CN105651211B - A kind of minute surface based on geometric optics goes out planar displacement measurement device and its measuring method - Google Patents
A kind of minute surface based on geometric optics goes out planar displacement measurement device and its measuring method Download PDFInfo
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- CN105651211B CN105651211B CN201610130759.0A CN201610130759A CN105651211B CN 105651211 B CN105651211 B CN 105651211B CN 201610130759 A CN201610130759 A CN 201610130759A CN 105651211 B CN105651211 B CN 105651211B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
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Abstract
The invention discloses a kind of minute surfaces based on geometric optics to go out planar displacement measurement device and its measuring method.The present invention provides optical information by lighting system, multiple reflections of the light on two minute surfaces, the digital picture for going out in-plane displancement information with minute surface is obtained using image capture device, replace target mirror, gather multiple digital pictures, can be by the variation of light spot position in comparative analysis these digital pictures, and then obtain minute surface goes out in-plane displancement.The present invention provides a kind of new flatness monitoring device, can complete the flatness detection of degree of precision, possess the characteristics of whole audience detection, flexible and convenient to use and detection speed is high.
Description
Technical field
The invention belongs to flatness error fields of measurement more particularly to a kind of minute surface based on geometric optics to go out in-plane displancement
Measuring device and its measuring method.
Background technology
With the high speed development of scientific research, the demand of high-accuracy large-scale glass pieces is increasing and goes to manufacture
The workpiece of industry production, the requirement of flatness error measurement accuracy are also higher and higher, this result in starting it is a kind of in engineering in practice just
It is had a very big significance in the in-plane displancement detection method that goes out of the big flat glass of the centering of application.
At present, glass planar degree detecting instrument species is more, is basically divided into mechanical measurement and is detected with flash ranging instrument, wherein
Flash ranging instrument application is relatively broad, precision is also higher, but current measuring method mainly uses the detection mode of point by point scanning, inspection
It looks into and more takes.In contrast, go out planar displacement measurement device using this minute surface to measure, without point by point scanning, there is the whole audience
The characteristics of detecting, is flexible and convenient to use can effectively shorten time of measuring, reduce measurement cost, have certain realistic meaning.
The content of the invention
The object of the present invention is to provide a kind of practical, minute surfaces easy for installation based on geometric optics to go out planar displacement measurement
Device.The purpose of the present invention, which further includes, provides a kind of high certainty of measurement, and the minute surface based on geometric optics goes out planar displacement measurement
Method.
A kind of minute surface based on geometric optics goes out planar displacement measurement device, including target mirror, monitoring mirror, two frames,
Camera, optical table, two pull rods, four columns, pull rod column connecting piece, framework connecting piece, upright post base and computer；
Four columns are mounted on the corner of optical table respectively by a upright post base, and two pull rods are put down positioned at optics
Both sides above platform, the both ends of each pull rod are connected respectively by a railing post connector with a column, and target mirror leads to
Frame is crossed between two pull rods, the frame both sides of target mirror pass through the corresponding pull rod of a framework connecting piece respectively
Connection, monitoring mirror between two pull rods, monitor the frame both sides of mirror respectively by a framework connecting piece by frame
Corresponding pull rod connection, target mirror is opposite with center with centered on monitoring mirror, and face is parallel with face, frame including inner frame with
Outer framework, monitors the point light source being equipped on the inner frame of mirror by arranged in squares, and camera is mounted on the outside of monitoring mirror, camera
Camera lens is parallel with monitoring mirror minute surface, and camera is connected by data cable with computer.
A kind of minute surface based on geometric optics of the present invention goes out planar displacement measurement device, can also include：
Camera adjustment location means are further included, camera adjustment location means are mounted on the outer framework of monitoring mirror, camera peace
In camera adjustment location means.
A kind of minute surface based on geometric optics goes out planar displacement measurement method, comprises the following steps,
Step 1：Target mirror is placed in parallel with monitoring mirror, it is desirable that face is parallel with face, and there is no windup-degrees from each other；
Step 2：Electric light source is opened, the light of electric light source generates multistage dot matrix in two mirror-reflections, adopted as information
Collection point preserves, and the digital picture of different target mirror is obtained, if image does not change i.e. without in-plane displancement is gone out, if digital picture
In-plane displancement is generated out when changing；
Step 3：Camera acquisition goes out the digital picture of in-plane displancement information with minute surface, sends computer to, obtains image
Upper luminous point generates displacement and changes Δ y, and it is in-plane displancement to take z, based on Taylor series in a fixed point y0It expands into：
It is unknown quantity that spot displacement is taken, which to change Δ y,：
y0For fixed point：
Z=f (y)=a+b Δ y+c Δs y2+dΔy3+oΔy4
Primary condition：Δ y=0, z=0, boundary condition：Z=0 during y=h；
Displacement change Δ y correspondences are generated by luminous point and obtain out in-plane displancement z.
Advantageous effect：
The present invention provides a kind of new flatness monitoring device, can complete the flatness detection of degree of precision, possess
The characteristics of whole audience detects, flexible and convenient to use and detection speed is high.It is an object of the invention to provide price it is low, it is practical, installation
A kind of convenient minute surface based on geometric optics goes out planar displacement measurement device.The configuration of the present invention is simple, convenient for actual use, profit
With plane geometry optical principle, carry out component goes out planar displacement measurement, so as to further object analysis surface strain or scratch
Degree.
Description of the drawings
Fig. 1 is the structure diagram of patent of the present invention；
Fig. 2 is the schematic device of patent of the present invention；
Fig. 3 is target mirror and the structure diagram for monitoring mirror inner frame；
Fig. 4 is target mirror and the structure diagram for monitoring mirror outer framework；
Fig. 5 adjusts location means schematic diagram for camera；
Fig. 6 is the structure diagram of upright post base；
Fig. 7 is the structure diagram of pull rod column connecting piece；
Fig. 8 is frame connecting shaft schematic diagram.
Specific embodiment
Go out it is an object of the invention to provide a kind of low, practical, the easy for installation minute surface based on geometric optics of price flat
Face displacement measuring device.
The object of the present invention is achieved like this：With reference to Fig. 1, in figure：21- target mirrors, 22- monitoring mirrors, 13- illuminations system
System, 27- cameras, 210- computers), it is placed in parallel a monitoring mirror 22 compared with target mirror 21, it is desirable that face is parallel with face, mutually
Between there is no windup-degree, this ensure that light in two minute surface multiple reflections, by arranged in squares lighting system 13, ensures
Four point light sources at least to be installed in corner point, light point light source, light multiple reflections in two minute surfaces are shot using camera 27,
It can be seen that the multistage dot matrix generated, is on the angle point of same square per level-one dot matrix, by these in computer 210
Luminous point is preserved using computer as surface deformation information gathering point, obtains the digital picture of different target mirror, such as image
Do not change i.e. without in-plane displancement is gone out, in-plane displancement is generated out when being changed such as digital picture, changed by comparing calculation
The corresponding minute surface of digital picture acquisition goes out in-plane displancement.
A kind of minute surface based on geometric optics goes out planar displacement measurement device, it is characterized in that：White light-emitting diode is installed
In target mirror surrounding as identification point, small minute surface is calculated using machine vision and goes out in-plane displancement, target mirror in the device
It is designed with the frame of monitoring mirror using split, for outer framework for installing camera, interior frame need to use mill for installing lighting source
Bed ensures that the position that frame is contacted with minute surface is plane, ensures that eyeglass installation place goes out in-plane for no stress, i.e., without reality
The margin of error that experiment device generates is brought into, and target mirror easy to disassemble can be replaced, and conveniently complete a large amount of glass-mirrors
Detection.Multiple reflections of the light on two minute surfaces generate multistage image, are obtained using industrial camera acquisition and go out plane with minute surface
The digital picture of displacement information, comparing calculation carry multiple digital pictures of minute surface topographical information, same luminous point multiple reflections production
Raw multistage dot matrix, based on spot displacement amount, goes out in-plane displancement using taylor series computation target minute surface.
The measuring device obtains the luminous point gone out with minute surface in the digital picture of in-plane displancement information and generates displacement change Δ y
When, it is in-plane displancement to take z, it is known that based on Taylor series in a certain fixed point y0Expansion, can be written as：
It is unknown quantity that spot displacement is taken to change Δ y at this time, and above formula is rewritten as：
y0For fixed point, equation group can be written as：
Z=f (y)=a+b Δ y+c Δs y2+dΔy3+oΔy4
Primary condition at this time (when i.e. without deformation)：Δ y=0, z=0.
Boundary condition (i.e. four borders are without deformation) at this time：Z=0 during y=h.
If only consider that light reflects once on target mirror, only knows Δ y1And z1, so that it may it is written as z1=f (y)=a+
bΔy1Solve b=z1/Δy1。
If it is considered that light reflected on target mirror it is secondary, it is known that Δ y1And z1, Δ y2And z2, z=f (y)=a+b Δ y+c Δs
y2B, c can be solved.
If it is considered that light reflects three times on target mirror, it is known that Δ y1And z1, Δ y2And z2, Δ y3And z3, z=f (y)=a+
bΔy+cΔy2+dΔy3B, c and d can be solved.
As known from the above, acquisition taking-up in-plane displancement z can be corresponded to by generating displacement change Δ y by luminous point.
It is an object of the invention to provide a kind of minute surfaces based on geometric optics to go out planar displacement measurement device, the device by
Target mirror monitors mirror, lighting system and image capture device (including camera and computer) composition.The present invention passes through a photograph
Bright system provides optical information, and multiple reflections of the light on two minute surfaces are obtained using image capture device and go out plane with minute surface
The digital picture of displacement information replaces target mirror, gathers multiple digital pictures, can be by comparative analysis these digital pictures
The variation of light spot position, and then obtain minute surface and go out in-plane displancement.The measuring method of the device carries out in the following manner：First,
A monitoring mirror is placed in parallel compared with target mirror, it is desirable that face is parallel with face, and there is no windup-degrees from each other；Then, beat
Lighting system is opened, the multistage dot matrix that the light in lighting system is generated in two mirror-reflections is can see in acquisition system, it will
It is preserved as information gathering point, obtains the digital picture of different target mirror, if image does not change i.e. without going out in-plane displancement,
In-plane displancement is generated out when being changed such as digital picture；Finally, by comparative analysis image, minute surface is calculated using computer
Go out in-plane displancement.The present invention provides a kind of new flatness monitoring device, can complete the flatness detection of degree of precision, tool
The characteristics of standby whole audience detects, flexible and convenient to use and detection speed is high.
By light, multiple reflections, the multistage dot matrix of generation, comparative analysis are more with minute surface topographical information on two minute surfaces
Digital pictures, using spot movement information as collection point, as image does not change i.e. without in-plane displancement is gone out, as digital picture has change
In-plane displancement is generated out during change, by comparative analysis image change, minute surface is calculated using computer and goes out in-plane displancement.
Target mirror and monitoring cell mount are designed using split, wherein, for installing camera, interior frame is used to install outer framework
Lighting source need to use the position that grinding machine ensures that frame is contacted with minute surface as plane, ensure that eyeglass installation place goes out in-plane and is
Without stress, target mirror easy to disassemble can be replaced.
A kind of identification point, white light-emitting diode are mounted on monitoring mirror inside casing as identification point.Identification point is at least four,
By arranged in squares.
Based on spot displacement amount in digital picture, in-plane displancement is gone out using taylor series computation target mirror.
To make the purpose, technical scheme and advantage of the embodiment of the present invention clearer, below in conjunction with the embodiment of the present invention
In attached drawing, the technical solution in the embodiment of the present invention is clearly and completely described, it is clear that described embodiment is
The embodiment of a part of the invention, instead of all the embodiments.
With reference to Fig. 2, the present invention includes：20- optical tables, 21- target mirrors, 22- monitoring mirrors, 23- mirror inner frames, 24-
Mirror outer framework, 25- pull rod column connecting pieces, 26- upright post bases, 27- cameras, 28- cameras adjustment location means, 29- frames
Connecting shaft, 210- computers.Optical table is evenly equipped with a large amount of orderly bolts hole, and upright post base 26 is shown in Fig. 6, including：61- is stood
Column connecting hole, 62- fix optical table screw hole, device with optical table are connected by 4 screw holes, column is mounted on
In column connecting hole.By pull rod column connecting piece 25, Fig. 7 is seen, including：71- pull rod column connecting holes, 72- fixed screw holes,
Pull rod with column is connected, and determines position installation targets mirror 21 and monitors the frame of mirror 22.
Frame is made of inner frame and outer framework.Inner frame 23, is shown in Fig. 4, including：41 installation point light source positions, inside and outside 42
Frame fixed screw holes are furnished with white light-emitting diode on the installation point light source position of inner frame 23, at least in angle point by square
Cloth 4 is as identification point, and as the information gathering point of experiment, collection point should possess certain luminosity so that image exists
It still is able to be identified by camera after multiple reflections.Outer framework 24, is shown in Fig. 3, including：31 frames connect shaft position, outline border in 32
Fixed screw holes, frame connect shaft position to installation frame connecting shaft 29, as shown in figure 8, by frame connecting shaft 29 and drawing
Frame can be connected by bar column connecting piece 25 with pull rod.Outer framework is reinforced with inner frame by interior outline border fixed screw.It is protected in installation
Planes where demonstrate,proving the target mirror 21 of composition and monitoring 22 two frames of mirror are parallel, and Center-to-Center is opposite, is not present from each other
Windup-degree.
It monitoring and camera 27 is installed at mirror outline border center, camera adjusts location means 28 with outline border by camera, sees Fig. 5, including：
51- camera mounting columns, 52- revolving platform mounting bases, 53- revolving platforms, 54- translation stages and revolving platform connecting seat, 55- translation stages,
56- tilting tables, 57- tilting tables and translation stage connecting seat, 27- cameras, 59- camera lenses, 510- camera installation pedestals.Camera adjusts position
It puts device and ensures that camera lens are parallel with minute surface, camera 27 is connected by data cable with computer 210, adjusts aperture and focal length,
Computer is allowd to gather the digital picture with surface deformation information.
The digital picture of different target mirror is obtained, as image does not change i.e. without in-plane displancement is gone out, as digital picture changes
When generate out in-plane displancement.The image of 4 luminous point movement same displacements is found in the picture, and the center of this image is
In-plane displancement point by the method for Taylor series, using the distance of luminous point variation as known quantity, calculates minute surface and goes out in-plane displancement
Size.
Claims (3)
1. a kind of minute surface based on geometric optics goes out planar displacement measurement device, it is characterised in that：Including target mirror, monitoring mirror,
Two frames, camera, optical table, two pull rods, four columns, pull rod column connecting piece, framework connecting piece, upright post base and
Computer；
Four columns are mounted on the corner of optical table respectively by a upright post base, and two pull rods are located on optical table
The both sides of side, the both ends of each pull rod are connected respectively by a pull rod column connecting piece with a column, and target mirror passes through frame
Frame is mounted between two pull rods, and the frame both sides of target mirror are connected respectively by the corresponding pull rod of a framework connecting piece
Connect, between monitoring mirror is mounted on two pull rods by frame, monitor the frame both sides of mirror respectively by a framework connecting piece with
Its corresponding pull rod connection, target mirror is opposite with center with centered on monitoring mirror, and face is parallel with face, and frame is including inner frame and outside
Frame, monitors the point light source being equipped on the inner frame of mirror by arranged in squares, and camera is mounted on the outside of monitoring mirror, camera mirror
Head is parallel with monitoring mirror minute surface, and camera is connected by data cable with computer.
2. a kind of minute surface based on geometric optics according to claim 1 goes out planar displacement measurement device, it is characterised in that：
Camera adjustment location means are further included, camera adjustment location means are mounted on the outer framework of monitoring mirror, and camera is mounted on camera
It adjusts in location means.
3. a kind of measuring method for going out planar displacement measurement device based on the minute surface described in claim 1 based on geometric optics,
It is characterized in that：Comprise the following steps,
Step 1：Target mirror is placed in parallel with monitoring mirror, it is desirable that face is parallel with face, and there is no windup-degrees from each other；
Step 2：Electric light source is opened, the light of electric light source generates multistage dot matrix in two mirror-reflections, as information gathering point
It preserves, the digital picture of different target mirror is obtained, as image does not change i.e. without in-plane displancement is gone out, if digital picture has change
In-plane displancement is generated out during change；
Step 3：Camera acquisition goes out the digital picture of in-plane displancement information with minute surface, sends computer to, obtains image glazing
Point generates displacement and changes Δ y, and it is in-plane displancement to take z, based on Taylor series in a fixed point y0It expands into：
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Primary condition：Δ y=0, z=0, boundary condition：Z=0 during y=h；
Displacement change Δ y correspondences are generated by luminous point and obtain out in-plane displancement z.
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| 用多次反射于涉进行平面度的精密测定;石川纯 等;《国外计量》;19840630(第3期);第29-31页 * |
| 离轴多反射镜系统支撑结构的设计与装调;梅 贵 等;《光学精密工程》;20150831;第23卷(第8期);第2280-2287页 * |
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