CN1067763C - Soft X-ray spectrometer with large-area transmission grating - Google Patents
Soft X-ray spectrometer with large-area transmission grating Download PDFInfo
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- CN1067763C CN1067763C CN 98122013 CN98122013A CN1067763C CN 1067763 C CN1067763 C CN 1067763C CN 98122013 CN98122013 CN 98122013 CN 98122013 A CN98122013 A CN 98122013A CN 1067763 C CN1067763 C CN 1067763C
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Abstract
The present invention relates to a soft X-ray spectrometer with a large area transmission grating, which comprises a mechanical component and an optical element, wherein the mechanical component comprises a connection flange of a head engagement pipe, and the connection flange is tightly connected with a window of a vacuum target chamber; an engagement flange of the engagement pipe is engaged with a front engagement flange of an outer sleeve barrel; a support plate of which the head engagement flange is provided with an oblique pulling reinforcing rib provided with a suspended type guide rail is fixed in the outer sleeve barrel. The optical element orderly comprises a rectangular diaphragm, tire mirrors and a large area transmission grating without support along the advance direction of a soft X-ray bundle S, wherein the tire mirror are respectively arranged on five-dimensional adjusting frame on a guide rail and used as reflectors. The present invention has the advantages of simple structure, convenient adjustment, high resolution and spectral resolution reaching 0.05 nm.
Description
The present invention relates to a kind of transmission grating spectrometer, particularly a kind of high resolving power soft X-ray spectrometer with large-area transmission grating, this spectrometer mainly are applicable to the measurement of the emission characteristics of grenz ray wave band inner laser plasma.
The soft X-ray transmission grating spectrometer uses flexibly, adjust easy, in basic physics research and diagnosis, has certain advantage, be widely used in the measurement of all kinds of X sources, this from the general quantum optics of German horse and the experiment of unit such as Osaka, Japan university can see and (consult prior art: [1] R.Sigel, P.Pakula, S.Sakabe et al., X-ray generation in a cavity heated by 1.3-or 0.44-μ m laser light III comparison of theexperimental results with theoretical predications for X-ray confinement.Phys.Rev.A38 (11), 1988:5779-5785, and H.Nishimura, Y.Kato, H.Takabe et al., X-rayconfinement in a gold cavity heated by 351-nm laser light.Phys.Rev.A44,1991:8328-8333).Aspect the research of the diagnosis of laser plasma radiation temperature and X-radiation transport property, soft X-ray transmission grating is as dispersion element, be connected with time-resolved search receiner with aerial image, constitute crucial surveying instrument, can be easily from emission spectrum, obtain many information, as electron temperature and density, speed of expansion, state of ionization or the like about plasma.
Finish above-mentioned spectrum analysis, require the transmission grating spectrometer should be not only can be with higher spectrally resolved, and can measure (prior art: [2] M.M.Murnane with higher receiving efficiency accurately simultaneously, H.C.Kapteyn, and R.R.Falcone, High-density plasmas produced by ultrafast pulses.Phys.Rev.Lett.1989,62 (2): 155-158).Especially to superpower ultrashort titanium jewel (Ti:sappire) laser instrument (prior art: [3] Xu Zhizhan of terawatt (TW) level, femtosecond pulse, Lus.Vigroux, Fredocric, Zhou Jianping, Zhang Zhengquan, " the titanium-doped sapphire ultrashort pulse strong laser system of output 2TW/45fs. " Chinese science, 1997, A272:640-645) in the experimental study of this high power low-energy laser system and matter interaction, existing 1000g/mm pin hole transmission grating soft X-ray spectrometer can not satisfy above-mentioned requirements fully.Experiment and theoretical analysis all show have two principal elements to limit the measurement that above-mentioned prior art participates in careful X-ray emission spectrum.One is a 1000g/mm pin hole transmission grating structure as dispersion element, and its moire grids density is lower, causes spectrally resolved lower (being generally 0.2-0.4nm) of spectrometer.Its two, as the imageable element before the grating be not suitable for, the collection efficiency and the diffraction efficiency of spectrometer be lower, the X ray intensity on the receiving plane is also lower; So often need target practice exposure many times, could on receiving plane, accumulate enough X ray energy.Its three, place as the guide rail on the outer sleeve inwall of shell, slide easily, adjust inconvenient.
The soft X-ray spectrometer with large-area transmission grating that the purpose of this invention is to provide a kind of high resolving power, compact conformation, with deficiency such as spectrally resolved lower, the collection efficiency that overcomes above-mentioned prior art and diffraction efficiency be lower, increase the collection solid angle of spectrometer to laser plasma soft X-ray, improve the receiving efficiency of spectrometer, and realize the X ray point source is become the point image of no astigmatism; Improve the spectral resolution of spectrometer; Improve the accuracy of measurement data; To improve the work efficiency of spectrometer greatly in a word.
The structure of spectrometer of the present invention comprises mechanical component and optical element two large divisions: wherein mechanical component comprises head 1, back up pad 2, reinforcement 3, guide rail 4, outer sleeve 5 and place adjustment rack 9,10 on the guide rail 4, as shown in Figure 1, 2.Optical element comprises on the direction of advancing along the soft X ray beam S by soft X-ray source 11 emission, be equipped with diaphragm 13 successively, place the catoptron 6 on the adjustment rack 9, place the grating 7 on the adjustment rack 10, receiving device 8 and the display device 12 that links with the output of receiving device 8, as shown in Figure 3.
Catoptron 6 is core parts of spectrometer of the present invention, its collect in incident spectrometer X ray and with its imaging to receiving device 8.The present invention selects the catoptron 6 of tire mirror (being called toroidal mirror again) as imaging system for use, it can collect solid angle with bigger space, realization improves signal to noise ratio (S/N ratio) and the accuracy of taking the photograph the spectrum data, so be called the X-ray catoptron again to the no astigmatism imaging of soft X-ray source 11.The range of curvature radius of the meridian ellipse of the tire mirror that the present invention is fit to is 4000～7000mm, and width is 40～75mm, and the sagittal surface radius-of-curvature is 15～35mm, and width is 25～35mm.The adjustment rack 9 of putting catoptron 6 is five dimension adjustment racks, has the translation of three directions, the rotation of both direction to amount to the adjusting direction of five degree of freedom.
Grating 7 as dispersion element among the present invention adopts nothing to support large-area transmission grating, and the demand pairs scope of grating is 1000～5000g/mm.Because the spectral resolution of transmission grating is directly proportional with the demand pairs of grating, so when taking short wavelength's spectrum district,, can obtain the spectral resolution of bigger linear dispersion and Geng Gao than the 1000g/mm transmission grating of prior art.For the big collection solid angle with the catoptron 6 of tire mirror is complementary, grating physical dimension should greater than the size of the face of resembling (in the embodiment of the invention greater than 3 * 5mm) for good, grating as far as possible near the tire mirror on the face of resembling, to obtain higher spectrally resolved and linear dispersion preferably.The adjustment rack 10 of putting grating 7 has the rotation of the translation of three directions, both direction to amount to the quintuple space adjustment rack of the adjusting direction of five degree of freedom.
Receiving device 8 of the present invention is soft X-ray film or dry plate or extreme ultraviolet (XUV) photodiode or electron-multiplier or soft X-ray CCD camera or microchannel plate (MCP) or soft X-ray streak camera.
Advantage of the present invention is:
1. each mechanical component of the present invention and optical element all adopt and fixedly connected entirely and locate.Suspension type guide rail 4 makes guide rail not contact with spectrometer outer sleeve 5, directly be placed on than the prior art middle guide on the inwall of outer sleeve, suspended structure of the present invention has not only made things convenient for the adjusting of spectrometer, can guarantee in the course of the work that also adjusted each optical element that finishes can not change original position because of the guide rail slip of sleeve lining outside.After spectrometer is regulated and finished, again outer sleeve is fixed on head and is connected on the flange.Characteristics such as above-mentioned complete fixedly connected and suspension type guide rail structure not only can make things convenient for the adjusting of spectrometer, increase work efficiency, and can increase spectrometer take the photograph spectrality can stability, reduce the error of measurement data.
2. the present invention adopts the tire mirror to make the catoptron 6 of preposition light harvesting/imaging system, pin hole transmission grating structure in the prior art, and the collection solid angle of spectrometer of the present invention has improved four magnitudes, thereby has improved the collection efficiency of spectrometer greatly.The tire mirror matches with rectangular aperture 13, can realize the point-to-point no astigmatism imaging to soft X-ray source, improves the accuracy of taking the photograph the spectrum data.The use of tire mirror has also utilized big this advantage of the area of grating more fully.Implement proof, even practice shooting for single rifle of the low-yield femto-second laser pulse of 20mJ, the present invention also can take the photograph and obtain spectral line.Under the similarity condition, the 1000g/mm pin hole transmission grating spectrometer of prior art does not measure the result.As seen, the present invention is particularly suitable for participating in the measurement of the plasma that ultrashort femtosecond intense laser pulse produces.
3. the present invention adopts the nothing of 5000g/mm to support large-area transmission grating and makes the chromatic dispersion element, than prior art 1000g/mm pin hole transmission grating spectrometer, when taking short wavelength's spectrum district, can obtain the spectral resolution of bigger linear dispersion and Geng Gao.Theoretical and experiment proves that all the spectral resolution of this spectrometer can reach 0.05nm.
4. the comprehensive use of tire mirror and large-area transmission grating makes spectrometer of the present invention that flat imaging surface be arranged, and this is particularly advantageous in the electron type sensitive detection parts higher with resolution, is coupled as grenz ray CCD camera or grenz ray streak camera.
5. spectrometer of the present invention can adopt the attenuate type to throw light on soft X-ray CCD camera dorsad as receiving device 8, it has stable performance, easy to use, the response sensitivity advantages of higher, maximum detectable wavelength can extend to 50nm, for use has brought great dirigibility, has avoided loaded down with trivial details steps such as the development of the soft X-ray film of use in the prior art, photographic fixing, and, also can carry out the absolute calibration of soft X-ray source emission characteristics by the measurement data error of developing, the different time of photographic fixing causes.
Description of drawings
Fig. 1. the perspective exploded view of spectrometer mechanical component of the present invention.
Fig. 2. spectrometer mechanical component of the present invention overlook decomposing schematic representation.
Fig. 3. the light path synoptic diagram of spectrometer optical element of the present invention.
Fig. 4. adopt KODARK T-PAN dry plate to make receiving device 8 among the embodiment, the aluminium flat target that photographs is as the emission spectrum of soft X-ray source 11 in 0.6～15nm.
Fig. 5. adopt the attenuate type to throw light on soft X-ray CCD camera dorsad as receiving device 8 of the present invention among the embodiment, the aluminium flat target that photographs is as the emission spectrum of soft X-ray source 11 in 0.6～12nm.
Embodiment
As shown in Figure 3, soft X-ray source 11 is obtained by laser beam G irradiation surface aluminium target surface.Soft X ray beam S is through catoptron 6 catoptric imagings, and behind grating 7 diffraction, diffraction spectrum is received by receiving device 8.What receiving device 8 adopted among Fig. 3 is soft X-ray CCD camera, carries out data processing by microcomputer as display device 12.
The tire mirror that present embodiment adopts is as catoptron 6, and the width in meridian ellipse and sagittal surface is respectively 55mm and 30mm, and radius-of-curvature is respectively 5565mm and 24.43mm.Meridian ellipse and sagittal surface be respectively to soft X-ray source 11 imaging, select the tire mirror to the grazing angle of X ray be 86.2 ° so that meridian ellipse and sagittal surface imaging overlap.The rectangular aperture 13 that adds a 3 * 5mm at nearly soft X-ray source 11 1 ends of tire mirror perpendicular to optical axis improves picture element to keep off the veiling glare of tire mirror point afterbody, and keeps off the parasitic light without tire mirror reflection imaging, and therefore collecting solid angle is 7.45 * 10
-5Sterad.This value is 104 times that the prior art pin hole transmission grating (diameter 50 μ m) under the same layout is collected solid angle.Because the collection efficiency of spectrometer is directly proportional with collecting solid angle, as seen compares with prior art pin hole transmission grating spectrometer, the present invention has greatly improved collection efficiency.
Tire mirror reflection face is gold-plated in the present embodiment, and gold is that the refractive index of the X ray of 1.456nm is 0.99759 to wavelength, and the corresponding angle of total reflection is 86.0214 °, so the cutoff wavelength of this spectrometer is 1.4nm.In the measurement x light to the incident angle on tire mirror surface often greater than this value, so guaranteed that wavelength all can be by total reflection and imaging greater than the x light of 1.4nm.But find that in measurement more short wavelength's spectral line (0.5nm) still can be observed after reflection is damply arranged through the tire mirror, this has shown the high-level efficiency of spectrometer of the present invention from another side.
Adopt the nothing support large-area transmission grating of 5000g/mm to make chromatic dispersion element grating 7 in the present embodiment.Grating 7 physical dimension are 4 * 10.1mm, and grating 7 as far as possible close tire mirrors are to obtain bigger linear dispersion and spectral resolution on the face of resembling.Grating 7 is put 250mm place before soft X-ray CCD camera sensitive area.Linear dispersion is 0.8nm/mm on the receiving plane; The area that grating is illuminated by X-ray is 3 * 5mm.Therefore the use of tire mirror has also utilized the big advantage of receiving area of grating 7 more fully.In the present embodiment, the central axis O of head 1
1O
1Central axis O with outer sleeve 5
2O
2Between 10 ° of angle ∠ α ≌.
When adopting the KODARK T-PAN of Kodak dry plate to make receiving device 8, two double-frequency laser bundle G (wavelength 0.532 μ m at neodymium-doped yttrium-aluminum garnet (Nd:YAG) laser instrument of energy 20mJ, pulsewidth 6ns) aluminium flat target under the irradiation, the spectral emissions of soft X-ray source 11 in 0.6～15nm of the aluminium plane target surface that spectrometer photographs as shown in Figure 4.Show among the figure that spectrum has good symmetry and very high signal to noise ratio (S/N ratio).Anatomize data and find that the spectral resolution of spectrometer of the present invention reaches 0.05nm.
When adopting the attenuate type soft X-ray CCD camera that throws light on dorsad to make receiving element 8, survey the time integral behavior of soft X-ray emission, because this CCD camera properties is stable, easy to use, the response sensitivity height can be to use and brings great dirigibility.This CCD camera is 1024 * 1024 two-dimentional receiving devices, each pixel size is 20 * 20 μ m, the central part of CCD camera sensitive area that the zero level of spectrum always is adjusted to 2 * 2cm in the use is obtaining symmetrical spectrum record, and therefore maximum detectable wavelength is about 10nm.And then with sensitive area along the dispersion direction translation, maximum detectable wavelength can extend to 50nm.The data that soft X-ray CCD camera obtains are by handling as the microcomputer of display device 12 and obtaining a result.Under the aluminium target surface of the superpower ultrashort ti sapphire laser bundle G of energy 25mJ (wavelength 0.785 μ m, pulsewidth 45fs) irradiation, the spectral emissions of aluminium target surface in 0.6～12nm that spectrometer photographs as shown in Figure 5.Data analysis proves that soft X-ray CCD camera uses the grenz ray dry plate that higher sensitivity is arranged than prior art, can record more spectrum line; Also find simultaneously the spectral resolution≤0.05nm of spectrometer of the present invention.Thereby proved that the present invention can use grenz ray CCD camera as receiving device 8, is much improved the resolution of spectrometer and work efficiency.
Claims (3)
1. soft X-ray spectrometer with large-area transmission grating, comprise mechanical component and optical element two large divisions, mechanical component comprises head (1), guide rail (4), as the outer sleeve (5) of shell and adjustment rack (9), (10), optical element comprises catoptron (6), diaphragm (13), grating (7), receiving device (8) and display device (12), it is characterized in that concrete structure is:
＜1〉head of mechanical component (1) is by a connection tube (102), and front end has the flange (101) that connects airtight with vacuum target chamber window (14) vacuum and rear end and has and be connected flange (103) and constitute;
＜2〉be fixed with the back up pad (2) that band tiltedly draws reinforcement (3) on the linking flange (103) of above-mentioned head (1), underslung guide rail (4) is housed on the reinforcement (3), be equipped with adjustment rack (9), (10) that five dimensions are adjusted on the guide rail (4);
＜3〉head (1) rear end is central axis (O
2O
2) and head (1) central axis (O
1O
1) between the outer sleeve (5) of angle α≤10 ° is arranged, outer sleeve (5) is by cylindrical shell (502), and front end has and is connected preceding linking flange (501) and the rear end that flange (103) connects airtight with head (1) is that the back linking flange (503) that receiving device (8) is housed constitutes;
＜4〉optical element comprises on the soft X ray beam S working direction by soft X-ray source (11) emission, be equipped with rectangular aperture (13) successively, place the last tire mirror of adjustment rack (9) as catoptron (6), place the nothing on the adjustment rack (10) to support large-area transmission grating (7), receiving device (8) and the display device (12) that links with its output.
2. according to the soft X-ray spectrometer of claim 1, it is characterized in that the scope of the demand pairs of grating (7) is 1000～5000g/mm.
3. according to the soft X-ray spectrometer of claim 1, it is characterized in that the tire mirror as catoptron (6) is 4000～7000mm in the range of curvature radius of meridian ellipse, width is 40～75mm, and the sagittal surface radius-of-curvature is 15～35mm, and width is 25～35mm.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 98122013 CN1067763C (en) | 1998-11-19 | 1998-11-19 | Soft X-ray spectrometer with large-area transmission grating |
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| CN 98122013 CN1067763C (en) | 1998-11-19 | 1998-11-19 | Soft X-ray spectrometer with large-area transmission grating |
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| CN1214451A CN1214451A (en) | 1999-04-21 |
| CN1067763C true CN1067763C (en) | 2001-06-27 |
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| CN103760179B (en) * | 2014-01-22 | 2016-05-11 | 杭州一二八医院 | Cell micro imaging method, image processing method and imaging analysis system |
| CN104568833A (en) * | 2015-01-07 | 2015-04-29 | 北京大方科技有限责任公司 | Gas chamber structure, gas detection box and gas detection system |
| CN104865284A (en) * | 2015-04-03 | 2015-08-26 | 北京空间机电研究所 | Apparatus used for generating single-frequency low-energy soft X-ray beam |
| CN104932002A (en) * | 2015-04-03 | 2015-09-23 | 北京空间机电研究所 | X-ray detection system performance test system |
| CN107219589B (en) * | 2017-07-27 | 2019-08-23 | 田志鹏 | A kind of MEMS toroid micro mirror fiber-optical switch and its manufacturing method |
| CN107578971A (en) * | 2017-09-13 | 2018-01-12 | 北京京城环保股份有限公司 | A kind of launch window of x-ray source device |
| CN113433151A (en) * | 2021-06-07 | 2021-09-24 | 中国科学院上海光学精密机械研究所 | Multifunctional high-resolution transmission grating X-ray spectrometer |
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