Summary of the invention
The object of the invention is to use the problem of the focusing of the large-caliber laser of wedge-shaped lens and frequency conversion system accurate off-line dress calibration method to realize. and then provide the focusing of a kind of wedge-shaped lens large-aperture optical to fill calibration method with the off-line of frequency conversion system.
Technical scheme of the present invention is: it is as follows that wedge-shaped lens large-aperture optical focuses on the concrete steps filling calibration method with the off-line of frequency conversion system:
The installation of step one, base modules and gravity compensation module,
Base modules and gravity compensation module are arranged on respectively end and the head end of support platform;
Step 2, adjustment incident light axis,
Adjustment is arranged on the position of the second interior focusing autocollimator adjusting seat on the ordinary optical platform of support platform right-hand member, make to be arranged on the centre normal of the second interior focusing autocollimator in the second interior focusing autocollimator adjusting seat by the second reference mirror, namely the axis of the second interior focusing autocollimator is vertical with the second reference mirror and by the crosshair center of the second reference mirror, due to axis and the incident light axis line parallel of the second interior focusing autocollimator, namely the axis of the second interior focusing autocollimator is incident light axis;
Step 3, adjustment emergent light optical axis,
Adjustment is arranged on the position of the first interior focusing autocollimator adjusting seat on the ordinary optical platform of support platform right-hand member, make to be arranged on the centre normal of the first interior focusing autocollimator in the first interior focusing autocollimator adjusting seat by the first reference mirror, namely the axis of the first interior focusing autocollimator is vertical with the first reference mirror and by the crosshair center of the first reference mirror, axis due to the first interior focusing autocollimator is that large-aperture optical focuses on the wedge-shaped lens optical axis with frequency conversion system, and namely the axis of the first interior focusing autocollimator is emergent light optical axis;
Step 4, large-aperture optical focus on and one end of frequency conversion system and the installation of base modules,
Angle transfer flange in base modules is arranged on pivot flange, and is located by seam between pivot flange and angle transfer flange, large-aperture optical focusing is installed to angle with one end of frequency conversion system by screw and shifts on flange:
The installation of step 5, wedge-shaped lens,
The wedge-shaped lens assembled by ray machine is put into large-aperture optical and is focused on in the focus module in frequency conversion system, and by wedge-shaped lens positioning and locking;
Step 6, large-aperture optical focus on and the other end of frequency conversion system and the installation of gravity compensation module,
By the handwheel on rotary gravity compensating module, make the top nail joint of gravity compensation module touch large-aperture optical and focus on the bottom surface with the locating flange on frequency conversion system, then slowly handwheel is rotated, while rotating handwheel, observe the reading of force cell, stop operating when the reading of force cell is setting compensation power numerical value handwheel;
The dead axle of step 7, wedge-shaped lens,
The axis based error between wedge-shaped lens and the first reference mirror is observed by the first interior focusing autocollimator, focused on and the adjusting mechanism on frequency conversion system by adjustment large-aperture optical again, large-aperture optical is focused on and the optical axis axis of the wedge-shaped lens on frequency conversion system and the dead in line of emergent light optical axis, thus realizes the dead axle of wedge-shaped lens;
The installation of step 8, I type frequency inverted crystal,
By I type quite rate conversion crystal be inserted into large-aperture optical focus on frequency conversion system inner focusing module on the right side of frequency translation module on, and by I type frequency inverted crystal positioning and locking;
Step 9, by the position of I type frequency inverted crystal make zero,
The axis based error between I type frequency inverted crystal and the second reference mirror is observed by the second interior focusing autocollimator, the attitude adjusting I type frequency inverted crystal with frequency conversion system is focused on again by large-aperture optical, make the dead in line of I type frequency inverted crystal and the second reference mirror, and recording current location, described current location is the zero-bit of I type frequency inverted crystal;
Step 10, extract I type frequency inverted crystal or I type frequency inverted crystal is deflected into the plus or minus extreme position on frequency translation module, avoid its reflected light to disturb the detection of other frequency inverted crystal, so far complete the off-line dress school of I type frequency inverted crystal;
The installation of step 11, the one II type frequency inverted crystal,
One II type frequency inverted crystal is inserted into large-aperture optical to focus on on the frequency translation module in frequency conversion system, and by the one II type frequency inverted crystal positioning and locking;
Step 12, to be made zero in the position of the one II type frequency inverted crystal, the axis based error between the one II type frequency inverted crystal and the second reference mirror is observed by the second interior focusing autocollimator, the attitude adjusting the one II type frequency inverted crystal with frequency conversion system is focused on again by large-aperture optical, the axis of the one II type frequency inverted crystal and the second reference mirror is extended close, and recording current location, described current location is the zero-bit of the one II type frequency inverted crystal;
Step 13, extract the one II type frequency inverted crystal or the one II type frequency inverted crystal is deflected into the plus or minus extreme position on frequency translation module, avoid its reflected light to disturb the detection of other frequency inverted crystal, so far complete the off-line dress school of the one II type frequency inverted crystal;
The installation of step 14, the 2 II type frequency inverted crystal,
2 II type frequency inverted crystal is inserted into large-aperture optical to focus on on the frequency translation module in frequency conversion system, and by the 2 II type frequency inverted crystal positioning and locking;
Step 15, by the position of the 2 II type frequency inverted crystal make zero,
The axis based error between the 2 II type frequency inverted crystal and the second reference mirror is observed by the second interior focusing autocollimator, the attitude adjusting the 2 II type frequency inverted crystal with frequency conversion system is focused on again by large-aperture optical, make the dead in line of the 2 II type frequency inverted crystal and the second reference mirror, and recording current location, described current location is the zero-bit of the 2 II type frequency inverted crystal;
Step 10 six, extract the 2 II type frequency inverted crystal or the 2 II type frequency inverted crystal is deflected into the plus or minus extreme position on frequency translation module, avoid its reflected light to disturb the detection of other frequency inverted crystal, so far complete the off-line dress school of the 2 II type frequency inverted crystal;
Step 10 seven, successively I type frequency inverted crystal, the one II type frequency inverted crystal and the 2 II type frequency inverted crystal are reset to respective zero-bit, so far, complete wedge-shaped lens large-aperture optical and to focus on and the off-line of frequency conversion system fills school;
The reading of force cell 20 stops operating when being setting compensation power numerical value handwheel 21; The computing formula of setting compensation power numerical value is: F=M.g.L (l-cos B)/L ', in formula, M is the quality of optical focus and frequency conversion system, g is acceleration of gravity 9.8m/s2, B be optical focus and frequency conversion system real work attitude time and the angle of horizontal direction, L ' shifts the distance of flange 11 end face for gravity compensation module 3 axle center and angle;
In step 7 dead axle complete after wedge-shaped lens 32 and the first reference mirror 13 between axis angle error be less than 10 rads, the axial location error between wedge-shaped lens 32 and the first reference mirror 13 is less than 0.2mm;
Axis angle error between the zero-bit of the I type frequency inverted crystal 29 measured in step 9 and the second reference mirror 15 is less than 10 rads;
Axis angle error between the zero-bit of the one II type frequency inverted crystal 30 measured in step 12 and the second reference mirror 15 is less than 10 rads;
Axis angle error between the zero-bit of the 2 II type frequency inverted crystal 31 measured in step 15 and the second reference mirror 15 is less than 10 rads.
The present invention compared with prior art has following effect:
1. the present invention adopts precision machined angle to shift the mechanical references of flange and the focusing of reference mirror determination large-aperture optical and frequency conversion system, the benchmark of incident light axis and emergent light axis is set up based on mechanical references, i.e. the first interior focusing autocollimator and the second interior focusing autocollimator, not only achieve the focusing of a kind of wedge-shaped lens large-aperture optical and walk axle with frequency conversion system, also achieve the efficient batch dress school of off-line.
2. accurate off-line dress calibration method of the present invention is achieved in that
Because large-aperture optical focusing and frequency conversion system are not horizontality when reality uses, but there is certain angle with horizontality.The effect of gravity compensation module compensates large-aperture optical to focus on and uses and accurate impact fill gravity under the attitude of two kinds, school and be out of shape it in reality with frequency conversion system, thus raising fills school precision.The calculating of the output setting compensation power of gravity compensation module: F=M.g.L (l-cosB)/L ', in formula, M is the quality of optical focus and frequency conversion system, g is acceleration of gravity 9.8m/s2, B be optical focus and frequency conversion system real work attitude time and the angle of horizontal direction, L ' shifts the distance of flange (11) end face for gravity compensation module (3) axle center and angle.Off-line dress school accurately can be obtained through above-mentioned calculating.
Embodiment
Embodiment one: present embodiment is described in conjunction with 1-Fig. 3, the concrete steps of the off-line dress calibration method of present embodiment are as follows:
The installation of step one, base modules 2 and gravity compensation module 3,
Base modules 2 and gravity compensation module 3 are arranged on respectively end and the head end of support platform l;
The whole incident light axis of step 2, word,
Adjustment is arranged on the position of the second interior focusing autocollimator adjusting seat 9 on the ordinary optical platform 5 of support platform 1 right-hand member, make to be arranged on the centre normal of the second interior focusing autocollimator 8 in the second interior focusing autocollimator adjusting seat 9 by the second reference mirror 15, namely the axis of the second interior focusing autocollimator 8 is vertical with the second reference mirror 15 and by the crosshair center of the second reference mirror 15, due to axis and the incident light axis line parallel of the second interior focusing autocollimator 8, namely the axis of the second interior focusing autocollimator 8 is incident light axis;
Step 3, adjustment emergent light optical axis,
Adjustment is arranged on the position of the first interior focusing autocollimator adjusting seat 7 on the ordinary optical platform 5 of support platform 1 right-hand member, make to be arranged on the centre normal of the first interior focusing autocollimator 6 in the first interior focusing autocollimator adjusting seat 7 by the first reference mirror 13, namely the axis of the first interior focusing autocollimator 6 is vertical with the first reference mirror 13 and by the crosshair center of the first reference mirror 13, axis due to the first interior focusing autocollimator 6 is that large-aperture optical focuses on the wedge-shaped lens optical axis with frequency conversion system 4, namely the axis of the first interior focusing autocollimator 6 is emergent light optical axis,
Step 4, large-aperture optical focus on and one end of frequency conversion system 4 and the installation of base modules 2,
Angle transfer flange 11 in base modules 2 is arranged on pivot flange 10, and located by seam between pivot flange 10 and angle transfer flange 11, large-aperture optical focusing is installed to angle with one end of frequency conversion system 4 by screw and shifts on flange 11:
The installation of step 5, wedge-shaped lens 32,
The wedge-shaped lens 32 assembled by ray machine is put into large-aperture optical and is focused on on the focusing mould Jia 25 in frequency conversion system 4, and by wedge-shaped lens 32 positioning and locking;
Step 6, large-aperture optical focus on and the other end of frequency conversion system 4 and the installation of gravity compensation module 3,
By the handwheel 21 on rotary gravity compensating module 3, the item nail 19 contact large-aperture optical of gravity compensation module 3 is made to focus on the bottom surface with the locating flange 37 on frequency conversion system 4, then slowly handwheel 21 is rotated, while rotating handwheel 21, observe the reading of force cell 20, stop operating when the reading of force cell 20 is setting compensation power numerical value handwheel 21:
The dead axle of step 7, wedge-shaped lens 32,
The axis based error between wedge-shaped lens (32) and the first reference mirror (13) is observed by the first interior focusing autocollimator (6), focused on and the adjusting mechanism on frequency conversion system 4 by adjustment large-aperture optical again, large-aperture optical is focused on and the optical axis axis of the wedge-shaped lens 32 on frequency conversion system 4 and the dead in line of emergent light optical axis, thus realizes the dead axle of wedge-shaped lens 32;
The installation of step 8, I type frequency inverted crystal 29,
I type frequency inverted crystal 29 is inserted on the frequency translation module 26 on the right side of large-aperture optical focusing and frequency conversion system 4 inner focusing module 25, and by I type frequency inverted crystal 29 positioning and locking;
Step 9, by the position of I type frequency inverted crystal 29 make zero,
Sunlight axis based error between I type frequency inverted crystal 29 and the second reference mirror 15 is observed by the second interior focusing autocollimator 8, the attitude adjusting I type frequency inverted crystal 29 with frequency conversion system 4 is focused on again by large-aperture optical, make the dead in line of I type frequency inverted crystal 29 and the second reference mirror 15, and recording current location, described current location is the zero-bit of I type frequency inverted crystal 29;
Step 10, extract I type frequency inverted crystal 29 or I type frequency inverted crystal 29 is deflected into the plus or minus extreme position on frequency translation module 26, avoid its reflected light to disturb the detection of other frequency inverted crystal, so far complete the off-line dress school of I type frequency inverted crystal 29;
The installation of step 11, the one II type frequency inverted crystal 30,
One II type frequency inverted crystal 30 is inserted into large-aperture optical to focus on on the frequency translation module 26 in frequency conversion system 4, and by the one II type frequency inverted crystal 30 positioning and locking;
Step 12, by the position of the one II type frequency inverted crystal 30 make zero,
The axis based error between the one II type frequency inverted crystal 30 and the second reference mirror 15 is observed by the second interior focusing autocollimator 8, the attitude adjusting the one II type frequency inverted crystal 30 with frequency conversion system 4 is focused on again by large-aperture optical, make the dead in line of the one II type frequency inverted crystal 30 and the second reference mirror 15, and recording current location, described current location is the zero-bit of the one II type frequency inverted crystal 30;
Step 13, the plus or minus extreme position extracted the one II type frequency inverted crystal 30 or the one II type frequency inverted crystal 30 is deflected on frequency translation module 26, avoid its reflected light to disturb the detection of other frequency inverted crystal, so far complete the off-line dress school of the one II type frequency inverted crystal 30;
The installation of step 14, the 2 II type frequency inverted crystal 31,
2 II type frequency inverted crystal 31 is inserted into large-aperture optical to focus on on the frequency translation module 26 in frequency conversion system 4, and by the 2 II type frequency inverted crystal 31 positioning and locking;
Step 15, by the position of the 2 II type frequency inverted crystal 31 make zero,
The axis based error between the 2 II type frequency inverted crystal 31 and the second reference mirror 15 is observed by the second interior focusing autocollimator 8, the attitude adjusting the second u-shaped frequency inverted crystal 31 with frequency conversion system 4 is focused on again by large-aperture optical, make the dead in line of the 2 II type frequency inverted crystal 31 and the second reference mirror 15, and recording current location, described current location is the zero-bit of the 2 II type frequency inverted crystal 31;
Step 10 six, the plus or minus extreme position extracted the 2 II type frequency inverted crystal 31 or the 2 II type frequency inverted crystal 31 is deflected on frequency translation module 26, avoid its reflected light to disturb the detection of other frequency inverted crystal, so far complete the off-line dress school of the 2 II type frequency inverted crystal 31;
Step 10 seven, successively I type frequency inverted crystal the 29, the 1 type frequency inverted crystal the 30 and the 2 II type frequency inverted crystal 31 is reset to respective zero-bit, so far, complete wedge-shaped lens large-aperture optical and to focus on and the off-line of frequency conversion system fills school;
The reading of force cell 20 stops operating when being setting compensation power numerical value handwheel 21; The computing formula of setting compensation power numerical value is: F=M.g.L (l-cos B)/L ', in formula, M is the quality of optical focus and frequency conversion system, g is acceleration of gravity 9.8m/s2, B be optical focus and frequency conversion system real work attitude time and the angle of horizontal direction, L ' shifts the distance of flange 11 end face for gravity compensation module 3 axle center and angle;
In step 7 dead axle complete after wedge-shaped lens 32 and the first reference mirror 13 between axis angle error be less than 10 rads, the axial location error between wedge-shaped lens 32 and the first reference mirror 13 is less than 0.2mm;
Axis angle error between the zero-bit of the I type frequency inverted crystal 29 measured in step 9 and the second reference mirror 15 is less than 10 rads;
Axis angle error between the zero-bit of the one II type frequency inverted crystal 30 measured in step 12 and the second reference mirror 15 is less than 10 rads;
Axis angle error between the zero-bit of the 2 II type frequency inverted crystal 31 measured in step 15 and the second reference mirror 15 is less than 10 rads.
Embodiment two: composition graphs l and Fig. 2 illustrates present embodiment, it is 6r/min that the speed of wheel 21 is started in the step 6 transfer of present embodiment, the hand that stops operating when the reading of force cell 20 is 18N spokeless wheel 21.Setting like this, is convenient to find accurately numerical value required on force cell 20, and is now large-aperture optical focusing and the optimum positional relationship between frequency conversion system 4 and gravity compensation module 3.Other composition is identical with embodiment one with annexation.
Embodiment three: composition graphs l illustrates present embodiment, with the handwheel 21 on the speed rotary gravity compensating module 3 of 5r/min when measuring the pressure of I type frequency inverted crystal 29 in present embodiment step 9, stop operating when the reading of force cell 20 is 11N handwheel 21.Setting like this, is convenient to find accurately numerical value required on force cell 20, is convenient to the accurate location of I type frequency inverted crystal 29 simultaneously.Other composition is identical with embodiment two with annexation.
Embodiment four: composition graphs l illustrates present embodiment, the axis based error between the I type frequency inverted crystal 29 recorded in the step 10 of present embodiment and the second reference mirror 15 is 0.2mm.Setting like this, error is little, is convenient to zero, and dress school precision is high.Other composition is identical with embodiment three with annexation.
Embodiment five: composition graphs 1 illustrates present embodiment, with the handwheel 21 on the speed rotary gravity compensating module 3 of 4r/min in the step 13 of present embodiment, stop operating when the reading of force cell 20 is 12N handwheel 21.Setting like this, is convenient to find accurately numerical value required on force cell 20.Other composition is identical with embodiment four with annexation.
Embodiment six: composition graphs 2-Fig. 3 illustrates present embodiment, the axis based error between the one II type frequency inverted crystal 30 measured in the step 14 of present embodiment and the second reference mirror 15 is 0.4mm.Setting like this, error is little, is convenient to zero, and dress school precision is high.Other composition is identical with embodiment five with annexation.
Embodiment seven: composition graphs 2-Fig. 3 illustrates present embodiment, with the handwheel 21 on the speed rotary gravity compensating module 3 of 6r/min in the step 10 seven of present embodiment, stop operating when the reading of force cell 20 is 13N handwheel 21.Setting like this, is convenient to find accurately numerical value required on force cell 20.Other composition is identical with embodiment six with annexation.
Embodiment eight: composition graphs 1-Fig. 3 illustrates present embodiment, the axis based error between the 2 II type frequency inverted crystal 31 measured in the step 10 eight of present embodiment and the second reference mirror 15 is 0.Imm.Setting like this, error is little, is convenient to zero, and dress school precision is high.Other composition is identical with concrete real Ni mode seven with annexation.
Embodiment nine: composition graphs 3 illustrates present embodiment, the optical focus of present embodiment comprises locating flange 37 in frequency conversion system 4, transitional module 24, focus module 25, frequency translation module 26, window module 27, vacuum window 28, I type frequency inverted crystal 29, one II type frequency inverted crystal 30, 2 II type frequency inverted crystal 31, wedge-shaped lens 32, BSG element 33, CPP element 34, vacuum insulation sheet 35 and shielding sheet 36, locating flange 37, transitional module 24, focus module 25, frequency translation module 26 and window module 27 set gradually from left to right, and from light path incident direction, optical element is arranged from right to left and is followed successively by vacuum window 28, I type frequency inverted crystal 29, one II type frequency inverted crystal 30, 2 II type frequency inverted crystal 31, wedge-shaped lens 32, BSG element 33, CPP element 34, vacuum insulation sheet 35 and shielding sheet 36, wherein, vacuum window 28 is arranged on window module 27, I type frequency inverted crystal 29, one II type frequency inverted crystal the 30 and the 2 II type frequency inverted crystal 31 is arranged on frequency translation module 26, wedge-shaped lens 32, BSG element 33, CPP element 34, vacuum insulation sheet 35 and shielding sheet 36 are arranged in focus module 25.Setting like this, is convenient to the attitude adjusting wedge-shaped lens 32, I type frequency inverted crystal the 29, the 1 type frequency inverted crystal the 30 and the 2 II type frequency inverted crystal 31 accurately, meets they and the relation between incident million axles and emergent light axis.Other composition is identical with embodiment one or eight with annexation.Inventor BSG (grating sampling) element 33 and CPP (continuous phase board) element 34 please be replaced to the optical element of corresponding Chinese.
Embodiment ten: composition graphs 3 illustrates present embodiment, the incident light axis of present embodiment is perpendicular to I type frequency inverted crystal the 29, the 1 type frequency inverted crystal the 30 and the 2 II type frequency inverted crystal 31, emergent light axis is vertical and by the center of locating flange 37, the angle between incident light axis and emergent light axis is 3.96.。Setting like this, effectively ensure that the location of optical element is more accurate.Other composition is identical with embodiment nine with annexation.