CN110133709B - Delta-like response soft X-ray energy spectrometer - Google Patents
Delta-like response soft X-ray energy spectrometer Download PDFInfo
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Abstract
The invention discloses a delta-like response soft X-ray energy spectrometer, which comprises four components: the system comprises a front focusing collimation system, a single-stage focusing zone plate, a large-area time-resolved X-ray position sensitive detector and a high time-resolved signal A/D conversion and reading system. The single-stage focusing wave zone plate which is used for leading the incident light to be partially shielded by focusing collimation is a binaryzation Gabor wave zone plate and has focusing and dispersion functions, the incident light with different wavelengths is focused to different positions on an optical axis, and the influence caused by a secondary focus is ignored. The X-ray position sensitive detector can provide light intensity distribution on the optical axis of the zone plate along with the change of the focal length, and finally, a high-time resolution signal A/D conversion and reading system outputs analog signals acquired by the detector to obtain an X-ray energy spectrum with high time resolution and high energy resolution in a measuring range. The invention effectively combines a wide energy spectrum measurement range and high energy resolution, and is suitable for radiation energy spectrum monitoring in inertial confinement nuclear fusion, magnetic confinement fusion and solar observation.
Description
Technical Field
The invention relates to the field of energy spectrum instrument development, in particular to a soft X-ray energy spectrometer which gives consideration to wide energy spectrum measurement range and high energy spectrum resolution and realizes light splitting type delta response through the diffraction characteristic of a single-stage focusing zone plate.
Background
An energy spectrometer (spectrometer) is a scientific instrument used to analyze the composition of complex light. At present, spectrometers suitable for X-ray energy bands can be roughly classified into three categories according to their working principles: energy-responsive spectrometers, wavelength-dispersive spectrometers, and bandpass spectrometers. Energy-responsive spectrometers, which mainly include gas detectors and semiconductor detectors, rely on the deposition of energy in the detector medium by incident X-rays for energy spectral analysis. This working principle results in its applicability only for low light (low count rate) and low energy resolution requirements. Wavelength dispersion spectrometers mainly include grating spectrometers and crystal (multilayer film) spectrometers. The grating spectrometer diffracts incident light with different wavelengths to different angles, namely different positions on the detector according to the self dispersion characteristic, so that the spectrum measurement is realized. The crystal (multilayer film) spectrometer diffracts incident light with different wavelengths to different positions on a detector according to a Bragg formula, so that spectrum measurement is realized. Compared with a grating spectrometer, a crystal (multilayer film) spectrometer is suitable for spectral measurement with shorter wavelength. The wavelength dispersion spectrometer obtains the result that the wavelength spectrum of the incident light is obtained, the spectral resolution of the incident light is deteriorated along with the shortening of the wavelength, the wide-spectrum measurement and the high-energy resolution cannot be considered, and the influence of high-grade diffraction exists. The band-pass spectrometer uses the high-pass characteristic of the filter disc to the X-ray and the low-pass characteristic of the reflector to the X-ray to realize the 'segmentation' and the segmented measurement of the X-ray energy spectrum, and the band-pass spectrometer is typically a Dante spectrometer. The band-pass type spectrometer is suitable for high counting rate environment, and is a spectrometer with wide energy spectrum measurement and low energy spectrum resolution.
At present, the application requirements of a wide energy spectrum measurement range and high energy spectrum resolution cannot be met by X-rays, only segmented measurement can be carried out in practical application, and an X-ray spectrometer with a specific measurement spectrum range and energy spectrum resolution is developed according to one or two test requirements. For example, in the research of laser indirect drive Inertial Confinement Fusion (ICF), a Dante spectrometer is generally used for measuring the radiation temperature of a black cavity, the measurement spectrum range covers 1keV to 10keV, but the energy spectrum resolving power (E/delta E) is only 10 to 20; measuring the radio opacity by using a crystal spectrometer, wherein the spectrum measuring range reaches 0.54 keV-2.1 keV, and the energy resolution reaches about 100; and (3) diagnosing the mixing problem of the specific doping materials of the ablation layer of the combustion area by using a crystal spectrometer, wherein the spectrum measuring range is 6 keV-16 keV, and the energy resolution is better than 161. Because the ICF black cavity diagnosis hole is driven by laser indirectly to be fixed in direction and available flanges of the whole vacuum target chamber are limited, the X-ray spectrometers cannot be placed at the same time to carry out full-energy-region high-resolution energy spectrum measurement on X rays radiated by the black cavity and the target pill, the integrity of energy spectrum data is greatly influenced, and physical phenomena and feedback physical modeling cannot be comprehensively analyzed. The Magnetic Confinement (MCF) tokamak device is similar to this. In solar physics research, considering rocket takeoff weight and satellite launching cost, wide-energy-region high-energy-resolution measurement of a solar spectrum by using a plurality of narrow-band high-resolution spectrometers is almost impossible. In addition, another important technical problem of the X-ray grating/crystal spectrometer widely used at present is the problem of high-level diffraction interference. Especially in the case of wide-spectrum light sources, the higher order diffraction spectra are particularly severe, making it difficult to resolve the true spectrum from the measured spectrum.
Aiming at the technical problems, the invention aims to adopt a new technical thought to develop a novel X-ray energy spectrometer which has delta-like response and effectively avoids high-level diffraction interference so as to directly obtain the energy spectrum I (E) of a measurement object, wherein the measurement range covers a soft X-ray/extreme ultraviolet universal region (10 eV-10 keV), the high-energy spectrum resolving power (E/delta E >1000) is realized, the full-energy region is kept unchanged, and the effective unification of a wide energy range and a high energy range is realized. On the basis, the application requirements of focused fusion science research on the diagnosis of transient high-temperature plasmas are met, and a high-time resolution large-scale linear array X-ray detector based on a microchannel plate (MCP) technology is developed, so that the delta-like response soft X-ray energy spectrometer has wide range and high energy resolution of a full-energy region, and the time resolution level reaches 150ps level.
The invention realizes the direct measurement of high time resolution and high energy spectrum resolution on the dynamic evolution of the radiation energy spectrum of 10eV-10keV of the transient high-temperature plasma radiation. By combining atomic molecular physics, a plasma physical theory and a technical analysis method, measurement data obtained by the delta-like response soft X-ray spectrometer can simultaneously give dynamic information of a plurality of key parameters of a fusion reaction region, such as plasma temperature, density, element types, ionization states and the like, which evolve along with time, and a new technical opportunity is brought for the research and development of controllable nuclear fusion and solar physics.
Disclosure of Invention
In view of the above problems of the prior art, the present invention provides a delta-like response soft X-ray spectrometer that effectively combines a wide spectral measurement range with high energy resolution. The working mode of the invention is different from the common energy spectrometer, the new mechanism of uniform energy dispersion is realized based on the principle of zone plate focusing dispersion, the structure of the binaryzation Gabor zone plate is used as a spectrometer, the signal interference of the secondary focus is effectively inhibited, and the measurement precision is ensured.
In order to achieve the purpose, the invention adopts the following technical scheme:
a delta-like response soft X-ray spectrometer comprising:
the front focusing collimation system is mainly made of a plurality of capillaries and is used for collecting X rays to be measured and outputting quasi-parallel light;
the single-stage focusing zone plate adopts a binaryzation Gabor zone plate and is used for splitting incident quasi-parallel light and focusing X-rays with different wavelengths to different positions on an optical axis of the single-stage focusing zone plate;
the X-ray position sensitive detector is arranged along the optical axis of the single-stage focusing zone plate and is used for converting the pulse X-rays focused on the optical axis with different energies into electric signals and amplifying and outputting the electric signals;
and the high-time resolution signal A/D conversion and reading system is used for performing digital processing, analysis and reading on the electric signals acquired by the X-ray position sensitive detector through conversion, and outputting a high-time resolution and high-energy resolution X-ray energy spectrum in a measurement range.
Further, leading focus collimation system includes the coaxial polycapillary convergent mirror and the polycapillary collimating mirror that set up, is surveyed the X ray warp polycapillary convergent mirror is collected and is assembled the back and jeted into polycapillary collimating mirror, by polycapillary collimating mirror output quasi parallel light.
Specifically, the multi-capillary converging mirror is formed by arranging and drawing composite capillaries in a 'middle sparse and surrounding dense' mode into a shape with an ellipsoidal or parabolic section. Because it uses high flux combined capillary, it can provide large light collection angle, its collection solid angle can be up to 5 deg., and the output beam cross section of the multi-capillary collimating mirror is not less than 60X 10mm2The divergence angle of the output light beam is less than 1.5 mu rad, the gain of the output light intensity is more than 100, and the installation and debugging are simple and convenient, thereby not only being suitable for collecting point source light, but also being suitable for collecting deep space light source beam lines.
Further, the single-stage focusing wave zone plate is formed by alternately arranging a series of light blocking half-wave bands and light transmitting half-wave bands, each pair of adjacent light blocking half-wave bands and light transmitting half-wave bands form a wave zone, and a reinforcing rib for self-supporting is arranged between the light blocking half-wave bands.
Furthermore, the wave band width of the single-stage focusing wave band plate is modulated according to a sine or cosine function according to the wave band width of the Fresnel wave band plate, so that the manufacturing difficulty of the wave band plate is effectively reduced.
Further, the single-stage focusing zone plate is formed by intercepting partial zones of a complete ring-shaped zone plate, and the size of the partial zones is matched with that of quasi-parallel light output by the pre-focusing collimation system.
Specifically, the light blocking half-wave band and the light transmitting half-wave band have the size of nanometer scale, submicron scale or micron scale.
The delta response soft X-ray energy spectrometer is also provided with a plurality of zone plates with different parameter structures at an entrance window behind the front focusing collimation system so as to be used in different energy bands. Three parametric structures of zone plates are shown in table 1 below, where ZP1 corresponds to 1000ev-10000ev, ZP2 corresponds to 100ev-1000ev, and ZP3 corresponds to 10ev-100 ev:
TABLE 1 zone plate parameters
The light beams focused by the single-stage focusing zone plate are incident to the X-ray position sensitive detector at a large-angle grazing to improve the energy resolution.
Furthermore, the X-ray position sensitive detector comprises an escape photoelectron suppression grid mesh, a windowless photocathode, a double-layer MCP multiplication amplifier, a one-dimensional anode array, a signal leading-out terminal and a high-voltage working circuit, wherein the high-voltage working circuit is used for providing an internal high-voltage electric field for the double-layer MCP multiplication amplifier, the windowless photocathode is positioned on an optical axis of the single-stage focusing wave zone plate and used for receiving incident X-rays and emitting photoelectrons, the windowless photocathode is provided with at least 13 ten thousand pixels, the pixel size is 50um multiplied by 10 mm-300 um multiplied by 10mm, the double-layer MCP multiplication amplifier is provided with a micro-channel structure and used for forming multiplication amplified electric signals, the one-dimensional anode array is arranged along the direction of the optical axis, and the signal leading-out terminal is used for outputting the electric signals to the high-time resolution signal A/D conversion and reading system. Due to the adoption of the double-MCP splicing scheme, the signal gain reaches 105-106, a single-photon signal can be amplified to an analyzable amplitude, and the attenuation coefficient of an output end can be adjusted so as to meet the use requirements of light sources with different brightness.
Furthermore, the delta-response soft X-ray energy spectrometer is provided with a plurality of X-ray position sensitive detections distributed along the optical axis direction of the single-stage focusing zone plate, and each X-ray position sensitive detection is in a strip shape along the direction of the optical axis.
Furthermore, the high time resolution signal A/D conversion and readout system comprises a rapid sampling circuit connected with the signal leading-out terminal, a high-speed ADC connected with the rapid sampling circuit, a signal processing circuit connected with the high-speed ADC, and an integrated control and monitoring system connected with the signal processing circuit. The X-ray signal is monitored by adopting a multi-path high-bandwidth digital sampling technology, and higher time resolution and time precision are obtained at the same time.
Compared with the prior art, the invention has the following beneficial effects:
the delta-like response soft X-ray energy spectrometer has a unique working mode and can simultaneously realize wide spectrum measurement and high spectrum resolution. Based on the technical characteristics of single-stage focusing of X-ray single-stage focusing and energy linear dispersion along an optical axis, the invention develops a new method for establishing energy spectrum measurement of the wide-spectrum X-ray source, and combines a large-scale and ultra-fast response position sensitive detector to form a new energy spectrum detection technology with wide-spectrum X-ray delta energy response, high energy resolution and high time resolution. The invention has novel concept, ingenious design and convenient implementation, and is suitable for various electromagnetic wave bands such as microwave, terahertz, infrared light, visible light, ultraviolet light, X-ray and the like.
Drawings
Fig. 1 is a schematic diagram of the structural principle of the present invention.
FIG. 2 is a schematic diagram of the operation of the present invention under the detection of a laboratory point light source.
FIG. 3 is a schematic diagram of the operation mode of the present invention under deep space light source detection.
Fig. 4 is a schematic structural diagram of a single-stage focusing zone plate according to the present invention.
FIG. 5 is a schematic diagram showing the variation of the transmission function with radius of a single-stage focusing zone plate according to the present invention.
FIG. 6 shows the variation of the optical intensity of a single-stage focusing zone plate (with the number of zones being 500) along the optical axis.
FIG. 7 shows the variation of the optical intensity of a single-stage focusing zone plate (with the number of zones being 2500) along the optical axis.
FIG. 8 is a schematic flow chart of the manufacturing process of the single-stage focusing zone plate according to the present invention.
FIG. 9 is a schematic diagram of the structural principles of the X-ray position sensitive detector and the high time resolution signal A/D conversion and readout system of the present invention.
FIG. 10 is an integrated view of the assembly of the X-ray position sensitive detector of the present invention.
Detailed Description
The present invention is further illustrated by the following figures and examples, which include, but are not limited to, the following examples.
Examples
As shown in fig. 1-10, the delta-like response soft X-ray spectrometer mainly comprises four components: the system comprises a front focusing collimation system, a single-stage focusing zone plate 3, a large-area time-resolved X-ray position sensitive detector 4 and a high time-resolved signal A/D conversion and reading system 5. All parts of the vacuum chamber are arranged in the vacuum chamber for use.
Leading focus collimation system is used for collecting the X ray of measurationing and output quasi parallel light, and including the polycapillary converging mirror 1 and the polycapillary collimating mirror 2 of coaxial setting, surveyed X ray warp the polycapillary converging mirror is collected and is shone into after assembling polycapillary collimating mirror, by polycapillary collimating mirror output quasi parallel light.
When the multi-capillary converging lens is developed, firstly, on the basis of geometric optics, a primary theoretical model of the lens is established by using a ray tracing principle, and on the basis, interference phenomena possibly existing in a single tube with a thin inner diameter in the lens are analyzed by adopting theoretical simulation of statistical optics and wave optics, so that the primary theoretical model is corrected. When the theoretical model is established, for the multi-capillary X-ray converging lens, firstly, taking a point source as an example, the theoretical model is established by utilizing the axial symmetry characteristic of the lens, and then, the model is popularized to an X-ray source with any shape by adopting double integration. For the multi-capillary X-ray converging lens, a theoretical modeling method of the multi-capillary X-ray converging lens is used on the basis of a reversible principle of a light path. In order to avoid multiple total reflection of X-rays in the multi-capillary (semi-) converging mirror, the multi-capillary converging mirror is designed into a shape with an ellipsoidal section, and the multi-capillary semi-converging mirror is designed into a shape with a parabolic section. As shown in fig. 2, in the case of such point sources like laboratory light sources, a multi-capillary convergent mirror is used; in the case of deep space light sources, a polycapillary semi-convergent mirror is used, as shown in fig. 3.
When the multi-capillary converging lens is manufactured, the multi-capillary converging lens is manufactured in an integral drawing mode. Designing drawing mould of capillary convergent lens according to the above theoretical model, arranging single capillary in the mould, drawing integrally to obtain composite capillary, arranging composite capillary in the mould, drawing integrally to obtain secondary composite capillary, where the composite capillary is formed by one or more times composite drawing of single capillary, the number of single capillary in unit volume in the composite tube increases gradually with the increase of composite drawing times, the inner diameter of single capillary decreases gradually, and finally selecting composite capillary with proper inner diameter to be placed in the mould, and drawing integrally to obtain the required lens. When arranging the glass capillary tubes in the mould, arranging the composite capillary tubes in a mode of sparse middle and dense periphery according to a theoretical model, namely arranging the composite capillary tubes in the middle by using sub-tubes with large inner diameter, and arranging the composite capillary tubes in the middle to outer layers by using sub-tubes with gradually reduced inner diameter. In order to control the uniformity of the X-ray intensity distribution on the beam spot section of the lens and improve the power density gain at the beam spot, a composite tube which is more than twice composite drawing is adopted on the outer layer of the die. When the multi-capillary tube X-ray semi-convergent lens is developed, an assembly design is carried out, and in the assembly mirror, a composite tube technology is also adopted to improve the duty ratio of the assembly mirror.
In order to ensure that the inner surface of the secondary tube in the converging lens is smooth so as to meet the requirement of total reflection of X-rays, the glass primary tube is made of borosilicate glass and adopts a conventional electric heating mode. Meanwhile, a glass drawing tower is adopted for drawing. When a specific drawing process is formulated, firstly, on the basis of considering the temperature characteristics of a drawing furnace and the softening point of the adopted glass material, a kinetic differential equation of the motion of a glass rod under the action of mechanical tension and gravity is established by utilizing kinetic knowledge, then a corresponding kinematic equation is obtained, the motion speed of the glass rod is formulated according to the conclusion of the kinematic equation, the mechanical tension plays an important role in ensuring that a focuser has a proper shape, and the action of gravity in ensuring that a convergence device has small roughness is fully considered while the action of the mechanical tension in the formation of the focuser is considered. And adding a high-precision glass tube hole diameter online detection system on the wire drawing tower, and measuring the shape of the glass tube by combining the off-line glass tube hole diameter detection system after drawing is finished so as to judge whether the shape of the drawn focalizer conforms to a theoretical model. The internal surface roughness of the focuser was characterized using X-ray reflectance (XRR) measurements in combination with atomic force microscopy. When the focal spot size, the power density gain and the ray distribution uniformity of the focalizer are characterized, a method combining knife edge scanning and spatial resolution imaging is adopted.
For the development of the multi-capillary collimating mirror, in order to ensure that the inner surface of a capillary tube of the collimating mirror has certain roughness so as to prevent X-ray from generating total reflection in the collimating mirror, the multi-capillary collimating mirror with the self-supporting function is integrally drawn by using a wire drawing tower by adopting a designed special temperature field. When a special temperature field meeting the requirements is designed, a microwave heating and electric heating mixed mode different from a conventional electric heating mode is adopted for drawing, so that the sub-tubes forming the self-supporting multi-capillary collimating mirror are ensured to be strictly parallel, more importantly, the special temperature field can cause the inner walls of the sub-tubes to have larger roughness and can not generate X-ray total reflection, and thus, the parallel light beams obtained by the self-supporting multi-capillary collimating mirror are ensured to have divergence of micro radian magnitude. In addition, like the polycapillary X-ray (semi-) converging lens, the inner diameters of the sub-tubes constituting the self-supporting polycapillary collimator are also small, and it is also necessary to take into account possible interference or diffraction phenomena of the X-rays coming from these sub-tubes, which may be present, and thus influence the divergence of this type of collimator. A theoretical design similar to a polycapillary (semi-) convergent mirror is therefore used. The composite tube is drawn in a die uniformly over three times. For the convenience of drawing, borosilicate glass is adopted as the material of the collimating mirror glass mother tube.
The single-stage focusing zone plate adopts a binaryzation Gabor zone plate and is used for splitting incident quasi-parallel light and focusing X-rays with different wavelengths to different positions on an optical axis of the single-stage focusing zone plate. The single-stage focusing wave band plate is formed by alternately arranging a series of light-blocking half-wave bands and light-transmitting half-wave bands, each pair of adjacent light-blocking half-wave bands and light-transmitting half-wave bands form a wave band, and a self-supporting reinforcing rib is arranged between the light-blocking half-wave bands. Furthermore, the wave band width of the single-stage focusing wave band plate is modulated according to a sine or cosine function according to the wave band width of the Fresnel wave band plate, so that the manufacturing difficulty of the wave band plate is effectively reduced. Further, the single-stage focusing zone plate is formed by intercepting partial zones of a complete ring-shaped zone plate, and the size of the partial zones is matched with that of quasi-parallel light output by the pre-focusing collimation system. Specifically, the light blocking half-wave band and the light transmitting half-wave band have the size of nanometer scale, submicron scale or micron scale.
The basic design idea of the invention is to utilize the advantages of energy linear focusing and advanced diffraction suppression of the X-ray single-stage focusing zone plate and match with the X-ray position sensitive detector with large area time resolution to realize the energy spectrum measurement technology with wide energy area, uniform high energy spectrum resolution and high time resolution.
An X-ray zone plate element is an element widely applied to X-ray microscopy, and a common X-ray zone plate is a diffraction element consisting of heavy metal concentric annular grating bars. By means of the radial periodic structure of the zone plate, the diffracted radiation interferes positively at a defined downstream position by means of an appropriate arrangement of the radial zones. The radius of the nth ring belt is as follows:
where λ is the incident wavelength, f1Is the first focal length of the zone plate, and N is the total number of zones. The odd rings or even rings are blocked by metal grid bars, and X-rays pass through the rest ring band to form the zone plate structure. The focusing and imaging principle is that the optical path difference between adjacent light-passing ring zones is a wavelength from an object point to an image point, the phase difference is 2 pi, and the constructive interference condition is met, so that all light rays which start from the object point and pass through each even (odd) ring zone are overlapped in a constructive manner and converged at the image point to form a focused bright point. The transmittance function F () of the zone plate is expressed as u ═ pi r2V. (λ f) expansion, can be obtained
Wherein, cm＝sin(mπ/2)/(mπ)…………(3)
Under the irradiation of parallel light, the diffraction efficiency of each stage is
Therefore, a plurality of orders of diffraction focus points exist on the optical axis, and the focal lengths of different diffraction orders satisfy the following conditions:
fm≈r1 2E/(1240m)，m＝1,3,5……………………(5)
wherein m is the diffraction order, fmIs m-order focusing focal length. Level 0 is straight through light, -1, -3, -5,. the level is diverging light. The formula (5) shows that the problem that the high-order diffraction spectrum and the first-order diffraction spectrum of different wavelengths are overlapped exists on the optical axis of the zone plate.
It can be seen from equations (2) to (4) that when the transmittance of the zone plate satisfies the sine (cosine) distribution:
f(u)＝1/2(1±cos(2πr2/λf))…………(6)
the high level can be effectively suppressed. By adopting the method of optimizing and arranging the micro-nano structural elements according to the sine distribution rule, various novel X-ray single-stage focusing zone plates are developed, the zone plates are only 0-stage and +/-1-stage, and the on-axis is only + 1-stage focusing focus. Under the irradiation of parallel polychromatic light, the focal length satisfies
f1＝r1 2E/1240…………(7)
As can be seen from equation (7), the focal length on the optical axis is proportional to the photon energy, which forms a natural energy dispersion mechanism, such as the light splitting in the working mode illustrated in fig. 1-3 of the present invention.
When parallel light is incident, the deviation of the viewing plane from the ideal focal plane is
ΔZ＝±2(Δr)2/λ…………(8)
The on-axis intensity is only reduced by 20%, which is generally defined as the focal depth of the zone plate. When the energy spectrum measurement is carried out, 4 times of focal depth distance is defined as the closest distance between two energy points which can be distinguished, and then
Δf＝4ΔZ＝8(Δr)2E/1240…………(9)
The derivation of equation (7) can be: Δ E-1240 Δ f/r1 2…………(10)
Available in combination (9) and (10), E/delta E ≈ N/2 … … … … (11)
It can be seen that when parallel light is incident, the energy spectrum resolution is irrelevant to photon energy and only relevant to the number of zones of the zone plate, so theoretically, as long as the length of the detector is enough, one zone plate can cover the energy spectrum measurement of a soft X-ray/extreme ultraviolet all-round area, and meanwhile, the energy resolution of the whole energy area is consistent, the interference of a high-level diffraction spectrum does not exist, and great convenience is brought to spectrum solution.
In practical application, in order to avoid zero-order interference, only a small off-axis part of the zone plate is generally used, at this time, the numerical aperture is greatly reduced, and the actual energy resolution is also greatly reduced compared with the formula (11), so that in the practical design of the energy spectrometer, according to the design requirement of energy resolution, the number of zones included in the used zone plate part must be considered, and the calculation result is correspondingly improved compared with the calculation result of the formula (11).
Further, the light source actually used: for example, the black cavity radiation source, the sun and the MCF flare in the laser-driven ICF research have larger divergence angles, which is equivalent to that of the black cavity radiation source, the sun and the MCF flare in the laser-driven ICF researchThe situation deviation of the parallel light is large. Light incident with a certain divergence angle can be approximately seen as incident from a distant off-axis point source. The divergence angle of the incident light can be defined according to the distance of the point light source from the zone plate, and the size of the zone plate. Let its object distance be LOAn image distance of LIAccording to the zone plate first-level imaging formula:
two-side derivation, combined with trigonometric relationship, (X + Y) < L under small divergence angleIThe smear length of the focused light spot on the optical axis can be approximated by equation (12):
let X be Δ M, available
Wherein Z isOHeight of point light source relative to optical axis of zone plate, ZPThe height of the highest point of incident light on the zone plate relative to the optical axis is H, the height of the lowest point of the incident light on the zone plate relative to the optical axis is H, the horizontal distance from the intersection point of the lowest emergent light of the zone plate and the optical axis to the intersection point of the highest emergent light of the zone plate and the optical axis is X, the horizontal distance from the intersection point of the highest emergent light of the zone plate and the optical axis to the focus is Y, and the horizontal distance from the intersection point of the emergent light after the incident light parallel to the optical axis is diverged by the zone plate and the optical axis to the zone plate is M. Due to LIAssociated with E, the energy resolution at this time is associated with the photon energy. The equation (14) considers the energy resolution reduction caused by the geometric projection of quasi-parallel light, which is the main factor for determining the energy resolution when the parallelism is poor, and the equation (14) approaches infinity when the parallelism is good, and the energy resolution is mainly determined by the equation (11) while the energy resolution is still guaranteedUniformity of resolution. Therefore, when the device is applied to a light source with a certain divergence angle, in order to improve the collection efficiency and reduce the influence of the emission angle of the light source on energy resolution, a set of focusing collimation system is also required to be arranged in front of a single-stage focusing zone plate, light rays emitted by the light source are collected and converted into quasi-parallel light rays, the quasi-parallel light rays enter the zone plate, and finally a large-area time-resolution X-ray position sensitive detector is used for receiving a radiation energy spectrum.
Fig. 6 and 7 show the results of computer simulations of the distribution of diffracted light intensity along the optical axis for single-stage focusing zone plates of different zone numbers (500 and 2500). Where the abscissa is the normalized distance on the zone plate optical axis, and '1' represents the position of the focal length f. The ordinate represents the normalized light intensity. Fig. 6 and 7 show that a single stage focusing zone plate can provide the desired intensity distribution when a sufficiently large number of zones are used, i.e., only one focal point is produced along the zone plate optical axis.
The manufacturing process of the single-stage focusing zone plate is as follows, as shown in fig. 8:
a: determining the zone plate to be (r) according to the actual application requirement2Theta) parameters in a coordinate system, and converting the zone plate layout into an (x, y) coordinate system according to a coordinate transformation relation, so as to obtain the actual size of each zone in the zone plate layout shown in fig. 4.
b: and c, converting the zone plate with the structure into a LEDIT format file according to the size in the step a.
c: plating a layer of gold film on a silicon wafer with a crystal face polished on both sides, then coating a layer of photoresist, and opening a hole on the substrate of the silicon wafer to form a hollow self-supporting gold film.
d: and c, performing electron beam exposure on the film generated in the step c by using a numerical control focusing electron beam lithography device under the control of the LEDIT file generated in the step b according to the zone plate layout structure shown in the figure 4, and developing by using a developing solution and a fixing solution to obtain a zone plate photoresist graph.
e: and chemically etching the gold film in the development area for a proper time by using an etching solution to form a through hole in the development area.
f: and removing the photoresist to obtain the single-stage focusing zone plate. Wherein the materials corresponding to 7.1, 7.2 and 7.3 are photoresist, gold and silicon, respectively.
The X-ray position sensitive detector is used for converting pulse X-rays focused on an optical axis and having different energies into electric signals, and amplifying and outputting, mainly comprising an escape photoelectron suppression grid 21, a windowless photocathode 22, a double-layer MCP multiplication amplifier 23, a one-dimensional anode array 24, and a signal leading-out terminal 25 which are sequentially laminated and integrated from top to bottom, and a high voltage operating circuit 26 for providing an internal high voltage electric field for the double-layer MCP multiplier amplifier, wherein the windowless photocathode is positioned on the optical axis of the single-stage focusing zone plate and is used for receiving incident X-rays and emitting photoelectrons, the double-layer MCP multiplication amplifier has a micro-channel structure, the one-dimensional anode array is arranged along the direction of the optical axis, and the signal leading-out terminal is used for outputting an electric signal to the high-time-resolution signal A/D conversion and readout system. The energy spectrometer sets up a plurality of X ray position sensitive detections of arranging along single-stage focusing zone plate optical axis direction, and every the sensitive detection of X ray position is the strip along this optical axis direction trend.
After the X-ray is split by a single-stage focusing zone plate light path, an X-ray energy spectrum enters an X-ray position sensitive detector according to energy distribution, and an X-ray energy spectrum of 10eV-10keV is distributed on a two-dimensional space scale of 30mm multiplied by 5400mm according to photon energy. The transmission efficiency of the X-ray of 10eV-10keV in the material is obviously changed, the transmission efficiency of partial wave bands is extremely low, and according to the characteristic, the photocathode of the X-ray position sensitive detector is designed to be of a windowless type. In order to ensure high-resolution X-ray spectral measurement, more than 13 ten thousand pixels are configured, the size of each pixel is 50-300-10 mm, and X-ray photons meeting energy resolution are distributed in 10-20 pixels. The micro-channel structure of the double-layer MCP multiplication amplifier enables X-ray photons to be incident on a photocathode with negative high-voltage bias on the inner wall of the micro-channel, emergent light electrons enter the MCP, and the photoelectrons collide the inner wall of the MCP for multiple times to generate more electrons under the acceleration action of an internal high-voltage electric field to form multiplication amplification signals.
The X-ray position sensitive detector completes the photoelectric conversion and signal multiplication amplification functions, and simultaneously meets the requirements of the light path butt joint and the interface of the multi-channel high-time resolution signal A/D conversion and reading system connection, as shown in FIG. 9. The X-ray photon acts on the photocathode to generate primary photoelectrons, the photoelectrons accelerate to the MCP multiplication amplifier under the action of a negative high-voltage electric field, the double-layer overlapped MCP amplifies the photoelectrons into charge pulse signals which can be analyzed, and the output signals of each pixel are read, converted, processed and stored and monitored by the multi-channel ultrafast reading circuit. MCP microchannels have a sufficiently small aperture (20um) to ensure sufficient spectral resolution during coupling of the photocathode and the array anode. In order to ensure the energy spectrum measurement precision, the photocathode, the MCP and the one-dimensional array anode are subjected to ultra-precise structure processing and assembly, and the surface shape precision and the assembly size deviation are strictly controlled, as shown in FIG. 10.
The high-time resolution signal A/D conversion and readout system comprises a quick sampling circuit 31 connected with the signal leading-out terminal, a high-speed ADC32 connected with the quick sampling circuit, a signal processing circuit 33 connected with the high-speed ADC, and an integrated control and monitoring system connected with the signal processing circuit. The fast sampling circuit, the high-speed ADC and the signal processing circuit form an ultrafast reading circuit which is configured into a plurality of channels, corresponds to the signal leading-out terminals of each anode in the one-dimensional anode array one by one, and carries out digital processing, analysis and reading on electric signals obtained by converting the X-ray position sensitive detector, outputs X-ray energy spectrums with high time resolution and high energy resolution in a measuring range, and stores and displays the X-ray energy spectrums through an integrated control and monitoring system.
The delta-response-like soft X-ray energy spectrometer provided by the invention effectively combines a wide energy spectrum measurement range and high energy resolution, and is suitable for radiation energy spectrum monitoring in inertial confinement nuclear fusion, magnetic confinement fusion and solar observation.
The above-mentioned embodiments are only preferred embodiments of the present invention, and do not limit the scope of the present invention, but all the modifications made by the principles of the present invention and the non-inventive efforts based on the above-mentioned embodiments shall fall within the scope of the present invention.
Claims (10)
1. A delta-like response soft X-ray spectrometer comprising:
the front focusing collimation system is mainly made of a plurality of capillaries and is used for collecting X rays to be measured and outputting quasi-parallel light;
the single-stage focusing zone plate adopts a binaryzation Gabor zone plate and is used for splitting incident quasi-parallel light and focusing X-rays with different wavelengths to different positions on an optical axis of the single-stage focusing zone plate;
the X-ray position sensitive detector is arranged along the optical axis of the single-stage focusing zone plate and is used for converting the pulse X-rays focused on the optical axis with different energies into electric signals and amplifying and outputting the electric signals;
and the high-time resolution signal A/D conversion and reading system is used for performing digital processing, analysis and reading on the electric signals acquired by the X-ray position sensitive detector through conversion, and outputting a high-time resolution and high-energy resolution X-ray energy spectrum in a measurement range.
2. The delta-like response soft X-ray energy spectrometer according to claim 1, wherein the pre-focusing collimation system comprises a multi-capillary converging lens and a multi-capillary collimating lens which are coaxially arranged, and X-rays to be detected are collected and converged by the multi-capillary converging lens and then enter the multi-capillary collimating lens, so that quasi-parallel light is output by the multi-capillary collimating lens.
3. The delta-like response soft X-ray energy spectrometer of claim 2, characterized in that the multi-capillary converging mirror is formed by arranging and drawing composite capillaries in a "sparse-in-the-middle-and-dense-around" manner into a shape with an ellipsoidal or parabolic cross section.
4. The delta-response soft X-ray energy spectrometer according to any one of claims 1-3, characterized in that the single stage of focusing wave zone plates are formed by alternately arranging a series of light blocking half-wave bands and light transmitting half-wave bands, each pair of adjacent light blocking half-wave bands and light transmitting half-wave bands form a wave zone, and reinforcing ribs for self-supporting are arranged between the light blocking half-wave bands.
5. The delta-response-like soft X-ray energy spectrometer according to claim 4, characterized in that the band width of the single stage focusing zone plate is modulated according to a sine or cosine function according to the band width of the Fresnel zone plate.
6. The delta-response-like soft X-ray energy spectrometer of claim 5, characterized in that the single stage focused zone plate is formed by a ring-shaped complete zone plate truncated portion, the size of which matches the size of the quasi-parallel light output by the pre-focus collimation system.
7. The delta-response-like soft X-ray energy spectrometer according to claim 6, characterized in that the light-blocking half-wave band and the light-transmitting half-wave band are of nanometer-scale, or submicron-scale, or micron-scale dimensions.
8. The delta-response-like soft X-ray energy spectrometer of any one of claims 1-3, the X-ray position sensitive detector comprises an escape photoelectron suppression grid mesh, a windowless photocathode, a double-layer MCP multiplication amplifier, a one-dimensional anode array, a signal leading-out terminal and a high-voltage working circuit, wherein the escape photoelectron suppression grid mesh, the windowless photocathode, the double-layer MCP multiplication amplifier, the one-dimensional anode array and the signal leading-out terminal are sequentially laminated and integrated from top to bottom, the high-voltage working circuit is used for providing an internal high-voltage electric field for the double-layer MCP multiplication amplifier, wherein the windowless photocathode is positioned on the optical axis of the single-stage focusing zone plate and is used for receiving incident X-rays and emitting photoelectrons, it has at least 13 ten thousand pixels with the size of 50um multiplied by 10 mm-300 um multiplied by 10mm, the double-layer MCP multiplication amplifier has a micro-channel structure, the one-dimensional anode array is arranged along the direction of the optical axis, and the signal leading-out terminal is used for outputting an electric signal to the high-time-resolution signal A/D conversion and readout system.
9. The delta-response-like soft X-ray energy spectrometer of claim 8, characterized in that the energy spectrometer is provided with a plurality of X-ray position sensitive detectors arranged along the optical axis of the single stage focused zone plate, and each of the X-ray position sensitive detectors is in the shape of a strip running along the optical axis.
10. The delta-response like soft X-ray spectrometer according to claim 8, characterized in that said high time resolution signal a/D conversion and readout system comprises a fast sampling circuit connected to said signal extraction terminals, a high speed ADC connected to the fast sampling circuit, a signal processing circuit connected to the high speed ADC, and an integrated control and monitoring system connected to the signal processing circuit.
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