CN103852163A - Miniature beam splitting system suitable for miniature imaging spectrometer - Google Patents
Miniature beam splitting system suitable for miniature imaging spectrometer Download PDFInfo
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- CN103852163A CN103852163A CN201410094554.2A CN201410094554A CN103852163A CN 103852163 A CN103852163 A CN 103852163A CN 201410094554 A CN201410094554 A CN 201410094554A CN 103852163 A CN103852163 A CN 103852163A
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Abstract
The invention discloses a beam splitting system suitable for a miniature imaging spectrometer. The beam splitting system is composed of three coaxial and concentric optical elements, wherein the three optical elements are respectively a main reflecting mirror, a grating and an auxiliary reflecting mirror. A total-reflection symmetric system is adopted in the optical system, geometrical aberration is small, and the waveband application range is large. A coaxial structure is adopted in the optical system, and therefore the optical structure is simple in structure, easy to install and debug and good in stability. The beam splitting system of the spectrometer has the advantages that good imaging quality can be maintained, and meanwhile the size and the weight are obviously reduced. An effective spectrum beam splitting method is provided for the miniature imaging spectrometer. Compared with a traditional spectrometer, the beam splitting system of the spectrometer has the advantages of being good in imaging quality, large in numerical aperture, easy to install and debug, low in cost, easy to carry and machine, and suitable for the fields of space remote sensing, machine vision, biomedicine and the like.
Description
Technical field
The present invention relates to a kind of miniature beam splitting system that is applicable to miniature imaging spectrometer, particularly a kind of adopt coaxial concentric total reflection structure, work in the high light spectrum image-forming beam splitting system of visible ray to the small size of near infrared or short infrared wave band, lightweight, large visual field.
Background technology
Along with the development of optical technology, detector technology, computer technology, infotech and space technology, the application of imaging spectrometer has expanded to the every field of geoscience, become the effective technology means in the fields such as forest cover detection, geology drawing, agriculture vegetation detection, atmospheric exploration, environment measuring, resource detection, therefore the optical property of imaging spectrometer is had higher requirement, in Obtaining Accurate hyperspectral information, realizing small size, lightweight is the necessary development trend of current imaging spectrometer application.
Beam splitting system is the important optics ingredient of imaging spectrometer, and the light splitting technology that spectrometer system adopts directly affects the performance of whole imaging spectrometer, complexity, the weight and volume etc. of structure.From Goetz propose Hyper spectral Imaging concept so far, through the development of more than 30 years, countries in the world in succession development research tens hyperspectral imagers, more famous have AVRIS, CASI, HYDICE, an Ocean PHILLS etc., within 1997, U.S. NASN has succeeded in sending up the first in the world platform ultraphotic spectrum moonlet LEWIS, has carried first space flight hyperspectral imager HIS in the world on it.Along with the continuous expansion of civil area to HYPERSPECTRAL IMAGERY demand, the micro spectrometer of development small size, lightweight has broad application prospects.
Summary of the invention
The object of the invention is to meet the requirement of hyperspectral imager image quality, provide that a kind of volume is little, quality is light, simple in structure, be suitable for that wide waveband, imaging performance are excellent, the miniature beam splitting system that is applicable to miniature imaging spectrometer of good stability.
The technical solution adopted in the present invention is to provide a kind of miniature beam splitting system that is applicable to miniature imaging spectrometer, and it works in visible near-infrared wave band and short infrared wave band; Miniature beam splitting system is optical system of total reflection, meets thing, the image space heart far away; Along light incident direction, optical element is followed successively by principal reflection mirror, grating and secondary mirror, their radius-of-curvature is respectively R1, R2 and R3, the span of radius-of-curvature is-100mm<R1<-85mm ,-50mm<R2<-40mm and-100mm<R3<-75mm; Described principal reflection mirror, secondary mirror and grating are coaxial, and primary and secondary catoptron is spherical reflector with one heart, and grating is convex surface straight-line groove holographic grating.
Grating surface peak of the present invention is on optical axis.Described grating is the half of the radius-of-curvature of catoptron corresponding to difference with primary and secondary catoptron summit spacing.
The service band scope of optical system provided by the invention is 0.4 μ m～1.0 μ m; Also can be 0.9 μ m～1.7 μ m.
Described optical system operating ambient temperature range is 10 ℃～30 ℃.
Compared with prior art, the invention has the beneficial effects as follows:
1, beam splitting system provided by the invention has volume feature little, simple and compact for structure.
2, adopt coaxial concentric total reflection structure, work in visible near-infrared or short infrared wave band, the feature of large visual field, small size, is suitable for that wide waveband, imaging performance are excellent, good stability.
Accompanying drawing explanation
Fig. 1 is the structural representation of the optical system that provides of the embodiment of the present invention one;
Fig. 2 is the light path schematic diagram of the optical system that provides of the embodiment of the present invention one;
Fig. 3 is the ray tracing point range figure of the optical system that provides of the embodiment of the present invention one;
Fig. 4 is the optical system distortion curve figure that the embodiment of the present invention one provides;
Fig. 5 is the optical system Spectral line bend curve map that the embodiment of the present invention one provides;
Fig. 6 is the optical system curvature of field/astigmatism curve map that the embodiment of the present invention one provides;
Fig. 7 is the optical system encircled energy curve map that the embodiment of the present invention one provides;
Fig. 8 is the modulation transfer function curve of the optical system that provides of the embodiment of the present invention one;
Fig. 9 is the structural representation of the optical system that provides of the embodiment of the present invention two;
Figure 10 is the optical system light path schematic diagram that the embodiment of the present invention two provides;
Figure 11 is the ray tracing point range figure of the optical system that provides of the embodiment of the present invention two;
Figure 12 is the optical system distortion curve figure that the embodiment of the present invention two provides;
Figure 13 is the optical system Spectral line bend curve map that the embodiment of the present invention two provides;
Figure 14 is the optical system curvature of field/astigmatism curve map that the embodiment of the present invention two provides;
Figure 15 is the optical system encircled energy curve map that the embodiment of the present invention two provides;
Figure 16 is the modulation transfer function curve of the optical system that provides of the embodiment of the present invention two;
In figure: 1, entrance slit; 2, principal reflection mirror; 3, grating; 4, secondary mirror; 5, detector focal plane (as plane); 6, optical axis (being axis of symmetry); 7, incident ray direction chief ray; 8(9 and 10), the imaging beam image space chief ray of different wave length; Point is the center of curvature of principal reflection mirror, grating and secondary mirror.
Embodiment
Below in conjunction with drawings and Examples, working of an invention scheme is done to further concrete elaboration.
Embodiment 1:
The technical scheme of the present embodiment is the miniature beam splitting system that is applicable to miniature imaging spectrometer, and its service band, within the scope of short-wave infrared, is 0.9 μ m～1.7 μ m, and system F number is F/#=2.5.
Referring to accompanying drawing 1, it is the imaging optical path figure of the miniature beam splitting system that is applicable to miniature imaging spectrometer that provides of the present embodiment; This miniature beam splitting system is made up of two catoptrons and a grating, along light incident direction, is followed successively by entrance slit 1, principal reflection mirror 2, grating 3, secondary mirror 4; Being positioned on the photosurface of focus planardetector as plane 5 of miniature beam splitting system, 6 is optical axis (being axis of symmetry).Entrance slit 1 is a high slit diaphragm for 7.5mm, and grating and principal reflection mirror, secondary mirror are coaxial concentric, and the center of curvature is O point, and system stop is positioned on grating, and whole device is the cube that a size is less than 150mm*105mm*55mm.
In miniature beam splitting system, principal reflection mirror and secondary mirror are spherical reflector, grating is protruding sphere straight-line groove holographic grating, the relevant parameters of this optical system is as follows: principal reflection mirror is identical with secondary mirror radius-of-curvature, the radius-of-curvature of grating is about their 1/2nd, be that principal reflection mirror radius-of-curvature is-99mm, grating radius-of-curvature is-50mm that secondary mirror radius-of-curvature is-99mm; Slit, grating and primary and secondary mirror separation are respectively in order: the spacing 88mm of slit and principal reflection mirror, and the spacing-43mm of principal reflection mirror and grating, the spacing of grating and secondary mirror is 43mm, the be spaced apart-88mm of secondary mirror and image planes.Grating constant is 54.7lp/mm.
Fig. 2 is the light path schematic diagram of the present embodiment optical system, and its light path design is based on Offner relay system, and incident ray direction chief ray 7 is parallel to optical axis 6, forms the object space heart far away; The imaging beam image space chief ray 8,9 and 10 of different wave length is all parallel to optical axis 6, forms the image space heart far away, and in detector plane (as plane) 5, Illumination Distribution is even.In figure, entrance slit 1 is the picture (not providing front-end system) that the front-end system of imaging spectrometer becomes object, and object through beam splitting system, is imaged onto detector as plane in 1:1 at the picture at slit place, being arranged on focal plane as uniform sequential of different wave length.
Referring to accompanying drawing 3, it is the ray tracing point range figure of the optical system described in the present embodiment, i.e. entrance slit situation on detector focal plane after beam splitting system imaging.In Fig. 3, several different wave lengths represent Airy spot at the circle at different visual field place, and as seen from the figure, in image planes, the point range figure at each visual field place of different wave length nearly all drops in Airy spot, shows that this optical system has the focus characteristics of the diffraction theory limit.
Referring to accompanying drawing 4, it is the distortion curve figure of the optical system described in the present embodiment, and horizontal ordinate represents normalization visual field, and ordinate represents distortion size, and as seen from the figure, beam splitting system amount of distortion <0.5 μ m, is less than 0.02 picture dot size.
Referring to accompanying drawing 5, it is the Spectral line bend curve map of the optical system described in the present embodiment, and horizontal ordinate represents normalization visual field, ordinate represents the size of Spectral line bend, as seen from the figure, beam splitting system Spectral line bend amount <0.5 μ m, is less than 0.02 picture dot size.
Referring to accompanying drawing 6, it is the curvature of field/astigmatism curve of the optical system described in the present embodiment, and on horizontal ordinate, three corresponding suite lines represent respectively meridian and the Sagittal field curvature curve of three wavelength, and ordinate is normalization visual field.Distance between every suite line represents that corresponding ordinate is the astigmatism value at certain visual field place, and visible maximum astigmatism value is less than 70 μ m, much smaller than depth of focus, within the scope of tolerance for aberration.On horizontal ordinate, the spacing between every suite line is chromatism of position, and maximal value is less than 35 μ m, equally in aberration allowed band.
Referring to accompanying drawing 7, it is the encircled energy curve of the centre wavelength of the optical system described in the present embodiment, horizontal ordinate represents to surround radius of circle size, ordinate represents concentration of energy numerical value, detector Pixel size is 30 μ m × 30 μ m, visible, the imaging beam encircled energy of system in each visual field place, single detector pixel is all more than 80%.
Referring to accompanying drawing 8, it is the optical transfer function curve of the centre wavelength of the optical system described in the present embodiment, and horizontal ordinate is spatial frequency, and ordinate is optical function value.Visible, be frequency 17lp/mm place of Qwest at detector, the transfer function values of optical system is higher than 0.7.
In the optical system that the present embodiment provides, principal reflection mirror and secondary mirror play converging action to light, and grating pair light beam rises to be dispersed and divides light action, system to meet image Fang Yuanxin, is applicable to the optical system of micro-optical imaging or spectral analysis.
In the present embodiment, F counts F/#=2.5, and service band is that visible near-infrared (m), optical system structure and optical imagery structure are referring to accompanying drawing 9 and accompanying drawing 10 for 0.4 μ m～1.0 μ.
Referring to accompanying drawing 9, along light incident direction, be followed successively by entrance slit 1, principal reflection mirror 2, grating 3, secondary mirror 4; Being positioned on the photosurface of focus planardetector as plane 5 of miniature beam splitting system, 6 is optical axis (being axis of symmetry).Grating and principal reflection mirror, secondary mirror are coaxial concentric, and the center of curvature is O point, and system stop is positioned on grating,
All the other parameters of optical system are as follows: entrance slit is a high slit diaphragm for 6.8mm, and grating constant is 97.3lp/mm.The radius-of-curvature of primary mirror is-86.8mm that the radius-of-curvature of grating is-40.9mm that the radius-of-curvature of secondary mirror is-77.4mm, the spacing of slit and primary mirror is 88mm, the spacing of primary mirror and grating is-44mm that the spacing of grating and secondary mirror is 35mm, the be spaced apart-78mm of secondary mirror and image planes.
Figure 10 is the light path schematic diagram of the present embodiment optical system, and its light path design is based on Offner relay system, and incident ray direction chief ray 7 is parallel to optical axis 6, forms the object space heart far away; The imaging beam image space chief ray 8,9 and 10 of different wave length is all parallel to optical axis 6, forms the image space heart far away, and in detector plane (as plane) 5, Illumination Distribution is even.
Referring to accompanying drawing 11, it is the ray tracing point range figure of the optical system described in the present embodiment, and as seen from the figure, in image planes, the point range figure at each visual field place of different wave length nearly all drops in a pixel, shows that this optical system has good imaging characteristic.
Referring to accompanying drawing 12, it is the distortion curve figure of the optical system described in the present embodiment, as seen from the figure, and beam splitting system amount of distortion <1 μ m.
Referring to accompanying drawing 13, it is the Spectral line bend curve map of the optical system described in the present embodiment, as seen from the figure, and beam splitting system Spectral line bend amount <0.35 μ m.
Referring to accompanying drawing 14, it is the curvature of field/astigmatism curve of the optical system described in the present embodiment, and on horizontal ordinate, three corresponding suite lines represent respectively meridian and the Sagittal field curvature curve of three wavelength, and ordinate is normalization visual field.Distance between every suite line represents that corresponding ordinate is the astigmatism value at certain visual field place, and visible maximum astigmatism value is less than 30 μ m, much smaller than depth of focus, within the scope of tolerance for aberration.On horizontal ordinate, the spacing between every suite line is chromatism of position, and maximal value is less than 10 μ m, equally in aberration allowed band.
Referring to accompanying drawing 15, it is the encircled energy curve of the centre wavelength of the optical system described in the present embodiment, horizontal ordinate represents to surround radius of circle size, ordinate represents concentration of energy numerical value, detector Pixel size is 7.4 μ m × 7.4 μ m, visible, the imaging beam encircled energy of system in each visual field place, single detector pixel is all more than 70%.
Referring to accompanying drawing 16, it is the optical transfer function curve of the centre wavelength of the optical system described in the present embodiment, and horizontal ordinate is spatial frequency, and ordinate is optical function value.Visible, be frequency 64lp/mm place of Qwest at detector, the transfer function values of optical system is higher than 0.6.
Claims (6)
1. the miniature beam splitting system that is applicable to miniature imaging spectrometer, is characterized in that: it works in visible near-infrared wave band and short infrared wave band; Miniature beam splitting system is optical system of total reflection, meets thing, the image space heart far away; Along light incident direction, optical element is followed successively by principal reflection mirror, grating and secondary mirror, their radius-of-curvature is respectively R1, R2 and R3, the span of radius-of-curvature is-100mm<R1<-85mm ,-50mm<R2<-40mm and-100mm<R3<-75mm; Described principal reflection mirror, secondary mirror and grating are coaxial, and primary and secondary catoptron is spherical reflector with one heart, and grating is convex surface straight-line groove holographic grating.
2. a kind of miniature beam splitting system that is applicable to miniature imaging spectrometer according to claim 1, is characterized in that: described grating surface peak is on optical axis.
3. a kind of miniature beam splitting system that is applicable to miniature imaging spectrometer according to claim 1, is characterized in that: described grating is the half of the radius-of-curvature of catoptron corresponding to difference with primary and secondary catoptron summit spacing.
4. a kind of miniature beam splitting system that is applicable to miniature imaging spectrometer according to claim 1, is characterized in that: the service band scope of described optical system is 0.4 μ m～1.0 μ m.
5. a kind of miniature beam splitting system that is applicable to miniature imaging spectrometer according to claim 1, is characterized in that: the service band scope of described optical system is 0.9 μ m～1.7 μ m.
6. a kind of miniature beam splitting system that is applicable to miniature imaging spectrometer according to claim 1, is characterized in that: described optical system operating ambient temperature range is 10 ℃～30 ℃.
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN105444886A (en) * | 2015-11-25 | 2016-03-30 | 福州大学 | Realization method for novel monochromator based on volume phase holographic raster |
| CN105467569A (en) * | 2016-01-08 | 2016-04-06 | 苏州大学 | Off-axis three-mirror prepositive optic system |
| CN110470394A (en) * | 2019-07-10 | 2019-11-19 | 中国科学院上海技术物理研究所 | A kind of ultra-compact spectrometer optical system |
| CN110888240A (en) * | 2019-11-06 | 2020-03-17 | 苏州大学 | Rapid adjusting method of Offner type spectral imaging optical system |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105444886A (en) * | 2015-11-25 | 2016-03-30 | 福州大学 | Realization method for novel monochromator based on volume phase holographic raster |
| CN105467569A (en) * | 2016-01-08 | 2016-04-06 | 苏州大学 | Off-axis three-mirror prepositive optic system |
| CN105467569B (en) * | 2016-01-08 | 2018-03-09 | 苏州大学 | A kind of preposition optical system of off-axis incidence |
| CN110470394A (en) * | 2019-07-10 | 2019-11-19 | 中国科学院上海技术物理研究所 | A kind of ultra-compact spectrometer optical system |
| CN110888240A (en) * | 2019-11-06 | 2020-03-17 | 苏州大学 | Rapid adjusting method of Offner type spectral imaging optical system |
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