CN106989693B - Off-axis ellipsoidal mirror surface shape detection device and detection method thereof - Google Patents
Off-axis ellipsoidal mirror surface shape detection device and detection method thereof Download PDFInfo
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- CN106989693B CN106989693B CN201710332743.2A CN201710332743A CN106989693B CN 106989693 B CN106989693 B CN 106989693B CN 201710332743 A CN201710332743 A CN 201710332743A CN 106989693 B CN106989693 B CN 106989693B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
Abstract
The invention relates to an off-axis ellipsoidal mirror surface shape detection device and a detection method thereof, belonging to the technical field of optical detection equipment.
Description
Technical Field
The invention belongs to the technical field of optical detection equipment, and particularly relates to an off-axis ellipsoidal mirror surface shape detection device and a detection method thereof.
Background
An aspherical optical element is a very important optical element which can obtain imaging quality and optical design effects which are incomparable with those of a spherical optical element. The off-axis ellipsoidal mirror is used as an aspherical mirror, and because the geometric axis and the optical axis of the off-axis ellipsoidal mirror are not coincident, the rotational asymmetry of the off-axis ellipsoidal mirror causes certain difficulty in processing and measuring, so that the processing and the inspection of the aspherical mirror are important factors which disturb the use of the off-axis ellipsoidal mirror, wherein the surface shape is an important index for measuring the quality of an optical element, and the quality of a light beam is seriously influenced. Therefore, in order to ensure the processing quality of the off-axis ellipsoidal mirror, the measurement of the surface shape of the off-axis ellipsoidal mirror is very important, and how to provide accurate and reliable surface shape data for processing the aspheric surface is very important for optical processing.
Disclosure of Invention
In order to solve the above problems, an off-axis ellipsoidal mirror shape detection device and a detection method thereof are proposed.
In order to achieve the purpose, the invention provides the following technical scheme:
an off-axis ellipsoidal mirror surface shape detection device sequentially comprises:
an interferometer for outputting a laser beam;
the focusing lens is arranged on the same optical axis with the interferometer, and a small hole is formed in the focus of the focusing lens;
the height-pulling mirror comprises a first reflecting mirror and a second reflecting mirror which are arranged in parallel, the first reflecting mirror is positioned on the optical axis of the interferometer, the optical axis of the first reflecting mirror and the optical axis of the interferometer form a 45-degree angle, and the second reflecting mirror is positioned right above the first reflecting mirror;
the interferometer comprises a first small hole plate and a second small hole plate which are positioned on an optical axis of the interferometer and have the same structure, wherein the first small hole plate is provided with a first small hole and a second small hole which are different in height, the first small hole plate and the second small hole plate are arranged in parallel, and the height of the first small hole is the same as the central height of a laser beam;
the off-axis ellipsoidal mirror comprises a short focus and a long focus, the short focus is superposed with the focus of the focusing lens, the optical axis of the off-axis ellipsoidal mirror is superposed with the optical axis of the focusing lens, and the central height of the off-axis ellipsoidal mirror is the same as that of the second small hole;
and the compensation lens and the total reflection mirror are arranged vertically, and a reflected light beam emitted by the off-axis ellipsoidal mirror is superposed with the optical axis of the compensation lens.
Further, the aperture of the laser beam is d, the central height thereof is l, and the focal length of the focusing lens is f 1 The clear aperture is D 1 And D is 1 ＞d。
Further, the clear aperture of the off-axis ellipsoidal mirror is D 2 Center height L, reflection angle alpha, short focal length f 2 The long focal length is F, and D 2 D, the horizontal distance between the center of the off-axis ellipsoidal mirror and the small hole is S, and S = f 2 -(L-l)。
Further, the compensation lens is a negative lens with a focal length f 3 And f is 3 ＝F。
Further, the height difference between the first mirror and the second mirror is h, and h = L-L.
Further, the height of the first small hole is L, and the height of the second small hole is L.
Furthermore, the aperture of the small hole is 0.5 mm-2 mm.
In addition, the invention also provides a detection method of the off-axis ellipsoidal mirror shape detection device, which comprises the following steps:
s1: placing an interferometer and a focusing lens, wherein a laser beam output by the interferometer is focused after passing through the focusing lens, and a small hole is placed at the focus of the focusing lens;
s2: removing the focusing lens, converting the laser beam into a small beam after the laser beam passes through the small hole, and pushing the first small hole plate and the second small hole plate into the light path of the small beam so that the small beam passes through the first small holes in the first small hole plate and the second small hole plate;
s3: placing a first reflector and a second reflector, and adjusting the height and the deflection angle of the second reflector so that the small beams pass through second small holes in the first small hole plate and the second small hole plate;
s4: placing an off-axis ellipsoidal mirror, enabling the center of the off-axis ellipsoidal mirror to coincide with the small light beam, and adjusting the deflection angle of the off-axis ellipsoidal mirror to enable the included angle between the reflected light beam and the incident light beam to be alpha and enable the center heights of the reflected light beam and the incident light beam to be the same;
s5: placing a compensation lens and a total reflection mirror, and removing the small hole, the first small hole plate and the second small hole plate;
s6: and resetting the focusing lens, reflecting the reflected beam to the original light path at the total reflection mirror, and finally, transmitting the reflected beam to the interferometer to obtain an interference pattern so as to finish off-axis ellipsoidal mirror surface shape detection.
Further, the laser beam is a parallel beam.
The beneficial effects of the invention are:
the off-axis ellipsoidal mirror surface shape detection device has the advantages that the off-axis ellipsoidal mirror surface shape detection device is compact in structure, low in cost, simple and easy to operate, interference patterns are obtained by the interferometer, detection precision is improved, meanwhile, the focusing lens is applicable to surface shape detection of off-axis ellipsoidal mirrors with different calibers, the application range is wide, in addition, the pull-up mirror is applicable to surface shape detection of off-axis ellipsoidal mirrors with different center heights, and flexibility is high.
Drawings
FIG. 1 is a top plan view of the overall structure of the present invention;
FIG. 2 is a schematic view of the overall optical path of the present invention;
FIG. 3 is a front elevational view of the overall construction of the present invention;
FIG. 4 is a schematic diagram of a debugging light path after the first orifice plate and the second orifice plate are pushed in;
fig. 5 is a schematic diagram of the adjustment path after the first mirror and the second mirror are placed.
In the drawings: the interferometer comprises a 1-interferometer, a 2-focusing lens, a 3-elevation mirror, a 31-first reflector, a 32-second reflector, a 4-off-axis ellipsoidal mirror, a 5-compensation lens, a 6-total reflection lens, a 7-small hole, an 8-first small hole plate, an 81-first small hole, an 82-second small hole and a 9-second small hole plate.
Detailed Description
In order to make the technical solutions of the present invention better understood, the technical solutions of the present invention are described below clearly and completely with reference to the accompanying drawings of the present invention, and based on the embodiments in the present application, other similar embodiments obtained by a person of ordinary skill in the art without making creative efforts shall fall within the protection scope of the present application. In addition, directional terms such as "upper", "lower", "left", "right", etc. in the following embodiments are directions with reference to the drawings only, and thus, the directional terms are used for illustrating the present invention and not for limiting the present invention.
The first embodiment is as follows:
as shown in fig. 1 to 5, an off-axis ellipsoidal mirror shape detection device sequentially comprises an interferometer 1, a focusing lens 2, a raising mirror 3, a first small pore plate 8, a second small pore plate 9, an off-axis ellipsoidal mirror 4, a compensation lens 5 and a total reflection mirror 6, wherein the focusing lens is transparent to lightThe surface shapes of the mirror 2, the heightening mirror 3, the compensating lens 5 and the total reflection mirror 6 are all better than 1/8 times of wavelength. The interferometer 1 is used for outputting laser beams, the laser beams are parallel beams, the aperture of the laser beams is d, the central height of the laser beams is l, the focusing lens 2 and the interferometer 1 are arranged on the same optical axis, a small hole 7 is formed in the position of the focal point of the focusing lens, the aperture of the small hole 7 is 0.5 mm-2 mm, and the focusing lens 2 is used for focusing the laser beams, so that the detection device can be suitable for surface shape detection of off-axis ellipsoidal mirrors 4 with different apertures. The focal length of the focusing lens 2 is f 1 The clear aperture is D 1 And D is 1 >d。
The height-pulling mirror 3 comprises a first reflecting mirror 31 and a second reflecting mirror 32 which are arranged in parallel, the first reflecting mirror 31 is positioned on the optical axis of the interferometer 1, the optical axis of the first reflecting mirror 31 and the optical axis of the interferometer 1 are 45 degrees, the second reflecting mirror 32 is positioned right above the first reflecting mirror 31, namely, the included angle between the second reflecting mirror 32 and the horizontal direction is 45 degrees.
The first orifice plate 8 and the second orifice plate 9 are both positioned on the optical axis of the interferometer 1, and the structures of the two are the same. The laser beam laser device is characterized in that the first orifice plate 8 and the second orifice plate 9 are provided with a first orifice 81 and a second orifice 82 which are different in height, the first orifice plate 8 and the second orifice plate 9 are arranged in parallel, the height of the first orifice 81 is the same as the central height of the laser beam, namely, the height of the first orifice 81 is l.
The off-axis ellipsoidal mirror 4 comprises a short focus and a long focus, the short focus is coincided with the focus of the focusing lens 2, the optical axis of the off-axis ellipsoidal mirror 4 is coincided with the optical axis of the focusing lens 2, and the clear aperture of the off-axis ellipsoidal mirror 4 is D 2 Center height L, reflection angle alpha, short focal length f 2 The long focal length is F, and D 2 >d, the horizontal distance between the center of the off-axis ellipsoidal mirror 4 and the small hole 7 is S, and S = f 2 - (L-L), the height of the centre of the off-axis ellipsoidal mirror 4 is the same as the height of the second aperture 82, that is, the height of the second aperture 82 is L. The reflected light beam emitted by the off-axis ellipsoidal mirror 4 coincides with the optical axis of the compensation lens 5, the compensation lens 5 is a negative lens, and the focal length of the negative lens is f 3 And f is 3 = F, the total reflection mirror 6 and the reflectionThe beam is vertically arranged.
Example two:
the same parts as those in the first embodiment are not described in detail, and this embodiment provides a detection method for an off-axis ellipsoidal mirror shape detection device, including the following steps:
s1: placing an interferometer 1 and a focusing lens 2, wherein a laser beam output by the interferometer 1 is focused after passing through the focusing lens 2, and placing an aperture 7 at the focus of the focusing lens 2;
s2: as shown in fig. 4, the focusing lens 2 is removed, the laser beam becomes a small beam after passing through the small hole 7, and the first small hole plate 8 and the second small hole plate 9 are pushed into the light path of the small beam, so that the small beam passes through the first small hole 81 on the first small hole plate 8 and the second small hole plate 9, and the collimation of the small beam is realized;
s3: as shown in fig. 5, the first mirror 31 and the second mirror 32 are placed, and the height and the deflection angle of the second mirror 32 are adjusted, the height difference between the first mirror 31 and the second mirror 32 is h, and h = L-L, so that the beamlets all pass through the second apertures 82 on the first aperture plate 8 and the second aperture plate 9, the optical paths of the beamlets are changed, and the collimation is achieved again;
s4: placing an off-axis ellipsoidal mirror 4, enabling the center of the off-axis ellipsoidal mirror to coincide with the small light beam, and adjusting the deflection angle of the off-axis ellipsoidal mirror 4 to enable the included angle between the reflected light beam and the incident light beam to be alpha and enable the center heights of the reflected light beam and the incident light beam to be the same;
s5: placing the compensation lens 5 and the total reflection mirror 6, and removing the aperture 7, the first aperture plate 8 and the second aperture plate 9;
s6: resetting the focusing lens 2, reflecting the reflected light beam back to the original light path at the total reflection mirror 6, sequentially passing through the compensation lens 5, the off-axis ellipsoidal mirror 4, the second reflection mirror 32, the first reflection mirror 31 and the focusing lens 2, and finally entering the interferometer 1 to obtain an interference pattern, thereby completing the surface shape detection of the off-axis ellipsoidal mirror 4.
Adopt common optical element to detect off-axis ellipsoid mirror 4 shape of face, compact structure, it is with low costs, simple easy operation adopts interferometer 1 to acquire the interference pattern and improves and detect the precision, simultaneously, adopts focusing lens 2 applicable shape of face in the off-axis ellipsoid mirror of different bores to detect, and application scope is wide, in addition, adopts the shape of face that the mirror 3 of pulling up is applicable in off-axis ellipsoid mirror 4 of different height-in-centers to detect, and the flexibility ratio is high. In addition, in order to conveniently debug the optical path, the focusing lens 2, the small hole 7, the first small hole plate 8 and the second small hole plate 9 are respectively arranged on the optical platform so as to realize the operations of pushing in the optical path and removing the optical path.
In this embodiment, the beam aperture d of the laser beam is 80mm, the central height l thereof is 50mm, and the focal length f of the focusing lens 2 1 300mm, its clear aperture D 1 Is 100mm, and the clear aperture D of the off-axis ellipsoidal mirror 4 2 200mm, a center height L of 150mm, a reflection angle alpha of 23 DEG, a short focal length f 2 800mm, a long focal length F of 314m, a focal length F of the compensation lens 5 3 Is-314 m, and the aperture of the small hole 7 is 0.8mm.
The present invention has been described in detail, and it should be understood that the detailed description and specific examples, while indicating the preferred embodiment of the invention, are intended for purposes of illustration only and are not intended to limit the scope of the invention.
Claims (8)
1. A detection method of an off-axis ellipsoidal mirror shape detection device is characterized by comprising the following steps:
s1: placing an interferometer and a focusing lens, wherein a laser beam output by the interferometer is focused after passing through the focusing lens, and a small hole is placed at the focus of the focusing lens;
s2: removing the focusing lens, converting the laser beam into a small beam after the laser beam passes through the small hole, pushing a first small hole plate and a second small hole plate into the light path of the small beam, wherein the first small hole plate and the second small hole plate have the same structure, the first small hole plate is provided with a first small hole and a second small hole which are different in height, the first small hole plate and the second small hole plate are arranged in parallel, the height of the first small hole is the same as the central height of the laser beam, and the small beam passes through the first small holes in the first small hole plate and the second small hole plate;
s3: placing a first reflecting mirror and a second reflecting mirror, wherein the first reflecting mirror is positioned on the optical axis of the interferometer, the first reflecting mirror and the optical axis of the interferometer form a 45-degree angle, the second reflecting mirror is positioned right above the first reflecting mirror, and the height and the deflection angle of the second reflecting mirror are adjusted, so that the small beams pass through the second small holes in the first small hole plate and the second small hole plate;
s4: placing an off-axis ellipsoidal mirror, wherein the off-axis ellipsoidal mirror comprises a short focus and a long focus, the short focus is superposed with the focus of the focusing lens, the optical axis of the off-axis ellipsoidal mirror is superposed with the optical axis of the focusing lens, the height of the center of the off-axis ellipsoidal mirror is the same as that of the second small hole, the center of the off-axis ellipsoidal mirror is superposed with the small light beam, and the deflection angle of the off-axis ellipsoidal mirror is adjusted so that the included angle between the reflected light beam and the incident light beam is alpha, and the height of the center of the reflected light beam and the height of the center of the incident light beam are the same;
s5: placing a compensation lens and a total reflection mirror, removing the small hole, the first small hole plate and the second small hole plate, enabling the reflected light beam emitted by the off-axis ellipsoidal mirror to coincide with the optical axis of the compensation lens, and placing the total reflection mirror and the reflected light beam vertically;
s6: and resetting the focusing lens, reflecting the reflected beam to the original light path at the total reflection mirror, and finally, transmitting the reflected beam to the interferometer to obtain an interference pattern so as to finish off-axis ellipsoidal mirror surface shape detection.
2. The method for inspecting an off-axis ellipsoidal mirror-shaped inspection device as claimed in claim 1, wherein the diameter of the laser beam is d, the height of the center thereof is l, and the focal length of the focusing lens is f 1 The clear aperture is D 1 And D is 1 ＞d。
3. The method for detecting the off-axis ellipsoidal mirror surface shape detection device according to claim 2, wherein the clear aperture of the off-axis ellipsoidal mirror is D 2 L center height, alpha reflection angle and f short focal length 2 The long focal length is F, and D 2 D, the horizontal distance between the center of the off-axis ellipsoidal mirror and the small hole is S, and S = f 2 -(L-l)。
4. According to claim3, the detection method of the off-axis ellipsoidal mirror surface shape detection device is characterized in that the compensation lens is a negative lens, and the focal length of the negative lens is f 3 And f is 3 ＝F。
5. The detection method of the off-axis ellipsoidal mirror shape detection device according to claim 4, wherein the height difference between the first mirror and the second mirror is h, and h = L-L.
6. The method for inspecting an off-axis ellipsoidal mirror-shaped inspection device according to any one of claims 3 to 5, wherein the height of the first aperture is L and the height of the second aperture is L.
7. The method for inspecting an off-axis ellipsoidal mirror-shaped inspection device according to claim 6, wherein the aperture of the small hole is 0.5mm to 2mm.
8. The method for detecting the shape of the off-axis ellipsoidal mirror as claimed in claim 7, wherein the laser beam is a parallel beam.
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| CN108426886B (en) * | 2018-06-15 | 2020-05-05 | 中国科学技术大学 | Method and system for detecting and identifying circulating tumor cells |
| CN109633856B (en) * | 2018-12-25 | 2020-11-13 | 中国工程物理研究院激光聚变研究中心 | Method for debugging coaxiality of concave and convex reflectors of Ohionano stretcher |
| CN114589318B (en) * | 2022-03-14 | 2023-09-15 | 苏州科技大学 | Processing method of off-axis ellipsoidal reflector |
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