CN208477092U - A kind of multi-cascade distribution Micro CT imaging system - Google Patents
A kind of multi-cascade distribution Micro CT imaging system Download PDFInfo
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- CN208477092U CN208477092U CN201821192774.9U CN201821192774U CN208477092U CN 208477092 U CN208477092 U CN 208477092U CN 201821192774 U CN201821192774 U CN 201821192774U CN 208477092 U CN208477092 U CN 208477092U
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Abstract
The utility model discloses a kind of multi-cascade distribution Micro CT imaging systems, the system includes X-ray source, Micro CT imaging module, Micro CT imaging module includes microcobjective, tube lens, image camera and scintillator, X-ray source is arranged in the side of sample, and the scintillator of Micro CT imaging module is sequentially arranged in the X-ray of X-ray source outgoing in the straightline propagation optical path after sample according to sequencing；Microcobjective, tube lens, image camera are sequentially located in the visible light optical path of scintillator outgoing, and image camera acquires the image of each position of sample.The utility model can be realized multiple X-ray-visible light conversion, X-ray emanated energy is sufficiently converted, it is imaged on the image detection face of the image camera of Micro CT imaging modules at different levels respectively, and use across the scale synthetic technology of multiple images, the final image for obtaining high spatial resolution, high time resolution, high s/n ratio, is obviously improved imaging efficiency.
Description
Technical field
The utility model relates to micro-imaging technique fields, more particularly to a kind of multi-cascade distribution Micro CT imaging system
System.
Background technique
Micro CT system based on optocoupler and visible-light detector is high resolution X-ray imaging skill leading in the world at present
Art.The basic principle is that X-ray is converted into visible light using scintillator 54, then light point will be seen that using 51 groups of microcobjective
Big imaging is laid in camera chip.This method by the optical amplifier of microcobjective 51 can realize high-resolution X-ray at
Picture, however traditional micro CT system based on optocoupler and visible-light detector is typically only capable to complete primary X-ray-visible light turn
It changes.It is limited to the depth of field very little (several microns) of microcobjective 51, scintillator 54 is usually very thin, this causes X-ray to pass through flashing
The visible light conversion efficiency of body 54 is very low, and most of X-ray has been directed through scintillator 54 and has been wasted.
Utility model content
The purpose of this utility model is to provide a kind of multi-cascade distribution Micro CT imaging systems to overcome or at least subtract
At least one of the drawbacks described above of the light prior art.
To achieve the above object, the utility model provides a kind of multi-cascade distribution Micro CT imaging system, multi-cascade point
Cloth Micro CT imaging system includes X-ray source, at least two-stage Micro CT imaging module, controller and kinematic driving unit,
The Micro CT imaging module of every level-one includes microcobjective, tube lens, image camera and scintillator, the X-ray
Light source is arranged in the side of sample, and the scintillator of the Micro CT imaging module of every level-one is sequentially arranged according to sequencing
The X-ray of the X-ray source outgoing is in the straightline propagation optical path after the sample；The Micro-CT scanning of every level-one at
Be sequentially located at as the microcobjective, tube lens, image camera of module in the visible light optical path that the scintillator is emitted, it is described at
As the image of collected each position of sample is conveyed to the controller by camera；The controller passes through movement
Driving device drives the sample rotates and translation, and the imaging results of the sample, institute are passed through to acquire ray with different angle
It states controller and completes CT reconstruction according to the imaging results of input.
Further, the Micro CT imaging module of every level-one further includes reflecting mirror, and the reflecting mirror is arranged in institute
It states in the visible light optical path between scintillator and the microcobjective.
Further, the angle of the incident light and reflected light that reach the reflecting mirror is 90 degree.
Further, the thickness of the reflecting mirror of the Micro CT imaging module of every level-one is identical.
Further, the front surface of the scintillator of the 2nd to the n grade of Micro CT imaging module is pasted with filter plate.
Further, the X-ray source be Microfocus X-ray cone-beam x-ray, the microcobjective enlargement ratio matching described in
Image magnification ratio on the image detection face of image camera, so that the image of the image camera of the Micro CT imaging module at different levels
The image magnification ratio got on test surface is identical.
Further, the microcobjective is long reach microcobjective, and the range of enlargement ratio is 2 times~50 times.
The utility model proposes a kind of multi-cascade distribution Micro CT imaging systems, the light after X-ray passes through sample
On the road, it realizes multiple X-ray-visible light conversion, X-ray emanated energy is sufficiently converted, is imaged on respectively at different levels
On the image detection face of the image camera of Micro CT imaging module, and across the scale synthetic technology of multiple images is used, it is final to obtain
High spatial resolution, high time resolution, high s/n ratio image, be obviously improved imaging efficiency.
Detailed description of the invention
Fig. 1 is the principle schematic diagram of multi-cascade distribution Micro CT imaging system provided by the utility model；
Fig. 2 is the composition block diagram of multi-cascade distribution Micro CT imaging system shown in FIG. 1.
Specific embodiment
In the accompanying drawings, same or similar element is indicated using same or similar label or there is same or like function
Element.The embodiments of the present invention are described in detail with reference to the accompanying drawing.
Term " center ", " longitudinal direction ", " transverse direction ", "front", "rear", "left", "right", " perpendicular in the description of the present invention,
Directly ", the orientation or positional relationship of the instructions such as "horizontal", "top", "bottom" "inner", "outside" is orientation based on the figure or position
Relationship is merely for convenience of describing the present invention and simplifying the description, rather than the device or element of indication or suggestion meaning must
There must be specific orientation, be constructed and operated in a specific orientation, therefore should not be understood as to scope of protection of the utility model
Limitation.
Such as Fig. 1 and as shown in Fig. 2, multi-cascade distribution Micro CT imaging system provided by the present embodiment includes ray light
Source 1, reflecting mirror 55, at least two-stage Micro CT imaging module 5, controller 3 and kinematic driving unit 4.Wherein:
X-ray source 1 can be synchrotron radiation light source, and synchrotron radiation light source provides parallel x for Micro CT imaging system
Beam.X-ray source 1 is also possible to laboratory light source, and laboratory light source can provide Microfocus X-ray cone for Micro CT imaging system
Beam X-ray.
Micro CT imaging module 5 includes microcobjective 51, tube lens 52, image camera 53 and scintillator 54.X-ray
Light source 1 is arranged in the side of sample 2, and the X-ray that scintillator 54 is arranged in the outgoing of X-ray source 1 passes through the X-ray after sample 2
In optical path.Microcobjective 51, tube lens 52,53 either order of image camera are located at the visible light optical path of the outgoing of scintillator 54
On.Microcobjective 51 can select different enlargement ratio microcobjectives as needed.Tube lens 52 can carry out axial one-dimensional translation
Fine tuning, the fixed-focus error to compensate microcobjective 51 bring the axial translation of picture, make imaging phase of the image planes with image camera 53
The image detection face of machine 53 is completely coincident.Image camera 53 can be done around optical axis rotation and two-dimension translational fine tuning, be existed to adjust picture
Position and rotation angle on the image detection face of image camera 53.
The depth of field very little (several microns) of microcobjective 51 is limited to, in the Micro-CT scanning based on optocoupler and visible-light detector
Scintillator 54 for the conversion of X-ray-visible light usually very it is thin (although thick scintillator 54 improves transfer efficiency, due to
Its thickness beyond 51 depth of field of microcobjective will affect image contrast and signal-to-noise ratio, can bring Micro CT imaging picture quality
Decline to a great extent), X-ray-visible light transfer efficiency is very low, and most of X-ray has been directed through scintillator 54 and has been wasted.
The present embodiment is using at least two-stage Micro CT imaging module 5." grade " in " at least two-stage Micro CT imaging module 5 " is understood that
For " set " or " a ", " at least two-stage Micro CT imaging module 5 " refers to two sets or two Micro CT imaging modules 5 with concatenated
Mode connects, and the light that X-ray source 1 issues is successively via the 1st grade of Micro CT imaging module 5, the 2nd grade of Micro CT imaging module
5 ... n-th grade of Micro CT imaging module 5.Also that is, multistage Micro CT imaging mould is arranged in the optical path that X-ray passes through sample 2
Block 5 organizes the distributed Micro CT imaging system of multi-cascade in cost implementation.The front end of the shell of Micro CT imaging module 5
Interface is consistent with the bore of back end interface, therefore can carry out multi-stage cascade in the exit direction of X-ray.The Micro-CT scanning of every level-one
The imaging process of image-forming module 5 is as follows:
On the surface of sample 2, X-ray carries inside sample 2 after passing through sample 2 for the x-ray bombardment that X-ray source 1 issues
Absorption coefficient distributed intelligence reaches scintillator 54, realizes that X-ray-visible light converts optocoupler via scintillator 54.Via sudden strain of a muscle
The visible light that bright body 54 is converted to enters in Micro CT imaging module 5, is finally imaged by image camera 53.
The imaging process of at least two-stage Micro CT imaging module 5 is as follows:
On the surface of sample 2, X-ray carries inside sample 2 after passing through sample 2 for the x-ray bombardment that X-ray source 1 issues
Absorption coefficient distributed intelligence reaches the scintillator 54 of first order Micro CT imaging module 5, realizes that X-ray-can via scintillator 54
It is light-exposed to convert optocoupler, and the 1st grade of imaging is completed by the image camera 53 of the 1st grade of Micro CT imaging module 5.Hereafter X-ray
Continue the scintillator 54 for reaching the 2nd grade of Micro CT imaging module 5 along straightline propagation, realizes X-ray-visible light via scintillator 54
Optocoupler is converted, and the 2nd grade of imaging is completed by the image camera 53 of the 2nd grade of Micro CT imaging module 5...., and so on,
The X-ray that X-ray source 1 issues continues the scintillator 54 that n-th grade of Micro CT imaging module 5 is reached along straightline propagation, via sudden strain of a muscle
Bright body 54 realizes that X-ray-visible light converts optocoupler, and completes the by the image camera of n-th grade of Micro CT imaging module 5 53
N grades of imagings.Therefore, multistage Micro CT imaging module 5 is set in the optical path that X-ray passes through sample 2, passes through multistage in X-ray
Micro CT imaging module 5 is imaged respectively, and then increases the utilization rate of X-ray, improves Micro CT imaging efficiency.
In one embodiment, when using laboratory light source, X-ray source 1 is Microfocus X-ray cone-beam x-ray, in X-ray
When partially having geometry amplifying power, therefore tandem type micro imaging system being used to carry out Multistage imaging, after scintillators 54 at different levels are converted
Visible light pattern magnifying power it is not identical.It is visited by adjusting the enlargement ratio of microcobjective 51 to match the image of image camera 53
Image magnification ratio on survey face, so that got on the image detection face of the image camera 53 of Micro CT imaging module 5 at different levels
Image magnification ratio is approximately uniform.The present embodiment is also needed using across the scale synthetic technology of multiple images, to Micro CT imagings at different levels
The image got on the image detection face of the image camera 53 of module 5 is synthesized, can obtain in this way high spatial resolution,
The image of high time resolution, high s/n ratio, is obviously improved imaging efficiency.
In one embodiment, the Micro CT imaging module 5 of every level-one further includes reflecting mirror 55, to realize that tandem type is aobvious
Micro- CT imaging, is arranged reflecting mirror 55 before microcobjective 51, vertically turns back visible light optical path (before mirror instead by reflecting mirror 55
Penetrate), make via scintillator 54 convert after visible light project on reflecting mirror 55, by reflecting mirror 55 vertically reflection and then into
Enter to microcobjective 51.Since the penetrability of X-ray is strong, it is necessary to be turned back optical path using the reflection that reflecting mirror 55 provides, can just be kept away
Exempt from X-ray damage imaging camera 53.The reflection angle of reflecting mirror 55 can be finely adjusted, to compensatory reflex mirror 55 and its fixed knot
The foozle of structure.
55 thickness of reflecting mirror of the Micro CT imaging module 5 of every level-one is identical, i.e. flat reflective mirror, thickness range 1
~5mm.Due to only having this equal thickness component of reflecting mirror 55 on the direction that ray is propagated, to the X-ray for passing through reflecting mirror 55
Energy distribution influence minimum, and the influence of the reflecting mirror 55 is reflected in X-ray energy distribution as a steady state value, can be by advance
Calibration completely eliminates.And then cascaded by multiple Micro CT imaging modules that cascade, X-ray energy is utilized step by step,
The imaging efficiency of Micro CT imaging can be increased substantially.
To realize mirror front-reflection imaging, wherein microcobjective 51 is long reach microcobjective, such as: three is rich
Mitutoyo M Plan Apo series microcobjective 51, the enlargement ratio of microcobjective 51 such as can be 2 times~50 times.
In one embodiment, the front surface of scintillator 54 attaches filter plate (not shown), and " front surface " can manage
Solution is the surface of light incidence.By being pasted with filter plate before scintillator 54, X-ray can be absorbed.Due to the filter plate pair
The Electron absorption ability of different-energy is different, and the uptake of the X-ray of low energy is greater than the X-ray of high-energy, and thus utilizing should
Filter plate can realize a point spectral imaging.
Such as: the filter plate attached before the scintillator 54 of 2~n grades of Micro CT imaging module 5, then, the system
Point spectral imaging and multi-power spectrum can be realized while being imaged.The x-ray bombardment that X-ray source 1 issues is in 2 surface of sample, X-ray
Across sample 2 and the scintillator 54 that 2 internal absorptance distributed intelligence of sample reaches the 1st grade of Micro CT imaging module 5 is carried, warp
It realizes that X-ray-visible light converts optocoupler by scintillator 54, and completes the 1st grade by reflecting mirror 55 and Micro CT imaging module 5
Imaging.Hereafter X-ray continues to reach the filter plate that the scintillator 54 of the 2nd grade of Micro CT imaging module 5 attaches along straightline propagation, warp
After filter plate is crossed to the absorption of electron beam, the electronics of most of higher-energy passes through filter plate to scintillator 54 and completes optocoupler, and
Most of electronics compared with low energy is absorbed by filter plate.Therefore the electron energy for reaching rear stage image-forming module scintillator 54 is always high
In previous stage, the x-ray imagings at different levels that can correspond to different-energy range of above-mentioned Micro CT imaging system divide to realize
Spectral imaging.Since image cameras 53 at different levels can work independently, to realize multi-power spectrum while be imaged.
In one embodiment, sample 2 is placed in sample stage (not shown), and sample stage is driven by kinematic driving unit 4
It moves and is able to carry out D translation and three axis rotary motions.In the manner described above, kinematic driving unit is controlled by controller 3
4, make 2 rotation and translation of sample, multiple power spectrum data for projection of sample 2 under different angle can be acquired in this way, utilization is existing
Spectral imaging method, for example, the nonlinear iteration method based on spectral information, based on data for projection decomposition method and based on figure
It as decomposition method etc., is rebuild to complete CT, realizes that the power spectrum CT to scanning sample is imaged.
In one embodiment, X-ray source 1 is laboratory light source, then the X-ray of sample imaging is cone-beam, therefore
Before carrying out spectral imaging, need to get on the image detection face to the image camera 53 of the Micro CT imaging modules 5 at different levels
Image be registrated.Registration parameter mainly includes translational movement, amount of zoom and rotation amount.Therefore, the controller 3 of the present embodiment wraps
It includes:
Amount of zoom demarcating module is used to that standard size sample to be imaged, and micro- using following formula calculating adjacent level
The distance between the scintillator of CT image-forming module completes amount of zoom calibration:
In formula, S1For X-ray source to the vertical range of standard size sample,For X-ray source to i-stage Micro-CT scanning
The vertical range of the scintillator of image-forming module, t be calibration process in control standard size sample translated to X-ray source away from
From qiFor the enlargement ratio of the microcobjective of i-stage Micro CT imaging module, p2For the Pixel Dimensions of image camera,To survey
The image of the every standard size sample measured corresponds to the Pixel Dimensions of object space, mi,jAmplification ratio between image space and object space；
Translational movement and rotation amount demarcating module, are used for the bat between each microcobjective under the situation of same sample
Image is taken the photograph after scaling, on the basis of the image of first order image camera, traversal search rotation amount and translational movement is carried out, finds
The smallest rotation amount of difference and translational movement between image complete the calibration of translational movement and rotation amount.
Here is the process demarcated to translation parameters, zooming parameter and rotation parameter:
S1, zooming parameter are mainly determined that calibration amount of zoom specifically includes as follows by the distance between each cascade scintillator 54
Step:
S11 sets X-ray source 1 and arrives standard size sample for standard size sample 2 (such as JIMA resolution ratio card) etc.
The vertical range of product 2 is S1, the vertical range of the scintillator 54 of X-ray source to i-stage Micro CT imaging module 5 isBenefit
A figure is shot with each cascade image camera 53, amounts to n.
S12 shoots the image of standard size sample 2 by standard size sample 2 to 1 translation distance t of X-ray source, amounts to
N.
S13 repeats S11 and S12h times, h value range 3~5, each image camera 53 obtains a set of image h,
Total n set.
S14, on the image of n × h standard size samples 2, every image of measurement corresponds to the Pixel Dimensions of object spaceIf the Pixel Dimensions of image camera 53 are p2, then the amplification ratio between image space and object space are as follows:
S15, for any i-th of image camera 53, i=1~n establishes the following equation group:
Wherein, qiIndicate the enlargement ratio of i-th of microcobjective 51, which is datum, utilizes least square
Method can find out S1With
By repeating the above steps to each image camera 53, standard size sample 2 is from each when can find out shooting for the first time
Cascade the distance between scintillator 54
S16, will be adjacentSubtract each other, the distance between adjacent scintillator 54 Δ can be obtainedi.The distance is entirely being imaged
Be kept fixed in system it is constant, with the position of X-ray source 1 to sample 2 and X-ray source 1 to the 1st grade of Micro CT imaging mould
The scintillator 54 of block 5 is apart from unrelated.In actual imaging, it is assumed that the vertical range of X-ray source 1 to standard size sample 2 isThe vertical range of scintillator 54 of X-ray source 1 to the 1st grade of Micro CT imaging module 5 is(above-mentioned two value can root
Adjusted according to sample size and resolution requirements, on-fixed value), then the scintillator 54 of Micro CT imaging module 5 at different levels and the 1st grade
The image scaling amount U that the scintillator 54 of Micro CT imaging module 5 is imagedkIt can be calculated as follows:
S2, demarcates translational movement and rotation amount specifically comprises the following steps:
Shooting image between each microcobjective 51 under the situation of same sample 2 after scaling, with the first order at
As camera 53 image on the basis of, carry out traversal search rotation amount and translational movement, find the smallest rotation amount of difference between image
And translational movement, complete the calibration of translational movement and rotation amount.
Since the visual light imaging part of the utility model is fixed position in imaging process, so whole system registration is only
It needs primary.
Finally it is noted that above embodiments are only to illustrate the technical solution of the utility model, rather than it is limited
System.Those skilled in the art should understand that: it is possible to modify the technical solutions described in the foregoing embodiments, or
Person's equivalent replacement of some of the technical features；These are modified or replaceed, and do not make the essence of corresponding technical solution de-
Spirit and scope from various embodiments of the utility model technical solution.
Claims (7)
1. a kind of multi-cascade distribution Micro CT imaging system, which is characterized in that micro- including X-ray source (1), at least two-stage
The Micro CT imaging module (5) of CT image-forming module (5), controller (3) and kinematic driving unit (4), every level-one includes
Microcobjective (51), tube lens (52), image camera (53) and scintillator (54), the X-ray source (1) are arranged in sample
(2) front end interface of side, the shell of the Micro CT imaging module (5) is consistent with the bore of back end interface, every level-one
The scintillator (54) of the Micro CT imaging module (5) is sequentially arranged in the X-ray source (1) outgoing according to sequencing
X-ray is in the straightline propagation optical path after the sample (2)；The Micro CT imaging module (5) of every level-one it is micro-
Object lens (51), tube lens (52), image camera (53) are sequentially located in the visible light optical path of the scintillator (54) outgoing, institute
It states image camera (53) and the image of collected each position of sample (2) is conveyed to the controller (3)；It is described
Controller (3) drives sample (2) rotation and translation by kinematic driving unit (4), is worn with acquiring ray with different angle
The imaging results of the sample (2) are crossed, the controller (3) is completed CT according to the imaging results of input and rebuild.
2. multi-cascade distribution Micro CT imaging system as described in claim 1, which is characterized in that every level-one it is described micro-
CT image-forming module (5) further includes reflecting mirror (55), the reflecting mirror (55) be arranged in the scintillator (54) with it is described micro-
In visible light optical path between object lens (51).
3. multi-cascade distribution Micro CT imaging system as claimed in claim 2, which is characterized in that reach the reflecting mirror
(55) angle of incident light and reflected light is 90 degree.
4. multi-cascade distribution Micro CT imaging system as claimed in claim 3, which is characterized in that every level-one it is described micro-
The thickness of the reflecting mirror (55) of CT image-forming module (5) is identical.
5. multi-cascade distribution Micro CT imaging system according to any one of claims 1 to 4, which is characterized in that the 2nd to
The front surface of the scintillator (54) of the n grades of Micro CT imaging modules (5) is pasted with filter plate.
6. multi-cascade distribution Micro CT imaging system as claimed in claim 5, which is characterized in that the X-ray source (1)
Enlargement ratio for Microfocus X-ray cone-beam x-ray, the microcobjective (51) matches on the image detection face of the image camera (53)
Image magnification ratio so that being got on the image detection face of the image camera (53) of the Micro CT imaging module (5) at different levels
Image magnification ratio it is identical.
7. multi-cascade distribution Micro CT imaging system as claimed in claim 6, which is characterized in that the microcobjective (51)
For long reach microcobjective, the range of enlargement ratio is 2 times~50 times.
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| CN109031174A (en) * | 2018-07-26 | 2018-12-18 | 首都师范大学 | A kind of multi-cascade distribution Micro CT imaging system |
| CN109031174B (en) * | 2018-07-26 | 2024-02-09 | 首都师范大学 | Multi-cascade distributed micro CT imaging system |
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