this patent
Point, rather than it is used for limiting the scope of this patent:
Fig. 1 is the structural representation of the compact high-resolution wide visual field optical spectrum imagers of this patent specific embodiment.Ginseng
See that accompanying drawing 1, pre-objective 1 are four-piece type structure；Beam splitting system 8 is by entrance slit 2, collimation and focus lamp group 3, immersion plane
Grating 4, planar array detector 5 are constituted.Wherein, the vertical plane of planar array detector 5 receiving surface and primary optical axis 6 is the inclination of 2.5 degree.
Fig. 2 is the light path schematic diagram of above-mentioned spectrum imaging system.See accompanying drawing 2, from the radiation of earth strip-type target
Signal images on field stop slit 2 after front-end system 1, and the emittance through slit 2 passes through collimation and focus lamp
After group 3, the surface being perpendicular to immersion grating is incident, and the collimated ray of chief ray, on optical axis 6, is incident to grating ruling face
10, the light of different wave length separately, they line focus mirror groups 3 focus on planar array detector 5, and i.e. the light of different wave length is at light
After grid delineation face 10 outgoing, enter collimation and focus lamp group 3 along different angles, finally converge in planar array detector 5 not
Co-located, it is achieved spectral line separates.The picture in fine striations shape it is shown that on planar array detector 5.Owing to collimation is adopted with focus lamp
With same group of eyeglass, system achieves the imaging that amplification is 1:1.
Fig. 3 is the concrete structure schematic diagram of immersion grating in the spectrum imaging system that this patent embodiment is provided.Ginseng
Seeing accompanying drawing 3, in this patent, immersion grating substrate material 9 selects silicon materials, the grating constant in grating ruling face 10 to be every millimeter
1250 lines pair.Wherein, grating ruling face 10 is all 45 ° with the angle of immersion grating surface 11 and optical axis 6.
In Fig. 3, centre wavelength light incides on grating ruling face 10 with angle of incidence 45 °, and the angle of diffraction is θ1, then with θ2
Angle of incidence to immersion grating surface 11, the angle of emergence of emergent ray is θ3, subsequently into focus lamp group 3, focus on face battle array
On detector 5.
In the range of system is operated in wavelength 1591～1621nm, spectral region 30nm, full filed is 20 degree, and F number is 2, narrow
Stitching a size of 5mm × 20 μm, spectral resolution reaches 0.08nm, and pixel dimension is 20 μm, and Chuan Gui direction instantaneous field of view is
0.163mrad, amplification is 1:1.Total system lens materials is silicon, and including immersion grating substrate material, refractive index is
3.4.In the design of front-end system, the F number than rear end beam splitting system of F number design is slightly larger.The F number of imaging spectrometer is 2,
The F number of front-end system is designed as about 1.8, it is to avoid produce vignetting and off-energy after docking spectrogrph；Object lens in full filed
Disc of confusion RMS radius is within 5 μm, much smaller than detector pixel dimension 30 μm.System bulk is 240 × 240 × 600mm3.System
System ensure that wide visual field, high spectral resolution, realizes densification and light-weight design simultaneously.
Claims (6)
1. a compact high-resolution wide visual field spectrum imaging system, including pre-objective (1), entrance slit (2), collimation and
Focus lamp group (3), immersion plane grating (4), planar array detector (5), wherein entrance slit (2), collimation and focus lamp group
(3), immersion plane grating (4), planar array detector (5) composition beam splitting system (8), it is characterised in that:
Described pre-objective (1) is four-piece type lens structure；
Described immersion plane grating (4) tangent plane is isosceles right triangle；
Described collimation and focus lamp group (3) are one group of four-piece type lens structure；
The vertical of the image plane of system and system primary optical axis (6) is the inclination of 2.5 degree, and the diaphragm of system is placed on grating, comes
Enter system from the radiation of strip-type earth's surface target through pre-objective (1), and image in the entrance slit (2) of focal plane of lens
Place, by the spectral radiant energy of slit (2), collimated mirror group (3) collimates, and parallel is incident to immersion plane grating (4), by
Immersion plane grating (4) light splitting, the light of different wave length separately, more collimated and focus lamp group (3) focuses in image plane
Planar array detector (5) on, it is achieved fine light spectrum image-forming.
A kind of compact high-resolution wide visual field spectrum imaging system the most according to claim 1 is characterized in that: described
The angle of visual field of pre-objective (1) be 20 °, F number is 2, and optical length is less than 60mm；Operation wavelength is in 1550-1650nm scope
In.
A kind of compact high-resolution wide visual field spectrum imaging system the most according to claim 1 is characterized in that: described
The a length of 5mm of entrance slit (2).
A kind of compact high-resolution wide visual field spectrum imaging system the most according to claim 1 is characterized in that: described
The volume size of immersion plane grating (4) less than 240 × 240 × 240mm3, grating constant is 1200-1300.
A kind of compact high-resolution wide visual field spectrum imaging system the most according to claim 1 is characterized in that: described
The volume size of beam splitting system (8) less than 240 × 240 × 540mm3, amplification is 1:1.
A kind of compact high-resolution wide visual field spectrum imaging system the most according to claim 1 is characterized in that: described
The pixel dimension of planar array detector (5) be 20 μm, pixel number is 1200 ××s 256.
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| CN201610019758.9A CN105548032A (en) | 2016-01-13 | 2016-01-13 | Compact high-resolution wide-view-field spectral imaging system |
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| CN201610406795.5A Pending CN106066307A (en) | 2016-01-13 | 2016-06-12 | A kind of compact high-resolution wide visual field spectrum imaging system |
| CN201620558449.4U Expired - Fee Related CN205808912U (en) | 2016-01-13 | 2016-06-12 | Compact high-resolution wide visual field spectrum imaging system |
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| CN201610406795.5A Pending CN106066307A (en) | 2016-01-13 | 2016-06-12 | A kind of compact high-resolution wide visual field spectrum imaging system |
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| CN106066307A (en) * | 2016-01-13 | 2016-11-02 | 中国科学院上海技术物理研究所 | A kind of compact high-resolution wide visual field spectrum imaging system |
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| CN106596420B (en) * | 2017-01-19 | 2023-07-04 | 中国科学院上海技术物理研究所 | Ultra-large-breadth high-resolution imaging system and imaging method |
| CN110146165B (en) * | 2019-05-31 | 2022-01-18 | 中国科学院光电研究院 | Short wave infrared imaging spectrum system |
| CN110133709B (en) * | 2019-06-06 | 2022-06-14 | 中国工程物理研究院激光聚变研究中心 | Delta-like response soft X-ray energy spectrometer |
| CN110763638B (en) * | 2019-11-12 | 2020-12-18 | 中国海洋大学 | Comprehensive optical monitoring system |
| CN113156777B (en) * | 2021-04-28 | 2023-06-27 | 苏州赛源光学科技有限公司 | A lighting module for maskless exposure |
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| JPS5854310A (en) * | 1981-09-26 | 1983-03-31 | Nippon Kogaku Kk <Nikon> | Optical system for littrow spectroscope |
| CN1056576A (en) * | 1991-05-12 | 1991-11-27 | 中山大学 | Imaging spectrometer |
| DE4337660A1 (en) * | 1993-11-04 | 1995-05-11 | Deutsche Aerospace | Prism spectrometer |
| CN1563947A (en) * | 2004-03-18 | 2005-01-12 | 中国科学院上海技术物理研究所 | High microspectrum imaging system |
| CN101387552A (en) * | 2008-10-28 | 2009-03-18 | 重庆大学 | Optical spectrum detecting method and spectrometer based on space light modulator |
| CN101672694A (en) * | 2009-10-16 | 2010-03-17 | 中国科学院上海技术物理研究所 | Optical system of spectroscopic imaging spectrometer of prism |
| CN103033265A (en) * | 2012-12-21 | 2013-04-10 | 南京理工大学 | Device and method of space heterodyning interference hyper spectrum imaging |
| CN104215332B (en) * | 2014-10-09 | 2016-08-17 | 苏州大学 | A kind of greenhouse gases remote detecting method and device thereof |
| CN105548032A (en) * | 2016-01-13 | 2016-05-04 | 中国科学院上海技术物理研究所 | Compact high-resolution wide-view-field spectral imaging system |
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| CN106066307A (en) * | 2016-01-13 | 2016-11-02 | 中国科学院上海技术物理研究所 | A kind of compact high-resolution wide visual field spectrum imaging system |
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