CN111323440A - X-ray diffraction diagnostic system - Google Patents
X-ray diffraction diagnostic system Download PDFInfo
- Publication number
- CN111323440A CN111323440A CN202010271639.9A CN202010271639A CN111323440A CN 111323440 A CN111323440 A CN 111323440A CN 202010271639 A CN202010271639 A CN 202010271639A CN 111323440 A CN111323440 A CN 111323440A
- Authority
- CN
- China
- Prior art keywords
- ray diffraction
- light source
- cavity
- diagnostic system
- crystal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
- G01N23/20008—Constructional details of analysers, e.g. characterised by X-ray source, detector or optical system; Accessories therefor; Preparing specimens therefor
- G01N23/20016—Goniometers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/05—Investigating materials by wave or particle radiation by diffraction, scatter or reflection
- G01N2223/056—Investigating materials by wave or particle radiation by diffraction, scatter or reflection diffraction
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/10—Different kinds of radiation or particles
- G01N2223/101—Different kinds of radiation or particles electromagnetic radiation
- G01N2223/1016—X-ray
Abstract
The invention provides an X-ray diffraction diagnosis system, which comprises a light source, an aiming joint, a cavity, a diaphragm, a variable cone crystal, recording equipment and an optical window, wherein the light source is arranged on the cavity; the center of the light source is on the same straight line with the center of the diaphragm and the center of the variable cone crystal, the surface of the variable cone crystal is vertical to the recording surface of the recording device, and the axis of the aiming joint is on the same straight line with the center of the light source. The invention can realize the X-ray diffraction diagnosis with high efficiency and high precision, and the system is convenient for the diagnosis design and arrangement of the target chamber. Therefore, the invention can realize high-efficiency X-ray diffraction diagnosis, is not limited by complex application scenes, and has wide and important application prospect.
Description
Technical Field
The invention belongs to the field of X-ray diagnosis, and particularly relates to an X-ray diffraction diagnosis system.
Background
In the relevant fields of inertial confinement fusion, high energy density physics, celestial body physics and the like, X-ray spectral emission is generated by interaction of laser and substances. The X-ray spectral emission comprises various physical processes such as excitation, de-excitation, recombination and the like caused by respective interaction between electrons and ions, between electrons and between ions. Through high-energy spectrum resolution measurement of physical processes such as plasma emission, X-ray pump fluorescence, X-ray Thomson scattering and the like, the relation between related line spectrum wavelength (energy) and intensity, characteristic line characteristics, line spectrum intensity ratio, line spectrum broadening, line spectrum movement and the like of the plasma can be obtained, and material state parameters such as electron temperature, electron density, ionization degree, ionization distribution and the like of the plasma are further obtained. The X-ray spectrum diffraction diagnosis is a crucial link in the relevant experimental research.
The existing X-ray spectrum diffraction diagnosis systems, such as a plane crystal spectrometer, a plane focal field grating spectrometer and the like, have the following defects: 1. the diagnosis efficiency is low, the existing diagnosis equipment basically adopts light splitting elements such as plane crystals and cylindrical crystals, the diffraction efficiency of the crystals is low, and the system diagnosis efficiency is low. 2. The diagnosis precision is low, in the tests of implosion mixing in inertial confinement fusion, X-ray Thomson scattering, EXAFS in basic physical research and substance state analysis after shock wave, the emitted X-ray spectral intensity is generally low, and due to the self limitation of the diagnosis system, the measured diffraction signal is weak, the signal-to-noise ratio is poor, so that the diagnosis result precision is low, and the requirements of the test research cannot be met; 3. the existing diagnosis system needs a larger recording surface, which brings much inconvenience to the design and arrangement of the diagnosis experiment and also causes the waste of resources.
Disclosure of Invention
In view of the above, the present invention provides an efficient and highly accurate X-ray diffraction diagnostic system.
In order to achieve the purpose, the invention adopts the following technical scheme: an X-ray diffraction diagnosis system is characterized by comprising a light source, an aiming joint, a cavity, a diaphragm, a tapered crystal, recording equipment and an optical window; the light window is arranged on the side face of one end of the cavity close to the diaphragm; the light source is arranged outside the cavity close to one side of the light window; the aiming joint is fixedly connected with the cavity outside the cavity; the diaphragm, the variable cone crystal and the recording device are sequentially arranged in the cavity.
Preferably, the recording surface of the recording device is perpendicular to the tapered crystal surface.
Preferably, the center of the light source is in a straight line with the center of the diaphragm and the center of the tapered crystal, and the axis of the sighting telescope is in a straight line with the center of the light source
Preferably, the light source is a planar target light source emitting line spectrum.
Preferably, the wavelength of the X-ray generated by the light source and the lattice constant of the tapered crystal satisfy the Bragg diffraction relation, and the tapered crystal adopts SiO2A material.
Preferably, the display mode of the aiming section is light source image digital online display and is provided with an automatic light blocking sheet.
Preferably, the aperture width of the diaphragm is less than 20 microns.
Preferably, the recording equipment adopts online recording equipment based on a large-area array CMOS.
Preferably, the cavity is made of aluminum material and is subjected to oxidation treatment.
The invention has the beneficial effects that: 1. in the invention, all spectral lines projected on the crystal are focused, and the spectral line collection efficiency is improved, thereby realizing high-efficiency and high-precision X-ray diffraction diagnosis; 2. the X-ray spectrums of a plurality of energy points are focused on the straight line position vertical to the central axis of the crystal, so that the whole light path of the system can be kept in the direction of the central axis, the spectrometer structure is linearly arranged, the size of the spectrometer is reduced, the diagnosis design and arrangement of a target chamber are greatly facilitated, and the efficient detection can be realized by ensuring a small recording surface.
Drawings
FIG. 1 is a schematic diagram of a high efficiency X-ray diffraction system of the present invention;
in the figure, 1, a light source 2, an aiming joint 3, a cavity 4, a diaphragm 5, a variable cone crystal 6, a recording device 7 and an optical window.
Detailed Description
The invention is described in detail below with reference to the figures and specific embodiments.
Fig. 1 is a schematic diagram of an X-ray diffraction diagnostic system of the present invention, and in fig. 1, the X-ray diffraction diagnostic system includes a light source 1, an aiming joint 2, a cavity 3, a diaphragm 4, a tapered crystal 5, a recording device 6 and an optical window 7; the light window 7 is arranged on the side face of one end, close to the diaphragm, of the cavity, so that light rays can enter the cavity conveniently, and the light source 1 is arranged outside the cavity 3 on one side close to the light window 7; the aiming joint 2 is fixedly connected with the cavity 3 outside the cavity 3; the diaphragm 4, the variable cone crystal 5 and the recording device 6 are sequentially arranged in the cavity.
The center of the light source 1, the center of the diaphragm 4 and the center of the tapered crystal 5 are on the same straight line, and the axis of the aiming joint 2 and the center of the light source 1 are on the same straight line
The aiming joint 2 fixedly connected to the outside of the cavity 3 determines the reference of the X-ray diffraction system, and the cavity is used for shielding stray light and fragments generated by target shooting; the X-ray emitted by the light source 1 passes through the light window 7 and then enters the surface of the tapered crystal 5 through the adjustable diaphragm 4 in an open state, and then the X-ray is diffracted on the surface of the tapered crystal 5 and is reflected out at the same angle as the incident angle: the reflected X-rays are incident on the surface of the recording device 6, causing the corresponding electronic components to respond, forming a digital signal.
The light source 1 is a planar target light source emitting common line spectrum in the research of laser plasma interaction.
The aiming joint 2 adopts a mode of digital online display of light source images, is convenient for real-time aiming, adjustment and resetting of the whole system, is provided with an automatic light blocking sheet and can protect an aiming joint lens and a CCD.
The cavity 3 is made of aluminum material and is subjected to anti-oxidation treatment.
The diaphragm 4 is prepared by adopting a tantalum sheet with the thickness of 20 microns, and the width of a limiting hole of the diaphragm is less than 20 microns.
The tapered crystal 5 adopts SiO2A material having a lattice constant 2d of 0.4246nm, wherein the X-ray generated by the light source 1 and the lattice constant thereof satisfy a bragg diffraction relationship.
The recording device 6 adopts an online recording device based on a large-area array CMOS, and the recording surface of the recording device 6 is perpendicular to the crystal surface of the tapered surface crystal 5, so that high-efficiency diffraction is obtained.
In the invention, the tapered crystal can focus X-ray spectrums of a plurality of energy points on the central axis of the tapered crystal, all spectral lines projected on the tapered crystal can be focused, the spectral line collection efficiency is high, and the diffraction efficiency can be improved without reducing the spectrum resolution. The X-ray diffraction system based on the variable cone surface can obtain X-ray spectrum signals with the intensity several orders of magnitude higher than that of the existing planar crystal system, and the diagnosis accuracy and the application range are greatly improved. On the basis of having the wide spectrum range of the variable cone crystal, strong focusing energy, high spectral resolution characteristics, can focus the X ray spectrum of a plurality of energy points in the straight line position perpendicular with crystal central axis, make the detection light path of recording equipment unanimous with the detection light path of conical surface, can make the whole light path of detecting the spectrometer keep in the central axis direction, the spectrometer structure is sharp overall arrangement, has reduced the spectrometer size, has greatly made things convenient for target chamber diagnostic design and arrangement.
Example 1
The invention is successfully applied to the Shenguang III prototype large-scale laser device. In the embodiment, the light source is an X-ray source generated by hitting a titanium plane target with laser, the laser intensity is 500J, the size of a focal spot is 200 micrometers, the size of the titanium plane target is 1500X 1500 micrometers, the thickness of the titanium plane target is 50 micrometers, and the generated titanium H-like line spectrums and the generated titanium He-like line spectrums are respectively 4.97keV and 4.75 keV; the aiming joint is provided with an automatic light blocking sheet, so that the protection functions of a lens and a CCD can be realized; the cavity size was 40 × 20 × 10 cm, and the side and top aluminum material thickness was 0.5 cm; the limiting aperture diaphragm isA tantalum sheet with a thickness of 20 microns, and a limiting hole width of less than 20 microns; the variable cone crystal adopts SiO2The material has a lattice constant 2d of 0.4246nm and a curvature radius of 9.4-12.4 cm; the recording equipment is a large-area array CMOS (complementary Metal oxide semiconductor), the size is 5 x 10 cm, and the online recording function is realized.
Firstly, off-line calibration (refer to fig. 1), installing a diaphragm 4, a tapered crystal 5, a recording device 6, a sighting node 2 and the like at corresponding positions under an off-line condition, carrying out light path simulation and collimation off-line, recording the relative positions of a target and a diagnostic device by adopting a simulation target, and storing the relative positions in a sighting node 2 system; then, on-line aiming is carried out, the X-ray diffraction detection system is arranged in an experimental light path, and collimation and calibration are carried out with a targeting system by utilizing the light source coordinate position recorded in an off-line aiming discussion process, so that the light source 1 is positioned at the position of an initial simulated target pellet; recording signals, and recording time-integrated X-ray diffraction signals by adopting a large-area array online CMOS recording device 6; and finally, data processing, namely, according to the relation between the spectral wavelength and the distance, combining a Fresnel formula to calibrate the wavelength position to obtain the H-like and He-like line spectral distribution information of the titanium.
This example achieves an improvement in the H-like and He-like line spectral diffraction intensity of titanium. For a H-like spectrum, a recording signal of the planar crystal X-ray diffraction system is 400, a recording signal of the X-ray diffraction diagnosis system reaches 50800, and compared with the planar crystal X-ray diffraction system, the signal of the X-ray diffraction system is enhanced by 127 times, and meanwhile, the high spectral resolution capability (the spectral resolution reaches 600) can be kept.
Example 2
This example has the same structure as example 1 except that the laboratory site is an X-ray diffraction laboratory, the light source 1 is a titanium X-ray tube, the applied voltage is 20kV, the generated titanium line spectra are K α and K β line spectra, the energy points are 4.511keV and 4.933keV respectively, and the energy points are obtained by using the same SiO2Compared with a planar crystal diffraction signal of the material, the intensity of the variable cone crystal diffraction signal is obviously improved, and the actual diffraction efficiency is improved by about 200 times in consideration of the effective light receiving area of the curved crystal.
It will be appreciated by those of ordinary skill in the art that the embodiments described herein are intended to assist the reader in understanding the principles of the invention and are to be construed as being without limitation to such specifically recited embodiments and examples. Those skilled in the art can make various other specific changes and combinations based on the teachings of the present invention without departing from the spirit of the invention, and these changes and combinations are within the scope of the invention.
Claims (10)
1. An X-ray diffraction diagnosis system is characterized by comprising a light source (1), an aiming joint (2), a cavity (3), a diaphragm (4), a tapered crystal (5), a recording device (6) and an optical window (7); the optical window (7) is arranged on the side face of one end, close to the diaphragm (4), of the cavity; the light source (1) is arranged outside the cavity (3) close to one side of the light window (7); the aiming joint (2) is fixedly connected with the cavity (3) outside the cavity (3); the diaphragm (4), the variable cone crystal (5) and the recording device (6) are sequentially arranged in the cavity.
2. The X-ray diffraction diagnostic system as claimed in claim 1, wherein the recording surface of the recording device (6) is perpendicular to the tapered crystal (5) surface.
3. The X-ray diffraction diagnostic system as claimed in claim 1, wherein the center of the light source (1) is aligned with the center of the diaphragm (4) and the center of the tapered crystal (5), and the axis of the aiming joint (2) is aligned with the center of the light source (1).
4. The X-ray diffraction diagnostic system according to claim 1, wherein the light source (1) is a planar target light source emitting in a line spectrum.
5. The X-ray diffraction diagnostic system according to claim 1, wherein the wavelength of the X-ray generated by the light source (1) and the lattice constant of the tapered crystal (5) satisfy the bragg diffraction relationship.
6. The X-ray diffraction of claim 1The diagnosis system is characterized in that the variable cone crystal (5) adopts SiO2A material.
7. The X-ray diffraction diagnostic system as claimed in claim 1, wherein the display mode of the aiming segment (2) is a digital on-line display of light source images and is provided with an automatic light barrier.
8. The X-ray diffraction diagnostic system as claimed in claim 1, characterized in that the aperture stop (4) has a limiting aperture width of less than 20 μm.
9. The X-ray diffraction diagnostic system as claimed in claim 1, wherein the chamber (3) is made of aluminum material and is subjected to oxidation treatment.
10. The X-ray diffraction diagnostic system according to claim 1, characterized in that the recording device (6) is an on-line recording device based on a large-area array CMOS.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010271639.9A CN111323440A (en) | 2020-04-09 | 2020-04-09 | X-ray diffraction diagnostic system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010271639.9A CN111323440A (en) | 2020-04-09 | 2020-04-09 | X-ray diffraction diagnostic system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN111323440A true CN111323440A (en) | 2020-06-23 |
Family
ID=71166231
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010271639.9A Pending CN111323440A (en) | 2020-04-09 | 2020-04-09 | X-ray diffraction diagnostic system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN111323440A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111678600A (en) * | 2020-08-10 | 2020-09-18 | 中国工程物理研究院激光聚变研究中心 | Hall crystal with flat response |
| CN113507775A (en) * | 2021-06-07 | 2021-10-15 | 中国工程物理研究院激光聚变研究中心 | Multipurpose optical Thomson scattering spectrum measuring system suitable for large laser device |
| TWI800858B (en) * | 2020-07-03 | 2023-05-01 | 日商歐姆龍股份有限公司 | X-ray inspection device |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5923720A (en) * | 1997-06-17 | 1999-07-13 | Molecular Metrology, Inc. | Angle dispersive x-ray spectrometer |
| CN105510955A (en) * | 2015-12-01 | 2016-04-20 | 中国工程物理研究院上海激光等离子体研究所 | Method for offline precise assembly and adjustment as well as online accurate resetting and collimation of elliptical bent crystal spectrometer |
| CN105575454A (en) * | 2015-06-29 | 2016-05-11 | 中国建材检验认证集团股份有限公司 | Manufacturing method of large-area total focusing type double curvature bent crystals |
| CN106093095A (en) * | 2016-05-30 | 2016-11-09 | 中国工程物理研究院流体物理研究所 | A kind of full filed XRF imaging system and formation method |
| CN206546439U (en) * | 2017-03-15 | 2017-10-10 | 山西大同大学 | A kind of X-ray energy spectrum imaging system |
| CN108013891A (en) * | 2018-01-26 | 2018-05-11 | 中国工程物理研究院激光聚变研究中心 | A kind of radiographic apparatus |
| CN108398712A (en) * | 2018-02-08 | 2018-08-14 | 中国工程物理研究院上海激光等离子体研究所 | Circular cone item crystalline substance spectrometer and its installation and adjustment method |
| CN108789888A (en) * | 2018-07-23 | 2018-11-13 | 中国工程物理研究院激光聚变研究中心 | Curved crystals preparation method for X-ray micro-imaging |
| CN109725343A (en) * | 2017-10-27 | 2019-05-07 | 曲阜师范大学 | The parallel Spectrometer device of parabola type X-ray off axis |
| CN109799612A (en) * | 2019-03-15 | 2019-05-24 | 重庆大学 | Camber reflection mirror manufacturing method and curvature radius point light source line focusing image-forming system |
-
2020
- 2020-04-09 CN CN202010271639.9A patent/CN111323440A/en active Pending
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5923720A (en) * | 1997-06-17 | 1999-07-13 | Molecular Metrology, Inc. | Angle dispersive x-ray spectrometer |
| CN105575454A (en) * | 2015-06-29 | 2016-05-11 | 中国建材检验认证集团股份有限公司 | Manufacturing method of large-area total focusing type double curvature bent crystals |
| CN105510955A (en) * | 2015-12-01 | 2016-04-20 | 中国工程物理研究院上海激光等离子体研究所 | Method for offline precise assembly and adjustment as well as online accurate resetting and collimation of elliptical bent crystal spectrometer |
| CN106093095A (en) * | 2016-05-30 | 2016-11-09 | 中国工程物理研究院流体物理研究所 | A kind of full filed XRF imaging system and formation method |
| CN206546439U (en) * | 2017-03-15 | 2017-10-10 | 山西大同大学 | A kind of X-ray energy spectrum imaging system |
| CN109725343A (en) * | 2017-10-27 | 2019-05-07 | 曲阜师范大学 | The parallel Spectrometer device of parabola type X-ray off axis |
| CN108013891A (en) * | 2018-01-26 | 2018-05-11 | 中国工程物理研究院激光聚变研究中心 | A kind of radiographic apparatus |
| CN108398712A (en) * | 2018-02-08 | 2018-08-14 | 中国工程物理研究院上海激光等离子体研究所 | Circular cone item crystalline substance spectrometer and its installation and adjustment method |
| CN108789888A (en) * | 2018-07-23 | 2018-11-13 | 中国工程物理研究院激光聚变研究中心 | Curved crystals preparation method for X-ray micro-imaging |
| CN109799612A (en) * | 2019-03-15 | 2019-05-24 | 重庆大学 | Camber reflection mirror manufacturing method and curvature radius point light source line focusing image-forming system |
Non-Patent Citations (2)
| Title |
|---|
| KOHEI MORISHITA: "《One-shot spectrometer for several elements using an integrated conical crystal analyzer》", 《REVIEW OF SCIENTIFIC INSTRUMENTS》 * |
| 施军: "《一种变曲率面晶体Ｘ射线检测技术》", 《光子学报》 * |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI800858B (en) * | 2020-07-03 | 2023-05-01 | 日商歐姆龍股份有限公司 | X-ray inspection device |
| CN111678600A (en) * | 2020-08-10 | 2020-09-18 | 中国工程物理研究院激光聚变研究中心 | Hall crystal with flat response |
| CN113507775A (en) * | 2021-06-07 | 2021-10-15 | 中国工程物理研究院激光聚变研究中心 | Multipurpose optical Thomson scattering spectrum measuring system suitable for large laser device |
| CN113507775B (en) * | 2021-06-07 | 2023-11-21 | 中国工程物理研究院激光聚变研究中心 | Multipurpose optical Thomson scattering spectrum measuring system suitable for large-scale laser device |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN111323440A (en) | X-ray diffraction diagnostic system | |
| US5055679A (en) | Surface analysis method and apparatus | |
| US4215274A (en) | X-ray detector with picosecond time resolution | |
| Öhrwall et al. | A new energy and angle resolving electron spectrometer–First results | |
| US20130126727A1 (en) | Time-of-Flight Electron Energy Analyzer | |
| CN109975859B (en) | High space-time resolution soft X-ray radiation flow quantitative measurement system | |
| Seward et al. | Calibrated’’four‐color’’x‐ray microscope for laser plasma diagnostics | |
| RU2249813C2 (en) | Device for taking elementary analysis by means of spectrometry of optical emission on laser-generated plasma | |
| Blatnik et al. | Performance of a quintuple-GEM based RICH detector prototype | |
| CN111065333B (en) | Converging x-ray imaging apparatus and method | |
| CN112859146B (en) | X-ray energy spectrum combined measurement spectrometer and implementation method thereof | |
| CN107121693B (en) | Real-time electronic spectrometer based on film scintillator and fiber array | |
| Wegrzynek et al. | Experimental evaluation of X‐ray optics applied for microanalysis | |
| Chapman et al. | Focusing and collimation of x rays using microchannel plates: an experimental investigation | |
| US4542290A (en) | Apparatus for recording emissions from a rapidly generated plasma from a single plasma producing event | |
| Glenzer et al. | High-energy 4ω probe laser for laser-plasma experiments at Nova | |
| Shevelko et al. | X-ray focusing crystal von Hamos spectrometer with a CCD linear array as a detector | |
| CN111443101A (en) | Direct comparison system for different crystal X-ray diffraction efficiencies | |
| CN113009549A (en) | High-light-collecting-efficiency regional resolution X-ray radiation flow measuring system | |
| JP2764505B2 (en) | Electron spectroscopy method and electron spectrometer using the same | |
| CN218036511U (en) | X-ray photoelectron spectrometer | |
| Gotchev et al. | KB–PJX—A streaked imager based on a versatile x-ray microscope coupled to a high-current streak tube | |
| Kelly et al. | Proposed configurations for a high-repetition-rate position-sensitive atom probe | |
| WO2013147277A1 (en) | Radiation measurement device and radiation measurement system | |
| CN113984815B (en) | High-efficiency Compton scattering imaging system based on inverse Compton scattering X-ray source |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20200623 |