CN104236487A - Device and method for detecting flatness - Google Patents
Device and method for detecting flatness Download PDFInfo
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- CN104236487A CN104236487A CN201410514042.7A CN201410514042A CN104236487A CN 104236487 A CN104236487 A CN 104236487A CN 201410514042 A CN201410514042 A CN 201410514042A CN 104236487 A CN104236487 A CN 104236487A
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- horizontal metroscope
- plane
- adjusting seat
- flatness
- dimensional movement
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Abstract
The invention provides a device and a method for detecting flatness. The device comprises a standard optical flat, an adjusting base, a base, a first length measuring instrument, a first adjusting base, a connecting plate, a one-dimensional moving platform, a two-dimensional moving platform, a second adjusting base, a second length measuring instrument, a to-be-detected object and a third adjusting base. The distance between a standard surface of the standard optical flat and a theoretical plane of the to-be-detected object is taken as a standard. Measuring heads of the two length measuring instruments are mounted reversely. One measuring head contacts with a plane of the standard optical flat, and the other measuring head contacts with a to-be-detected plane of the to-be-detected object. Two-dimensional scanning and measuring is performed on the plane of the standard optical flat and the to-be-detected plane of the to-be-detected object, and data recorded by the length measuring instruments are processed to acquire the flatness of the to-be-detected plane of the to-be-detected object. By the device and the method, the influences of linearity of the two-dimensional moving platform on measurement are removed; the device and the method can be used for measuring the flatness of various continuous planes and discontinuous planes, the linearity of the two-dimensional moving platform and the coplanarity of micro-lens focuses; functions of high-accuracy flatness detection methods for standard optical flats are widened.
Description
Technical field
The invention belongs to and be applied to that optics and mechanical organ high precision planeness detect, lenticule focus coplanarity detection field, relate to a kind of high precision planeness pick-up unit based on standard optic plane glass crystal and method.
Background technology
The domestic main instrument of detection to optics and mechanical parts high precision planeness is by roundness measuring equipment and three coordinate measuring machine and interferometer at present; Roundness measuring equipment can only detect endless belt and discontinuous plane; In high precision test, the precision of three coordinate measuring machine is inadequate, and interferometer can only detection of reflected face.
External detection high precision components mainly uses high accuracy three coordinate measuring machine and high-precision two-dimensional transfer table to add high precision horizontal metroscope to detect.
From domestic current testing conditions, cannot reach detection demand, high accuracy three coordinate measuring machine and high-precision two-dimensional transfer table are abroad to China's embargo, or prices are rather stiff; Particularly for non-contact detecting, domesticly there is no accurate detection method.
Summary of the invention
In order to overcome when existing two-dimensional movement platform detection plane is spent two-dimensional movement platform linearity to the impact of testing result; The object of the invention is to propose that a kind of cost is low, structure simple, high precision is for the method for detection plane degree contact measurement and non-cpntact measurement.
For reaching described object, first aspect present invention proposes a kind of flatness checking device, and this device is made up of standard optic plane glass crystal, adjusting seat, pedestal, the first horizontal metroscope, the first adjusting seat, gusset, one-dimensional movement platform, two-dimensional movement platform, the second adjusting seat, the second horizontal metroscope, measured piece, the 3rd adjusting seat; Wherein pedestal comprises first substrate, second substrate, the 3rd substrate and two frameworks, at position affixed first substrate, second substrate, the 3rd substrate respectively of the upper, middle and lower of two frameworks; Adjusting seat is arranged on the first pedestal, is arranged on the first pedestal by standard optic plane glass crystal by adjusting seat; 3rd adjusting seat is arranged on the 3rd pedestal, and measured piece is arranged on the 3rd pedestal by the 3rd adjusting seat; The standard flat of standard optic plane glass crystal and the tested surface of measured piece are parallel to each other and place; Two-dimensional movement platform is arranged on the second pedestal; One-dimensional movement platform is arranged on two-dimensional movement platform, for forming D translation platform; First adjusting seat is arranged on above gusset, second adjusting seat is arranged on below gusset, the bottom of the first horizontal metroscope is placed in the first adjusting seat, the bottom of the second horizontal metroscope is placed in the second adjusting seat, first horizontal metroscope is arranged on gusset by the first adjusting seat, second horizontal metroscope is arranged on gusset by the second adjusting seat, the gauge head of the first horizontal metroscope and the second horizontal metroscope is oppositely installed, the gauge head of the first horizontal metroscope and standard optic plane glass crystal plane contact, the gauge head of the second horizontal metroscope and the tested plane contact of measured piece; The workplace of one-dimensional movement platform connects with the workplace of gusset, then the detecting unit be made up of the first horizontal metroscope, the second horizontal metroscope is arranged on one-dimensional movement platform by gusset; During detection, by two-dimensional movement platform with the measuring unit be made up of the first horizontal metroscope, the first adjusting seat, gusset, the second adjusting seat, the second horizontal metroscope, by setting step pitch, two-dimensional scan detection is carried out to measured piece, and data analysis is carried out to the first horizontal metroscope, the self registering indicating value of the second horizontal metroscope, obtain the flatness of the tested plane of measured piece.
For reaching described object, the technical scheme that second aspect present invention proposes a kind of flatness detection method be use described in flatness checking device, this flatness detecting step comprises:
Step S1: use the spacing of the index plane of standard optic plane glass crystal and the theoretical planes of measured piece as reference plane, for eliminating the rectilinearity of two-dimensional movement platform to the impact of measuring;
Step S2: each gauge head of the first horizontal metroscope and the second horizontal metroscope is oppositely installed;
Step S3: by the plane contact of a gauge head and standard optic plane glass crystal, by the tested plane contact of another gauge head and measured piece;
Step S4: by two-dimensional movement platform with the measuring unit be made up of the first adjusting seat, gusset, the second adjusting seat, two-dimensional scan measurement is carried out to the plane of standard optic plane glass crystal and the tested plane of measured piece, to the data analysis of the first horizontal metroscope and the second horizontal metroscope record, acquire the flatness of the tested plane of measured piece.
The present invention compared with prior art has the following advantages:
The inventive method is easy, and the present invention can to the measurement of each continuous level and discontinuous plane flatness; Also measure the rectilinearity of two-dimensional movement platform simultaneously; Also can change measured piece into lenticule, and associated high precision horizontal metroscope changes CCD imaging system into, can measure the coplanarity of lenticule focus, expand the function of the high precision planeness pick-up unit of standard optic plane glass crystal.The linearity of prior art two-dimensional movement platform is more than 0.005mm, when the invention solves existing two-dimensional movement platform Scanning Detction, the linearity of two-dimensional movement platform is on the impact of testing result, can realize detecting the flatness of 150mm × 150mm plane, uncertainty of measurement is 0.0005mm;
Accompanying drawing explanation
Fig. 1 is the high precision planeness detection method schematic diagram that the present invention is based on standard optic plane glass crystal;
Fig. 2 is two altimetry precision horizontal metroscope installation site relation schematic diagram in the present invention;
Fig. 3 is the coplanarity pick-up unit schematic diagram of the non-cpntact measurement lenticule focus of planting in the present invention based on standard optic plane glass crystal;
1-standard optic plane glass crystal, 2-optical flat adjusting seat,
3a-first substrate, 3b-second substrate,
3c-the 3rd substrate, 4-first horizontal metroscope,
5-first adjusting seat, 6-gusset,
7-one-dimensional movement platform, 8-two-dimensional movement platform,
9-second adjusting seat, 10-second degree of horizontal metroscope,
11-measured piece, 12-the 3rd adjusting seat,
13-mount pad, 14-micro-imaging unit,
15-lenticule, 16-lenticule mount pad,
17-parallel optical system.
Embodiment
In order to make the object, technical solutions and advantages of the present invention clearly understand, below in conjunction with specific embodiment, and with reference to accompanying drawing, the present invention is described in further detail.
The present invention is based on the spacing of the index plane of the flatness checking device standard optic plane glass crystal 1 of standard optic plane glass crystal and the theoretical planes of measured piece 11 as benchmark, be intended to eliminate the rectilinearity of two-dimensional movement platform 8 to the impact of measuring, can to the measurement of each continuous level and discontinuous plane flatness.Use a reference plane and two horizontal metroscopes 4,10, for measuring the linearity of two-dimensional movement platform 8.
As Fig. 1 is made up of standard optic plane glass crystal 1, adjusting seat 2, pedestal, the first horizontal metroscope 4, first adjusting seat 5, gusset 6, one-dimensional movement platform 7, two-dimensional movement platform 8, second adjusting seat 9, second horizontal metroscope 10, measured piece 11, the 3rd adjusting seat 12 based on the flatness checking device of standard optic plane glass crystal.Wherein pedestal comprises first substrate 3a, second substrate 3b, a 3rd substrate 3c and two framework 3d, two affixed first substrate 3a, second substrate 3b, the 3rd substrate 3c respectively of the position in the upper, middle and lower of framework 3d, the precision of first degree of horizontal metroscope 4 and the second horizontal metroscope 10 is 0.0002mm, realize detecting the flatness of 150mm × 150mm plane, uncertainty of measurement is 0.0005mm.
Adjusting seat 2 is arranged on the first pedestal 3a, is arranged on the first pedestal 3a by standard optic plane glass crystal 1 by adjusting seat 2; 3rd adjusting seat 12 is arranged on the 3rd pedestal 3c, is arranged on the 3rd pedestal 3c by measured piece 11 by the 3rd adjusting seat 12; The tested surface of the standard flat of standard optic plane glass crystal 1 and measured piece 11 is parallel to each other and places; Two-dimensional movement platform 8 is arranged on the second pedestal 3b; One-dimensional movement platform 7 is arranged on two-dimensional movement platform 8, for forming D translation platform; First adjusting seat 5 is arranged on above gusset 6, second adjusting seat 9 is arranged on below gusset 6, the bottom of the first horizontal metroscope 4 is placed in the first adjusting seat 5, the bottom of the second horizontal metroscope 10 is placed in the second adjusting seat 9, first horizontal metroscope 4 is arranged on gusset 6 by the first adjusting seat 5, second horizontal metroscope 10 is arranged on gusset 6 by the second adjusting seat 9, the gauge head of the first horizontal metroscope 4 and the second horizontal metroscope 10 is oppositely installed, the gauge head of the first horizontal metroscope 4 and standard optic plane glass crystal plane contact, the gauge head of the second horizontal metroscope 10 and the tested plane contact of measured piece 11; The workplace of one-dimensional movement platform 7 connects with the workplace of gusset 6, then is arranged on one-dimensional movement platform 7 by the detecting unit be made up of the first horizontal metroscope 4, second horizontal metroscope 10 by gusset 6; During detection, by two-dimensional movement platform 8 with the measuring unit be made up of the first horizontal metroscope 4, first adjusting seat 5, gusset 6, second adjusting seat 9, second horizontal metroscope 10, by setting step pitch, two-dimensional scan detection is carried out to measured piece 11, and data analysis is carried out to the self registering indicating value of the first horizontal metroscope 4, second horizontal metroscope 10, obtain the flatness of the tested plane of measured piece 11.The position relationship of the first horizontal metroscope 4, second horizontal metroscope 10 is that measuring staff survey length direction follows abbe ' s principle.First substrate 3a, second substrate 3b, the 3rd substrate 3c are parallel to each other, and are placed in two framework 3d.The precision of the one the first horizontal metroscope 4 and the second horizontal metroscope 10 is 0.0002mm, and realize detecting the flatness of 150mm × 150mm plane, uncertainty of measurement is 0.0005mm.
As Fig. 2, the first horizontal metroscope 4, first adjusting seat 5, gusset 6, the position relationship of the second adjusting seat 9, second horizontal metroscope 10, the first horizontal metroscope 4 and the second horizontal metroscope 10 should oppositely be installed, and the right alignment of two horizontal metroscope gauge heads should within 1mm.
As Fig. 3 illustrate that the flatness checking device that the present invention is based on standard optic plane glass crystal carries out non-contact detecting time, as long as when being micro-imaging unit by the second horizontal metroscope 10, when measured piece 11 is lenticules, the parallelization of lenticular object plane and parallel optical system 13; During detection, micro-imaging unit can clearly be seen asterism picture by one-dimensional movement platform 7 and two-dimensional movement platform 8, write down the indicating value of the first horizontal metroscope 4; By two-dimensional movement platform 8, micro-imaging unit is moved on to into next lenticular position, then make micro-imaging unit can see asterism picture clearly by one-dimensional movement platform 7, then write down the indicating value of the first horizontal metroscope 4, carry out Scanning Detction successively; Finally by the coplanarity obtaining lenticule focus behind data place.
Pick-up unit of the present invention is the changing value of the spacing of the index plane of measurement standard optical flat 1 and the theoretical planes of measured piece 11, has nothing to do in the rectilinearity of direction of measurement with the two-dimensional movement platform of drive first horizontal metroscope horizontal metroscope 4, second horizontal metroscope 10 scanning survey; The rectilinearity of two direction of scanning does not affect testing result; The angle of two-dimensional movement platform 8 is shaken on measurement result impact quite little; The spacing of getting the theoretical planes of standard optic plane glass crystal 1 and standard optic plane glass crystal 1 and measured piece 11 is 1000mm, the angle of two-dimensional movement platform 8 domestic is at present shaken and is accomplished 30 " be quite be easy to, then the measurement result affected is 1000* (1-cos (30 "))=0.0001mm; Comprehensive every uncertainty, based on the flatness detection method of standard optic plane glass crystal 1 measurement not exactness be 0.0005mm.
By the spacing of standard optic plane glass crystal 1 and the index plane of standard optic plane glass crystal 1 and the theoretical planes of measured piece 11 as benchmark, be intended to eliminate the rectilinearity of two-dimensional movement platform 8 to the impact of measuring, can to the measurement of each continuous level and discontinuous plane flatness.
Flatness detection method of the present invention is the flatness checking device described in use, and this flatness detecting step comprises:
Step S1: use the spacing of the index plane of standard optic plane glass crystal 1 and the theoretical planes of measured piece 11 as reference plane, for eliminating the rectilinearity of two-dimensional movement platform 8 to the impact of measuring;
Step S2: each gauge head of the first horizontal metroscope 4 and the second horizontal metroscope 10 is oppositely installed;
Step S3: by the plane contact of a gauge head and standard optic plane glass crystal 1, by the tested plane contact of another gauge head and measured piece 11;
Step S4: by two-dimensional movement platform 8 with by, the measuring unit that forms of the first adjusting seat 5, gusset 6, second adjusting seat 9, two-dimensional scan measurement is carried out to the plane of standard optic plane glass crystal 1 and the tested plane of measured piece 11, to the data analysis of the first horizontal metroscope 4 second horizontal metroscope 10 record, acquire the flatness of the tested plane of measured piece 11.Tested plane is continuous level and discontinuous plane.Use a reference plane, the first horizontal metroscope 4 and the second horizontal metroscope 10, for measuring the linearity of two-dimensional movement platform.Measured piece 11 is lenticules.First horizontal metroscope 4 and the second horizontal metroscope 10 are CCD image-generating unit, for carrying out non-cpntact measurement to the coplanarity of lenticule focus.
The above; be only the embodiment in the present invention, but protection scope of the present invention is not limited thereto, any people being familiar with this technology is in the technical scope disclosed by the present invention; the conversion or replacement expected can be understood, all should be encompassed in of the present invention comprising within scope.
Claims (10)
1. a flatness checking device, is characterized in that: be made up of standard optic plane glass crystal, adjusting seat, pedestal, the first horizontal metroscope, the first adjusting seat, gusset, one-dimensional movement platform, two-dimensional movement platform, the second adjusting seat, the second horizontal metroscope, measured piece, the 3rd adjusting seat; Wherein pedestal comprises first substrate, second substrate, the 3rd substrate and two frameworks, at position affixed first substrate, second substrate, the 3rd substrate respectively of the upper, middle and lower of two frameworks; Adjusting seat is arranged on the first pedestal, and standard optic plane glass crystal is arranged on the first pedestal by adjusting seat; 3rd adjusting seat is arranged on the 3rd pedestal, and measured piece is arranged on the 3rd pedestal by the 3rd adjusting seat; The standard flat of standard optic plane glass crystal and the tested surface of measured piece are parallel to each other and place; Two-dimensional movement platform is arranged on the second pedestal; One-dimensional movement platform is arranged on two-dimensional movement platform, for forming D translation platform; First adjusting seat is arranged on above gusset, second adjusting seat is arranged on below gusset, the bottom of the first horizontal metroscope is placed in the first adjusting seat, the bottom of the second horizontal metroscope is placed in the second adjusting seat, first horizontal metroscope is arranged on gusset by the first adjusting seat, second horizontal metroscope is arranged on gusset by the second adjusting seat, the gauge head of the first horizontal metroscope and the second horizontal metroscope is oppositely installed, the gauge head of the first horizontal metroscope and standard optic plane glass crystal plane contact, the gauge head of the second horizontal metroscope and the tested plane contact of measured piece; The workplace of one-dimensional movement platform connects with the workplace of gusset, then is arranged on one-dimensional movement platform by the detecting unit be made up of the first horizontal metroscope, the second horizontal metroscope by gusset; During detection, by two-dimensional movement platform with the measuring unit be made up of the first horizontal metroscope, the first adjusting seat, gusset, the second adjusting seat, the second horizontal metroscope, by setting step pitch, two-dimensional scan detection is carried out to measured piece, and data analysis is carried out to the first horizontal metroscope, the self registering indicating value of the second horizontal metroscope, obtain the flatness of the tested plane of measured piece.
2. flatness checking device according to claim 1, is characterized in that: the position relationship of the first horizontal metroscope, the second horizontal metroscope is that measuring staff is surveyed length direction and follows abbe ' s principle.
3. flatness checking device according to claim 1, is characterized in that: first substrate, second substrate, the 3rd substrate are parallel to each other, and are placed in two frameworks.
4. flatness checking device according to claim 1, is characterized in that: the precision of the first horizontal metroscope and the second horizontal metroscope is 0.0002mm, and realize detecting the flatness of 150mm × 150mm plane, uncertainty of measurement is 0.0005mm.
5. a flatness detection method, uses the flatness checking device as described in claim 1-4, and this flatness detecting step comprises:
Step S1: use the spacing of the index plane of standard optic plane glass crystal and the theoretical planes of measured piece as reference plane, for eliminating the rectilinearity of two-dimensional movement platform to the impact of measuring;
Step S2: each gauge head of the first horizontal metroscope and the second horizontal metroscope is oppositely installed;
Step S3: by the plane contact of a gauge head and standard optic plane glass crystal, by the tested plane contact of another gauge head and measured piece;
Step S4: by two-dimensional movement platform with the measuring unit be made up of the first adjusting seat, gusset, the second adjusting seat, two-dimensional scan measurement is carried out to the plane of standard optic plane glass crystal and the tested plane of measured piece, to the data analysis of the first horizontal metroscope and the second horizontal metroscope record, obtain the flatness of the tested plane of measured piece.
6. flatness detection method according to claim 5, is characterized in that: the measuring staff of the first horizontal metroscope and the second horizontal metroscope is surveyed length direction and followed abbe ' s principle.
7. flatness detection method according to claim 5, is characterized in that: tested plane is continuous level and discontinuous plane.
8. flatness detection method according to claim 5, is characterized in that: use horizontal metroscope and a reference plane, for measuring the linearity of two-dimensional movement platform.
9. flatness detection method according to claim 5, is characterized in that: measured piece is lenticule.
10. flatness detection method according to claim 9, is characterized in that: horizontal metroscope is CCD image-generating unit, for carrying out non-cpntact measurement to the coplanarity of lenticule focus.
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| CN105651211A (en) * | 2016-03-08 | 2016-06-08 | 哈尔滨工程大学 | Mirror surface out-plane displacement measurement device and method based on geometrical optics |
| CN106524955A (en) * | 2016-12-16 | 2017-03-22 | 甘肃省计量研究院 | Plane equal thickness interference digital display measurement device and method of measuring optical flat flatness |
| CN106596237A (en) * | 2016-11-09 | 2017-04-26 | 石长海 | Detection method of bent sheet generated by cutting wafer |
| CN106813600A (en) * | 2015-11-30 | 2017-06-09 | 北京航空航天大学 | A kind of contactless discontinuous plane measurement of planeness system and method |
| CN112066900A (en) * | 2020-09-16 | 2020-12-11 | 江西财经大学 | Distance measuring device |
| CN116499398A (en) * | 2023-06-29 | 2023-07-28 | 天津大学 | Roughness sensor and roughness grade evaluation and three-dimensional evaluation device and method |
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| CN116499398A (en) * | 2023-06-29 | 2023-07-28 | 天津大学 | Roughness sensor and roughness grade evaluation and three-dimensional evaluation device and method |
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Application publication date: 20141224 |