CN113433151A - Multifunctional high-resolution transmission grating X-ray spectrometer - Google Patents
Multifunctional high-resolution transmission grating X-ray spectrometer Download PDFInfo
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- CN113433151A CN113433151A CN202110632692.1A CN202110632692A CN113433151A CN 113433151 A CN113433151 A CN 113433151A CN 202110632692 A CN202110632692 A CN 202110632692A CN 113433151 A CN113433151 A CN 113433151A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/223—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/07—Investigating materials by wave or particle radiation secondary emission
- G01N2223/076—X-ray fluorescence
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/10—Different kinds of radiation or particles
- G01N2223/101—Different kinds of radiation or particles electromagnetic radiation
- G01N2223/1016—X-ray
Abstract
A multifunctional high-resolution transmission grating X-ray spectrometer is characterized in that a front diaphragm assembly, a filter membrane assembly, an X-ray crystal collimation tube assembly, a multifunctional transmission grating assembly and a rear diaphragm assembly are sequentially arranged between a front flange and a rear flange of a vacuum chamber, and an X-ray CCD is arranged behind the rear diaphragm assembly. The wavelength range measured by the spectrometer is 1nm-1 μm (1.2eV-1.2keV), and the highest precision of the measured wavelength is 0.1 nm. The invention realizes multifunctional measurement by controlling the translation of the multifunctional transmission grating component, can measure the X-ray spectrum by using the transmission grating, can directly measure the space distribution of the X-ray, and can also place a sample on a sample table in the multifunctional transmission grating component to realize the measurement of the X-ray to the sample.
Description
Technical Field
The invention relates to an X-ray spectrometer, in particular to a multifunctional high-resolution transmission grating X-ray spectrometer.
Background
The X-ray crystal collimator assembly is utilized to limit the position and angle distribution of X-rays reaching the detector assembly after entering the spectrometer, the X-rays from a large divergence angle range of the ray source can be collected and focused to enter the transmission grating, the sample and the X-ray CCD, and other parts of rays are shielded and not collected, so that the interference of stray signals is reduced, and the emergent rays have extremely small spatial distribution. The collected rays can form a transmission grating spectrometer with the transmission grating assembly, can form a sample analyzer with the sample stage assembly, and can directly measure the spatial characteristics of the X-ray source after the transistor and other assemblies are removed.
X-rays are electromagnetic waves with very short wavelengths and high energy. The wavelength of X-rays is shorter than that of visible light (approximately between 0.001 and 100nm, while the wavelength of X-rays used in medicine is between 0.001 and 0.1 nm), with photon energy tens to hundreds of thousands times that of visible light. Due to its short wavelength and large energy, X-rays are only partially absorbed by the substance when they hit it and are mostly transmitted through the gaps between atoms, showing a strong penetration capacity. Its penetration capability is related to the wavelength of the X-rays and the density and thickness of the penetrated substance. The shorter the X-ray wavelength is, the greater the penetration rate is; the lower the density and the thinner the thickness, the easier the X-ray penetrates.
When the substance is irradiated by X-ray, high-energy particle beam, ultraviolet light, etc., because high-energy particles or photons collide with sample atoms, electrons in the inner layer of the atoms are ejected to form holes, so that the atoms are in an excited state, the ion life of the excited state is short, when outer layer electrons transit to inner layer holes, redundant energy is released in the form of X-ray, new holes are generated in the outer layer, new X-ray emission is generated, and thus a series of characteristic X-rays are generated. Different elements have different characteristic X-rays, and the existence of the elements can be judged according to the wavelength of the characteristic spectral line, namely qualitative analysis. And according to the intensity of the spectral line, quantitative analysis can be carried out.
The known grating spectrometer is composed of an incident pinhole (slit), a collimating lens, a diffraction grating, a focusing lens and a photoelectric conversion device. The light becomes divergent light with a pinhole (slit) as the center after passing through an incident pinhole (slit), the divergent light becomes parallel light after passing through a collimating mirror with the slit as a focal plane, the parallel light is diffracted by a diffraction grating to form light with different diffraction orders and different wavelengths on different diffraction angles, and the diffracted light is focused to a photoelectric conversion device through a focusing mirror to realize the recording and/or output of a spectrum.
The grating spectrometer commonly used at present is of a reflection type structure, namely, a two-sided concave reflecting mirror is used as a collimating mirror and a focusing mirror. The incident light and the reflected light of the concave reflector are on the same side of the concave reflector, so that the incident light and the reflected light must not be on the same axis to ensure that an incident light path and a reflected light path are not influenced mutually, and a formed non-coaxial optical system can generate severe aberration, so that the resolution of a spectrometer is reduced, and the sensitivity is reduced. The light with the same incident angle and any wavelength has the same reflection angle, so that the light-emitting diode is suitable for a wider application range of wavelength ranges. However, the reflective structure has no way of measuring the spatial distribution of the spot of X-ray radiation or of directly measuring the sample.
The transmission-type grating spectrometer adopts the lens as a collimating lens and a focusing lens in the grating spectrometer, and incident light and emergent light are distributed on two sides of the lens, so that the transmission-type grating spectrometer is suitable for building a common optical axis optical system and avoids generating serious aberration. The transmission type grating is convenient and adjustable, and the measurement of the X-ray spatial distribution can be realized if the grating is moved away. However, the existing transmission grating spectrometer has no focusing system, and the diffraction efficiency of the transmission structure is low, and if the X-ray signal is originally weak, the spectrum may not be measured when passing through the transmission grating. If the gap of the grating is enlarged to improve the transmittance, the resolution is lowered. The existing spectrometer cannot solve the contradiction.
Disclosure of Invention
The invention provides a multifunctional high-resolution transmission grating X-ray spectrometer, which solves the defects of low resolution and higher requirement on X-ray intensity of other transmission grating spectrometers at present by collimating and focusing X-rays through a crystal collimator and realizes multifunctional measurement through the translation control of a multifunctional transmission grating component: the transmission grating can be used for measuring the X-ray spectrum, the spatial distribution of the X-ray can be directly measured, and a sample can be placed on a sample table in the multifunctional transmission grating component to realize the measurement of the X-ray on the sample.
The technical solution of the invention is as follows:
a multifunctional high-resolution transmission grating X-ray spectrometer comprises a vacuum chamber consisting of a chamber wall and two ends provided with a front flange and a rear flange, a bread board is arranged at the bottom in the vacuum chamber, a front diaphragm assembly, a filter membrane assembly, an X-ray crystal collimation tube assembly, a multifunctional transmission grating assembly and a rear diaphragm assembly are sequentially arranged on the bread board from the front flange to the rear flange, a CCD is arranged behind the rear flange, and the multifunctional high-resolution transmission grating X-ray spectrometer is characterized in that,
the front diaphragm assembly consists of a base and a front diaphragm, the base is arranged on the bread board, and the diaphragm plane of the front diaphragm is vertical to the optical axis;
the filter membrane component consists of a base, 3 membrane holes, a connecting hole and a filter membrane control system with a motor, wherein the base is provided with the 3 membrane holes, the thickness of the filter membrane of the 3 membrane holes is respectively 0, 50 mu m and 100 mu m, the base is connected with the filter membrane control system with the motor through the connecting hole, the motor of the filter membrane control system controls the base to move in the left and right directions vertical to the optical axis, and the plane of the membrane hole is vertical to the optical axis;
the X-ray transistor collimator assembly consists of an X-ray transistor collimator, a clamping base and a collimator control system with a motor, wherein the clamping base is connected with the collimator control system with the motor, the motor of the collimator control system controls the clamping base to move left and right in the direction vertical to an optical axis, and the section of the output end of the X-ray transistor collimator is vertical to the optical axis;
the multifunctional energy-transmission grating component consists of a base, a large sample platform, a transmission grating group, a small sample platform and a multidimensional control system with a motor, wherein the base is connected with the multidimensional control system with the motor, the motor of the multidimensional control system controls the base to move up and down or left and right perpendicular to an optical axis, and the plane of the grating or the sample platform is perpendicular to the optical axis;
the rear diaphragm assembly consists of a base and a rear diaphragm, the base is fixed on the bread board, and the plane of the rear diaphragm is vertical to the optical axis;
the center of the plane of the front diaphragm, the center of the thin film hole, the center of the section of the output end of the X-ray crystal collimator, the center of the transmission grating group and the center of the rear diaphragm are equal in height and share the same optical axis;
3 motor control buttons are arranged on the side surface of the vacuum cavity and are respectively connected with the filter membrane control system, the collimator control system and the multi-dimensional control system of the multi-functional transmission grating; 2 observation windows are arranged above the vacuum cavity, and through the adjustment of a motor control button, X rays emitted by an X-ray source in front of the front flange can sequentially pass through the front flange, the center of the front diaphragm plane, the center of a thin film hole, the center of the section of the output end of the X-ray crystal collimator, the center of the transmission grating group, the center of the rear diaphragm plane and the rear flange to shoot to the CCD.
The parameters of the front diaphragm assembly are that the outer diameter of the diaphragm is 30mm, and the working diameter is 1 mm.
The size of the base of the filter membrane component is 80mm multiplied by 40mm multiplied by 2mm, 3 membrane holes are arranged on the base, the diameter of each membrane hole is 20mm, and the thickness of 3 filter membranes is 0, 50 mu m and 100 mu m in sequence.
The input end diameter of the X-ray crystal collimator is 20mm, the output end diameter is 0.5mm, and the length of the collimator is 50 mm.
The parameters of the multifunctional energy transmission grating component are as follows: the size of base is 30mm 60mm x 2mm the base on have transmission grating group, big sample platform, little sample platform, the size of transmission grating group be 20mm x 20mm, on have 24 little gratings (5 lines x 5 are listed as), except that the diameter of center round hole is 4mm, the size of every little grating is 2mm x 4mm, little grating scale mark has following specification: 500lpmm, 1000lpmm, 1500lpmm, 2000lpmm, 3000lpmm, 4000lpmm, 5000lpmm, 6000lpmm, 7000lpmm, 8000lpmm, 9000lpmm, 10000lpmm, the size of the large sample stage is 20mm × 10mm, and the size of the small sample stage is 15mm × 10 mm.
The outer diameter of the rear diaphragm is 30mm, and the working diameter is 1 mm.
The vacuum cavity is a stainless steel vacuum cavity, and the specifications of the front flange and the rear flange are both CF 100; the specification of the observation window flange is CF 63.
The multifunctional resolution transmission grating X-ray spectrometer of the invention is characterized in that:
1. high resolution: a purely transmissive grating is inefficient, and if the X-ray signal is inherently weak, the spectrum may not be measured through the transmissive grating. If the gap of the grating is enlarged to improve the transmittance, the resolution is lowered. The invention optimizes this: on the premise of not changing the grating gap, the X-ray crystal collimator is used for focusing the X-ray to improve the signal intensity, the resolution capability of the spectrometer under the condition of weak signals is improved, and the contradiction between the signal intensity and the resolution ratio is solved to a certain extent.
2. Anti-interference: the method comprises the steps of firstly utilizing a front diaphragm to limit beams for the first time, then utilizing filter membranes with different thicknesses to block other stray light, background light and the like, transmitting related X-ray signals, and utilizing an X-ray crystal collimator and a rear diaphragm to limit beams for the second time, so that only rays limited from a ray source and along a certain space direction enter a detector, and other parts of rays are shielded and cannot enter the detector, thereby reducing interference generated by scattering in other directions.
3. And (3) the versatility is as follows: the pure reflection spectrometer cannot measure the spatial distribution of X-rays, and the pure transmission spectrometer cannot simultaneously measure samples, so that the invention optimizes the following steps: under the vacuum condition, need not to carry out the operation of opening the chamber, when needs measurement X ray spectrum, can switch to transmission grating with multi-functional energy transmission grating subassembly, when needs test sample, can switch to sample platform with multi-functional energy transmission grating subassembly, when the spatial distribution of needs measurement X ray, can push out the light path with multi-functional energy transmission grating subassembly and other interference components.
Drawings
FIG. 1 is an internal three-dimensional display of a multi-functional high-resolution transmission grating X-ray spectrometer.
FIG. 2 is a side sectional view of a multi-functional high resolution transmission grating X-ray spectrometer.
FIG. 3 is a front view of the filter membrane module without the filter membrane control system.
FIG. 4 is a schematic diagram (side cross-sectional and front view) of an X-ray transistor collimator assembly without a collimator control system.
FIG. 5 is a schematic view of a multi-function energy transmissive grating assembly (front view, without the multi-dimensional control system).
Detailed Description
The present invention will be further described with reference to the following examples and drawings, but the scope of the present invention should not be limited thereto.
Referring to fig. 1 and 2, fig. 1 and 2 are schematic diagrams of a multifunctional high-resolution transmission grating X-ray spectrometer according to the present invention. It can be seen from the figure that the multi-functional high-resolution transmission grating X-ray spectrometer of the invention comprises a vacuum chamber 7 consisting of a chamber wall and two ends provided with a front flange 7-1 and a rear flange 7-2, a bread board 7-3 is arranged on the inner bottom of the vacuum chamber 7, a front diaphragm assembly 2, a filter membrane assembly 3, an X-ray crystal collimation tube assembly 4, a multi-functional transmission grating assembly 5 and a rear diaphragm assembly 6 are sequentially arranged on the bread board 7-3 from the front flange 7-1 to the rear flange 7-2, a CCD8 is arranged behind the rear flange 7-2,
the front diaphragm assembly 2 consists of a base 2-1 and a front diaphragm 2-2, the base 2-1 is arranged on the bread board 7-3, and the diaphragm plane of the front diaphragm 2-2 is vertical to the optical axis;
the filter membrane component 3 consists of a base 3-1, 3 membrane holes 3-2, a connecting hole 3-3 and a filter membrane control system 3-4 with a motor, the base 3-1 is provided with 3 membrane holes 3-2, the thickness of the filter membrane of the 3 membrane holes 3-2 is 0, 50 mu m and 100 mu m in sequence, the base 3-1 is connected with the filter membrane control system 3-4 with the motor through the connecting hole 3-3, the motor of the filter membrane control system 3-4 controls the base 3-1 to move in the left-right direction vertical to the optical axis, and the plane of the membrane holes 3-2 is vertical to the optical axis;
the X-ray crystal collimator assembly 4 consists of an X-ray crystal collimator 4-1, a clamping base 4-2 and a collimator control system 4-3 with a motor, wherein the clamping base 4-2 is connected with the collimator control system 4-3 with the motor, the motor of the collimator control system 4-3 controls the collimator to move left and right in the direction vertical to an optical axis, and the section of the output end of the X-ray crystal collimator 4-1 is vertical to the optical axis;
the multifunctional energy transmission grating component 5 consists of a base 5-1, a large sample stage 5-2, a transmission grating group 5-3, a small sample stage 5-4 and a multidimensional control system with a motor 5-5, wherein the base 5-1 is connected with the multidimensional control system with the motor 5-5, the motor of the multidimensional control system 5-5 controls the base 5-1 to move up and down or left and right vertical to the optical axis, and the plane of the grating or the sample stage is vertical to the optical axis;
the rear diaphragm assembly 6 consists of a base 6-1 and a rear diaphragm 6-2, the base 6-1 is fixed on the bread board 7-3, and the plane of the rear diaphragm 6-2 is vertical to the optical axis;
the center of the plane of the front diaphragm 2-2, the center of the thin film hole 3-2, the center of the section of the output end of the X-ray crystal collimator 4-1, the center of the transmission grating group 5 and the center of the rear diaphragm 6-2 are equal in height and coaxial;
3 motor control buttons are arranged on the side surface of the vacuum cavity and are respectively connected with the filter membrane control system 3-4, the collimator control system 4-3 and the multi-dimensional control system 5-5 of the multi-functional transmission grating; 2 observation windows are arranged above the vacuum cavity, and through the adjustment of a motor control button, X-rays 1 emitted by an X-ray source in front of the front flange 7-1 can sequentially pass through the front flange 7-1, the center of the plane of the front diaphragm 2-2, the center of the thin film hole 3-2, the center of the section of the output end of the X-ray crystal collimator 4-1, the center of the transmission grating group 5-3, the center of the plane of the rear diaphragm 6-2 and the rear flange 7-2 to be emitted to the CCD 8.
The parameters of the front diaphragm assembly are that the outer diameter of the diaphragm 2-2 is 30mm, and the working diameter is 1 mm.
The size of a base 3-1 of the filter membrane component 3 is 80mm multiplied by 40mm multiplied by 2mm, 3 thin membrane holes 3-2 are arranged on the base 3-1, the diameter of each thin membrane hole 3-2 is 20mm, and the thickness of 3 filter membranes is 0, 50 mu m and 100 mu m in sequence.
The diameter of the input end of the X-ray crystal collimator 4-1 is 20mm, the diameter of the output end of the X-ray crystal collimator is 0.5mm, and the length of the X-ray crystal collimator is 50 mm.
The parameters of the multi-functional energy transmission grating component 5 are as follows: the size of base 5-1 is 30mm x 60mm x 2mm, there are transmission grating group 5-2 on base 5-1, big sample platform 5-3, little sample platform 5-4, the size of transmission grating group 5-2 be 20mm x 20mm, go up and have 24 little gratings (5 lines x 5 rows), except that the diameter of central round hole is 4mm, the size of every little grating is 2mm x 4mm, little grating scale mark has following specification: 500lpmm, 1000lpmm, 1500lpmm, 2000lpmm, 3000lpmm, 4000lpmm, 5000lpmm, 6000lpmm, 7000lpmm, 8000lpmm, 9000lpmm, 10000lpmm, the large sample stage 5-3 having a size of 20mm × 10mm, and the small sample stage 5-4 having a size of 15mm × 10 mm.
The outer diameter of the rear diaphragm 6-2 is 30mm, and the working diameter is 1 mm.
The vacuum cavity is a stainless steel vacuum cavity, and the specifications of the front flange 7-1 and the rear flange 7-2 are both CF 100; the specification of the observation window flange is CF 63.
FIG. 3 is a schematic view of a filter membrane module, which mainly comprises a base 3-1, filter membrane holes 3-2 and connecting holes 3-3; FIG. 4 is a schematic diagram of an X-ray transistor collimator assembly, which mainly includes an X-ray transistor collimator 4-1 and a clamping base 4-2; FIG. 5 is a schematic diagram of a multi-wavelength transmissive grating assembly. The multifunctional transmission grating component mainly comprises a base 5-1, a large sample stage 5-2, a transmission grating group 5-3 and a small sample stage 5-4.
In this embodiment, the parameters of the front diaphragm assembly are that the outer diameter of the diaphragm is 30mm, the working diameter is 1mm, the base of the front diaphragm assembly is fixed on the bread board, the plane of the diaphragm is vertical to the optical axis, and the center of the diaphragm is equal to and coaxial with the optical axis.
The filter membrane component parameters are that the size of the base is 80mm multiplied by 40mm multiplied by 2mm, 3 thin membrane holes are formed in the base, the diameter of each thin membrane hole is 20mm, the thickness of each filter membrane is 0, 50 microns and 100 microns in sequence, the thin membranes are fixed on the thin membrane holes through screws, the base is connected with the filter membrane control system through screws through connecting holes, the filter membrane control system controls the filter membrane control system to move left and right in the direction vertical to an optical axis so as to adjust the thickness of the thin membranes, the component can also be pushed into or pushed out of the optical path, the plane of each thin membrane hole is vertical to the optical axis, and the center of the thin membrane hole is coaxial with the optical axis at the same height.
The X-ray crystal collimator assembly is characterized in that the parameters of the X-ray crystal collimator assembly are that the diameter of the input end of the X-ray crystal collimator is 20mm, the diameter of the output end of the X-ray crystal collimator assembly is 0.5mm, the length of the collimator is 50mm, the clamping base is connected with the collimator control system through screws, the collimator control system controls the X-ray crystal collimator control system to move left and right in the direction perpendicular to the optical axis to push the X-ray crystal collimator assembly into or push the X-ray crystal collimator assembly out of the optical path, the cross section of the output end of the X-ray crystal collimator is perpendicular to the optical axis, and the center of the X-ray crystal collimator assembly is coaxial with the optical axis at the same height.
The size that multi-functional ability transmission grating subassembly parameter be the base be 30mm 60mm x 2mm, on have transmission grating, big sample platform, little sample platform 2, the size of transmission grating group is 20mm x 20mm, on have 24 little gratings (5 lines x 5 are listed as), except that the central round hole size is diameter 4mm, every size is 2mm x 4mm, little grating scale mark has following specification: 500lpmm, 1000lpmm, 1500lpmm, 2000lpmm, 3000lpmm, 4000lpmm, 5000lpmm, 6000lpmm, 7000lpmm, 8000lpmm, 9000lpmm, 10000lpmm, the size of the sample stage 1 is 20mm x 10mm, the size of the sample stage 2 is 15mm x 10mm, the base is connected with the multidimensional control system through screws, the multidimensional control system controls the vertical optical axis direction to move up and down or left and right to adjust the grating scale or switch the grating to the sample stage, the component can also be pushed into or out of the optical path, the plane of the grating or the sample stage is vertical to the optical axis, and the center is coaxial with the optical axis.
The rear diaphragm assembly has the parameters that the outer diameter of the diaphragm is 30mm, the working diameter is 1mm, the base of the rear diaphragm assembly is fixed on the bread board, the plane of the diaphragm is vertical to the optical axis, and the center of the diaphragm is equal to and coaxial with the optical axis.
The working process of the embodiment:
1) switching the filter membrane assembly to a filter membrane with a proper thickness by the filter membrane control system 3-4 with a motor, and switching the multifunctional energy transmission grating assembly 5 to a proper transmission grating 5-3 by the multifunctional energy transmission grating assembly control system 5-5 with a motor: x-rays enter the spectrometer through the front flange 7-1, firstly pass through the front diaphragm 2-2 for limiting beams, then pass through the filter membrane 3-2 for blocking other stray light and background light, then are focused through the X-ray crystal collimator 4-1 and are emitted to the transmission grating 5-3, X-ray signals can still be measured due to the focusing of the X-ray crystal collimator 4-1, the gap of the transmission grating is unchanged, the phase change improves the resolution ratio of the transmission grating, then the limiting beams passing through the rear diaphragm 6-2 are emitted to the rear flange 7-2, and at the moment, the spectrum of the X-rays can be measured by using the CCD 8.
2) The filter membrane component is switched to a filter membrane with proper thickness by the filter membrane control system 3-4 with a motor, and the multifunctional energy transmission grating component 5 is switched to a sample stage by the multidimensional control system 5-5 with a motor: x-rays enter the spectrometer through the front flange 7-1, firstly pass through the front diaphragm 2-2 to limit beams, then pass through the filter membrane 3-2 to block other stray light and background light, are focused through the X-ray crystal collimator 4-1 and are emitted to the sample stage, then pass through the rear diaphragm 6-2 to limit beams and are emitted to the rear flange 7-2, and at the moment, fluorescence generated by a sample is measured by utilizing the CCD8 to test the sample.
3) The filter membrane component 3, the X-ray crystal collimator component 4 and the multifunctional transmission grating component 5 are pushed out of a light path by the filter membrane control system with a motor 3-4, the collimator control system with a motor 4-3 and the multidimensional control system with a motor 5-5: x-rays enter the spectrometer through the front flange 7-1, are emitted to the rear flange 7-2 through the beam limiting of the front diaphragm 2-2 and the rear diaphragm 6-2, and the spatial distribution of the X-rays can be measured by using the CCD 8.
Experiments show that the invention solves the defects of low resolution and high requirement on X-ray intensity of other transmission grating spectrometers at present by collimating and focusing the X-ray by the crystal collimator, and realizes multifunctional measurement by the translation control of the multifunctional transmission grating assembly: the transmission grating can be used for measuring the X-ray spectrum, the spatial distribution of the X-ray can be directly measured, and a sample can be placed on a sample table in the multifunctional transmission grating component to realize the measurement of the X-ray on the sample.
Claims (7)
1. A multifunctional high-resolution transmission grating X-ray spectrometer comprises a vacuum chamber (7) consisting of a chamber wall and a front flange (7-1) and a rear flange (7-2) arranged at two ends of the chamber wall, a bread board (7-3) is arranged at the inner bottom of the vacuum chamber (7), a front diaphragm assembly (2), a filter membrane assembly (3), an X-ray crystal collimator assembly (4), a multifunctional transmission grating assembly (5) and a rear diaphragm assembly (6) are sequentially arranged on the bread board (7-3) from the front flange (7-1) to the rear flange (7-2), and a CCD (8) is arranged behind the rear flange (7-2),
the front diaphragm assembly (2) is composed of a base (2-1) and a front diaphragm (2-2), the base (2-1) is arranged on the bread board (7-3), and the diaphragm plane of the front diaphragm (2-2) is vertical to the optical axis;
the filter membrane component (3) is composed of a base (3-1), 3 membrane holes (3-2), a connecting hole (3-3) and a filter membrane control system (3-4) with a motor, the base (3-1) is provided with the 3 membrane holes (3-2), the thickness of the filter membrane of the 3 membrane holes (3-2) is 0, 50 mu m and 100 mu m in sequence, the base (3-1) is connected with the filter membrane control system (3-4) with the motor through the connecting hole (3-3), the motor of the filter membrane control system (3-4) controls the base (3-1) to move in the left-right direction perpendicular to the optical axis, and the plane of the membrane holes (3-2) is perpendicular to the optical axis;
the X-ray transistor collimator assembly (4) consists of an X-ray transistor collimator (4-1), a clamping base (4-2) and a collimator control system (4-3) with a motor, wherein the clamping base (4-2) is connected with the collimator control system (4-3) with the motor, the motor of the collimator control system (4-3) controls the collimator control system to move left and right in the direction vertical to an optical axis, and the section of the output end of the X-ray transistor collimator (4-1) is vertical to the optical axis;
the multifunctional energy transmission grating component (5) consists of a base (5-1), a sample table 1(5-2), a transmission grating group (5-3), a sample table 2(5-4) and a multidimensional control system (5-5) with a motor, wherein the base (5-1) is connected with the multidimensional control system (5-5) with the motor, the motor of the multidimensional control system (5-5) controls the base (5-1) to move up and down or left and right vertical to the optical axis, and the plane of the grating or the sample table is vertical to the optical axis;
the rear diaphragm assembly (6) consists of a base (6-1) and a rear diaphragm (6-2), the base (6-1) is fixed on an inner panel (7-3) of the vacuum chamber (7), and the plane of the rear diaphragm (6-2) is vertical to the optical axis;
the center of the plane of the front diaphragm (2-2), the center of the thin film hole (3-2), the center of the section of the output end of the X-ray crystal collimator (4-1), the center of the transmission grating group (5) and the center of the rear diaphragm (6-2) are all equal in height and share an optical axis;
3 motor control buttons are arranged on the side surface of the vacuum cavity and are respectively connected with the filter membrane control system (3-4), the collimator control system (4-3) and the multi-dimensional control system (5-5) of the multi-functional transmission grating; 2 observation windows are arranged above the vacuum cavity, and through the adjustment of a motor control button, X rays (1) emitted by an X-ray source in front of the front flange (7-1) can sequentially pass through the front flange (7-1), the center of the plane of the front diaphragm (2-2), the center of the thin film hole (3-2), the center of the section of the output end of the X-ray crystal collimator (4-1), the center of the transmission grating group (5-3), the center of the plane of the rear diaphragm (6-2) and the rear flange (7-2) to shoot to the CCD (8).
2. The multi-functional high resolution transmission grating X-ray spectrometer according to claim 1, characterized in that the front diaphragm assembly parameters are 30mm outside diameter of the diaphragm (2-2) and 1mm working diameter.
3. The multi-functional high analysis transmission grating X-ray spectrometer according to claim 1, characterized in that the base (3-1) of the filter membrane module (3) has a size of 80mm X40 mm X2 mm, the base (3-1) has 3 membrane holes (3-2), each membrane hole (3-2) has a diameter of 20mm, and the thickness of 3 filter membranes is 0, 50 μm, 100 μm in sequence.
4. The multi-functional high analysis transmission grating X-ray spectrometer according to claim 1, characterized in that the input end of the X-ray crystal collimator (4-1) has a diameter of 20mm, the output end has a diameter of 0.5mm, and the collimator has a length of 50 mm.
5. The multi-functional high analysis transmission grating X-ray spectrometer according to claim 1, characterized in that the parameters of the multi-functional transmission grating assembly (5) are: the size of base (5-1) is 30mm x 60mm x 2mm base (5-1) on have transmission grating group (5-2), big sample platform (5-3), little sample platform (5-4), transmission grating group (5-2) the size be 20mm x 20mm, go up and have 24 little gratings (5 lines x 5 rows), except that the diameter of central round hole is 4mm, the size of every little grating is 2mm x 4mm, little grating scale mark has following specification: 500lpmm, 1000lpmm, 1500lpmm, 2000lpmm, 3000lpmm, 4000lpmm, 5000lpmm, 6000lpmm, 7000lpmm, 8000lpmm, 9000lpmm, 10000lpmm, the size of the large sample stage (5-3) is 20mm × 10mm, and the size of the small sample stage (5-4) is 15mm × 10 mm.
6. The multi-functional high resolution transmission grating X-ray spectrometer according to claim 1, characterized in that the back diaphragm (6-2) has an outer diameter of 30mm and a working diameter of 1 mm.
7. The multifunctional high-resolution transmission grating X-ray spectrometer according to any one of claims 1 to 6, characterized in that the vacuum chamber is a stainless steel vacuum chamber, and the specifications of the front flange (7-1) and the rear flange (7-2) are both CF 100; the specification of the observation window flange is CF 63.
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