CN106679595B - The centre deviation of angle of wedge spherical lens and the measurement method of the angle of wedge - Google Patents

The centre deviation of angle of wedge spherical lens and the measurement method of the angle of wedge Download PDF

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Publication number
CN106679595B
CN106679595B CN201611246981.3A CN201611246981A CN106679595B CN 106679595 B CN106679595 B CN 106679595B CN 201611246981 A CN201611246981 A CN 201611246981A CN 106679595 B CN106679595 B CN 106679595B
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angle
wedge
collimator
axis
spherical lens
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CN106679595A (en
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王卫华
李宝华
林俊辉
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FUZHOU HUAYOU OPTICAL INSTRUMENT Co Ltd
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FUZHOU HUAYOU OPTICAL INSTRUMENT Co Ltd
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/26Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
    • G01B11/27Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes
    • G01B11/272Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes using photoelectric detection means
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/26Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

The present invention provides the centre deviation and angle of wedge detector of a kind of angle of wedge spherical lens, including upper axis electric lifting platform, upper axis photoelectric auto-collimator, two-dimentional motorized precision translation stage, equipment base, fixed frame, lower axle photoelectric auto-collimator, lower axle electric lifting platform, control cabinet, data collector, light source, the first fibre-optic catheter, the second fibre-optic catheter and computer;Upper axis photoelectric auto-collimator is equipped with first light source incidence end and the first output end of image, lower axle photoelectric auto-collimator is equipped with second light source incidence end and the second output end of image, upper axis electric lifting platform is equipped with the first control connecting pin and the first Z axis data output end, lower axle electric lifting platform is equipped with the second control connecting pin and the second Z axis data output end, and two-dimentional motorized precision translation stage is equipped with the first XY axis data output end, the 2nd XY axis data output end and third and controls connecting pin.The present invention also provides the measurement methods of a kind of centre deviation of angle of wedge spherical lens and the angle of wedge, are used to measuring center deviation and the angle of wedge.

Description

The centre deviation of angle of wedge spherical lens and the measurement method of the angle of wedge
Technical field
The present invention relates to the centre deviations and the angle of wedge of technical field of optical detection more particularly to a kind of angle of wedge spherical lens Measurement method.
Background technique
In optical theory, the coaxiality of optical element is the premise and foundation of most of optical theories.But due to reality The limitation of the lens production processes and working condition on border can generate certain quality in lens processing, gluey or edging procedure It is inclined to generate center to destroy coaxial condition for defect.
Center has not only broken up the theoretical basis of perfect optics partially, causes the decline of optical system imaging quality, Er Qie Measurement of the lens measuring device to other optical parameters is affected to a certain extent.Therefore, the inclined correlation theory in research center, and Reasonable efficiently measurement method is formulated, is had great importance to lens production and detection.
For spherical optical lens, the optical axis i.e. line of the centre of sphere of two spherical surfaces.Machine center axis is exactly lens installation The symmetry axis of position.The spherical surface that wedge-shaped spherical lens (being also off-axis lens) refers to that theoretical optical axis and machine center axis are not overlapped is saturating Mirror, the angle of wedge refer to the angle of optical axis and reference axis, wherein reference axis can for machine center axis or wedge-shaped spherical lens one of them The optical axis in face.Traditional eccentricity measuring devices are unable to satisfy the angle of wedge measurement of this special lenses.
Traditional optical precision instrument composition only includes optical system and precision mechanical system mostly, and not there are many complicated The participation of circuit, such as electrooptical device CCD, displacement sensor grating scale, wherein also lack computer software later image Correcting process, the real-time display of intelligentized calculation processing and digitized image.The operation of non intelligentization makes it to detection The operation level requirement of personnel is relatively high, so as to cause there are the measurement errors that part human factor generates.
Summary of the invention
One of the technical problem to be solved in the present invention is to provide centre deviation and the angle of wedge inspection of a kind of angle of wedge spherical lens Instrument is surveyed, for the centre deviation and the angle of wedge of measuring wedge angle spherical lens.
One of problem of the invention is achieved in that
A kind of centre deviation and angle of wedge detector of angle of wedge spherical lens, including axis electric lifting platform on one, axis light on one Electric autocollimator, a two-dimentional motorized precision translation stage, an equipment base, a fixed frame, a lower axle photoelectric auto-collimator, lower axle electricity Dynamic lifting platform, a control cabinet, a data collector, a light source, one first fibre-optic catheter, one second fibre-optic catheter and a computer;
The upper axis photoelectric auto-collimator is equipped with a first light source incidence end and one first output end of image, the lower axle Photoelectric auto-collimator is equipped with a second light source incidence end and one second output end of image, and the upper axis electric lifting platform is equipped with One first control connecting pin and one first Z axis data output end, the lower axle electric lifting platform are equipped with one second control connection End and one second Z axis data output end, the two dimension motorized precision translation stage are equipped with one the oneth XY axis data output end, one the 2nd XY Axis data output end and a third control connecting pin;
The equipment base is fixed at the top of the fixed frame, and the two dimension motorized precision translation stage is fixed on the equipment base Seat top, the two dimension motorized precision translation stage is equipped with one and places mouth, for placing angle of wedge spherical lens to be measured, the equipment base It is equipped with a through-hole opposite with the placement mouth;The upper axis electric lifting platform and the lower axle electric lifting platform are relatively solid The two sides up and down of the equipment base are scheduled on, the upper axis photoelectric auto-collimator is fixed on the upper axis electric lifting platform, institute Lower axle photoelectric auto-collimator is stated to be fixed on the lower axle electric lifting platform, the upper axis photoelectric auto-collimator, the placement mouth, The through-hole and the lower axle photoelectric auto-collimator are arranged in a straight line;
The first light source incidence end is connected to the light source by first fibre-optic catheter, and the second light source is incident End is connected to the light source by second fibre-optic catheter;It is described first control connecting pin, it is described second control connecting pin and Third control connecting pin passes through the control cabinet and is connected with the computer;The first XY axis data output end, institute It states the first Z axis data output end, the 2nd XY axis data output end and the second Z axis data output end and passes through the number It is connected according to collector with the computer;The first image output end and second output end of image pass through communication bus It is connected with the computer.
It further, further include a sample clamping adjuster, the sample clamping adjuster is fixed on the placement mouth Side, for clamping angle of wedge spherical lens to be measured.
Further, the data collector is digital display meter.
The second technical problem to be solved by the present invention is to provide the centre deviation and the angle of wedge of a kind of angle of wedge spherical lens Measurement method, for the centre deviation and the angle of wedge of measuring wedge angle spherical lens.
The two of problem of the invention, are achieved in that
A kind of centre deviation of angle of wedge spherical lens and the measurement method of the angle of wedge, the measurement method needs to provide above-mentioned A kind of centre deviation and angle of wedge detector of angle of wedge spherical lens, the measurement method specifically comprise the following steps:
Step 1, in the case where not placing angle of wedge spherical lens to be measured, according to the radius of curvature of angle of wedge spherical lens to be measured Corresponding object lens are selected, object lens are separately mounted to the upper axis photoelectric auto-collimator and the lower axle photoelectric auto-collimator On;
The light that step 2, the light source issue enters institute through first fibre-optic catheter and second fibre-optic catheter respectively Axis photoelectric auto-collimator and the lower axle photoelectric auto-collimator are stated, the computer controls the upper axis electricity by the control cabinet Dynamic lifting platform and the lower axle electric lifting platform, so that the upper axis photoelectric auto-collimator and the lower axle photoelectric auto-collimator exist , there is cross picture on the display area of the computer in Z-direction movement, carries out initial calibration;
Step 3 puts angle of wedge spherical lens to be measured in the placement mouth, and the computer controls institute by the control cabinet Axis electric lifting platform is stated, so that the upper axis photoelectric auto-collimator moves to table on angle of wedge spherical lens to be measured in Z-direction The curvature center in face finds the center of curvature picture of upper surface;
Step 4, the computer control the lower axle electric lifting platform by the control cabinet, so that the lower axle photoelectricity is certainly Collimator moves to the center of curvature of angle of wedge spherical lens to be measured lower surface in Z-direction, finds the radius of curvature picture of lower surface;
Step 5, the computer control the two-dimentional motorized precision translation stage in the movement of XY axis direction, to adjust by the control cabinet The position of angle of wedge spherical lens to be measured is saved, so that the curvature of the center of curvature picture of angle of wedge spherical lens to be measured upper surface and lower surface Middle imago is respectively positioned in the display area of the computer;
Step 6, the computer acquired according to the upper axis photoelectric auto-collimator and the lower axle photoelectric auto-collimator ten Word picture and the upper axis electric lifting platform, the lower axle electric lifting platform and the collected position of the two-dimentional motorized precision translation stage Data, respectively to the coordinate O1 (x of the center point O1 of angle of wedge spherical lens to be measured upper surface1, y1, z1) and lower surface center point Coordinate O2 (the x of the position O22, y2, z2) handled, and according to formula:Meter Calculate the centre of sphere distance d of O1 and O2;Then according to formula:
Obtain the numerical value of wedge angle;
Wherein, Φ is outer diameter known to angle of wedge spherical lens to be measured, R1For the curvature of angle of wedge spherical lens to be measured upper surface Radius, R2For the radius of curvature of angle of wedge spherical lens to be measured lower surface.
The present invention has the advantages that the composite can be widely applied to centre deviation in wedge-shaped spherical lens process and Angle of wedge measurement takes into account rectangular cylindrical lens and the measurement of spherical lens centre deviation, asymmetric rectangular cylindrical lens and spherical lens Centre deviation measurement.Compared with traditional optical detection device, the present invention utilizes upper axis photoelectric auto-collimator and lower axle photoelectric auto It high-precision industrial CCD imaging sensor and is acquired imaging position in conjunction with software in straight instrument and calculates, it is coaxial with two On the basis of photoelectric auto-collimator, in conjunction with precise 2-D motorized precision translation stage and grating scale, two curved surface of precise measurement wedge shape spherical lens Sphere center position, thus to two centre ofs sphere of wedge-shaped spherical lens away from and the angle of wedge calculate, largely avoid in measurement process The influence of operator's self-condition substantially increases the accuracy and reliability of measurement.
Detailed description of the invention
The present invention is further illustrated in conjunction with the embodiments with reference to the accompanying drawings.
Fig. 1 is a kind of centre deviation of angle of wedge spherical lens of the present invention and the structural schematic diagram of angle of wedge detector.
Fig. 2 is that sample clamps adjuster, two in the present invention a kind of centre deviation and angle of wedge detector of angle of wedge spherical lens Tie up the concrete structure schematic diagram of motorized precision translation stage and equipment base.
Fig. 3 is the connection signal of section ports in the present invention a kind of centre deviation and angle of wedge detector of angle of wedge spherical lens Figure.
Fig. 4 is wedge-shaped spherical lens in a kind of centre deviation of angle of wedge spherical lens of the present invention and the measurement method of the angle of wedge Structural schematic diagram.
Fig. 5 is the measuring principle signal of a kind of centre deviation of angle of wedge spherical lens of the present invention and the measurement method of the angle of wedge Figure.
Figure label explanation:
The upper axis electric lifting platform of 1-, the upper axis photoelectric auto-collimator of 2-, 3- sample clamp adjuster, 4- two dimension electric translation Platform, 41- place mouth, 5- equipment base, 51- through-hole, 6- fixed frame, 7- lower axle photoelectric auto-collimator, 8- lower axle electric up-down Platform, 9- control cabinet, 10- data collector, 11- light source, the first fibre-optic catheter of 12-, the second fibre-optic catheter of 13-, 14- computer, 15- Angle of wedge spherical lens;
A- first light source incidence end, the first output end of image of B-, C- second light source incidence end, the second output end of image of D-, E- first controls connecting pin, the first Z axis of F- data output end, the control of G- second connecting pin, the second Z axis of H- data output end, I- First XY axis data output end, the 2nd XY axis data output end of J-, K- third control connecting pin.
Specific embodiment
To be clearer and more comprehensible the present invention, now with a preferred embodiment, and attached drawing is cooperated to be described in detail below.
The centre deviation and angle of wedge detector of a kind of angle of wedge spherical lens of the invention can use vertical structure or sleeping Formula structure is illustrated below with vertical structure.
Shown in please referring to Fig.1 to Fig.3, the centre deviation and angle of wedge detector of a kind of angle of wedge spherical lens of the invention, packet Include on one axis photoelectric auto-collimator 2 on axis electric lifting platform 1, one, the two-dimentional motorized precision translation stage 4 of a sample clamping adjuster 3, one, One equipment base 5, a fixed frame 6, a lower axle photoelectric auto-collimator 7, a lower axle electric lifting platform 8, a control cabinet 9, one number According to collector 10, a light source 11, one first fibre-optic catheter 12, one second fibre-optic catheter 13 and a computer 14;The data acquisition Device 10 is digital display meter;
The upper axis photoelectric auto-collimator 2 is equipped with a first light source incidence end A and one first output end of image B, described Lower axle photoelectric auto-collimator 7 is equipped with a second light source incidence end C and one second output end of image D, the upper axis electric up-down Platform 1 is equipped with one first control connecting pin E and one first Z axis data output end F, and the lower axle electric lifting platform 8 is equipped with one Second control connecting pin G and one second Z axis data output end H, the two dimension motorized precision translation stage 4 are equipped with one the oneth XY number of axle evidence Output end I, one the 2nd XY axis data output end J and a third control connecting pin K;
The equipment base 5 is fixed on 6 top of fixed frame, and the two dimension motorized precision translation stage 4 is fixed on described set Standby 5 top of pedestal, the two dimension motorized precision translation stage 4 is equipped with one and places mouth 41, for placing angle of wedge spherical lens 15 to be measured, institute Equipment base 5 is stated equipped with a through-hole 51 opposite with the placement mouth 41;The sample clamping adjuster 3 is fixed on the peace 41 top of mouth is put, for clamping angle of wedge spherical lens 15 to be measured;The upper axis electric lifting platform 1 and the lower axle electric lifting platform 8 are relatively fixed at the two sides up and down of the equipment base 5, and it is electronic that the upper axis photoelectric auto-collimator 2 is fixed on the upper axis On lifting platform 1, the lower axle photoelectric auto-collimator 7 is fixed on the lower axle electric lifting platform 8, the upper axis photoelectric auto-collimation Instrument 2, the placement mouth 41, the through-hole 51 and the lower axle photoelectric auto-collimator 7 are arranged in a straight line;
The first light source incidence end A is connected to the light source 11, second light by first fibre-optic catheter 12 Source incidence end C is connected to the light source 11 by second fibre-optic catheter 13;First control the connecting pin E, described second Control connecting pin G and third control connecting pin K pass through the control cabinet 9 and are connected with the computer 14;Described first XY axis data output end I, the first Z axis data output end F, the 2nd XY axis data output end J and the second Z axis number Pass through the data collector 10 according to output end H to be connected with the computer 14;The first image output end B and described Two output end of image D pass through communication bus and are connected with the computer 14.
A photoelectric auto-collimator is respectively assembled in the equipment top and the bottom, is respectively intended to detect the upper and lower of wedge-shaped spherical lens 15 Two curved surface centre ofs sphere, light source 11 enter upper 2 He of axis photoelectric auto-collimator by the first fibre-optic catheter 12 and the second fibre-optic catheter 13 Lower axle photoelectric auto-collimator 7 can carry out monochromatic light road or double-optical path, have industrial camera CCD figure on photoelectric auto-collimator As sensor, for acquiring image information, the centre of sphere cross hairs of acquisition is shown by software and intelligentized calculates wedge-shaped ball The centre deviation and the angle of wedge of face lens 15.
Upper axis electric lifting platform 1 and lower axle electric lifting platform 8 include moving guide rail, contain uniform enconding on moving guide rail Device is moved to control upper axis photoelectric auto-collimator 2 and lower axle photoelectric auto-collimator 7, and the Z axis side being able to achieve in measurement process To high accuracy positioning, specific location can be shown in 14 software of computer, and participate in the calculation processing of measurement result;Two dimension is electronic flat Linear encoder is had in moving stage 4 (including moving guide rail, stepper motor and plane grating ruler), to control sample to be tested (wedge Shape spherical lens 15) movement of XY axis direction, and it is able to achieve the high accuracy positioning of XY axis in measurement process, specific data are shown in electricity 14 software of brain, and participate in the calculation processing of measurement result, it is ensured that measure the accurate positioning of image of spherical center.Light path system composition is containing upper Lower two light path systems, i.e. reflection measurement optical path and transmission measurement optical path, can be used for carrying out other respective type lens parameters Measurement.It is connect by USB (universal serial bus) with computer 14, collected position data is transmitted to computer software and shows boundary Face carries out data processing, the coordinate position being accurately imaged.
As shown in Figures 1 to 5, the measurement method of a kind of centre deviation of angle of wedge spherical lens of the invention and the angle of wedge, institute It states measurement method and needs to provide the centre deviation and angle of wedge detector of a kind of above-mentioned angle of wedge spherical lens, the measurement method tool Body includes the following steps:
Step 1, in the case where not placing angle of wedge spherical lens 15 to be measured, according to the curvature of angle of wedge spherical lens 15 to be measured Radius selects corresponding object lens, and object lens are separately mounted to the upper axis photoelectric auto-collimator and the lower axle photoelectric auto-collimation On instrument;
The light that step 2, the light source issue enters institute through first fibre-optic catheter and second fibre-optic catheter respectively Axis photoelectric auto-collimator and the lower axle photoelectric auto-collimator are stated, the computer controls the upper axis electricity by the control cabinet Dynamic lifting platform and the lower axle electric lifting platform, so that the upper axis photoelectric auto-collimator and the lower axle photoelectric auto-collimator exist , there is cross picture on the display area of the computer in Z-direction movement, carries out initial calibration;
Step 3 puts angle of wedge spherical lens 15 to be measured in the placement mouth, and the computer is controlled by the control cabinet The upper axis electric lifting platform, so that the upper axis photoelectric auto-collimator moves to angle of wedge spherical lens 15 to be measured in Z-direction The curvature center of upper surface finds the center of curvature picture of upper surface;
Step 4, the computer control the lower axle electric lifting platform by the control cabinet, so that the lower axle photoelectricity is certainly Collimator moves to the center of curvature of 15 lower surface of angle of wedge spherical lens to be measured in Z-direction, finds the radius of curvature of lower surface Picture;
Step 5, the computer control the two-dimentional motorized precision translation stage in the movement of XY axis direction, to adjust by the control cabinet Save the position of angle of wedge spherical lens 15 to be measured so that the center of curvature of 15 upper surface of angle of wedge spherical lens to be measured as and lower surface Center of curvature picture is respectively positioned in the display area of the computer;
Step 6, the computer acquired according to the upper axis photoelectric auto-collimator and the lower axle photoelectric auto-collimator ten Word picture and the upper axis electric lifting platform, the lower axle electric lifting platform and the collected position of the two-dimentional motorized precision translation stage Data, respectively to the coordinate O1 (x of the center point O1 of 15 upper surface of angle of wedge spherical lens to be measured1, y1, z1) and lower surface the centre of sphere Coordinate O2 (the x of the position point O22, y2, z2) handled, and according to formula: Calculate the centre of sphere distance d of O1 and O2;Then according to formula:
Obtain the numerical value of wedge angle;
Wherein, Φ is outer diameter known to angle of wedge spherical lens 15 to be measured, R1For 15 upper surface of angle of wedge spherical lens to be measured Radius of curvature, R2For the radius of curvature of 15 lower surface of angle of wedge spherical lens to be measured.
Fig. 2 is wedge-shaped spherical lens schematic diagram, and O1, O2 are respectively 15 upper surface of angle of wedge spherical lens and angle of wedge spherical lens The center of curvature of 15 lower surfaces, corresponding coordinate are respectively (x1, y1, z1)、(x2, y2, z2), d is wedge-shaped 15 liang of spherical lens The curved surface centre of sphere is away from for i.e. O1 at a distance from O2, m1 and m2 are respectively under 15 upper surface of angle of wedge spherical lens and angle of wedge spherical lens 15 The optical axis on surface, the angle of wedge refer to the optical axis m2 of 15 lower surface of angle of wedge spherical lens and the angle of reference axis, saturating with wedge-shaped spherical surface in figure The optical axis m1 of the upper spherical surface of mirror 15 is reference axis, and wedge angle is the angle of optical axis m2 and reference axis m1.Therefore,Then have:
Obtain the numerical value of wedge angle;
Wherein, Φ is outer diameter known to angle of wedge spherical lens 15 to be measured, R1For 15 upper surface of angle of wedge spherical lens to be measured Radius of curvature, R2For the radius of curvature of 15 lower surface of angle of wedge spherical lens to be measured.
It can to sum up obtain, wedge angle O1, O2 coordinate points parameter x1, y1, z1, x2, y2, z2Corresponding functional equation can indicate For θ=f (x1,y1,z1;x2,y2,z2).As it can be seen that need to only measure O1 and O2 coordinate position, equation θ=f (x is brought into1,y1,z1;x2, y2,z2) wedge angle size can be obtained.
Fig. 3 is measuring principle schematic diagram, and system is on the basis of two photoelectric auto-collimators, in conjunction with fine adjustment platform and plane Grating scale, to two centre ofs sphere of wedge-shaped spherical lens away from and the angle of wedge measure.
When measurement, two photoelectric auto-collimators carry out initial calibration, initialization survey coordinate first.Then axis photoelectricity is gone up certainly The position O1 in 2 automatic measurement of collimator, first face (concave surface in figure), and record its coordinate value (x1, y1, z1).Last lower axle light Electric autocollimator 7 combines the position O2 in 4 the second face of automatic measurement (convex surface in figure) of two-dimentional motorized precision translation stage, and records coordinate value (x2, y2, z2).Then two centre ofs sphere, and can be according to known radius of curvature R away from gained is calculated1、R2With wedge-shaped spherical lens outer diameter Φ Size, by correlation formula θ=f (x1,y1,z1;x2,y2,z2) it is converted into angle of wedge value.
Advantages of the present invention is as follows:
It the composite can be widely applied to the centre deviation and angle of wedge measurement in wedge-shaped spherical lens process, take into account rectangular Cylindrical lens and the measurement of spherical lens centre deviation, asymmetric rectangular cylindrical lens and the measurement of spherical lens centre deviation.With biography System optical detection apparatus is compared, and the present invention utilizes high-precision industry in upper axis photoelectric auto-collimator and lower axle photoelectric auto-collimator Ccd image sensor is simultaneously acquired imaging position and calculates in conjunction with software, on the basis of the photoelectric auto-collimator coaxial by two, In conjunction with precise 2-D motorized precision translation stage and grating scale, two curved surface sphere center position of precise measurement wedge shape spherical lens, thus to wedge shape Two centre ofs sphere of spherical lens away from and the angle of wedge calculated, largely avoid the shadow of operator's self-condition in measurement process It rings, substantially increases the accuracy and reliability of measurement.
Although specific embodiments of the present invention have been described above, those familiar with the art should be managed Solution, we are merely exemplary described specific embodiment, rather than for the restriction to the scope of the present invention, it is familiar with this The technical staff in field should be covered of the invention according to modification and variation equivalent made by spirit of the invention In scope of the claimed protection.

Claims (1)

1. a kind of centre deviation of angle of wedge spherical lens and the measurement method of the angle of wedge, it is characterised in that: the measurement method needs The centre deviation and angle of wedge detector of a kind of angle of wedge spherical lens are provided, including axis electric lifting platform on one, on one axis photoelectricity from Collimator, two-dimentional a motorized precision translation stage, an equipment base, a fixed frame, a lower axle photoelectric auto-collimator, the electronic liter of a lower axle Platform, a control cabinet, a data collector, a light source, one first fibre-optic catheter, one second fibre-optic catheter and a computer drop;
The upper axis photoelectric auto-collimator is equipped with a first light source incidence end and one first output end of image, the lower axle photoelectricity Autocollimator is equipped with a second light source incidence end and one second output end of image, and the upper axis electric lifting platform is equipped with one the One control connecting pin and one first Z axis data output end, the lower axle electric lifting platform be equipped with one second control connecting pin and One second Z axis data output end, the two dimension motorized precision translation stage are equipped with one the oneth XY axis data output end, one the 2nd XY number of axle Connecting pin is controlled according to output end and a third;
The equipment base is fixed at the top of the fixed frame, and the two dimension motorized precision translation stage is fixed on the equipment base top Portion, the two dimension motorized precision translation stage are equipped with a placement mouth and set on the equipment base for placing angle of wedge spherical lens to be measured There is a through-hole opposite with the placement mouth;The upper axis electric lifting platform is relatively fixed at the lower axle electric lifting platform The two sides up and down of the equipment base, the upper axis photoelectric auto-collimator is fixed on the upper axis electric lifting platform, under described Axis photoelectric auto-collimator is fixed on the lower axle electric lifting platform, the upper axis photoelectric auto-collimator, the placement mouth, described Through-hole and the lower axle photoelectric auto-collimator are arranged in a straight line;
The first light source incidence end is connected to the light source by first fibre-optic catheter, and the second light source incidence end is logical It crosses second fibre-optic catheter and is connected to the light source;First control connecting pin, second control connecting pin and described Third control connecting pin passes through the control cabinet and is connected with the computer;The first XY axis data output end, described One Z axis data output end, the 2nd XY axis data output end and the second Z axis data output end are adopted by the data Storage is connected with the computer;The first image output end and second output end of image pass through communication bus and institute Computer is stated to be connected;The measurement method specifically comprises the following steps:
Step 1, in the case where not placing angle of wedge spherical lens to be measured, according to the radius of curvature of angle of wedge spherical lens to be measured select Object lens are separately mounted on the upper axis photoelectric auto-collimator and the lower axle photoelectric auto-collimator by corresponding object lens;
The light that step 2, the light source issue enters on described through first fibre-optic catheter and second fibre-optic catheter respectively Axis photoelectric auto-collimator and the lower axle photoelectric auto-collimator, the computer control the upper electronic liter of axis by the control cabinet Platform and the lower axle electric lifting platform drop, so that the upper axis photoelectric auto-collimator and the lower axle photoelectric auto-collimator are in Z axis , there is cross picture on the display area of the computer in direction movement, carries out initial calibration;
Step 3 puts angle of wedge spherical lens to be measured in the placement mouth, and the computer is controlled on described by the control cabinet Axis electric lifting platform, so that the upper axis photoelectric auto-collimator moves to angle of wedge spherical lens to be measured upper surface in Z-direction The curvature center finds the center of curvature picture of upper surface;
Step 4, the computer control the lower axle electric lifting platform by the control cabinet, so that the lower axle photoelectric auto-collimation Instrument moves to the center of curvature of angle of wedge spherical lens to be measured lower surface in Z-direction, finds the radius of curvature picture of lower surface;
It is mobile in XY axis direction that step 5, the computer by the control cabinet control the two-dimentional motorized precision translation stage, come adjust to The position for surveying angle of wedge spherical lens, so that the center of curvature of the center of curvature picture of angle of wedge spherical lens to be measured upper surface and lower surface As being respectively positioned in the display area of the computer;
The cross picture that step 6, the computer are acquired according to the upper axis photoelectric auto-collimator and the lower axle photoelectric auto-collimator And the upper axis electric lifting platform, the lower axle electric lifting platform and the collected positional number of the two-dimentional motorized precision translation stage According to respectively to the coordinate O1 (x of the center point O1 of angle of wedge spherical lens to be measured upper surface1, y1, z1) and lower surface center point O2 Coordinate O2 (the x of position2, y2, z2) handled, and according to formula:It calculates The centre of sphere distance d of O1 and O2 out;Then according to formula:
Obtain the numerical value of wedge angle;
Wherein, Φ is outer diameter known to angle of wedge spherical lens to be measured, R1For the radius of curvature of angle of wedge spherical lens to be measured upper surface, R2For the radius of curvature of angle of wedge spherical lens to be measured lower surface.
CN201611246981.3A 2016-12-29 2016-12-29 The centre deviation of angle of wedge spherical lens and the measurement method of the angle of wedge Active CN106679595B (en)

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