CN1166595A - High-efficiency and high-resolution soft X-ray transmission grating spectrometer - Google Patents
High-efficiency and high-resolution soft X-ray transmission grating spectrometer Download PDFInfo
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- CN1166595A CN1166595A CN 96116636 CN96116636A CN1166595A CN 1166595 A CN1166595 A CN 1166595A CN 96116636 CN96116636 CN 96116636 CN 96116636 A CN96116636 A CN 96116636A CN 1166595 A CN1166595 A CN 1166595A
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Abstract
The grating spectrometer contains pre-reflector assembly slit assembly, diaphragm assembly, focusing reflector assembly, transmission grating assembly, and cassette assembly, which are mounted on optical bench inside vacuum chamber and successively arranged between the front and back flanges along the optical path direction. It has high optical collecting efficiency with acceptance angle being several decades times higher than available technology, and it has high spveral resolution superior to one angstrom and flat spectral focal plane. It has reasonable structure and no excessive demand to grating, and this makes it have low cost and wide use range.
Description
The present invention is a kind of soft X-ray transmission grating spectrometer with high collection efficiency and high spectral resolution.
Development along with the short-wavelength light lithography, nothing support transmission grating (as the transmission grating of cutting spacing d=1,0.5,0.2 μ m) and the various transmission grating spectrometer of cutting spacing for micron or sub-micrometer scale appearred in recent years, as the pin hole transmission grating spectrometer, slit transmission grating spectrometer and band mirror in front transmission grating spectrometer.These transmission grating spectrometers are widely used in the grenz ray spectral investigation, high-temperature plasma diagnosis and soft x-ray laser research.[see N.M.Ceglioet a1., ＂ Time-resolved x-ray tsanemission grating spectrometer for studying laser-producedplasmas ＂, Appl.Opt.22 (2), 318-27 (1983); K.Eidmann et a1., ＂ Absolute soft x-raymeasurements with a transmission grating spectrometer, ＂ Laser and Particle Beams, 4 (3～4), 521-36 (1986); J.L.Bourgade et al., " SPARTUVIX:A time-resolved XUV transmissiongrating spectrograph for x-ray laser research, ＂ Rev.Sci.Instrum.59 (8), 1840-2 (1988)].Pin hole or slit transmission grating spectrometer only add a pin hole (pin hole transmission grating spectrometer) in grating the place ahead, an or slit (slit transmission grating spectrometer), simple in structure, it is convenient therefore to aim at, but the collection efficiency of spectrometer is subjected to the pin hole of tens micron dimensions or the serious restriction of slit dimension.The pin hole of this dimension of while or slit have also seriously limited the grating line sum N that participates in diffraction, and (the spectral resolution λ of spectrometer/Δ λ～N), the influence that the source of adding is widened makes the spectrally resolved Δ λ of spectrometer very low.To the spectrally resolved Δ λ of the transmission grating spectrometer of d=1 μ m generally between 3～5 .The transmission grating spectrometer of band mirror in front though improved the collection efficiency of spectrometer, has increased the grating line sum that participates in diffraction, owing to be subjected to the influence that the source is widened, and spectrometer spectrally resolved still very low.
The objective of the invention is at a kind of grating line sum that increases the light harvesting solid angle of spectrometer and participate in diffraction of the low and spectrally resolved low defective invention of existing transmission grating spectrometer collection efficiency, overcome the source and widen, have the soft X-ray transmission grating spectrometer of high collection efficiency and high spectral resolution spectrally resolved influence.
Fig. 1 is a high-efficiency and high-resolution soft X-ray transmission grating spectrometer structural representation of the present invention.High-efficiency and high-resolution soft X-ray transmission grating spectrometer contains by locular wall 803 and two ends the vacuum chamber 8 that forward flange 801 and rear flange 802 are constituted is housed, be built-in with optical bench 9 at vacuum chamber 8, the forward flange 801 of vacuum chamber 8 is hollow, and link to each other with light source 1 to be measured, the light beam of light source 1 to be measured enters in the vacuum chamber 8 by hollow forward flange 801.The direction of advancing along light path, being placed in successively on the optical bench 9 in the vacuum chamber 8 by forward flange 801 to the rear flange 802 of vacuum chamber 8 has mirror in front assembly 2, place the slit assembly 3 on mirror in front 201 focal planes, diaphragm assembly 4, focus reflection mirror assembly 5, transmission grating assembly 6 and the magazine assembly 7 that places on the common spectrum focal plane that forms of focusing mirror (501) and transmission grating (601).
Said mirror in front assembly 2 is contained in the mirror in front support 203 on the optical bench 9 in the vacuum chamber 8 by the mirror in front 201 that places on the mirror in front seat 202, and is loaded on 202 formations of mirror in front seat on the mirror in front support 203.Mirror in front 201 is a cylindrical mirror, and its bus is parallel with the seam length direction of slit 301, and the spherical reflector that also available machining precision high cost is low substitutes; Reflecting surface scribbles reflectance coating, as golden film, or for expansion shortwave scope, also can be coated with the nickel film.Mirror in front seat 202 can be made two dimension and rotate adjusting, and mirror in front support 203 can be made height and regulate and left and right sides translation.
Diaphragm assembly 4 comprises the diaphragm 401 on the apertured bracket 402 that is fixed on the optical bench 9.There is a horizontal rectangular opening also can on apertured bracket 402, move up and down on the diaphragm 401.Apertured bracket 402 can be done left and right sides translation.
Focus reflection mirror assembly 5 contains the focus reflection mirror support 503 that is fixed on the optical bench 9, and the focus reflection microscope base 502 on the fixed-focus mirror support 503 has focusing mirror 501 on focus reflection microscope base 502.Focusing mirror 501 is a cylindrical mirror, and its bus is parallel with the seam length direction of slit 301, and the spherical reflector that also available machining precision high cost is low substitutes, and reflecting surface scribbles reflectance coating such as golden film, or for expansion shortwave scope, also can be coated with the nickel film.Focus reflection microscope base 502 can be made two dimension and rotate adjusting and height fine setting, and focus reflection mirror support 503 can be done height adjusting and left and right sides translation.
Being placed on the optical bench 9 in the vacuum chamber 8 has equally distributed through hole and screw, is used for fixing the support of above-mentioned each assembly.Vacuum chamber 8 is to be made of the front and back flange 801 at locular wall 803 and two ends and 802 as mentioned above.Forward flange 801 is used for spectrometer is connected on the light source 1 to be measured, and the light beam of light source 1 to be measured enters in the vacuum chamber 8 by hollow forward flange 801.Remove rear flange, can take out magazine 702, so that dress is got egative film in the darkroom.Vacuum chamber 8 can be by the vacuum unit exhaust of light source chamber.
Fig. 2 is the light path synoptic diagram of high-efficiency and high-resolution soft X-ray transmission grating spectrometer of the present invention.Along the grenz ray working direction of light source 1 emission to be measured, be mirror in front 201 successively, slit 301, diaphragm 401, focusing mirror 501, large-area transmission grating 601 and soft x-ray detector 701.The grenz ray of light source to be measured 1 emission by mirror in front 201 imagings (vertical focal line) on the slit 301 of horizontal positioned; The grenz ray that sees through slit 301 drops on the focusing mirror 501 through diaphragm 401; Focusing mirror 501 will through large-area transmission grating 601 diffraction, focus on the soft x-ray detector 701 by different wave length through the grenz ray of slit 301, so far obtains the grenz ray spectrum of light source 1 emission to be measured.
The characteristics of high-efficiency and high-resolution soft X-ray transmission grating spectrometer of the present invention have:
1. has high collection efficiency
Being positioned at the locational 50 μ m pin hole transmission grating spectrometers of mirror in front in the present invention and the prior art compares with 50 μ m slit transmission grating spectrometers, for the long catoptron of 50mm, when incident angle is 86 °, the acceptance angle of this spectrometer increases nearly 70 times, so the collection efficiency of spectrometer is greatly improved.
2. has high spectral resolution
Existing transmission grating spectrometer, owing to be subjected to the restriction of the limited dimension of grating, the spectrum of acquisition all has serious source to widen; Owing to be subjected to the restriction of pin hole and slit dimension, only tens grating lines participate in diffraction, and are therefore spectrally resolved low, are generally 3～5 .The vertical focal line that the present invention adopts the secondary source be subjected to the slit restriction and focusing mirror to form, and large-area transmission grating can reach below 1 spectrally resolved Δ λ of this transmission spectrometer with preposition optical system, i.e. Δ λ＜1 .As if the low-density grating that replaces every millimeter 1000 grooves with the high dencity grating of every millimeter 5000 grooves, spectrally resolved can further improve below 0.1 .
3. has straight spectrum focal plane
Spectrometer of the present invention still has straight spectrum focal plane, helps the photodetector coupling with straight receiving plane.
4. expense is low
The price of transmission grating is relevant with the incisure density of grating.Because the present invention is rational in infrastructure, and is not harsh to the requirement of optical grating element, can adopt the lower grating of incisure density (every millimeter 1000 grooves), so cost is low.Do preposition and focusing mirror with spherical reflector, processing charges is descended.
5. purposes is wide
The present invention adopts by two cylinders (or sphere) catoptron 201,501 preposition optical systems of forming of band slit and large-area transmission grating 601 constitute high-efficiency and high-resolution soft X-ray transmission grating spectrometer, the collection efficiency of spectrometer is improved a lot, and overcome the source and widened spectrally resolved influence, increase the grating line sum that participates in diffraction, the spectrally resolved of spectral line improved a lot.Therefore this spectrometer can be used for surveying weak x-ray source such as power is very high but the grenz ray spectrum of the very big wide light source of X ray of plasma that ultra-short pulse laser that energy is very low produces or emitting area.
Description of drawings:
Fig. 1 is the structural representation of high-efficiency and high-resolution soft X-ray transmission grating spectrometer of the present invention.
Fig. 2 is the light path synoptic diagram of high-efficiency and high-resolution soft X-ray transmission grating spectrometer of the present invention.
Embodiment:
1. spectrometer parameter:
Structure as depicted in figs. 1 and 2, the parameter of choosing each element are that mirror in front 201 is 3315mm for radius-of-curvature, the cylindrical mirror of long 55mm, and mirror in front 201 is 408mm apart from light source 1 to be measured, is 128mm apart from slit 01.When incident angle was 86.63 °, on slit 301, enlargement factor was 0.31 (reduced image) to the cylindrical mirror of mirror in front 201 source imaging.The width of slit 301 is 20 μ m.To slit 301 directions, formed that width is the secondary source of 20 μ m in the meridian ellipse from focusing mirror 501.Focusing mirror 501 is 5000mm for radius-of-curvature, the spherical reflector of long 70mm, focusing mirror 501 is 234mm apart from slit 301, it will be through the secondary source light beam of slit 301, through the large-area transmission grating 601 of 1000/millimeter grooves, be imaged on magazine 702 and be built on the soft x-ray detector 701 on the spectrum focal plane.The focusing mirror 501 of large-area transmission grating 601 and soft x-ray detector 701 surface lies spheres is respectively 44mm and 294mm.The incident angle of light beam on the focusing mirror 501 of sphere is 87.01 ° of large-area transmission gratings, 601 wide 1.2mm, and the groove cycle is 1 μ m, and its groove is parallel with slit 301 seam length directions.Soft x-ray detector 701 is selected the grenz ray egative film for use
2. take the photograph the spectrum experiment
(1.06 μ m ,～5J have carried out the experiment of silicon target spectrum of laser plasma on 200ps) to spectrometer with said structure parameter at Shanghai Optics and Precision Mechanics institute, Chinese Academy of Sciences's 115 high power nd glass laser devices.With spectrometer of the present invention and SIOFM-5FW grenz ray egative film, a target practice just can obtain fine exposure and obtain silicon grenz ray spectrum very clearly.Si XII 5f-3d (88.84 ) and 5d-3p (87.28 ) in the spectrum that obtains, SiXII6f-3d (75.83 ) and two groups of two-wires of 6d-3p (74.64 ) are clearly separated.The wavelength difference Δ λ of these two groups of two-wires is respectively 1.56 and 1.19 , shows that the spectrally resolved of spectrometer of the present invention reached about 1 .Testing used large-area transmission grating 601 width is 1.2mm, participates in about 1200 of the grating line of diffraction.With the bigger grating of width, or the higher grating of incisure density, estimate spectrally resolvedly will be better than 0.5 or littler.
Claims (10)
1. high-efficiency and high-resolution soft X-ray transmission grating spectrometer, comprise by locular wall (803) and two ends the vacuum chamber (8) that forward flange (801) and rear flange (802) are constituted is housed, vacuum chamber (8) is built-in with optical bench (9), the forward flange (801) of vacuum chamber (8) is connected with light source to be measured (1), in vacuum chamber (8), be equipped with slit assembly (3) on the optical bench (9), diaphragm assembly (4) and transmission grating assembly (6), it is characterized in that concrete structure is to place the light beam of the outer forward flange of vacuum chamber (8) (801) light source to be measured (1) before to enter in the vacuum chamber (8) by hollow forward flange (801), in vacuum chamber (8) by forward flange (801) between the rear flange (802), the direction of advancing along light path, be placed in successively mirror in front assembly (2) is arranged on the optical bench (9), place the slit assembly (3) on mirror in front (201) focal plane, diaphragm assembly (4), focus reflection mirror assembly (5), transmission grating assembly (6) and place magazine assembly (7) on the common spectrum focal plane that forms of focusing mirror (501) and transmission grating (601).
2. according to a kind of soft X-ray transmission grating spectrometer of claim 1, it is characterized in that mirror in front assembly (2) by the mirror in front support (203) that is fixed on the interior optical bench of vacuum chamber (8) (9), place the mirror in front seat (202) on the mirror in front support (203) and place the mirror in front (201) on the mirror in front seat (202) to constitute.
3. according to a kind of soft X-ray transmission grating spectrometer of claim 1, it is characterized in that slit assembly (3) by the slit support (303) that is fixed on the interior optical bench of vacuum chamber (8) (9), in the slit base (302) on the slit support (303) with on slit base (302), be equipped with the slit (301) that the seam length direction puts by horizontal direction and constituted.
4. according to a kind of soft X-ray transmission grating spectrometer of claim 1, it is characterized in that diaphragm assembly (4) comprises the apertured bracket (402) that is fixed on the optical bench (9) and be equipped with the diaphragm (401) that has a horizontal rectangular opening on apertured bracket (402).
5. according to a kind of soft X-ray transmission grating spectrometer of claim 1, it is characterized in that focus reflection mirror assembly (5) contains the focus reflection mirror support (503) that is fixed on the optical bench (9), focus reflection microscope base (502) is being arranged on the focus reflection mirror support (503) and on focus reflection microscope base (502), be equipped with focusing mirror (501).
6. according to a kind of soft X-ray transmission grating spectrometer of claim 1 or 3, it is characterized in that transmission grating assembly (6) is by the transmission grating support (603) that is fixed on the optical bench (9), place the transmission grating seat (602) on the transmission grating support (603) to constitute with the transmission grating (601) parallel of the large-area grating line on placing transmission grating seat (602) with slit (301) seam length direction.
7. according to a kind of soft X-ray transmission grating spectrometer of claim 1, it is characterized in that placing the magazine assembly (7) on the optical bench (9) is by the magazine support (704) that is fixed on the optical bench (9), be loaded on the cassette seat (703) that has electronic central shutter (705) is arranged on the magazine support (704), placing has magazine (702) on the cassette seat (703), soft x-ray detector (701) is housed in magazine (702) constitutes.
8. according to a kind of soft X-ray transmission grating spectrometer of claim 1 or 2, it is characterized in that mirror in front (201) is the cylindrical mirror that reflecting surface scribbles reflectance coating, or spherical reflector.
9. according to a kind of soft X-ray transmission grating spectrometer of claim 1 or 5, it is characterized in that focusing mirror (501) is the cylindrical mirror that reflecting surface scribbles reflectance coating, or spherical reflector.
10. according to a kind of soft X-ray transmission grating spectrometer of claim 1 or 7, it is characterized in that placing the soft x-ray detector (701) in the magazine (702) is the grenz ray egative film, or grenz ray CCD camera, or have the photodiode array (OMA) of fluorescence conversion screen or a grenz ray streak camera.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 96116636 CN1059273C (en) | 1996-12-26 | 1996-12-26 | High-efficiency and high-resolution soft X-ray transmission grating spectrometer |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 96116636 CN1059273C (en) | 1996-12-26 | 1996-12-26 | High-efficiency and high-resolution soft X-ray transmission grating spectrometer |
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| CN1166595A true CN1166595A (en) | 1997-12-03 |
| CN1059273C CN1059273C (en) | 2000-12-06 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN 96116636 Expired - Fee Related CN1059273C (en) | 1996-12-26 | 1996-12-26 | High-efficiency and high-resolution soft X-ray transmission grating spectrometer |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102621167A (en) * | 2012-03-19 | 2012-08-01 | 中国科学院物理研究所 | Transmission-type hard X-ray spectrometer |
| CN104865284A (en) * | 2015-04-03 | 2015-08-26 | 北京空间机电研究所 | Apparatus used for generating single-frequency low-energy soft X-ray beam |
| CN105067117A (en) * | 2015-09-18 | 2015-11-18 | 中国工程物理研究院激光聚变研究中心 | Transmission grating spectrometer with high spectral resolution and wide spectrum measurement range |
| CN107831635A (en) * | 2017-11-30 | 2018-03-23 | 中国工程物理研究院激光聚变研究中心 | A kind of X ray streak camera markers photo-coupler |
| CN107843342A (en) * | 2017-12-07 | 2018-03-27 | 中国工程物理研究院激光聚变研究中心 | One kind transmission and reflective single diffraction order grating spectrometer |
| CN108398448A (en) * | 2018-04-23 | 2018-08-14 | 浙江工业大学 | X-ray diAN_SNhragm for X-ray array combination refractor integrated package to be miniaturized |
| CN113433151A (en) * | 2021-06-07 | 2021-09-24 | 中国科学院上海光学精密机械研究所 | Multifunctional high-resolution transmission grating X-ray spectrometer |
-
1996
- 1996-12-26 CN CN 96116636 patent/CN1059273C/en not_active Expired - Fee Related
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102621167A (en) * | 2012-03-19 | 2012-08-01 | 中国科学院物理研究所 | Transmission-type hard X-ray spectrometer |
| CN104865284A (en) * | 2015-04-03 | 2015-08-26 | 北京空间机电研究所 | Apparatus used for generating single-frequency low-energy soft X-ray beam |
| CN105067117A (en) * | 2015-09-18 | 2015-11-18 | 中国工程物理研究院激光聚变研究中心 | Transmission grating spectrometer with high spectral resolution and wide spectrum measurement range |
| CN107831635A (en) * | 2017-11-30 | 2018-03-23 | 中国工程物理研究院激光聚变研究中心 | A kind of X ray streak camera markers photo-coupler |
| CN107831635B (en) * | 2017-11-30 | 2023-10-24 | 中国工程物理研究院激光聚变研究中心 | Time scale optical coupler of X-ray stripe camera |
| CN107843342A (en) * | 2017-12-07 | 2018-03-27 | 中国工程物理研究院激光聚变研究中心 | One kind transmission and reflective single diffraction order grating spectrometer |
| CN108398448A (en) * | 2018-04-23 | 2018-08-14 | 浙江工业大学 | X-ray diAN_SNhragm for X-ray array combination refractor integrated package to be miniaturized |
| CN113433151A (en) * | 2021-06-07 | 2021-09-24 | 中国科学院上海光学精密机械研究所 | Multifunctional high-resolution transmission grating X-ray spectrometer |
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| Publication number | Publication date |
|---|---|
| CN1059273C (en) | 2000-12-06 |
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