CN107843342A - One kind transmission and reflective single diffraction order grating spectrometer - Google Patents
One kind transmission and reflective single diffraction order grating spectrometer Download PDFInfo
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- CN107843342A CN107843342A CN201711282335.7A CN201711282335A CN107843342A CN 107843342 A CN107843342 A CN 107843342A CN 201711282335 A CN201711282335 A CN 201711282335A CN 107843342 A CN107843342 A CN 107843342A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
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Abstract
The invention discloses one kind transmission and reflective single diffraction order grating spectrometer, including slit component, " returning " type exhaust tube, shielded-plate tube, adapter flange, ball-joint component, grating chamber, filter disc room, slide valve, X ray CCD and support frame, compared with prior art, the present invention have developed the function of reflective gratings spectrometer on the basis of transmission grating spectrometer, realize the different functions of same complete equipment, the development cost of diagnostic device is reduced, overcomes and the problem that spectrometer can not work is transmitted under the complex environments such as strong electromagnetic.Using quantum lattice raster, " it " font grating, spectroscopy photon screen, amendment gridiron pattern grating, trapezoidal primitive grating as beam splitter, Advanced Diffraction can effectively be suppressed, limitation of high harmonics ratio is better than 1% (higher hamonic wave intensity/fundamental wave intensity), solves the difficult problem such as with error of spectrum unscrambling that common grating brings.Value with popularization and application.
Description
Technical field
The present invention relates to X ray optical field, more particularly to a kind of transmission and reflective single diffraction order grating spectrometer.
Background technology
In laser indirect driving inertial confinement fusion (ICF) research, the laser plasma interactionses in black chamber,
Considerable fraction of laser energy is converted into X-ray radiation after plasma absorption, soft X-ray radiation accounts for whole plasma resonance
The overwhelming majority.The grenz ray of Hohlraum radiation is the direct energy source for driving DT fuel pellet implosions, soft x-ray laser probe bea and radiation
Temperature-time evolutionary process is the most important feature physical quantity in Hohlraum radiation source.Therefore, diagnosed by Hohlraum radiation, it will be appreciated that
Laser cavity target coupling physical process, laser driving force, optimize black cavity configuration, size design.Transmission grating spectrometer uses spirit
It is living, it is easy to adjust, it is that soft X-ray diagnoses one of the most frequently used instrument.It is divided to secondary color grenz ray to be measured, then
The difraction spectrum after grating beam splitting is gathered using grenz ray CCD, by analyzing the spectral position collected and intensity, with regard to that can examine
Break and the details of spectrum to be measured.
In some ICF experimental studies, laser plasma interactionses can also produce substantial amounts of hard X ray, gamma
Ray, positron-electron etc., these particles will be acted directly on grenz ray CCD through transmission grating, and its work is caused
Interference, will cause it can not collect effective signal when serious.It is more existing due to the mode of operation of transmission grating spectrometer
Shielding measure can not effectively solve problem so that transmission grating spectrometer can not use, it is necessary to prepare extra diagnostic device.This
Outside, multiorder diffractive be present in transmission grating spectrometer generally use standard transmitted light grid.Therefore, for the spectrum to be diagnosed in broadband, warp
After grating beam splitting, 1 order diffraction of ENERGY E spectrum will overlap with the 2 of energy 2E grades, 3 grades etc. of energy 3E, and this is to spectrum unscrambling point
Analysis brings huge difficulty.Although having developed some Spectra Unfolding Methods at present, this can bring some artificial mistakes simultaneously
Difference, the confidence level of data is reduced, can not tackled the problem at its root.
The content of the invention
The purpose of the present invention is that to solve the above problems and provides a kind of transmission and reflective single diffraction order grating
Spectrometer.To overcome the spectrum unscrambling that the complex environment such as strong electromagnetic Instrumental can not be worked, standard transmitted light grid are brought difficult with missing
The deficiencies of poor, realize that the extra power of same complete equipment is used, reduce the development cost of diagnostic device, be high-order harmonics spectrum
Research provides good diagnostic device.
The present invention is achieved through the following technical solutions above-mentioned purpose:
The present invention includes slit component, " returning " type exhaust tube, shielded-plate tube, adapter flange, ball-joint component, grating chamber, filter
Piece room, slide valve, X ray CCD and support frame, the slit component is connected with one end of " time " the type exhaust tube, described
The other end of " returning " type exhaust tube is connected with one end of the shielded-plate tube, the other end of the shielded-plate tube and the adapter flange
One end connects, and the other end of the adapter flange is connected with one end of the ball-joint component, the ball-joint component it is another
End is connected with one end of the grating chamber, and the other end of the grating chamber is connected with one end of the filter disc room, the filter disc room
The other end be connected with one end of the slide valve, the other end of the slide valve is connected with the X ray CCD, the support
It is connected to the lower end of the ball-joint component.
The slit component is connected with light source, and the light source passes sequentially through the slit of the slit component, the grating chamber
Grating, the filter disc room filter disc after be connected with the X ray CCD thang-kngs.
The grating is one kind of transmission grating or reflecting grating.
The grating chamber includes incident flange, upper flange, outgoing flange, lower flange, grating translation mechanism, laterally observed
Window, grating elevating mechanism and top are observation window, and the incident flange is arranged at the side of the grating chamber, the incident flange
It is connected with the grating translation mechanism, the outgoing flange is arranged at the opposite side of the grating chamber, the outgoing flange and institute
The connection of laterally observed window is stated, the upper flange is arranged at the upper end of the grating chamber, the upper flange and the laterally observed window
Connection, the lower flange are arranged at the lower end of the grating chamber, and the lower flange is connected with the grating translation mechanism, the light
The side of grid room sets the top observation window, and the grating elevating mechanism is connected with the grating translation mechanism, and is arranged at
In the grating chamber.
The beneficial effects of the present invention are:
The present invention is a kind of transmission and reflective single diffraction order grating spectrometer, and compared with prior art, the present invention is transmiting
The function of reflective gratings spectrometer is have developed on the basis of grating spectrometer, realizes the different functions of same complete equipment, is reduced
The development cost of diagnostic device, overcome and the problem that spectrometer can not work is transmitted under the complex environments such as strong electromagnetic.Use
Quantum dot array grating, " it " font grating, spectroscopy photon screen, amendment gridiron pattern grating, trapezoidal primitive grating as beam splitter,
Advanced Diffraction can effectively be suppressed, limitation of high harmonics ratio is better than 1% (higher hamonic wave intensity/fundamental wave intensity), solves common
The problems such as spectrum unscrambling difficulty and error that grating stripe is come.Value with popularization and application.
Brief description of the drawings
Fig. 1 is transmission/reflection/angle formula single diffraction order grating spectrometer general structure schematic diagram of the present invention;
Fig. 2 is the light channel structure that transmission/reflection/angle formula single diffraction order grating spectrometer of the present invention works in the transmission mode
Schematic diagram;
Fig. 3 is the light channel structure that transmission/reflection/angle formula single diffraction order grating spectrometer of the present invention works in this reflection mode
Schematic diagram;
Grating cell structure schematic diagram when Fig. 4 transmission modes work;
Grating cell structure schematic diagram when Fig. 5 reflective-modes work.
In figure:1- slits component, 2- " return " type exhaust tube, 3- shielded-plate tubes, 4- adapter flanges, 5- ball-joints component, 6- light
Grid room, 7- filter discs room, 8- slide valves, 9-X ray CCD, 10- support frame, 11- light sources, 12- slits, 13- transmission gratings, 14- filters
Piece, 15- reflecting gratings, 601- incidences flange, 602- upper flanges, 603- outgoing flange, 604- lower flanges, 605- gratings translation machine
Structure, 606- laterally observeds window, 607- gratings elevating mechanism, 608- tops are observation window.
Embodiment
The invention will be further described below in conjunction with the accompanying drawings:
As shown in Figure 1:The present invention includes slit component 1, " returning " type exhaust tube 2, shielded-plate tube 3, adapter flange 4, ball-joint
Component 5, grating chamber 6, filter disc room 7, slide valve 8, X ray CCD9 and support frame 10, the slit component 1 are taken out with " time " type
One end connection of tracheae 2, the other end of " time " the type exhaust tube 2 are connected with one end of the shielded-plate tube 3, the shielded-plate tube 3
The other end be connected with one end of the adapter flange 4, the one of the other end of the adapter flange 4 and the ball-joint component 5
End connection, the other end of the ball-joint component 5 are connected with one end of the grating chamber 6, the other end of the grating chamber 6 and institute
One end connection of filter disc room 7 is stated, the other end of the filter disc room 7 is connected with one end of the slide valve 8, the slide valve 8
The other end is connected with the X ray CCD9, and the support 10 is connected to the lower end of the ball-joint component 5.
As shown in Figures 2 and 3:The slit component 1 is connected with light source 11, and the light source 11 passes sequentially through the slot set
The slit of part 1, the grating of the grating chamber 6, the filter disc room 7 filter disc 14 after be connected with the X ray CCD9 thang-kngs.
The grating is one kind of transmission grating 13 or reflecting grating 15.
As shown in Figure 4 and Figure 5:The grating chamber 6 includes incident flange 601, upper flange 602, outgoing flange 603, laxative remedy
Orchid 604, grating translation mechanism 605, laterally observed window 606, grating elevating mechanism 607 and top are observation window 608, the incidence
Flange 601 is arranged at the side of the grating chamber 6, and the incident flange 601 is connected with the grating translation mechanism 606, described
Outgoing flange 603 is arranged at the opposite side of the grating chamber 6, and the outgoing flange 603 is connected with the laterally observed window 606,
The upper flange 602 is arranged at the upper end of the grating chamber 6, and the upper flange 602 is connected with the laterally observed window 606, institute
The lower end that lower flange 604 is arranged at the grating chamber 6 is stated, the lower flange 604 is connected with the grating translation mechanism 605, institute
The side for stating grating chamber 6 sets the top observation window 6, and the grating elevating mechanism 607 connects with the grating translation mechanism 605
Connect, and be arranged in the grating chamber 6.
Spectrometer mainly diagnoses to soft X-ray radiation caused by laser plasma interactionses.Enter through slit 12
Wide range grenz ray incide on grating 13, after the light splitting of the diffraction of grating 13, visible ray and spuious is filtered out by filter disc 14
Light, acquisition spectrum picture is finally gathered by X ray CCD and carries out spectrum unscrambling.
Single diffraction order grating (transmission grating 13, reflecting grating 15) is the core optical element of spectrometer, and grating chamber 6 is then spectrum
The core mechanical components of instrument.It is observation window 608 at the top of grating chamber, for monitoring the inner case of grating chamber;Bottom is grating
Elevating mechanism 607, grating is adjusted in the vertical direction, makes grating highly consistent with incident X-rays;Spectrometer surrounding is four
Highly, equirotal flange, two of which flange are connected with front and rear ball-joint, filter disc room, two other flange then with laterally
Observation window 606, grating translation mechanism 605 are connected, and laterally observed window is used for monitoring grating chamber inner case with 606 samples, and grating is put down
Telephone-moving structure 605 is then used for adjusting grating in the horizontal direction, X ray is accurately incided on grating;Grating chamber flange 601 with
The angle of flange 602 is 90 degree, and flange 604 and the angle of flange 601 are 90 degree, and flange 603 is then an acute angle with the angle of flange 602,
Its angle is related to reflective single diffraction order grating operation angle.The transmission that transmission/reflection/angle formula single diffraction order grating spectrometer uses
Or the mode of operation of reflection, it is mainly relevant with the mounting means of grating chamber 6, see Fig. 4, Fig. 5.
When spectrometer is operated in the transmission mode, using transmission-type single diffraction order grating, grating chamber incidence flange 601 and ball
Joint assembly 4 is connected, and outgoing flange 603 is attached with filter disc room 6, and flange 601 is connected with grating translation mechanism 605, method
Orchid 603 is then connected with observation window 606.When spectrometer works in the transmission mode, it composes resolution and maximum functional wavelength is respectively:
Δ λ=λmin=d ((A+S)/L+ (A+ δ)/D)
λmax=dWccd/2D
Wherein d is the cycle of transmission-type single diffraction order grating, and A is screen periods direction size, and S is laser plasma light
Source size, L are the distance between light source and grating, and D is the distance between grating and X ray CCD, and δ is that X ray CCD pixels are big
It is small, WccdFor X ray CCD sizes.
When spectrometer is operated in this reflection mode, using reflective single diffraction order grating, grating chamber incidence flange 601 and ball
Joint assembly is connected, and outgoing flange 603 is attached with filter disc room, and flange 604 is connected with grating translation mechanism 605, flange
602 are connected with observation window 606.The spectrum of now spectrometer work is differentiated and maximum functional wavelength is respectively:
Δ λ=daS/L+2A λ/D
λmax=dWccd(Wccd/2/D2+a/D)
Wherein d is the cycle of transmission-type single diffraction order grating, and a is grating incident angle, and A is screen periods direction size, and S is
Laser plasma light source size, L are the distance between light source and grating, and D is the distance between grating and X ray CCD, Wccd
For X ray CCD sizes.
The transmission/reflection/angle formula single diffraction order grating spectrometer of the present invention is applied to Soft X-Ray Region.
The beam splitter that the transmission/reflection/angle formula single diffraction order grating spectrometer of the present invention uses is quantum dot array grating, " it "
Font grating, spectroscopy photon screen, amendment gridiron pattern grating, trapezoidal primitive grating.
The general principle and principal character and advantages of the present invention of the present invention has been shown and described above.The technology of the industry
Personnel are it should be appreciated that the present invention is not limited to the above embodiments, and the simply explanation described in above-described embodiment and specification is originally
The principle of invention, without departing from the spirit and scope of the present invention, various changes and modifications of the present invention are possible, these changes
Change and improvement all fall within the protetion scope of the claimed invention.The claimed scope of the invention by appended claims and its
Equivalent thereof.
Claims (4)
1. one kind transmission and reflective single diffraction order grating spectrometer, it is characterised in that:Including slit component, " returning " type exhaust tube,
Shielded-plate tube, adapter flange, ball-joint component, grating chamber, filter disc room, slide valve, X ray CCD and support frame, the slit component
It is connected with one end of " time " the type exhaust tube, the other end of " time " the type exhaust tube is connected with one end of the shielded-plate tube,
The other end of the shielded-plate tube is connected with one end of the adapter flange, the other end of the adapter flange and the ball-joint group
One end connection of part, the other end of the ball-joint component are connected with one end of the grating chamber, the other end of the grating chamber
It is connected with one end of the filter disc room, the other end of the filter disc room is connected with one end of the slide valve, the slide valve
The other end is connected with the X ray CCD, and the support is connected to the lower end of the ball-joint component.
2. transmission according to claim 1 and reflective single diffraction order grating spectrometer, it is characterised in that:The slit component
Be connected with light source, the light source pass sequentially through the slit of the slit component, the grating chamber grating, the filter disc room filter
It is connected after piece with the X ray CCD thang-kngs.
3. transmission according to claim 2 and reflective single diffraction order grating spectrometer, it is characterised in that:The grating is
Penetrate one kind of grating or reflecting grating.
4. transmission according to claim 1 and reflective single diffraction order grating spectrometer, it is characterised in that:The grating chamber bag
Include incident flange, upper flange, outgoing flange, lower flange, grating translation mechanism, laterally observed window, grating elevating mechanism and top
For observation window, the incident flange is arranged at the side of the grating chamber, and the incident flange connects with the grating translation mechanism
Connect, the outgoing flange is arranged at the opposite side of the grating chamber, and the outgoing flange is connected with the laterally observed window, described
Upper flange is arranged at the upper end of the grating chamber, and the upper flange is connected with the laterally observed window, and the lower flange is arranged at
The lower end of the grating chamber, the lower flange are connected with the grating translation mechanism, and the side of the grating chamber sets the top
Portion's observation window, the grating elevating mechanism is connected with the grating translation mechanism, and is arranged in the grating chamber.
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110133709A (en) * | 2019-06-06 | 2019-08-16 | 中国工程物理研究院激光聚变研究中心 | Class delta-response SOFT X-RAY SPECTROMETER |
CN110501768A (en) * | 2018-05-17 | 2019-11-26 | 苏州大学 | A kind of multispectral, big bandwidth photon screen |
CN113433151A (en) * | 2021-06-07 | 2021-09-24 | 中国科学院上海光学精密机械研究所 | Multifunctional high-resolution transmission grating X-ray spectrometer |
CN117664324A (en) * | 2024-01-31 | 2024-03-08 | 中国科学院上海高等研究院 | Online X-ray light intensity real-time high-speed monitoring system |
Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1166595A (en) * | 1996-12-26 | 1997-12-03 | 中国科学院上海光学精密机械研究所 | High-efficiency and high-resolution soft X-ray transmission grating spectrometer |
CN2399725Y (en) * | 1998-11-19 | 2000-10-04 | 中国科学院上海光学精密机械研究所 | Transmission raster spectrograph for soft x-ray waveband |
CN1313507A (en) * | 2000-03-10 | 2001-09-19 | 中国科学院高能物理研究所 | Device for metering reflectivity of synchronously radiating X rays from multi-layer membrane |
CN2608962Y (en) * | 2002-12-27 | 2004-03-31 | 中国科学院物理研究所 | Glancing incidence soft X ray and ultra violet ray flat field spectrometer |
CN101672695A (en) * | 2009-09-23 | 2010-03-17 | 广西大学 | Diffraction grating spectrometer |
CN201594172U (en) * | 2009-12-10 | 2010-09-29 | 中国工程物理研究院激光聚变研究中心 | X-ray grating spectrum type Wolter mirror imaging device |
CN204988507U (en) * | 2015-09-18 | 2016-01-20 | 中国工程物理研究院激光聚变研究中心 | Transmittance grating spectrometer with wide range measuring range is distinguishd to high register for easy reference |
CN105866157A (en) * | 2016-05-26 | 2016-08-17 | 深圳市华唯计量技术开发有限公司 | X fluorescence spectrometer for PM2.5 heavy metal online detection |
CN106094084A (en) * | 2016-06-02 | 2016-11-09 | 中国科学院微电子研究所 | Multiplayer films in EUV reflective single diffraction order grating |
CN106199677A (en) * | 2016-08-30 | 2016-12-07 | 中国工程物理研究院激光聚变研究中心 | A kind of X-ray spectrum is measured and frame imaging system |
CN107315211A (en) * | 2016-04-26 | 2017-11-03 | 中国科学院微电子研究所 | Reflective single diffraction order grating and its manufacture method |
CN207763829U (en) * | 2017-12-07 | 2018-08-24 | 中国工程物理研究院激光聚变研究中心 | A kind of transmission and reflective single diffraction order grating spectrometer |
-
2017
- 2017-12-07 CN CN201711282335.7A patent/CN107843342A/en active Pending
Patent Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1166595A (en) * | 1996-12-26 | 1997-12-03 | 中国科学院上海光学精密机械研究所 | High-efficiency and high-resolution soft X-ray transmission grating spectrometer |
CN2399725Y (en) * | 1998-11-19 | 2000-10-04 | 中国科学院上海光学精密机械研究所 | Transmission raster spectrograph for soft x-ray waveband |
CN1313507A (en) * | 2000-03-10 | 2001-09-19 | 中国科学院高能物理研究所 | Device for metering reflectivity of synchronously radiating X rays from multi-layer membrane |
CN2608962Y (en) * | 2002-12-27 | 2004-03-31 | 中国科学院物理研究所 | Glancing incidence soft X ray and ultra violet ray flat field spectrometer |
CN101672695A (en) * | 2009-09-23 | 2010-03-17 | 广西大学 | Diffraction grating spectrometer |
CN201594172U (en) * | 2009-12-10 | 2010-09-29 | 中国工程物理研究院激光聚变研究中心 | X-ray grating spectrum type Wolter mirror imaging device |
CN204988507U (en) * | 2015-09-18 | 2016-01-20 | 中国工程物理研究院激光聚变研究中心 | Transmittance grating spectrometer with wide range measuring range is distinguishd to high register for easy reference |
CN107315211A (en) * | 2016-04-26 | 2017-11-03 | 中国科学院微电子研究所 | Reflective single diffraction order grating and its manufacture method |
CN105866157A (en) * | 2016-05-26 | 2016-08-17 | 深圳市华唯计量技术开发有限公司 | X fluorescence spectrometer for PM2.5 heavy metal online detection |
CN106094084A (en) * | 2016-06-02 | 2016-11-09 | 中国科学院微电子研究所 | Multiplayer films in EUV reflective single diffraction order grating |
CN106199677A (en) * | 2016-08-30 | 2016-12-07 | 中国工程物理研究院激光聚变研究中心 | A kind of X-ray spectrum is measured and frame imaging system |
CN207763829U (en) * | 2017-12-07 | 2018-08-24 | 中国工程物理研究院激光聚变研究中心 | A kind of transmission and reflective single diffraction order grating spectrometer |
Non-Patent Citations (2)
Title |
---|
刘亚青等: "平焦场光栅光谱仪的新用法", 光学学报, vol. 20, no. 7, pages 879 - 882 * |
靳志辉: "新型透射光栅谱仪支撑调节机构总体方案研究", 《中国优秀硕士学位论文全文数据库工程科技Ⅱ辑》, pages 1 - 51 * |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110501768A (en) * | 2018-05-17 | 2019-11-26 | 苏州大学 | A kind of multispectral, big bandwidth photon screen |
CN110133709A (en) * | 2019-06-06 | 2019-08-16 | 中国工程物理研究院激光聚变研究中心 | Class delta-response SOFT X-RAY SPECTROMETER |
CN110133709B (en) * | 2019-06-06 | 2022-06-14 | 中国工程物理研究院激光聚变研究中心 | Delta-like response soft X-ray energy spectrometer |
CN113433151A (en) * | 2021-06-07 | 2021-09-24 | 中国科学院上海光学精密机械研究所 | Multifunctional high-resolution transmission grating X-ray spectrometer |
CN117664324A (en) * | 2024-01-31 | 2024-03-08 | 中国科学院上海高等研究院 | Online X-ray light intensity real-time high-speed monitoring system |
CN117664324B (en) * | 2024-01-31 | 2024-04-12 | 中国科学院上海高等研究院 | Online X-ray light intensity real-time high-speed monitoring system |
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