CN105486341B - A kind of large format high-speed, high precision automated optical detection equipment - Google Patents
A kind of large format high-speed, high precision automated optical detection equipment Download PDFInfo
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- CN105486341B CN105486341B CN201510828145.5A CN201510828145A CN105486341B CN 105486341 B CN105486341 B CN 105486341B CN 201510828145 A CN201510828145 A CN 201510828145A CN 105486341 B CN105486341 B CN 105486341B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D21/00—Measuring or testing not otherwise provided for
Abstract
A kind of large format high-speed, high precision automated optical detection equipment, is related to automatic optics inspection field, solves the problems, such as mobile small field of view camera lens in existing automated optical detection equipment, easily various errors are incorporated into accuracy of detection.The equipment includes support platform；Shock bracket；Translating rails pair；Work stage in translating rails pair；Light source for transmission illumination；Precise driving device；Control system；Grating scale；Lens bracket；Light source for reflection illumination；Speculum；Accurate focusing platform；Big visual field high accuracy camera lens；Splicing detector focal plane subassembly.The imaging viewing field of big visual field high accuracy camera lens is more than 750mm, and the detector array that imaging focal plane is spliced by isosceles triangle is formed, and control section or whole splicing detectors are worked with different frame frequencies, to match the translational speed of different workpieces.The present invention splices focal plane by big visual field high accuracy camera lens combination multi-slice detector, breakthrough it is single-lens can not view field imaging, the problem of multi-lens imaging is inconsistent greatly, improve detection efficiency and precision.
Description
Technical field
The present invention relates to automatic optics inspection technical field, and in particular to a kind of large format high-speed, high precision automated optical inspection
Measurement equipment.
Background technology
With the changes in demand of the development of industrial technology, particularly industry 2025, in industrial circuits plate, tin cream, steel mesh etc.
Requirement of automatic optics inspection (AIO) field to accuracy of detection, detection speed and detected size improves constantly, to corresponding automatic
The requirement of optical detection apparatus also more and more higher, the indices of detection device how are improved to adapt to the development of industrial technology just
Seem very urgent.
At present, automatic optics inspection (AIO) equipment, all it is to use small field of view optical lens, platform is translated installed in X/Y
On, the local area of workpiece (circuit board, tin cream, steel mesh etc.) is imaged, moving lens, to whole workpiece timesharing, segmentation,
Local tomography, a larger image then is spliced into software, then compared with normative document (image or data), provided
Detection error and report.This kind of detection device is very low due to the limitation of Cleaning Principle, the efficiency of detection, it is difficult to meets industrial development
Needs.The detection device for the peak efficiency that can be looked into, for 200mm × 200mm workpiece, 5min, i.e. 135mm are most needed soon2/
s.The workpiece size typical sizes of industrial detection are in 500mm × 500mm or so at present, and progressively to 800mm × 750mm~
900mm × 900mm develops in direction, and detection efficiency requirement is in 5000mm2/ more than s (500mm × 500mm workpiece are detected,
It should be completed in 1min).
Current detection device is limited to by the technology of two aspects：First, the limit of image device (CCD, CMOS) size
System, monolithic imaging device can only imaging photosensitive area correspondingly-sized image, to complete whole workpiece sensing, just need it is longer when
Between；Secondly, the limitation of optical lens, conventional industrial lens, it can only meet that small field of view is imaged, the big lens focus of visual field is very
It is short, it is difficult to meet high-resolution imaging requirement, and it is larger to distort, and can not be applied to detection field.So technically, at present
Detection device be can not to large-scale workpiece carry out rapidly and efficiently, high-precision image checking.Such detection device is also deposited simultaneously
In Railway Project：First, higher to X/Y translation required precisions due to needing to move back and forth camera lens, X/Y translation errors can be direct
Contribute in detection error, camera lens movement is too fast, and image quality and accuracy of detection can not ensure, movement is too slow, then detection efficiency
It is too low；Second, such detection device is all the detection pattern of fixed workpiece, moving lens, the beat that start-stop stops be present, should
Kind pattern limits its application on industrial production line, it is impossible to well adapts to pile line operation.
The content of the invention
In order to solve mobile small field of view camera lens in existing automated optical detection equipment, various errors easily are incorporated into detection
The problem of in precision, the invention provides a kind of large format high-speed, high precision automated optical detection equipment.The present invention is used and regarded greatly
The high-precision camera lens combination multi-disc large area array in field, high frame frequency detector splicing focal plane technology, have invented a kind of large format, high speed, height
The automated optical detection equipment of precision, the detection of the products such as industrial circuit board, tin cream, steel mesh is mainly used in, improves inspection
Efficiency and accuracy of detection are surveyed, while overcomes technology limitation and deficiency existing for existing automated optical detection equipment.
The present invention is that technical scheme is as follows used by solving technical problem：
A kind of large format high-speed, high precision automated optical detection equipment of the present invention, including：
Support platform；
It is fixed on the shock bracket of support platform bottom；
The two translating rails pairs for being arranged on support platform upper surface and being parallel to each other；
The work stage being placed in translating rails pair；
It is fixed on support platform upper surface and the light source for transmission illumination immediately below work stage；
Support platform rear end and the precise driving device being connected with work stage are fixed on, the precise driving device passes through electricity
Machine drives work stage, and making work stage, the one direction in support platform is moved back and forth and positioned with the secondary slip of translating rails；
Control system, for display device current state, for driving precise driving device to run, for controlling splicing to visit
The detector frame frequency of device focal plane subassembly is surveyed, is exported for man-machine interaction setting, display device running state of programs and testing result,
For realizing the splicing and processing of image, for stitching image and normative document to be contrasted, realize that workpiece error is examined
Survey；
The grating scale being connected with control system, the reading head and grating of the grating scale are separately mounted to work stage and support
On platform, for measuring the speed of work stage movement and position and speed and position signalling being fed back into control system, pass through control
System control precise driving device operation processed moves work stage, the speed and splicing detector focal plane group of the work stage movement
The detector frame frequency matching of part；
It is fixed on support platform top surface edge and positioned at the lens bracket in the secondary outside of two translating rails；
The light source for reflection illumination being fixed on the inside of lens bracket；
It is fixed on the speculum of lens bracket upper surface and accurate focusing platform；
It is fixed on accurate focusing platform upper surface and horizontally disposed big visual field high accuracy camera lens and splicing detector focal plane
Component, the big visual field high accuracy camera lens front and back end are respectively aligned to speculum and splicing detector focal plane subassembly, the speculum
With the optical axis angle at 45 ° of big visual field high accuracy camera lens, the speculum is used for image checking light path of transferring, accurate by adjusting
Focusing platform makes the detector photosurface total conjugated of the workpiece and splicing detector focal plane subassembly in work stage, and splices detection
Device focal plane subassembly passes through big visual field high accuracy camera lens total conjugated with work stage.
Further, the control system includes：
Computer, it is whole equipment maincenter for connecting and controlling all Electricity Federation components；
Equipment state lamp with calculating mechatronics, for display device current state；
Display with calculating mechatronics, for man-machine interaction setting, display device running state of programs and detection knot
Fruit exports；
The controller electrically connected respectively with computer, precise driving device, grating scale and splicing detector focal plane subassembly, use
In driving precise driving device operation, for controlling the detector frame frequency of splicing detector focal plane subassembly；
Image pick-up card in a computer and control software are installed, for realizing the splicing and processing of image, used
In stitching image and normative document are contrasted, realize workpiece error-detecting.
Further, the detection device also includes the workpiece indicator being arranged between support platform and work stage, described
Workpiece indicator is located at light source for transmission illumination front end；When having workpiece and travelling workpiece indicator in work stage, the workpiece refers to
Show that device provides a control signal, start image checking.
Further, it is the big visual field high accuracy camera lens includes being arranged in order along optical axis object plane, the first lens, second saturating
Mirror, the 3rd lens, the 4th lens, diaphragm, the 5th lens, the 6th lens, the 7th lens, the 8th lens, the 9th lens and image planes；
5th lens and the 6th lens group are into glued mirror, and the light that the object plane is sent is successively through the first lens, the second lens,
Three lens, the 4th lens, diaphragm, glued mirror, the 7th lens, the 8th lens, the 9th lens reach image planes and are imaged；
Whole big visual field high accuracy camera lens is divided into front lens group and rear lens group by the diaphragm, first lens to the
Four lens form front lens group, the focal power of the front lens group according to it is positive and negative, just, positive combination, Jiao of the front lens group
It is away from proportionate relationship：(6.8~7.2):(- 0.85~-1.22):(0.9~1.2):(1.85~2.15)；The glued mirror,
Seven lens, the 8th lens and the 9th lens composition rear lens group, the focal power of the rear lens group is according to negative, positive, positive and negative group
Close, the focal length proportionate relationship of the rear lens group is：(- 0.9~-1.1):(1.5~1.7):(3.6~4):(- 1.25~-
1.55)；System high aberration and balance aberration are corrected by front lens group and rear lens group, corrected by the cemented surface of glued mirror
System aberration；
The object plane is the workpiece in work stage, and the image planes are splicing detector focal plane subassembly, the object plane and image planes
Relative to whole big visual field high accuracy camera lens total conjugated, conjugate distance is 6~8 times of big visual field high accuracy lens focus, described
The contracting of object plane and image planes is 0.25~0.4 than multiplying power.
Further, the big visual field high accuracy camera lens also includes the flat board being arranged between the 6th lens and the 7th lens
Optical filter, for choosing different spectral coverages.
Further, the combined focal length proportionate relationship of the front lens group is：(6.8~7.3):(- 0.9~-1.1):
(1.4~1.6)；The combined focal length ratio of the rear lens group is：(- 0.9~-1.1):(1.1~1.3):(- 1.25~-
1.55)。
Further, first lens, the 3rd lens, the 5th lens, the 8th lens and the 9th lens are using weight fire
Stone glass or lanthanum flint glass are made；Second lens, the 4th lens, the 6th lens and the 7th lens using K9 glass or
K3 glass is made.
Further, the shock bracket is multiple that, using film-air spring or beam, the vibrations to environment are carried out
Isolation, mitigate influence of the external environment condition change to accuracy of detection；The support platform uses marble material or steel material system
Into being played a supporting role to whole automated optical detection equipment；The work stage is made of high-precision clear glass.
Further, the light source for transmission illumination and light source for reflection illumination use uniform LED area light source, brightness uniformity
Adjustable, the light source for transmission illumination is used to illuminate the hollow out shape workpiece in work stage, completes the transillumination inspection of hollow out shape workpiece
Survey；The light source for reflection illumination is used to illuminate the non-hollow out shape workpiece in work stage, completes the indirect illumination of non-hollow out shape workpiece
Detection.
Further, the splicing detector focal plane subassembly is spliced by multi-slice detector according to isosceles triangle, in workpiece
There is overlapping pixel on platform moving direction between each detector, and the photosensitive pixel of all detectors is at grade；According to work
Part size and shape, by multi-slice detector selected section or whole detection imagings, according to workpiece translational speed, adjustment splicing is visited
Survey the detector exposure frame frequency of device focal plane subassembly.
The beneficial effects of the invention are as follows：
First, the present invention is spliced burnt using fixed big visual field high accuracy camera lens, with reference to multi-disc large area array, high frame frequency detector
Face and the imaging pattern of travelling workpiece, avoid mobile small field of view camera lens in existing automated optical detection equipment, easily by various mistakes
The problem of difference is incorporated into accuracy of detection, detection efficiency and accuracy of detection are improved, while overcome existing automatic optics inspection
Technology limitation and deficiency existing for equipment.
Secondly, the present invention is using multi-slice detector splicing focal plane and big visual field high accuracy camera lens, breach it is single-lens can not
Big view field imaging, the problem of multi-lens imaging is inconsistent, structure is optimized, has unified benchmark.
3rd, the present invention improves image taking speed using multi-disc large area array, high frame frequency detector；Can be according to the fortune of workpiece
Dynamic speed carries out frame frequency matching, with reference to the mode of operation of workpiece sensing, can be worked on industrial production line, greatly adapts to
The needs of industrial detection development.
Brief description of the drawings
Fig. 1 is the structural representation of the large format high-speed, high precision automated optical detection equipment of the present invention.
Fig. 2 is the structural representation of the big visual field high accuracy camera lens in the present invention.
Fig. 3 is the light path schematic diagram of the big visual field high accuracy camera lens in the present invention.
Fig. 4 is the image checking light path schematic diagram of the present invention.
Fig. 5 is that the splicing detector focal plane subassembly focal plane in the present invention splices schematic diagram.
Fig. 6 is the image checking schematic diagram of the present invention.
In figure：1st, shock bracket, 2, support platform, 3, translating rails pair, 4, light source for transmission illumination, 5, work stage, 6, essence
Close drive device, 7, grating scale, 8, workpiece indicator, 9, lens bracket, 10, light source for reflection illumination, 11, speculum, 12, accurate
Focusing platform, 13, big visual field high accuracy camera lens, 14, splicing detector focal plane subassembly, 15, equipment state lamp, 16, controller,
17th, computer, 18, display, the 19, first lens, the 20, second lens, the 21, the 3rd lens, the 22, the 4th lens, the 23, the 5th is saturating
Mirror, the 24, the 6th lens, the 25, the 7th lens, the 26, the 8th lens, the 27, the 9th lens, 28, image planes, 29, optical axis, 30, diaphragm,
31st, object plane.
Embodiment
The present invention is described in further detail below in conjunction with accompanying drawing.
As shown in figure 1, a kind of large format high-speed, high precision automated optical detection equipment of the present invention, mainly includes：It is multiple
Shock bracket 1, support platform 2, two translating rails pairs 3, light source for transmission illumination 4, work stage 5, precise driving device 6, gratings
Chi 7, workpiece indicator 8, lens bracket 9, light source for reflection illumination 10, speculum 11, accurate focusing platform 12, big visual field high accuracy
Camera lens 13, splicing detector focal plane subassembly 14, equipment state lamp 15, controller 16, computer 17, display 18.Mirror therein
Head bracket 9, light source for reflection illumination 10, speculum 11, accurate focusing platform 12, big visual field high accuracy camera lens 13 and splicing detector
Focal plane subassembly 14 is located in shell, and shell is arranged in support platform 2, and shell only shows half in Fig. 1.
Shock bracket 1 uses film-air spring or beam, and the vibrations to environment are isolated, it is therefore an objective to mitigates outer
Influence of portion's environmental change to accuracy of detection.In present embodiment, shock bracket 1 is four.
Multiple shock brackets 1 are fixed on the bottom of support platform 2, and support platform 2 is directly installed on by multiple shock brackets 1
On ground.In present embodiment, support platform 2 is made of marble material or steel material, support platform 2 to it is whole from
Dynamic optical detection apparatus is played a supporting role.
One-dimensional translating rails pair 3 is each provided with left and right sides of the upper surface of support platform 2, translating rails pair 3 is at 1 meter
On stroke, precision controlling needs to ensure the depth of parallelism of the two translating rails pairs 3 in left and right within 5 μm.Work stage 5 is placed
In the translating rails pair 3 of left and right two, equal to being placed on indirectly in support platform 2, work stage 5 can be with translating rails pair 3
The slip reciprocal precise motion of one direction and positioning in support platform 2.In present embodiment, work stage 5 is using high-precision
Clear glass is made.
Light source for transmission illumination 4 is fixed on the upper surface of support platform 2, and light source for transmission illumination 4 be located at work stage 5 just under
Side, light source for transmission illumination 4 are used to illuminate the hollow out shape workpiece (such as steel mesh) in work stage 5, and the transmission for completing hollow out shape workpiece is shone
Bright detection.In present embodiment, light source for transmission illumination 4 uses uniform LED area light source, ensures its brightness uniformity and brightness can
Adjust.
Precise driving device 6 is fixed on the rear end face of support platform 2, is passed through between work stage 5 and precise driving device 6
Precision lead screw or timing belt are connected, and precise driving device 6 drives work stage 5 by motor, makes work stage 5 in support platform 2
With the reciprocal precise motion of secondary 3 one directions of two translating rails and positioning.
The reading head and grating of grating scale 7 are separately mounted in work stage 5 and support platform 2, are moved for measuring work stage 5
Dynamic speed and position, grating scale 7 also electrically connect with controller 16, and speed and position signalling, pass through cable caused by grating scale 7
Feed back in controller 16, then control precise driving device 6 that work stage 5 is run with the speed of demand, can be with splicing
The detector frame frequency accurate match of detector focal plane subassembly 14.
Workpiece indicator 8 is arranged on the position between support platform 2 and work stage 5, and before light source for transmission illumination 4
End.When there is workpiece in work stage 5, and during travelling workpiece indicator 8, workpiece indicator 8 provides a control signal, carries out imaging
Detection.
Lens bracket 9 is installed in the top surface edge of support platform 2, whole lens bracket 9 is outside two translating rails pairs 3
Side, and be directly installed in support platform 2.In present embodiment, lens bracket 9 is gantry pattern, using monolithic construction or
Person's modular construction.
As shown in figure 1, light source for reflection illumination 10 is arranged on the inner side of lens bracket 9, light source for reflection illumination 10 is used for gaffer
Non- hollow out shape workpiece (such as circuit board) on part platform 5, complete the indirect illumination detection of non-hollow out shape workpiece.In present embodiment,
Light source for reflection illumination 10 uses uniform LED area light source, ensures its brightness uniformity and brightness is adjustable.
The automated optical detection equipment of the present invention is configured with 10 two kinds of light sources of light source for transmission illumination 4 and light source for reflection illumination；
Light source for transmission illumination 4 and light source for reflection illumination 10 all use uniform LED area light source, its brightness uniformity and brightness is adjustable, transmission
Lighting source 4 and light source for reflection illumination 10 are respectively used to the detection of the hollow out workpiece and non-hollow out workpiece in work stage 5, that is, transmit
Illumination detection and indirect illumination detection.
Accurate focusing platform 12 is arranged on the upper surface of lens bracket 9, and big visual field high accuracy camera lens 13 and splicing detector are burnt
Face component 14 is all arranged on the accurate upper surface of focusing platform 12, and big visual field high accuracy camera lens 13 and splicing detector focal plane group
Part 14 is all horizontally disposed, and speculum 11 is fixed on the upper surface front end of lens bracket 9, speculum 11 and splicing detector focal plane subassembly
14 are located at the big rear and front end of visual field high accuracy camera lens 13 respectively, i.e., the big front end of visual field high accuracy camera lens 13 alignment speculum 11, greatly
The back-end aligned splicing detector focal plane subassembly 14 of visual field high accuracy camera lens 13, speculum 11 in 45 ° of settings be speculum 11 with it is big
The angle of the optical axis 29 of visual field high accuracy camera lens 13 is 45 °, and speculum 11 is used to transfer image checking light path, most vertical light at last
Road is converted into horizontal optical path, while reduces the physical dimension of equipment.
Splicing detector focal plane subassembly 14 is spliced by multi-slice detector, joining method such as Fig. 5 institutes of multi-slice detector
Show, using isosceles triangle connecting method, detector can use CCD or CMOS, in order to improve resolution ratio, using large area array, high frequency
Detector.The key of splicing is on the moving direction of work stage 5, ensures there is certain overlapping pixel between each detector, simultaneously
Ensure the photosensitive pixel of all detectors at grade.Adjust back and forth accurate focusing platform 12 cause work stage 5 on work
Part can be with the detector photosurface total conjugated on splicing detector focal plane subassembly 14, and splicing detector focal plane subassembly 14
Pass through the big total conjugated of visual field high accuracy camera lens 13 with work stage 5.According to workpiece size and shape, automated optical of the invention
The multi-slice detector that detection device can be arranged by isosceles triangle in splicing detector focal plane subassembly 14, all selected section or spy
Survey imaging；Simultaneously according to workpiece motion s speed, automated optical detection equipment of the invention can control or adaptively adjust splicing
The exposure frame frequency for the multi-slice detector that isosceles triangle arranges in detector focal plane subassembly 14, matches optimal imaging effect.
As shown in figure 1, the control system of the automated optical detection equipment of the present invention mainly includes equipment state lamp 15, control
Device 16, computer 17 and display 18, image pick-up card and control software are installed in its Computer 17.Controller 16 is distinguished
Electrically connected with precise driving device 6, grating scale 7 and splicing detector focal plane subassembly 14, computer 17 and equipment state lamp 15, control
Device 16 and display 18 processed electrically connect.Equipment state lamp 15 is used for display device current state (idle, preparation, work, failure
Deng), controller 16 is used to drive the operation of precise driving device 6, the detector frame frequency of control splicing detector focal plane subassembly 14,
Computer 17 is whole equipment maincenter, and for connecting and controlling all Electricity Federation components, display 18 is used for man-machine interaction and sets, be aobvious
Show that device program running status and testing result export, the image pick-up card and control software in computer 17 are used to realize
The splicing of multi-slice detector image and image procossing, and contrasted with normative document, realize the detection of workpiece error.
As shown in fig. 6, the present invention is using fixed big visual field high accuracy camera lens 13 and splicing detector focal plane subassembly 14, movement
The image checking working forms of work stage 5.The imaging viewing field of big visual field high accuracy camera lens 13 can cover the face of whole work stage 5
Product, by big visual field high accuracy camera lens 13 and the total conjugated of work stage 5, i.e. splicing detector focal plane subassembly 14 can be to work stage
Whole workpiece area on 5 is imaged, big visual field high accuracy camera lens 13 in work stage 5 workpiece carry out multi-slice detector into
Picture, recycle computer 17 in image pick-up card and control software to multi-slice detector imaging is spliced, shape
Compared one by one into complete image, and using complete graphics standard file, error solved using the method for XOR,
And shown using form and image, realize large format image checking.
The mode of operation of the automated optical detection equipment of the present invention comprises at least single-piece detection pattern and streamline detection mould
Formula, single-piece detection pattern are that work stage 5 at the uniform velocity enters out to carry out workpiece sensing, and streamline detection pattern is that work stage 5 is at the uniform velocity entered
Enter, it is quick after having detected to return to carry out workpiece sensing.
As shown in Fig. 2 big visual field high accuracy camera lens 13 mainly (refers to work stage in the present embodiment including object plane 31
Workpiece on 5), common optical axis set nine pieces of lens (nine pieces of lens are respectively the first lens 19, the second lens 20, the 3rd lens
21st, the 4th lens 22, the 5th lens 23, the 6th lens 24, the 7th lens 25, the 8th lens 26, the 9th lens 27), diaphragm 30,
Image planes 28 (referring to splicing detector focal plane subassembly 14 in the present embodiment) and optical axis 29.Object plane 31 and image planes 28 distinguish position
In the high order end and low order end of optical axis 29.Nine pieces of lens and diaphragm 30 are arranged between object plane 31 and image planes 28, that is to say, that the
The lens 27 of one lens the 19~the 9th are from left to right set gradually along optical axis 29, and the front end of the first lens 19 is big visual field high accuracy mirror
First 13 object plane 31, the rear end of the 9th lens 27 are the image planes 28 of big visual field high accuracy camera lens 13, and wherein diaphragm 30 is arranged on the 4th
Between the lens 23 of lens 22 and the 5th.The 5th lens 23 and the 6th lens 24 in nine pieces of lens form glued mirror, the first lens
19th, the second lens 20, the 3rd lens 21, the 4th lens 22, the 7th lens 25, the 8th lens 26, the 9th lens 27 are all single mirrors.
Whole big visual field high accuracy camera lens 13 is divided into front lens group and rear lens group, the first lens 19, second by diaphragm 30
Lens 20, the 3rd lens 21 and the 4th lens 22 composition front lens group, the focal power of front lens group according to it is positive and negative, just, positive combination
That is the first lens 19, the second lens 20, the focal power of the 3rd lens 21 and the 4th lens 22 be respectively positive and negative, just, just, preceding
The proportionate relationship of microscope group focal length is about：(6.8~7.2):(- 0.85~-1.22):(0.9~1.2):(1.85~2.15), i.e.,
The focal length f of one lens 191', the focal length f of the second lens 202', the focal length f of the 3rd lens 213' and the 4th lens 22 focal length f4’
Proportionate relationship be about：f1’:f2’:f3’:f4'=(6.8~7.2):(- 0.85~-1.22):(0.9~1.2):(1.85~
2.15), the focal power of front lens group is mainly reflected in Negative-Positive-Negative structure, and the combined focal length proportionate relationship of front lens group is about：
(6.8~7.3):(- 0.9~-1.1):(1.4~1.6).
Glued mirror (the glued mirror being made up of the 5th lens 23 and the 6th lens 24), the 7th lens 25, the 8th lens 26 and
9th lens 27 form rear lens group, and the focal power of rear lens group is glued mirror, the 7th lens according to negative, positive, positive and negative combination
25th, the focal power of the 8th lens 26 and the 9th lens 27 is respectively negative, positive, positive and negative, and the proportionate relationship of rear lens group focal length is about
For：(- 0.9~-1.1):(1.5~1.7):(3.6~4):(- 1.25~-1.55), i.e., glued mirror is (by the 5th lens 23 and
Six lens 24 form glued mirror) focal length f5-6', the focal length f of the 7th lens 257', the focal length f of the 8th lens 268' and the 9th
The focal length f of lens 279' proportionate relationship be about：f5-6’:f7’:f8’:f9'=(- 0.9~-1.1):(1.5~1.7):(3.6~
4):(- 1.25~-1.55), the focal power of rear lens group are mainly reflected in Negative-Positive-Negative structure, the combined focal length ratio of rear lens group
Example be about：(- 0.9~-1.1):(1.1~1.3):(- 1.25~-1.55).
The lens 27 of first lens the 19~the 9th are all made of to use the glass material in Chinese glass storehouse：First lens 19,
3rd lens 21, the 5th lens 23, the 8th lens 26 and the 9th lens 27 are all made of dense flint glass or lanthanum flint glass；
Second lens 20, the 4th lens 22, the 6th lens 24, the 7th lens 25 are all made of conventional crown glass, mainly K9 glass
Glass and K3 glass.
As a further improvement, in order to adapt to different occasions and different lighting source demands, while it is high-precision to expand big visual field
The application of camera lens 13 is spent, is changed according to the spectrum of the application in actual industrial and lighting source, in physical dimension most
Flat board optical filter is set between the 6th small lens 24 and the 7th lens 25, for choosing different spectral coverages.First lens 19~
The surface coating of 9th lens 27 can be wide spectrum membrane system, under different lighting conditions, be filtered using the flat board of different membrane systems
Piece, adjusted with reference to the geometric parameter of the 4th lens 22, the 5th lens 23 and the 6th lens 24, can reach photo-quality imaging, it is so big
The basic structure of visual field high accuracy camera lens 13 is constant, expands application, has greatly saved cost, is advantageous to big visual field high accuracy
The industrial mass manufacture of camera lens 13.
Big visual field high accuracy camera lens 13, which is that a kind of big visual field is undistorted, to contract than object lens, and object plane 31 and image planes 28 are relative to whole
The big total conjugated of visual field high accuracy camera lens 13, conjugate distance are about 6~8 times of the big focal length of visual field high accuracy camera lens 13, the He of object plane 31
The contracting of image planes 28 than multiplying power between 0.25~0.4, while object plane 31 and image planes 28 contracting ratio distortion be less than 0.012%, regard greatly
The imaging viewing field of the high-precision camera lens 13 in field can cover the whole area of work stage 5, pass through big visual field high accuracy camera lens 13 and work stage 5
Total conjugated.The maximum reachable 750mm of the size of object plane 31, i.e. equipment can detect workpiece size and reach more than 750mm, and image planes are effective
Size is 240mm.Optical system light path is transferred by speculum 11, and object plane 31 is horizontal direction, and image planes 28 are vertical direction, thing
Face 31 and image planes 28 are all planes.
The image checking light path of the present invention is as shown in figure 4, the light that object plane 31, which is the workpiece in work stage 5, to be sent passes through instead
Penetrate mirror 11 reflect after be incident on the first lens 9, incident light successively by the first lens 19, the second lens 20, the 3rd lens 21,
4th lens 22, diaphragm 30, the 5th lens 23, the 6th lens 24, the 7th lens 25, the 8th lens 26, the 9th lens 27 reach
Image planes 28 are that splicing detector focal plane subassembly 14 is imaged.Front and rear two groups of lens all just have the basic aberration ginseng of independent correction
The function of number and variable, thus the number of lenses of big visual field high accuracy camera lens 13 can control it is minimum, front and rear two groups of lens
Combination mainly correction system high aberration and balance aberration；In the glued mirror close to diaphragm 30, (the 5th lens 23 and the 6th are saturating
The glued mirror that mirror 24 is formed) cemented surface, be mainly used in correction system aberration.
Claims (10)
- A kind of 1. large format high-speed, high precision automated optical detection equipment, it is characterised in that including：Support platform (2)；It is fixed on the shock bracket (1) of support platform (2) bottom；The two translating rails pairs (3) for being arranged on support platform (2) upper surface and being parallel to each other；The work stage (5) being placed on translating rails secondary (3)；It is fixed on support platform (2) upper surface and the light source for transmission illumination (4) immediately below work stage (5)；It is fixed on support platform (2) rear end and the precise driving device (6) being connected with work stage (5), the precise driving device (6) work stage (5) is driven by motor, make work stage (5) with the slip of translating rails secondary (3) in support platform (2) it is single Direction moves back and forth and positioning；Control system, for display device current state, for driving precise driving device (6) to run, for controlling splicing to visit The detector frame frequency of device focal plane subassembly (14) is surveyed, for man-machine interaction setting, display device running state of programs and testing result Output, for realizing the splicing and processing of image, for being contrasted stitching image and normative document, realizing that workpiece misses Difference detection；The grating scale (7) being connected with control system, the reading head and grating of the grating scale (7) are separately mounted to work stage (5) In support platform (2), for measuring the mobile speed of work stage (5) and position and speed and position signalling being fed back into control System, precise driving device (6) operation is controlled to move work stage (5) by control system, the mobile speed of the work stage (5) Degree matches with the detector frame frequency of splicing detector focal plane subassembly (14)；It is fixed on support platform (2) top surface edge and the lens bracket (9) on the outside of two translating rails pairs (3)；The light source for reflection illumination (10) being fixed on the inside of lens bracket (9)；It is fixed on the speculum (11) and accurate focusing platform (12) of lens bracket (9) upper surface；It is fixed on accurate focusing platform (12) upper surface and horizontally disposed big visual field high accuracy camera lens (13) and splicing detector Focal plane subassembly (14), big visual field high accuracy camera lens (13) front and back end are respectively aligned to speculum (11) and splicing detector focal plane Component (14), optical axis (29) angle at 45 ° of the speculum (11) and big visual field high accuracy camera lens (13), the speculum (11) it is used for image checking light path of transferring, the workpiece in work stage (5) is visited with splicing by adjusting accurate focusing platform (12) The detector photosurface total conjugated of device focal plane subassembly (14) is surveyed, and splicing detector focal plane subassembly (14) and work stage (5) are logical Excessive visual field high accuracy camera lens (13) total conjugated.
- 2. a kind of large format high-speed, high precision automated optical detection equipment according to claim 1, it is characterised in that described Control system includes：Computer (17), it is whole equipment maincenter for connecting and controlling all Electricity Federation components；The equipment state lamp (15) electrically connected with computer (17), for display device current state；The display (18) electrically connected with computer (17), for man-machine interaction setting, display device running state of programs and inspection Survey result output；Electrically connected respectively with computer (17), precise driving device (6), grating scale (7) and splicing detector focal plane subassembly (14) Controller (16), for drive precise driving device (6) run, for controlling the detection of splicing detector focal plane subassembly (14) Device frame frequency；Image pick-up card and control software in computer (17), for realizing the splicing and processing of image, use In stitching image and normative document are contrasted, realize workpiece error-detecting.
- 3. a kind of large format high-speed, high precision automated optical detection equipment according to claim 1, it is characterised in that also wrap Include and shone installed in the workpiece indicator (8) between support platform (2) and work stage (5), the workpiece indicator (8) positioned at transmission Mingguang City source (4) front end；When having workpiece and travelling workpiece indicator (8) in work stage (5), the workpiece indicator (8) provides One control signal, start image checking.
- 4. a kind of large format high-speed, high precision automated optical detection equipment according to claim 1, it is characterised in that described Big visual field high accuracy camera lens (13) includes object plane (31), the first lens (19), the second lens being arranged in order along optical axis (29) (20), the 3rd lens (21), the 4th lens (22), diaphragm (30), the 5th lens (23), the 6th lens (24), the 7th lens (25), the 8th lens (26), the 9th lens (27) and image planes (28)；5th lens (23) and the 6th lens (24) composition glue Mirror is closed, the light that the object plane (31) sends is successively through the first lens (19), the second lens (20), the 3rd lens (21), the 4th Lens (22), diaphragm (30), glued mirror, the 7th lens (25), the 8th lens (26), the 9th lens (27) reach image planes (28) and entered Row imaging；The diaphragm (30) entirely big visual field high accuracy camera lens (13) will be divided into front lens group and rear lens group, first lens (19) form front lens group to the 4th lens (22), the focal power of the front lens group according to it is positive and negative, just, positive combination, before described The focal length proportionate relationship of lens group is：(6.8~7.2):(- 0.85~-1.22):(0.9~1.2):(1.85~2.15)；It is described Glued mirror, the 7th lens (25), the 8th lens (26) and the 9th lens (27) composition rear lens group, the light focus of the rear lens group Spend according to negative, positive, positive and negative combination, the focal length proportionate relationship of the rear lens group and be：(- 0.9~-1.1):(1.5~1.7): (3.6~4):(- 1.25~-1.55)；System high aberration and balance aberration are corrected by front lens group and rear lens group, passed through The cemented surface correction system aberration of glued mirror；The object plane (31) is the workpiece in work stage (5), and the image planes (28) are splicing detector focal plane subassembly (14), described Relative to whole big visual field high accuracy camera lens (13) total conjugated, conjugate distance is big visual field high accuracy for object plane (31) and image planes (28) 6~8 times of camera lens (13) focal length, the contractings of the object plane (31) and image planes (28) are 0.25~0.4 than multiplying power.
- 5. a kind of large format high-speed, high precision automated optical detection equipment according to claim 4, it is characterised in that also wrap The flat board optical filter being arranged between the 6th lens (24) and the 7th lens (25) is included, for choosing different spectral coverages.
- 6. a kind of large format high-speed, high precision automated optical detection equipment according to claim 4, it is characterised in that described The combined focal length proportionate relationship of front lens group is：(6.8~7.3):(- 0.9~-1.1):(1.4~1.6)；The rear lens group Combined focal length ratio be：(- 0.9~-1.1):(1.1~1.3):(- 1.25~-1.55).
- 7. a kind of large format high-speed, high precision automated optical detection equipment according to claim 4, it is characterised in that described First lens (19), the 3rd lens (21), the 5th lens (23), the 8th lens (26) and the 9th lens (27) use dense flint Glass or lanthanum flint glass are made；Second lens (20), the 4th lens (22), the 6th lens (24) and the 7th lens (25) It is made of K9 glass or K3 glass.
- 8. a kind of large format high-speed, high precision automated optical detection equipment according to claim 1, it is characterised in that described Shock bracket (1) is multiple, and using film-air spring or beam, the vibrations to environment are isolated, and mitigates external environment condition Change the influence to accuracy of detection；The support platform (2) is made of marble material or steel material, to whole automatic light Detection device is learned to play a supporting role；The work stage (5) is made of high-precision clear glass.
- 9. a kind of large format high-speed, high precision automated optical detection equipment according to claim 1, it is characterised in that described Light source for transmission illumination (4) and light source for reflection illumination (10) use uniform LED area light source, and brightness uniformity is adjustable, the transmission Lighting source (4) is used to illuminate the hollow out shape workpiece in work stage (5), completes the transillumination detection of hollow out shape workpiece；It is described Light source for reflection illumination (10) is used to illuminate the non-hollow out shape workpiece in work stage (5), completes the indirect illumination of non-hollow out shape workpiece Detection.
- A kind of 10. large format high-speed, high precision automated optical detection equipment according to claim 1, it is characterised in that institute State splicing detector focal plane subassembly (14) to be spliced according to isosceles triangle by multi-slice detector, on work stage (5) moving direction There is overlapping pixel between each detector, and the photosensitive pixel of all detectors is at grade；According to workpiece size and shape, By multi-slice detector selected section or whole detection imagings, according to workpiece translational speed, splicing detector focal plane subassembly is adjusted (14) detector exposure frame frequency.
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| CN108152299A (en) * | 2017-12-12 | 2018-06-12 | 长光卫星技术有限公司 | The beauty defects detection device and detection method of high-precision optical element |
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| CN106403814B (en) * | 2016-08-31 | 2018-08-24 | 浙江轩业电气设备有限公司 | Visual pattern machine and its detection method |
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| CN116879308A (en) * | 2018-11-22 | 2023-10-13 | 南通科技职业学院 | Industrial machine vision system image processing method |
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| CN2819212Y (en) * | 2005-03-17 | 2006-09-20 | 复旦大学 | Fast elliptical polarized light measuring equipment |
| CN100417931C (en) * | 2005-04-06 | 2008-09-10 | 博奥生物有限公司 | Microarray chip detection system |
| CN101462112B (en) * | 2009-01-12 | 2012-07-04 | 浙江省农业科学院 | Laser instrument and method for sorting male and female graines |
| JP5423190B2 (en) * | 2009-07-09 | 2014-02-19 | 株式会社ニコン | Variable magnification optical system and optical apparatus provided with the variable magnification optical system |
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