CN204228121U - A kind of ellipsoidal mirror surface shape detection apparatus - Google Patents
A kind of ellipsoidal mirror surface shape detection apparatus Download PDFInfo
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- CN204228121U CN204228121U CN201420746042.5U CN201420746042U CN204228121U CN 204228121 U CN204228121 U CN 204228121U CN 201420746042 U CN201420746042 U CN 201420746042U CN 204228121 U CN204228121 U CN 204228121U
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Abstract
The utility model relates to a kind of ellipsoidal mirror surface shape detection apparatus, comprising: ellipsoidal mirror; Zoom unit, described zoom unit carries out convergent-divergent to annulus light, and described annulus light is focused on the perifocus place of described ellipsoidal mirror; Optical screen, described optical screen position of opening is at the over focus place of described ellipsoidal mirror.The utility model has the advantages such as detection efficiency is high, system cost is low, system architecture is simple, testing result is directly perceived.
Description
Technical field
The utility model relates to field of optical detection, particularly a kind of ellipsoidal mirror surface shape detection apparatus.
Background technology
Ellipsoidal mirror is structure member important in light scattering method PM2.5 monitor optical system, and the detection of ellipsoid mirror surface-shaped plays an important role to the debugging of light path and the quality of optical property.
The common methods of current detection ellipsoid mirror surface-shaped has two kinds, as follows respectively:
1, fringe projection method:
As shown in Figure 1, the simulation interference fringe that computing machine 101 produces is projected to the surface of object under test 103 by projector 102, the surface of phase-shifting technique to testee 103 is adopted to measure, CCD104 receives the information formation bar graph that object under test 103 surface returns, and bar graph is fed back to computing machine 101.Computing machine 101 pairs of bar graph data process, and as rebuild the phase place of bar graph through overvoltage bag phase place, expansion phase place etc., by the systematic parameter of demarcating in advance, finally obtain measured object dignity shape Figure 105.
2, interferometric method:
As shown in Figure 2, laser instrument 111 launches laser, spatial filtering is carried out by wave filter 112, amplify through beam expanding lens 113, testee 119 is arrived again by Amici prism 114, catoptron 115, collimator objective 116, piezoelectric ceramic stack 117 and condenser lens 118, the light beam carrying aspheric surface information reflects from aspheric mirror, is again incided on Amici prism 114 by condenser lens 118, enters spectrophotometric unit 1110.Light beam forms the interference detecting light and reference light in spectrophotometric unit 1110: namely light beam first incides the front surface of the first optical flat through polaroid, be divided into two bundles, again from the second optical flat out time to meet formation radial shear, and then be divided into four bundles through beam-splitting optical grating, and become circularly polarized light by quarter wave plate, interfered by each self-forming after polaroid combination, produce 4 width interference fringes.Interference fringe is successively by exporting interference fringe pattern 1116 after imaging len 1111, zoom lens 1112, catoptron 1113, associated image lens 1114, ccd video camera 1115.
Above detection method all can realize the detection of ellipsoid mirror surface-shaped, but also has the following disadvantages:
1, testing result is not directly perceived
In the above described two methods, the pattern carrying ellipsoid mirror surface-shaped all needs to carry out demodulation or rebuild just showing by corresponding device, and subject that can not be real-time intuitively observes;
2, testing process is complicated, efficiency is low, system cost is high
For making the processes such as the demarcation in advance of image demodulation or reconstruction and systematic parameter all introduce more physical device or software program, make testing process complexity, efficiency low; Simultaneity factor cost is higher.
Utility model content
In order to solve above-mentioned deficiency of the prior art, the utility model provides that detection efficiency is high, cost is low, the simple ellipsoidal mirror surface shape detection apparatus of system architecture.
For realizing above-mentioned utility model object, the utility model adopts following technical scheme:
A kind of ellipsoidal mirror surface shape detection apparatus, comprising:
Ellipsoidal mirror;
Zoom unit, described zoom unit carries out convergent-divergent to annulus light, and described annulus light is focused on the perifocus place of described ellipsoidal mirror;
Optical screen, described optical screen position of opening is at the over focus place of described ellipsoidal mirror.
Preferably, the open pore size on described optical screen is 1mm.
Further, described ellipsoidal mirror surface shape detection apparatus also comprises optical transform element, and directional light is radiated at the annulus light that described optical transform element is formed and is radiated on described zoom unit.
Further, described optical transform element comprises axle pyramid.
As preferably, described axle pyramid comprises positive axis pyramid and negative axle pyramid, the placement location of described positive axis pyramid than described negative axle pyramid closer to described ellipsoidal mirror.
Further, described ellipsoidal mirror surface shape detection apparatus also comprises Optical Transmit Unit, described Optical Transmit Unit comprises light source module, and described light source module comprises monochromatic source and collimating mirror, and the optical alignment that described monochromatic source sends by described collimating mirror is that directional light is radiated in optical transform element.
As preferably, described Optical Transmit Unit comprises light combination mirror and two groups of light source modules, and the monochromatic source of described two groups of light source modules launches the light of different wave length, and the light that two monochromatic sources send is combined into a branch of after corresponding collimating mirror collimation through light combination mirror.
Further, described two groups of light source modules are separately positioned on homonymy or the heteropleural of light combination mirror.
Further, described zoom unit comprises mechanical compensation module and optical compensation module; Mechanical compensation module is made up of Zoom lens group and offset lens group two parts; The lens hollow of mechanical compensation module, mechanical compensation module is used for ruddiness zoom, and the hollow space of the lens of mechanical compensation module is used for passing through green glow; Optical compensation module is made up of offset lens group, the light that optical compensation module is passed through for receiving mechanical compensating module lens combination hollow space, and to green glow zoom.
Further, described zoom unit also comprises fixed lens group, and described fixed lens group comprises two convex lens, is separately positioned on the outside of mechanical compensation module and optical compensation module.
As preferably, described ellipsoidal mirror surface shape detection apparatus also comprises the diaphragm being arranged on described ellipsoidal mirror perifocus place.
The utility model compared with prior art has following beneficial effect:
1, detection efficiency is high
Adopt zoom unit, alternative expression is carried out to the annulus being incident upon ellipsoidal mirror surface and zooms in or out, to complete the scanning to ellipsoidal mirror surface; With the naked eye directly observed the light spot shape on ellipsoidal mirror surface by pin hole, can judge the situation of ellipsoid mirror surface-shaped soon, detection efficiency is high.
2, system cost is low
Optical element used is simple, does not adopt accurate optoelectronic device, reduces cost.
3, system architecture is simple, testing result is directly perceived
Do not adopt electronic equipment and optical information processing apparatus, light path system is simple, and is used alone optical system and detects ellipsoidal mirror minute surface, and testing result directly detects by an unaided eye, directly perceived, convenient, greatly reduces the complicacy of system.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of striped sciagraphy in background technology;
Fig. 2 is the schematic diagram of interferometric method in background technology;
Fig. 3 is ellipsoidal mirror surface shape detection apparatus structural representation in embodiment 2;
Fig. 4 is ellipsoidal mirror surface shape detection apparatus focal position graph of a relation in embodiment 2;
Fig. 5 is the axle pyramidal structure schematic diagram in embodiment 2 in optical transform element;
Fig. 6 is zoom system, pancreatic system structural representation in embodiment 2.
Embodiment
Embodiment 1
A kind of ellipsoidal mirror surface shape detection apparatus, comprising:
Ellipsoidal mirror;
Zoom unit, described zoom unit carries out convergent-divergent to annulus light, and described annulus light is focused on the perifocus place of described ellipsoidal mirror, and continues divergent irradiation on ellipsoid minute surface;
Optical screen, described optical screen position of opening is at the over focus place of described ellipsoidal mirror.
Preferably, the open pore size on described optical screen is 1mm.
Be radiated at after on ellipsoid minute surface after the light outgoing focusing on ellipsoidal mirror perifocus, the light carrying ellipsoid mirror surface-shaped information can through the over focus of ellipsoidal mirror, therefore, optical screen is placed at the over focus place of ellipsoidal mirror, observer observes optical screen, ellipsoid mirror surface-shaped situation can be seen clearly, namely judge whether the processing of ellipsoid minute surface meets designing requirement according to the bright dark of annulus hot spot on optical screen: if see bright annulus hot spot, show that the processing of ellipsoid mirror surface-shaped meets designing requirement; If see gloomy annulus hot spot, show that the processing of ellipsoid mirror surface-shaped departs from former designing requirement.
Because of the resolution restriction of the light receiver system optical screen for observing etc., adopting annulus light successively to scan can have higher resolution to detection faces to ellipsoidal mirror surface, the different coincidence detected between surface reflection can be caused to cause flase drop as adopted solid hot spot.
For obtaining annulus light, further, described ellipsoidal mirror surface shape detection apparatus also comprises optical transform element, and directional light is radiated at the annulus light that described optical transform element is formed and is radiated on described zoom unit.
Further, described optical transform element comprises axle pyramid; Described optical transform element can comprise the combination of a positive axis pyramid or a negative axle pyramid or the positive and negative axle pyramid of two or more;
As preferably, described axle pyramid comprises positive axis pyramid and negative axle pyramid, the placement location of described positive axis pyramid than described negative axle pyramid closer to described ellipsoidal mirror.Now, the annulus light of formation is two annulus.
By regulating the distance between positive and negative axle pyramid, making the radius of two Ring-beams of outgoing reach a larger value, tested ellipsoidal mirror outermost edge can be covered with outermost layer annulus and be advisable, and not overlapping between two annulus.
For obtaining directional light, further, described ellipsoidal mirror surface shape detection apparatus also comprises Optical Transmit Unit, described Optical Transmit Unit comprises light source module, described light source module comprises monochromatic source and collimating mirror, and the optical alignment that described monochromatic source sends by described collimating mirror is that directional light is radiated in optical transform element.
Because axle pyramid has dispersion interaction to different wavelength, in order to only produce an annulus or produce two annulus for improving detection efficiency, so adopt monochromatic light or adopt through green glow after red combiner parallel be incident in axle pyramid after dispersion interaction carry out being separated generation, and monochromatic source can be different from natural light, eyes are responsive to red green, are convenient to observation.
Described directional light can be monochromatic light, also can be polychromatic light, namely when described directional light is monochromatic light, then described light source module comprises a monochromatic source and its corresponding collimating mirror, as described in monochromatic source be the visible ray such as red-light source or green-light source monochromatic source; When described directional light is polychromatic light, then, described light source module comprises two or more and launches the monochromatic source of different wavelengths of light and collimating mirror corresponding with the monochromatic source of respective wavelength respectively, now, the light that different monochromatic sources sends need after corresponding collimating mirror collimation through light combination mirror be combined into a branch of after be radiated at again in optical transform element;
Optical transform element requires that light must be parallel to optical axis direction incidence, so will light combination mirror be utilized to adjust on optical axis direction light.
As preferably, described Optical Transmit Unit comprises light combination mirror and two groups of light source modules, and the monochromatic source of described two groups of light source modules launches the light of different wave length, and the light that two monochromatic sources send is combined into a branch of after corresponding collimating mirror collimation through light combination mirror.Preferably, the monochromatic source of described two groups of light source modules is respectively red-light source, green-light source.Light combination mirror requires that the laser after collimation is incident with miter angle, and light combination mirror is reflect red transmit green, is namely greater than 95% to 532nm green glow penetrance, is greater than 95% to 650nm reflection to red light rate.
The light sent to make different monochromatic sources can be combined into a branch of, different monochromatic source and corresponding collimating mirror thereof can be arranged on light combination mirror homonymy or heteropleural according to reflection or refraction situation after corresponding collimating mirror collimation.
Further, described two groups of light source modules are separately positioned on homonymy or the heteropleural of light combination mirror.
The directional light that light source module sends to be focused onto after the perifocus of ellipsoidal mirror divergent irradiation on ellipsoid minute surface again after being radiated at and optical transform module becoming annulus light, be radiated at ellipsoid minute surface for enabling the light dispersed from ellipsoidal mirror perifocus to carry out the detection of ellipsoid mirror surface-shaped, further, described zoom unit is also for regulating light beam focal length, and described zoom unit comprises mechanical compensation module and optical compensation module; Described zoom unit comprises mechanical compensation module and optical compensation module; Mechanical compensation module is made up of Zoom lens group and offset lens group two parts, and optical compensation module is made up of offset lens group; Described Zoom lens group is convex lens, and described offset lens group is two concavees lens; And the lens hollow of mechanical compensation module; Mechanical compensation module is used for ruddiness zoom, and the hollow space of the lens of mechanical compensation module is used for passing through green glow; The light that optical compensation module is passed through for receiving mechanical compensating module lens combination hollow space, and to green glow zoom.
Further, described zoom unit also comprises fixed lens group, and described fixed lens group comprises two convex lens, is separately positioned on the outside of mechanical compensation module and optical compensation module.
Move horizontally mechanical compensation module or the optical compensation module of zoom unit, wherein optical compensation module does the larger linear movement of amplitude, mechanical compensation module does the less nonlinear motion of amplitude, to reach zooming in or out annular radii, and focal length preferably remains on a larger numerical value, namely focal length is preferably within the scope of 7-12cm, in case optical system blocks the propagation of tested ellipsoidal mirror surface reflection light;
In the utility model, the perifocus distance ellipsoidal mirror summit of tested ellipsoidal mirror is 5cm, and over focus distance is 9cm, so the focal length of ruddiness can be taken as 10cm, the focal length of green glow can be taken as 8cm.
Zoom unit can keep the focus after focusing on all the time at the perifocus place of tested ellipsoidal mirror, meanwhile, can also carry out convergent-divergent to annulus light, the annulus be radiated on ellipsoid minute surface is scanned ellipsoid minute surface.
When described Optical Transmit Unit comprises two groups of light source modules, by regulating zoom unit, wherein as detection light and another kind of monochromatic mark, the sweep limit of convergent-divergent change to ellipsoid mirror surface-shaped will be carried out to another kind of monochromatic light by a kind of monochromatic light.By regulating, two kinds of monochromatic light alternately being scanned ellipsoid minute surface, can reach without repeating or detecting the object of whole ellipsoid mirror surface-shaped quickly without omission.
As preferably, described ellipsoidal mirror surface shape detection apparatus also comprises the diaphragm being arranged on described ellipsoidal mirror perifocus place.This diaphragm is aperture diaphragm, and effect is the marginal ray in order to limit incident beam.
Embodiment 2
The present embodiment is the application examples of embodiment 1.
Refer to Fig. 3, Fig. 4, the ellipsoidal mirror surface shape detection apparatus of the present embodiment comprises:
1, Optical Transmit Unit 1, described Optical Transmit Unit 1 comprises light combination mirror 10 and two groups of light source modules, two groups of light source modules are separately positioned on the both sides of light combination mirror 10, one of them light source module comprises monochromatic source 11 and collimating mirror 12, another light source module comprises monochromatic source 13 and collimating mirror 14, wherein, monochromatic source 11 is ruddiness LD, and monochromatic source 13 is green glow LD; The monochromatic source of described two groups of light source modules launches the light of different wave length, is combined into a branch of being radiated in optical transform element 2 through corresponding collimating mirror collimation for directional light through light combination mirror 10.
2, optical transform element 2, through light combination mirror 10 be combined into a branch of after directional light be radiated in described optical transform element 2; Described optical transform element 2 comprises axle pyramid; Described axle pyramid comprises positive axis pyramid 21 and negative axle pyramid 22, the placement location of described positive axis pyramid 21 than described negative axle pyramid 22 closer to ellipsoidal mirror 5; By regulating the distance between positive axis pyramid 21, negative axle pyramid 22, making the radius of the Ring-beam of outgoing reach a larger value, tested ellipsoidal mirror 5 outermost edge can be covered with outermost layer annulus and be advisable.
In the present embodiment, refer to Fig. 5, the quantitative relationship between the inside radius of the annulus light of outgoing after optical transform element and axle pyramid systematic parameter is:
wherein d is vertex of a cone spacing, and γ is the angle that light departs from optical axis,
for cone angle.
Suppose that axle pyramid adopts k9 material, d is 10cm,
incident red light wavelength is 635nm, and incident diameter is 7cm, utilizes described formula above, and in conjunction with ZEMAX, and by Ray-tracing Method, can obtain circular diameter in the hollow ring light beam that exports is 9cm, and outside diameter is 14cm.
3, zoom unit 3, described zoom unit 3 carries out convergent-divergent to the annulus light from optical transform element 2 outgoing, and described annulus light is focused on the perifocus F1 place of ellipsoidal mirror 5, and continues divergent irradiation on ellipsoidal mirror 5 minute surface; Refer to Fig. 6, described zoom unit 3 comprises mechanical compensation module 31, optical compensation module 32 and fixed lens group, and described fixed lens group comprises convex lens 33 and convex lens 34, is separately positioned on the outside of mechanical compensation module and optical compensation module; Mechanical compensation module 31 is made up of Zoom lens group and offset lens group two parts, and the lens hollow of mechanical compensation module 31, optical compensation module is made up of offset lens group; Described Zoom lens group is convex lens, and described offset lens group is two concavees lens; Mechanical compensation module 31 is for ruddiness zoom, and the hollow space of lens is used for by green glow, the light that optical compensation module 42 is passed through for receiving mechanical compensating module 31 lens combination hollow space, and to green glow zoom.
Move horizontally mechanical compensation module 31 or the optical compensation module 31,2 of zoom unit 3, wherein, mechanical compensation module 31 does the less nonlinear motion of amplitude, optical compensation module 32 does the larger linear movement of amplitude, to reach zooming in or out annular radii, and namely focal length preferably remains on a larger numerical value, focal range is preferably within the scope of 7-12cm, in case optical system blocks the propagation of tested ellipsoidal mirror 5 surface reflection light; In the utility model, the perifocus distance ellipsoidal mirror summit of tested ellipsoidal mirror is 5cm, and over focus distance is 9cm, so the focal length of ruddiness can be taken as 10cm, the focal length of green glow can be taken as 8cm.
Zoom unit 3 can keep the focus after focusing on all the time at the perifocus F1 place of tested ellipsoidal mirror 5, meanwhile, can also carry out convergent-divergent to annulus light, the annulus be radiated on ellipsoid minute surface is scanned ellipsoid minute surface.
In the present embodiment, by regulating zoom unit 3, using wherein a kind of monochromatic light if ruddiness is as the mark detecting light and green glow, convergent-divergent being carried out to green glow and changes sweep limit to ellipsoidal mirror 5 shapes.By regulating, two kinds of monochromatic light and ruddiness and green glow alternately being scanned the minute surface of ellipsoidal mirror 5, can reach without repeating or detecting the object of whole ellipsoid mirror surface-shaped quickly without omission.
4, diaphragm 4, described diaphragm 4 is arranged on described ellipsoidal mirror 5 perifocus place, and effect is the marginal ray in order to limit incident beam.
5, concave-sphere 5 to be checked;
6, optical screen 6, the position of the perforate 61 of described optical screen 6 is at the over focus F2 place of described ellipsoidal mirror 5, and perforate 61 aperture of described optical screen 6 is 1mm.
Above-mentioned embodiment should not be construed as the restriction to the utility model protection domain.Key of the present utility model is: from the adjustable annulus photoscanning ellipsoid minute surface of ellipsoidal mirror perifocus incidence, by observing the optical imagery carrying ellipsoid mirror surface-shaped at ellipsoidal mirror over focus place, can obtain ellipsoid mirror surface-shaped processing situation intuitively.When not departing from the utility model spirit, all should fall within protection domain of the present utility model any type of change that the utility model is made.
Claims (9)
1. an ellipsoidal mirror surface shape detection apparatus, comprising:
Ellipsoidal mirror;
Zoom unit, described zoom unit carries out convergent-divergent to annulus light, and described annulus light is focused on the perifocus place of described ellipsoidal mirror;
Optical screen, described optical screen position of opening is at the over focus place of described ellipsoidal mirror.
2. ellipsoidal mirror surface shape detection apparatus according to claim 1, is characterized in that: described ellipsoidal mirror surface shape detection apparatus also comprises optical transform element, and directional light is radiated at the annulus light that described optical transform element is formed and is radiated on described zoom unit.
3. ellipsoidal mirror surface shape detection apparatus according to claim 1, is characterized in that: described optical transform element comprises axle pyramid.
4. ellipsoidal mirror surface shape detection apparatus according to claim 3, is characterized in that: described axle pyramid comprises positive axis pyramid and negative axle pyramid, the placement location of described positive axis pyramid than described negative axle pyramid closer to described ellipsoidal mirror.
5. ellipsoidal mirror surface shape detection apparatus according to claim 2, it is characterized in that: described ellipsoidal mirror surface shape detection apparatus also comprises Optical Transmit Unit, described Optical Transmit Unit comprises light source module, described light source module comprises monochromatic source and collimating mirror, and the optical alignment that described monochromatic source sends by described collimating mirror is that directional light is radiated in optical transform element.
6. ellipsoidal mirror surface shape detection apparatus according to claim 5, it is characterized in that: described Optical Transmit Unit comprises light combination mirror and two groups of light source modules, the monochromatic source of described two groups of light source modules launches the light of different wave length, and the light that two monochromatic sources send is combined into a branch of after corresponding collimating mirror collimation through light combination mirror.
7. ellipsoidal mirror surface shape detection apparatus according to claim 6, is characterized in that: described two groups of light source modules are separately positioned on homonymy or the heteropleural of light combination mirror.
8. ellipsoidal mirror surface shape detection apparatus according to claim 4, is characterized in that: described zoom unit comprises mechanical compensation module and optical compensation module; Mechanical compensation module is made up of Zoom lens group and offset lens group two parts; The lens hollow of mechanical compensation module, mechanical compensation module is used for ruddiness zoom, and the hollow space of the lens of mechanical compensation module is used for passing through green glow; Optical compensation module is made up of offset lens group, the light that optical compensation module is passed through for receiving mechanical compensating module lens combination hollow space, and to green glow zoom.
9., according to the arbitrary described ellipsoidal mirror surface shape detection apparatus of claim 1 ~ 8, it is characterized in that: described ellipsoidal mirror surface shape detection apparatus also comprises the diaphragm being arranged on described ellipsoidal mirror perifocus place.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104359424A (en) * | 2014-10-09 | 2015-02-18 | 无锡中科光电技术有限公司 | Ellipsoid mirror surface shape detection device and method |
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| CN106152969A (en) * | 2016-06-17 | 2016-11-23 | 哈尔滨工业大学 | Collect the easy detection device of eyeglass face type and detection method based on this device |
| CN107984081B (en) * | 2017-01-11 | 2019-05-03 | 哈尔滨理工大学 | Laser engraving machine light channel structure |
| CN106643556A (en) * | 2017-01-17 | 2017-05-10 | 哈尔滨工业大学 | Ellipsoid reflector surface shape detection device and ellipsoid reflector surface shape detection method |
| CN106989693B (en) * | 2017-05-12 | 2022-10-21 | 中国工程物理研究院激光聚变研究中心 | Off-axis ellipsoidal mirror surface shape detection device and detection method thereof |
| CN109387353B (en) * | 2017-08-14 | 2021-07-23 | 深圳光峰科技股份有限公司 | Micro-lens array detection system and micro-lens array detection method |
| CN110118645B (en) * | 2019-04-19 | 2021-11-05 | 西北核技术研究所 | Optical performance comprehensive evaluation method of semi-ellipsoid reflecting surface |
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| SU1716318A1 (en) * | 1989-11-09 | 1992-02-28 | Научно-Исследовательский Институт Приборостроения | Method to test concave elliptical surfaces |
| SU1712777A1 (en) * | 1989-11-09 | 1992-02-15 | Научно-Исследовательский Институт Приборостроения | Method for checking shape of concave elliptic surfaces |
| US5056917A (en) * | 1990-04-02 | 1991-10-15 | Christopher Nowacki | Lithotripter reflector inspection |
| JP2008032402A (en) * | 2006-07-26 | 2008-02-14 | Seiko Epson Corp | Reflector evaluation device and method |
| CN102507595B (en) * | 2011-11-17 | 2014-10-29 | 江苏大学 | Pipeline detection method and device through exciting axial guided waves by utilizing annular laser |
| CN103335607B (en) * | 2013-06-28 | 2015-12-02 | 中国科学院西安光学精密机械研究所 | Surface shape inspection method for large-caliber metal off-axis ellipsoidal mirror or parabolic mirror |
| CN103335613B (en) * | 2013-07-18 | 2016-05-18 | 中国科学院光电技术研究所 | Large-caliber aspheric primary mirror detection device and method |
| CN103411557B (en) * | 2013-08-15 | 2016-02-03 | 哈尔滨工业大学 | The angular spectrum accurate confocal annular microstructure measurement device of scanning of matrix lamp and method |
| CN104359424B (en) * | 2014-10-09 | 2017-04-19 | 无锡中科光电技术有限公司 | Ellipsoid mirror surface shape detection device and method |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104359424A (en) * | 2014-10-09 | 2015-02-18 | 无锡中科光电技术有限公司 | Ellipsoid mirror surface shape detection device and method |
| CN104359424B (en) * | 2014-10-09 | 2017-04-19 | 无锡中科光电技术有限公司 | Ellipsoid mirror surface shape detection device and method |
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