CN100516846C - Cutting surface testing apparatus for glass substrate - Google Patents

Cutting surface testing apparatus for glass substrate Download PDF

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Publication number
CN100516846C
CN100516846C CNB2004100022045A CN200410002204A CN100516846C CN 100516846 C CN100516846 C CN 100516846C CN B2004100022045 A CNB2004100022045 A CN B2004100022045A CN 200410002204 A CN200410002204 A CN 200410002204A CN 100516846 C CN100516846 C CN 100516846C
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CN
China
Prior art keywords
mentioned
glass substrate
camera
base station
frame
Prior art date
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CNB2004100022045A
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Chinese (zh)
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CN1621818A (en
Inventor
金英泽
文祥昊
金昶勋
李斗铉
Original Assignee
三星康宁精密琉璃株式会社
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Priority to KR0085620/2003 priority Critical
Priority to KR20030085620A priority patent/KR100579322B1/en
Application filed by 三星康宁精密琉璃株式会社 filed Critical 三星康宁精密琉璃株式会社
Publication of CN1621818A publication Critical patent/CN1621818A/en
Application granted granted Critical
Publication of CN100516846C publication Critical patent/CN100516846C/en

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/95Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/958Inspecting transparent materials or objects, e.g. windscreens

Abstract

The invention aims to detect cut surface information used for the quality inspection of the glass substrate quickly, correctly and optically by inspecting the cut surface of the glass substrate stereoscopically from a plurality of directions. A apparatus for inspecting the cut surface of the glass substrate is provided with a fixing plate 110 for fixing the glass substrate, a 1st, a 2nd and a 3rd photographing means 120, 130 and 140 for obtaining the profile images of the upper side, the lower side and the plane of the cut surface of the substrate and a main robot 150 provided with a frame 151 for fixing and moving the 1st to 3rd photographing means. The productivity and the quality of the glass substrate are improved by feed-backing the cut surface information optically obtained by the apparatus.

Description

The section testing fixture of glass substrate

Technical field

The present invention relates to the section testing fixture of glass substrate, relate to a kind of like this section testing fixture of glass substrate in more detail, promptly, can detect the information of the section of glass substrate rapidly and exactly by utilizing image optical system the section of glass substrate to be checked from the three-dimensional ground of all directions.

Background technology

Generally; at TFT-LCD (Thin Film Transistor-LCD), PDP (plasma display panel), EL (Electro luminescence; promptly; electroluminescence) employed glass substrate in the manufacturing field of flat-panel monitor such as; be the glass melts that melts in glass furnace is supplied to make glass plate in the fusing forming machine after; utilize cutting machines such as skive to cut off, and after applying diaphragm in its surface, be transported on the processing line according to elementary specification.

In the cutting action of above-mentioned this glass substrate, because of the different degree differences that are cut of the state of cutting machine, and can produce defective on the section, so the information that obtains section is very important.In the past, the operator utilizes microscope that the section of glass substrate is carried out visual inspection.

As mentioned above, the past not only needs long time when utilizing microscope to check the section of glass substrate, and checks that precision is low, can not obtain the problem of glass substrate section information accurately so exist.

Especially, owing to be subjected to time restriction, can only check a side to the glass substrate section, can not carry out stereoscopy to the glass substrate section, can not obtain the accurate information of glass substrate section, exist to be difficult to observation post is got the problem that information is used as the operation feedback data.

Summary of the invention

The present invention is In view of the foregoing and the scheme that proposes, its purpose is: from each different directions the glass substrate section is carried out stereoscopic examination by utilizing image optical system, can check out the information of glass substrate section rapidly and exactly, for example the rectilinear propagation of the section of the thickness of the kind of defective and size, glass substrate, glass substrate, the emery wheel penetraction depth of cutting machine etc.; Can therefore carry out process modification easily these information as the operation feedback data, for example judge the emery wheel replacing time of cutting machine etc., a kind of section testing fixture of the glass substrate that helps to improve glass substrate production efficiency and improve the quality of products is provided.

In order to achieve the above object, the invention provides a kind of section testing fixture of glass substrate, be used to check the section of glass substrate, it is characterized in that, comprising:

Adsorption plate is used for fixing above-mentioned glass substrate, and the section that makes above-mentioned glass substrate is to side-prominent on one side;

The 1st camera is positioned at the top of the upper surface of above-mentioned glass substrate, and has the 1st video camera, is used for towards above-mentioned section upside and above-mentioned upper surface vertically to the glass substrate acquisition image of photographing;

The 2nd camera is positioned at the below of the lower surface of above-mentioned glass substrate, and has the 2nd video camera, is used for towards above-mentioned section downside and above-mentioned lower surface vertically to the glass substrate acquisition image of photographing;

The 3rd camera, opposed with the section of above-mentioned glass substrate, and have the 3rd video camera, be used for above-mentioned section vertically to the glass substrate acquisition image of photographing;

Frame is provided with the section of above-mentioned glass substrate is close, combines with above-mentioned the 1st~the 3rd camera respectively; And

The frame mobile device is used to make above-mentioned frame to move, so that above-mentioned the 1st~the 3rd camera that is arranged on the above-mentioned frame is moved along the length direction of above-mentioned section, and can photograph to section.

The invention effect

Adopt the section testing fixture of glass substrate of the present invention, utilize image optical system to carry out stereoscopic examination to the glass substrate section from each different directions, so can check out the information of glass substrate section rapidly and exactly, for example the rectilinear propagation of the section of the thickness of the kind of defective and size, glass substrate, glass substrate, the emery wheel penetraction depth of cutting machine etc.Can carry out high efficiency detection to defective like this, these information as the operation feedback data, are therefore carried out process modification easily, for example judge the emery wheel replacing time of cutting machine etc., therefore, help to improve glass substrate production efficiency and improve the quality of products.

Description of drawings

Fig. 1 is the outboard profile of the section testing fixture of expression glass substrate of the present invention.

Fig. 2 is the planimetric map of the section testing fixture of expression glass substrate of the present invention.

Fig. 3 is the 1st~the 3rd video camera and the 1st~the 3rd sectional drawing that throws light on of the section testing fixture of expression glass substrate of the present invention.

Fig. 4 is the 4th illumination and the outboard profile of the 4th catoptron of the section testing fixture of expression glass substrate of the present invention.

Fig. 5 is the planimetric map of focusing of the 3rd video camera that is used to illustrate the section testing fixture of glass substrate of the present invention.

Fig. 6 is the figure of focusing of the 3rd video camera that is used to illustrate the section testing fixture of glass substrate of the present invention.

Embodiment

Following with reference to accompanying drawing, describe preferred forms of the present invention in detail.

Fig. 1 is the outboard profile of the section testing fixture of expression glass substrate of the present invention.Fig. 2 is the planimetric map of the section testing fixture of expression glass substrate of the present invention.Fig. 3 is the video camera of section testing fixture of expression glass substrate of the present invention and the sectional drawing of illumination.Fig. 4 is the 4th illumination and the outboard profile of the 4th catoptron of the section testing fixture of expression glass substrate of the present invention.

As shown in the figure, the section testing fixture 100 of glass substrate of the present invention comprises: the adsorption plate 110 that is used for fixing glass substrate 1; With the perpendicular direction in the both sides of the horizontal direction of glass substrate 1 section 1a on the 1st, the 2nd and the 3rd camera 120,130,140 that is provided with; And, the main aut.eq. 150 that frame 151 that the 1st, the 2nd, the 3rd camera 120,130,140 is set is moved along the length direction of the section 1a of glass substrate 1.

110 pairs of glass substrates 1 of adsorption plate support, and make the section 1a of glass substrate 1 side-prominent from adsorption plate 110 on one side.

Form a plurality of vacuum holes (not shown) at a avris, supply with suction to this vacuum hole, absorption glass substrate 1 from the vacuum plant of outside with glass substrate 1 contacted adsorption plate 110.Even glass substrate 1 deflection also can be supplied with suction from another avris of one side side direction successively by the length direction along adsorption plate 110 in vacuum hole, glass substrate 1 integral body is clung on the adsorption plate 110.

And, preferably make section 1a is bearing in a plurality of guidess 160 on the normal place, can move horizontally and be arranged on regularly with adsorption plate 110 opposed positions on, thereby make the distance between the 3rd video camera 141 of the section 1a of the glass substrate of being fixed on the adsorption plate 110 1 and following the 3rd camera 140 keep certain.Because this structure makes glass substrate 1 be fixed on the adsorption plate 110 easily, so that the section 1a of glass substrate 1 is positioned at the focal length of the 3rd video camera 141 of the 3rd camera 140, so, the 3rd video camera 141 is focused.

The the 1st~the 3rd camera 120 ..., 140 be separately positioned on the frame 151 of main aut.eq. 150.

The 1st camera 120 has: the 1st video camera 121 and the 1st illumination 122 that lay respectively at the upper surface top of glass substrate 1.The 1st video camera 121 towards the upside of section 1a, be the upper surface of glass substrate 1 and the upside that section 1a engages one another, under the state vertical, glass substrate 1 is photographed with glass substrate 1, obtain the upper side image of section 1a, the 1st illumination 122 is mapped to illumination on the photography position of the 1st video camera 121.

The 2nd camera 130 has the 2nd video camera 131 and the 2nd illumination 132, they lay respectively at the below of the lower surface of glass substrate 1, section 1a with glass substrate 1 is that benchmark is arranged to and the 1st camera 120 opposed states, the 2nd video camera 131 towards the downside of section 1a, be the lower surface of glass substrate 1 and the lower side that section 1a engages, under the state vertical, glass substrate 1 is photographed with the lower surface of glass substrate 1, obtain the downside image of section 1a, the 2nd illumination 132 is mapped to illumination at the photography position of the 2nd video camera 131.

The 3rd camera 140 has: respectively with opposed the 3rd video camera 141 and the 3rd illumination 142 of the section 1a of glass substrate 1.The 3rd video camera 141, is photographed to glass substrate 1 under the state vertical with section 1a towards section 1a, obtains the flat image of section 1a, and the 3rd illumination 142 is mapped to illumination on the photography position of the 3rd video camera 141.

The the 1st~the 3rd camera 120 ..., 140 the 1st~the 3rd the illumination 122 ..., 142, be preferably in the 1st~the 3rd video camera 121 ..., 141 lens 123 ..., irradiates light on the identical direction of 143 optical axis.For this reason, the the 1st~the 3rd illumination 122 ..., 142 as shown in Figure 3, be configured to the 1st~the 3rd video camera 121 ..., 141 irradiates lights vertically, from the 1st~the 3rd the illumination 122 ..., 142 the irradiation light, by the 1st~the 3rd catoptron 124 ..., 144 the reflection, along lens section 123 ..., 143 optical axis shines.So, the 1st~the 3rd video camera 121, ..., 141, can not be subjected to from the 1st~the 3rd the illumination 122 ..., 142 light that irradiate interference, can be exactly the section 1a of glass substrate 1 be photographed.

Main aut.eq. 150 is arranged to mutually close with the section 1a of glass substrate 1, and, be provided with the 1st~the 3rd camera 120 ..., 140 frame 151, be installed on the main aut.eq. 150 and and move freely along section 1a, so that the 1st~the 3rd camera 120 ..., 140 length directions along section 1a move, and the whole face of upside, lower side and the section 1a of section 1a is photographed.

Frame 151 is by the driving of not shown motor, and section 1a moves back and forth in the length direction upper edge of main aut.eq. 150, but the drive unit of frame 150 is not limited only to this, also can adopt pneumatic cylinder.

And frame 151 has the 1st~the 3rd adjusting gear 152,153,154, be used to adjust the 1st~the 3rd camera 120 ..., 140 positions with respect to the section 1a of glass substrate 1, and be used for the 1st~the 3rd video camera 121 ..., 141 focusing.

The 1st adjusting gear 152 is arranged on the part that frame 151 and the 1st camera 120 are connected.And comprise: the 1st position adjustment base station 152a is used to make the 1st camera 120 to move on the direction vertical with the section 1a of glass substrate 1; And: base station 152b is used in the 1st focusing, is fixed with the 1st camera 120, and make the 1st camera 120 with the direction of section 1a level on move with base station 152a with respect to the 1st position adjustment.

Utilize this structure, the 1st adjusting gear 152 can be adjusted with respect to the position of the section 1a of glass substrate 1 the 1st camera 120 easily by moving the 1st position adjustment base station 152a; Use base station 152b by moving the 1st focusing, can implement the focusing of the 1st video camera 121 easily.

The 2nd adjusting gear 153 is arranged on the part that frame 151 and the 2nd camera 130 are connected.And, comprising: the 2nd position adjustment base station 153a, be used to make the 2nd camera 130 with the perpendicular direction of the section 1a of glass substrate 1 on move; And base station 153b is used in the 2nd focusing, is fixed with the 2nd camera 130, and make the 2nd camera 130 with the direction of section 1a level on move with base station 153a with respect to the 2nd position adjustment.

Utilize this structure, the 2nd adjusting gear 153 can be adjusted with respect to the position of the section 1a of glass substrate 1 the 2nd camera 130 easily by moving the 2nd position adjustment base station 153a; Use base station 153b by moving the 2nd focusing, can implement the focusing of the 2nd video camera 131 easily.

The 3rd adjusting gear 154 is arranged on the part that frame 151 and the 3rd camera 140 are connected.And, comprising: the 3rd position adjustment base station 154a, be used to make the 3rd camera 140 with the direction of the section 1a level of glass substrate 1 on move; And base station 154b is used in the 3rd focusing, is fixed with the 3rd camera 140, and make the 3rd camera 140 with the perpendicular direction of section 1a on move with base station 154a with respect to the 3rd position adjustment.

Utilize this structure, the 3rd adjusting gear 154 can be adjusted with respect to the position of the section 1a of glass substrate 1 the 3rd camera 140 easily by moving the 3rd position adjustment base station 154a; Use base station 154b by moving the 3rd focusing, can implement the focusing of the 3rd video camera 141 easily.

The the 1st~the 3rd adjusting gear 152 ..., 154 the 1st~the 3rd position adjustment with base station 152a ..., 154a and the 1st~3rd focusing with base station 152b ..., 154b, move back and forth by the driving that is separately positioned on the motor (not shown) on the frame 151, but also can replace motor, promptly utilize the compression of pneumatic cylinder (not shown) and expand to move back and forth with pneumatic cylinder.

And, as shown in Figure 4, with the 1st~the 3rd camera 120 ..., 140 the 1st~the 3rd video camera 121 ..., in 141 images of taking, can more clearly distinguish with background for the shape that makes glass substrate 1 and to come, the testing fixture 100 of the section 1a of glass substrate has: the 4th illumination 171 of irradiates light and the 4th catoptron 172 that will be reflected around the section 1a of glass substrate 1 by the light of the 4th illumination 171 irradiations.Utilize this structure, light by the 4th illumination 171 irradiations is reflected on the 4th catoptron 172, thereby to shining around the section 1a of glass substrate 1, thus, by the 1st~the 3rd video camera 121 ..., in 141 images of taking, the shape of glass substrate 1a makes that the light and shade of background is different with color, so that can more clearly be distinguished with background.

And, in order to remove the foreign matter around the section 1a attached to glass substrate 1, the air nozzle 180 that injection air is set at the upper surface and the lower surface of glass substrate 1 respectively.

From extraneous air supply unit (not shown) to air nozzle 180 air supplies, air nozzle 180 sprays around the section 1a of glass substrate 1, remove foreign matter, like this, can prevent with the 1st~the 3rd camera 120 ..., 140 the 1st~the 3rd video camera 121 ..., the foreign matter image appears in 141 images of taking, obtain the sharp image of the section 1a of glass substrate 1.

On the other hand, on main aut.eq. 150, be provided with the lineal scale chi 192 of the position that is used to measure frame 151 and being used for respectively from the read head 191 of scale 192 sense datas.

The below action of the section testing fixture 100 of the glass substrate of this structure of explanation.

At first, glass substrate 1 is positioned on the adsorption plate 110.At this moment, section 1a is closely adhered on guides 160 fixing on the precalculated position.Like this, section 1a places on the reference position, and therefore, the distance between the lens 143 of the 3rd video camera 141 of the 3rd camera 140 and the section 1a keeps certain, makes 141 focusings of the 3rd video camera easily.

Place the glass substrate 1 on the adsorption plate 110, the suction by means of the vacuum hole (not shown) by adsorption plate 110 is supplied to is adsorbed and is fixed on the adsorption plate 110.At this moment, even under the situation of glass substrate 1 deflection, also can be along the length direction of adsorption plate 110, another avris of one side side direction from adsorption plate 110 is supplied with suction to vacuum hole successively, so glass substrate 1 integral body closely is adsorbed on the adsorption plate 110.

When glass substrate 1 is adsorbed onto on the adsorption plate 110, the 1st~the 3rd camera 120 ..., 140 be placed in the frame 151 that the length direction upper edge of main aut.eq. 150 section 1a moves on the initial position of preparing the section 1a check.

The the 1st~the 3rd camera 120 ..., 140 be positioned on the initial position of the section 1a that prepare to check after, utilize the 1st~the 3rd adjusting gear 152 ..., 154, promptly, the the 1st~the 3rd camera 120 ..., 140 by the 1st~the 3rd position adjustment with base station 152a ..., 154a adjustment and the 1st~3rd focusing with base station 152b ..., 154b adjustment, implement the 1st~the 3rd video camera 121 ..., 141 position is adjusted and focusing.

The the 1st~the 3rd video camera 121 ..., after 141 position is adjusted and focusing finishes, implement photographic process.At this moment as shown in Figure 5, the section 1a of glass substrate 1 is not a surface level, but wavy curved surface, so the focal plane and the inconsistent phenomenon of section 1a of the 3rd video camera 141 of section 1a taken in generation.

For preventing this phenomenon, as shown in Figure 5 and Figure 6, when the section 1a of glass substrate 1 forms curve-like, also the image that obtains of image that the i step when aiming at focus can be obtained by the 3rd video camera 141 and the i+1 step during in the misalignment focus compares, and calculates the value of the alternate position spike Δ d between the section 1a in these images.

Δ d is the lens 143 of the 3rd video camera 141 that section 1a is photographed and the variable in distance amount between the section 1a, so, by make the 3rd focusing with base station 154b in vertical direction to section 1a near Δ d, implement the focusing of the 3rd video camera 141.Meanwhile, the 1st and the 2nd position adjustment is moved respectively with base station 152a, 153a, so that make the image after the 1st and the 2nd video camera 121,131 is obtained correction shown in Figure 6.

That is to say that utilize the variable quantity that departs from normal place, the 3rd video camera 141 is focused, the 1st, the 2nd video camera 121,131 correction positions.

The the 1st~the 3rd camera 120 ..., 140 the 1st~the 3rd the illumination 122 ..., 142, as shown in Figure 3, for example by reflecting plate 124 with the 1st~the 3rd video camera 121 ..., 141 lens 123 ..., irradiates light on the identical direction of 143 optical axis, thus, the the 1st~the 3rd video camera 121 ..., 141 when photographing, can not be subjected to by the 1st~the 3rd the illumination 122 ..., 142 irradiations the interference of light, can accurately take the section 1a of glass substrate 1.

On the other hand, as shown in Figure 4, when placing glass from substrate 1 on the adsorption plate 110, the 4th catoptron 172 moves to the 3rd camera 140 sides for fear of interference.And after placement and the fixing glass substrate 1, the 4th catoptron 172 turns back to the upside of glass substrate 1 on adsorption plate 110.

Turn back to the 4th catoptron 172 of glass substrate 1 upside, by making light by the 4th illumination 171 irradiations at the peripheral reflection of the section 1a of glass substrate 1, by the 1st~the 3rd camera 120 ..., 140 the 1st~the 3rd video camera 121 ..., in 141 images that photograph, the shape that can make glass substrate 1 better with background difference come.

That is to say that the background of the top of the upper surface of the glass substrate 1 of the 4th catoptron 172 positions is by bright from the illumination of the 4th catoptron 172 reflections; The background of the below of glass substrate 1 lower surface then owing to the light by the 3rd illumination the 142 and the 4th illumination 171 irradiations are reflected in the side of adsorption plate 110, and can obtain the effect as the 4th catoptron 172.

From extraneous air supply unit (not shown) to air nozzle 180 air supplies, air nozzle 180 sprays around the section 1a of glass substrate 1, remove foreign matter, thus, can prevent with the 1st~the 3rd camera 120 ..., 140 the 1st~the 3rd video camera 121 ..., the foreign matter image appears in 141 images of taking.Thereby the section 1a of acquisition glass substrate 1 itself is image clearly.

Preferred forms of the present invention more than has been described, but under the condition that does not break away from claim scope of the present invention, industry personage can carry out various changes.

Claims (9)

1, a kind of section testing fixture of glass substrate is used to check it is characterized in that the section of glass substrate, comprising:
Adsorption plate is used for fixing above-mentioned glass substrate, and the section that makes above-mentioned glass substrate is to side-prominent on one side;
The 1st camera is positioned at the top of the upper surface of above-mentioned glass substrate, and has the 1st video camera, is used for towards above-mentioned section upside and above-mentioned upper surface vertically to the glass substrate acquisition image of photographing;
The 2nd camera is positioned at the below of the lower surface of above-mentioned glass substrate, and has the 2nd video camera, is used for towards above-mentioned section downside and above-mentioned lower surface vertically to the glass substrate acquisition image of photographing;
The 3rd camera, opposed with the section of above-mentioned glass substrate, and have the 3rd video camera, be used for above-mentioned section vertically to the glass substrate acquisition image of photographing;
Frame is provided with the section of above-mentioned glass substrate is close, combines with above-mentioned the 1st, the 2nd and the 3rd camera respectively; And
The frame mobile device is used to make above-mentioned frame to move, so that above-mentioned the 1st, the 2nd and the 3rd camera that is arranged on the above-mentioned frame is moved along the length direction of above-mentioned section, and can photograph to section.
2, the section testing fixture of glass substrate as claimed in claim 1, it is characterized in that: the guides that above-mentioned section is led and supports, at least be set up 2 in the position relative with adsorption plate, so that before above-mentioned glass substrate is fixed on the above-mentioned adsorption plate, make between the 3rd video camera of above-mentioned section and above-mentioned the 3rd camera to keep certain distance.
3, the section testing fixture of glass substrate as claimed in claim 1 is characterized in that: also comprise lighting device, illumination is mapped on the photography position of at least one video camera in above-mentioned the 1st, the 2nd and the 3rd video camera.
4, the section testing fixture of glass substrate as claimed in claim 3, it is characterized in that: above-mentioned lighting device shines along the optical axis of the lens of at least one above-mentioned video camera.
5, the section testing fixture of glass substrate as claimed in claim 1, it is characterized in that: above-mentioned frame has the 1st adjusting gear, above-mentioned the 1st adjusting gear is arranged on the part that frame combines with above-mentioned the 1st camera, above-mentioned the 1st adjusting gear comprises: the 1st position adjustment base station is used to make above-mentioned the 1st camera to move on the direction vertical with the section of above-mentioned glass substrate; And base station is used in the 1st focusing, is fixed with above-mentioned the 1st camera, and make above-mentioned the 1st camera with the direction of above-mentioned section level on move with base station with respect to above-mentioned the 1st position adjustment.
6, the section testing fixture of glass substrate as claimed in claim 1, it is characterized in that: above-mentioned frame has the 2nd adjusting gear, above-mentioned the 2nd adjusting gear is arranged on the part that frame combines with above-mentioned the 2nd camera, above-mentioned the 2nd adjusting gear comprises: the 2nd position adjustment base station is used to make above-mentioned the 2nd camera to move on the direction vertical with the section of above-mentioned glass substrate; And base station is used in the 2nd focusing, is fixed with above-mentioned the 2nd camera, make above-mentioned the 2nd camera with the direction of above-mentioned section level on move with base station with respect to above-mentioned the 2nd position adjustment.
7, the section testing fixture of glass substrate as claimed in claim 1, it is characterized in that: above-mentioned frame has the 3rd adjusting gear, above-mentioned the 3rd adjusting gear is arranged on the part that frame combines with above-mentioned the 3rd camera, above-mentioned the 3rd adjusting gear comprises: the 3rd position adjustment base station, be used to make above-mentioned the 3rd camera with the direction of the section level of above-mentioned glass substrate on move; And base station is used in the 3rd focusing, is fixed with above-mentioned the 3rd camera, and above-mentioned the 3rd camera is moved to the direction vertical with above-mentioned section with base station from above-mentioned the 3rd position adjustment.
8, the section testing fixture of glass substrate as claimed in claim 1, it is characterized in that: also have the 4th illumination of the 4th catoptron of the top that is configured in above-mentioned glass substrate upper surface and irradiates light, by the light of above-mentioned the 4th illumination irradiation by the 4th mirror reflects around the section of above-mentioned glass substrate.
9, the section testing fixture of glass substrate as claimed in claim 1 is characterized in that: also have foreign substance removing apparatus, be used for the section injection air to above-mentioned glass substrate, remove attached to above-mentioned section and foreign matter on every side thereof.
CNB2004100022045A 2003-11-28 2004-01-15 Cutting surface testing apparatus for glass substrate CN100516846C (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
KR0085620/2003 2003-11-28
KR20030085620A KR100579322B1 (en) 2003-11-28 2003-11-28 Apparatus for inspecting a cutting plane of a glass substrate

Publications (2)

Publication Number Publication Date
CN1621818A CN1621818A (en) 2005-06-01
CN100516846C true CN100516846C (en) 2009-07-22

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CN1621818A (en) 2005-06-01
JP2011047948A (en) 2011-03-10

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