KR101080216B1 - Apparatus for inspecting glass edge and method for inspecting glass edge using thereof - Google Patents

Abstract

The present invention relates to a glass edge inspection apparatus and a glass edge inspection method using the same, the glass edge inspection apparatus according to the present invention, the transfer unit for transferring a glass substrate; Illuminating means for irradiating light to the glass edge; Inspection photographing means for photographing the glass edge and inspecting for defects; A photographing unit including horizontal position detecting means for detecting whether the horizontal position of the glass edge is shifted with respect to a preset position; On the basis of the detection result from the horizontal position detecting means, when the horizontal position is displaced with respect to a preset position, the horizontal position of the inspection photographing means is controlled in real time so that the glass edge is positioned at the set position by calculating the degree of the deviation. And a control unit, wherein the photographing unit is formed of at least one, and the photographing unit is disposed at at least one corner portion of the glass substrate so that when the glass substrate enters the inspection region, the glass edge is stopped. It is made to travel straight along the side.

According to the present invention, an inspection apparatus including a photographing means such as a camera is configured to travel along the glass edge, thereby minimizing the restriction on the installation place of the inspection apparatus and defects even in a section in which the glass substrate is stopped. It is possible to detect and install the lighting device without being affected by the equipment of the glass conveying device.The horizontal position sensing means is applied to the meandering of the substrate generated during the conveyance of the glass substrate, and it is perpendicular to the curvature deformation. By using the position sensing means, defects in the glass edge can be detected with high accuracy. Moreover, according to this invention, the detection precision of the defect with respect to the upper surface, lower surface, and cut surface of a glass edge can be improved using a special prism.

Glass, substrate, edge, inspection device, meandering, curvature, CCD, driving

Description

Glass edge inspection device and glass edge inspection method using the same {APPARATUS FOR INSPECTING GLASS EDGE AND METHOD FOR INSPECTING GLASS EDGE USING THEREOF}

The present invention relates to a glass edge inspection apparatus and a glass edge inspection method using the same, and more particularly, to be limited to the spatial limitation of the inspection apparatus due to the transfer device for defects occurring in the edge (edge) of the glass substrate during the transfer. The present invention relates to a glass edge inspection device for detecting with high accuracy.

Glass substrates used to manufacture flat panel displays such as thin film transistor-liquid crystal displays (TFT-LCDs), plasma display panels (PDPs), and electro luminescent (EL) are glass melting furnaces. After the molten glass melted in the molding process to form a flat plate and a cutting process to cut to meet a certain standard, and then transported to a processing line for processing. In the processing line of the glass substrate, the glass substrate is cut again according to the standard of the flat panel display, and the four edges of the glass substrate sharpened by the cutting are polished, while the chamfer and orientation mark at the four corners. Are processed respectively.

In such a cutting and polishing process of the glass substrate, many defects occur at the edge of the glass substrate due to various factors. In the cutting process, size errors, chipping, cracks, etc. occur, and in the polishing process, chamfering, unchampering, unbevel, over-bevel, bevel chips, etc. Occurs, and during the handling process, the position change of the bearing display, the crack, etc. occur. Therefore, in order to manufacture a high-quality flat panel display, after inspecting defects occurring at the edges of the glass substrate, the good and defective products of the glass substrate are sorted out, the defects in the manufacturing process are identified, and the causes are identified. Correcting.

As shown in FIG. 1A and FIG. 1B, the inspection object area | region of the said glass edge shows the upper end part 1a, the lower end part 1b, and the left and right both side end parts 1c and 1d of the glass substrate 1, as shown in plan view. It is four sides of, and when it is shown in sectional drawing, it is the upper surface 1e, the cut surface 1f, and the lower surface 1g of glass.

As shown in FIG. 2, in the conventional inspection apparatus for inspecting the glass edge in the process of transporting the glass substrate 1, for example, a pair of primary cameras 2a and 2b each including a line CCD camera is used. It is provided in the upper end portion 1a and the lower end portion 1b of the glass substrate 1 during the transfer, and after photographing the upper and lower edges 1a and 1b of the glass substrate, the advancing direction of the glass substrate 1 The 90 degrees are switched, and another pair of secondary inspection apparatuses 2c and 2d are installed at both side end portions 1c and 1d of the glass substrate 1, respectively, to perform imaging of the portions. The photographed images of the glass edges collected by the cameras 2a to 2d are transmitted to a separate controller, and the controller determines whether the glass edge is defective from these images by using a built-in program.

However, when using the inspection apparatus and the inspection method, it is necessary to install the inspection apparatus only in the section where the glass substrate is being transferred, and there is a limitation in the installation place, even if the inspection apparatus is installed in the transfer section of the glass substrate. Even if it is, due to the influence of the equipment of the transfer device, the space for the installation of the entire glass edge inspection apparatus, including lighting is limited, it is difficult to secure a high precision for defect detection, in the transfer process of the glass substrate, There is an uneconomical problem because the section for the inspection of the glass edge itself is very long.

In addition, as the glass substrate is enlarged due to the recent increase in the size of the image display device, the meandering of the glass substrate being conveyed by twisting laterally on a conveying device such as a conveyor belt while the glass substrate is being conveyed or as shown in FIG. 3. Similarly, when the glass substrate 1 is placed on the support 4 at the inspection position, deformation of the curvature shape occurs in the vertical direction according to the shape of the plurality of pins forming the support 4 by the weight of the glass substrate.

Due to this meandering and curvature deformation, the camera focus of the inspection apparatus is distorted, which leads to a decrease in inspection accuracy. Conventionally, as a solution to meandering, a camera having a wide field of view is used, and as a solution to curvature deformation, a method of improving the depth of field of the lens is used. The method of improving the conveyance precision of a glass substrate is calculated | required. However, by widening the viewing angle, the detection accuracy of defects is relatively lowered, and there is a limit to the detection of high accuracy even if the depth of field of the lens and the transfer accuracy of the substrate are improved.

In addition, the photographing apparatus applied to the conventional glass edge inspection apparatus is composed of three cameras, each photographing the upper surface, the cutting surface, and the lower surface of the glass edge, based on the information photographed by these three cameras, And defective products were selected. However, in the case of using such a conventional glass edge inspection apparatus, since three cameras are used, there is a problem in that the device structure is enlarged and complicated, and the installation cost is high. There was a disadvantage in that the position adjustment for the three cameras is cumbersome. In particular, the lower surface 1g of the glass edge 1 is provided with a transporting device, a stage, or the like of a glass substrate, and there is a problem in that the place where the camera is installed is largely limited.

The present invention is to solve the above problems, an object of the present invention, even in the inspection using a camera, glass edge inspection apparatus without limitation to the installation place, such as can be installed only in the section in which the glass substrate is transported And to provide a test method.

Further, another object of the present invention is to provide a glass edge inspection apparatus and inspection method which can detect defects of the glass edge with high accuracy even when meandering and curvature deformation occur during transfer of the glass substrate.

In addition, another object of the present invention is to provide a glass edge inspection apparatus capable of inspecting defects occurring on the top, bottom and cut surfaces of the glass edge with high accuracy using only one or two cameras.

The present invention is to solve the above problems, the glass edge inspection apparatus according to the present invention, the transfer unit for transferring the glass substrate; Illuminating means for irradiating light to the glass edge; Inspection photographing means for photographing the glass edge and inspecting for defects; A photographing unit including horizontal position detecting means for detecting whether the horizontal position of the glass edge is shifted with respect to a preset position; On the basis of the detection result from the horizontal position detecting means, when the horizontal position is shifted from a preset position, the horizontal position of the inspection photographing means is calculated in real time so that the glass edge is positioned at the set position by calculating the degree of deviation. And a control unit, wherein the photographing unit is formed of at least one, and the photographing unit is disposed at at least one corner portion of the glass substrate so that when the glass substrate enters the inspection region, the photographing unit is stopped. It is made to travel straight along each side. Through the above configuration, the defect inspection of the glass edge of the stationary glass substrate can be performed irrespective of the installation place of the inspection apparatus, and also in the meandering part of the substrate which may occur during the transport of the glass substrate, Precise defect inspection without distortion of focus can be performed.

Here, the photographing unit further comprises a vertical position detecting means for detecting whether the vertical distance is out of a preset distance range by measuring a vertical distance with the glass edge, wherein the control unit, the vertical position detecting means On the basis of the detection result from the above, when the vertical distance is out of a preset distance range, the deviation is calculated, and the vertical movement of the inspection photographing means in real time to control the vertical position so that the vertical distance is within the set range is vertical transfer. Even when the curvature deformation of the glass substrate which is a defect occurs, a precise defect inspection in which the focus is not distorted can be performed.

The photographing unit may further include a trigger sensor that recognizes when the glass substrate enters the inspection region and drives at least one of the inspection photographing means, the horizontal position sensing means, and the vertical position sensing means. It is preferable to start the automatic driving of.

Here, the photographing unit is provided below the inspection photographing means, horizontally spaced apart from the cut surface of the glass edge, the prism made to capture the image of the cut surface and the lower surface of the glass edge by the inspection photographing means. It further comprises, The prism is formed facing the cut surface of the glass edge, and the incident surface incident light emitted from the lighting means via the glass edge; A reflecting surface formed on a rear surface of the incident surface and in contact with a lower end of the incident surface, the reflecting surface being formed at a 45 ° angle with the incident surface and inclined in a back direction of the incident surface; And an exiting surface formed opposite to the photographing means and perpendicular to the upper end of the incident surface, wherein the light reflected from the reflecting surface is emitted toward the photographing means, by using a special prism, The detection accuracy of defects on the upper surface, the lower surface and the cut surface of the edge can be improved.

The inspection photographing means may further include second inspection photographing means spaced apart from the cut surface of the glass edge in a horizontal direction to photograph the side surface of the glass edge, and the prism is disposed below the glass edge. It is the same as the prism, and the light incident surface further includes a second prism disposed to face the lower surface of the glass edge can further improve the defect detection accuracy on the cut surface and the lower surface of the glass edge.

In addition, the photographing unit is disposed at each corner of the glass substrate, and the plurality of upper and lower surfaces of the glass edge, the cut surface, and the cut surface, so as to be able to perform the inspection on the cut surface, and It is desirable to perform high precision defect inspection on the bottom surface.

The glass edge inspection method according to the present invention using the glass edge inspection apparatus according to the present invention, the transfer step of transferring the glass substrate to the inspection area; A stop step of stopping the glass substrate when the glass substrate enters an inspection area; A photographing step of photographing the glass edges by at least one inspection photographing means respectively positioned at at least one corner portion of the glass substrate in a straight line along the glass edge of the glass substrate; A horizontal position detecting step of detecting whether a horizontal position of the glass edge is shifted with respect to a preset position while the horizontal position detecting means is traveling with the inspection photographing means; And if the detected horizontal position shifts the preset position, calculating a degree of the deviation and controlling the vertical position of the inspection photographing means in real time so that the horizontal distance falls within the set position.

In addition, the glass edge inspection method, at the same time as the horizontal position detection step, while the vertical position detection means is traveling with the inspection photographing means, by measuring the vertical distance between the vertical position detection means and the glass edge, the vertical distance And a vertical position detecting step of detecting whether is out of a preset distance range, wherein the control step includes calculating a deviation degree when the detected vertical position is out of the preset distance range, It is possible to control in real time the vertical position of the inspection photographing means so that the distance falls within the set distance range.

According to the present invention, an inspection apparatus including a photographing means such as a camera is configured to travel along the glass edge, thereby minimizing the restriction on the installation place of the inspection apparatus and defects even in a section in which the glass substrate is stopped. It is possible to detect, it is possible to install the lighting device, etc. without being affected by the equipment of the glass transfer device.

Further, according to the present invention, by applying the horizontal position detecting means to the meandering of the substrate generated during the conveyance of the glass substrate, and using the vertical position detecting means against the curvature deformation, the defect of the glass edge can be detected with high accuracy.

Moreover, according to this invention, the detection precision of the defect with respect to the upper surface, lower surface, and cut surface of a glass edge can be improved using a special prism.

Hereinafter, a glass edge inspection apparatus and a glass edge inspection method using the same according to the embodiment and the drawings will be described.

Figures 4a to 4c is a block diagram showing a glass edge inspection apparatus according to an embodiment of the present invention.

As shown in FIG. 4A, the glass edge inspection apparatus according to an embodiment of the present invention includes a transfer unit 10, a photographing unit 20, and a control unit 30, and the photographing unit 20 includes an inspection photograph. Means 21, horizontal position sensing means 22 and vertical position sensing means 23.

The transfer unit 10 is a device for transferring the glass substrate 1 in one direction, and generally, a conveyor belt for transferring the glass substrate 1 in a horizontal state, a driving pulley and a driven pulley (not shown) for driving the glass substrate 1 in a horizontal state. For example, when using the glass conveyor belt of the conveyance part 10, the width | variety of a belt is comprised slightly shorter than the width of the glass substrate 1, and it is comprised so that a glass edge part can be examined. Glass edge inspection apparatus according to an embodiment of the present invention, the glass substrate 1 may be installed in the transfer portion 10 of the section in the stationary state.

The photographing unit 20 is configured to photograph the glass edge 1 with high accuracy and to detect a defect of the glass edge 1, and the inspection photographing means 21 is located above the glass edge 1. It is provided and the structure which photographs the glass edge 1 is taken. The photographing unit 20 may be disposed at each of four corners of the glass substrate 1 to travel along each side.

The inspection photographing means 21 is provided on the upper side, the lower side, or one side of the glass edge 1 to photograph the glass edge 1, and may use a microscope, a line sensor, or a CCD camera. For example, a line CCD camera equipped with a line sensor is used. The inspection photographing means 21 is provided in a plurality on the upper side, the side portion or the lower portion of the glass substrate 1, so that the upper surface 1e, the cut surface 1f and the lower surface 1g of the glass edge can be simultaneously photographed. Can lose. In addition, in order to maximize space utilization without having three cameras at the top, side, and bottom, respectively, as shown in FIG. 4B, only one camera 21 is installed at the top, and at the side of the glass substrate 1. Optical means 21c, such as a prism or a reflecting mirror, may be provided so that the upper surface 1e, the cut surface 1f, and the lower surface 1g of the glass edge can be simultaneously photographed.

Fig. 4C is a view showing the inspection photographing means 21 to which a special prism is applied as a more preferred embodiment of the optical means 21c according to the present invention.

Here, the prism 40 is spaced apart from the cut surface 1f of the glass edge 1 in a horizontal direction by a predetermined distance, and the cut surface 1f and the lower surface 1g of the glass edge 1 are used as the inspection photographing means 21. ) To capture the image. Therefore, as a whole, the upper surface 1e of the glass edge 1 is directly photographed by the inspection photographing means 21 installed above the glass edge 1, and the light reflected by the prism 40 is utilized. Image of each of the cut surface 1f and the bottom surface 1g of the glass edge 1 can be captured, and the top surface 1e of the glass edge 1, the cut surface 1f, And defect detection on the lower surface 1g. Therefore, it is possible to implement an inspection apparatus that is not complicated and has high space utilization.

The prism 40 includes the entrance face 41, the reflection face 42, and the exit face 43, and preferably has a trapezoidal cross section.

Here, the incident surface 41 is formed facing the cut surface 1f of the glass edge 1, and is a surface on which light irradiated from the luminaire 21d enters through the glass edge 1. The entrance face 41 is generally planar from top to bottom. The upper part of the back surface of the incident surface 41 is formed in a plane orthogonal to the exit surface 43 which will be described later, and the bottom of the rear surface of the incident surface is in contact with the lower end of the incident surface 41 and enters the incident surface 41. A reflecting surface 42 is formed at a predetermined angle with a slope having an inclination toward the back surface of the incident surface 41. The light incident from the incident surface 41 is reflected on the reflecting surface 42 and exits the exit surface 43 formed in a plane perpendicular to the optical axis of the inspection photographing means 21 facing the inspection photographing means 21, The light thus emitted reaches the inspection photographing means 21. Here, the angle formed between the reflecting surface 42 and the incident surface 41 is preferably 45 ° in order to allow the reflected light from the glass edge 1 to reach the inspection photographing means 21 while constructing a precise optical path.

Here, the light emitted through the glass edge 1 and the prism 40 transmits an image of the cut surface 1f and the lower surface 1g of the glass edge 1, and thus a more precise defect on this portion. For inspection, it is preferable to further install an auxiliary lighting means (not shown) under the glass edge.

At this time, to explain the relationship between the respective optical paths, a straight line distance between the incident surface 41 and the cut surface 1f of the glass edge is a, the point R and the emission surface where the light is reflected from the reflective surface 42 The straight line distance 43 is spaced b, the point R at which light is reflected from the reflection surface 42 and the straight line distance c is spaced apart from the incident surface 41, the exit surface 43 and the inspection photographing means 21 When a straight line distance of the lower end of the spaced apart is d, and a straight line spaced apart from the lower end of the inspection photographing means 21 and the upper surface 1d of the glass edge is A, the refractive index of the prism is n, A It has a relationship that satisfies the expression represented by = a + d + (b + c) / n. The formula for the length of the optical path represented by the above equation is, after all, the optical path through which light passes from the inspection photographing means 21 to the upper surface 1e of the glass edge 1 in the air (left side of the equation). And the lengths of the optical paths (the right side of the equation) from the inside of the prism 40 to the cut surface 1f of the glass edge 1 are the same, and thus the upper surface 1d of the glass edge 1 and The same light focus is achieved at the cut surface 1f, indicating that both can be inspected with the same pint. For example, the refractive index n of the prism 40 is 1.52, the distance a between the incident surface 41 and the cut surface 1f of the glass edge is 17.6 mm, and the reflection point R and the emission surface 43 Distance b) is 62.4 mm, the distance c between the reflection point R and the incident surface 41 is 5 mm, and the distance d between the exit surface 43 and the lower end of the inspection photographing means 21 is In the case of 30 mm, the distance A between the lower end of the inspection photographing means 21 and the upper surface 1 e of the glass edge can be adjusted to 91.9 mm to configure the device. Here, although the focus of the upper surface 1e and the cutting surface 1f are the same, in the case of the R-cut glass edge where the glass edge 1 is chamfered in a round shape, the lower surface 1f is also You can check with the same pint. That is, with one camera, the upper surface 1e, the cut surface 1f, and the lower surface 1g of the glass edge 1 can be inspected simultaneously with high precision.

4D is a cross-sectional view of the glass edge inspection apparatus employing the optical means according to another embodiment of the present invention.

As shown in Figure 4d, the glass edge inspection apparatus according to another embodiment of the present invention, the other configuration is the same as the glass edge inspection apparatus of Figure 4c, the second inspection photographing means 210 is cut surface 1f of the glass edge And a second prism 400 having the same configuration as that of the prism 40 shown in FIG. 4C is installed below the glass edge 1, and the light incident surface 410 is disposed on the glass edge. It is arranged to face the lower surface (1g) of the.

As described above, in the case of the R-cut glass edge, even when using the prism according to FIG. 4C, there was no problem in inspecting the lower surface 1g of the glass edge 1, but the cut surface 1f of the glass edge 1 was used. In the case of the C-cut glass edge in which the chamfering process is in an angular form, defects which are not easily seen in the inspection of the lower surface 1g may occur. Therefore, in inspecting the so-called C-cut glass edge, the inspection is carried out by combining the second inspection photographing means 210 shown in FIG. 4D with the inspection photographing means 21 shown in FIG. Quality can be guaranteed. The photographing method including the other principles of the prism is the same as that of the inspection photographing means 21 shown in FIG. 4C.

The driving unit for driving the inspection photographing means 21 and the second inspection photographing means 210 is preferably made of a driving motor, and the inspection photographing means 21 and the second inspection photographing means 210 are along the glass edge surface. Main drive means for moving, the X-axis stage (21a, 210a) and the orthogonal to the horizontal direction to guide the movement in the horizontal direction orthogonal to the glass edge surface and the plan view, so as to adjust the focus of the lens Z-axis stages 21b and 210b configured to guide the movement in the vertical direction to adjust the focus of the lens.

The horizontal position detecting means 22 is a photographing apparatus which detects whether the horizontal position of the glass substrate edge is shifted with respect to a preset position when the glass substrate 1 enters the inspection position, and is preferably a line CCD camera. For example, when the image of the glass substrate 1 photographed by a line CCD camera is implemented on a coordinate and detected, and based on the detection result, the horizontal position of the glass substrate is shifted with respect to a preset position range. That is, when there is a deviation (meandering of the substrate) in the horizontal (X-axis) direction of the glass substrate position, the control unit 30 calculates the coordinate difference between the image of the photographed glass edge and the preset position, and the inspection photographing means. Meandering during transport of the glass substrate 1 by controlling the X-axis stage 21a of the 21 in real time and adjusting the horizontal position of the inspection photographing means 21. Even, if it is done so that the focus is not distorted.

The vertical position detecting means 23 preferably measures the vertical distance between the vertical position detecting means 23 and the glass edge 1 by using a laser displacement sensor or an ultrasonic displacement sensor, and the like. Detects whether the distance is out of the range, and, based on the detection result, if the vertical distance is out of a preset distance range, the controller 30 calculates the deviation from the distance range, the vertical distance is set By controlling the Z-axis stage 21b of the inspection photographing means 21 in real time to adjust the vertical position of the inspection photographing means 21, even when there is a curvature deformation of the glass substrate 1, the focus is maintained. Do not distort.

The control unit 30 collects information on meandering or curvature deformation of the glass substrate from the horizontal position detecting means 22 and the vertical position detecting means 23, and the control unit applied to the general glass edge inspection apparatus. Similarly, after collecting the image of the glass edge 1, which is photographed by the inspection photographing means 21 and converted into an electrical signal, the image is judged by programmed logic to determine whether the glass edge 1 is defective. It is made to judge.

Thus, due to the introduction of the horizontal position detecting means 22 and the vertical position detecting means 23, even if there is a meandering or curvature deformation during the conveyance of the glass substrate, the horizontal or vertical position of the inspection photographing means 21 can be adjusted. Therefore, precise inspection can be performed without distortion of the lens focus.

In addition, the glass edge inspection apparatus according to an embodiment of the present invention, when the glass substrate 1 enters the inspection area, by recognizing this, the inspection photographing means 21, the horizontal position detecting means 22 and It may further include a trigger sensor 24 for driving at least one of the vertical position detection means (23). That is, the control unit 30 receiving the signal from the trigger sensor 24 drives the inspection photographing means 21, the horizontal position sensing means 22, and the vertical position detecting means 23 to the glass edge 1. Start a test.

Specifically, it consists of an inspection apparatus as shown in the front view of FIG.

As shown in FIG. 5, in the glass edge inspection apparatus according to the embodiment of the present invention, the trigger sensor 24 enters the inspection region of the glass substrate 1 while the glass substrate 1 is conveyed in the direction of the arrow. Recognize and start the inspection, the line CCD camera as the horizontal position detecting means 22 recognizes the horizontal position of the glass substrate 1, and the laser displacement sensor as the vertical position detecting means 23 is perpendicular to the glass surface. The illumination means 21d is recognized while recognizing the distance and adjusting the position of the line CCD camera as the inspection photographing means 21 based on the horizontal position and the vertical distance of the glass through the X-axis stage 21a and the Z-axis stage 21b. , 21e) is used to perform defect detection on the glass edge.

Fig. 6 is a front view showing the inspection apparatus when the second prism shown in Fig. 4D is used.

As shown in FIG. 6, the inspection apparatus includes a second inspection photographing means 210, a second prism 400, a casting lighting means 221, an auxiliary lighting means 222 and a half mirror 223, and a second inspection. It comprises an X-axis stage (210a) and Z-axis stage (210b) for guiding the horizontal and vertical movement of the photographing means 210, respectively. The other configuration is as described above, the casting lighting means 221 is a configuration for irradiating the light directly to the glass edge portion, the combination of the auxiliary lighting means 222 and the half mirror 223, the glass edge (1) As a configuration for improving the inspection quality by irradiating brighter light, the auxiliary lighting means 221 reflects the light to the half mirror 223 due to the space constraint, and the second inspection photographing means 210 by the reflected light. ) Is made possible to check for defects in the glass edge 1. In addition, the X-axis stage 210a and the Z-axis stage 210b correspond to the horizontal and the second inspection photographing means 210 according to the control signals from the horizontal position detecting means 22 and the vertical position detecting means 23 described above. To guide the vertical movement.

When using the inspection apparatus shown in FIG. 5 and FIG. 6 in combination, the inspection apparatus of FIG. 5 captures the image of the upper surface 1e and the cut surface 1f of the glass edge 1, and the inspection apparatus of FIG. By capturing the images of the cut surface 1f and the lower surface 1g, it is possible to perform a precise defect inspection of all the portions of the glass edge 1. In addition, through the horizontal position detecting means 22 and the vertical position detecting means 23 mounted in the inspection apparatus of FIG. 5, the focus is not distorted even when there is a meandering and curvature deformation of the glass substrate 1.

7A and 7B are photographs showing images of the glass edge 1 photographed when the inspection apparatus shown in FIGS. 5 and 6 is used in combination.

7A is an image of the upper surface 1e of the glass edge 1 photographed by the inspection apparatus of FIG. 5, and an image of the cut surface 1f is photographed on the left side. Similarly, the image of the lower surface 1g of the glass edge 1 was photographed by the inspection apparatus of FIG. 6 on the right side of FIG. 7B, and the image of the cut surface 1f was photographed on the left side.

FIG. 8 is an overall configuration diagram of a glass edge inspection apparatus according to an embodiment of the present invention utilizing a combination of the inspection apparatuses shown in FIGS. 5 and 6.

As shown in FIG. 8, the glass edge inspection apparatus includes an inspection apparatus having the configuration of FIG. 5 as the upper inspection unit 100, and an inspection apparatus having the configuration of FIG. 6 as the side inspection unit 200. It is done by In addition, as shown in FIG. 8, a plurality of sets combining the upper inspection unit 100 and the side inspection unit 200 may be provided. In addition, the controller 30 specifically includes a camera position control PC 31, an inspection PC 35, a hub 32, and a main PC 33. Here, the illumination power sources 224, 21d ′, 21e ′ are connected to luminaires 221, 222, 21d, 21e, respectively, to supply power to each luminaire, and the camera power source 211 is each It is made to supply power to the inspection photographing means (21, 210).

When the signal from the trigger sensor 24 activates the camera position control PC 31 and at the same time reaches the encoder 36 via the plus box 34, a command is issued from the encoder 36 to check it. The operation of the PC 35 is started.

When the inspection PC 35 and the camera position control PC 31 are activated in this way, the image information from the inspection photographing means 21 and 210 is collected by the inspection PC 35 to perform defect detection of the glass edge, and the horizontal The horizontal position and vertical position information of the glass substrate from the position detecting means 22 and the vertical position detecting means 23 are collected by the camera position control PC 31 to adjust the position of the inspection photographing means 21 and 210 in real time. do. The information collected by the camera position control PC 31 and the inspection PC 35 arrives at the main PC 33 via the hub 32, thereby comparing the inspection result with a preset value set in the main PC 33. Output That is, the size error of the glass edge, chipping, cracking, unchampering, unbevel, over-bevel, bevel chips from the information collected by the inspection PC 35. (bevel chip) and the change of position and breakage of azimuth indication are detected and the corresponding detection result is output, and the meandering (deviation of horizontal position) or curvature deformation (vertical position of the glass substrate) from the camera position control PC 31 is performed. Deviation) to adjust the horizontal and vertical position of the inspection photographing means (21, 210).

Next, a glass edge inspection method using the glass edge inspection apparatus according to an embodiment of the present invention having the above configuration will be described with reference to FIGS. 9 and 10A to 10D.

As shown in Figure 9, the glass edge inspection method according to the present invention, the transfer step (S10), the stop step (S20), the imaging step (S30), the horizontal position detection step (S41), the vertical position detection step (S42) ), And a control step (S50).

The transfer step S10 is a step in which the transfer unit 10 transfers the glass substrate 1 to the inspection area in which the inspection apparatus is installed. In the stop step S20, when the glass substrate 1 enters the inspection area, The glass substrate 1 is stopped.

10A to 10D are diagrams illustrating driving of the glass edge inspection apparatus in the photographing step S30 to the control step S50.

As shown in FIG. 10A, one imaging unit 20a to 20d is positioned at four corners (A, B, C, and D positions) of the glass substrate 1 before the imaging step S30. Thereafter, as shown in FIG. 10B, when the test start signal is transmitted from the trigger sensor 24, the photographing units 20 at the respective positions are shifted in positions and travel linearly along each side of the glass edge 1. While shooting is started (shooting step (S30)). That is, the photographing unit 20a in A is in the B position, the imaging unit 20b in B is in the C position, the imaging unit 20c in the C position is in the D position, and the photographing unit 20d in the D position is It moves in a straight line to position A and changes position. As shown in Fig. 10C, after the photographing and inspection is finished, the glass substrate 1 is transferred out of the inspection area, and as shown in Fig. 10D, after the glass substrate 1 is transferred out of the inspection area, The photographing units 20a to 20d return to their original positions and are in a standby state for the following inspection.

 The horizontal position detecting step S41 and the vertical position detecting step S42 are performed simultaneously with the photographing step S30. That is, while the horizontal position detecting means 22 and the vertical position detecting means 23 run together with the inspection photographing means 21, the horizontal position and / or vertical position of the glass edge 1 is photographed or measured by a camera. If the horizontal position and / or the vertical position is out of a preset position and / or out of a distance range, the detecting of the horizontal position and / or the vertical position is performed.

In the control step S50, when the detected horizontal position and / or vertical position is out of the preset distance range, the deviation is calculated so that the vertical distance is in the set horizontal position and / or vertical distance range. Real time control of the horizontal position and / or the vertical position of the inspection photographing means. As described above, the horizontal position of the inspection photographing means 21 is controlled by adjusting the X-axis stage 21a and the Z-axis stage 21b. In addition, in the control step (S50), it detects the defect state of the glass edge (1), and also serves to output it.

Therefore, according to the glass edge inspection apparatus and inspection method according to the present invention, the inspection apparatus including a photographing means such as a camera is configured to travel along the glass edge, minimizing the restriction on the installation place of the inspection apparatus On the other hand, the defect detection can be detected in the section where the glass substrate is stopped, so that it is possible to install the lighting device without being influenced by the equipment of the glass conveying device.

In addition, according to the present invention, by applying the horizontal position detecting means to the meandering of the substrate generated during the transfer of the glass substrate, and using the vertical position detecting means against the curvature deformation, defects in the glass edge can be detected with high accuracy. , A prism may be introduced to simultaneously perform defect inspection on the top, bottom, and cut surfaces on the side cross-section of the glass edge.

The foregoing has been described in detail with reference to embodiments of the present invention. However, the scope of the present invention is not limited to the above embodiments, but may be embodied in various forms of embodiments within the appended claims. Without departing from the gist of the invention as claimed in the claims, any person skilled in the art to which the invention pertains is considered to be within the scope of the claims of the invention to the various possible modifications possible.

1A and 1B are a plan view and a cross-sectional view showing the inspection target region of the glass edge

2 is a conventional inspection device for inspecting the glass edge in the process of transporting the glass substrate

3 is a cross-sectional view showing the deformation of the curvature shape of the glass substrate.

4a to 4d is a block diagram showing a glass edge inspection apparatus according to an embodiment of the present invention

5 is a front view of the glass edge inspection apparatus according to an embodiment of the present invention

Fig. 6 is a test apparatus when the second prism shown in Fig. 4D is used.

FIG. 7 is a general configuration diagram of a glass edge inspection apparatus according to the present invention utilizing the inspection apparatus shown in FIGS. 5 and 6 in combination.

8 is a flowchart sequentially showing a glass edge inspection method using the glass edge inspection apparatus of FIG. 4A.

9A to 9D are views showing the driving of the glass edge inspection apparatus in the photographing step to the control step.

<Description of Signs of Major Parts of Drawings>

1: glass substrate or glass edge 10: transfer part

20: recording unit 21, 210: inspection recording means

22: horizontal position detecting means 23: vertical position detecting means

30: control part 40, 400: prism

Claims (8)

Transfer unit for transferring the glass substrate; Illuminating means for irradiating light to the glass edge; Inspection photographing means for photographing the glass edge and inspecting for defects; A photographing unit including horizontal position detecting means for detecting whether the horizontal position of the glass edge is shifted with respect to a preset position; On the basis of the detection result from the horizontal position detecting means, when the horizontal position is displaced with respect to a preset position, the horizontal position of the inspection photographing means is controlled in real time so that the glass edge is positioned at the set position by calculating the degree of the deviation. It includes a control unit, The photographing unit further includes a vertical position detecting means for measuring whether the vertical distance is out of a preset distance range by measuring a vertical distance with the glass edge, The photographing unit is formed of at least one, and the photographing unit is disposed on at least one corner portion of the glass substrate, and when the glass substrate enters the inspection area, driving straight along each side of the glass edge in a state where it is stopped. Glass edge inspection device, characterized in that made to. The method of claim 1, The controller calculates the deviation when the vertical distance is out of a preset distance range based on the detection result from the vertical position detecting means, so that the vertical distance is within the set range. Glass edge inspection device, characterized in that for controlling the position in real time. The method according to claim 1 or 2, The photographing unit may further include a trigger sensor which recognizes when the glass substrate enters the inspection area and drives at least one of the inspection photographing means, the horizontal position sensing means, and the vertical position sensing means. Edge inspection device. The method according to claim 1 or 2, The photographing unit is installed at a lower portion of the inspection photographing means, horizontally spaced apart from the cut surface of the glass edge, and further comprises a prism configured to capture images of the cut surface and the lower surface of the glass edge by the inspection photographing means. Include, The prism is formed facing the cut surface of the glass edge, the incident surface is incident light through the glass edge is irradiated from the lighting means; A reflecting surface formed on a rear surface of the incident surface, contacting a lower end of the incident surface, and having a 45 ° angle with the incident surface and formed of an inclined surface inclined in the back direction of the incident surface; And an emission surface formed to face the photographing means, the emission surface being orthogonal to the upper end of the incident surface, and the light reflected from the reflecting surface is emitted toward the photographing means. 5. The method of claim 4, The inspection photographing means further includes a second inspection photographing means, which is spaced apart from the cut surface of the glass edge in a horizontal direction and photographs the side surface of the glass edge. The prism is the same as the prism under the glass edge, and the glass edge inspection apparatus further comprises a second prism, the light incident surface is disposed facing the lower surface of the glass edge. The method according to claim 1 or 2, The photographing unit is disposed at each corner of the glass substrate, characterized in that a plurality of glass edge inspection apparatus, characterized in that for performing the inspection on the upper surface, the lower surface, and the cut surface of the glass edge. In the glass edge inspection method for photographing the glass edge and inspecting for defects, A transfer step of transferring the glass substrate to the inspection area; A stop step of stopping the glass substrate when the glass substrate enters an inspection area; A photographing step of photographing the glass edges by at least one inspection photographing means respectively positioned at at least one corner portion of the glass substrate in a straight line along the glass edge of the glass substrate; A horizontal position detecting step of detecting whether a horizontal position of the glass edge is shifted with respect to a preset position while the horizontal position detecting means is traveling with the inspection photographing means; At the same time as the horizontal position detecting step, the vertical position detecting means travels together with the inspection photographing means, and measures the vertical distance between the vertical position detecting means and the glass edge to determine whether the vertical distance is out of a preset distance range. Detecting a vertical position; And a control step of calculating a degree of the deviation when the detected horizontal position is out of the preset position, and controlling the horizontal position of the inspection photographing means in real time so that the horizontal position is in the set position. . The method of claim 7, wherein In the controlling step, when the detected vertical position is out of the preset distance range, the deviation degree is calculated to control the vertical position of the inspection photographing means in real time so that the vertical distance is within the set distance range. Glass edge inspection method.

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