CN103575234B - 3-dimensional image measurement apparatus - Google Patents
3-dimensional image measurement apparatus Download PDFInfo
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- CN103575234B CN103575234B CN201210252608.4A CN201210252608A CN103575234B CN 103575234 B CN103575234 B CN 103575234B CN 201210252608 A CN201210252608 A CN 201210252608A CN 103575234 B CN103575234 B CN 103575234B
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Abstract
The invention discloses a kind of 3-dimensional image measurement apparatus, comprise measuring table, movable optical head, three-dimensional computations module, mobile module and Corrective control module.Movable optical head comprises spectrophotometric unit, projection module, image extraction module and indicating module.Measuring table is in order to carry object under test.Projection module is in order to produce stripe pattern light to object under test.Image extraction module comprises multiple taking unit, and the most in different directions or angle is towards object under test, and each taking unit is in order to shoot the reflected image reflected to form under stripe pattern light through object under test.Indicating module forms alignment mark in order to launch alignment light to object under test.Corrective control module drives mobile module to move movable optical head according to alignment mark selectivity.
Description
Technical field
The invention relates to a kind of 3-dimensional image measurement apparatus, and in particular to the optical arrangement in a kind of 3-dimensional image measurement apparatus.
Background technology
In printed circuit board (PCB) processing procedure, the application of two dimension automatic optical detector (AOI) is the most ripe.By single or multiple image-taking device, coordinating trichroism angular light, two-dimensional detection technology can carry out putting part detection, puts part quality so as to management and control.But, in recent years owing to detecting the lifting of demand, three-dimensional measurement technology is widely accepted the most gradually, at replacing conventional two-dimensional automatic optics inspection technology or overcoming it to limit and be not enough.In measuring the method for 3D shape of object under test part, known common measuring method such as uses moire fringes (Moire Pattern) to project, projection module is utilized stripe pattern light to be projected on object under test part, further based on phase-shift method, object under test part the image that reflects and the 3D shape obtaining object under test part.
According to phase-shift method, first obtain multiple reflected image under stripe pattern light, and under the form considering stripe pattern light and the altitudes measuring plane, described reflected image can be analyzed to learn the 3D shape of object under test part.
Summary of the invention
For the problem solving known technology, one purpose of the present invention is to provide a kind of 3-dimensional image measurement apparatus, it utilizes projection module produce stripe pattern light and be projected on object under test via spectrophotometric unit, and utilize multiple image extraction module to carry out image capture from the different directions such as the surface of object under test and oblique upper or angle respectively, and along with sequential adjusts the phase place of the stripe pattern light that projection module produces, and then according to phase-shift method, produced reflected image is calculated under out of phase the threedimensional model learning object under test by the image extraction module of above-mentioned multiple different angles.
Owing to the image extraction module of 3-dimensional image measurement apparatus is not photographed via reflecting mirror measuring targets, in addition to the impact therefore brought in time can reducing light path acting surface and reduce vibration, element cost more can be reduced.Additionally, the 3-dimensional image measurement apparatus of the present invention also sets up indicating module, and the location of object under test and the curved calculating of plate of object under test can be carried out by para-position light that indicating module is projected.
An aspect of of the present present invention is to provide a kind of 3-dimensional image measurement apparatus, and it comprises measuring table, movable optical head, mobile module and Corrective control module.Measuring table is in order to carry an object under test.Wherein, movable optical head comprises spectrophotometric unit, projection module, image extraction module, indicating module, three-dimensional computations module, and spectrophotometric unit is positioned at above this measuring table.Projection module is in order to produce a stripe pattern light, and this stripe pattern light is projected to this object under test through this spectrophotometric unit.Image extraction module comprises multiple taking unit, the plurality of taking unit is positioned at above this measuring table the most in different directions or angle is towards this object under test, and each taking unit is in order to shoot the reflected image reflected to form under this stripe pattern light through this object under test.Indicating module is positioned at above this measuring table and sloping floor is to this measuring table, and this indicating module forms an alignment mark in order to launch an alignment light to this object under test.Three-dimensional computations module is in order to calculate the 3-dimensional image about this object under test according to the plurality of reflected image.Mobile module is operatively connected this movable optical head, and in order to this movable optical head mobile.Corrective control module is in order to according to this alignment mark in the plurality of reflected image, and selectivity drives this mobile module with this movable optical head mobile.
According to one embodiment of the invention, image extraction module is to comprise multiple first taking unit and one second taking unit.Multiple first taking units are positioned at above this measuring table and sloping floor is to this measuring table, and each described first taking unit is in order to shoot the oblique reflected image reflected under this stripe pattern light through this object under test.Second taking unit through spectrophotometric unit by this object under test of vertical angle shot, to produce the reflected image of the forward reflected under this stripe pattern light through this object under test.
According to one embodiment of the invention, when this 3-dimensional image measurement apparatus is in a three-dimensional measurement pattern, this three-dimensional computations module calculates this 3-dimensional image about this object under test in order to the reflected image according to described oblique reflected image and this forward.
According to one embodiment of the invention, when this 3-dimensional image measurement apparatus is in a two dimension photograph mode, this second taking unit is utilized to produce a reflected image bidimensional image as this object under test of this forward.
According to one embodiment of the invention, this spectrophotometric unit this stripe pattern light being projected to this object under test has an optical axis, and the plurality of first taking unit is to arrange around this optical axis.
According to one embodiment of the invention, projection module comprises light source, grating and grating shifter.Grating, between this light source and this spectrophotometric unit, is converted to this stripe pattern light in order to the light produced by this light source.Grating shifter laterally moves relative to this light source in order to activate this grating, so as to changing a phase place of this stripe pattern light.
According to one embodiment of the invention, wherein this projection module comprises a light source and a grating.Grating, between this light source and this spectrophotometric unit, is converted to this stripe pattern light in order to the light produced by this light source.Wherein this mobile module makes this movable optical head flatly move relative to this object under test, so as to equally changing the phase place that this stripe pattern light is incident upon on this object under test.
According to one embodiment of the invention, this alignment mark comprises a single loci, and this indicating module comprises a laser emitting elements in order to project this alignment mark.
According to one embodiment of the invention, this alignment mark comprises a multiple spot to bit patterns, and this indicating module comprises multiple laser emitting elements in order to project this alignment mark.
According to one embodiment of the invention, this Corrective control module chooses in the plurality of reflected image at least one, judge among this reflected image chosen, whether this alignment mark deviates a precalculated position, and selectivity drives this mobile module with this movable optical head mobile whereby.
According to one embodiment of the invention, when this alignment mark deviates this precalculated position, this Corrective control module relative to the offset direction in this precalculated position and a deviation distance and then drives this mobile module according to this alignment mark.
Another aspect of the present invention is to provide a kind of 3-dimensional image measurement apparatus, comprising measuring table, movable optical head, three-dimensional computations module, mobile module and Corrective control module.Measuring table is in order to carry an object under test.Movable optical head comprises spectrophotometric unit, projection module, image extraction module and indicating module.Movable optical head is positioned at above this measuring table.Spectrophotometric unit is positioned at above this measuring table.Projection module is in order to produce a stripe pattern light, and this stripe pattern light is projected to this object under test through this spectrophotometric unit.Image extraction module comprises multiple taking unit, the plurality of taking unit is positioned at above this measuring table the most in different directions or angle is towards this object under test, and each taking unit is in order to shoot the reflected image reflected to form under this stripe pattern light through this object under test.Indicating module is positioned at above this measuring table and sloping floor is to this measuring table, and this indicating module forms an alignment mark in order to launch an alignment light to this object under test.Three-dimensional computations module is in order to calculate the 3-dimensional image about this object under test according to described reflected image.Mobile module is operatively connected this movable optical head, in order to this movable optical head mobile.The plurality of reflected image is integrated into an integration image according to the plurality of reflected image this alignment mark respective by Corrective control module, and is formed a correcting image at least partially by capturing in this integration image.
According to one embodiment of the invention, image extraction module is to comprise multiple first taking unit and one second taking unit.First taking unit is positioned at above this measuring table and sloping floor is to this measuring table, and each described first taking unit is in order to shoot the oblique reflected image reflected under this stripe pattern light through this object under test.Second taking unit through this spectrophotometric unit by this object under test of vertical angle shot, to produce the reflected image of the forward reflected under this stripe pattern light through this object under test.
According to one embodiment of the invention, when 3-dimensional image measurement apparatus is in three-dimensional measurement pattern, this three-dimensional computations module is in order to calculate this 3-dimensional image about this object under test according to described oblique reflected image.
According to one embodiment of the invention, when this 3-dimensional image measurement apparatus is in two dimension photograph mode, this second taking unit is utilized to produce a reflected image bidimensional image as this object under test of this forward.
Accompanying drawing explanation
For the above and other purpose of the present invention, feature, advantage can be become apparent with embodiment, being described as follows of appended accompanying drawing:
Figure 1A illustrates the schematic diagram according to 3-dimensional image measurement apparatus a kind of in one embodiment of the invention；
Figure 1B is the schematic diagram of a kind of 3-dimensional image measurement apparatus in illustrating according to another embodiment of the present invention；
Fig. 2 illustrate according in one embodiment of the invention when object under test generation plate is curved the schematic diagram of 3-dimensional image measurement apparatus；
Fig. 3 illustrates in the embodiment of Fig. 2 the schematic diagram of one of them reflected image produced by 3-dimensional image measurement apparatus when object under test generation plate is curved；And
Fig. 4 is illustrated in another embodiment the schematic diagram of reflected image produced by 3-dimensional image measurement apparatus when object under test generation plate is curved；
The schematic diagram of a kind of 3-dimensional image measurement apparatus in illustrating according to another embodiment of the present invention shown in Fig. 5；
Fig. 6 is illustrated in another embodiment the schematic diagram of each taking unit in image extraction module, indicating module and object under test；
What Fig. 7 illustrated is the schematic diagram of the reflected image taken by each taking unit；And
The integration image schematic diagram for each reflected image depicted in Fig. 8.
[main element symbol description]
100: 3-dimensional image measurement apparatus
120: measuring table
130: spectrophotometric unit
140: movable optical head
142: the first taking units
144: the second taking units
150: ring-like secondary light source module
152: luminescence unit
160: projection module
162: light source
164: grating
166: grating shifter
170: three-dimensional computations module
180: indicating module
182: alignment mark
190: Corrective control module
192: mobile module
200: object under test
202: precalculated position
Detailed description of the invention
To disclose multiple embodiments of the present invention below with accompanying drawing, as clearly stated, the details in many practices will be explained in the following description.It should be appreciated, however, that the details in these practices is not applied to limit the present invention.It is to say, in some embodiments of the present invention, the details in these practices is non-essential.Additionally, for the sake of simplifying accompanying drawing, some known usual structures and element will illustrate in the accompanying drawings in the way of simple signal.
Referring to Figure 1A, it illustrates the schematic diagram according to 3-dimensional image measurement apparatus 100 a kind of in one embodiment of the invention.As shown in Figure 1A, 3-dimensional image measurement apparatus 100 comprises measuring table 120, movable optical head 140, three-dimensional computations module 170, Corrective control module 190 and mobile module 192.Wherein, in this embodiment, movable optical head 140 comprises the inner members such as spectrophotometric unit 130, image extraction module (it comprises taking unit 142 and taking unit 144), projection module 160 and indicating module 180.
Measuring table 120 is in order to carry object under test 200.
Spectrophotometric unit 130 is positioned at above this measuring table 120, in reality is applied, spectrophotometric unit 130 can comprise a polarization spectroscope (Polarization Beam Splitter, PBS), polarization spectroscope can optionally be reflected according to the polarised direction of light or allow its straight line to penetrate.
Projection module 160 is in order to produce stripe pattern light L1, and stripe pattern light L1 is projected to object under test 200 through spectrophotometric unit 130.In this embodiment, projection module 160 comprises light source 162, grating 164 and grating shifter 166.Grating 164 is the eyeglass with multiple shading striped, and shading striped is spaced specific pitch, and the light L0 in order to be produced by light source 162 is converted to stripe pattern light L1.Projection module 160 further includes grating shifter 166 in order to translate grating 164, makes grating 164 move along the direction vertical with shading striped, forms the various phase places of stripe pattern light L1 whereby.
In this embodiment, image extraction module comprises multiple taking unit (two the first taking units 142 as depicted in Figure 1A and second taking unit 144), the plurality of taking unit 142,144 are positioned at above measuring table 120 the most in different directions or angle is towards object under test 200, each taking unit 142,144 in order to shoot the reflected image R1, R2 reflected under stripe pattern light L1 through object under test 200.In this embodiment, each taking unit 142,144 in image extraction module can prolong three-dimensional axle (such as axis of orientations such as X, Y, Z) movement by relative measurement platform 120, obtains the image of each angle of object under test 200 whereby.
As shown in Figure 1A, image extraction module comprises multiple first taking unit 142, is two the first taking units 142, but is not limited in this example.First taking unit 142 lays respectively at above measuring table 120 and sloping floor is to measuring table 120, and each first taking unit 142 is in order to shoot the oblique reflected image R1 reflected under stripe pattern light L1 through object under test 200.
Spectrophotometric unit 130 reflexes to stripe pattern light L1 of object under test 200 and has optical axis AX, and above-mentioned first taking unit 142 is to arrange to arrange around optical axis AX.Such as, in other embodiments, image extraction module also can comprise arrange around optical axis AX three the first taking units 142 (can lay respectively at 0 degree, 120 degree with 240 degree), four the first taking units 142 (can lay respectively at 0 degree, 90 degree, 180 degree with 270 degree) or the first taking unit 142 cincture optical axis AX respectively of other numbers fifty-fifty or non-arrange fifty-fifty.
In addition, image extraction module additionally comprises the second taking unit 144, second taking unit 144 is positioned at above spectrophotometric unit 130 and plumb floor is to measuring table 120 and spectrophotometric unit 130, second taking unit 144 shoots object under test 200 in order to penetrate spectrophotometric unit 130, to produce the reflected image R2 of the forward reflected under stripe pattern light L1 through object under test 200.
By above-mentioned multiple taking units 142,144, the image extraction module in this disclosure of documents can collect reflected image R1, R2 from each different directions or angle simultaneously.
In addition, in the embodiment of Figure 1A, the second taking unit 144 is in above spectrophotometric unit 130 and plumb floor is to measuring table 120 and spectrophotometric unit 130, and projection module 160 is in the side of spectrophotometric unit 130, stripe pattern light L1 changes behind direction through spectrophotometric unit 130 refraction and is projected on object under test 200, but the position that arranges of second taking unit 144 of the present invention and projection module 160 is not limited thereto.In another embodiment, second taking unit 144 and projection module 160 to arrange position interchangeable, as shown in the embodiment of Figure 1B, second taking unit 144 may be disposed at the side of spectrophotometric unit 130 and changes direction by vertical angle shot object under test 200 via spectrophotometric unit refraction, projection module 160 is then arranged at above spectrophotometric unit 130 and plumb floor is to measuring table 120, stripe pattern light L1 that projection module 160 produces penetrates spectrophotometric unit 130 and is projected on object under test 200, in Figure 1B illustrated embodiment the second taking unit 144 and projection module 160 location swap is set after also can reach identity function.
In actual application, (such as three-dimensional measurement pattern, two dimension photograph mode, the curved correction mode of plate etc.) under different capture patterns, the 3-dimensional image measurement apparatus 100 of the present embodiment may utilize taking units 142 different in image extraction module, and 144 complete.
Such as, under three-dimensional measurement pattern, in an embodiment, 3-dimensional image measurement apparatus 100 mainly utilizes reflected image R1 produced by two oblique taking units 142 in image extraction module.Three-dimensional computations module 170 receives above-mentioned reflected image R1, in order to calculate the 3-dimensional image about object under test 200 according to the reflected image R1 from each different directions or angle.For further, along with grating shifter 166 is in order to translate grating 164, and form the various phase angles of stripe pattern light L1, each taking unit 142 in image extraction module, 144 capture the multiple oblique image R1 that object under test 200 reflects to form in the various phase angles of this stripe pattern light L1 further, through phase shift measurement method, just can get corresponding each reflected image R1 phase information under various phase angles.
Three-dimensional computations module 170, according to each reflected image R1 phase information under various phase angles, can calculate the 3-dimensional image learning object under test 200.Must supplement be, three-dimensional computations module 170 calculates the 3-dimensional image about object under test 200 according to the reflected image R1 from each different directions or angle simultaneously, its three-dimensional computations has and preferably judges speed and precision, and can detect the three-dimensional configuration of object under test 200.Applying on element test, be conducive to discovering the shape defect of object under test 200, such as side-facing depressions or oblique breach etc., this capture being known single angle cannot be discovered.
Being to illustrate to be in three-dimensional measurement pattern when 3-dimensional image measurement apparatus 100 in above-described embodiment, three-dimensional computations module 170 is in order to calculate the 3-dimensional image about object under test 200 according to described oblique reflected image R1.
In Another Application, 3-dimensional image measurement apparatus 100 in this disclosure of documents also can be used on the application situation of two dimension photography, under 3-dimensional image measurement apparatus 100 is in two dimension photograph mode, the second taking unit 144 can be directly utilized and produce the reflected image R2 bidimensional image as object under test 200 of forward, two dimension photography demand can be completed, in addition, also can be referring concurrently to the first taking unit 142 that in image extraction module, two other is oblique, to obtain the side bidimensional image of object under test 200 under different capture angle.
In addition, 3-dimensional image measurement apparatus 100 can further comprise ring-like secondary light source module 150, ring-like secondary light source module 150 can comprise multiple luminescence unit 152, diagram illustrates two luminescence units 152, but the present invention is not limited thereto, in reality is applied, ring-like secondary light source module 150 can comprise three, four or above luminescence unit 152.Multiple luminescence units 152 are arranged in ring-like mode and towards object under test 200, light can be provided to object under test 200 by different angles.Especially under two dimension photograph mode, projection module 160 does not the most produce stripe pattern light L1 that three-dimensional measurement is used, it is therefore necessary to use ring-like secondary light source module 150 as floor light, as the light source of two dimension photograph mode.
In actual application, the object under test 200 measured by 3-dimensional image measurement apparatus 100 can comprise circuit board, optics sheet material or other substrates, and the above-mentioned sheet material in object under test 200 is probably due to external stress or gravity impact occur the phenomenon of sheet material bending.The curved phenomenon of above-mentioned plate frequently results in 3-dimensional image measurement apparatus 100 and declines at the accuracy measuring object under test 200, such as there is the skew in vertical direction because plate is curved because of object under test 200, make on object under test 200 position of scheduled measurement not in image extraction module in optimal capture Jiao's section of each taking unit 142,144.
Therefore, 3-dimensional image measurement apparatus 100 further includes indicating module 180, and indicating module 180 is positioned at above measuring table 120 and sloping floor is to measuring table 120, and indicating module 180 forms alignment mark in order to launch alignment light L2 to object under test 200.
See also Fig. 2, Fig. 2 illustrate according in one embodiment of the invention when object under test 200 occurs plate curved the schematic diagram of 3-dimensional image measurement apparatus 100.Compareing Figure 1A and Fig. 2, it is assumed that Figure 1A is schematically shown as schematic diagram when object under test 200 does not occurs plate curved, in the example of Figure 1A, alignment light L2 that indicating module 180 is launched substantially falls in object under test 200 centre the most simultaneously.And in shown in Fig. 2, when object under test 200 occurs plate curved, alignment light L2 that indicating module 180 is launched falls in the position of object under test 200 side the most to the left because object under test 200 is bent upwards.
Now, Corrective control module 190 can choose the plurality of reflected image R1, among R2, at least one group reflected image judges, correct the curved phenomenon of plate of object under test 200 the most according to this, in an embodiment, under the curved correction mode of plate, Corrective control module 190 is mainly chosen the second taking unit 144 and is produced the reflected image R2 process of forward.See also Fig. 3, Fig. 3 and illustrate in the embodiment of Fig. 2 the schematic diagram of 3-dimensional image measurement apparatus 100 one of them reflected image produced when object under test 200 occurs plate curved.In this embodiment, the reflected image R2 of the forward that the reflected image depicted in Fig. 3 produces with the second taking unit 144 illustrates, but the present invention is not limited thereto.
As shown in Figure 3, it is assumed that when object under test 200 do not exist plate curved time, the predetermined precalculated position 202 will irradiated in figure 3 of alignment light L2 that indicating module 180 is launched.But, because object under test 200 occurs plate curved, make alignment mark 182 that alignment light L2 that indicating module 180 launches produces out of position 202.
Corrective control module 190 judges alignment mark 182 the most out of position 202 according to the reflected image R2 (as shown in Figure 3) chosen, when this alignment mark deviates this precalculated position, this Corrective control module 190 drives mobile module 192 according to offset direction (for left shift in this example) and the deviation distance Ds in this relative precalculated position 202 of alignment mark 182, mobile module 192 can move the position of movable optical head 140 according to this, and then change each taking unit 142, 144 position relative with object under test 200 and distances, until the alignment mark 182 that indicating module 180 is formed on object under test 200 returns in the range of precalculated position 202.
Additionally, in the embodiment shown in Fig. 3, alignment mark 182 comprises single loci, in this example, indicating module 180 can comprise laser emitting elements in order to project this alignment mark 182, but the alignment mark 182 of this disclosure of documents is not limited with single loci.
Seeing also Fig. 4, it is illustrated in another embodiment the schematic diagram of reflected image produced by 3-dimensional image measurement apparatus 100 when object under test 200 occurs plate curved.In the embodiment of Fig. 4, alignment mark 182 comprises multiple spot to bit patterns, to improve alignment mark and the accuracy of the curved correction of plate.In this example, alignment mark 182 comprises three loci arranged in equilateral triangle mode.In this example, indicating module 180 can further include three laser emitting elements in order to project this alignment mark 182, and bit patterns is not arranged in equilateral triangle mode and is limited by the multiple spot that indicating module 180 produces, and can use the various to bit patterns of tool equality.
In sum, 3-dimensional image measurement apparatus utilizes projection module produce stripe pattern light and be projected on object under test via spectrophotometric unit, and utilize multiple image extraction module to carry out image capture from the different directions such as the surface of object under test and oblique upper or angle respectively, and along with sequential adjusts the phase place of the stripe pattern light that projection module produces, and then according to phase-shift method, the image extraction module of above-mentioned multiple different angles produced reflected image calculates under out of phase the threedimensional model learning object under test.
In above-described embodiment, 3-dimensional image measurement apparatus 100 is to utilize grating shifter 166 to make grating 164 shifted laterally to form the various phase places of stripe pattern light L1, but the present invention is not limited thereto.In another embodiment, as shown in Figure 5, it is the schematic diagram of a kind of 3-dimensional image measurement apparatus 102 in illustrating according to another embodiment of the present invention, grating shifter 166 it is not provided with in 3-dimensional image measurement apparatus 102, this mobile module 192 makes movable optical head 140 phase measuring targets 200 flatly move, so as to equally changing the phase place that stripe pattern light L1 is incident upon on object under test 200, also can reach similar effect.
Additionally, in above-described embodiment, the main position utilizing mobile movable optical head 140, and then change each taking unit 142,144 position relative with object under test 200 and distance, carry out correcting plate curved, but the present invention is not limited thereto.In another embodiment, can be in the case of not moving movable optical head 140, with the image deviation that computing mode amending plates is curved.Referring to Fig. 6, Fig. 7 and Fig. 8, Fig. 6 is illustrated in another embodiment the schematic diagram of each taking unit 142,144 in image extraction module, indicating module 180 and object under test 200.
In the example of Fig. 6, the level height of object under test 200 because of the curved phenomenon of plate by lower broken line position bring up to top solid line height.Therefore, each taking unit 142, the alignment mark 182 taken by 144 will deviate from original precalculated position 202.But, because of each taking unit 142, the position set by 144 is different from angle, therefore, each taking unit 142, the offset direction of the alignment mark 182 taken by 144 will be the most different from degrees of offset, such as by turning right respectively, left side offsets with upper right side.
What Fig. 7 illustrated is each taking unit 142, the schematic diagram of reflected image P1, P2 and P3 taken by 144, as it is shown in fig. 7, each taking unit 142, the reflected image P1 taken by 144, alignment mark 182a among P2 Yu P3,182b Yu 182c lays respectively at the diverse location in each image.
Therefore, reflected image P1, P2 and P3 can be integrated on a virtual plane by Corrective control module 190.The integration image schematic diagram for reflected image P1, P2 and P3 depicted in Fig. 8.As shown in Figure 8, can be by by reflected image P1, alignment mark 182a in P2 Yu P3,182b Yu 182c alignment and congruence is on same coordinate, the integration image P4 that three integrates can be formed, Corrective control module 190 is according to reflected image P1, P2 Yu P3 this alignment mark 182a respective, 182b Yu 182c is integrated into and integrates image P4, and then Corrective control module 190 can be formed correcting image by integrating acquisition in image P4 at least some of (such as acquisition three occurs simultaneously partly or captures three and joins collection part).Consequently, it is possible to Corrective control module 190 just can be in the case of not moving movable optical head 140, with the image deviation that computing mode amending plates is curved.
Owing to the image extraction module of 3-dimensional image measurement apparatus is not photographed via reflecting mirror measuring targets, in addition to the impact therefore brought in time can reducing light path acting surface and reduce vibration, element cost more can be reduced.Additionally, the 3-dimensional image measurement apparatus of the present invention also sets up indicating module, and the location of object under test and the curved calculating of plate of object under test can be carried out by para-position light that indicating module is projected.
Although the present invention is disclosed above with embodiment; so it is not limited to the present invention, any is familiar with this those skilled in the art, without departing from the spirit and scope of the present invention; when being used for a variety of modifications and variations, therefore protection scope of the present invention is when being defined in the range of standard depending on appending claims.
Claims (15)
1. a 3-dimensional image measurement apparatus, it is characterised in that comprise:
One measuring table, in order to carry an object under test；And
One movable optical head, is positioned at above this measuring table, and this movable optical head comprises:
One spectrophotometric unit, is positioned at above this measuring table；
One projection module, in order to produce a stripe pattern light, this stripe pattern light is through this light splitting list
Unit is projected to this object under test；
One image extraction module, comprises multiple taking unit, and the plurality of taking unit is positioned at this measuring table
Top is the most in different directions or angle is towards this object under test, and each taking unit is in order to shoot this bar graph
The reflected image reflected to form through this object under test under case light；And
One indicating module, is positioned at above this measuring table and sloping floor is to this measuring table, this instruction
Module forms an alignment mark in order to launch an alignment light to this object under test；
One three-dimensional computations module, in order to calculate about the one or three of this object under test according to the plurality of reflected image
Dimension image；
One mobile module, is operatively connected this movable optical head, in order to this movable optical head mobile；And
One Corrective control module, in order to according to this alignment mark in the plurality of reflected image, and selectivity
Drive this mobile module with this movable optical head mobile.
3-dimensional image measurement apparatus the most according to claim 1, it is characterised in that this image extraction module
It is to comprise:
Multiple first taking units, are positioned at above this measuring table and sloping floor is to this measuring table, each
Described first taking unit in order to shoot under this stripe pattern light through this object under test reflect one oblique
Reflected image；And
One second taking unit, this second taking unit through this spectrophotometric unit by this determinand of vertical angle shot
Body, to produce the reflected image of the forward reflected under this stripe pattern light through this object under test.
3-dimensional image measurement apparatus the most according to claim 2, it is characterised in that when this three-dimensional shadow
As measurement apparatus is in a three-dimensional measurement pattern, this three-dimensional computations module is in order to according to described oblique back projection
As calculating this 3-dimensional image about this object under test.
3-dimensional image measurement apparatus the most according to claim 2, it is characterised in that when this three-dimensional shadow
As measurement apparatus is in a two dimension photograph mode, this second taking unit is utilized to produce the reflected image of this forward
A bidimensional image as this object under test.
3-dimensional image measurement apparatus the most according to claim 2, it is characterised in that by this light splitting list
Unit is projected to this stripe pattern light of this object under test and has an optical axis, and the plurality of first capture list
Unit is to arrange around this optical axis.
3-dimensional image measurement apparatus the most according to claim 1, it is characterised in that this projection module
Comprise:
One light source；
One grating, between this light source and this spectrophotometric unit, in order to the light conversion produced by this light source
For this stripe pattern light；And
One grating shifter, laterally moves relative to this light source in order to activate this grating, so as to changing this striped
One phase place of pattern light.
3-dimensional image measurement apparatus the most according to claim 1, it is characterised in that this projection module
Comprise:
One light source；And
One grating, between this light source and this spectrophotometric unit, in order to the light conversion produced by this light source
For this stripe pattern light；
Wherein, this mobile module makes this movable optical head flatly move relative to this object under test, so as to equivalence
Ground changes the phase place that this stripe pattern light is incident upon on this object under test.
3-dimensional image measurement apparatus the most according to claim 1, it is characterised in that this alignment mark
Comprising a single loci, this indicating module comprises a laser emitting elements in order to project this alignment mark.
3-dimensional image measurement apparatus the most according to claim 1, it is characterised in that this alignment mark
Comprising a multiple spot to bit patterns, this indicating module comprises multiple laser emitting elements in order to project this register guide
Show.
3-dimensional image measurement apparatus the most according to claim 1, it is characterised in that this Corrective control
Module chooses in the plurality of reflected image at least one, it is judged that this register guide among this reflected image chosen
Showing and whether deviate a precalculated position, selectivity drives this mobile module with this movable optical head mobile whereby.
11. 3-dimensional image measurement apparatus according to claim 10, it is characterised in that when this para-position
Indicating and deviate this precalculated position, this Corrective control module is inclined relative to the one of this precalculated position according to this alignment mark
From direction and a deviation distance and then drive this mobile module.
12. 1 kinds of 3-dimensional image measurement apparatus, it is characterised in that comprise:
One measuring table, in order to carry an object under test；And
One movable optical head, is positioned at above this measuring table, and this movable optical head comprises:
One spectrophotometric unit, is positioned at above this measuring table；
One projection module, in order to produce a stripe pattern light, this stripe pattern light is through this light splitting list
Unit is projected to this object under test；
One image extraction module, comprises multiple taking unit, and the plurality of taking unit is positioned at this measuring table
Top is the most in different directions or angle is towards this object under test, and each taking unit is in order to shoot this bar graph
The reflected image reflected to form through this object under test under case light；
One indicating module, is positioned at above this measuring table and sloping floor is to this measuring table, this instruction
Module forms an alignment mark in order to launch an alignment light to this object under test；And
One three-dimensional computations module, in order to calculate about this object under test according to the plurality of reflected image
One 3-dimensional image；
One mobile module, is operatively connected this movable optical head, in order to this movable optical head mobile；And
One Corrective control module, according to the plurality of reflected image this alignment mark respective by the plurality of instead
Projection picture is integrated into an integration image, and is formed a correction shadow at least partially by capturing in this integration image
Picture.
13. 3-dimensional image measurement apparatus according to claim 12, it is characterised in that this capture mould
Block is to comprise:
Multiple first taking units, are positioned at above this measuring table and sloping floor is to this measuring table, each
Described first taking unit in order to shoot under this stripe pattern light through this object under test reflect one oblique
Reflected image；And
One second taking unit, this second taking unit through this spectrophotometric unit by this determinand of vertical angle shot
Body, to produce the reflected image of the forward reflected under this stripe pattern light through this object under test.
14. 3-dimensional image measurement apparatus according to claim 13, it is characterised in that when this three-dimensional
Image measuring device is in a three-dimensional measurement pattern, and this three-dimensional computations module is in order to according to described oblique reflection
Image calculates this 3-dimensional image about this object under test.
15. 3-dimensional image measurement apparatus according to claim 13, it is characterised in that when this three-dimensional
Image measuring device is in a two dimension photograph mode, utilizes this second taking unit to produce the back projection of this forward
As the bidimensional image as this object under test.
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