TW201245701A - Method for inspecting minute defect of translucent board-like body, and apparatus for inspecting minute defect of translucent board-like body - Google Patents

Abstract

The present invention is a method for inspecting a minute defect present in a translucent board-like body, while transferring the translucent board-like body along a transfer path. The method for inspecting a minute defect of a transparent board-like body has: a preliminary inspection step, wherein the position of the minute defect is specified by irradiating the translucent board-like body with light and picking up an image of the main surface of the translucent board-like body by means of a preliminary image pickup unit, said minute defect being present in the surface direction of the main surface of the translucent board-like body; and a detail inspection step, wherein, corresponding to the minute defect position obtained in the preliminary inspection step, a main image pickup unit is moved in the direction, which is along the surface of the translucent board-like body and intersects the transfer direction of the translucent board-like body, and the image of the minute defect is picked up, while moving the main image pickup unit in the transfer direction in the state wherein the main image pickup unit is aligned with the minute defect.

Description

[Technical Field] The present invention relates to a method for inspecting minute defects of a plate-like body such as a glass plate having light transmissivity and an inspection device for minute defects of a light-transmissive plate-like body. [Prior Art] Recently, since a glass plate is used for an electronic device such as a flat panel display, a glass plate having a thin plate thickness and having few defects such as bubbles, damage, and foreign matter, or no defects at all is required. In the glass substrate for a flat panel display, the molten raw material is flown on the molten metal tank, and is formed into a plate shape, and after the molded article is slowly cooled, it is cut into a specific size ' and the surface is polished as necessary. Made by washing. The glass substrate after the cleaning is transported in a packing step by a conveying device such as a conveyor, and optical defects such as bubbles, damage, and foreign matter are optically inspected in the middle. For example, an inspection is performed to illuminate a glass substrate, and an optical camera is used to image a change in the brightness of the glass substrate, and micro defects are recognized by image processing. As an example of an inspection apparatus for a glass substrate, an inspection apparatus having a configuration in which a guide (moving mechanism) that can move in a conveyance direction of the glass substrate is provided on a conveyance path of the conveyance glass substrate is used. The moving mechanism is provided with an illuminating device and a light receiving means, and the moving direction of the moving mechanism is set to be the same as the conveying direction of the glass substrate, and a speed control device is provided in the moving mechanism (see Patent Document 1). The inspection apparatus described in Patent Document 1 corresponds to a case where the moving speed of the moving mechanism is set to be lower than the conveying speed of the glass substrate, and the inspection speed is 164144.doc 201245701, and the moving speed of the moving mechanism is set to be larger than that of the glass substrate. The inspection is performed at a speed at which the conveyance speed is high, and the movement speed of the movement mechanism is set to be the same as the conveyance speed of the glass substrate, and inspection is performed. CITATION LIST Patent Literature Patent Literature 1: Japanese Laid-Open Patent Publication No. 2009-80088. SUMMARY OF THE INVENTION PROBLEM TO BE SOLVED BY THE INVENTION The problem to be solved by the invention is to obtain a non-jitter in order to obtain a previous inspection when the glass substrate is conveyed while being imaged. A high-definition image requires a high-speed shutter. However, if a high-speed shutter is used, there is a problem that the exposure time is insufficient and it is difficult to image a minute change of a minute defect. Therefore, it is necessary to reduce the transport speed of the glass substrate in the inspection step, or to temporarily stop the glass substrate after the conveyance, and to perform imaging. However, there is a problem in that the productivity of the glass substrate is lowered in any of these mechanisms. Further, in the case of illuminating a light-transmissive plate-like body such as a plate glass, the reflected light is 4 to 8 °/ with respect to the incident light. There is a limit even if the intensity of the reflected light is increased, so that there is a problem that the exposure is insufficient. In the case of the conventional inspection apparatus, when a plurality of minute defects are scattered on the glass substrate, it is extremely difficult to image the plurality of scattered minute defects one by one in the middle of transporting the glass substrate. Therefore, it is difficult to accurately perform a plurality of tiny defects. Inspection of the glass substrate formed by the state of the defect dispersion. Based on these backgrounds, the inventors aim to provide a minor defect

164144.doc A

S 201245701 Inspection method and inspection apparatus for micro-defects, which is a method of inspecting a translucent plate-like body such as a large-sized glass substrate in the middle of transportation, and even if the translucent plate-like body is dispersed in plural In the case of a small defect, it is also possible to perform a close inspection of minute defects without lowering the conveying speed of the light-transmitting plate-like body. The present invention relates to a method for inspecting a micro-defect of a light-transmissive plate-shaped body, which is capable of inspecting the light-transmissive plate-like body while transporting the light-transmissive plate-like body along the transport path. In addition, the defect includes a pre-inspection step of illuminating the light-transmissive plate-like body and imaging the main surface of the light-transmissive plate-shaped body by a pre-image pickup unit to specify the light-transmissive plate. a position of the minute defect existing in a direction of a surface of the main surface of the body; and a fine inspection step 'aligning the position of the minute defect obtained in the pre-inspection step' along the translucent plate-like body In the surface direction, the main imaging unit moves in a direction intersecting the transport direction of the translucent plate-like body, and moves in the transport direction while facing the micro-defect, facing the micro-defect Take a picture. In the above-described fine inspection step, the method of inspecting the micro-defects of the light-transmissive plate-like body of the present invention moves and positions the main imaging unit in a direction overlapping with the direction in which the light-transmissive plate-like body is conveyed, and The micro-defect can be imaged while the main imaging unit moves at a constant speed with the translucent plate-like body along the transport path in synchronization with the movement of the minute defect entering the field of view of the main imaging unit. The method for inspecting the micro-defects of the translucent plate-like body of the present invention is in the above-described 164144.doc 201245701 fine inspection step, and a plurality of main imaging portions can be disposed along the transport path, and corresponding to the specific pre-inspection step The main imaging unit is individually moved by the position of the minute defect, and the micro defects are imaged. In the above-described fine inspection step, the method of inspecting the micro-defects of the light-transmissive plate-like body of the present invention is provided by the main imaging device provided on the upstream side of the transport path among a plurality of main imaging units along the transport path. The portion moves in response to the proximity of the specific minute defect, thereby imaging the minute defect, and the time required for the next minute defect to move toward the main imaging portion on the upstream side of the transport path and to image the minute defect When the approach is faster, the other main imaging unit provided on the downstream side of the transport path moves relative to the small defect in the approach, whereby the micro defect can be imaged. The method for inspecting minute defects of the light-transmissive plate-like body of the present invention is capable of performing both a dark field inspection and a bright field inspection in each of the above-described pre-inspection step and the above-described fine inspection step. In the above-described pre-inspection step, the method for inspecting the micro-defects of the translucent plate-like body of the present invention can be used as the pre-imaging portion to specify the surface direction of the main surface of the translucent plate-like body. In the fine inspection step, the micro-defect is imaged using the surface scan camera as the main imaging unit. In the above-described fine inspection step, the method for inspecting the micro-defects of the translucent plate-like body of the present invention is such that the surface scanning camera is oriented in a direction orthogonal to the conveying direction of the translucent plate-like body, and the surface is made Scan camera phase

164144.doc •6 S 201245701 The microscopic defect can be imaged by tilting the main surface of the light-transmitting plate-like body along the transport path. Moreover, the present invention relates to an inspection apparatus for a micro-defect of a light-transmissive plate-like body, which is an inspector for a small defect existing in a translucent plate-like body conveyed along a conveyance path, and includes: a pre-inspection machine An illuminator that illuminates the light-transmissive plate-like body and a pre-image capturing unit that images the entire surface of the light-transmissive plate-like body; and a management device that images the pre-image capturing unit The image information of the light-transmissive plate-shaped body is specific to the positional information of the minute defect existing in the surface direction of the main surface of the light-transmissive plate-shaped body; and the fine inspection machine includes: the light transmittance a illuminator for illuminating a plate-shaped body; a main imaging unit for imaging the main surface of the translucent plate-like body; and a first conveying unit for following the position information of the micro-defect specified by the pre-inspection machine The direction of the surface of the light-transmissive plate-like body is such that the main imaging unit moves in a direction intersecting the conveying direction of the translucent plate-like body; and the main imaging unit is conveyed on the translucent plate-shaped body square Move to the second transfer unit. In the apparatus for inspecting the micro-defects of the light-transmissive plate-like body of the present invention, the second transfer unit may be configured such that the main imaging unit is in the same direction as the transport direction of the translucent plate-like body and the light transmissive property. The plate body moves at a constant speed. The apparatus for inspecting the micro-defects of the translucent plate-like body of the present invention may be configured such that the main imaging unit including the main imaging unit, the first conveying unit, and the second conveying unit is along the translucent plate-like body There are a plurality of transport directions. 164144.doc 201245701 The inspection device management device for the micro-defects of the translucent plate-like body of the present invention has a function of providing a plurality of main imaging units provided along the transport path on the transport path. The main imaging unit on the upstream side moves in response to the proximity of the specific micro defect, thereby imaging the micro defect, and the next micro defect moves toward the main imaging unit on the upstream side of the transport path and the microscopic defect When the time required for the image capturing of the defect is approaching faster, the other main imaging unit provided on the downstream side of the transport path moves the minute defect with respect to the approaching, and the micro defect is imaged. The inspection apparatus for the micro-defects of the translucent plate-like body of the present invention can be provided as a pre-image pickup unit of the 4 visual field inspector and a pre-image pickup unit as a dark field inspector. In the inspection apparatus for minute defects of the light-transmissive plate-like body of the present invention, the pre-image pickup unit may be a line scan camera, and the main image pickup unit may be a surface scan camera. In the apparatus for inspecting the micro-defects of the translucent plate-like body of the present invention, the surface scanning camera may be oriented in a direction intersecting the conveying direction of the translucent plate-like body, and the translucent plate-like body may be opposed to the translucent plate-like body. The main surface is inclined along the area in which the transport path moves. According to the present invention, the position of the main imaging unit in the direction of transporting the transparent plate-like body is aligned with the position of the minute defect in the direction of the surface of the light-transmissive plate-shaped body specified by the imaging of the pre-inspection machine. The main imaging unit that moves in the direction of the intersection and moves to the position of the red position captures a small defect and moves along the direction of the transmission of the transparent plate 164144.doc 201245701. Therefore, even if the speed is not used The shutter speed also ensures sufficient exposure time, resulting in high-definition imaging of small defects and high-precision inspection of minute defects. When the main imaging unit that captures a small defect is imaged in the direction in which the translucent plate-like body Z is moved in the direction of the translucent plate-like body Z, the transmissive plate-like body is moved at a constant speed, and the main imaging unit can perform high-definition without shaking. Camera, which helps to improve the inspection accuracy of small defects. [Embodiment] The first embodiment of the inspection apparatus of the present invention will be described with reference to the accompanying drawings, but the present invention is not limited to the embodiments described below. Fig. 1 is a view showing an example of an inspection line provided with the inspection apparatus of the present invention. The inspection apparatus 1 of the present embodiment is provided along the conveyance path 3, and the conveyance path 3 is horizontally transportable such as a plate glass. The optical plate-like body 2 is composed of a plurality of general conveyors and the like. The transport path 3 is provided, for example, as one of the following series of plate glass production lines, that is, the molten glass raw material is flowed on the molten metal tank to form a sheet glass, and the sheet glass is cut into a plate of a specific size. The glass is polished and the surface is polished. The cleaning device 5 is provided on the inlet side (the left end side of FIG. 1) of the conveyance path 3 shown in FIG. 1, and the light-transmissive plate-like body 2 such as a plate glass which is conveyed in the horizontal state from the cutting step of the front stage is borrowed. After the cleaning device 5 cleans the front and back surfaces, it is horizontally conveyed to the transport path 3 in which the inspection device 1 is installed. A pre-inspection machine 6 and a fine 164144.doc 201245701 fine inspection machine 7 are disposed along the transport path 3 after the cleaning device 5, and the pre-inspection machine 6 and the fine inspection machine 7 are electrically connected to set up to control the special inspection machine. Management device 8. The pre-inspection machine 6 includes a dark-field visual inspection device 1 and a bright-field visual inspection device 11. The dark-field visual inspection device 10 is a type of dark-field inspection device for inspecting the appearance of damage such as thin lines formed on the light-transmissive plate-like body 2 in the dark field. The bright-field visual inspection device (10) is a type of bright-field inspection device which is used for the bubble portion caused by the air bubbles formed inside the light-transmitting plate-like body 2 or the surface or the back surface of the light-transmitting plate-like body 2 The pit portion or the like caused by the bubble is the main body and is inspected in the bright field. The fine inspection machine 7 includes the first inspector 12 as one of the dark field inspectors and the second inspector 13 as one of the bright field inspectors. . The dark field inspector is an inspection device that defines the positional relationship between the illuminator and the imaging unit in such a manner that the angle of illumination when the illuminator is incident on the light-transmitting plate-like body 2 is captured by an imaging unit such as a camera. In the case of the reflected light from the light-transmissive plate 2, the optical axis of the imaging portion is set in advance to an angle deviating from the angle at which the specular reflected light is obtained, and can be photographed as a dark field in which substantially reflected light does not enter. . In addition, the bright field inspector is an inspector that defines the positional relationship between the illuminator and the imaging unit in such a manner that when the imaging unit such as a camera captures light incident on the translucent plate-like body 2 from the illuminator In the case of the angle of illumination and the reflected light from the translucent plate-like body 2, the optical axis of the imaging unit is set in advance so that the angle of the specular reflected light can be obtained, and the reflected light can be substantially captured and captured as a bright field. For example, as shown in Fig. 2(a), the light-transmissive plate-like body 2 is along the transport path 3 164144.doc - ].

S 201245701 Horizontally conveyed in the direction of arrow a 1 Fu Feng T is on the entrance side of the transport path 3

The illuminator 15 that illuminates the illumination light obliquely downward is provided on the lower side of the transport path 3. In the example of the figure, a device is provided in which a columnar lens is formed at an end portion formed before the columnar body portion 15a, and the surface of the light-transmissive plate-like body 2 is self-slanted upward. At the measurement position, the illuminating illumination light is provided on the downstream side of the transport path 3 and facing the illuminator 15 toward the upstream side of the transport path 3 and obliquely downward to provide a pre-imaging unit (line scan camera) ) 16. The line scan camera 16 is configured to correspond to a dark field inspector in a configuration provided at a position where the illumination light from the illuminator 15 is reflected on the surface of the translucent plate-like body 2, The regular reflection direction Ri deviates from the position of the optical axis (the position shifted obliquely downward in FIG. 2). In the configuration shown in Fig. 2, the dark field visual inspection device 丨〇 is configured to include a illuminator 15 and a line scan camera 丨6. The line scan camera 16 used in the present embodiment has, for example, a resolution capable of discriminating a defect such as a damage formed on the right side of the light-transmitting plate-like body 2 by a size of 1 〇 μπΐχΐ〇〇 μΓη. Furthermore, the resolution is an example. Of course, it is also possible to use a line scan camera with a higher resolution. As an example of the dark-field visual inspection device 1, the optical axis of the line scan camera 16 is set when the incident angle of the illumination light of the illuminator 15 is 450 (elevation angle based on the horizontal: 45). The angle is set to 3〇. (Elevation angle based on level: 30.). Further, in the configuration in which the optical axis and the regular reflection direction R1 are arranged to form the line scan camera 16, the 'bright-field visual inspection device 11 is set as a bright-field inspection device 164144.doc 11 201245701' and is configured to include FIG. 2 ( The line aligning the camera 16 and the illuminator 丨5 with a line connecting the optical axis and the regular reflection direction as shown by the 2-point chain line of a). The illuminators 15 and the line scan camera 16 are mounted on a frame (not shown) in a state of maintaining the respective elevation angles, and the frame is along the width direction of the transport path 3 (the translucent plate-like body 2 that moves along the transport path 3) In the width direction, a plurality of the plurality of line scanning cameras 16 share a region covering a specific width in the width direction of the translucent plate-like body 2 horizontally conveyed along the transport path 3. Since the line scanning camera 16 can cover the entire width of the translucent plate-like body 2 in only one unit, the translucent plate-like body 2 can be formed with a high-definition resolution by providing a plurality of stages as described above. The entire width is taken. During the scanning of the camera 16 by the plurality of lines, the translucent plate-like body 2 can be imaged continuously, and can be spread over the entire surface of the main surface (surface) of the transparent plate-like body 2 Dark field inspection or bright field inspection. As shown in Fig. 2(a), the illumination light that is irradiated onto the surface of the light-transmitting plate-like body 2 from the illuminator 15 is only positively reflected when the surface of the light-transmissive plate-like body 2 is free from defects and is flat. A state in which no light is incident on the line scan camera 16 as a dark visual field detector to maintain a dark field of view. When there is a defect such as damage or foreign matter in the light-transmitting plate member 2, the scattered light generated here is incident on the line scan camera 6 as a dark field inspector, and is detected as a bright spot. All the defects detected in this way are those that generate scattered light, and in addition to damage, internal bubbles, attached glass chips, and the like can be detected. Further, as shown in FIG. 2(a), when there is damage on the surface side of the translucent plate-like body 2, the image is superimposed and double-imaged, and is imaged on the back of the translucent plate-like body 2 at 164144. .doc -12· 201245701 When there is damage on the face side, a ghost image that is not one of the double images can be obtained. Furthermore, when the double image is obtained, the depth of the defect can be estimated from the distance between the double images. The dark-field visual inspection device 10 is connected to the management through-hole 8 by the data wiring 17 and the bright-field visual inspection device 11 is connected to the management device 8 via the data wiring j 8 to provide a dark-field visual inspection device and a bright-field appearance. The Shishi hole, which is the result of inspection of the entire surface of the light-transmitting plate-like body 2, which is imaged and inspected, is sent to the management device 8. In the dark-field visual inspection device 10, the image of the translucent plate-like body 2 is binarized, for example, to highlight light and dark, and in the case of a dark-field image, the presence of bright spots is detected. The bright field visual inspection device 11 has a function of detecting the presence of dark spots in the case of a bright field image, and recording the coordinate positions and recording them in the memory portion. The management device 8 includes a personal computer including a memory unit, a control unit, and an arithmetic unit, and receives the result of the inspection transmitted from the dark field visual inspection device 1 and the bright field visual inspection device 11. Further, the management device 8 is connected to the fine inspection machine 7 via the control line 19, and the first checker u and the second checker 13 are controlled as described below. In the fine inspection machine 7 provided on the downstream side of the transport path 3, the first inspector ι2, which is one type of the scotopic pre-inspector, is provided in the transport path 3 as shown in Fig. 3 (4). The one side in the width direction; and the $t image (first-surface scanning camera) 2 are disposed in the width direction of the transport path 3 by 4 4 . Further, the second inspection 164l44.doc -13 - 201245701 as one of the bright field inspectors includes an illuminator 22 provided on the width direction side of the transport path 3 and a second main imaging unit (second surface) The scanning camera 23 is disposed on the other side in the width direction of the transport path. The illuminator 20 and the first surface scanning camera 21 are disposed to face each other along the width direction of the transport path 3, and the illuminator 2 is oriented obliquely downward, and is in a translucent plate shape for moving along the transport path 3. When the surface of the body 2 is irradiated with the illuminating light, the first surface scanning camera 21 is disposed obliquely downward with respect to the side of the reflected light. The illuminator 22 and the second surface scanning camera 23 are arranged to face each other along the width direction of the transport path 3, and the illuminator 22 is directed obliquely downward, and is in the translucent plate-like body 2 that moves in the transport path 3 along the transport path 3 When the surface is irradiated with the illumination light, the second-surface scanning camera 23 is disposed obliquely downward on the side toward which the reflected light is directed. The first inspector 2, which is one of the dark-field inspectors, includes an annular light-emitting portion 20a as shown in Fig. 3(a), and illuminates the surface of the translucent plate-like body 2 in a ring shape. Therefore, the bright region S1 in which the ring is illuminated and the dark region S2 on the inner side where the illumination light is not irradiated are formed on the surface of the light-transmissive plate-like body 2. The first-surface scanning camera 21 is disposed such that the elevation angle of the optical axis 21b is equal to the elevation angle of the central axis 20b of the annular light-emitting portion 20a, and the first surface scan camera 21 allows the annular light-emitting portion 20a to be used. The dark region S2 formed on the surface of the light-transmissive plate-like body 2 is disposed as an imaging region. Since the first-side scanning camera 21 has the dark area S2 as a field of view, it functions as a dark field inspector. The second inspector 13 as a kind of bright field inspector is as shown in Fig. 3(b) 164144.doc

S 201245701 generally includes a planar light-emitting portion 22a that illuminates light in a planar manner with respect to the surface of the light-transmissive plate-like body 2. Therefore, a bright region S3 that is planarly illuminated is formed on the surface of the light-transmissive plate-like body 2. The second surface scanning camera 23 has the elevation angle of the optical axis 23b at the same angle as the elevation angle of the central axis 22b of the planar light-emitting portion 22a, and the second surface scanning camera 23 allows the planar light-emitting portion 22a to be used. The bright region S3 formed on the surface of the light-transmissive plate-like body 2 is disposed as an imaging region. The second-side scanning camera 23 functions as a bright-field detector with the bright area S3 as a field of view. Fig. 4 is a view for further explaining the positional relationship between the illuminator 20 provided in the first light-emitting portion 20a of the first inspector 12 and the first-surface scanning camera 21. 4(b) shows a state in which the illumination light is incident on the surface of the translucent plate-like body 2 from the obliquely upward direction from the annular light-emitting portion 20a, and the first-surface scanning camera 21 is applied to the translucent plate-like body 2 The state of the area in focus when the surface is imaged. The first scanning camera 21 has its optical axis arranged along the width direction of the transport path 3. In other words, the first-surface scanning camera 21 is disposed obliquely downward in the width direction of the transport path 3 (the direction intersecting the transport direction of the translucent plate-like body 2), and the first-surface scanning camera 21 can focus the area. The rectangular-shaped area 21A which is elongated along the conveyance direction of the translucent plate-like body 2 is formed, and the both sides (the both sides of the width direction of the conveyance path 3. In other words, a rectangular-shaped region 21B in which the focus is not aligned is formed in both the region closer to the first-side scanning camera 21 and the farther region than the rectangular-shaped region 21a in focus. Thus, the 164144.doc •15·201245701 feature is characterized in that the rectangular region 21A of the first-surface scanning camera 21 is extended long in the conveying direction of the translucent plate-like body 2 as follows. The defect of the light-transmissive plate-like body 2 conveyed along the conveyance path 3 can be easily caught. This feature is described in detail below. The illuminator 20 and the first surface scanning camera 21 are directly housed inside the first frame member 24 shown in FIG. 3(a) while maintaining the oblique angles, and the illuminator 22 and the second surface scanning camera 23 are maintained. The state of the inclined angles is directly accommodated inside the second frame member 25 shown in Fig. 3(b). A window portion ′ is formed at the bottom of the frame members 2 4 and 2 5 , and the light-transmitting plate-like body 2 can be irradiated with illumination light and the reflected light from the light-transmissive plate-like body 2 can be imaged. In detail, as shown in FIG. 5, the first inspector 12 of the present embodiment includes four first main imaging units 30 (hereinafter, referred to as "main imaging unit 7L 30" in the present specification). The first transport unit 27 and the second transport unit 28 including the illuminator and the first frame member 24 of the first surface scan camera 21 are supported. The second inspector 13 includes, in detail, four second main imaging units 3 as shown in FIG. 5 (hereinafter, referred to as a main imaging unit (four) in the present specification), and the like includes freely supporting the above-described illumination. The first transfer portion 27 and the second transfer portion of the second frame member 25 of the second surface scanning camera 23 are provided. The equal-surface = tracing cameras 21 and 23 preferably have a high resolution of 8 to ι (four) per pixel and can capture a high-definition image. The first conveyance unit 27 of the inspection unit 12 is configured such that a door frame having a size that spans the entire length of the conveyance path 3 in the width direction is attached to the width direction of the conveyance path 3 of the transport I64144.doc 201245701. As shown in FIG. 6 (4), the inner side of the frame member 34 of the elongated box direct-moving unit 33 as the frame member 34 is engaged with the sliding portion of the screw portion 35 of the screw portion 35, and the frame member 34 is rotated along the frame member 34. The length direction shift (four), the β-member 34-end (four) is provided with a drive source such as a ship motor, and the screw portion 35 can be rotationally driven in the forward and reverse directions, and the rotation speed of the screw portion 35 rotated by adjusting the clothes motor is adjusted. With respect to the rotation direction, the moving direction of the sliding member 36 (the moving direction along the width direction of the conveying path 3) and the moving speed can be adjusted. The second moving portion 28 is attached to the w moon moving member 36. The second transporting portion has the same structure as the transporting portion 27, but the linear motion unit 3, which is shorter than the linear motion unit 33, has the same structure as the linear motion unit μ, and includes the frame member 34Α and the screw. The part 35Α and the sliding member are all over. The linear motion unit 33 that constitutes the second transport unit 28 is formed on the downstream side of the transporting direction of the light-transmissive plate-like body 2, and is formed in the sliding member 36^the second transporting portion 28 so as to face the direction parallel to the transporting direction. The first frame member is mounted such that the illuminator 20 and the first surface scanning camera 21 are obliquely downward as shown in FIG. 3 so as to be shorter than the first conveying portion 27 and in the sliding member 36 of the second conveying portion 28. twenty four. The above-described linear motion units 33 and 33 are commercially available in the art, and are available in the form of a feed screw type and using a servo motor and displaying a moving speed of 1000 mm/sec. Scan the camera 21 for sufficient speed to move. With the above configuration, the illuminator 20 and the first 164144.doc • 17-201245701 surface scanning camera 21 can be moved along the width direction of the transport path 3 from one end to the other along the first transport unit 27 (in other words, The one side of the translucent plate-like body 2 in the horizontal state in which the conveyance path 3 is conveyed is moved to the other side. Further, the illuminator 20 and the first surface scanning camera 2 can be linearly moved in the conveying direction of the translucent plate-like body 2 along the second conveying portion 28 from the base end side to the tip end side. The translucent plate-like member 2 to be inspected in the inspection apparatus of the present embodiment is, for example, a size of 2500 mm x 2200 mm and a thickness of about 7 mm, which is known as a glass for a display device. The length of the first conveying portion 27 is formed to cover the width of the sheet glass to be inspected. Of course, the size of the translucent plate-like body 2 has various sizes depending on the use of the display device, and since there are various sizes in other application fields, the first transfer is determined according to the width of the target translucent plate-like body. The length of the department. The speed at which the translucent plate-like member 2 is transported along the transport path 3 can be any. For example, the panel glass for the display device is about 15 to 20 m/min, and the length of the second transport portion 28 can be set to be the first. The frame member 24 or the second frame member 25 is moved by a length of about 1 mm to 150 mm. In the configuration shown in Fig. 5, the second transport unit 28 is located at the central portion in the longitudinal direction of the first transport unit 27, and the state of the neutral position is assumed to be the initial state. The first transport unit 28 is configured to move from the neutral position to the width direction of the translucent plate-like body 2, and returns to the neutral position when the first-surface scanning camera 21 performs imaging as described below, and stands by to prepare for the next transfer. The second movement β is the 'initial state', and the first surface of the second conveyance unit 28 scans the camera 21

164144.doc S 201245701 When it is disposed in the central portion of the first conveying unit 27, the moving distance to the defect is smaller than that in the case of being disposed on the end side of the first conveying unit 27, so that the movement can be moved faster. In terms of aspects, it is ideal. The main imaging unit 31 provided in the second inspector 13 includes the first transport unit 27 and the second transport unit 28 in the same manner as the main imaging unit 3 described above, but in the main imaging unit 31, The difference is that the frame member 25 including the illuminator 22 and the second surface scanning camera 23 is attached to the second conveying unit 28. In the configuration of the present embodiment, the illuminator 20 and the first surface scanning camera 21 provided in the first inspector 2 are provided as a dark field inspector, and the illuminators 22 and the second in the second inspector 13 are provided. The surface scan camera 23 is provided as a bright field inspector. The position detecting sensor 3 for detecting the position of the front end of the translucent plate-like body 2 is provided on the upstream side along the transport path 3 with respect to the installation position of the four main imaging units 3A constituting the first inspector 12 8. A position detecting sensor for detecting the position of the front end of the translucent plate-like body 2 on the upstream side along the transport path 3 with respect to the installation position of the four main imaging units 31 constituting the second inspector 13 39. The position detecting sensor 38 is provided to grasp the position of the front end of the translucent plate-like body 2 which is close to the first inspector 12, and the position detecting sensor 39 is adapted to grasp the penetration with respect to the second inspector 13. The position of the front end of the light plate body 2 is set. When the proximity detection sensor 38 detects the proximity of the translucent plate 2, it is determined that the first main imaging unit 3 is scanned by the first surface of the camera 21 at 164144.doc 19-201245701. Since the positional relationship of the position of the front end of the plate-like body 2 is as follows, the movement of the first-side scanning camera 21 can be started by operating the first main imaging unit 30 as follows. Further, as shown in FIG. 1, the first inspector 12 is connected to the control device 14 with the display device via the connection line 12a, and the second inspector 13 is connected to the control device with the display device via the connection line 13a. The device 14 can display an image captured by the first surface scanning camera 21 of the first inspection device 12 and an image captured by the second surface scanning camera 23 of the second inspection device 13 in the display device. When the defect in the translucent plate-like body 2 is inspected by the inspection apparatus 1 of the present embodiment, the translucent plate-like body 2' horizontally conveyed along the conveyance path 3 is in the pre-inspection machine 6. First, dark field inspection is performed on the entire width direction of the translucent plate-like body 2 by the dark-field visual inspection device 10, and position detection such as damage is performed, and secondly, a clear-field appearance checker 1 1 is used for the translucent plate shape. The bright field inspection is performed over the entire width direction of the body 2, and position detection of defects such as bubbles is performed. The dark-field visual inspection device 丨〇 and the image captured by the bright-field visual inspection device 11 are transmitted to the management device 8, and the coordinate position of the defect along the surface of the transparent plate-like body 2 is specified in the management device 8 The coordinate position of the memory defect in the memory portion of the management device 8. The management device 8 controls the operations of the first inspector 12 and the second inspector 13 of the fine inspection machine 7 in accordance with the coordinate position of the defect of the translucent plate-like body 2. As an example, as shown in FIG. 5, when there is a defect K at any position of the translucent plate-like body 2, the management device 8 discriminates the dark-field appearance checker 10 and the bright-field appearance checker by image processing. Which of the U is the camera?

164144.doc •20· S 201245701 Image, and its coordinate position (coordinate position in the X direction from the front end toward the rear end of the translucent plate-like body 2, and the width of the self-transmissive plate-like body 2) The coordinate position of the γ direction of one end of the direction along the width direction). The second transport unit 28 of the first main imaging unit 3 that is in the initial position of the central portion of the first transport unit 27 is placed in the neutral position of the central portion of the transport path 3 based on the coordinate position information in the specific XY direction. Moving in the width direction causes the focus position of the first side scanning camera 21 to move toward the coordinate position of the gamma direction 'and the position is aligned with the predetermined position through which the defect κ passes. Since the position detecting sensor 38 provided on the upstream side of the first inspector 12 detects the passage of the position of the front end of the translucent plate-like body 2, the defect with the translucent plate-like body 2 passes through the first side. The timing of the focus position of the scanning camera 21 is matched, and the first frame member 24 is moved at a constant speed along the transport speed of the translucent plate-like body 2 along the second transport unit 28. During this movement, the light-emitting portion 20a from the ring illuminates the periphery of the defect κ, and the camera 21 is scanned by the first side and imaged by the dark field. Although the first-surface scanning camera 21 has a high resolution, since the distance corresponding to the length of the second conveying unit 28 is moved at a constant speed in synchronization with the defect along the conveying path 3, even if it is not a high-speed shutter speed, it can be normally used. The shutter speed does not cause underexposure and does not cause the portion of the defect K to be imaged with a high resolution pair. In addition, for the illumination light of the illuminator 20, it is not necessary to increase the brightness to a desired level or more. The brightness of the camera can be performed within the range of the normal shutter speed. In the case where the transport speed formed on the light-transmitting plate member 2 is, for example, 18 m / 164144.doc • 21 - 201245701 minutes (300 mm / sec), it is assumed that the resolution of the fine machine is set to 10 Μιη/pixel can allow the condition of image jitter of 1 pixel to be better, and in the state where the camera is stopped, the shutter time of 0.033 msec is necessary for the advance of 1〇μηΐ2 time, so that 1 is required. Extremely high speed shutter speeds below /30000 seconds. On the other hand, if the first-side scanning camera 2 is followed, the speed difference of the jitter of the pixel can be allowed to be 0.15 m/min (=2.5 mm) even if the shutter speed is set to 1/250. / sec) becomes 〇.83%. When the shutter speed is set to 1/1000, the difference of 3.33% is allowed in 〇 6 m/min (=1 〇 mm/sec). Therefore, it can be seen that even if the extremely high shutter speed of 1/3 sec or less is not used as described above, the shutter speed of the present embodiment can be used, for example, 1/250 to 1/1 〇〇. Take a picture in 〇 seconds. Moreover, the aperture of the first side scanning camera can be selected from about 4 to 8. If the aperture is large, the depth of field is deep, and the area of focus is wider, but if the aperture is larger, it is necessary to compensate for insufficient illumination. The shutter speed is slower, or the illumination illumination is increased. If the shutter speed is slower, the allowable amplitude of the above speed deviation is narrowed. In addition, when the illumination is added to the illumination of the southern part of the illumination, the weight of the device is increased. Therefore, the inertia force during driving is large, and the rigidity of the driving device must be increased. Since the device is thick, it is preferably configured to achieve balance. The shutter speed is achieved. Further, when the defect K passes through the region of the first inspector 12 and the translucent plate-like body 2 approaches the region of the second inspector 13, the position detecting sensor 39 detects the approach of the translucent plate-like body 2. If the light transmissive plate 2 passes the position detecting sensor

164144.doc -22- S 201245701 39 observation position, the positional relationship between the first main imaging unit η and the translucent plate-like body 2 is determined, and the first second transfer unit 28 is inspected as described above. The positioning operation performed in the device 12 is similarly moved and the portion of the defect κ is imaged by the bright field of view by the second surface scanning camera 23. In the second surface sweep, the camera 23 has a high resolution. However, since the distance corresponding to the length of the second transport unit 28 is also moved at a constant speed in synchronization with the defect 沿着 along the transport path 3, even a non-high speed shutter speed is used. With the shutter speed, and even if the f-light is not enhanced to the required level, the image can be imaged with high resolution without causing the defect to be partially shaken. By the above operation, the inspection method of both the dark field of view and the bright field can be used to image the image without causing the portion of the defect K to be shaken, so that various damages, bubbles, foreign matter, and the like can be finely applied. Defect κ is detected. Furthermore, the images captured by the first surface scanning camera 21 and the second surface scanning camera 23 are respectively displayed on the image display device provided in the control device 14, so that the operator can perform fine by visual observation or the like. Determine the presence or absence of the defect K. FIG. 5 illustrates an example of an inspection method in which only one defect κ exists in the light-transmitting plate-like body 2, and a plurality of defects κ are formed in the light-transmitting plate-like body 2 based on FIG. 7 below. An example of the inspection method will be described. Fig. 7U) shows that the first inspector 12 including four main imaging units 3 provided with the frame member 24 including the first side scanning camera 21 is not defective as shown in Fig. 7(a). ~Κ52 Translucent plate-like body 2 is gradually connected to 164144.doc -23- 201245701. When the translucent plate-like body 2 passes through the pre-inspection machine 6 of the front stage, the defects K1 to K5 have been inspected as 'the surface of the translucent plate-like body 2 which is conveyed horizontally at a fixed speed along the conveying path 3. In the χ coordinate of the face direction, the respective coordinate position information of the defects K1 to K5 is grasped by the management device 8. The coordinate positions of the defects K1 to K5 are sequentially specified in accordance with the distance from the front end position of the light-transmitting plate-like body 2. As shown in Fig. 7(a), "If the translucent plate-like body 2 approaches the first main imaging unit 30' of the first inspector 12, it is omitted in Fig. 7(a), but is shown in Fig. 5 The position detecting sensor 38 detects the position of the front end of the translucent plate-like body 2, so that the management device 8 that grasps the position of the defect K1 operates the first main imaging unit 30, and makes the first transfer unit 27 The second transport unit 28 is moved in the x direction so that the focus area of the first surface scan camera 21 is aligned to the same coordinate position as the Y coordinate position of the defect K1. The management device 8 grasps the X coordinate position of the defect K1, and thus causes the first frame member 24 and the translucent plate-like body along the second conveying portion 28 at the time point when the defect phantom reaches the focus region of the first-side scanning camera 21. 2 Simultaneously moving synchronously, as shown in FIG. 7(b), the defect K1 can be imaged with high precision by the first-surface scanning camera 21. After the image of the defect K1, the defect K2 approaches the first main imaging unit 30, so that the second conveying unit 28 is moved along the γ direction along the first conveying unit 27, so that the focus area of the first side scanning camera 21 is as shown in FIG. The position shown in (c) is aligned with the same coordinate as the Y coordinate of the defect K2. The management device 8 grasps the X coordinate position of the defect K2, and thus arrives at the first side scanning camera 21 at the defect K2.

164144.doc • 24_ S 201245701 The time point of the focus area 'The second frame 24 is moved synchronously with the light-transmitting: plate-like body 2 along the second transport unit 28, and the first-side scanning camera 21 can be used. The defect K2 is imaged finely. After the defect 〖2, the defect K3 is close to the first main camera unit 3, but the defect Κ2 is close to the defect Κ3, and when the management device determines that the following main camera unit 3G cannot follow the follow-up action, the management device 8 makes the The main imaging unit 30 operates. The second main imaging unit 30' moves the second transport unit 28 in the x direction along the first transport unit 27, thereby aligning the first-surface scan camera 21 with the same coordinates as the defect Κ3. The management device 8 grasps the coordinate position of the defect Κ3, and thus causes the first frame member 24 and the calendering along the second conveying portion 28 at the time point when the defective ruler 3 reaches the focus region of the first-surface scanning camera 21. The plate-like body 2 is synchronously moved at the same speed as shown in Fig. 7(d). The defect Κ3 can be imaged with high precision using the first-surface scanning phase (4). After the defect Κ3 is photographed, the defect rule 4 approaches the second main camera unit 30, but the defect Κ3 is close to the defect Κ4, and when the management device 8 determines that the following main camera unit 30 cannot follow the follow-up action, the management device 8 makes The third main camera unit 30 operates. The third main imaging unit 3G' moves the second transport unit 28 in the x direction along the first transport unit 27 to position the first surface scan camera 21 at the same coordinates as the defect Κ4. The management device 8 grasps the coordinate position of the defect Κ4, and thus makes the first frame along the second transfer 164144.doc •25·201245701 the delivery portion 28 at the time point when the defect [4] reaches the focus area of the first side scan camera 21. The member 24 moves in synchronization with the translucent plate-like body 2 at a constant speed, and as shown in Fig. 7 (4), the defect K4 can be imaged with high precision by the first-surface scanning camera 21. After the photographing of the defect K4, the defect K5 is close to the first main camera unit 30, but the defect K4 and the defect K5 are sufficiently separated, and when the management device 8 determines that the follow-up action of one main camera unit 30 is rushed, the management device 8 makes the One main imaging unit 30 operates. The first main imaging unit 30' moves the second transport unit 28 in the Y direction along the first transport unit 27, and positions the first surface scan camera 21 at the same coordinates as the Y coordinate of the defect K5. The management device 8 grasps the coordinate position of the defect K5, and thus causes the first frame member 24 and the translucent plate shape along the second conveying portion 28 at the time point when the defect reaches the focus region of the first surface scanning camera 21. The body 2 is synchronously moved at a constant speed. As shown in FIG. 7(f), the defect Κ5 can be imaged with high precision by the first surface scanning camera 21. After the image of the defect Κ5, the first side scanning camera is restored to the initial position of the center of the first conveying unit 27, and the inspection of the next defect is prepared. As described above, the management device 8 is driven by the first main imaging unit 3 〇 as the main body, and only when the first main imaging unit 30 cannot follow the situation according to the defect and the coordinate position is determined. The second main camera is π 30, the third main camera unit 3 〇, and the fourth main camera unit are sequentially operated to perform defect inspection. According to the moving speed of the translucent plate-like body 2 conveyed along the transport path 3, the first to fourth main imaging units 3 are sequentially used to perform the defect inspection 164144.doc 26 s 201245701, so that even When the light-transmissive sheet-like body 2 is formed with a plurality of defects K1 to K5, as long as the inspection apparatus 1 of the present embodiment is used, it is possible to perform high-definition imaging while obscuring all the defects. Therefore, it is possible to inspect the light-transmitting plate member 2 having a plurality of defects K1 - K5 with high precision. In addition, in the defects K1 to K5, even when a plurality of defects are extremely close to each other in the transport direction of the translucent plate-like body 2, a plurality of main imaging units 30 can be operated. It is inspected with high precision without barriers. Further, in the inspection apparatus of the present embodiment, since the number of operations of the first main imaging unit 30 is large, there is a possibility that the first main imaging unit 3 first fails during the repeated use period. In this case, if the first main imaging unit 30 malfunctions and stops, the image will not be transmitted. Therefore, the failure of the first main imaging unit 3 can be immediately grasped. In this case, the first The two main imaging units 3 are operated as the first main imaging unit 3 as the first main imaging unit 3'. [Second Embodiment] Fig. 8 shows a second embodiment of the inspection apparatus according to the present invention. In the configuration of the present embodiment, the following embodiment is shown, that is, in the first inspector 42 provided in the transport path 3. Two sets of the first main imaging units 50 and 5 1 ' are arranged in the width direction, and two units are arranged in four rows, and eight main imaging units are provided in total. In the first inspector 42 shown in FIG. 8, the main imaging unit 50 facing the front right side in the transport direction has the same configuration as the main imaging unit 30, but the difference is that the length of the first transport unit 27A is formed as Transfer path 3 of 164144.doc -27- 201245701 The length of about half of the width direction. In the first inspector 42 shown in FIG. 8, the main imaging unit 51 that faces the front left side in the transport direction is similar to the above-described main imaging unit 3, but differs in that it is mounted in the following manner, that is, The length of one transport portion 27B is formed to be about half of the width direction of the transport path 3, and the second transport portion 28A extends to the side opposite to the transport direction of the translucent plate-like body 2 with respect to the first transport portion 27B. The mode is at right angles to the first conveying portion 27B. The first transporting sections 27A and 27B and the second transporting section 28 include the direct acting units 33 and 33 shown in Fig. ,, and are the same as those of the above-described embodiment. In the configuration of the embodiment shown in FIG. 8, the length of the first conveying portions 27A and 27B is set to be about one-half of the conveying path 3, and the second conveying unit 28 that moves along the first conveying portions 27A and 27B is shortened. With the moving distance of 28A, if the moving speed of the second conveying portions 28 and 28A is the same as that of the first embodiment, the width direction of the transparent plate-like member 2 can be made based on the width direction of the transparent plate-like member 2 The structure of the first embodiment described above moves for a short period of time (about half of the time). Therefore, the followability of the second conveyance parts 28 and 28A with respect to the defects formed in the translucent plate-like body 2 is improved. In addition, even if it is applied to the translucent plate-like body having a width of about twice as large as the width of the translucent plate-like member 2, it is the same as the conveying portion of the first embodiment. The moving speed also ensures the same followability, so it can handle the inspection of defects of the larger transparent plate. Furthermore, in the above embodiment, regarding the first inspector 12 and the second

164144.doc -28 · S 201245701 Inspector 13 has been described as an example in which four main imaging unit cores or main imaging unit 31 are provided, but the number of main imaging units 3Q and 31 may be set arbitrarily. In the case of inspecting the translucent plate-like body having few defects during manufacture, the number of installations may be small. Depending on the case, it is also possible to perform inspection for setting the main imaging unit of four or more. The inspector provided in the pre-inspection machine 6 is preferably both a dark-field visual inspection device ι and a bright-field visual inspection device 11, but only one of them may be provided. The inspector provided in the fine inspection machine 7 is preferably both the first inspector 12 and the second inspector 13, but only one of them may be provided. Fig. 9 is a view showing another configuration example of the surface scanning cameras 21 and 23 provided in the inspection apparatus of the present invention, and shows the movement of the surface scanning cameras 21 and 23 with respect to the translucent plate-like body 2 described above. The configuration in which the region is disposed obliquely downward is a configuration example in which the first main imaging unit (surface scanning camera) 60 is disposed vertically downward with respect to the surface of the swaying region of the translucent plate-like body 2. This surface scanning camera 60 is shown as an example of a configuration in which a defect inspection is performed as a bright field inspector or a dark field inspector even when arranged vertically downward. As in the above embodiment, one or more of the group of the first surface scanning camera 21 and the illuminator 20 or the group of the second surface scanning camera 23 and the illuminator 22 may be provided in the embodiment. The replacement is performed in the structure. A half mirror member 61 is disposed above the light transmissive plate member 2, and a surface scanning camera 60 is disposed above the half mirror member 61 such that the optical axis is vertically downwardly disposed on the side of the half mirror member 61. A illuminator 62 is provided on the square side. 164144.doc -29- 201245701 In the configuration of this example, the illumination light incident on the half mirror member 61 from the illuminator 62 is incident perpendicularly on the surface of the translucent plate-like body 2, and is passed through the surface scanning camera 60 via the surface scanning camera 60. The half mirror member 61 captures the upward reflected light from the translucent plate-like body 2, and the surface of the translucent plate-like body 2 is imaged by the surface scanning camera 6 to perform the translucent plate-like body 2. Visual field inspection or dark field inspection. When the surface scan camera 6 is used for the bright field inspection, the illumination field of the uniform brightness is irradiated from the field of view of the opposite scan camera 60 from the illuminator 62. In the case of dark field inspection, the illuminator 62 illuminates the circular illumination light, and captures the darker region of the center of the ring illumination light as the field of view of the surface scanning camera 60. As shown in Fig. 9, by using the half mirror member 6''', the image of the light-transmissive plate-like body 2 can be imaged by scanning the camera 6 with the optical axis perpendicular to the surface of the light-transmissive plate-like body 2. In the case of the surface scanning camera 6 所示 shown in Fig. 9, the focus of the surface scanning camera 60 is in focus, and the entire surface of the photographic area is in focus, so that high-definition imaging with high resolution can be performed. As in the configuration of the above-described embodiment, the orientation of the surface scanning cameras 21 and 23 may be obliquely downward, or may be set to any one of the vertical downward directions as in the case of FIG. 9, and is not limited in the present invention. The orientation of the illumination or the orientation of the camera. The present invention has been described in detail with reference to the specific embodiments thereof, and it is understood that various modifications and changes can be made without departing from the scope and spirit of the invention. The present application is based on the present application, which is incorporated herein by reference. Industrial Applicability 164144.doc 30-201245701 The technology of the present invention can be widely applied to inspection of glass for display devices, glass for optical use, medical glass, glass for construction, glass for vehicles, and other ordinary glass products. Method and device. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic view showing the overall configuration of an inspection apparatus according to a first embodiment of the present invention. 2(a) and 2(b) show an example of an optical system as a dark visual field inspector provided in the inspection apparatus, and Fig. 2(a) shows an example of a detection state of the back reflection image. 2(b) is an explanatory view showing an example of a detection state of a real image. FIGS. 3(a) and 3(b) are diagrams showing an optical system of a fine inspection machine installed in the inspection apparatus, and FIG. 3(a) Fig. 3(b) is a view showing an example of the detection state of the bright field optical system. 4(a) and 4(b) show the arrangement relationship between the illuminator of the fine inspection machine installed in the inspection apparatus and the main imaging unit, and Fig. 4(a) is a front view, and Fig. 4(b) is a plan view. Fig. 5 is a plan view showing the overall configuration of a fine inspection machine not provided in the inspection apparatus. 6(a) and 6(b) show an example of a linear motion unit constituting a transport unit provided in the inspection apparatus, and Fig. 6(a) is a configuration diagram of a linear motion unit constituting the first transport unit, Fig. 6 (b) is a configuration diagram of a linear motion unit constituting the second transport unit. 7(a) to 7(g) show an example of a state in which a plurality of defects of the light-transmitting plate-shaped body are observed while being used in the fine inspection device 164144.doc • 31·201245701 provided in the inspection device. 7(a) to 7(g) are diagrams each showing a state in which the inspector follows each defect of the dispersion. Fig. 8 is a plan view showing a partial configuration of a fine inspection machine provided in an inspection apparatus according to a second embodiment of the present invention. Fig. 9 is a view showing the configuration of another example of the optical system provided in the inspection apparatus of the present invention. [Description of main components] 1 Inspection device 2 Translucent plate 3 Transport path 5 Cleaning device 6 Pre-checker 7 Fine inspection machine 8 Management device 10 Dark-field visual inspection device 11 Visual field visual inspection device 12 First inspection device 12a Connection line 13 Second checker 13a Connection line 14 Control device 15 Illuminator 16 Pre-camera (line scan camera) 164144.doc • 32-

S 201245701 17 Data wiring 18 Data wiring 19 Control line 20 Illuminator 21 First main imaging unit (first surface scanning camera) 21A Rectangular area 21B Rectangular area 22 Illuminator 23 Second main imaging unit (second scanning camera 24 first frame member 25 second frame member 27 first conveyance portion 21A first conveyance portion 27B first conveyance portion 28 second conveyance portion 28A second conveyance portion 30 first main image pickup unit 31 second main image pickup unit 33 straight Actuating unit 33A Direct acting unit 42 First checker 50 Main imaging unit 51 Main imaging unit 60 First main imaging unit (face scanning camera) K, K1 to K5 Minor defect 164144.doc -33-

Claims (1)

201245701 VII. Patent application scope: 1_ A method for inspecting a micro-defect of a light-transmissive plate-like body, which is for transporting a light-transmissive plate-like body along a conveyance path while inspecting a minute defect existing in the light-transmitting plate-like body Further, the method further includes: a pre-inspection step of irradiating the light-transmissive plate-like body with light and using a pre-image pickup unit to image the main surface of the light-transmissive plate-like body, and the light-transmissive plate is particularly characterized a position of the minute defect existing in a direction of a surface of the main surface of the body; and a fine inspection step of aligning the position of the minute defect obtained in the pre-inspection step along the translucent plate-like body In the surface direction, the main imaging unit is moved in a direction intersecting the transport direction of the translucent plate-like body and moved in the transport direction while facing the micro-defect. Camera. In the above-described fine inspection step, the main imaging unit is placed in a direction opposite to the direction in which the light-transmissive plate-like body is conveyed, in the method of inspecting the minute defects of the light-transmissive plate-like body of claim 1 Moving and positioning, the main imaging unit is moved at a constant speed with the translucent plate-like body along the transport path in synchronization with the movement of the minute defect entering the field of view of the main imaging unit, facing the microscopic The defect is taken. 3. The method of inspecting a small defect of a light-transmitting plate-like body according to claim 1 or 2, wherein in the fine inspection step, 'a plurality of main imaging portions are disposed along the transport path, and corresponding to the pre-inspection step The main imaging unit is individually moved by the position of the specific minute defect, and the micro defects are imaged. The method of inspecting the micro-defects of the light-transmissive plate-like body of claim 3, wherein in the fine inspection step, the plurality of main imaging units disposed along the transport path are disposed in the above The main imaging unit on the upstream side of the path moves in response to the proximity of the specific micro defect, thereby imaging the micro defect, and the main imaging unit on the upstream side of the lower path and the upstream side of the transport path When the time required to move and image the minute defect is earlier than that, the other main imaging unit disposed on the downstream side of the transport path moves relative to the micro defect in the proximity 'by the micro defect Take a picture. 5. The method of inspecting a micro-defect of a light-transmitting plate-like body according to any one of items 1 to 4, wherein a dark field inspection and a bright field are performed in each of the pre-inspection step and the fine inspection step Check both. The method of inspecting a micro-defect of a translucent plate-like body according to any one of claims 1 to 5, wherein in the pre-inspection step, the transmissive plate is specified by using a line scan camera as the pre-image pickup unit The position of the minute defect existing in the surface direction of the main surface of the body is used to image the minute defect using the surface scanning camera as the main imaging unit in the above-described fine inspection step. 7. The method of inspecting a minute defect of a light-transmitting plate-like body according to claim 6, wherein in the fine inspection step, the surface scanning camera is oriented in a direction orthogonal to a conveying direction of the light-transmitting plate-shaped body The surface scan camera tilts the area where the main surface of the light-transmissive plate-like body moves along the transport path to image the minute defect. 8. An apparatus for inspecting a micro-defect of a light-transmissive plate-like body, which is for inspecting a micro-defect existing in a translucent plate-like body conveyed along a transport path of 164144.doc 201245701, and comprising: a pre-inspection The machine includes an illuminator that illuminates the light-transmissive plate-like body and a pre-image capturing unit that images the entire main surface of the light-transmissive plate-shaped body, and a management device that images the pre-image capturing unit Position information of the micro-defects present in the surface direction of the main surface of the translucent plate-like body, and the fine inspection machine' includes: a illuminator for irradiating light; a main imaging unit that images the main surface of the translucent plate-like body; and a first conveying unit that follows the position information of the micro-defect specified by the pre-inspection machine The direction of the surface of the light-transmissive plate-like body moves the main imaging unit in a direction intersecting the transport direction of the translucent plate-like body; and the transfer of the main imaging unit to the translucent plate-shaped body Move to the second transfer unit. 9. The apparatus for inspecting a micro-defect of a light-transmissive plate-like body according to claim 8, wherein the second conveying unit has the capability of causing the main imaging unit to be in the same direction as the translucent plate-like body. In the direction, it moves at a constant speed with the above-mentioned translucent plate-like body. 10. The apparatus for inspecting a micro-defect of a translucent plate-like body according to claim 8 or 9, wherein the main imaging unit including the main imaging unit, the first conveying unit, and the second conveying unit is along the light transmissive property There are a plurality of conveying directions of the plate-shaped body. 11. The apparatus according to claim 10, wherein the management device of the 164144.doc 201245701 has a function of setting a plurality of main imaging units along the transport path. On the upstream side of the transport path: the proximity of the micro-defect corresponding to the main imaging unit moves, thereby imaging the micro-defect, and the main imaging unit on the upstream side of the lower-micro defect and the upstream side of the transport path The time required to move and image the minute defect is such that the other main imaging unit disposed on the downstream side of the transport path moves relative to the minor defect in the approach, and the minute defect is performed. Camera. The apparatus for inspecting a micro-defect of a light-transmitting plate-like body according to any one of claims 8 to 8, wherein the pre-inspection machine includes a pre-image portion as a bright field inspector and a pre-frame as a dark field inspector Camera department. 13. The apparatus for inspecting a micro-defect of a light-transmitting plate-like body according to any one of the items 8 to 12, wherein the pre-image pickup unit is a line scan camera, and the main image pickup unit is a face scan camera. 14. The apparatus for inspecting a micro-defect of a light-transmissive plate-like body according to any one of claims 8 to 13, wherein the surface scanning camera faces in a direction opposite to a conveying direction of the light-transmitting plate-shaped body, and is opposite The main surface of the light-transmissive plate shape is inclined so as to move along the transport path. 164144.doc