CN205374850U - Transmission -type photoelectricity centering appearance - Google Patents
Transmission -type photoelectricity centering appearance Download PDFInfo
- Publication number
- CN205374850U CN205374850U CN201620106452.2U CN201620106452U CN205374850U CN 205374850 U CN205374850 U CN 205374850U CN 201620106452 U CN201620106452 U CN 201620106452U CN 205374850 U CN205374850 U CN 205374850U
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- Prior art keywords
- centering
- psd
- dimentional
- lens
- optical axis
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Abstract
Transmission -type photoelectricity centering appearance belongs to optical measurements instrument technical field. Current centering appearance centering precision haves much room for improvement to, instrument structure is more complicated. The utility model discloses an its characterized in that of transmission -type photoelectricity centering appearance, the light source, expand restraint the collimating mirror, two -dimentional PSD arranges along same optical axis in proper order, the two dimension PSD the photosensitive surface with the optical axis is perpendicular, two -dimentional PSD photosensitive surface the center with the optical axis is crossing, two -dimentional PSD and computer link, on expanding the light path of restrainting between collimating mirror and the two -dimentional PSD, perhaps set up supplementary positive lens, the rear focus of supplementary positive lens is located the center of two -dimentional PSD photosensitive surface. Centering appearance simple structure, the centering light that sends from the light source all passs through by the centering lens to on all shining two -dimentional PSD photosensitive surface, do not have beam split, areflexia in the light path, the efficiency of light energy utilization is high, and centering precision obtains improving, and the centering scope is wide, and the centering processing ease, it is efficient to feel relieved.
Description
Technical field
This utility model relates to a kind of transmission type photoelectric centrescope, it is possible to the lens in processing carry out high accuracy, high efficiency centering, belongs to optical gauge technical field.
Background technology
In the every field of Modern Optics Technology, optical gauge becomes indispensable pith.In order to make optical gauge have higher certainty of measurement, first the eccentric error of lens will strictly be limited, ensure the concordance of lens geometrical axis and system optical axis, make its resolution close to diffraction limit, especially in fields such as reconnaissance satellite camera gun, large scale integrated circuit manufacture micro camera lens, process lens and flat field apochromatism high power microscope object lens, all require that lens centering error should reach rad or micron number magnitude.This is accomplished by adopting high-precision lenses centering instrument to reduce eccentric error, required by the work efficiency of instrument, operation ease, volume and portability etc. also being had simultaneously.
Lenses centering refers to that in order to ensure the measurement measure that lens geometrical axis and light axis consistency are taked, its purpose seeks to the linearity error reduced to greatest extent between the two in the process that lens processing is glued.The patent No. is that ZL201420030695.3, name are called that a Chinese utility model patent of " the photoelectric Centering instrument adopting PSD " discloses the centring means that a kind of precision is higher.But, this device is to be realized centering by centering lens autocollimatic picture by measuring, and this makes, not only having been there is luminous reflectance by centering lens surface, but also having there is anaclasis, to cause measurement light optical energy loss, affect PSD (Position-Sensitive Detector) detection accuracy, and then reduce centering precision.Further, described prior art is because of the image quality requirement to structure, and such as aberration correction, the number of lenses of use is more, and apparatus structure is more complicated.
Utility model content
In order to simplify the structure of lenses centering device, improve centering precision, we have invented a kind of transmission type photoelectric centrescope.
The transmission type photoelectric centrescope of this utility model is characterized in that, as shown in Figure 1 and Figure 2, light source 1, beam-expanding collimation mirror 2, Two-dimensional PSD 3 are arranged in order along same optical axis;The photosurface of Two-dimensional PSD 3 is vertical with described optical axis, and the center of Two-dimensional PSD 3 photosurface is intersected with described optical axis, and Two-dimensional PSD 3 is connected with computer 4;In light path between beam-expanding collimation mirror 2 and Two-dimensional PSD 3, or auxiliary plus lens 5 is set, as in figure 2 it is shown, the rear focus of auxiliary plus lens 5 is positioned at the center of Two-dimensional PSD 3 photosurface.
This utility model its have technical effect that, for coordinating the use of the centrescope of this utility model, need to be equipped with special positioning tube 6 for optics grinding machine, as shown in Figure 1 and Figure 2, in the process for being felt relieved by centering lens 7, the centrescope of installation and debugging this utility model, make in the positioning tube 6 light path between beam-expanding collimation mirror 2 and Two-dimensional PSD 3, if described centrescope employs auxiliary plus lens 5, then in the positioning tube 6 light path between beam-expanding collimation mirror 2 and auxiliary plus lens 5.The centering light sent from light source 1 is via, after beam-expanding collimation mirror 2 beam-expanding collimation, being irradiated to Two-dimensional PSD 3 photosurface, centering light hot spot center of gravity and described photosurface center superposition through positioning tube 6.Positioning tube 6 one end will be glued at by centering lens 7.If being plus lens by centering lens 7, then in centrescope, it is not provided with auxiliary plus lens 5, as shown in Figure 1.Centering light transmission positioning tube 6 and be irradiated on Two-dimensional PSD 3 photosurface after centering lens 7, first adjust positioning tube 6 in a direction parallel to the optical axis, until being read, by computer 4, signal of feeling relieved the most by force, whole positioning tube 6 is raised again in the direction vertical with optical axis, until centering signal comes from Two-dimensional PSD 3 photosurface center the most by force described in computer 4 judges, so far complete by the centering of centering lens 7.If being minus lens by centering lens 7, then auxiliary plus lens 5 is set in centrescope, as shown in Figure 2.Repeat described centering adjustment process, complete by the centering of centering lens 7.
Visible, compared to prior art, adopting the centrescope of this utility model for be felt relieved by centering lens 7, the whole transmission of centering light sent from light source 1 is by centering lens 7, and full illumination is to Two-dimensional PSD 3 photosurface, in the optical path without light splitting, areflexia, the efficiency of light energy utilization is high, contributes to the raising of centering precision and wide ranges of feeling relieved, as radius of curvature be R felt relieved scope in the scope of+∞ >=R >=-∞ by centering lens 7, centering precision can reach 1 μm.It addition, from the composition of the centrescope of this utility model and structure, structure is substantially simple, and, processing ease of feeling relieved, centering efficiency is high.
Accompanying drawing explanation
Fig. 1 is the transmission type photoelectric centrescope structure of this utility model and is plus lens centering process schematic diagram.Fig. 2 is that the transmission type photoelectric centrescope of this utility model arranges the structure after auxiliary plus lens and for minus lens centering process schematic diagram, and this figure is simultaneously as Figure of abstract.
Detailed description of the invention
As shown in Figure 1 and Figure 2, light source 1, beam-expanding collimation mirror 2, Two-dimensional PSD 3 are arranged in order the transmission type photoelectric centrescope of this utility model along same optical axis.Described light source 1 adopts the He-Ne Lasers light source of wavelength 632.8nm.Described beam-expanding collimation mirror 2 is Galilean type beam-expanding collimation mirror, it is made up of a piece of input minus lens and a piece of output plus lens, minus lens focal length is-15mm, material is the optical glass of the ZF2 trade mark, plus lens focal length is 60mm, and material is the optical glass of the K9 trade mark, and expanding multiple is 4 times, centering optical beam spot diameter after beam-expanding collimation is 5mm, and the hot spot angle of divergence is 0.003mrad.The photosurface of Two-dimensional PSD 3 is vertical with described optical axis, and the center of Two-dimensional PSD 3 photosurface is intersected with described optical axis, and Two-dimensional PSD 3 is connected with computer 4;In light path between beam-expanding collimation mirror 2 and Two-dimensional PSD 3, or auxiliary plus lens 5 is set, as in figure 2 it is shown, the rear focus of auxiliary plus lens 5 is positioned at the center of Two-dimensional PSD 3 photosurface.Described auxiliary plus lens 5 adopts the plus lens that spherical aberration is less.This centrescope can be radius of curvature R lenses centering in the scope of+∞ >=R >=-∞, and centering precision can reach 1 μm.
Claims (3)
1. a transmission type photoelectric centrescope, it is characterised in that light source (1), beam-expanding collimation mirror (2), Two-dimensional PSD (3) are arranged in order along same optical axis;The photosurface of Two-dimensional PSD (3) is vertical with described optical axis, and the center of Two-dimensional PSD (3) photosurface is intersected with described optical axis, and Two-dimensional PSD (3) is connected with computer (4);In light path between beam-expanding collimation mirror (2) and Two-dimensional PSD (3), or arranging auxiliary plus lens (5), the rear focus of auxiliary plus lens (5) is positioned at the center of Two-dimensional PSD (3) photosurface.
2. transmission type photoelectric centrescope according to claim 1, it is characterised in that described light source (1) adopts the He-Ne Lasers light source of wavelength 632.8nm.
3. transmission type photoelectric centrescope according to claim 1, it is characterized in that, described beam-expanding collimation mirror (2) is Galilean type beam-expanding collimation mirror, minus lens focal length therein is-15mm, plus lens focal length therein is 60mm, expanding multiple is 4 times, and the spot diameter after beam-expanding collimation is 5mm, and the hot spot angle of divergence is 0.003mrad.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201620106452.2U CN205374850U (en) | 2016-02-02 | 2016-02-02 | Transmission -type photoelectricity centering appearance |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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CN201620106452.2U CN205374850U (en) | 2016-02-02 | 2016-02-02 | Transmission -type photoelectricity centering appearance |
Publications (1)
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CN205374850U true CN205374850U (en) | 2016-07-06 |
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Family Applications (1)
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CN201620106452.2U Expired - Fee Related CN205374850U (en) | 2016-02-02 | 2016-02-02 | Transmission -type photoelectricity centering appearance |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111077627A (en) * | 2019-12-27 | 2020-04-28 | 焦作天裕精密光学有限公司 | Rapid centering gluing device and method for micro lens |
CN113093399A (en) * | 2020-01-08 | 2021-07-09 | 三营超精密光电(晋城)有限公司 | Lens assembling device and lens assembling method |
-
2016
- 2016-02-02 CN CN201620106452.2U patent/CN205374850U/en not_active Expired - Fee Related
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111077627A (en) * | 2019-12-27 | 2020-04-28 | 焦作天裕精密光学有限公司 | Rapid centering gluing device and method for micro lens |
CN113093399A (en) * | 2020-01-08 | 2021-07-09 | 三营超精密光电(晋城)有限公司 | Lens assembling device and lens assembling method |
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Legal Events
Date | Code | Title | Description |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160706 Termination date: 20170202 |